EP4109518A4 - Three-dimensional packaging housing structure of radio frequency microsystem and manufacturing method - Google Patents

Three-dimensional packaging housing structure of radio frequency microsystem and manufacturing method Download PDF

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Publication number
EP4109518A4
EP4109518A4 EP20935562.7A EP20935562A EP4109518A4 EP 4109518 A4 EP4109518 A4 EP 4109518A4 EP 20935562 A EP20935562 A EP 20935562A EP 4109518 A4 EP4109518 A4 EP 4109518A4
Authority
EP
European Patent Office
Prior art keywords
manufacturing
radio frequency
housing structure
dimensional packaging
packaging housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP20935562.7A
Other languages
German (de)
French (fr)
Other versions
EP4109518A1 (en
Inventor
Xueman PANG
Huanbei CHEN
Qiushi LIANG
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CETC 55 Research Institute
Original Assignee
CETC 55 Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CETC 55 Research Institute filed Critical CETC 55 Research Institute
Publication of EP4109518A1 publication Critical patent/EP4109518A1/en
Publication of EP4109518A4 publication Critical patent/EP4109518A4/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • H01L23/3677Wire-like or pin-like cooling fins or heat sinks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/02Containers; Seals
    • H01L23/04Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
    • H01L23/053Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body
    • H01L23/055Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body the leads having a passage through the base
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/02Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S13/00
    • G01S7/03Details of HF subsystems specially adapted therefor, e.g. common to transmitter and receiver
    • G01S7/032Constructional details for solid-state radar subsystems
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • H01L21/4817Conductive parts for containers, e.g. caps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/02Containers; Seals
    • H01L23/04Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
    • H01L23/053Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • H01L23/3675Cooling facilitated by shape of device characterised by the shape of the housing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3733Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon having a heterogeneous or anisotropic structure, e.g. powder or fibres in a matrix, wire mesh, porous structures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/58Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/64Impedance arrangements
    • H01L23/66High-frequency adaptations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/58Structural electrical arrangements for semiconductor devices not otherwise provided for
    • H01L2223/64Impedance arrangements
    • H01L2223/66High-frequency adaptations
    • H01L2223/6605High-frequency electrical connections
    • H01L2223/6616Vertical connections, e.g. vias
    • H01L2223/6622Coaxial feed-throughs in active or passive substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/12Mountings, e.g. non-detachable insulating substrates
    • H01L23/13Mountings, e.g. non-detachable insulating substrates characterised by the shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/12Mountings, e.g. non-detachable insulating substrates
    • H01L23/14Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
    • H01L23/15Ceramic or glass substrates

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Products (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
EP20935562.7A 2020-05-13 2020-07-14 Three-dimensional packaging housing structure of radio frequency microsystem and manufacturing method Pending EP4109518A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202010401883.2A CN111785691B (en) 2020-05-13 2020-05-13 Radio frequency micro-system three-dimensional packaging shell structure and manufacturing method
PCT/CN2020/101830 WO2021227240A1 (en) 2020-05-13 2020-07-14 Three-dimensional packaging housing structure of radio frequency microsystem and manufacturing method

Publications (2)

Publication Number Publication Date
EP4109518A1 EP4109518A1 (en) 2022-12-28
EP4109518A4 true EP4109518A4 (en) 2023-09-06

Family

ID=72753570

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20935562.7A Pending EP4109518A4 (en) 2020-05-13 2020-07-14 Three-dimensional packaging housing structure of radio frequency microsystem and manufacturing method

Country Status (3)

