EP4263903A1 - Yttriumoxid beschichtetes bauteil aus refraktärmetall - Google Patents

Yttriumoxid beschichtetes bauteil aus refraktärmetall

Info

Publication number
EP4263903A1
EP4263903A1 EP21843577.4A EP21843577A EP4263903A1 EP 4263903 A1 EP4263903 A1 EP 4263903A1 EP 21843577 A EP21843577 A EP 21843577A EP 4263903 A1 EP4263903 A1 EP 4263903A1
Authority
EP
European Patent Office
Prior art keywords
component
layer
refractory metal
coated
sheets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP21843577.4A
Other languages
German (de)
English (en)
French (fr)
Inventor
Robert SCHIFTNER
Katrin KNITTL
Thomas Huber
Michael Mark
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plansee SE
Original Assignee
Plansee SE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plansee SE filed Critical Plansee SE
Publication of EP4263903A1 publication Critical patent/EP4263903A1/de
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00Coating starting from inorganic powder
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00Coating starting from inorganic powder
    • C23C24/02Coating starting from inorganic powder by application of pressure only
    • C23C24/04Impact or kinetic deposition of particles
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C2/00Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/14Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silica
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00Coating starting from inorganic powder
    • C23C24/08Coating starting from inorganic powder by application of heat or pressure and heat
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00Coating not provided for in groups C23C2/00 - C23C24/00
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/40Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using liquids, e.g. salt baths, liquid suspensions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00Fuel cells; Manufacture thereof
    • H01M8/04Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
    • H01M8/04082Arrangements for control of reactant parameters, e.g. pressure or concentration
    • H01M8/04089Arrangements for control of reactant parameters, e.g. pressure or concentration of gaseous reactants
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00Fuel cells; Manufacture thereof
    • H01M8/10Fuel cells with solid electrolytes
    • H01M8/12Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • H01M2008/1293Fuel cells with solid oxide electrolytes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00Fuel cells; Manufacture thereof
    • H01M8/06Combination of fuel cells with means for production of reactants or for treatment of residues
    • H01M8/0662Treatment of gaseous reactants or gaseous residues, e.g. cleaning
    • H01M8/0675Removal of sulfur
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30Hydrogen technology
    • Y02E60/50Fuel cells

