EP3617449B1 - Pompe à vide rotative à palettes - Google Patents

Pompe à vide rotative à palettes Download PDF

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Publication number
EP3617449B1
EP3617449B1 EP19215663.6A EP19215663A EP3617449B1 EP 3617449 B1 EP3617449 B1 EP 3617449B1 EP 19215663 A EP19215663 A EP 19215663A EP 3617449 B1 EP3617449 B1 EP 3617449B1
Authority
EP
European Patent Office
Prior art keywords
rotary vane
vacuum pump
vane vacuum
accordance
circular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19215663.6A
Other languages
German (de)
English (en)
Other versions
EP3617449A3 (fr
EP3617449A2 (fr
Inventor
Thomas Schneider
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to EP19215663.6A priority Critical patent/EP3617449B1/fr
Publication of EP3617449A2 publication Critical patent/EP3617449A2/fr
Publication of EP3617449A3 publication Critical patent/EP3617449A3/fr
Application granted granted Critical
Publication of EP3617449B1 publication Critical patent/EP3617449B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F01C21/104—Stators; Members defining the outer boundaries of the working chamber
    • F01C21/106—Stators; Members defining the outer boundaries of the working chamber with a radial surface, e.g. cam rings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/10—Manufacture by removing material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2250/00—Geometry
    • F04C2250/30—Geometry of the stator

