EP3796391A1 - Oled display substrate and manufacturing method therefor, and display device - Google Patents
Oled display substrate and manufacturing method therefor, and display device Download PDFInfo
- Publication number
- EP3796391A1 EP3796391A1 EP19804297.0A EP19804297A EP3796391A1 EP 3796391 A1 EP3796391 A1 EP 3796391A1 EP 19804297 A EP19804297 A EP 19804297A EP 3796391 A1 EP3796391 A1 EP 3796391A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- manufacturing
- capacitor electrode
- oled display
- insulating layer
- base substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 176
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 92
- 239000003990 capacitor Substances 0.000 claims abstract description 250
- 238000003860 storage Methods 0.000 claims abstract description 112
- 239000010410 layer Substances 0.000 claims description 168
- 229910052751 metal Inorganic materials 0.000 claims description 35
- 239000002184 metal Substances 0.000 claims description 35
- 238000000034 method Methods 0.000 claims description 28
- 238000002834 transmittance Methods 0.000 claims description 17
- 238000002161 passivation Methods 0.000 claims description 13
- 239000011229 interlayer Substances 0.000 claims description 11
- 239000004020 conductor Substances 0.000 claims description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 7
- 229910016027 MoTi Inorganic materials 0.000 claims description 7
- 229910021389 graphene Inorganic materials 0.000 claims description 7
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 238000000059 patterning Methods 0.000 claims description 3
- 238000005468 ion implantation Methods 0.000 claims description 2
- 238000012545 processing Methods 0.000 claims description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 61
- 230000008569 process Effects 0.000 description 12
- 229910052719 titanium Inorganic materials 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 150000004767 nitrides Chemical class 0.000 description 6
- 238000011161 development Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 5
- 229910052779 Neodymium Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 4
- 229910052748 manganese Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910052715 tantalum Inorganic materials 0.000 description 4
- 238000002207 thermal evaporation Methods 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 239000012495 reaction gas Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 229920001621 AMOLED Polymers 0.000 description 2
- 229910003818 SiH2Cl2 Inorganic materials 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000002355 dual-layer Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
- H10K59/1216—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1248—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1255—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs integrated with passive devices, e.g. auxiliary capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/81—Anodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/124—Insulating layers formed between TFT elements and OLED elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/126—Shielding, e.g. light-blocking means over the TFTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
- H01L27/1225—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/1201—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/805—Electrodes
- H10K59/8051—Anodes
Definitions
- the present disclosure relates to the field of display technology, and in particular, relates to an OLED display substrate, a method of manufacturing the OLED display substrate, and a display device.
- An Active-Matrix Organic Light Emitting Diode (AMOLED) display has a wide market application.
- a bottom-emission type Organic Light Emitting Diode (OLED) display device is mainly used for a large-size display, such as an OLED television.
- OLED Organic Light Emitting Diode
- a large-size OLED display has a problem of a low aperture ratio.
- An OLED display substrate, a method of manufacturing the OLED display substrate, and a display device are provided.
- an Organic Light Emitting Diode (OLED) display substrate includes a plurality of aperture regions arranged in an array on a base substrate; and a plurality of storage capacitors on the base substrate, wherein an orthographic projection of each storage capacitor of the plurality of storage capacitors on the base substrate has an overlapping region with an orthographic projection of an aperture region corresponding to the storage capacitor in the plurality of aperture regions on the base substrate.
- a light transmittance of each of the plurality of storage capacitors is greater than a preset threshold value, the orthographic projection of the each of the plurality of storage capacitors on the base substrate is within the orthographic projection of the aperture region corresponding to the storage capacitor on the base substrate.
- the storage capacitor includes a first capacitor electrode, a first insulating layer on the first capacitor electrode, a second capacitor electrode on the first insulating layer, a second insulating layer on the second capacitor electrode, and a third capacitor electrode on the second insulating layer, and the third capacitor electrode is electrically connected to the first capacitor electrode.
- the first capacitor electrode is an electrically-conductive active layer; the second capacitor electrode is a transparent electrode; the third capacitor electrode is an anode of the OLED display substrate.
- the transparent electrode is made of one of ITO, graphene, and MoTi.
- the preset threshold value is 80% or more.
- the first insulating layer is an interlayer insulating layer
- the second insulating layer is a passivation layer
- the OLED display substrate further includes a gate insulating layer, a gate electrode, and a gate line between the first capacitor electrode and the first insulating layer.
- the OLED display substrate further includes: a source electrode, a drain electrode, and a data line in a same layer as the second capacitor electrode.
- the OLED display substrate further includes a light-shielding metal layer at a side of the first capacitor electrode facing towards the base substrate; and a buffer layer between the light-shielding metal layer and the first capacitor electrode.
- a display device in a second aspect, includes the OLED display substrate according to the first aspect.
- a method of manufacturing an OLED display substrate includes a plurality of aperture regions arranged in an array on a base substrate.
- the method includes: manufacturing a plurality of storage capacitors on the base substrate, an orthographic projection of each of the plurality of storage capacitors on the base substrate having an overlapping region with an orthographic projection of an aperture region corresponding to the storage capacitor in the plurality of aperture regions on the base substrate.
- manufacturing the plurality of storage capacitors on the base substrate, the orthographic projection of each of the plurality of storage capacitors on the base substrate having the overlapping region with the orthographic projection of the aperture region corresponding to the storage capacitor in the plurality of aperture regions on the base substrate includes: manufacturing the storage capacitor on the base substrate, the storage capacitor having a light transmittance greater than a preset threshold, the orthographic projection of the storage capacitor on the base substrate being within the orthographic projection of the aperture region on the base substrate.
- manufacturing the storage capacitor on the base substrate includes manufacturing a first capacitor electrode on the base substrate; manufacturing a first insulating layer on the first capacitor electrode; manufacturing a second capacitor electrode on the first insulating layer; manufacturing a second insulating layer on the second capacitor electrode; manufacturing a third capacitor electrode on the second insulating layer, wherein the third capacitor electrode is electrically connected to the first capacitor electrode.
- manufacturing the first capacitor electrode includes manufacturing the first capacitor electrode by using an electrically-conductive active layer; manufacturing the second capacitor electrode includes manufacturing the second capacitor electrode by using a transparent electrically-conductive material; manufacturing the third capacitor electrode includes using an anode of the OLED display substrate as the third capacitor electrode.
- the transparent electrode is made of one of ITO, graphene, and MoTi.
- the preset threshold value is 80% or more.
- manufacturing a first insulating layer on the first capacitor electrode includes: manufacturing an interlayer insulating layer on the first capacitor electrode; manufacturing a second insulating layer on the second capacitor electrode includes: manufacturing a passivation layer on the second capacitor electrode.
- the method further includes manufacturing a gate insulating layer, a gate electrode, and a gate line on the first capacitor electrode.
- the method further includes: manufacturing a source electrode, a drain electrode, and a data line in a layer where the second capacitor electrode is in.
- the method before manufacturing the first capacitor electrode on the base substrate, the method further includes: manufacturing a light-shielding metal layer on the base substrate; and manufacturing a buffer layer on the light-shielding metal layer.
- manufacturing the first capacitor electrode by using the electrically-conductive active layer includes: patterning the gate insulating layer to form a via-hole penetrating through the gate insulating layer; performing ion implantation to a portion of the active layer through the via-hole to form the electrically-conducted active layer as the first capacitor electrode, the portion of the active layer being a portion needing an electrically-conductive processing.
- a related design of an OLED display substrate is that an aperture region and a storage capacitor are separated, and light cannot pass through a region where the storage capacitor is located, thereby reducing an aperture ratio of the OLED display substrate.
- FIG. 1 is a schematic diagram of positional relationship between an aperture region and a storage capacitor of a related OLED display substrate.
- FIG. 2 is a schematic diagram of a pixel structure of a related OLED display substrate. It may be seen that, in the related OLED display substrate, the aperture region B and the storage capacitor A are designed separately, and light cannot pass through the region where the storage capacitor is located, thereby reducing the aperture ratio of the OLED display substrate. Moreover, since the pixel structure is concentrated at a narrow space of a pixel, it is easy to cause electrical failure in a backplate manufacturing process, which is one of reasons why a product yield in production of an OLED display substrate is difficult to be improved.
- some embodiments of the present disclosure provide an OLED display substrate, a method of manufacturing the OLED display substrate, and a display device, so that the aperture ratio of the OLED display substrate may be improved.
- the OLED display substrate includes a plurality of aperture regions B arranged in an array on a base substrate, and a plurality of storage capacitors A, wherein, an orthographic projection of each of the plurality of storage capacitors A on the base substrate 21 has an overlapping region with an orthographic projection of an aperture region corresponding to the storage capacitor in the plurality of aperture regions B on the base substrate 21.
- a light transmittance of each of the plurality of storage capacitors A is greater than a preset threshold value, for example, 80% or more, such as, 90%, 95%, etc.
- the light transmittance of the storage capacitor is greater than the preset threshold value, and the orthographic projection of the storage capacitor on the base substrate and the orthographic projection of the aperture region on the base substrate are designed to have the overlapping region.
