EP4328336A1 - Composition de décapage de nickel et son application - Google Patents

Composition de décapage de nickel et son application Download PDF

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Publication number
EP4328336A1
EP4328336A1 EP23193144.5A EP23193144A EP4328336A1 EP 4328336 A1 EP4328336 A1 EP 4328336A1 EP 23193144 A EP23193144 A EP 23193144A EP 4328336 A1 EP4328336 A1 EP 4328336A1
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EP
European Patent Office
Prior art keywords
nickel
article
stripping solution
treated
nickel stripping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP23193144.5A
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German (de)
English (en)
Inventor
Ching-Hsiang Hsu
Jia-Hao Hu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UWIN NANOTECH CO Ltd
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UWIN NANOTECH CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from TW111132110A external-priority patent/TW202409303A/zh
Application filed by UWIN NANOTECH CO Ltd filed Critical UWIN NANOTECH CO Ltd
Publication of EP4328336A1 publication Critical patent/EP4328336A1/fr
Pending legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22BPRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B3/00Extraction of metal compounds from ores or concentrates by wet processes
    • C22B3/04Extraction of metal compounds from ores or concentrates by wet processes by leaching
    • C22B3/06Extraction of metal compounds from ores or concentrates by wet processes by leaching in inorganic acid solutions, e.g. with acids generated in situ; in inorganic salt solutions other than ammonium salt solutions
    • C22B3/08Sulfuric acid, other sulfurated acids or salts thereof
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22BPRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B23/00Obtaining nickel or cobalt
    • C22B23/04Obtaining nickel or cobalt by wet processes
    • C22B23/0407Leaching processes
    • C22B23/0415Leaching processes with acids or salt solutions except ammonium salts solutions
    • C22B23/043Sulfurated acids or salts thereof
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22BPRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B7/00Working up raw materials other than ores, e.g. scrap, to produce non-ferrous metals and compounds thereof; Methods of a general interest or applied to the winning of more than two metals
    • C22B7/006Wet processes
    • C22B7/007Wet processes by acid leaching
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/10Etching compositions
    • C23F1/14Aqueous compositions
    • C23F1/16Acidic compositions
    • C23F1/28Acidic compositions for etching iron group metals
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/46Regeneration of etching compositions