Definitions

  • the present invention relates to a rotary vane vacuum pump according to the preamble of claim 1.
  • a rotary vane vacuum pump is in DE 10 2010 026 031 A1 and the WO 2006/036598 A2 disclosed.
  • the US 986 502 A , the EP 0 099 412 A1 and the U.S. 4,515,514A disclose rotary vane compressors having a pump chamber that deviates from a circular shape in cross section.
  • Known rotary vane vacuum pumps have a circular-cylindrical pump chamber or one with a circular cross-section.
  • the central axis of the circular cylinder is arranged parallel to the axis of rotation of the rotor and is radially spaced from it. Due to its circular shape, such a pump chamber can easily be manufactured with good tolerances, for example by drilling a hole in a housing body for the pump chamber.
  • the invention is based on the finding that the circular cross section in the known rotary vane vacuum pumps is advantageous in terms of manufacturing technology. However, it has been shown that from the point of view of vacuum technology, a shape of the cross section that deviates from the circular shape is advantageous, in particular the Pump performance and pumping speed significantly improved.
  • the pump chamber can be of oval cross-section, for example, and/or have various part-circular peripheral regions.
  • the cross section deviating from a circular shape according to the invention is measured in a plane perpendicular to the axis of rotation of the rotor or a cylinder axis of the pump chamber.
  • the pumping chamber of a rotary vane vacuum pump is generally cylindrical and is formed by a projection of its cross section which runs parallel to the axis of rotation of the rotor.
  • the term “cylindrical” thus refers to a shape having an arbitrarily shaped cross-section projected along a cylinder axis.
  • the pumping space is generally understood to be that space which is swept over by the at least one slide during the pumping operation or during the rotation of the rotor.
  • recesses or pockets which can be arranged, for example, in the area of the inlet and/or outlet, do not belong to the pump chamber if they do not extend over the entire axial length of the slide or slides or the pump chamber.
  • the cross section deviates from the circular shape due to a bulge.
  • the cross section has a part-circular, first peripheral area and a second peripheral area that deviates from the circular shape of the first.
  • the first peripheral area is therefore in particular designed essentially like a partial area of the circumference of the pump chamber of known rotary vane vacuum pumps, namely partially circular.
  • the second peripheral region can, for example, itself be designed in the shape of a part circle or have another, in particular complex, shape.
  • the cross section can have a part-circular, first peripheral region and a part-circular, second peripheral region, which is arranged radially offset from the first.
  • This embodiment combines in a simple way the production engineering advantages of a partially circular cross section with the vacuum engineering advantage that the pump capacity, in particular the pumping speed, can be improved.
  • the offset can in particular be a horizontal offset.
  • both peripheral areas have a radius, the offset having a size ratio to the radius of at least one of the peripheral areas, in particular of both peripheral areas, of at least 0.1 and/or at most 0.3. This allows the pumping speed of the pump to be significantly increased.
  • the deviation can preferably be arranged on the inlet side.
  • a bulge and/or a second peripheral area can be arranged on the inlet side.
  • the inlet of the pump chamber can preferably open into the deviation, the bulge and/or the second peripheral area.
  • the arrangement on the inlet side makes it easier for the gas to be pumped to flow into the pump chamber, as a result of which the pumping effect, in particular the pumping speed, is improved.
  • the cross section deviates from the circular shape of a part-circular peripheral section by at least 1 mm and/or at most 10 mm.
  • the cross section can deviate from the circular shape by at least 2 mm and/or at most 6 mm.
  • this deviation is measured as the radial distance between the edge of the actual cross-section and that part of the edge of the circular shape which, due to the deviation, is no longer part of the actual cross-section.
  • the rotor can have a plurality of slides.
  • the rotor has at least two slides which are formed separately from one another and are arranged opposite one another. These slides are preferably supported against each other, for example by means of a spring. Separate slides can particularly advantageously follow the shape of the pump chamber. Sliders that act in opposite directions can alternatively be designed in one piece, for example, or generally connected to one another.
  • the rotary vane vacuum pump is designed in multiple stages. In this case, only a first stage in the conveying direction has a pump chamber which has a cross section that deviates from a circular shape. In this way, the manufacturing advantage of the circular cross-section can be retained in the one or more other stages, with the first stage, ie the suction stage, being able to provide a particularly good suction capacity.