- an area of the storage capacitor may be increased, and an area of the aperture region of a pixel may be increased, too, so that the aperture ratio of the OLED display substrate may be improved.
- a space occupied by the pixel is increased, a line density is remarkably decreased, and the product yield is also improved.
- An electrode of the storage capacitor may be made of a transparent conductive material.
- the light transmittance of the storage capacitor may be more than 80%, so that the storage capacitor may be designed to be in the aperture region and an area of the aperture region of the pixel may be increased, thereby further increasing the aperture ratio of the OLED display substrate.
- an orthographic projection of the storage capacitor A (a portion in a dashed box) on the base substrate falls within an orthographic projection of the aperture region B on the base substrate.
- the storage capacitor A does not occupy an area other than the aperture region B, so that the area of the aperture region may be maximized due to no requirement of an area used to accommodate the storage capacitor outside the aperture region.
- the storage capacitor includes a first capacitor electrode 24, a first insulating layer 25 on the first capacitor electrode 24, a second capacitor electrode 26 on the first insulating layer 25, a second insulating layer 27 on the second capacitor electrode 26, and a third capacitor electrode 28 on the second insulating layer 27, wherein the third capacitor electrode 28 is electrically connected to the first capacitor electrode 24.
- the first capacitor electrode 24 and the second capacitor electrode 26 provide a first capacitor C1, the second capacitor electrode and the third capacitor electrode provide a second capacitor C2, and the two capacitors are electrically connected approximately in parallel (in parallel).
- a capacitance value of the storage capacitor is a sum of capacitance values of the two capacitors.
- the first capacitor electrode 24 may be made of an electrically-conductive active layer; the second capacitor electrode 26 may be made of a transparent electrode; the third capacitor electrode 28 may be made of an anode of the OLED display substrate.
- the storage capacitor is formed of the transparent electrode, the electrically-conductive active layer and the anode by utilizing a characteristic of a high light transmittance of the transparent electrode, and the storage capacitor is used in the aperture region of the pixel, thereby both increasing the area of the aperture region of the pixel and increasing the area of the storage capacitor, and an capacitance of the formed storage capacitor is correspondingly increased. Meanwhile, since a pixel structure is greatly simplified, a line density is remarkably reduced, which is beneficial to improvement of the product yield.
- the anode of the OLED display substrate is also made of a transparent electrically-conductive material, so that both of the capacitor electrodes of the storage capacitor are transparent.
- the transparent electrodes may be made of one of indium tin oxide (ITO), graphene, and MoTi.
- ITO indium tin oxide
- a material of the transparent electrodes is not limited to the ITO, the graphene, and the MoTi, and other transparent electrically-conductive materials having a high light transmittance and an excellent electrical conductivity may be used.
- the OLED display substrate includes an interlayer insulating layer 25 between the first capacitor electrode 24 and the second capacitor electrode 26 and a passivation layer 27 between the second capacitor electrode 26 and the third capacitor electrode 28.
- the OLED display substrate includes a gate insulating layer, a gate electrode, and a gate line between the first capacitor electrode 24 and the interlayer insulating layer 25.
- the OLED display substrate includes a source electrode, a drain electrode, and a data line in a same layer as that of the second capacitor electrode 26.
- the OLED display substrate includes a light-shielding metal layer 22 at a side of the first capacitor electrode 24 facing towards the base substrate 21, and a buffer layer 23 between the light-shielding metal layer 22 and the first capacitor electrode 24.
- the light-shielding metal layer 22 may be a metal such as Cu, Al, Ag, Mo, Cr, Nd, Ni, Mn, Ti, Ta, W, or an alloy of these metals.
- the buffer layer 23 may be an oxide, a nitride, or an oxynitride.
- Some embodiments of the present disclosure also provide a display device including the OLED display substrate as described above.
- the display device may be any product or component having a display function such as a television, a display, a digital photo frame, a mobile phone, a tablet computer, and the like, wherein the display device further includes a flexible circuit board, a printed circuit board, and a backplate.
- the light transmittance of the storage capacitor is greater than the preset threshold value, and the orthographic projection of the storage capacitor on the base substrate and the orthographic projection of the aperture region corresponding to the storage capacitor on the base substrate are designed to have the overlapping region.
- an area of the storage capacitor may be increased, and an area of the aperture region of a pixel may be increased, too, so that the aperture ratio of the OLED display substrate may be improved.
- a space occupied by the pixel is increased, a line density is remarkably decreased, and the product yield is also improved.
- Some embodiments of the present disclosure also provide a method of manufacturing an OLED display substrate, the OLED display substrate including a plurality of aperture regions arranged in an array.
- the method including a step S1.
- Step S1 manufacturing a plurality of storage capacitors on a base substrate, wherein an orthographic projection of each of the plurality of storage capacitors on the base substrate has an overlapping region with an orthographic projection of an aperture region corresponding to the storage capacitor in the plurality of aperture regions on the base substrate.
- a light transmittance of each of the plurality of storage capacitors A is greater than a preset threshold value, for example, 80% or more, such as, 90%, 95%, etc.
- the storage capacitor having the light transmittance greater than the preset threshold value is manufactured on the base substrate, and the orthographic projection of the storage capacitor on the base substrate and the orthographic projection of the aperture region on the base substrate are designed to have the overlapping region.
- the area of the storage capacitor may be increased, and an area of the aperture region of a pixel may be increased, too, so that the aperture ratio of the OLED display substrate may be improved.
- the space occupied by the pixel is increased, the line density is remarkably decreased, and the product yield is also improved.
- An electrode of the storage capacitor may be made of a transparent electrically-conductive material, and the light transmittance of the storage capacitor may be more than 80% by selecting a material and a thickness of the electrode of the storage capacitor.
- the storage capacitor may be designed to be in the aperture region, so that the area of the aperture region of the pixel may be increased, thereby further improving the aperture ratio of the OLED display substrate.
- the orthographic projection of each of the plurality of storage capacitors on the base substrate has an overlapping region with the orthographic projection of the aperture region corresponding to the storage capacitor in the plurality of aperture regions on the base substrate, specifically includes that the orthographic projection of each of the plurality of storage capacitors on the base substrate falls within the orthographic projection of the aperture region corresponding to the storage capacitor in the plurality of aperture regions on the base substrate.
- the storage capacitor does not occupy an area other than the aperture region, so that the area of the aperture region may be maximized due to no requirement of an area used to accommodate the storage capacitor outside the aperture region.
- manufacturing a storage capacitor includes follow substeps S11-S15.
- the first capacitor electrode and the second capacitor electrode provide a first capacitor
- the second capacitor electrode and the third capacitor electrode provide a second capacitor
- the two capacitors are electrically connected approximately in parallel, so that a capacitance value of the storage capacitor is a sum of capacitance values of the two capacitors.
- the substep S11 of manufacturing the first capacitor electrode includes manufacturing the first capacitor electrode by using an electrically-conductive active layer.
- the substep S13 of manufacturing the second capacitor electrode on the first insulating layer includes manufacturing the second capacitor electrode by using a transparent electrically-conductive material.
- the substep S15 of manufacturing the third capacitor electrode on the second insulating layer includes: using an anode of the OLED display substrate as the third capacitor electrode.
- the storage capacitor is formed of the transparent electrode, the electrically-conductive active layer and the anode by utilizing the characteristic of the high light transmittance of the transparent electrode, and the storage capacitor is used in the aperture region of the pixel, thereby both increasing the area of the aperture region of the pixel and increasing the area of the storage capacitor, and an capacitance of the formed storage capacitor is correspondingly increased.
- the anode of the OLED display substrate is also made of a transparent electrically-conductive material, so that both of the capacitor electrodes of the storage capacitor are transparent, and the light transmittance of the storage capacitor may be ensured to be relatively high.
- the method of manufacturing the display substrate of the present disclosure will be described in detail hereinafter with reference to the drawings and specific examples.
- the method of manufacturing the display substrate in this example includes following steps 1-9.
- Step 1 providing a base substrate 21, and forming a light-shielding metal layer 22 on the base substrate 21.
- the base substrate 21 may be a glass substrate or a quartz substrate.
- the light-shielding metal layer 22 having a thickness of about 500 angstroms ( ⁇ ) to 4000 angstroms may be deposited on the base substrate 21 by using a method of sputtering or thermal evaporation.
- the light-shielding metal layer 22 may be a metal such as Cu, Al, Ag, Mo, Cr, Nd, Ni, Mn, Ti, Ta, and W, or an alloy of these metals.
- an active layer of the OLED display substrate in this example is made of a metal oxide semiconductor, and a performance of the metal oxide semiconductor is easily changed after being illuminated by light, it is necessary to form the light-shielding metal layer 22 on the base substrate 21, the light-shielding metal layer 22 may shield the active layer made of the metal oxide semiconductor from being illuminated by light.
- Step 2 forming a buffer layer 23 on the based substrate 21 after the step 1.
- a Plasma Enhanced Chemical Vapor Deposition (PECVD) method may be used to deposit the buffer layer 23 on the base substrate 1 after the step 1, and the buffer layer 23 may be an oxide, a nitride, or an oxynitride.
- PECVD Plasma Enhanced Chemical Vapor Deposition
- Step 3 forming an active layer 24 on the substrate 21 after the step 2.