Definitions

  • the present disclosure relates to a composition for stripping metal and, in particular, to a composition for stripping nickel and application thereof.
  • Lithium-ion polymer batteries commonly used in electronic products currently use a variety of metal composite materials as the positive electrodes, and most of them are high-nickel materials, such as high-nickel ternary materials. Since the mineral resources on the earth are not inexhaustible, under the consideration of sustainable development, how to recycle the metal components from electronic waste, such as waste batteries, has gradually become one of the most important work links in the industry.
  • Concentrated sulfuric acid method (acid immersion method) has low efficiency and usually requires extremely high temperature and pressure.
  • the use of other strong oxidants in acid immersion makes the operating environment harsh and will erosion organic matter, such as plastics.
  • Highly toxic hydrogen sulfide gas is easily produced to cause chemical oxygen demand (COD) of wastewater rise.
  • COD chemical oxygen demand
  • Using these methods to obtain nickel metal often sacrifices environmental sustainability or the health and safety of operators, and does not meet the 12th item "Responsible Consumption and Production" among the 17 Sustainable Development Goals (SDGs) of the United Nations, which is not ideal in terms of safety and environmental protection.
  • the present disclosure attempts to provide an environmentally friendly nickel stripping technology to recycle/recover nickel metal resources more efficiently.
  • the present invention provides a novel nickel stripping composition, a nickel stripping solution comprising the composition and a method for recycling nickel metal using the stripping solution.
  • the recycling efficiency of the nickel metal of the article treated by the composition is greatly improved, and the reaction can be carried out at normal temperature or normal pressure, so the harm to the operator and the natural environment is relatively low.
  • a nickel stripping composition comprises 10 to 40 wt% sodium sulfite, 10 to 40 wt% sodium bisulfate, 10 to 40 wt% sodium thiosulfate and 10 to 40 wt% trisodium citrate, wherein the weight percentages are based on a total weight of the nickel stripping composition.
  • the nickel stripping composition comprises 25 to 40 wt% sodium sulfite, 10 to 25 wt% sodium bisulfate, 25 to 40 wt% sodium thiosulfate and 10 to 25 wt% trisodium citrate.
  • a nickel stripping solution comprises 10 to 50 grams of the nickel stripping composition described above, 300 to 800 ml of sulfuric acid and a solvent per liter.
  • the solvent is water.
  • the sulfuric acid is 50% sulfuric acid.
  • a recycling method of nickel metal comprises the following steps: (A) providing an article to be treated; (B) soaking the article to be treated in the nickel stripping solution described above to proceed with a reaction between the article and the nickel stripping solution; (C) filtering a product of the step (B) to obtain an eluate; and (D) performing a reduction reaction on the eluate to obtain nickel metal.
  • the article to be treated in the step (A) includes nickel-containing powder and an object having a nickel-plated surface.
  • a weight ratio (solid-to-liquid ratio) of the article to be treated to the nickel stripping solution in the step (B) is between 1:1 and 1:15.
  • the nickel-containing powder includes crushed batteries, nickel ore, slag and high-entropy alloys.
  • a reaction temperature of the step (B) is maintained at 20 to 40°C, and a weight ratio of the article to be treated to the nickel stripping solution is between 1:1 and 1:5.
  • a reaction temperature of the step (B) is maintained at 60 to 90°C, and a weight ratio of the article to be treated to the nickel stripping solution is between 1:5 and 1:15.
  • Nickel is a metal commonly used in batteries in current various electronic products and electric vehicles. Its development is changing with each passing day, and the speed of replacing the old with the new is very fast, which also produces a large amount of battery waste. Using the nickel stripping composition of the present invention to treat battery waste can strip nickel metal from the waste more effectively and improve recycling efficiency.
  • the nickel stripping composition of the present invention comprises several specific salts mixed in specific proportions.
  • the nickel stripping composition comprises 10 to 40 wt% sodium sulfite (Na 2 SO 3 ), 10 to 40 wt% sodium bisulfate (NaHSO 4 ), 10 to 40 wt% sodium thiosulfate (Na 2 S 2 O 3 ) and 10 to 40 wt% trisodium citrate (Na 3 C 6 H 5 O 7 ).
  • the weight percentages are based on the total weight of the nickel stripping composition.
  • the nickel stripping composition comprises 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39 or 40 wt% sodium sulfite.
  • the nickel stripping composition comprises 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39 or 40 wt% sodium bisulfate.
  • the nickel stripping composition comprises 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39 or 40 wt% sodium thiosulfate.
  • the nickel stripping composition comprises 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39 or 40 wt% trisodium citrate.
  • sodium sulfite, sodium bisulfate, sodium thiosulfate and trisodium citrate are combined in a weight percentage selected from the exemplary embodiments disclosed above.
  • the nickel stripping composition comprises 25 to 40 wt% sodium sulfite (Na 2 SO 3 ), 10 to 25 wt% sodium bisulfate (NaHSO 4 ), 25 to 40 wt% sodium thiosulfate (Na 2 S 2 O 3 ) and 10 to 25 wt% trisodium citrate (Na 3 C 6 H 5 O 7 ).
  • the nickel stripping composition of the present invention contains specific proportions of sodium salts, such as sodium sulfite, sodium bisulfate, sodium thiosulfate and trisodium citrate.
  • sodium salts such as sodium sulfite, sodium bisulfate, sodium thiosulfate and trisodium citrate.
  • the nickel stripping composition of the present invention can be used with sulfuric acid to make a nickel stripping solution.
  • the nickel stripping solution contains 10 to 50 grams of the above-mentioned nickel stripping composition, 300 to 800 milliliters (ml) of sulfuric acid, and a solvent per 1 liter.
