EP3617449B1 - Rotary vane vacuum pump - Google Patents

Rotary vane vacuum pump Download PDF

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Publication number
EP3617449B1
EP3617449B1 EP19215663.6A EP19215663A EP3617449B1 EP 3617449 B1 EP3617449 B1 EP 3617449B1 EP 19215663 A EP19215663 A EP 19215663A EP 3617449 B1 EP3617449 B1 EP 3617449B1
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EP
European Patent Office
Prior art keywords
rotary vane
vacuum pump
vane vacuum
accordance
circular
Prior art date
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Active
Application number
EP19215663.6A
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German (de)
French (fr)
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EP3617449A2 (en
EP3617449A3 (en
Inventor
Thomas Schneider
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Priority to EP19215663.6A priority Critical patent/EP3617449B1/en
Publication of EP3617449A2 publication Critical patent/EP3617449A2/en
Publication of EP3617449A3 publication Critical patent/EP3617449A3/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F01C21/104—Stators; Members defining the outer boundaries of the working chamber
    • F01C21/106—Stators; Members defining the outer boundaries of the working chamber with a radial surface, e.g. cam rings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/10—Manufacture by removing material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2250/00—Geometry
    • F04C2250/30—Geometry of the stator

Definitions

  • the present invention relates to a rotary vane vacuum pump according to the preamble of claim 1.
  • a rotary vane vacuum pump is in DE 10 2010 026 031 A1 and the WO 2006/036598 A2 disclosed.
  • the US 986 502 A , the EP 0 099 412 A1 and the U.S. 4,515,514A disclose rotary vane compressors having a pump chamber that deviates from a circular shape in cross section.
  • Known rotary vane vacuum pumps have a circular-cylindrical pump chamber or one with a circular cross-section.
  • the central axis of the circular cylinder is arranged parallel to the axis of rotation of the rotor and is radially spaced from it. Due to its circular shape, such a pump chamber can easily be manufactured with good tolerances, for example by drilling a hole in a housing body for the pump chamber.
  • the invention is based on the finding that the circular cross section in the known rotary vane vacuum pumps is advantageous in terms of manufacturing technology. However, it has been shown that from the point of view of vacuum technology, a shape of the cross section that deviates from the circular shape is advantageous, in particular the Pump performance and pumping speed significantly improved.
  • the pump chamber can be of oval cross-section, for example, and/or have various part-circular peripheral regions.
  • the cross section deviating from a circular shape according to the invention is measured in a plane perpendicular to the axis of rotation of the rotor or a cylinder axis of the pump chamber.
  • the pumping chamber of a rotary vane vacuum pump is generally cylindrical and is formed by a projection of its cross section which runs parallel to the axis of rotation of the rotor.
  • the term “cylindrical” thus refers to a shape having an arbitrarily shaped cross-section projected along a cylinder axis.
  • the pumping space is generally understood to be that space which is swept over by the at least one slide during the pumping operation or during the rotation of the rotor.
  • recesses or pockets which can be arranged, for example, in the area of the inlet and/or outlet, do not belong to the pump chamber if they do not extend over the entire axial length of the slide or slides or the pump chamber.
  • the cross section deviates from the circular shape due to a bulge.
  • the cross section has a part-circular, first peripheral area and a second peripheral area that deviates from the circular shape of the first.
  • the first peripheral area is therefore in particular designed essentially like a partial area of the circumference of the pump chamber of known rotary vane vacuum pumps, namely partially circular.
  • the second peripheral region can, for example, itself be designed in the shape of a part circle or have another, in particular complex, shape.
  • the cross section can have a part-circular, first peripheral region and a part-circular, second peripheral region, which is arranged radially offset from the first.
  • This embodiment combines in a simple way the production engineering advantages of a partially circular cross section with the vacuum engineering advantage that the pump capacity, in particular the pumping speed, can be improved.
  • the offset can in particular be a horizontal offset.
  • both peripheral areas have a radius, the offset having a size ratio to the radius of at least one of the peripheral areas, in particular of both peripheral areas, of at least 0.1 and/or at most 0.3. This allows the pumping speed of the pump to be significantly increased.
  • the deviation can preferably be arranged on the inlet side.
  • a bulge and/or a second peripheral area can be arranged on the inlet side.
  • the inlet of the pump chamber can preferably open into the deviation, the bulge and/or the second peripheral area.
  • the arrangement on the inlet side makes it easier for the gas to be pumped to flow into the pump chamber, as a result of which the pumping effect, in particular the pumping speed, is improved.
  • the cross section deviates from the circular shape of a part-circular peripheral section by at least 1 mm and/or at most 10 mm.
  • the cross section can deviate from the circular shape by at least 2 mm and/or at most 6 mm.
  • this deviation is measured as the radial distance between the edge of the actual cross-section and that part of the edge of the circular shape which, due to the deviation, is no longer part of the actual cross-section.
  • the rotor can have a plurality of slides.