- IGZO having a thickness of 700 angstroms may be deposited on the base substrate 21 as the active layer 24 after the step 2.
- a layer of photoresist may be coated on the IGZO.
- the photoresist may be exposed by using a mask, so that a photoresist unreserved region and a photoresist reserved region may be formed, wherein the photoresist reserved region corresponds to a region where a pattern of the active layer 24 is located, and the photoresist unreserved region corresponds to a region other than the pattern.
- a development process is performed to completely remove the photoresist in the photoresist unreserved region, and a thickness of the photoresist in the photoresist reserved region is kept to be unchanged.
- the IGZO in the photoresist unreserved region is completely etched off by using an etching process, and the remaining photoresist is stripped off to form the pattern of the active layer 24.
- Step 4 forming a gate insulating layer, a gate electrode, and a gate line on the base substrate 21 after the step 3.
- the Plasma Enhanced Chemical Vapor Deposition (PECVD) method may be used to deposit a gate insulating layer having a thickness of 500 to 5000 angstroms on the base substrate 21 after the step 3, and the gate insulating layer may be made of an oxide, a nitride or an oxynitride, and a corresponding reaction gas is SiH 4 , NH 3 , N 2 , or SiH 2 Cl 2 , NH 3 , N 2 .
- PECVD Plasma Enhanced Chemical Vapor Deposition
- a gate metal layer having a thickness of about 500 to 4000 angstroms may be deposited on the gate insulating layer by sputtering or thermal evaporation, and the gate metal layer may be a metal such as Cu, Al, Ag, Mo, Cr, Nd, Ni, Mn, Ti, Ta, W, or an alloy of these metals.
- the gate metal layer may have a single-layer structure or a multi-layer structure such as Cu ⁇ Mo, Ti ⁇ Cu ⁇ Ti, Mo ⁇ Al ⁇ Mo, and the like.
- a layer of photoresist is coated on the gate metal layer, and the photoresist may be exposed by using a mask, so that a photoresist unreserved region and a photoresist reserved region may be formed, wherein the photoresist reserved region corresponds to regions where patterns of the gate line and the gate electrode are located, and the photoresist unreserved region corresponds to a region other than the patterns.
- a development process is performed to completely remove the photoresist in the photoresist unreserved region, and a thickness of the photoresist in the photoresist reserved region is kept to be unchanged.
- the gate metal layer in the photoresist unreserved region is completely etched off by using the etching process, and the remaining photoresist is stripped off to form patterns of the gate lines and the gate electrode.
- the gate insulating layer is dry-etched, and the active layer 24 needing an electrically-conductive process is implanted with H ions through a via hole penetrating through the gate insulating layer, so that the active layer 24 is electrically-conductive, and the electrically-conductive active layer 24 is used as the first capacitor electrode of the storage capacitor.
- Step 5 forming an interlayer insulating layer 25 on the base substrate 21 after the step 4.
- the Plasma Enhance Chemical Vapor Deposition method may be employed to deposit the interlayer insulating layer 25 on the base substrate 21 after the step 4.
- the interlayer insulating layer 25 may be an oxide, a nitride, or an oxynitride.
- a via-hole penetrating through the interlayer insulating layer 25 is formed by dry-etching.
- Step 6 forming a transparent electrode 26 on the base substrate 21 after the step 5.
- a transparent electrically-conductive layer is formed on the base substrate 21 after step 5.
- the transparent electrically-conductive layer may be made of ITO, graphene, MoTi or the like.
- a layer of photoresist is coated on the transparent electrically-conductive layer, and the photoresist is exposed by using a mask so that a photoresist unreserved region and a photoresist reserved region are formed, wherein the photoresist reserved region corresponds to a region where a pattern of the transparent electrode 26 is located, and the photoresist unreserved region corresponds to a region other than the pattern.
- a development process is performed so that the photoresist in the photoresist unreserved region is completely removed, and a thickness of the photoresist in the photoresist reserved region is kept to be unchanged.
- the transparent electrically-conductive layer in the photoresist unreserved region is completely etched off by using an etching process, and the remaining photoresist is stripped off to form a pattern of the transparent electrode 26, wherein, the transparent electrode 26 is connected to an S electrode (i.e., a point P in FIG. 2 ) of a T1 transistor in a pixel structure shown in FIG. 2 and is used as the second capacitor electrode of the storage capacitor.
- Step 7 forming patterns of a data line, a source electrode, and a drain electrode on the base substrate 21 after the step 6.
- a source-drain metal layer having a thickness of about 2000 to 4000 angstroms may be deposited on the base substrate 21 by magnetron sputtering, thermal evaporation, or other film forming methods after the step 6, and the source-drain metal layer may be a metal such as Cu, Al, Ag, Mo, Cr, Nd, Ni, Mn, Ti, Ta, W, or an alloy of these metals.
- the source-drain metal layer may have a single-layer structure or a multi-layer structure such as Cu ⁇ Mo, Ti ⁇ Cu ⁇ Ti, Mo ⁇ Al ⁇ Mo, and the like.
- a layer of photoresist is coated on the source-drain metal layer, and the photoresist may be exposed by using a mask, so that a photoresist unreserved region and a photoresist reserved region may be formed, wherein the photoresist reserved region corresponds to regions where patterns of a source electrode, a drain electrode, and a data line are located, and the photoresist unreserved region corresponds to a region other than the patterns.
- a development process is performed to completely remove the photoresist in the photoresist unreserved region, and a thickness of the photoresist in the photoresist reserved region is kept to be unchanged.
- the source-drain metal layer in the photoresist unreserved region is completely etched off by using the etching process, and the remaining photoresist is stripped off to form patterns of the source drain, the drain electrode, and the data line.
- Step 8 forming a passivation layer 27 on the base substrate 21 after the step 7..
- a passivation layer having a thickness of 1000 to 2000 angstroms may be deposited on the base substrate 21 by magnetron sputtering, thermal evaporation, PECVD, or other film forming methods after the step 7.
- the passivation layer may be formed of an oxide, a nitride or an oxynitride.
- a material of the passivation layer may be SiNx, SiOx, or Si(ON)x.
- the passivation layer may also be made of Al 2 O 3 .
- the passivation layer may be a single-layer structure or a dual-layer structure composed of silicon nitride and silicon oxide.
- a reaction gas corresponding to the silicon oxide may be SiH 4 , N 2 O.
- a reaction gas corresponding to the nitride or the oxynitride may be SiH 4 , NH 3 , N 2 or SiH 2 Cl 2 , NH 3 , N 2 .
- a pattern of the passivation layer 27 including a via-hole is formed by a patterning process.
- Step 9 forming an anode 28 on the base substrate 21 after the step 8.
- a transparent electrically-conductive layer is formed on the base substrate 21 after the step 8.
- the transparent electrically-conductive layer may be ITO.
- a layer of photoresist may be coated on the transparent electrically-conductive layer, and the photoresist is exposed by using a mask so that a photoresist unreserved region and a photoresist reserved region of the photoresist is formed, wherein the photoresist reserved region corresponds to a region where the pattern of the anode 28 is located, and the photoresist unreserved region corresponds to a region other than the pattern.
- a development process is performed to completely remove the photoresist in the photoresist unreserved region, and a thickness of the photoresist in the photoresist reserved region is kept to be unchanged.
- the transparent electrically-conductive layer in the photoresist unreserved region is completely etched off by an etching process, and the remaining photoresist is stripped off to form a pattern of the anode 28, wherein, the anode 28 is connected to the S electrode (a node U in FIG. 2 ) of the T2 transistor in the pixel structure shown in FIG. 2 and is used as the third capacitor electrode of the storage capacitor.
- the storage capacitor of the OLED display substrate is manufactured, and the structure of the storage capacitor is shown in FIG. 4 , wherein the electrically-conductive active layer 24, the transparent electrode 26 and the anode 28 are used as capacitor electrodes of the storage capacitor.
- the storage capacitor of the present example has a high light transmittance, and thus may be designed to be in the aperture region, so that the area of the aperture region of the pixel is increased, the area of the storage capacitor is increased, and the capacitance of the formed storage capacitor is correspondingly increased.
- the light transmittance of the storage capacitor is great than the preset threshold value
- the orthographic projection of the storage capacitor on the base substrate and the orthographic projection of the aperture region on the base substrate are designed to have the overlap region, so that the area of the storage capacitor may be increased and the area of the aperture region of the pixel is increased, so that the aperture ratio of the OLED display substrate may be improved.
- the space occupied by the pixel structure is increased, the linear density is remarkably decreased, thereby facilitating improvement of the product yield.
- sequence numbers of the steps are not used to define an order of the steps, and variations in the order of steps obtained by those of ordinary skills in the art without paying creative effort are also within the scope of the present disclosure.
- an element such as a layer, a film, a region or a substrate
- the element may be located 'directly above' or 'directly above' another element, or an intermediate element may be present.
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Geometry (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Description
- This application claims a priority to a Chinese Patent Application No.
201810469781.7 - The present disclosure relates to the field of display technology, and in particular, relates to an OLED display substrate, a method of manufacturing the OLED display substrate, and a display device.