Country Link
EP (1) EP4109518A4 (en)
CN (1) CN111785691B (en)
WO (1) WO2021227240A1 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112151477A (en) * 2020-08-20 2020-12-29 山东航天电子技术研究所 System-in-package housing and application
CN112652613A (en) * 2020-12-22 2021-04-13 中国电子科技集团公司第五十五研究所 Multi-channel micro-system packaging assembly with three-dimensional stacking form and manufacturing method thereof
CN112635444B (en) * 2020-12-22 2022-05-10 中国电子科技集团公司第五十五研究所 Three-dimensional stacked microsystem packaging assembly and manufacturing method thereof
CN112635443B (en) * 2020-12-22 2022-03-08 中国电子科技集团公司第五十五研究所 Radio frequency micro-system three-dimensional packaging assembly with multi-stage substrate stacking and vertical heat dissipation channel and manufacturing method
CN113271721A (en) * 2021-04-30 2021-08-17 北京七星华创微电子有限责任公司 High-integration-level fully-sealed three-dimensional surface-mounted circuit integration assembly process
CN113255282A (en) * 2021-07-14 2021-08-13 中国电子科技集团公司信息科学研究院 Radio frequency micro-system design method and device, electronic equipment and storage medium
CN114915330A (en) * 2022-03-31 2022-08-16 航天恒星科技有限公司 Satellite terminal with integrated baseband and radio frequency
CN114864512B (en) * 2022-05-12 2023-06-13 石家庄烽瓷电子技术有限公司 K-band radio frequency microsystem three-dimensional receiving and transmitting assembly based on HTCC
CN115172291A (en) * 2022-07-27 2022-10-11 石家庄烽瓷电子技术有限公司 HTCC structure with micro-channels
CN115274568A (en) * 2022-08-01 2022-11-01 中国电子科技集团公司第五十四研究所 Radio frequency front end three-dimensional integrated structure
CN115662965A (en) * 2022-12-15 2023-01-31 成都华兴大地科技有限公司 Novel high-power-consumption chip packaging structure and packaging method
CN115831880A (en) * 2023-02-13 2023-03-21 成都华兴大地科技有限公司 Novel chip integrated packaging structure
CN116253577B (en) * 2023-03-10 2024-03-29 合肥圣达电子科技实业有限公司 Ceramic shell for quantum computation and preparation method thereof
CN117038646B (en) * 2023-10-08 2024-01-26 之江实验室 Ceramic packaging structure and design method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102738131A (en) * 2012-03-07 2012-10-17 苏州晶方半导体科技股份有限公司 Semiconductor module, packaging structure and packaging method thereof
US20150131248A1 (en) * 2012-05-17 2015-05-14 Eagantu Ltd. Three-dimensional modules for electronic integration
US20170142822A1 (en) * 2015-11-17 2017-05-18 Ngk Spark Plug Co., Ltd. Wiring substrate

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7262079B2 (en) * 2005-02-10 2007-08-28 Altera Corporation Consolidated flip chip BGA assembly process and apparatus
CN101714543B (en) * 2009-11-12 2011-10-05 美新半导体(无锡)有限公司 Ceramic substrate for three-dimensional packaging of multi-chip system and packaging method thereof
CN104051352A (en) * 2014-06-13 2014-09-17 中国电子科技集团公司第五十五研究所 Millimeter wave chip carrier based on high temperature co-fired ceramic and manufacturing method thereof
CN104269382B (en) * 2014-08-20 2017-04-19 中国电子科技集团公司第五十五研究所 X-wave-band high-reliability surface-mounted type ceramic shell based on high-temperature co-firing ceramic technology
JP6881913B2 (en) * 2015-11-17 2021-06-02 日本特殊陶業株式会社 Wiring board
CN105870071A (en) * 2016-06-28 2016-08-17 中国电子科技集团公司第十三研究所 Aluminum nitride multilayer-ceramic leadless-periphery flat packaging shell
CN109950211B (en) * 2017-11-22 2020-12-18 中国电子科技集团公司第五十五研究所 X-waveband double-sided multi-cavity structure ceramic shell and multilayer ceramic co-firing process method
CN108428672B (en) * 2018-04-17 2020-06-23 中国电子科技集团公司第二十九研究所 Ceramic double-sided three-dimensional integrated framework and packaging method of ultra-wideband radio frequency micro-system
CN109103165B (en) * 2018-07-03 2019-12-10 中国电子科技集团公司第二十九研究所 LTCC substrate three-dimensional stacking structure and airtight packaging method thereof
CN109545771A (en) * 2018-09-14 2019-03-29 中国电子科技集团公司第五十五研究所 A kind of highly integrated module level encapsulation nitride multilayer aluminum substrate and its manufacturing method
CN109637980A (en) * 2018-10-29 2019-04-16 中国电子科技集团公司第五十五研究所 A kind of ceramic flat surface pad array package casing and processing method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102738131A (en) * 2012-03-07 2012-10-17 苏州晶方半导体科技股份有限公司 Semiconductor module, packaging structure and packaging method thereof
US20150131248A1 (en) * 2012-05-17 2015-05-14 Eagantu Ltd. Three-dimensional modules for electronic integration
US20170142822A1 (en) * 2015-11-17 2017-05-18 Ngk Spark Plug Co., Ltd. Wiring substrate

Also Published As

Publication number Publication date
CN111785691B (en) 2022-03-11
CN111785691A (en) 2020-10-16
EP4109518A1 (en) 2022-12-28
WO2021227240A1 (en) 2021-11-18

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