  • the rotor has at least two slides which are formed separately from one another and are arranged opposite one another. These slides are preferably supported against each other, for example by means of a spring. Separate slides can particularly advantageously follow the shape of the pump chamber. Sliders that act in opposite directions can alternatively be designed in one piece, for example, or generally connected to one another.
  • the rotary vane vacuum pump is designed in multiple stages. In this case, only a first stage in the conveying direction has a pump chamber which has a cross section that deviates from a circular shape. In this way, the manufacturing advantage of the circular cross-section can be retained in the one or more other stages, with the first stage, ie the suction stage, being able to provide a particularly good suction capacity.
  • the object of the invention is also generally achieved by a method for producing a rotary vane vacuum pump of the type described above. Furthermore, the object of the invention is achieved by a method for producing a rotary vane vacuum pump as described above, as described in claim 11.
  • producing the pump chamber includes that a first bore is made in a housing body for the pump chamber and that the pump chamber is widened by machining in a radial direction, starting from the bore.
  • a particularly good pump output can thus be provided in a manner that is simple in terms of production technology. Due to the radial expansion, one remains in particular part-circular peripheral portion of the bore or the pump chamber exist. In particular, therefore, the pump chamber is widened in a direction facing away from a part-circular peripheral section.
  • the first bore forms, in particular, a part-circular peripheral area of the finished pump chamber.
  • the pump chamber can be expanded, for example, by milling and/or drilling.
  • a second bore can be introduced into the housing body radially offset relative to the first bore.
  • the axes of the two bores therefore run parallel to one another and are spaced apart from one another in the radial direction.
  • the offset ie the distance between the two axes, can in principle be chosen arbitrarily and is chosen in particular as a function of the size of the diameter of the bores.
  • the offset can preferably be at least 1 mm, in particular at least 2 mm, and/or at most 10 mm, in particular at most 6 mm.
  • the bores each have a diameter and the diameters differ from one another by at most 5 mm.
  • the bores particularly preferably have at least essentially the same diameter.
  • FIG. 1 shows a rotary vane vacuum pump 10 of the prior art and serves to briefly illustrate its known principle of operation.
  • a housing body 12 is shown defining an inlet 14 and an outlet 16 .
  • a pump chamber 18 is formed in the housing body 12, the cross section of which, visible here, is circular or circular-cylindrical.
  • the pump chamber 18 is delimited by a circular-cylindrical inner wall 20 which was produced, for example, by a bore in the housing body 12 .
  • a rotor 22 is arranged in the pump chamber 18 and is driven to rotate according to an arrow 24 by a motor, not shown.
  • the axis of rotation of the rotor 22 is offset relative to the central axis of the circular-cylindrical bore, ie the pump chamber 18 .
  • the rotor 22 is therefore arranged eccentrically in the pump chamber 18 .
  • the rotor 22 includes two slides 26, which are slidably guided in the rotor 22 and are biased by a spring 28 to the outside. As a result, the slides 26 are each held in contact with the inner wall 20 during the rotation of the rotor 22 .
  • closed delivery volumes are repeatedly delivered from the inlet 14 to the outlet 16.
  • a housing body 12 with a pump chamber 18 designed according to the invention is shown in cross section.
  • the pump chamber 18 or its cross section comprises a first peripheral region 30 which is designed in the shape of a part circle. The continuation of its circular shape is indicated by dashed lines.
  • the pump chamber 18 also includes a second peripheral portion 32, which is also here is part-circular and forms a bulge of the pump chamber 18.
  • the cross section of the pump chamber 18 is thus essentially formed by two circles placed one on top of the other but radially offset from one another.
  • a diameter 34 of the circle defining the first peripheral portion 30, shown partially in phantom, is in 1 implied.
  • a width 36 of the pump chamber 18 is indicated, which is in particular a horizontal and/or maximum width.
  • the width 36 is greater than the diameter 34.
  • the part-circular peripheral regions 30 and 32 are arranged and formed in a horizontally offset manner.
  • the difference between the width 36 and the diameter 34 corresponds to the offset when the diameters or radii of the part-circular peripheral regions 30 and 32 are at least essentially the same size.
  • the maximum deviation from the circular shape of the first peripheral area 30 corresponds to the difference between the width 36 and the diameter 34 or the offset of the part-circular peripheral areas 30, 32.
  • the second part-circular peripheral area 32 or the bulge is arranged on the inlet side and the inlet 14 opens into this peripheral area 32 or the bulge.
  • the gas present at the inlet 14 can thus advantageously flow into the pump chamber 18, so that the pumping speed of the pump is significantly increased in comparison to a purely circular pump chamber.
  • the partially circular peripheral areas 30 and 32 can be formed, for example, by two radially offset bores.
  • one of the peripheral areas 30, 32 can be produced by drilling and the other peripheral area by milling or turning.
  • the second peripheral region can also have a different shape, for example an oval shape.
  • the bulge is only provided in a first suction-side stage of several stages of the rotary vane vacuum pump. In particular, further stages are not operated in an "overfilled/clogged” manner. The transfer pressure between two stages increases accordingly.
  • the first stage or suction stage primarily determines the pumping speed of the entire system.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Description