- An Active-Matrix Organic Light Emitting Diode (AMOLED) display has a wide market application. In the related art, a bottom-emission type Organic Light Emitting Diode (OLED) display device is mainly used for a large-size display, such as an OLED television. However, a large-size OLED display has a problem of a low aperture ratio.
- An OLED display substrate, a method of manufacturing the OLED display substrate, and a display device are provided.
- In a first aspect, an Organic Light Emitting Diode (OLED) display substrate is provided. The OLED display substrate includes a plurality of aperture regions arranged in an array on a base substrate; and a plurality of storage capacitors on the base substrate, wherein an orthographic projection of each storage capacitor of the plurality of storage capacitors on the base substrate has an overlapping region with an orthographic projection of an aperture region corresponding to the storage capacitor in the plurality of aperture regions on the base substrate.
- Optionally, a light transmittance of each of the plurality of storage capacitors is greater than a preset threshold value, the orthographic projection of the each of the plurality of storage capacitors on the base substrate is within the orthographic projection of the aperture region corresponding to the storage capacitor on the base substrate.
- Optionally, the storage capacitor includes a first capacitor electrode, a first insulating layer on the first capacitor electrode, a second capacitor electrode on the first insulating layer, a second insulating layer on the second capacitor electrode, and a third capacitor electrode on the second insulating layer, and the third capacitor electrode is electrically connected to the first capacitor electrode.
- Optionally, the first capacitor electrode is an electrically-conductive active layer; the second capacitor electrode is a transparent electrode; the third capacitor electrode is an anode of the OLED display substrate.
- Optionally, the transparent electrode is made of one of ITO, graphene, and MoTi.
- Optionally, the preset threshold value is 80% or more.
- Optionally, the first insulating layer is an interlayer insulating layer, and the second insulating layer is a passivation layer.
- Optionally, the OLED display substrate further includes a gate insulating layer, a gate electrode, and a gate line between the first capacitor electrode and the first insulating layer.
- Optionally, the OLED display substrate further includes: a source electrode, a drain electrode, and a data line in a same layer as the second capacitor electrode.
- Optionally, the OLED display substrate further includes a light-shielding metal layer at a side of the first capacitor electrode facing towards the base substrate; and a buffer layer between the light-shielding metal layer and the first capacitor electrode.
- In a second aspect, a display device is provided. The display device includes the OLED display substrate according to the first aspect.
- In a third aspect, a method of manufacturing an OLED display substrate is provided, wherein the OLED display substrate includes a plurality of aperture regions arranged in an array on a base substrate. The method includes: manufacturing a plurality of storage capacitors on the base substrate, an orthographic projection of each of the plurality of storage capacitors on the base substrate having an overlapping region with an orthographic projection of an aperture region corresponding to the storage capacitor in the plurality of aperture regions on the base substrate.
- Optionally, manufacturing the plurality of storage capacitors on the base substrate, the orthographic projection of each of the plurality of storage capacitors on the base substrate having the overlapping region with the orthographic projection of the aperture region corresponding to the storage capacitor in the plurality of aperture regions on the base substrate, includes: manufacturing the storage capacitor on the base substrate, the storage capacitor having a light transmittance greater than a preset threshold, the orthographic projection of the storage capacitor on the base substrate being within the orthographic projection of the aperture region on the base substrate.
- Optionally, manufacturing the storage capacitor on the base substrate, includes manufacturing a first capacitor electrode on the base substrate; manufacturing a first insulating layer on the first capacitor electrode; manufacturing a second capacitor electrode on the first insulating layer; manufacturing a second insulating layer on the second capacitor electrode; manufacturing a third capacitor electrode on the second insulating layer, wherein the third capacitor electrode is electrically connected to the first capacitor electrode.
- Optionally, manufacturing the first capacitor electrode includes manufacturing the first capacitor electrode by using an electrically-conductive active layer; manufacturing the second capacitor electrode includes manufacturing the second capacitor electrode by using a transparent electrically-conductive material; manufacturing the third capacitor electrode includes using an anode of the OLED display substrate as the third capacitor electrode.
- Optionally, the transparent electrode is made of one of ITO, graphene, and MoTi.
- Optionally, the preset threshold value is 80% or more.
- Optionally, manufacturing a first insulating layer on the first capacitor electrode includes: manufacturing an interlayer insulating layer on the first capacitor electrode; manufacturing a second insulating layer on the second capacitor electrode includes: manufacturing a passivation layer on the second capacitor electrode.
- Optionally, after manufacturing the first capacitor electrode on the base substrate, before manufacturing the first insulating layer on the first capacitor electrode, the method further includes manufacturing a gate insulating layer, a gate electrode, and a gate line on the first capacitor electrode.
- Optionally, after manufacturing the second capacitor electrode on the first insulating layer, before manufacturing the second insulating layer on the second capacitor electrode, the method further includes: manufacturing a source electrode, a drain electrode, and a data line in a layer where the second capacitor electrode is in.
- Optionally, before manufacturing the first capacitor electrode on the base substrate, the method further includes: manufacturing a light-shielding metal layer on the base substrate; and manufacturing a buffer layer on the light-shielding metal layer.
- Optionally, after manufacturing the gate insulating layer, the gate electrode, and the gate line on the first capacitor electrode, manufacturing the first capacitor electrode by using the electrically-conductive active layer, includes: patterning the gate insulating layer to form a via-hole penetrating through the gate insulating layer; performing ion implantation to a portion of the active layer through the via-hole to form the electrically-conducted active layer as the first capacitor electrode, the portion of the active layer being a portion needing an electrically-conductive processing.
-
-
FIG. 1 is a schematic diagram of positional relationship between an aperture region and a storage capacitor in a related OLED display substrate; -
FIG. 2 is a schematic diagram of a pixel structure of a related OLED display substrate; -
FIG. 3 is a schematic structural diagram of a storage capacitor of an OLED display substrate in the present disclosure; -
FIG. 4 is a schematic diagram of positional relationship between an aperture region and a storage capacitor in an OLED display substrate according to some embodiments of the present disclosure; and -
FIG. 5 is a specific schematic structural diagram of a storage capacitor inn OLED display substrate according to some embodiments of the present disclosure. -
- A a storage capacitor
- B an aperture region
- 21 a base substrate
- 22 a light-shielding metal layer
- 23 a buffer layer
- 24 a first capacitor electrode or an active layer
- 25 an interlayer insulating layer
- 26 a second capacitor electrode or a transparent electrode
- 27 a passivation layer
- 28 a third capacitor electrode or an anode
- In order to make a technical problem, a technical solution and an advantage to be solved by the present disclosure more apparent, following detailed description will be made with reference to accompanying drawings and specific embodiments.
- A related design of an OLED display substrate is that an aperture region and a storage capacitor are separated, and light cannot pass through a region where the storage capacitor is located, thereby reducing an aperture ratio of the OLED display substrate.
- The aperture ratio of a related OLED display using a 3T1C pixel structure is approximately between 20% and 30%.
FIG. 1 is a schematic diagram of positional relationship between an aperture region and a storage capacitor of a related OLED display substrate.FIG. 2 is a schematic diagram of a pixel structure of a related OLED display substrate. It may be seen that, in the related OLED display substrate, the aperture region B and the storage capacitor A are designed separately, and light cannot pass through the region where the storage capacitor is located, thereby reducing the aperture ratio of the OLED display substrate. Moreover, since the pixel structure is concentrated at a narrow space of a pixel, it is easy to cause electrical failure in a backplate manufacturing process, which is one of reasons why a product yield in production of an OLED display substrate is difficult to be improved. - In view of the above problems, some embodiments of the present disclosure provide an OLED display substrate, a method of manufacturing the OLED display substrate, and a display device, so that the aperture ratio of the OLED display substrate may be improved.
- Some embodiments of the present disclosure provide an OLED display substrate. Referring to
FIG. 3 to FIG. 5 , the OLED display substrate includes a plurality of aperture regions B arranged in an array on a base substrate, and a plurality of storage capacitors A, wherein, an orthographic projection of each of the plurality of storage capacitors A on thebase substrate 21 has an overlapping region with an orthographic projection of an aperture region corresponding to the storage capacitor in the plurality of aperture regions B on thebase substrate 21. - Optionally, a light transmittance of each of the plurality of storage capacitors A is greater than a preset threshold value, for example, 80% or more, such as, 90%, 95%, etc.
- In this example, the light transmittance of the storage capacitor is greater than the preset threshold value, and the orthographic projection of the storage capacitor on the base substrate and the orthographic projection of the aperture region on the base substrate are designed to have the overlapping region. In this way, an area of the storage capacitor may be increased, and an area of the aperture region of a pixel may be increased, too, so that the aperture ratio of the OLED display substrate may be improved. In addition, a space occupied by the pixel is increased, a line density is remarkably decreased, and the product yield is also improved.
- An electrode of the storage capacitor may be made of a transparent conductive material. By selecting the material and a thickness of an electrode of the storage capacitor, the light transmittance of the storage capacitor may be more than 80%, so that the storage capacitor may be designed to be in the aperture region and an area of the aperture region of the pixel may be increased, thereby further increasing the aperture ratio of the OLED display substrate.
