EP4109518A4 - Three-dimensional packaging housing structure of radio frequency microsystem and manufacturing method - Google Patents
Three-dimensional packaging housing structure of radio frequency microsystem and manufacturing method Download PDFInfo
- Publication number
- EP4109518A4 EP4109518A4 EP20935562.7A EP20935562A EP4109518A4 EP 4109518 A4 EP4109518 A4 EP 4109518A4 EP 20935562 A EP20935562 A EP 20935562A EP 4109518 A4 EP4109518 A4 EP 4109518A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- manufacturing
- radio frequency
- housing structure
- dimensional packaging
- packaging housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000004806 packaging method and process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3677—Wire-like or pin-like cooling fins or heat sinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
- H01L23/053—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body
- H01L23/055—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body the leads having a passage through the base
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/02—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S13/00
- G01S7/03—Details of HF subsystems specially adapted therefor, e.g. common to transmitter and receiver
- G01S7/032—Constructional details for solid-state radar subsystems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4817—Conductive parts for containers, e.g. caps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
- H01L23/053—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3675—Cooling facilitated by shape of device characterised by the shape of the housing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3733—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon having a heterogeneous or anisotropic structure, e.g. powder or fibres in a matrix, wire mesh, porous structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/64—Impedance arrangements
- H01L23/66—High-frequency adaptations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/58—Structural electrical arrangements for semiconductor devices not otherwise provided for
- H01L2223/64—Impedance arrangements
- H01L2223/66—High-frequency adaptations
- H01L2223/6605—High-frequency electrical connections
- H01L2223/6616—Vertical connections, e.g. vias
- H01L2223/6622—Coaxial feed-throughs in active or passive substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
- H01L23/15—Ceramic or glass substrates
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Computer Networks & Wireless Communication (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Products (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010401883.2A CN111785691B (en) | 2020-05-13 | 2020-05-13 | Radio frequency micro-system three-dimensional packaging shell structure and manufacturing method |
PCT/CN2020/101830 WO2021227240A1 (en) | 2020-05-13 | 2020-07-14 | Three-dimensional packaging housing structure of radio frequency microsystem and manufacturing method |
Publications (2)
Publication Number | Publication Date |
---|---|
EP4109518A1 EP4109518A1 (en) | 2022-12-28 |
EP4109518A4 true EP4109518A4 (en) | 2023-09-06 |
Family
ID=72753570
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP20935562.7A Pending EP4109518A4 (en) | 2020-05-13 | 2020-07-14 | Three-dimensional packaging housing structure of radio frequency microsystem and manufacturing method |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP4109518A4 (en) |
CN (1) | CN111785691B (en) |
WO (1) | WO2021227240A1 (en) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112151477A (en) * | 2020-08-20 | 2020-12-29 | 山东航天电子技术研究所 | System-in-package housing and application |
CN112652613A (en) * | 2020-12-22 | 2021-04-13 | 中国电子科技集团公司第五十五研究所 | Multi-channel micro-system packaging assembly with three-dimensional stacking form and manufacturing method thereof |
CN112635444B (en) * | 2020-12-22 | 2022-05-10 | 中国电子科技集团公司第五十五研究所 | Three-dimensional stacked microsystem packaging assembly and manufacturing method thereof |
CN112635443B (en) * | 2020-12-22 | 2022-03-08 | 中国电子科技集团公司第五十五研究所 | Radio frequency micro-system three-dimensional packaging assembly with multi-stage substrate stacking and vertical heat dissipation channel and manufacturing method |
CN113271721A (en) * | 2021-04-30 | 2021-08-17 | 北京七星华创微电子有限责任公司 | High-integration-level fully-sealed three-dimensional surface-mounted circuit integration assembly process |
CN113255282A (en) * | 2021-07-14 | 2021-08-13 | 中国电子科技集团公司信息科学研究院 | Radio frequency micro-system design method and device, electronic equipment and storage medium |