Die vorliegende Erfindung betrifft eine Drehschiebervakuumpumpe nach dem Oberbegriff des Anspruchs 1. Eine solche Drehschiebervakuumpumpe ist in der DE 10 2010 026 031 A1 und der WO 2006/036598 A2 offenbart. Die US 986 502 A , die EP 0 099 412 A1 und die US 4 515 514 A offenbaren Drehschieber-Kompressoren mit einem Pumpraum, der im Querschnitt von einer Kreisform abweicht. Bekannte Drehschiebervakuumpumpen weisen einen kreiszylindrischen Pumpraum bzw. einen solchen mit einem kreisförmigen Querschnitt auf. Die Mittelachse des Kreiszylinders ist dabei parallel zur Rotationsachse des Rotors angeordnet und von dieser radial beabstandet. Ein derartiger Pumpraum ist durch seine Kreisform einfach mit guten Toleranzen zu fertigen, beispielsweise indem eine Bohrung in einen Gehäusekörper für den Pumpraum eingebracht wird.The present invention relates to a rotary vane vacuum pump according to the preamble of claim 1. Such a rotary vane vacuum pump is in DE 10 2010 026 031 A1 and the WO 2006/036598 A2 disclosed. the US 986 502 A , the EP 0 099 412 A1 and the U.S. 4,515,514A disclose rotary vane compressors having a pump chamber that deviates from a circular shape in cross section. Known rotary vane vacuum pumps have a circular-cylindrical pump chamber or one with a circular cross-section. The central axis of the circular cylinder is arranged parallel to the axis of rotation of the rotor and is radially spaced from it. Due to its circular shape, such a pump chamber can easily be manufactured with good tolerances, for example by drilling a hole in a housing body for the pump chamber.

Es ist eine Aufgabe der Erfindung, eine Drehschiebervakuumpumpe der eingangs genannten Art mit besonders guter Pumpleistung, insbesondere hohem Saugvermögen, bereitzustellen.It is an object of the invention to provide a rotary vane vacuum pump of the type mentioned at the outset with a particularly good pump performance, in particular a high pumping speed.

Diese Aufgabe wird durch eine Drehschiebervakuumpumpe mit den in Anspruch 1 genannten Merkmalen gelöst.This object is achieved by a rotary vane vacuum pump having the features specified in claim 1.

Der Erfindung liegt die Erkenntnis zugrunde, dass der kreisförmige Querschnitt bei den bekannten Drehschiebervakuumpumpen zwar fertigungstechnisch vorteilhaft ist. Jedoch hat sich gezeigt, dass aus vakuumtechnischer Sicht eine von der Kreisform abweichenden Form des Querschnitts vorteilhaft ist, insbesondere die Pumpleistung bzw. das Saugvermögen deutlich verbessert. Der Pumpraum kann im Querschnitt z.B. oval ausgebildet sein und/oder verschiedene teilkreisförmige Umfangsbereiche aufweisen. Der erfindungsgemäß von einer Kreisform abweichende Querschnitt wird in einer Ebene senkrecht zur Rotationsachse des Rotors bzw. einer Zylinderachse des Pumpraums gemessen.The invention is based on the finding that the circular cross section in the known rotary vane vacuum pumps is advantageous in terms of manufacturing technology. However, it has been shown that from the point of view of vacuum technology, a shape of the cross section that deviates from the circular shape is advantageous, in particular the Pump performance and pumping speed significantly improved. The pump chamber can be of oval cross-section, for example, and/or have various part-circular peripheral regions. The cross section deviating from a circular shape according to the invention is measured in a plane perpendicular to the axis of rotation of the rotor or a cylinder axis of the pump chamber.

Der Pumpraum einer Drehschiebervakuumpumpe ist allgemein zylindrisch ausgebildet und durch eine Projektion seines Querschnitts gebildet, die parallel zur Rotationsachse des Rotors verläuft. Im Rahmen der vorliegenden Anmeldung wird zwischen den Begriffen "zylindrisch" und "kreiszylindrisch" differenziert, wobei "kreiszylindrisch" den Sonderfall von "zylindrisch" beschreibt, dass der Querschnitt kreisförmig ist. Der Begriff "zylindrisch" bezieht sich folglich auf eine Form mit einem beliebig geformten Querschnitt, der entlang einer Zylinderachse projiziert ist.The pumping chamber of a rotary vane vacuum pump is generally cylindrical and is formed by a projection of its cross section which runs parallel to the axis of rotation of the rotor. Within the scope of the present application, a distinction is made between the terms "cylindrical" and "circular-cylindrical", with "circular-cylindrical" describing the special case of "cylindrical" in that the cross-section is circular. The term "cylindrical" thus refers to a shape having an arbitrarily shaped cross-section projected along a cylinder axis.

Als Pumpraum ist allgemein derjenige Raum zu verstehen, der von dem wenigstens einen Schieber während des Pumpbetriebes bzw. während der Rotation des Rotors überstrichen wird. Insbesondere gehören daher etwa Ausnehmungen oder Taschen, welche zum Beispiel im Bereich von Einlass und/oder Auslass angeordnet sein können, nicht zum Pumpraum, wenn sie sich nicht über die gesamte axiale Länge des oder der Schieber bzw. des Pumpraums erstrecken.The pumping space is generally understood to be that space which is swept over by the at least one slide during the pumping operation or during the rotation of the rotor. In particular, therefore, recesses or pockets, which can be arranged, for example, in the area of the inlet and/or outlet, do not belong to the pump chamber if they do not extend over the entire axial length of the slide or slides or the pump chamber.