- Optionally, as shown in
FIG. 4 , an orthographic projection of the storage capacitor A (a portion in a dashed box) on the base substrate falls within an orthographic projection of the aperture region B on the base substrate. In this way, the storage capacitor A does not occupy an area other than the aperture region B, so that the area of the aperture region may be maximized due to no requirement of an area used to accommodate the storage capacitor outside the aperture region. - In a specific example, referring to
FIG. 3 andFIG. 5 , the storage capacitor includes afirst capacitor electrode 24, a first insulatinglayer 25 on thefirst capacitor electrode 24, asecond capacitor electrode 26 on the first insulatinglayer 25, a second insulatinglayer 27 on thesecond capacitor electrode 26, and athird capacitor electrode 28 on the second insulatinglayer 27, wherein thethird capacitor electrode 28 is electrically connected to thefirst capacitor electrode 24. Thefirst capacitor electrode 24 and thesecond capacitor electrode 26 provide a first capacitor C1, the second capacitor electrode and the third capacitor electrode provide a second capacitor C2, and the two capacitors are electrically connected approximately in parallel (in parallel). Thus, a capacitance value of the storage capacitor is a sum of capacitance values of the two capacitors. - The
first capacitor electrode 24 may be made of an electrically-conductive active layer; thesecond capacitor electrode 26 may be made of a transparent electrode; thethird capacitor electrode 28 may be made of an anode of the OLED display substrate. In this example, the storage capacitor is formed of the transparent electrode, the electrically-conductive active layer and the anode by utilizing a characteristic of a high light transmittance of the transparent electrode, and the storage capacitor is used in the aperture region of the pixel, thereby both increasing the area of the aperture region of the pixel and increasing the area of the storage capacitor, and an capacitance of the formed storage capacitor is correspondingly increased. Meanwhile, since a pixel structure is greatly simplified, a line density is remarkably reduced, which is beneficial to improvement of the product yield. In general, the anode of the OLED display substrate is also made of a transparent electrically-conductive material, so that both of the capacitor electrodes of the storage capacitor are transparent. - Optionally, the transparent electrodes may be made of one of indium tin oxide (ITO), graphene, and MoTi. Of course, a material of the transparent electrodes is not limited to the ITO, the graphene, and the MoTi, and other transparent electrically-conductive materials having a high light transmittance and an excellent electrical conductivity may be used.
- Optionally, the OLED display substrate includes an interlayer insulating
layer 25 between thefirst capacitor electrode 24 and thesecond capacitor electrode 26 and apassivation layer 27 between thesecond capacitor electrode 26 and thethird capacitor electrode 28. - Optionally, the OLED display substrate includes a gate insulating layer, a gate electrode, and a gate line between the
first capacitor electrode 24 and the interlayer insulatinglayer 25. - Optionally, the OLED display substrate includes a source electrode, a drain electrode, and a data line in a same layer as that of the
second capacitor electrode 26. - Optionally, the OLED display substrate includes a light-shielding
metal layer 22 at a side of thefirst capacitor electrode 24 facing towards thebase substrate 21, and abuffer layer 23 between the light-shieldingmetal layer 22 and thefirst capacitor electrode 24. The light-shieldingmetal layer 22 may be a metal such as Cu, Al, Ag, Mo, Cr, Nd, Ni, Mn, Ti, Ta, W, or an alloy of these metals. Thebuffer layer 23 may be an oxide, a nitride, or an oxynitride. - Some embodiments of the present disclosure also provide a display device including the OLED display substrate as described above. The display device may be any product or component having a display function such as a television, a display, a digital photo frame, a mobile phone, a tablet computer, and the like, wherein the display device further includes a flexible circuit board, a printed circuit board, and a backplate.
- In the display device of this example, the light transmittance of the storage capacitor is greater than the preset threshold value, and the orthographic projection of the storage capacitor on the base substrate and the orthographic projection of the aperture region corresponding to the storage capacitor on the base substrate are designed to have the overlapping region. In this way, an area of the storage capacitor may be increased, and an area of the aperture region of a pixel may be increased, too, so that the aperture ratio of the OLED display substrate may be improved. In addition, a space occupied by the pixel is increased, a line density is remarkably decreased, and the product yield is also improved.
- Some embodiments of the present disclosure also provide a method of manufacturing an OLED display substrate, the OLED display substrate including a plurality of aperture regions arranged in an array. The method including a step S1.
- Step S1: manufacturing a plurality of storage capacitors on a base substrate, wherein an orthographic projection of each of the plurality of storage capacitors on the base substrate has an overlapping region with an orthographic projection of an aperture region corresponding to the storage capacitor in the plurality of aperture regions on the base substrate.
- Optionally, a light transmittance of each of the plurality of storage capacitors A is greater than a preset threshold value, for example, 80% or more, such as, 90%, 95%, etc.
- In this example, the storage capacitor having the light transmittance greater than the preset threshold value is manufactured on the base substrate, and the orthographic projection of the storage capacitor on the base substrate and the orthographic projection of the aperture region on the base substrate are designed to have the overlapping region. In this way, the area of the storage capacitor may be increased, and an area of the aperture region of a pixel may be increased, too, so that the aperture ratio of the OLED display substrate may be improved. In addition, since the space occupied by the pixel is increased, the line density is remarkably decreased, and the product yield is also improved.
- An electrode of the storage capacitor may be made of a transparent electrically-conductive material, and the light transmittance of the storage capacitor may be more than 80% by selecting a material and a thickness of the electrode of the storage capacitor. In this way, the storage capacitor may be designed to be in the aperture region, so that the area of the aperture region of the pixel may be increased, thereby further improving the aperture ratio of the OLED display substrate.
- Optionally, that the orthographic projection of each of the plurality of storage capacitors on the base substrate has an overlapping region with the orthographic projection of the aperture region corresponding to the storage capacitor in the plurality of aperture regions on the base substrate, specifically includes that the orthographic projection of each of the plurality of storage capacitors on the base substrate falls within the orthographic projection of the aperture region corresponding to the storage capacitor in the plurality of aperture regions on the base substrate.
- In this way, the storage capacitor does not occupy an area other than the aperture region, so that the area of the aperture region may be maximized due to no requirement of an area used to accommodate the storage capacitor outside the aperture region.
- In particular, manufacturing a storage capacitor includes follow substeps S11-S15.
- S11: manufacturing a first capacitor electrode.
- S12: manufacturing a first insulating layer on the first capacitor electrode.
- S13: manufacturing a second capacitor electrode on the first insulating layer.
- S14: manufacturing a second insulating layer on the second capacitor electrode.
- S15: manufacturing a third capacitor electrode on the second insulating layer, wherein the third capacitor electrode is electrically connected to the first capacitor electrode.
- The first capacitor electrode and the second capacitor electrode provide a first capacitor, the second capacitor electrode and the third capacitor electrode provide a second capacitor, and the two capacitors are electrically connected approximately in parallel, so that a capacitance value of the storage capacitor is a sum of capacitance values of the two capacitors.
- Optionally, the substep S11 of manufacturing the first capacitor electrode includes manufacturing the first capacitor electrode by using an electrically-conductive active layer.
- The substep S13 of manufacturing the second capacitor electrode on the first insulating layer includes manufacturing the second capacitor electrode by using a transparent electrically-conductive material.
- Optionally, the substep S15 of manufacturing the third capacitor electrode on the second insulating layer includes: using an anode of the OLED display substrate as the third capacitor electrode.
- In this example, the storage capacitor is formed of the transparent electrode, the electrically-conductive active layer and the anode by utilizing the characteristic of the high light transmittance of the transparent electrode, and the storage capacitor is used in the aperture region of the pixel, thereby both increasing the area of the aperture region of the pixel and increasing the area of the storage capacitor, and an capacitance of the formed storage capacitor is correspondingly increased. Meanwhile, since a pixel structure is greatly simplified, a line density is remarkably reduced, which is beneficial to improvement of the product yield. In general, the anode of the OLED display substrate is also made of a transparent electrically-conductive material, so that both of the capacitor electrodes of the storage capacitor are transparent, and the light transmittance of the storage capacitor may be ensured to be relatively high.
- The method of manufacturing the display substrate of the present disclosure will be described in detail hereinafter with reference to the drawings and specific examples. The method of manufacturing the display substrate in this example includes following steps 1-9.