Definitions

  • the present invention relates to a component consisting of a refractory metal, characterized in that the surface of the component is at least partially coated with a layer of Y2O3.
  • the invention also relates to the production of the coated component and the use of Y2O3 as a release agent in high-temperature applications.
  • auxiliary and separating means such as sleeves or applied separating layers of pastes
  • these methods quickly reach their limits under extreme conditions.
  • some auxiliaries and release agents cannot be used in a vacuum due to the risk of evaporation of their components and/or are limited in their application temperature due to decomposition.
  • AI2O3, ZrÜ2 or boron nitride sprays or powders are currently used in furnace construction.
  • these variants are unsuitable for applications with temperatures around 1400°C, since cross-contamination between components and the auxiliary and separating agent is a particular problem.
  • DE 102013213503 relates to a screw connection for vacuum applications with a screw with an external thread and a component with an internal nut thread, with either the component or the screw or both being made of a stainless austenitic steel, the coating of the component/screw with the base materials different coating materials different pairs of contact surfaces are created, which allow mutual sliding without vacuum-damaging lubricants.
  • a first element suitable for selectively engaging a second element comprising a coating and at least an engaging portion of the first element being coated in the coating, the coating being formed by vapor deposition to form a to provide a thermochemically stable layer for temperatures up to 800 °C.
  • the coating may include one or more nitrides, oxides, or carbides of titanium, chromium, or aluminum.
  • the coating may include one or more of titanium nitride, chromium nitride, aluminum nitride, titanium oxide, chromium oxide, aluminum oxide, titanium carbide, chromium carbide, or aluminum carbide.
  • the object of the present invention is to provide a coated component which can be detached even after use at temperatures in the range from 1000° C. to 1400° C., in particular up to 1900° C., with no cross-contamination with other components or treated products occurring.
  • This object is achieved by providing a component according to claim 1 consisting of a refractory metal whose surface is at least partially coated with a layer of Y2O3, its production and the use of Y2O3 as a release agent in high-temperature applications.
  • Advantageous configurations of the invention are the subject matter of the dependent claims, which can be freely combined with one another.
  • a layer of Y2O3 allows the components to be used in different atmospheres, such as hydrogen or in a vacuum, without having to worry about cross-contamination or decomposition.
  • the application of these layers also ensures non-destructive replacement or non-destructive opening of components. This prevents individual parts from sintering and thus ensures that they remain detachable.
  • the Y2O3 layer can cover a temperature application range of 1000° C. to 1400° C., in particular up to 1900° C., without the risk of soiling/contamination or galling, and the detachability of the components/machine elements can be achieved.
  • connection is releasable when surfaces of components in direct contact with one another can be separated again without damaging the components and non-releasable when the components must be at least partially destroyed in order to separate the contacting surfaces from one another again.
  • the coated component according to the invention is particularly suitable for high-temperature applications, ie for applications with temperatures in the range from 1000° C. to 2000° C., in particular 1400° C. to 1900° C. in the present case.
  • the device of the present invention is made of a refractory metal.
  • a refractory metal is a metal selected from the group consisting of titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum, tungsten and rhenium and alloys of the metals mentioned, also referred to here as refractory metal alloys.
  • Refractory metal alloys are alloys with at least 50 at.% of one or more of the above metals meant, preferably with at least 70 at.%, more preferably with at least 90 at.% and even more preferably with at least 95 at.%.
  • the melting point of the refractory metal defined above is selected in such a way that the component is suitable for the temperature aimed for in use.
  • the refractory metal has a melting point greater than 1400°C, more preferably greater than 1800°C, and more preferably greater than 2000°C.
  • the component consists of molybdenum, together with unavoidable impurities, or of a molybdenum alloy.
  • the alloy consists of up to 30% by weight of other refractory metal elements mentioned above in addition to molybdenum.
  • compositions are preferred which, in addition to molybdenum, consist of the following percentages by weight of elements:
  • the details of the proportions and the details relate to the element referred to in each case (e.g. Mo, C or W), regardless of whether this is present in the molybdenum base material in elemental or bonded form.
  • the proportions of the different elements are determined by chemical analysis.
  • Machine elements in particular construction means for exchange or are suitable for the reversible attachment and detachment of machine elements, as well as assemblies made up of individual parts.
  • Suitable components are, in particular, screws, nuts, pins, dowel pins, washers, bolts, metal sheets, clamps, tubes, rods and U-rails.
  • Welded and riveted components such as gas inlet pipes, heater mounts and charging frames, are particularly important as assemblies.
  • the term components within the meaning of the present invention expressly excludes cutting parts of cutting tools.
  • Preferred components as production aids are contact parts such as separating plates and washers.
  • separating plates are preferred.
  • Components that have a thread are also preferred as design aids.
  • a screw is particularly preferred.
  • the coating of the component consists of Y2O3.
  • the Y2O3 layer is typically applied to the component by brushing, spraying, printing or dipping a Y2O3 suspension and then dried.
  • the Y2O3 suspension is preferably an ethanol-based suspension.
  • the Y2O3 suspension is preferably sintered onto the component in a hydrogen atmosphere at around 1800° C. over a period of 2 to 6 hours. This improves the initial layer adhesion.
  • the coated components have a Y2Ü3 layer with a thickness in a range from 10 ⁇ m to 150 ⁇ m, preferably from 20 ⁇ m to 110 ⁇ m, more preferably from 40 ⁇ m to 80 ⁇ m and more preferably from 50 ⁇ m to 70 ⁇ m.
  • the thickness of the layer can be determined by lateral REM measurement of a cross section of the coated component.
  • the component typically has no further layers made of other materials. If additional layers are present, for example to promote adhesion, the Y2Ü3 layer is the outermost layer of the coated component.
  • the layer is completely on top of the other components to be contacted
  • the layer is only partially applied to the surface of the coated component that is to be contacted with other components.
  • the coated component to be contacted with a further component is coated with the layer, more preferably 50 to 100%.
  • the present invention can be used wherever good detachability of a component from another component is required after it has been used in the high-temperature range. Accordingly, the use of Y2O3 as a release agent to improve the detachability of components for high-temperature applications is also the subject of the present invention.
  • the yttrium oxide is preferably used in the form of a layer applied by means of slurry coating, preferably on a component consisting of a refractory metal.
  • TZM plate (molybdenum with a weight percentage of 0.5 Ti and 0.08 Zr as well as 0.01 to 0.04 C) 140x80x9mm, 9 mm long through hole milled with M6 thread Molybdenum washer: 18x6, 4x1, 5mm Molybdenum screw: M6xl2mm
  • the ZrCh and TaC-coated screws already show seizure at low temperatures from 400 °C and are therefore unsuitable for high-temperature applications.
  • the ZrC-coated screws show galling from 1000 °C and are therefore also not suitable for high-temperature applications.
  • the coating can achieve the detachability of contacting refractory metal components. In addition, no cross-contamination between the components could be detected.
  • Example 2 Production and Evaluation of Coated Dividers Various products were tested and evaluated as possible release agents for sheet stack annealing. To do this, the various release agents were introduced between the sheets. The sprays or suspensions were applied to one side of 1 mm thick molybdenum sheets (area approx. 40 ⁇ 20 mm). The layers applied had a thickness of between 50 and 70 ⁇ m. 25 sheets were annealed in a stack at 1900°C for one hour in a hydrogen atmosphere.
  • ZrCh slurry via corrosion laboratory (ISTO) as a pump spray Separation only possible with a tool; Slurry "burnt in” on trays; unsuitable.
  • Sheets can be separated after annealing, but a 10-20 ⁇ m thick molybdenum boride layer forms during annealing; not suitable.
  • ZrO2 spray (spray from ZYP Coatings Inc. 98% ZrO2, 0.7% MgO, 1.2% SiO2):
  • the spray layer is mainly loose on the sheet. contamination of the plant by flaking of the ZrO2 spray layer; not suitable.
  • the suspension shows poor wetting of the metal sheets.
  • the sheets After annealing, the sheets are strongly bonded in the sandwich and the layer cannot be removed from the coated sheets. In some cases there are residues of the layer on uncoated sheet metal sides; not suitable.
  • the suspension shows good wetting of the metal sheets.
  • the sheets can be easily separated after annealing. There are no residues of the layer on the uncoated sheet metal sides. Additional section analyzes showed that there was no surface diffusion into the sheet; suitable.
  • 1 mm molybdenum sheets (area 265 mm x 265 mm) were coated on both sides with a Y2O3 suspension and used for several stack annealings at 1850°C for 6 h in a hydrogen atmosphere as separating sheets between molybdenum charging sheets (each paired next to each other; 2 mm x 130 mm x 260 mm) used.
  • a MoY2O3 separating plate is followed by two charging plates placed next to each other, followed by a separating plate, and so on.
  • the charging plate layers were rotated alternately by 90° so that a Cross layer structure is created.
  • the stacks comprised between 20 and 25 charging plate layers.
  • the dividers were still usable after 13 uses.
  • the charging plates do not sinter.
  • the stacked sheets could be separated again without any problems after annealing.
  • the Y2O3 layer adheres stably to the separating plates even after several applications. After the heat treatment, the sheets can always be easily separated from one another. In addition, no negative effects on the base material and the sintering furnace due to contamination were found. It turns out that Mo carrier sheets with a thin Y2Ü3 layer on both sides are very well suited for high-temperature treatment of charging sheets. In particular, the multiple use of such Y2O3-coated molybdenum separating sheets results in a considerable economic and ecological advantage compared to tungsten thin sheets.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Structural Engineering (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Laminated Bodies (AREA)
EP21843577.4A 2020-12-15 2021-11-25 Yttriumoxid beschichtetes bauteil aus refraktärmetall Pending EP4263903A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ATGM50251/2020U AT17485U1 (de) 2020-12-15 2020-12-15 Yttriumoxid beschichtetes bauteil aus refraktärmetall
PCT/AT2021/060447 WO2022126158A1 (de) 2020-12-15 2021-11-25 Yttriumoxid beschichtetes bauteil aus refraktärmetall