Bei einer vorteilhaften Ausführungsform ist vorgesehen, dass der Querschnitt durch eine Ausbuchtung von der Kreisform abweicht.In an advantageous embodiment, it is provided that the cross section deviates from the circular shape due to a bulge.

Gemäß einer Weiterbildung weist der Querschnitt einen teilkreisförmigen, ersten Umfangsbereich und einen von der Kreisform des ersten abweichenden, zweiten Umfangsbereich auf. Der erste Umfangsbereich ist also insbesondere im Wesentlichen wie ein Teilbereich des Umfangs des Pumpraums von bekannten Drehschiebervakuumpumpen ausgebildet, nämlich zum Teil kreisförmig.According to a development, the cross section has a part-circular, first peripheral area and a second peripheral area that deviates from the circular shape of the first. The first peripheral area is therefore in particular designed essentially like a partial area of the circumference of the pump chamber of known rotary vane vacuum pumps, namely partially circular.

Der zweite Umfangsbereich kann beispielsweise selbst teilkreisförmig ausgebildet sein oder eine andere, insbesondere komplexe, Form aufweisen. Beispielsweise kann der Querschnitt einen teilkreisförmigen, ersten Umfangsbereich und einen teilkreisförmigen, zweiten Umfangsbereich aufweisen, der zu dem ersten radial versetzt angeordnet ist. Diese Ausführungsform verbindet auf einfache Weise die fertigungstechnischen Vorteile eines teilweise kreisförmigen Querschnitts mit dem vakuumtechnischen Vorteil, dass die Pumpleistung, insbesondere das Saugvermögen, verbessert werden kann. Bei dem Versatz kann es sich insbesondere um einen horizontalen Versatz handeln.The second peripheral region can, for example, itself be designed in the shape of a part circle or have another, in particular complex, shape. For example, the cross section can have a part-circular, first peripheral region and a part-circular, second peripheral region, which is arranged radially offset from the first. This embodiment combines in a simple way the production engineering advantages of a partially circular cross section with the vacuum engineering advantage that the pump capacity, in particular the pumping speed, can be improved. The offset can in particular be a horizontal offset.

Gemäß einer weiteren Ausführungsform ist vorgesehen, dass beide Umfangsbereiche einen Radius aufweisen, wobei der Versatz ein Größenverhältnis zum Radius von zumindest einem der Umfangsbereiche, insbesondere von beiden Umfangsbereichen, von wenigstens 0,1 und/oder höchstens 0,3 aufweist. Hiermit lässt sich das Saugvermögen der Pumpe deutlich erhöhen.According to a further embodiment it is provided that both peripheral areas have a radius, the offset having a size ratio to the radius of at least one of the peripheral areas, in particular of both peripheral areas, of at least 0.1 and/or at most 0.3. This allows the pumping speed of the pump to be significantly increased.

Die Abweichung kann bevorzugt einlassseitig angeordnet sein. Insbesondere kann eine Ausbuchtung und/oder ein zweiter Umfangsbereich einlassseitig angeordnet sein. Der Einlass des Pumpraums kann bevorzugt in die Abweichung, die Ausbuchtung und/oder den zweiten Umfangsbereich münden. Die einlassseitige Anordnung erleichtert das Einströmen des zu fördernden Gases in den Pumpraum, wodurch die Pumpwirkung, insbesondere das Saugvermögen, verbessert wird.The deviation can preferably be arranged on the inlet side. In particular, a bulge and/or a second peripheral area can be arranged on the inlet side. The inlet of the pump chamber can preferably open into the deviation, the bulge and/or the second peripheral area. The arrangement on the inlet side makes it easier for the gas to be pumped to flow into the pump chamber, as a result of which the pumping effect, in particular the pumping speed, is improved.

Als besonders vorteilhaft im Hinblick auf die Pumpleistung hat es sich erwiesen, wenn der Querschnitt von der Kreisform eines teilkreisförmigen Umfangsabschnitts um wenigstens 1 mm und/oder höchstens 10 mm abweicht. Besonders bevorzugt kann der Querschnitt von der Kreisform um wenigstens 2 mm und/oder höchstens 6 mm abweichen.It has proven to be particularly advantageous with regard to the pump capacity if the cross section deviates from the circular shape of a part-circular peripheral section by at least 1 mm and/or at most 10 mm. Particularly preferably, the cross section can deviate from the circular shape by at least 2 mm and/or at most 6 mm.

Gemessen wird diese Abweichung folglich als der radiale Abstand zwischen dem Rand des tatsächlichen Querschnitts und demjenigen Teil des Randes der Kreisform, der aufgrund der Abweichung nicht mehr Teil des tatsächlichen Querschnitts ist.Consequently, this deviation is measured as the radial distance between the edge of the actual cross-section and that part of the edge of the circular shape which, due to the deviation, is no longer part of the actual cross-section.