- Step 1: providing a
base substrate 21, and forming a light-shieldingmetal layer 22 on thebase substrate 21. - The
base substrate 21 may be a glass substrate or a quartz substrate. Specifically, the light-shieldingmetal layer 22 having a thickness of about 500 angstroms (Å) to 4000 angstroms may be deposited on thebase substrate 21 by using a method of sputtering or thermal evaporation. The light-shieldingmetal layer 22 may be a metal such as Cu, Al, Ag, Mo, Cr, Nd, Ni, Mn, Ti, Ta, and W, or an alloy of these metals. Since an active layer of the OLED display substrate in this example is made of a metal oxide semiconductor, and a performance of the metal oxide semiconductor is easily changed after being illuminated by light, it is necessary to form the light-shieldingmetal layer 22 on thebase substrate 21, the light-shieldingmetal layer 22 may shield the active layer made of the metal oxide semiconductor from being illuminated by light. - Step 2: forming a
buffer layer 23 on the basedsubstrate 21 after the step 1. - Specifically, a Plasma Enhanced Chemical Vapor Deposition (PECVD) method may be used to deposit the
buffer layer 23 on the base substrate 1 after the step 1, and thebuffer layer 23 may be an oxide, a nitride, or an oxynitride. - Step 3: forming an
active layer 24 on thesubstrate 21 after the step 2. - Specifically, IGZO having a thickness of 700 angstroms may be deposited on the
base substrate 21 as theactive layer 24 after the step 2. A layer of photoresist may be coated on the IGZO. The photoresist may be exposed by using a mask, so that a photoresist unreserved region and a photoresist reserved region may be formed, wherein the photoresist reserved region corresponds to a region where a pattern of theactive layer 24 is located, and the photoresist unreserved region corresponds to a region other than the pattern. A development process is performed to completely remove the photoresist in the photoresist unreserved region, and a thickness of the photoresist in the photoresist reserved region is kept to be unchanged. The IGZO in the photoresist unreserved region is completely etched off by using an etching process, and the remaining photoresist is stripped off to form the pattern of theactive layer 24. - Step 4: forming a gate insulating layer, a gate electrode, and a gate line on the
base substrate 21 after the step 3. - In particular, the Plasma Enhanced Chemical Vapor Deposition (PECVD) method may be used to deposit a gate insulating layer having a thickness of 500 to 5000 angstroms on the
base substrate 21 after the step 3, and the gate insulating layer may be made of an oxide, a nitride or an oxynitride, and a corresponding reaction gas is SiH4, NH3, N2, or SiH2Cl2, NH3, N2. - A gate metal layer having a thickness of about 500 to 4000 angstroms may be deposited on the gate insulating layer by sputtering or thermal evaporation, and the gate metal layer may be a metal such as Cu, Al, Ag, Mo, Cr, Nd, Ni, Mn, Ti, Ta, W, or an alloy of these metals. The gate metal layer may have a single-layer structure or a multi-layer structure such as Cu\ Mo, Ti\Cu\Ti, Mo\Al\Mo, and the like. A layer of photoresist is coated on the gate metal layer, and the photoresist may be exposed by using a mask, so that a photoresist unreserved region and a photoresist reserved region may be formed, wherein the photoresist reserved region corresponds to regions where patterns of the gate line and the gate electrode are located, and the photoresist unreserved region corresponds to a region other than the patterns. A development process is performed to completely remove the photoresist in the photoresist unreserved region, and a thickness of the photoresist in the photoresist reserved region is kept to be unchanged. The gate metal layer in the photoresist unreserved region is completely etched off by using the etching process, and the remaining photoresist is stripped off to form patterns of the gate lines and the gate electrode.
- Thereafter, the gate insulating layer is dry-etched, and the
active layer 24 needing an electrically-conductive process is implanted with H ions through a via hole penetrating through the gate insulating layer, so that theactive layer 24 is electrically-conductive, and the electrically-conductiveactive layer 24 is used as the first capacitor electrode of the storage capacitor. - Step 5: forming an interlayer insulating
layer 25 on thebase substrate 21 after the step 4. - In particular, the Plasma Enhance Chemical Vapor Deposition method may be employed to deposit the
interlayer insulating layer 25 on thebase substrate 21 after the step 4. The interlayer insulatinglayer 25 may be an oxide, a nitride, or an oxynitride. A via-hole penetrating through the interlayer insulatinglayer 25 is formed by dry-etching. - Step 6: forming a
transparent electrode 26 on thebase substrate 21 after the step 5. - In particular, a transparent electrically-conductive layer is formed on the
base substrate 21 after step 5. The transparent electrically-conductive layer may be made of ITO, graphene, MoTi or the like. A layer of photoresist is coated on the transparent electrically-conductive layer, and the photoresist is exposed by using a mask so that a photoresist unreserved region and a photoresist reserved region are formed, wherein the photoresist reserved region corresponds to a region where a pattern of thetransparent electrode 26 is located, and the photoresist unreserved region corresponds to a region other than the pattern. A development process is performed so that the photoresist in the photoresist unreserved region is completely removed, and a thickness of the photoresist in the photoresist reserved region is kept to be unchanged. The transparent electrically-conductive layer in the photoresist unreserved region is completely etched off by using an etching process, and the remaining photoresist is stripped off to form a pattern of thetransparent electrode 26, wherein, thetransparent electrode 26 is connected to an S electrode (i.e., a point P inFIG. 2 ) of a T1 transistor in a pixel structure shown inFIG. 2 and is used as the second capacitor electrode of the storage capacitor. - Step 7: forming patterns of a data line, a source electrode, and a drain electrode on the
base substrate 21 after the step 6. - Specifically, a source-drain metal layer having a thickness of about 2000 to 4000 angstroms may be deposited on the
base substrate 21 by magnetron sputtering, thermal evaporation, or other film forming methods after the step 6, and the source-drain metal layer may be a metal such as Cu, Al, Ag, Mo, Cr, Nd, Ni, Mn, Ti, Ta, W, or an alloy of these metals. The source-drain metal layer may have a single-layer structure or a multi-layer structure such as Cu\ Mo, Ti\Cu\Ti, Mo\Al\Mo, and the like. A layer of photoresist is coated on the source-drain metal layer, and the photoresist may be exposed by using a mask, so that a photoresist unreserved region and a photoresist reserved region may be formed, wherein the photoresist reserved region corresponds to regions where patterns of a source electrode, a drain electrode, and a data line are located, and the photoresist unreserved region corresponds to a region other than the patterns. A development process is performed to completely remove the photoresist in the photoresist unreserved region, and a thickness of the photoresist in the photoresist reserved region is kept to be unchanged. The source-drain metal layer in the photoresist unreserved region is completely etched off by using the etching process, and the remaining photoresist is stripped off to form patterns of the source drain, the drain electrode, and the data line. - Step 8: forming a
passivation layer 27 on thebase substrate 21 after the step 7.. - Specifically, a passivation layer having a thickness of 1000 to 2000 angstroms may be deposited on the
base substrate 21 by magnetron sputtering, thermal evaporation, PECVD, or other film forming methods after the step 7. The passivation layer may be formed of an oxide, a nitride or an oxynitride. In particular, a material of the passivation layer may be SiNx, SiOx, or Si(ON)x. The passivation layer may also be made of Al2O3. The passivation layer may be a single-layer structure or a dual-layer structure composed of silicon nitride and silicon oxide. A reaction gas corresponding to the silicon oxide may be SiH4, N2O. A reaction gas corresponding to the nitride or the oxynitride may be SiH4, NH3, N2 or SiH2Cl2, NH3, N2. A pattern of thepassivation layer 27 including a via-hole is formed by a patterning process. - Step 9: forming an
anode 28 on thebase substrate 21 after the step 8. - In particular, a transparent electrically-conductive layer is formed on the
base substrate 21 after the step 8. The transparent electrically-conductive layer may be ITO. A layer of photoresist may be coated on the transparent electrically-conductive layer, and the photoresist is exposed by using a mask so that a photoresist unreserved region and a photoresist reserved region of the photoresist is formed, wherein the photoresist reserved region corresponds to a region where the pattern of theanode 28 is located, and the photoresist unreserved region corresponds to a region other than the pattern. A development process is performed to completely remove the photoresist in the photoresist unreserved region, and a thickness of the photoresist in the photoresist reserved region is kept to be unchanged. The transparent electrically-conductive layer in the photoresist unreserved region is completely etched off by an etching process, and the remaining photoresist is stripped off to form a pattern of theanode 28, wherein, theanode 28 is connected to the S electrode (a node U inFIG. 2 ) of the T2 transistor in the pixel structure shown inFIG. 2 and is used as the third capacitor electrode of the storage capacitor. - After the above steps, the storage capacitor of the OLED display substrate is manufactured, and the structure of the storage capacitor is shown in
FIG. 4 , wherein the electrically-conductiveactive layer 24, thetransparent electrode 26 and theanode 28 are used as capacitor electrodes of the storage capacitor. The storage capacitor of the present example has a high light transmittance, and thus may be designed to be in the aperture region, so that the area of the aperture region of the pixel is increased, the area of the storage capacitor is increased, and the capacitance of the formed storage capacitor is correspondingly increased. - In that above solutions, the light transmittance of the storage capacitor is great than the preset threshold value, and the orthographic projection of the storage capacitor on the base substrate and the orthographic projection of the aperture region on the base substrate are designed to have the overlap region, so that the area of the storage capacitor may be increased and the area of the aperture region of the pixel is increased, so that the aperture ratio of the OLED display substrate may be improved. In addition, since the space occupied by the pixel structure is increased, the linear density is remarkably decreased, thereby facilitating improvement of the product yield.
- In the method embodiments of the present disclosure, sequence numbers of the steps are not used to define an order of the steps, and variations in the order of steps obtained by those of ordinary skills in the art without paying creative effort are also within the scope of the present disclosure.
