EP4049790A4 - Meuleuse pour barreau de silicium et procédé de meulage de barreau de silicium - Google Patents

Meuleuse pour barreau de silicium et procédé de meulage de barreau de silicium Download PDF

Info

Publication number
EP4049790A4
EP4049790A4 EP20878608.7A EP20878608A EP4049790A4 EP 4049790 A4 EP4049790 A4 EP 4049790A4 EP 20878608 A EP20878608 A EP 20878608A EP 4049790 A4 EP4049790 A4 EP 4049790A4
Authority
EP
European Patent Office
Prior art keywords
silicon rod
rod grinding
grinding machine
grinding method
machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP20878608.7A
Other languages
German (de)
English (en)
Other versions
EP4049790A1 (fr
Inventor
Jianwei Lu
Jinghong SU
Xueming Pan
Xin Li
Qifeng Cao
Chunjun QIAN
Bin Li
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tdg Nissin Precision Machinery Co Ltd
Original Assignee
Tdg Nissin Precision Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CN201911015579.8A external-priority patent/CN112706012A/zh
Priority claimed from CN201911015504.XA external-priority patent/CN112706046A/zh
Application filed by Tdg Nissin Precision Machinery Co Ltd filed Critical Tdg Nissin Precision Machinery Co Ltd
Publication of EP4049790A1 publication Critical patent/EP4049790A1/fr
Publication of EP4049790A4 publication Critical patent/EP4049790A4/fr
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
    • B24B5/02—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centres or chucks for holding work
    • B24B5/04—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centres or chucks for holding work for grinding cylindrical surfaces externally
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/005—Feeding or manipulating devices specially adapted to grinding machines

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
EP20878608.7A 2019-10-24 2020-04-27 Meuleuse pour barreau de silicium et procédé de meulage de barreau de silicium Pending EP4049790A4 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201911015579.8A CN112706012A (zh) 2019-10-24 2019-10-24 硅棒研磨机及硅棒研磨方法
CN201911015504.XA CN112706046A (zh) 2019-10-24 2019-10-24 硅棒研磨机及硅棒研磨方法
PCT/CN2020/087096 WO2021077705A1 (fr) 2019-10-24 2020-04-27 Meuleuse pour barreau de silicium et procédé de meulage de barreau de silicium

Publications (2)

Publication Number Publication Date
EP4049790A1 EP4049790A1 (fr) 2022-08-31
EP4049790A4 true EP4049790A4 (fr) 2023-03-01

Family

ID=75619683

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20878608.7A Pending EP4049790A4 (fr) 2019-10-24 2020-04-27 Meuleuse pour barreau de silicium et procédé de meulage de barreau de silicium

Country Status (2)

Country Link
EP (1) EP4049790A4 (fr)
WO (1) WO2021077705A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114473670A (zh) * 2021-12-27 2022-05-13 保山隆基硅材料有限公司 硅棒端面返修方法及设备
CN114367877B (zh) * 2022-01-11 2024-03-19 苏州安田丰科技有限公司 一种晶圆notch定位槽的加工方法及装置
CN115256229B (zh) * 2022-08-11 2024-05-10 北京泰和磁记录制品有限公司 一种刷卡磁头夹具的自动输运装置以及r磨装置
CN115383594B (zh) * 2022-08-31 2024-02-20 南京宏亚建设集团有限公司 一种建筑工程用钢管表面除锈装置
CN115673895B (zh) * 2022-11-11 2023-07-07 苏师大半导体材料与设备研究院(邳州)有限公司 一种半导体材料芯片合成设备
CN117697546A (zh) * 2023-11-30 2024-03-15 扬州市铭合动力科技有限公司 一种轴类零件自动打磨装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0611454B2 (ja) * 1986-03-22 1994-02-16 本田技研工業株式会社 搬送装置における治具の交換装置
TWM408446U (en) * 2010-11-19 2011-08-01 Lin hui bao Material placement mechanism and material handling mechanism
CN108942570A (zh) 2017-05-19 2018-12-07 浙江集英精密机器有限公司 硅棒多工位加工机及硅棒多工位加工方法
CN208289401U (zh) * 2017-11-27 2018-12-28 浙江精匠智能科技有限公司 一种全自动转子多工位加工专机
CN108544289A (zh) * 2018-06-20 2018-09-18 深圳市艺中乐珠宝有限公司 一种工件多工位加工同步移送装置
CN109877670A (zh) * 2019-04-16 2019-06-14 江苏协鑫硅材料科技发展有限公司 一种全自动硅锭倒角设备
CN110355669B (zh) * 2019-08-20 2024-04-02 青岛高测科技股份有限公司 一种晶硅粗磨精磨一体机及其使用方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
No further relevant documents disclosed *

Also Published As

Publication number Publication date
EP4049790A1 (fr) 2022-08-31
WO2021077705A1 (fr) 2021-04-29

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