Publications (1)

Publication Number Publication Date
EP4263903A1 true EP4263903A1 (de) 2023-10-25

Family

ID=81535419

Family Applications (1)

Application Number Title Priority Date Filing Date
EP21843577.4A Pending EP4263903A1 (de) 2020-12-15 2021-11-25 Yttriumoxid beschichtetes bauteil aus refraktärmetall

Country Status (6)

Country Link
US (1) US20240117496A1 (zh)
EP (1) EP4263903A1 (zh)
JP (1) JP2023552481A (zh)
CN (1) CN116601330A (zh)
AT (1) AT17485U1 (zh)
WO (1) WO2022126158A1 (zh)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2294040B (en) * 1989-05-10 1996-07-03 Remet Corp Ceramic shell molds and cores for casting of reactive metals
WO1993020026A1 (en) * 1992-04-01 1993-10-14 Moltech Invent Sa Prevention of oxidation of carbonaceous and other materials at high temperatures
US5769918A (en) * 1996-10-24 1998-06-23 Corning Incorporated Method of preventing glass adherence
EP1049817B1 (en) * 1998-01-20 2006-11-02 MOLTECH Invent S.A. Slurry for coating non-carbon metal-based anodes for aluminium production cells
AT4408U1 (de) * 2000-05-18 2001-06-25 Plansee Ag Verfahren zur herstellung einer elektrischen lampe
AT5322U1 (de) * 2001-05-11 2002-05-27 Plansee Ag Verfahren zur herstellung einer hochdruck-entladungslampe
DE102006038821A1 (de) * 2005-08-25 2007-03-08 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Stromdurchführungssystem für eine Lampe
EP1992430A1 (en) * 2007-05-15 2008-11-19 Treibacher Industrie AG Yttria-based refractory composition
DE102013213503A1 (de) 2013-07-10 2014-08-07 Carl Zeiss Smt Gmbh Schraubverbindung für vakuumanwendungen
CN109277518B (zh) * 2017-07-21 2020-09-18 中国科学院金属研究所 一种TiAl合金精密铸造用耐火材料的制备方法
CN108585897B (zh) * 2018-05-16 2020-10-02 中南大学 一种难熔金属高温抗氧化Si-Mo-YSZ涂层及其制备方法

Also Published As

Publication number Publication date
US20240117496A1 (en) 2024-04-11
JP2023552481A (ja) 2023-12-15
AT17485U1 (de) 2022-05-15
CN116601330A (zh) 2023-08-15
WO2022126158A1 (de) 2022-06-23

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