- Unless otherwise defined, technical terms or scientific terms used in the present disclosure should be of a general meaning understandable by those of ordinary skills in the art to which the present disclosure pertains. Such words as 'first', 'second' and the like used in the present disclosure are not intended to denote any order, number, or importance, but merely used to distinguish different components. Similar words such as 'including' or 'include' mean that an element or item appearing before the word covers an element or item appearing after the word and equivalents thereof, without excluding other elements or items. Similar terms such as 'connection' or 'connect' are not limited to physical or mechanical connections, but may include electrical connections, whether a direct connection or an indirect connection. Such words as 'up', 'down', 'left', 'right' and the like are used only to represent a relative positional relationship, which may also change accordingly in a case that an absolute position of a described object changes.
- It will be appreciated that when an element such as a layer, a film, a region or a substrate is referred to as being located 'above' or 'below' another element, the element may be located 'directly above' or 'directly above' another element, or an intermediate element may be present.
- The foregoing are optional embodiments of the present disclosure. It should be noted that several modifications and refinements may be made by those of ordinary skills in the art without departing from principles of the present disclosure. These modifications and refinements should also be considered to be within the scope of the present disclosure.
Claims (22)
- An Organic Light Emitting Diode (OLED) display substrate, comprising:a plurality of aperture regions arranged in an array on a base substrate; anda plurality of storage capacitors on the base substrate,wherein an orthographic projection of each storage capacitor of the plurality of storage capacitors on the base substrate has an overlapping region with an orthographic projection of an aperture region corresponding to the storage capacitor in the plurality of aperture regions on the base substrate.
- The OLED display substrate according to claim 1, wherein a light transmittance of each of the plurality of storage capacitors is greater than a preset threshold value, the orthographic projection of the each of the plurality of storage capacitors on the base substrate is within the orthographic projection of the aperture region corresponding to the storage capacitor on the base substrate.
- The OLED display substrate according to claim 2, wherein the storage capacitor comprises a first capacitor electrode, a first insulating layer on the first capacitor electrode, a second capacitor electrode on the first insulating layer, a second insulating layer on the second capacitor electrode, and a third capacitor electrode on the second insulating layer, and the third capacitor electrode is electrically connected to the first capacitor electrode.
- The OLED display substrate according to claim 3, wherein,
the first capacitor electrode is an electrically-conductive active layer;
the second capacitor electrode is a transparent electrode;
the third capacitor electrode is an anode of the OLED display substrate. - The OLED display substrate according to claim 4, wherein,
the transparent electrode is made of one of ITO, graphene, and MoTi. - The OLED display substrate according to any one of claims 2-5, wherein the preset threshold value is 80% or more.
- The OLED display substrate according to any one of claims 3-5, wherein,
the first insulating layer is an interlayer insulating layer, and the second insulating layer is a passivation layer. - The OLED display substrate according to any one of claims 3-5, further comprising:
a gate insulating layer, a gate electrode, and a gate line between the first capacitor electrode and the first insulating layer. - The OLED display substrate according to any one of claims 3-5, 7-8, further comprising:
a source electrode, a drain electrode, and a data line in a same layer as the second capacitor electrode. - The OLED display substrate according to any one of claims 3-5, 7-9, further comprising:a light-shielding metal layer at a side of the first capacitor electrode facing towards the base substrate; anda buffer layer between the light-shielding metal layer and the first capacitor electrode.
- A display device, comprising:
the OLED display substrate according to any one of claims 1-10. - A method of manufacturing an OLED display substrate, the OLED display substrate comprising a plurality of aperture regions arranged in an array on a base substrate, the method comprising:
manufacturing a plurality of storage capacitors on the base substrate, an orthographic projection of each of the plurality of storage capacitors on the base substrate having an overlapping region with an orthographic projection of an aperture region corresponding to the storage capacitor in the plurality of aperture regions on the base substrate. - The method of manufacturing the OLED display substrate according to claim 12, wherein manufacturing the plurality of storage capacitors on the base substrate, the orthographic projection of each of the plurality of storage capacitors on the base substrate having the overlapping region with the orthographic projection of the aperture region corresponding to the storage capacitor in the plurality of aperture regions on the base substrate, comprises:
manufacturing the storage capacitor on the base substrate, the storage capacitor having a light transmittance greater than a preset threshold, the orthographic projection of the storage capacitor on the base substrate being within the orthographic projection of the aperture region on the base substrate. - The method of manufacturing the OLED display substrate according to claim 13, wherein manufacturing the storage capacitor on the base substrate, comprises:manufacturing a first capacitor electrode on the base substrate;manufacturing a first insulating layer on the first capacitor electrode;manufacturing a second capacitor electrode on the first insulating layer;manufacturing a second insulating layer on the second capacitor electrode;manufacturing a third capacitor electrode on the second insulating layer, wherein the third capacitor electrode is electrically connected to the first capacitor electrode.
- The method of manufacturing the OLED display substrate according to claim 14, wherein,
manufacturing the first capacitor electrode comprises manufacturing the first capacitor electrode by using an electrically-conductive active layer;
manufacturing the second capacitor electrode comprises manufacturing the second capacitor electrode by using a transparent electrically-conductive material;
manufacturing the third capacitor electrode comprises using an anode of the OLED display substrate as the third capacitor electrode. - The method of manufacturing the OLED display substrate according to claim 14, wherein the transparent electrode is made of one of ITO, graphene, and MoTi.
- The method of manufacturing the OLED display substrate according to claim 13, wherein the preset threshold value is 80% or more.
- The method of manufacturing the OLED display substrate according to any one of claims 14-16, wherein,
manufacturing a first insulating layer on the first capacitor electrode comprises:
manufacturing an interlayer insulating layer on the first capacitor electrode;
manufacturing a second insulating layer on the second capacitor electrode comprises: manufacturing a passivation layer on the second capacitor electrode. - The method of manufacturing the OLED display substrate according to claim 15, wherein after manufacturing the first capacitor electrode on the base substrate, before manufacturing the first insulating layer on the first capacitor electrode, the method further comprises:
manufacturing a gate insulating layer, a gate electrode, and a gate line on the first capacitor electrode. - The method of manufacturing the OLED display substrate according to any one of claims 14-16, wherein after manufacturing the second capacitor electrode on the first insulating layer, before manufacturing the second insulating layer on the second capacitor electrode, the method further comprises:
manufacturing a source electrode, a drain electrode, and a data line in a layer where the second capacitor electrode is. - The method of manufacturing the OLED display substrate according to any one of claims 14-16, wherein before manufacturing the first capacitor electrode on the base substrate, the method further comprises:manufacturing a light-shielding metal layer on the base substrate; andmanufacturing a buffer layer on the light-shielding metal layer.