  • the nickel stripping solution contains 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, or 50 grams of nickel stripping composition.
  • the nickel stripping solution contains 300, 350, 400, 450, 500, 550, 600, 650, 700, 750 or 800 ml of sulfuric acid.
  • the above-mentioned solvent is preferably water, and the sulfuric acid can be 25% or 50% (v/v) sulfuric acid.
  • the present invention further provides a method for recovering nickel metal using the nickel stripping solution described above.
  • the step and process can refer to FIG. 1 : (A) first, providing an article to be treated; then, (B) soaking the article to be treated in the nickel stripping solution; (C) filtering to obtain a filtrate (eluate) and residue; and (D) performing a reduction reaction on the eluate to obtain nickel metal.
  • the article to be treated of the present invention includes the object having the nickel-plated surface and the nickel-containing powder.
  • the object having the nickel-plated surface is, for example, a nickel-plated copper sheet.
  • the nickel-containing powder is obtained by pulverizing nickel-containing articles, such as waste batteries, nickel ore, slag, high-entropy alloys, and the like.
  • Waste batteries are, for example, lithium-ion polymer batteries, whose anode materials include but are not limited to high-nickel ternary polymers such as nickel-cobalt lithium manganese or nickel-cobalt lithium aluminate, in which the main component is the nickel to be recovered in the present invention. After screening these ternary waste batteries, they can be destroyed by known physical methods (such as crushing, pulverizing, etc.) to obtain lithium-ion waste battery powder.
  • the soaking step (B) shown in FIG. 1 is achieved by placing the article to be treated in step (A) in a bath comprising the aforementioned nickel stripping solution.
  • the article to be treated is preferably immersed in the nickel stripping solution for a predetermined time, so that the article to be treated reacts with the stripping solution.
  • the predetermined time varies according to the amount of the article to be treated, the reaction conditions and its actual needs, and generally ranges from a few seconds to 8 hours. The operator can adjust freely.
  • the nickel in the article to be treated will remain in the solution in the form of ions during the soaking process, and can be recovered in the subsequent reduction reaction.
  • the soaking process is an exothermic reaction, so it can be carried out directly at atmospheric pressure and room temperature without additional pressure and heating.
  • the temperature can be controlled between 20°C and 90°C, and the formulation of the present invention can maintain a certain reaction rate under this temperature.
  • the ratio (solid-to-liquid ratio) of the article to be treated to the stripping liquid is preferably 1:1 to 1:15.
  • the stripping solution completely submerged the article to be treated.
  • vibration, stirring, etc. can be used to shake the object to be treated in the aforementioned bath to facilitate the reaction, and the rotation speed is preferably between 0 and 500 rpm.
  • step (B) Suggested operating parameter ranges for step (B) are listed in Table 1 below: Table 1 step (B) operating range Operating range (1) Operating range (2) Temperature (°C) 20-40 60-90 Time seconds - 1 hour 2-8 hours solid-to-liquid ratio (g:mL) (1:1) - (1:5) (1:5) - (1:15) Rotation speed (rpm) 0-300 300-500 Nickel stripping composition content* (g/L) 30-50g 10-30g 50% sulfuric acid content** (mL/L) 300-500 500-800 *The content of nickel stripping composition refers to the amount of nickel stripping composition contained in 1L nickel stripping solution. **50% sulfuric acid content refers to the amount of 50% sulfuric acid used in 1L nickel stripping solution.
  • the operation range (1) in table 1 is suitable for the recycling of nickel on objects having nickel-plated surfaces.
  • the operation range (2) is suitable for the recycling of nickel in nickel-containing powder, and the powder size is preferably able to pass through the sieve with 20 mesh or above (particle size ⁇ 0.85mm), such as lithium battery powder (black powder), ore sand, slag, etc.
  • the step (C) shown in FIG. 1 obtains a solid residue and a liquid eluate by filtering the soaked product of the step (B).
  • the filtering method is, for example, suction filtration, but other filtering methods can also be used, and the present invention is not limited thereto.
  • nickel in the article to be treated will remain in the liquid eluate in the form of ions after reacting with the stripping solution.
  • step (D) shown in FIG. 1 nickel can be recovered through reduction reaction.
  • the reduction reaction can be known to those skilled in the art (such as electrolysis).
  • composition ratio shown in the following table 2 4 kinds of stripping nickel compositions having formulations A-D respectively are prepared.
  • the preparation method of the nickel stripping composition includes weighing the salts with correct proportions and mixing them directly.
  • the nickel stripping composition of the present invention can be mixed with 50% sulfuric acid to prepare the nickel stripping solution.
  • the preparation method of the stripping solution includes preparing a volumetric flask with a capacity of 1 liter and adding 10-50 grams of nickel stripping composition and 300-800 ml of 50% sulfuric acid. After the composition is completely dissolved, water is added to 1 liter scale to complete the nickel stripping solution.
  • the nickel stripping solutions were formulated with the nickel stripping compositions having formulations A-D respectively of the present invention.
  • the nickel stripping solution of Comparative Example 1 did not contain the nickel stripping composition at all, and directly used 25% sulfuric acid for soaking. In Comparative Example 2, no nickel stripping composition was added at all, and 50% sulfuric acid was directly used as the stripping solution for soaking.