CN114915330A (en) * | 2022-03-31 | 2022-08-16 | 航天恒星科技有限公司 | Satellite terminal with integrated baseband and radio frequency |
CN114864512B (en) * | 2022-05-12 | 2023-06-13 | 石家庄烽瓷电子技术有限公司 | K-band radio frequency microsystem three-dimensional receiving and transmitting assembly based on HTCC |
CN115172291A (en) * | 2022-07-27 | 2022-10-11 | 石家庄烽瓷电子技术有限公司 | HTCC structure with micro-channels |
CN115274568A (en) * | 2022-08-01 | 2022-11-01 | 中国电子科技集团公司第五十四研究所 | Radio frequency front end three-dimensional integrated structure |
CN115662965A (en) * | 2022-12-15 | 2023-01-31 | 成都华兴大地科技有限公司 | Novel high-power-consumption chip packaging structure and packaging method |
CN115831880A (en) * | 2023-02-13 | 2023-03-21 | 成都华兴大地科技有限公司 | Novel chip integrated packaging structure |
CN116253577B (en) * | 2023-03-10 | 2024-03-29 | 合肥圣达电子科技实业有限公司 | Ceramic shell for quantum computation and preparation method thereof |
CN117038646B (en) * | 2023-10-08 | 2024-01-26 | 之江实验室 | Ceramic packaging structure and design method thereof |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102738131A (en) * | 2012-03-07 | 2012-10-17 | 苏州晶方半导体科技股份有限公司 | Semiconductor module, packaging structure and packaging method thereof |
US20150131248A1 (en) * | 2012-05-17 | 2015-05-14 | Eagantu Ltd. | Three-dimensional modules for electronic integration |
US20170142822A1 (en) * | 2015-11-17 | 2017-05-18 | Ngk Spark Plug Co., Ltd. | Wiring substrate |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7262079B2 (en) * | 2005-02-10 | 2007-08-28 | Altera Corporation | Consolidated flip chip BGA assembly process and apparatus |
CN101714543B (en) * | 2009-11-12 | 2011-10-05 | 美新半导体(无锡)有限公司 | Ceramic substrate for three-dimensional packaging of multi-chip system and packaging method thereof |
CN104051352A (en) * | 2014-06-13 | 2014-09-17 | 中国电子科技集团公司第五十五研究所 | Millimeter wave chip carrier based on high temperature co-fired ceramic and manufacturing method thereof |
CN104269382B (en) * | 2014-08-20 | 2017-04-19 | 中国电子科技集团公司第五十五研究所 | X-wave-band high-reliability surface-mounted type ceramic shell based on high-temperature co-firing ceramic technology |
JP6881913B2 (en) * | 2015-11-17 | 2021-06-02 | 日本特殊陶業株式会社 | Wiring board |
CN105870071A (en) * | 2016-06-28 | 2016-08-17 | 中国电子科技集团公司第十三研究所 | Aluminum nitride multilayer-ceramic leadless-periphery flat packaging shell |
CN109950211B (en) * | 2017-11-22 | 2020-12-18 | 中国电子科技集团公司第五十五研究所 | X-waveband double-sided multi-cavity structure ceramic shell and multilayer ceramic co-firing process method |
CN108428672B (en) * | 2018-04-17 | 2020-06-23 | 中国电子科技集团公司第二十九研究所 | Ceramic double-sided three-dimensional integrated framework and packaging method of ultra-wideband radio frequency micro-system |
CN109103165B (en) * | 2018-07-03 | 2019-12-10 | 中国电子科技集团公司第二十九研究所 | LTCC substrate three-dimensional stacking structure and airtight packaging method thereof |
CN109545771A (en) * | 2018-09-14 | 2019-03-29 | 中国电子科技集团公司第五十五研究所 | A kind of highly integrated module level encapsulation nitride multilayer aluminum substrate and its manufacturing method |
CN109637980A (en) * | 2018-10-29 | 2019-04-16 | 中国电子科技集团公司第五十五研究所 | A kind of ceramic flat surface pad array package casing and processing method |
-
2020
- 2020-05-13 CN CN202010401883.2A patent/CN111785691B/en active Active
- 2020-07-14 EP EP20935562.7A patent/EP4109518A4/en active Pending
- 2020-07-14 WO PCT/CN2020/101830 patent/WO2021227240A1/en unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102738131A (en) * | 2012-03-07 | 2012-10-17 | 苏州晶方半导体科技股份有限公司 | Semiconductor module, packaging structure and packaging method thereof |
US20150131248A1 (en) * | 2012-05-17 | 2015-05-14 | Eagantu Ltd. | Three-dimensional modules for electronic integration |
US20170142822A1 (en) * | 2015-11-17 | 2017-05-18 | Ngk Spark Plug Co., Ltd. | Wiring substrate |
Also Published As
Publication number | Publication date |
---|---|
CN111785691B (en) | 2022-03-11 |
CN111785691A (en) | 2020-10-16 |
EP4109518A1 (en) | 2022-12-28 |
WO2021227240A1 (en) | 2021-11-18 |
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DAV | Request for validation of the european patent (deleted) | ||
DAX | Request for extension of the european patent (deleted) | ||
A4 | Supplementary search report drawn up and despatched |
Effective date: 20230808 |
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RIC1 | Information provided on ipc code assigned before grant |
Ipc: H01L 23/66 20060101ALN20230802BHEP Ipc: G01S 7/03 20060101ALN20230802BHEP Ipc: H01L 23/367 20060101ALI20230802BHEP Ipc: H01L 23/15 20060101ALI20230802BHEP Ipc: H01L 23/13 20060101ALI20230802BHEP Ipc: H01L 23/053 20060101AFI20230802BHEP |