EP4148353C0 - Kryogenfreie kühlvorrichtung und verfahren - Google Patents

Kryogenfreie kühlvorrichtung und verfahren

Info

Publication number
EP4148353C0
EP4148353C0 EP22205298.7A EP22205298A EP4148353C0 EP 4148353 C0 EP4148353 C0 EP 4148353C0 EP 22205298 A EP22205298 A EP 22205298A EP 4148353 C0 EP4148353 C0 EP 4148353C0
Authority
EP
European Patent Office
Prior art keywords
cooling apparatus
free cooling
cryogen free
cryogen
free
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP22205298.7A
Other languages
English (en)
French (fr)
Other versions
EP4148353B1 (de
EP4148353A1 (de
Inventor
John Garside
Simon Kingley
Gavin Crowther
Matthias Buehler
Doreen Wernicke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oxford Instruments Nanotechnology Tools Ltd
Original Assignee
Oxford Instruments Nanotechnology Tools Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=40637422&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP4148353(C0) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Oxford Instruments Nanotechnology Tools Ltd filed Critical Oxford Instruments Nanotechnology Tools Ltd
Publication of EP4148353A1 publication Critical patent/EP4148353A1/de
Application granted granted Critical
Publication of EP4148353B1 publication Critical patent/EP4148353B1/de
Publication of EP4148353C0 publication Critical patent/EP4148353C0/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D19/00—Arrangement or mounting of refrigeration units with respect to devices or objects to be refrigerated, e.g. infrared detectors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F25B9/145—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle pulse-tube cycle

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Separation By Low-Temperature Treatments (AREA)
EP22205298.7A 2009-03-16 2010-03-15 Kryogenfreie kühlvorrichtung und verfahren Active EP4148353B1 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
GBGB0904500.6A GB0904500D0 (en) 2009-03-16 2009-03-16 Cryofree cooling apparatus and method
PCT/GB2010/000454 WO2010106309A2 (en) 2009-03-16 2010-03-15 Cryogen free cooling apparatus and method
EP22154522.1A EP4027081B1 (de) 2009-03-16 2010-03-15 Vorrichtung und verfahren zur kryogenfreien kühlung
EP19187223.3A EP3620732B2 (de) 2009-03-16 2010-03-15 Vorrichtung und verfahren zur kryogenfreien kühlung
EP10710389.7A EP2409096B2 (de) 2009-03-16 2010-03-15 Kryogenfreie kühlvorrichtung und verfahren

Related Parent Applications (6)

Application Number Title Priority Date Filing Date
EP22154522.1A Division-Into EP4027081B1 (de) 2009-03-16 2010-03-15 Vorrichtung und verfahren zur kryogenfreien kühlung
EP22154522.1A Division EP4027081B1 (de) 2009-03-16 2010-03-15 Vorrichtung und verfahren zur kryogenfreien kühlung
EP10710389.7A Division-Into EP2409096B2 (de) 2009-03-16 2010-03-15 Kryogenfreie kühlvorrichtung und verfahren
EP10710389.7A Division EP2409096B2 (de) 2009-03-16 2010-03-15 Kryogenfreie kühlvorrichtung und verfahren
EP19187223.3A Division EP3620732B2 (de) 2009-03-16 2010-03-15 Vorrichtung und verfahren zur kryogenfreien kühlung
EP19187223.3A Division-Into EP3620732B2 (de) 2009-03-16 2010-03-15 Vorrichtung und verfahren zur kryogenfreien kühlung

Publications (3)

Publication Number Publication Date
EP4148353A1 EP4148353A1 (de) 2023-03-15
EP4148353B1 EP4148353B1 (de) 2024-05-22
EP4148353C0 true EP4148353C0 (de) 2024-05-22

Family

ID=40637422

Family Applications (4)

Application Number Title Priority Date Filing Date
EP22205298.7A Active EP4148353B1 (de) 2009-03-16 2010-03-15 Kryogenfreie kühlvorrichtung und verfahren
EP19187223.3A Active EP3620732B2 (de) 2009-03-16 2010-03-15 Vorrichtung und verfahren zur kryogenfreien kühlung
EP10710389.7A Active EP2409096B2 (de) 2009-03-16 2010-03-15 Kryogenfreie kühlvorrichtung und verfahren
EP22154522.1A Active EP4027081B1 (de) 2009-03-16 2010-03-15 Vorrichtung und verfahren zur kryogenfreien kühlung

Family Applications After (3)

Application Number Title Priority Date Filing Date
EP19187223.3A Active EP3620732B2 (de) 2009-03-16 2010-03-15 Vorrichtung und verfahren zur kryogenfreien kühlung
EP10710389.7A Active EP2409096B2 (de) 2009-03-16 2010-03-15 Kryogenfreie kühlvorrichtung und verfahren
EP22154522.1A Active EP4027081B1 (de) 2009-03-16 2010-03-15 Vorrichtung und verfahren zur kryogenfreien kühlung

Country Status (7)