  • the object of the invention is also generally achieved by a method for producing a rotary vane vacuum pump of the type described above. Furthermore, the object of the invention is achieved by a method for producing a rotary vane vacuum pump as described above, as described in claim 11.
  • producing the pump chamber includes that a first bore is made in a housing body for the pump chamber and that the pump chamber is widened by machining in a radial direction, starting from the bore.
  • a particularly good pump output can thus be provided in a manner that is simple in terms of production technology. Due to the radial expansion, one remains in particular part-circular peripheral portion of the bore or the pump chamber exist. In particular, therefore, the pump chamber is widened in a direction facing away from a part-circular peripheral section.
  • the first bore forms, in particular, a part-circular peripheral area of the finished pump chamber.
  • the pump chamber can be expanded, for example, by milling and/or drilling.
  • a second bore can be introduced into the housing body radially offset relative to the first bore.
  • the axes of the two bores therefore run parallel to one another and are spaced apart from one another in the radial direction.
  • the offset ie the distance between the two axes, can in principle be chosen arbitrarily and is chosen in particular as a function of the size of the diameter of the bores.
  • the offset can preferably be at least 1 mm, in particular at least 2 mm, and/or at most 10 mm, in particular at most 6 mm.
  • the bores each have a diameter and the diameters differ from one another by at most 5 mm.
  • the bores particularly preferably have at least essentially the same diameter.
  • FIG. 1 shows a rotary vane vacuum pump 10 of the prior art and serves to briefly illustrate its known principle of operation.
  • a housing body 12 is shown defining an inlet 14 and an outlet 16 .
  • a pump chamber 18 is formed in the housing body 12, the cross section of which, visible here, is circular or circular-cylindrical.
  • the pump chamber 18 is delimited by a circular-cylindrical inner wall 20 which was produced, for example, by a bore in the housing body 12 .
  • a rotor 22 is arranged in the pump chamber 18 and is driven to rotate according to an arrow 24 by a motor, not shown.
  • the axis of rotation of the rotor 22 is offset relative to the central axis of the circular-cylindrical bore, ie the pump chamber 18 .
  • the rotor 22 is therefore arranged eccentrically in the pump chamber 18 .
  • the rotor 22 includes two slides 26, which are slidably guided in the rotor 22 and are biased by a spring 28 to the outside. As a result, the slides 26 are each held in contact with the inner wall 20 during the rotation of the rotor 22 .
  • closed delivery volumes are repeatedly delivered from the inlet 14 to the outlet 16.
  • a housing body 12 with a pump chamber 18 designed according to the invention is shown in cross section.
  • the pump chamber 18 or its cross section comprises a first peripheral region 30 which is designed in the shape of a part circle. The continuation of its circular shape is indicated by dashed lines.
  • the pump chamber 18 also includes a second peripheral portion 32, which is also here is part-circular and forms a bulge of the pump chamber 18.
  • the cross section of the pump chamber 18 is thus essentially formed by two circles placed one on top of the other but radially offset from one another.
  • a diameter 34 of the circle defining the first peripheral portion 30, shown partially in phantom, is in 1 implied.
  • a width 36 of the pump chamber 18 is indicated, which is in particular a horizontal and/or maximum width.
  • the width 36 is greater than the diameter 34.
  • the part-circular peripheral regions 30 and 32 are arranged and formed in a horizontally offset manner.
  • the difference between the width 36 and the diameter 34 corresponds to the offset when the diameters or radii of the part-circular peripheral regions 30 and 32 are at least essentially the same size.
  • the maximum deviation from the circular shape of the first peripheral area 30 corresponds to the difference between the width 36 and the diameter 34 or the offset of the part-circular peripheral areas 30, 32.
  • the second part-circular peripheral area 32 or the bulge is arranged on the inlet side and the inlet 14 opens into this peripheral area 32 or the bulge.
  • the gas present at the inlet 14 can thus advantageously flow into the pump chamber 18, so that the pumping speed of the pump is significantly increased in comparison to a purely circular pump chamber.
  • the partially circular peripheral areas 30 and 32 can be formed, for example, by two radially offset bores.
  • one of the peripheral areas 30, 32 can be produced by drilling and the other peripheral area by milling or turning.
  • the second peripheral region can also have a different shape, for example an oval shape.
  • the bulge is only provided in a first suction-side stage of several stages of the rotary vane vacuum pump. In particular, further stages are not operated in an "overfilled/clogged” manner. The transfer pressure between two stages increases accordingly.
  • the first stage or suction stage primarily determines the pumping speed of the entire system.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Claims (13)