Der Rotor kann insbesondere mehrere Schieber aufweisen. Gemäß einer weiteren Ausführungsform ist vorgesehen, dass der Rotor wenigstens zwei separat voneinander gebildete Schieber aufweist, die entgegengesetzt zueinander angeordnet sind. Diese Schieber sind bevorzugt gegeneinander abgestützt, beispielsweise mittels einer Feder. Separate Schieber können insbesondere vorteilhaft der Form des Pumpraums folgen. Entgegengesetzt wirksame Schieber können alternativ beispielsweise einteilig ausgebildet oder allgemein miteinander verbunden sein. Erfindungsgemäß ist die Drehschiebervakuumpumpe mehrstufig ausgebildet. Dabei weist lediglich eine in Förderrichtung erste Stufe einen Pumpraum auf, der einen von einer Kreisform abweichenden Querschnitt umfasst. Bei der oder den übrigen Stufen kann hierdurch der fertigungstechnische Vorteil des kreisförmigen Querschnitts beibehalten werden, wobei die erste, also ansaugende Stufe ein besonders gutes Saugvermögen bereitstellen kann.In particular, the rotor can have a plurality of slides. According to a further embodiment, it is provided that the rotor has at least two slides which are formed separately from one another and are arranged opposite one another. These slides are preferably supported against each other, for example by means of a spring. Separate slides can particularly advantageously follow the shape of the pump chamber. Sliders that act in opposite directions can alternatively be designed in one piece, for example, or generally connected to one another. According to the invention, the rotary vane vacuum pump is designed in multiple stages. In this case, only a first stage in the conveying direction has a pump chamber which has a cross section that deviates from a circular shape. In this way, the manufacturing advantage of the circular cross-section can be retained in the one or more other stages, with the first stage, ie the suction stage, being able to provide a particularly good suction capacity.

Die Aufgabe der Erfindung wird allgemein auch durch ein Verfahren zur Herstellung einer Drehschiebervakuumpumpe nach vorstehend beschriebener Art gelöst. Ferner wird die Aufgabe der Erfindung gelöst durch ein Verfahren zum Herstellen einer wie oben beschriebenen Drehschiebervakuumpumpe, wie es im Anspruch 11 beschrieben ist. Dabei umfasst ein Herstellen des Pumpraums, dass eine erste Bohrung in einen Gehäusekörper für den Pumpraum eingebracht wird und dass der Pumpraum ausgehend von der Bohrung in einer radialen Richtung spanend erweitert wird. Somit lässt sich auf fertigungstechnisch einfache Weise eine besonders gute Pumpleistung bereitstellen. Durch die radiale Erweiterung bleibt insbesondere ein teilkreisförmiger Umfangsabschnitt der Bohrung bzw. des Pumpraums bestehen. Insbesondere wird also der Pumpraum in einer von einem teilkreisförmigen Umfangsabschnitt abgewandten Richtung erweitert. Die erste Bohrung bildet insbesondere einen teilkreisförmigen Umfangsbereich des fertigen Pumpraums aus. Der Pumpraum kann beispielsweise durch Fräsen und/oder Bohren erweitert werden.The object of the invention is also generally achieved by a method for producing a rotary vane vacuum pump of the type described above. Furthermore, the object of the invention is achieved by a method for producing a rotary vane vacuum pump as described above, as described in claim 11. In this case, producing the pump chamber includes that a first bore is made in a housing body for the pump chamber and that the pump chamber is widened by machining in a radial direction, starting from the bore. A particularly good pump output can thus be provided in a manner that is simple in terms of production technology. Due to the radial expansion, one remains in particular part-circular peripheral portion of the bore or the pump chamber exist. In particular, therefore, the pump chamber is widened in a direction facing away from a part-circular peripheral section. The first bore forms, in particular, a part-circular peripheral area of the finished pump chamber. The pump chamber can be expanded, for example, by milling and/or drilling.

Beispielsweise kann eine zweite Bohrung radial versetzt zur ersten Bohrung in den Gehäusekörper eingebracht werden. Die Achsen der beiden Bohrungen verlaufen also parallel zueinander und sind in radialer Richtung voneinander beabstandet. Der Versatz, also der Abstand zwischen den beiden Achsen, kann grundsätzlich beliebig gewählt werden und wird insbesondere in Abhängigkeit von der Größe der Durchmesser der Bohrungen gewählt.For example, a second bore can be introduced into the housing body radially offset relative to the first bore. The axes of the two bores therefore run parallel to one another and are spaced apart from one another in the radial direction. The offset, ie the distance between the two axes, can in principle be chosen arbitrarily and is chosen in particular as a function of the size of the diameter of the bores.

Der Versatz kann bevorzugt wenigstens 1 mm, insbesondere wenigstens 2 mm, und/oder höchstens 10 mm, insbesondere höchstens 6 mm, betragen.The offset can preferably be at least 1 mm, in particular at least 2 mm, and/or at most 10 mm, in particular at most 6 mm.

Gemäß einer Weiterbildung ist vorgesehen, dass die Bohrungen jeweils einen Durchmesser aufweisen und die Durchmesser um höchstens 5 mm voneinander abweichen. Besonders bevorzugt weisen die Bohrungen zumindest im Wesentlichen den gleichen Durchmesser auf.According to a development, it is provided that the bores each have a diameter and the diameters differ from one another by at most 5 mm. The bores particularly preferably have at least essentially the same diameter.