Country Link
US (1) US20120102975A1 (de)
EP (4) EP4148353B1 (de)
JP (1) JP2012520987A (de)
ES (2) ES2935698T3 (de)
FI (3) FI4027081T3 (de)
GB (1) GB0904500D0 (de)
WO (1) WO2010106309A2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2493553B (en) * 2011-08-11 2017-09-13 Oxford Instr Nanotechnology Tools Ltd Cryogenic cooling apparatus and method
CN102967834B (zh) * 2012-11-23 2014-10-15 中国科学院武汉物理与数学研究所 一种磁共振引擎装置及方法
CN104884969A (zh) * 2012-12-27 2015-09-02 皇家飞利浦有限公司 用于对无低温超导磁体的失超保护的系统和方法
DE102015215919B4 (de) 2015-08-20 2017-06-22 Bruker Biospin Gmbh Verfahren und Vorrichtung zur Vorkühlung eines Kryostaten
EP3163222B1 (de) 2015-10-28 2018-07-18 Technische Universität München Kältemittelfreie kühlvorrichtung
CN109488720B (zh) * 2018-12-27 2024-04-26 仪晟科学仪器(嘉兴)有限公司 闭循环液氦制冷机的机械隔离式震动屏蔽系统
DE102019203341A1 (de) * 2019-03-12 2020-09-17 Pressure Wave Systems Gmbh Kryostat
EP3734303B1 (de) * 2019-05-03 2024-04-03 Afore Oy Kryogener wafertester mit beladevorrichtung
GB2592415A (en) * 2020-02-27 2021-09-01 Oxford Instruments Nanotechnology Tools Ltd Insert for a cryogenic cooling system
FI129268B (fi) 2020-05-13 2021-10-29 Bluefors Oy Laite ja menetelmä lämpöä johtavan kytkennän tekemiseksi
US11360140B1 (en) 2020-12-18 2022-06-14 Microsoft Technology Licensing, Llc RF functional probe

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9027A (en) * 1852-06-15 Improvement in preparations of archil
US4251123A (en) 1979-05-04 1981-02-17 The United States Of America As Represented By The United States Department Of Energy Glove box shield
US4446702A (en) 1983-02-14 1984-05-08 Helix Technology Corporation Multiport cryopump
US4577465A (en) 1984-05-11 1986-03-25 Helix Technology Corporation Oil free vacuum system
JPS60260833A (ja) * 1984-06-07 1985-12-24 Hoxan Corp クライオスタツト
JPS6270461U (de) * 1985-10-21 1987-05-02
US4872321A (en) 1988-04-27 1989-10-10 Biomagnetic Technologies, Inc. Nonimmersive cryogenic cooler
US5077523A (en) 1989-11-03 1991-12-31 John H. Blanz Company, Inc. Cryogenic probe station having movable chuck accomodating variable thickness probe cards
JP2821241B2 (ja) * 1990-06-08 1998-11-05 株式会社日立製作所 液化冷凍機付きクライオスタツト
US5237825A (en) * 1991-11-08 1993-08-24 Gte Laboratories Incorporated Method and apparatus for cryogenically cooling samples
US5611207A (en) * 1995-06-29 1997-03-18 Hess; John Cryogenic interface for perpendicular loading of independent measurement inserts
JP2946195B2 (ja) 1995-08-18 1999-09-06 セイコーインスツルメンツ株式会社 非破壊検査装置
US5727392A (en) 1996-12-19 1998-03-17 Helix Technology Corporation Convection-shielded cryopump
US5806319A (en) 1997-03-13 1998-09-15 Wary; John Method and apparatus for cryogenically cooling a deposition chamber
JPH11162269A (ja) * 1997-11-27 1999-06-18 Toshiba Corp 超電導機器
JP2001255252A (ja) 2000-03-10 2001-09-21 Jeol Ltd 試料搬送装置
JP3580531B2 (ja) 2000-04-20 2004-10-27 大陽東洋酸素株式会社 希釈冷凍機
JP4163447B2 (ja) 2002-05-22 2008-10-08 日本電子株式会社 スキャナ保持装置および走査型プローブ顕微鏡
JP2006509999A (ja) 2002-08-02 2006-03-23 イー エイ フィシオネ インストルメンツ インコーポレーテッド 顕微鏡の試料調製方法及び装置
GB0408425D0 (en) 2004-04-15 2004-05-19 Oxford Instr Superconductivity Cooling apparatus
JP4319650B2 (ja) * 2005-07-29 2009-08-26 株式会社日立製作所 Ｎｍｒ用低温プローブおよびｎｍｒ装置
GB0604577D0 (en) † 2006-03-07 2006-04-19 Dryogenic Ltd Low temperature heatsinking system
US8307665B2 (en) 2006-04-06 2012-11-13 National Institute Of Advanced Industrial Science And Technology Sample cooling apparatus
JP4431793B2 (ja) * 2006-07-07 2010-03-17 国立大学法人九州大学 クライオスタット
US8069675B2 (en) 2006-10-10 2011-12-06 Massachusetts Institute Of Technology Cryogenic vacuum break thermal coupler
JP2008098415A (ja) * 2006-10-12 2008-04-24 Toshiba Corp 超電導機器
US8082741B2 (en) 2007-05-15 2011-12-27 Brooks Automation, Inc. Integral facet cryopump, water vapor pump, or high vacuum pump
DE102007028865B3 (de) * 2007-06-22 2009-01-29 Vericold Technologies Gmbh Tieftemperaturvorrichtung
JP2009074774A (ja) 2007-09-25 2009-04-09 Kyushu Univ 無冷媒冷凍機及び機能性熱結合体
US8291717B2 (en) * 2008-05-02 2012-10-23 Massachusetts Institute Of Technology Cryogenic vacuum break thermal coupler with cross-axial actuation
NL2001755C2 (nl) 2008-07-03 2010-01-05 Giorgio Frossati Houder voor een tot een lage temperatuur in een vacuümruimte af te koelen preparaat en 3he-4he mengkoelmachine ingericht voor het opnemen van een dergelijke houder.