- The method of manufacturing the OLED display substrate according to claim 19, wherein after manufacturing the gate insulating layer, the gate electrode, and the gate line on the first capacitor electrode, manufacturing the first capacitor electrode by using the electrically-conductive active layer, comprises:patterning the gate insulating layer to form a via-hole penetrating through the gate insulating layer;performing ion implantation to a portion of the active layer through the via-hole to form the electrically-conducted active layer as the first capacitor electrode, the portion of the active layer being a portion needing an electrically-conductive processing.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810469781.7A CN108428730B (en) | 2018-05-16 | 2018-05-16 | OLED display substrate, manufacturing method thereof and display device |
PCT/CN2019/086780 WO2019218993A1 (en) | 2018-05-16 | 2019-05-14 | Oled display substrate and manufacturing method therefor, and display device |
Publications (2)
Publication Number | Publication Date |
---|---|
EP3796391A1 true EP3796391A1 (en) | 2021-03-24 |
EP3796391A4 EP3796391A4 (en) | 2022-02-16 |
Family
ID=63163226
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19804297.0A Pending EP3796391A4 (en) | 2018-05-16 | 2019-05-14 | Oled display substrate and manufacturing method therefor, and display device |
Country Status (6)
Country | Link |
---|---|
US (1) | US11348987B2 (en) |
EP (1) | EP3796391A4 (en) |
JP (1) | JP7331318B2 (en) |
KR (1) | KR102571091B1 (en) |
CN (1) | CN108428730B (en) |
WO (1) | WO2019218993A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US12027536B2 (en) | 2019-08-23 | 2024-07-02 | Hefei Xinsheng Optoelectronics Technology Co., Ltd. | Display substrate, manufacturing method thereof, and display device |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108428730B (en) * | 2018-05-16 | 2021-01-26 | 京东方科技集团股份有限公司 | OLED display substrate, manufacturing method thereof and display device |
CN109166896A (en) * | 2018-09-03 | 2019-01-08 | 深圳市华星光电半导体显示技术有限公司 | Display panel and preparation method thereof |
CN109585520B (en) * | 2018-12-28 | 2024-05-14 | 深圳市华星光电半导体显示技术有限公司 | Display panel, display module and electronic device |
CN110491886A (en) * | 2019-08-23 | 2019-11-22 | 京东方科技集团股份有限公司 | Display base plate and its manufacturing method, display device |
CN110600517B (en) * | 2019-09-16 | 2021-06-01 | 深圳市华星光电半导体显示技术有限公司 | Display panel and preparation method thereof |
CN110690234A (en) * | 2019-11-11 | 2020-01-14 | 合肥京东方卓印科技有限公司 | Display back plate, manufacturing method thereof and display device |
CN210607259U (en) * | 2019-12-13 | 2020-05-22 | 北京京东方技术开发有限公司 | Display substrate and display device |
Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100443127B1 (en) * | 2002-09-07 | 2004-08-04 | 삼성전자주식회사 | Method for forming storage node of capacitor |
JP4549889B2 (en) | 2004-05-24 | 2010-09-22 | 三星モバイルディスプレイ株式會社 | Capacitor and light-emitting display device using the same |
JP2007109918A (en) * | 2005-10-14 | 2007-04-26 | Toppan Printing Co Ltd | Transistor and its manufacturing method |
KR100818657B1 (en) * | 2006-12-27 | 2008-04-01 | 주식회사 하이닉스반도체 | Multi layer dielectrice layer and method for fabricating capacitor with the same |
JP4993292B2 (en) | 2007-07-18 | 2012-08-08 | カシオ計算機株式会社 | Display panel and manufacturing method thereof |
CN100520548C (en) * | 2007-10-15 | 2009-07-29 | 友达光电股份有限公司 | Liquid crystal display board, liquid crystal display pixel structure and liquid crystal display array substrates |
KR101048987B1 (en) | 2009-12-10 | 2011-07-12 | 삼성모바일디스플레이주식회사 | Flat panel display and manufacturing method thereof |
KR101113394B1 (en) * | 2009-12-17 | 2012-02-29 | 삼성모바일디스플레이주식회사 | array substrate of liquid crystal display |
CN102208406B (en) | 2010-03-30 | 2013-07-24 | 元太科技工业股份有限公司 | Composition of pixel and preparation method thereof |
KR101822563B1 (en) * | 2010-12-08 | 2018-03-09 | 삼성디스플레이 주식회사 | Organic light emitting display device and manufacturing method of the same |
JP6079007B2 (en) | 2012-07-03 | 2017-02-15 | 大日本印刷株式会社 | Display panel and display device including the display panel |
KR101947007B1 (en) * | 2012-11-26 | 2019-02-12 | 엘지디스플레이 주식회사 | Display device and method for manufacturing the same |
CN103208506A (en) | 2013-03-28 | 2013-07-17 | 京东方科技集团股份有限公司 | Array substrate, display device and manufacturing method |
US9818765B2 (en) | 2013-08-26 | 2017-11-14 | Apple Inc. | Displays with silicon and semiconducting oxide thin-film transistors |
KR102137392B1 (en) * | 2013-10-08 | 2020-07-24 | 엘지디스플레이 주식회사 | Display apparatus and method for manufacturing the same |
US9583516B2 (en) * | 2013-10-25 | 2017-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
KR102049793B1 (en) * | 2013-11-15 | 2020-01-08 | 엘지디스플레이 주식회사 | Organic light emitting display device |
JP2015225104A (en) | 2014-05-26 | 2015-12-14 | 株式会社ジャパンディスプレイ | Display device |
CN104064688B (en) | 2014-07-11 | 2016-09-21 | 深圳市华星光电技术有限公司 | There is manufacture method and this TFT substrate of the TFT substrate of storage electric capacity |
CN104157678B (en) | 2014-09-02 | 2017-10-13 | 深圳市华星光电技术有限公司 | Dot structure and circuit with high aperture |
KR102315094B1 (en) * | 2014-11-13 | 2021-10-20 | 엘지디스플레이 주식회사 | Organic Light Emitting Diode Display Having High Aperture Ratio And Method For Manufacturing The Same |
CN106210250A (en) | 2015-05-28 | 2016-12-07 | 中兴通讯股份有限公司 | Car-mounted terminal and control method thereof and handheld terminal and control method thereof |
KR102563777B1 (en) * | 2015-07-06 | 2023-08-07 | 엘지디스플레이 주식회사 | Organic Light Emitting Display Device |
CN105518863B (en) | 2015-09-15 | 2018-10-23 | 京东方科技集团股份有限公司 | Array substrate, display panel, display device |
US20170338252A1 (en) * | 2016-05-17 | 2017-11-23 | Innolux Corporation | Display device |
CN106057821B (en) * | 2016-07-22 | 2019-07-09 | 京东方科技集团股份有限公司 | Array substrate, manufacturing method of array base plate and display device |
US10345977B2 (en) * | 2016-10-14 | 2019-07-09 | Semiconductor Energy Laboratory Co., Ltd. | Input/output panel and semiconductor device having a current sensing circuit |
CN107316873B (en) * | 2017-07-19 | 2020-03-10 | 武汉天马微电子有限公司 | Array substrate and display device |
CN107910352B (en) * | 2017-11-20 | 2020-03-24 | 武汉天马微电子有限公司 | Organic light-emitting display panel and display device |
CN109920923B (en) | 2017-12-13 | 2020-12-18 | 京东方科技集团股份有限公司 | Organic light emitting diode device, preparation method, display panel and display device |
CN108428730B (en) * | 2018-05-16 | 2021-01-26 | 京东方科技集团股份有限公司 | OLED display substrate, manufacturing method thereof and display device |
-
2018
- 2018-05-16 CN CN201810469781.7A patent/CN108428730B/en active Active
-
2019
- 2019-05-14 WO PCT/CN2019/086780 patent/WO2019218993A1/en unknown
- 2019-05-14 US US16/611,717 patent/US11348987B2/en active Active
- 2019-05-14 KR KR1020207017631A patent/KR102571091B1/en active IP Right Grant
- 2019-05-14 JP JP2019558491A patent/JP7331318B2/en active Active
- 2019-05-14 EP EP19804297.0A patent/EP3796391A4/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US12027536B2 (en) | 2019-08-23 | 2024-07-02 | Hefei Xinsheng Optoelectronics Technology Co., Ltd. | Display substrate, manufacturing method thereof, and display device |
Also Published As
Publication number | Publication date |
---|---|
KR20200083615A (en) | 2020-07-08 |
WO2019218993A1 (en) | 2019-11-21 |
JP2021523512A (en) | 2021-09-02 |
JP7331318B2 (en) | 2023-08-23 |
CN108428730B (en) | 2021-01-26 |
EP3796391A4 (en) | 2022-02-16 |
CN108428730A (en) | 2018-08-21 |
US11348987B2 (en) | 2022-05-31 |
KR102571091B1 (en) | 2023-08-28 |
US20210335956A1 (en) | 2021-10-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US11348987B2 (en) | OLED display substrate having large aperture ratio, method of manufacturing the same, and display device | |
CN107039491B (en) | Organic light emitting display device and method of manufacturing the same | |
US20180323347A1 (en) | Thin film transistor, display substrate, methods for manufacturing the same and display device | |
WO2021036840A1 (en) | Display substrate, manufacturing method thereof, and display device | |
US8877534B2 (en) | Display device and method for manufacturing the same | |
US11094721B2 (en) | Method for manufacturing array substrate including forming via holes having different widths using single patterning process | |
WO2015100898A1 (en) | Thin-film transistor, tft array substrate and manufacturing method therefor, and display device | |
US10290822B2 (en) | Thin film transistor including recessed gate insulation layer and its manufacturing method, array substrate, and display device | |
CN109192661B (en) | Thin film transistor, preparation method thereof, array substrate and display panel | |
US9893206B2 (en) | Thin film transistor, array substrate, their manufacturing methods, and display device | |
US10192900B2 (en) | Methods for fabricating thin film transistor and array substrate, array substrate and display device | |
US10192907B2 (en) | Array substrate and manufacturing method thereof, display panel and display device | |
US10504975B2 (en) | Organic light-emitting diode display substrate, manufacturing method thereof and display device | |
CN112420784A (en) | Array substrate, preparation method thereof and display panel | |
EP2983204B1 (en) | Display device and method for manufacturing the same | |
CN112635534A (en) | Display panel, display device and manufacturing method of display panel | |
US10763283B2 (en) | Array substrate, manufacturing method thereof, display panel and manufacturing method thereof | |
CN212750898U (en) | OLED display device | |
CN115000089A (en) | Array substrate, manufacturing method thereof and display device | |
US12027536B2 (en) | Display substrate, manufacturing method thereof, and display device | |
CN111668268A (en) | OLED display device and manufacturing method | |
US20220317524A1 (en) | Array Substrate and Manufacturing Method Thereof, and Display Apparatus | |
KR101871333B1 (en) | Manufacturing method of thin film pattern | |
CN114759077A (en) | Display panel, manufacturing method thereof and display device | |
CN117954495A (en) | Thin film transistor, manufacturing method thereof, display substrate and display device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE |
|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE |
|
17P | Request for examination filed |
Effective date: 20200122 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
AX | Request for extension of the european patent |
Extension state: BA ME |
|
DAV | Request for validation of the european patent (deleted) | ||
DAX | Request for extension of the european patent (deleted) | ||
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R079 Free format text: PREVIOUS MAIN CLASS: H01L0027320000 Ipc: H01L0027120000 |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 20220118 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: H01L 27/32 20060101ALI20220112BHEP Ipc: H01L 27/12 20060101AFI20220112BHEP |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: EXAMINATION IS IN PROGRESS |