  1. Pompe à vide rotative à palettes (10) comprenant
    un rotor (22) pourvu d'au moins une palette (26), et
    une chambre de pompage (18) dans laquelle est disposé le rotor (22), le rotor (22) pourvu de la palette (26) pouvant être entraîné en rotation afin de transporter un gaz à transporter depuis une entrée (14) jusqu'à une sortie (16) de la chambre de pompage (18),
    la chambre de pompage (18) s'écartant en section transversale d'une forme circulaire,
    caractérisée en ce que
    la pompe à vide rotative à palettes (10) est réalisée en plusieurs étages, et seul un premier étage en direction de transport présente une chambre de pompage (18) dont la section transversale s'écarte d'une forme circulaire.
  2. Pompe à vide rotative à palettes (10) selon la revendication 1,
    dans laquelle la section transversale s'écarte de la forme circulaire par un renflement.
  3. Pompe à vide rotative à palettes (10) selon la revendication 1 ou 2,
    dans laquelle la section transversale présente une première zone périphérique (30) de forme partiellement circulaire et une deuxième zone périphérique (32) s'écartant de la forme circulaire de ladite première zone.
  4. Pompe à vide rotative à palettes (10) selon l'une au moins des revendications précédentes,
    dans laquelle la section transversale présente une première zone périphérique (30) de forme partiellement circulaire et une deuxième zone périphérique (32) de forme partiellement circulaire qui est disposée en étant décalée radialement par rapport à ladite première zone.
  5. Pompe à vide rotative à palettes (10) selon la revendication 4,
    dans laquelle les deux zones périphériques (30, 32) présentent un rayon, et le décalage présente un rapport proportionnel sur le rayon de l'une au moins des zones périphériques qui est de 0,1 au minimum et de 0,3 au maximum.
  6. Pompe à vide rotative à palettes (10) selon l'une au moins des revendications précédentes,
    dans laquelle l'écart est disposé du côté entrée.
  7. Pompe à vide rotative à palettes (10) selon l'une au moins des revendications 2 à 6,
    dans laquelle le renflement et/ou la deuxième zone périphérique est disposé(e) du côté entrée.
  8. Pompe à vide rotative à palettes (10) selon l'une au moins des revendications précédentes,
    dans laquelle l'entrée de la chambre de pompage débouche dans l'écart, dans le renflement et/ou dans la deuxième zone périphérique (32).
  9. Pompe à vide rotative à palettes (10) selon l'une au moins des revendications précédentes,
    dans laquelle la section transversale présente une zone périphérique (30) de forme partiellement circulaire et s'écarte de la forme circulaire de la zone périphérique (30) de forme partiellement circulaire de 2 mm au minimum et de 6 mm au maximum.
  10. Pompe à vide rotative à palettes (10) selon l'une au moins des revendications précédentes,
    dans laquelle le rotor (22) comporte au moins deux palettes (26) formées séparément l'une de l'autre et disposées à l'opposé l'une de l'autre.
  11. Procédé de fabrication d'une pompe à vide rotative à palettes (10) selon l'une au moins des revendications précédentes,
    dans lequel
    une fabrication de la chambre de pompage (18) consiste à réaliser un alésage dans un corps de boîtier (12) pour la chambre de pompage (18) et à élargir la chambre de pompage (18) à partir de l'alésage par enlèvement de copeaux dans une direction radiale.
  12. Procédé selon la revendication 11,
    dans lequel l'élargissement consiste à réaliser un deuxième alésage dans le corps de boîtier (12) de manière décalée radialement par rapport au premier alésage, le décalage étant de 1 mm au minimum et de 10 mm au maximum.
  13. Procédé selon la revendication 11 ou 12,
    dans lequel l'élargissement consiste à réaliser un deuxième alésage dans le corps de boîtier (12) de manière décalée radialement par rapport au premier alésage, les alésages présentant chacun un diamètre (34) s'écartant l'un de l'autre de 5 mm au maximum.
EP19215663.6A 2019-12-12 2019-12-12 Pompe à vide rotative à palettes Active EP3617449B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP19215663.6A EP3617449B1 (fr) 2019-12-12 2019-12-12 Pompe à vide rotative à palettes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19215663.6A EP3617449B1 (fr) 2019-12-12 2019-12-12 Pompe à vide rotative à palettes

Publications (3)

Publication Number Publication Date
EP3617449A2 EP3617449A2 (fr) 2020-03-04
EP3617449A3 EP3617449A3 (fr) 2020-08-12
EP3617449B1 true EP3617449B1 (fr) 2022-02-09

Family

ID=68887350

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19215663.6A Active EP3617449B1 (fr) 2019-12-12 2019-12-12 Pompe à vide rotative à palettes

Country Status (1)

Country Link
EP (1) EP3617449B1 (fr)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US986502A (en) * 1908-05-02 1911-03-14 Amandus Charles Roessler Rotary compressor.
JPS5827895A (ja) * 1981-08-12 1983-02-18 Hitachi Ltd ベ−ン形回転機
WO1983001818A1 (fr) * 1981-11-11 1983-05-26 Maruyama, Teruo Compresseur
US7674096B2 (en) * 2004-09-22 2010-03-09 Sundheim Gregroy S Portable, rotary vane vacuum pump with removable oil reservoir cartridge
DE102010026031A1 (de) * 2010-07-03 2012-01-05 Mahle International Gmbh Drehschieberpumpe

Also Published As

Publication number Publication date
EP3617449A3 (fr) 2020-08-12
EP3617449A2 (fr) 2020-03-04

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