  • the present embodiment used the nickel stripping compositions of formulations A-D in Table 2, added 50% sulfuric acid to formulate into nickel stripping solutions, carried out nickel stripping tests of 3 kinds of different nickel-containing powders (battery powder, nickel ore, slag), and compared with the comparative examples that directly used 25% and 50% sulfuric acid as the stripping solution.
  • the experimental parameters are the operating range (2) in Table 1, and the experimental results are listed in Table 3.
  • the experimental steps are as follows:
  • High-nickel battery powder 10g of nickel stripping compositions of each of formulations A-D, 800ml of 50% sulfuric acid and water were mixed to formulate into 1L nickel stripping solution. Adding 100.00 grams of battery powder in the 1L nickel stripping solution (having a solid-to-liquid ratio of 1:10), then a stirrer were added to react the mixture at a speed of 300 rpm for 8 hours, and the reaction temperature was maintained at 90°C by a constant temperature bath. Finally, the product was filtered by suction, and the eluate was retained.
  • the battery powder contains relatively high concentration of nickel (10,000-30,000 ppm) and a variety of other metals (lithium, cobalt, iron, aluminum, copper, etc.). It is necessary to increase the amount of sulfuric acid in the stripping solution, the reaction temperature and the reaction time (8 hours) to ensure sufficient reaction.
  • Nickel ore powder After 20g of nickel stripping composition, 600ml of 50% sulfuric acid and water were formulated into 1L nickel stripping solution, 66.7 grams of nickel ore powder (having a solid-to-liquid ratio of 1:15) and a stirrer were added to react at a speed of 400 rpm for 4 hours, and the reaction temperature was maintained at 70°C by a constant temperature bath. Finally, the product was filtered by suction, and the eluate was retained.
  • the iron ore powder contained various minerals, and the particle sizes of these minerals are different, more stripping solution (solid-to-liquid ratio up to 1:15) was needed and the stirring speed was increased to ensure that the powder and the immersion solution are fully reacted.
  • the nickel content in the iron ore sand powder was relatively low (about 1,000-5,000 ppm), the reaction time was only 4 hours.
  • the slag powder was the waste from the production process of the steelmaking plant.
  • nickel about 500-2,000 ppm
  • it also contained a large amount of iron, chromium, aluminum and other metals. Therefore, the reaction temperature was lowered to 50°C and the use amount of the stripping solution (solid-to-liquid ratio of only 1:5) was reduced, which could effectively recover nickel and avoid the reactions between the stripping solution and other metals.
  • Recycling rate % Nickel content in eluate Nickel content in eluate + nickel content in residue ⁇ 100 %
  • Table 3 above is the recycling rate test results of the nickel stripping solutions. Comparing the recycling rates of the nickel stripping composition formulations A-D of the present invention and Comparative Examples 1 and 2 (without using the nickel stripping composition), it can be known that the nickel stripping composition/nickel stripping solution of the present invention can significantly improve the stripping efficiency of nickel in processing nickel-containing powder, such as battery, nickel ore, slag, etc., thereby greatly improving the final recycling rate.
  • the nickel stripping composition of the present invention can further improve the selectivity of sulfuric acid to nickel metal, with reference to the following Example 3.
  • the stripping compositions in Table 2 were used to treat common nickel-plated copper heat spreaders in semiconductor components ( Fig. 2A ).
  • the surface of the nickel-plated copper heat spreader was nickel metal, and the weight ratio of nickel and copper was about 3%: 97%.
  • this embodiment used 35g of nickel stripping composition, 300ml of 50% sulfuric acid and water to prepare 1L of nickel stripping solution, then the nickel-plated copper heat spreader (100g, solid-to-liquid ratio about 1:3) was soaked in a small amount of stripping solution (200ml) to react at room temperature for 30 minutes for peeling. The stirrer was operated at low speed (100 rpm) to create slight turbulence during stripping. Finally, the concentrations of nickel and copper ions in the eluate were measured and compared with Comparative Examples 1 and 2 that were not added with the nickel stripping composition. The results are shown in Table 4.
  • the nickel stripping solution of the present invention can effectively recover the nickel-plated on the heat spreader, and hardly damage the copper substrate with only a micro-etching effect.
  • 25% sulfuric acid and 50% sulfuric acid of Comparative Examples not only poor at nickel stripping, but also strip copper substrate at the same time. Therefore, the nickel stripping composition and the nickel stripping solution of the present invention can effectively recover nickel metal, have high selectivity for nickel, and improve the overall recycling performance.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
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  • Manufacturing & Machinery (AREA)
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EP23193144.5A 2022-08-25 2023-08-24 Composition de décapage de nickel et son application Pending EP4328336A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW111132110A TW202409303A (zh) 2022-08-25 剝鎳組合物及其應用

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EP4328336A1 true EP4328336A1 (fr) 2024-02-28

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107083483A (zh) * 2017-04-18 2017-08-22 中科过程(北京)科技有限公司 一种强化废旧锂离子电池金属回收的方法
CN107419271A (zh) * 2017-08-10 2017-12-01 佛山市南博旺环保科技有限公司 一种用于镍镀层的环保化学退镀剂及退镀方法
CN108624946A (zh) * 2017-03-21 2018-10-09 上海铝通化学科技有限公司 一种电解剥漆剂及剥漆方法
US20220098487A1 (en) * 2020-09-29 2022-03-31 Phichem Corporation Etching composition and application thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108624946A (zh) * 2017-03-21 2018-10-09 上海铝通化学科技有限公司 一种电解剥漆剂及剥漆方法
CN107083483A (zh) * 2017-04-18 2017-08-22 中科过程(北京)科技有限公司 一种强化废旧锂离子电池金属回收的方法
CN107419271A (zh) * 2017-08-10 2017-12-01 佛山市南博旺环保科技有限公司 一种用于镍镀层的环保化学退镀剂及退镀方法
US20220098487A1 (en) * 2020-09-29 2022-03-31 Phichem Corporation Etching composition and application thereof

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