Es versteht sich, dass die hier beschriebenen Verfahren auch durch die Merkmale und Ausführungsformen, die im Zusammenhang mit einer Drehschiebervakuumpumpe beschrieben werden, vorteilhaft weitergebildet werden können, und umgekehrt.It goes without saying that the methods described here can also be advantageously further developed by the features and embodiments that are described in connection with a rotary vane vacuum pump, and vice versa.

Die Erfindung wird nachfolgend lediglich beispielhaft anhand der schematischen Zeichnung erläutert.

Fig. 1
zeigt eine Drehschiebervakuumpumpe des Standes der Technik im Querschnitt.
Fig. 2
zeigt einen Pumpraum einer erfindungsgemäßen Drehschiebervakuumpumpe im Querschnitt.
The invention is explained below purely by way of example with reference to the schematic drawing.
1
shows a rotary vane vacuum pump of the prior art in cross section.
2
shows a pump chamber of a rotary vane vacuum pump according to the invention in cross section.

Fig. 1 zeigt eine Drehschiebervakuumpumpe 10 des Standes der Technik und dient der kurzen Illustration ihres bekannten Arbeitsprinzips. Es ist ein Gehäusekörper 12 gezeigt, der einen Einlass 14 und einen Auslass 16 definiert. Im Gehäusekörper 12 ist ein Pumpraum 18 ausgebildet, dessen hier sichtbarer Querschnitt kreisförmig ausgebildet ist bzw. der kreiszylindrisch ausgebildet ist. Der Pumpraum 18 ist durch eine kreiszylindrische Innenwand 20 begrenzt, die beispielsweise durch eine Bohrung im Gehäusekörper 12 hergestellt wurde. 1 shows a rotary vane vacuum pump 10 of the prior art and serves to briefly illustrate its known principle of operation. A housing body 12 is shown defining an inlet 14 and an outlet 16 . A pump chamber 18 is formed in the housing body 12, the cross section of which, visible here, is circular or circular-cylindrical. The pump chamber 18 is delimited by a circular-cylindrical inner wall 20 which was produced, for example, by a bore in the housing body 12 .

Im Pumpraum 18 ist ein Rotor 22 angeordnet und zur Rotation gemäß einem Pfeil 24 durch einen nicht dargestellten Motor angetrieben. Die Drehachse des Rotors 22 ist gegenüber der Mittelachse der kreiszylindrischen Bohrung, also des Pumpraums 18, versetzt. Der Rotor 22 ist also exzentrisch im Pumpraum 18 angeordnet. Der Rotor 22 umfasst zwei Schieber 26, die im Rotor 22 verschieblich geführt sind und durch eine Feder 28 nach außen hin vorgespannt sind. Hierdurch werden die Schieber 26 jeweils mit der Innenwand 20 während der Rotation des Rotors 22 in Anlage gehalten. Durch Rotation des Rotors 22 zusammen mit den Schiebern 26 werden wiederholt abgeschlossene Fördervolumina vom Einlass 14 zum Auslass 16 gefördert.A rotor 22 is arranged in the pump chamber 18 and is driven to rotate according to an arrow 24 by a motor, not shown. The axis of rotation of the rotor 22 is offset relative to the central axis of the circular-cylindrical bore, ie the pump chamber 18 . The rotor 22 is therefore arranged eccentrically in the pump chamber 18 . The rotor 22 includes two slides 26, which are slidably guided in the rotor 22 and are biased by a spring 28 to the outside. As a result, the slides 26 are each held in contact with the inner wall 20 during the rotation of the rotor 22 . By rotating the rotor 22 together with the slides 26, closed delivery volumes are repeatedly delivered from the inlet 14 to the outlet 16.

In Fig. 2 ist ein Gehäusekörper 12 mit einem erfindungsgemäß ausgebildeten Pumpraum 18 im Querschnitt gezeigt. Der Pumpraum 18 bzw. sein Querschnitt umfasst einen ersten Umfangsbereich 30, der teilkreisförmig ausgebildet ist. Die Fortsetzung seiner Kreisform ist gestrichelt angedeutet. Der Pumpraum 18 umfasst außerdem einen zweiten Umfangsbereich 32, der hier ebenfalls teilkreisförmig ausgebildet ist und der eine Ausbuchtung des Pumpraums 18 bildet. Der Querschnitt des Pumpraums 18 ist also im Wesentlichen durch zwei übereinandergelegte aber zueinander radial versetzte Kreise gebildet.In 2 a housing body 12 with a pump chamber 18 designed according to the invention is shown in cross section. The pump chamber 18 or its cross section comprises a first peripheral region 30 which is designed in the shape of a part circle. The continuation of its circular shape is indicated by dashed lines. The pump chamber 18 also includes a second peripheral portion 32, which is also here is part-circular and forms a bulge of the pump chamber 18. The cross section of the pump chamber 18 is thus essentially formed by two circles placed one on top of the other but radially offset from one another.