Also Published As

Publication number Publication date
ES2909009T3 (es) 2022-05-04
GB0904500D0 (en) 2009-04-29
EP4027081A2 (de) 2022-07-13
ES2935698T3 (es) 2023-03-09
EP2409096B1 (de) 2019-08-21
EP2409096B2 (de) 2024-06-19
EP4027081B1 (de) 2022-12-21
EP4148353B1 (de) 2024-05-22
EP2409096A2 (de) 2012-01-25
EP3620732B1 (de) 2022-02-16
WO2010106309A8 (en) 2011-10-13
FI2409096T4 (fi) 2024-06-20
WO2010106309A2 (en) 2010-09-23
WO2010106309A3 (en) 2011-05-19
EP3620732A1 (de) 2020-03-11
FI4027081T3 (fi) 2023-01-13
US20120102975A1 (en) 2012-05-03
FI4148353T1 (fi) 2023-03-29
EP4148353A1 (de) 2023-03-15
EP3620732B2 (de) 2024-10-09
EP4027081A3 (de) 2022-08-31
JP2012520987A (ja) 2012-09-10

Similar Documents

Publication Publication Date Title
GB0900268D0 (en) Cooling apparatus and method
EP2379131A4 (de) Hautkühlvorrichtung und -verfahren
GB2493553B (en) Cryogenic cooling apparatus and method
EP4148353C0 (de) Kryogenfreie kühlvorrichtung und verfahren
GB0914650D0 (en) Apparatus and method
GB0921440D0 (en) Apparatus and method
GB0901034D0 (en) Apparatus and method
EP2437103A4 (de) Anzeigeeinheit und anzeigeverfahren
GB0915150D0 (en) In-borehole gas monitor apparatus and method
GB0902880D0 (en) Apparatus and method
EP2402670A4 (de) Sprühkühleinrichtung und sprühverfahren
GB0901257D0 (en) Apparatus and method
ZA201104883B (en) Cooling method and apparatus
GB0911730D0 (en) Method and apparatus
EP2500114A4 (de) Kaltwalzmaschine und kaltwalzverfahren
GB0919832D0 (en) Thermal test apparatus and method
GB0921706D0 (en) Method and apparatus
GB0911293D0 (en) Method and apparatus
GB0908736D0 (en) Method and apparatus
GB0905198D0 (en) Apparatus and method
GB0817340D0 (en) Cryogenic cooling apparatus and method
GB0920543D0 (en) Apparatus and method
GB0904389D0 (en) Apparatus and method
GB201119339D0 (en) Cooling method and apparatus
PL2275750T5 (pl) Sposób i urządzenie do chłodzenia

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN PUBLISHED

AC Divisional application: reference to earlier application

Ref document number: 2409096

Country of ref document: EP

Kind code of ref document: P

Ref document number: 3620732

Country of ref document: EP

Kind code of ref document: P

Ref document number: 4027081

Country of ref document: EP

Kind code of ref document: P

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20230310

RBV Designated contracting states (corrected)

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

RIC1 Information provided on ipc code assigned before grant

Ipc: F25D 19/00 20060101AFI20230509BHEP

INTG Intention to grant announced

Effective date: 20230526

P01 Opt-out of the competence of the unified patent court (upc) registered

Effective date: 20230516

GRAJ Information related to disapproval of communication of intention to grant by the applicant or resumption of examination proceedings by the epo deleted

Free format text: ORIGINAL CODE: EPIDOSDIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

TPAC Observations filed by third parties

Free format text: ORIGINAL CODE: EPIDOSNTIPA

INTC Intention to grant announced (deleted)
GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20231219

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AC Divisional application: reference to earlier application

Ref document number: 4027081

Country of ref document: EP

Kind code of ref document: P

Ref document number: 2409096

Country of ref document: EP

Kind code of ref document: P

Ref document number: 3620732

Country of ref document: EP

Kind code of ref document: P

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 602010069395

Country of ref document: DE

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

U01 Request for unitary effect filed

Effective date: 20240522

P04 Withdrawal of opt-out of the competence of the unified patent court (upc) registered

Effective date: 20240528

U07 Unitary effect registered

Designated state(s): AT BE BG DE DK EE FI FR IT LT LU LV MT NL PT SE SI

Effective date: 20240603

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20240922

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20240522

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20240823