Ein Durchmesser 34 des den ersten Umfangsbereich 30 definierenden Kreises, der teilweise gestrichelt dargestellt ist, ist in Fig. 1 angedeutet. Außerdem ist eine Breite 36 des Pumpraums 18 angedeutet, die insbesondere eine horizontale und/oder maximale Breite ist. Die Breite 36 ist größer als der Durchmesser 34. Die teilkreisförmigen Umfangsbereiche 30 und 32 sind horizontal versetzt angeordnet und ausgebildet. Die Differenz zwischen der Breite 36 und dem Durchmesser 34 entspricht dem Versatz, wenn die Durchmesser bzw. Radien der teilkreisförmigen Umfangsbereiche 30 und 32 zumindest im Wesentlichen gleich groß sind. In dieser Ausführungsform entspricht die höchste Abweichung von der Kreisform des ersten Umfangsbereich 30 der Differenz zwischen der Breite 36 und dem Durchmesser 34 bzw. dem Versatz der teilkreisförmigen Umfangsbereiche 30, 32.A diameter 34 of the circle defining the first peripheral portion 30, shown partially in phantom, is in 1 implied. In addition, a width 36 of the pump chamber 18 is indicated, which is in particular a horizontal and/or maximum width. The width 36 is greater than the diameter 34. The part-circular peripheral regions 30 and 32 are arranged and formed in a horizontally offset manner. The difference between the width 36 and the diameter 34 corresponds to the offset when the diameters or radii of the part-circular peripheral regions 30 and 32 are at least essentially the same size. In this embodiment, the maximum deviation from the circular shape of the first peripheral area 30 corresponds to the difference between the width 36 and the diameter 34 or the offset of the part-circular peripheral areas 30, 32.

Der zweite teilkreisförmige Umfangsbereich 32 bzw. die Ausbuchtung ist einlassseitig angeordnet und der Einlass 14 mündet in diesen Umfangsbereich 32 bzw. in die Ausbuchtung. Das am Einlass 14 anstehende Gas kann somit vorteilhaft in den Pumpraum 18 einströmen, sodass das Saugvermögen der Pumpe im Vergleich zu einem rein kreisförmigen Pumpraum deutlich vergrößert ist.The second part-circular peripheral area 32 or the bulge is arranged on the inlet side and the inlet 14 opens into this peripheral area 32 or the bulge. The gas present at the inlet 14 can thus advantageously flow into the pump chamber 18, so that the pumping speed of the pump is significantly increased in comparison to a purely circular pump chamber.

Die teilkreisförmigen Umfangsbereiche 30 und 32 können beispielsweise durch zwei radial versetzte Bohrungen ausgebildet werden. Alternativ kann etwa einer der Umfangsbereiche 30, 32 durch eine Bohrung hergestellt werden und der andere Umfangsbereich durch Fräsen oder Drehen. Grundsätzlich kann beispielsweise der zweite Umfangsbereich auch eine andere Form aufweisen, z.B. oval ausgebildet sein.The partially circular peripheral areas 30 and 32 can be formed, for example, by two radially offset bores. Alternatively, one of the peripheral areas 30, 32 can be produced by drilling and the other peripheral area by milling or turning. In principle, for example, the second peripheral region can also have a different shape, for example an oval shape.

Vakuumtechnisch ist eine Ausbuchtung des Zylinders, in Fig. 2 also der den Umfangsbereich 30 bildenden, zuerst eingebrachten Bohrung, auf der Einlass- bzw. Ansaugseite - wie in Fig. 2 gezeigt - vorteilhaft, da ein größeres Ansaugvolumen realisiert werden kann. In durchgeführten Versuchen konnte beispielsweise durch zwei parallel angeordnete, radial versetzte Bohrungen mit einem Versatz von 2,5 mm bei Bohrungsdurchmessern von jeweils 35,5 mm eine Saugvermögenssteigerung um 20 % realisiert werden. In diesem Versuch wurde der radiale Abstand von 2,5 mm zwischen den beiden Bohrungs-Außenkonturen nicht gesondert nachgearbeitet. Es entstehen nur Unebenheiten im Bereich weniger Hundertstelmillimeter auf diesem, insbesondere sehr kurzen, Übergang zwischen zwei Bogensegmenten mit relativ großen Durchmessern. Eine beliebig komplexere Ausführung der "Unrundheit" ist möglich.In terms of vacuum technology, there is a bulge in the cylinder, in 2 i.e. the first drilled hole forming the peripheral area 30 on the inlet or suction side - as in 2 shown - advantageous because a larger intake volume can be realized. In tests carried out, for example, an increase in pumping speed of 20% could be achieved with two parallel, radially offset bores with an offset of 2.5 mm and bore diameters of 35.5 mm each. In this test, the radial distance of 2.5 mm between the two outer contours of the bore was not reworked separately. There are only bumps in the range of a few hundredths of a millimeter on this, in particular very short, transition between two arcuate segments with relatively large diameters. Any more complex execution of the "out-of-roundness" is possible.

Die Ausbuchtung ist nur in einer ersten, ansaugseitigen von mehreren Stufen der Drehschiebervakuumpumpe vorgesehen. Weitere Stufen werden insbesondere nicht "überfüllig/verstopft" betrieben. Der Übergabedruck zwischen zwei Stufen steigt entsprechend. Die erste Stufe oder Ansaugstufe bestimmt überwiegend das Saugvermögen des Gesamtsystems.The bulge is only provided in a first suction-side stage of several stages of the rotary vane vacuum pump. In particular, further stages are not operated in an "overfilled/clogged" manner. The transfer pressure between two stages increases accordingly. The first stage or suction stage primarily determines the pumping speed of the entire system.

BezugszeichenlisteReference List

1010
Drehschiebervakuumpumperotary vane vacuum pump
1212
Gehäusekörpercase body
1414
Einlassinlet
1616
Auslassoutlet
1818
Pumpraumpump room
2020
Innenwandinner wall
2222
Rotorrotor
2424
Pfeil/Drehrichtungarrow/direction of rotation
2626
Schieberslider
2828
Federfeather
3030
erster Umfangsbereichfirst perimeter
3232
zweiter Umfangsbereichsecond perimeter
3434
Durchmesserdiameter
3636
Breitebroad

Claims (13)

  1. A rotary vane vacuum pump (10) comprising
    a rotor (22) having at least one slider (26); and
    a pump space (18) in which the rotor (22) is arranged, wherein the rotor (22) with the slider (26) can be driven to make a rotation in order to convey a gas to be conveyed from an inlet (14) to an outlet (16) of the pump space (18),
    wherein the pump space (18) deviates in cross-section from a circular shape,
    characterized in that
    the rotary vane vacuum pump (10) is of multi-stage design, and with only a first stage in the conveying direction having a pump space (18) with a cross-section which deviates from a circular shape.
  2. A rotary vane vacuum pump (10) in accordance with claim 1,
    wherein the cross-section deviates from the circular shape by a bulge.
  3. A rotary vane vacuum pump (10) in accordance with claim 1 or claim 2,
    wherein the cross-section has a part-circular first peripheral region (30) and a second peripheral region (32) which deviates from the circular shape of the first peripheral region.
  4. A rotary vane vacuum pump (10) in accordance with at least one of the preceding claims,
    wherein the cross-section has a part-circular first peripheral region (30) and a part-circular second peripheral region (32) which is arranged radially offset from the first peripheral region.
  5. A rotary vane vacuum pump (10) in accordance with claim 4,
    wherein both peripheral regions (30, 32) have a radius, and wherein the offset has a size ratio to the radius of at least one of the peripheral regions of at least 0.1 and at most 0.3.
  6. A rotary vane vacuum pump (10) in accordance with at least one of the preceding claims,
    wherein the deviation is arranged at the inlet side.
  7. A rotary vane vacuum pump (10) in accordance with at least one of the claims 2 to 6,
    wherein the bulge and/or the second peripheral region is/are arranged at the inlet side.
  8. A rotary vane vacuum pump (10) in accordance with at least one of the preceding claims,
    wherein the inlet of the pump space opens into the deviation, the bulge and/or the second peripheral region (32).
  9. A rotary vane vacuum pump (10) in accordance with at least one of the preceding claims,
    wherein the cross-section has a part-circular peripheral region (30) and deviates from the circular shape of the part-circular peripheral region (30) by at least 2 mm and at most 6 mm.
  10. A rotary vane vacuum pump (10) in accordance with at least one of the preceding claims,
    wherein the rotor (22) has at least two sliders (26) which are formed separately from one another and which are arranged opposite one another.
  11. A method of manufacturing a rotary vane vacuum pump (10) in accordance with at least one of the preceding claims, wherein a manufacture of the pump space (18) comprises forming a bore in a housing body (12) for the pump space (18) and widening the pump space (18) in a cutting manner in a radial direction starting from the bore.
  12. A method in accordance with claim 11,
    wherein the widening comprises forming a second bore in the housing body (12) radially offset from the first bore, and wherein the offset amounts to at least 1 mm and at most 10 mm.
  13. A method in accordance with claim 11 or claim 12,
    wherein the widening comprises forming a second bore in the housing body (12) radially offset from the first bore, and wherein the bores each have a diameter (34), said diameters (34) differing from one another by at most 5 mm.
EP19215663.6A 2019-12-12 2019-12-12 Rotary vane vacuum pump Active EP3617449B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP19215663.6A EP3617449B1 (en) 2019-12-12 2019-12-12 Rotary vane vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19215663.6A EP3617449B1 (en) 2019-12-12 2019-12-12 Rotary vane vacuum pump

Publications (3)

Publication Number Publication Date
EP3617449A2 EP3617449A2 (en) 2020-03-04
EP3617449A3 EP3617449A3 (en) 2020-08-12
EP3617449B1 true EP3617449B1 (en) 2022-02-09

Family

ID=68887350

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
EP (1) EP3617449B1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US986502A (en) * 1908-05-02 1911-03-14 Amandus Charles Roessler Rotary compressor.
JPS5827895A (en) * 1981-08-12 1983-02-18 Hitachi Ltd Vane type rotating apparatus
WO1983001818A1 (en) * 1981-11-11 1983-05-26 Maruyama, Teruo Compressor
US7674096B2 (en) * 2004-09-22 2010-03-09 Sundheim Gregroy S Portable, rotary vane vacuum pump with removable oil reservoir cartridge
DE102010026031A1 (en) * 2010-07-03 2012-01-05 Mahle International Gmbh Rotary vane pump has rotor, which is rotatably mounted in interior space and has slot running perpendicular to rotational axis and blade movably supported in slot of rotor

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EP3617449A3 (en) 2020-08-12

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