EP3589773B1 - Cible de pulvérisation et procédé de production d'une cible de pulvérisation - Google Patents
Cible de pulvérisation et procédé de production d'une cible de pulvérisation Download PDFInfo
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- EP3589773B1 EP3589773B1 EP18706710.3A EP18706710A EP3589773B1 EP 3589773 B1 EP3589773 B1 EP 3589773B1 EP 18706710 A EP18706710 A EP 18706710A EP 3589773 B1 EP3589773 B1 EP 3589773B1
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- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000000843 powder Substances 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 27
- 239000010936 titanium Substances 0.000 claims description 27
- 239000000203 mixture Substances 0.000 claims description 22
- 230000008569 process Effects 0.000 claims description 22
- 229910052684 Cerium Inorganic materials 0.000 claims description 19
- 238000005240 physical vapour deposition Methods 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 15
- 229910052746 lanthanum Inorganic materials 0.000 claims description 14
- 229910052782 aluminium Inorganic materials 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 7
- 150000001875 compounds Chemical class 0.000 claims description 7
- 229910052747 lanthanoid Inorganic materials 0.000 claims description 7
- 150000002602 lanthanoids Chemical class 0.000 claims description 7
- 229910052719 titanium Inorganic materials 0.000 claims description 7
- 229910052693 Europium Inorganic materials 0.000 claims description 6
- 229910052779 Neodymium Inorganic materials 0.000 claims description 6
- 229910052772 Samarium Inorganic materials 0.000 claims description 6
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical group [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 229910052758 niobium Inorganic materials 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- 229910052720 vanadium Inorganic materials 0.000 claims description 3
- 229910052726 zirconium Inorganic materials 0.000 claims description 3
- 150000001247 metal acetylides Chemical class 0.000 claims description 2
- 150000004767 nitrides Chemical class 0.000 claims description 2
- 229910021332 silicide Inorganic materials 0.000 claims description 2
- 239000011159 matrix material Substances 0.000 claims 5
- 239000000470 constituent Substances 0.000 claims 2
- 229910016877 AlxM1-x Inorganic materials 0.000 claims 1
- 239000002131 composite material Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 description 26
- 239000011248 coating agent Substances 0.000 description 24
- 238000004544 sputter deposition Methods 0.000 description 12
- 239000007789 gas Substances 0.000 description 11
- 150000002500 ions Chemical class 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- 238000001704 evaporation Methods 0.000 description 8
- 230000008020 evaporation Effects 0.000 description 8
- 229910025794 LaB6 Inorganic materials 0.000 description 6
- 229910010038 TiAl Inorganic materials 0.000 description 6
- 238000001000 micrograph Methods 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000004626 scanning electron microscopy Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 230000003993 interaction Effects 0.000 description 4
- 229910020242 CeSi2 Inorganic materials 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 229910052727 yttrium Inorganic materials 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910001566 austenite Inorganic materials 0.000 description 2
- 238000005513 bias potential Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000000168 high power impulse magnetron sputter deposition Methods 0.000 description 2
- 238000007731 hot pressing Methods 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 231100000572 poisoning Toxicity 0.000 description 2
- 230000000607 poisoning effect Effects 0.000 description 2
- 230000008092 positive effect Effects 0.000 description 2
- 238000004663 powder metallurgy Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000005546 reactive sputtering Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- -1 with Co 0.1 - 10 at% Inorganic materials 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000000541 cathodic arc deposition Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005242 forging Methods 0.000 description 1
- 238000001513 hot isostatic pressing Methods 0.000 description 1
- 230000003116 impacting effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000002490 spark plasma sintering Methods 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/0408—Light metal alloys
- C22C1/0416—Aluminium-based alloys
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/045—Alloys based on refractory metals
- C22C1/0458—Alloys based on titanium, zirconium or hafnium
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C14/00—Alloys based on titanium
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C21/00—Alloys based on aluminium
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C28/00—Alloys based on a metal not provided for in groups C22C5/00 - C22C27/00
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C29/00—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides
- C22C29/005—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides comprising a particular metallic binder
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C30/00—Alloys containing less than 50% by weight of each constituent
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
- C22C32/001—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides
- C22C32/0015—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides with only single oxides as main non-metallic constituents
- C22C32/0026—Matrix based on Ni, Co, Cr or alloys thereof
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
- C22C32/001—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides
- C22C32/0015—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides with only single oxides as main non-metallic constituents
- C22C32/0031—Matrix based on refractory metals, W, Mo, Nb, Hf, Ta, Zr, Ti, V or alloys thereof
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
- C22C32/001—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides
- C22C32/0015—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides with only single oxides as main non-metallic constituents
- C22C32/0036—Matrix based on Al, Mg, Be or alloys thereof
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
- C22C32/0047—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with carbides, nitrides, borides or silicides as the main non-metallic constituents
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3426—Material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2301/00—Metallic composition of the powder or its coating
- B22F2301/20—Refractory metals
- B22F2301/205—Titanium, zirconium or hafnium
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/17—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces by forging
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C21/00—Alloys based on aluminium
- C22C21/003—Alloys based on aluminium containing at least 2.6% of one or more of the elements: tin, lead, antimony, bismuth, cadmium, and titanium
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
- C22C32/0047—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with carbides, nitrides, borides or silicides as the main non-metallic constituents
- C22C32/0073—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with carbides, nitrides, borides or silicides as the main non-metallic constituents only borides
Definitions
- the present invention relates to a target for use in a physical vapor deposition process with the features of the preamble of claim 1, a method for powder metallurgical production of a target which is intended for use in a physical vapor deposition process and the use of such a target in a physical vapor deposition process .
- Various methods are available for physical vapor deposition, e.g. B. evaporation, sputtering (sputter deposition) or arc evaporation (cathodic arc deposition or arc-source evaporation technique).
- a target is suitable for use in a PVD process for depositing layers on a substrate material provided for this purpose.
- target is to be understood in particular as meaning sputtering targets and targets for arc vaporization (also called arc cathodes).
- the targets are manufactured using different technologies.
- powder metallurgy processes There are many different options in powder metallurgy processes, which must be selected according to the composition of the target, taking into account the properties of the integrated elements. Examples here are pressing, sintering, hot isostatic pressing (HIP), Forging, rolling, hot pressing (HP) or spark plasma sintering (SPS) - also in combination with each other.
- the targets also called coating sources or sources for short
- the targets are thermally impacted by the plasma, the arc and last but not least by the heating in the coating chamber. In order to avoid excessive heating of the coating sources, they are cooled from the rear. This cooling can be done either via direct water cooling of the back of the target or via indirect cooling via a rigid copper backplate or flexible copper membranes.
- the CN104480444 describes a target composition with Ti from 10 - 50 at%, Al from 40 - 90 at%, and contents of Co, Cr, Ta, W, Nb, Mo, Zr, V, B, Si, Y, La, Se and Ce, with Co 0.1 - 10 at%, Cr 0.1 - 20 at%, Ta 0.1 - 10 at%, W 0.1 - 10 at%, Nb 0.1 - 10 at%, Mo 0.1 - 10 at%, Zr 0.1 - 10 at%, V 0.1 - 10 at%, B 0.1 - 10 at%, Si 0.1 - 20 at%, Y 0.1 - 10 at%, La 0.01 - 5 at%, Ce 0.01 - 5 at%, Se 0.01 - 5 at% .
- the JPH08151269A is directed to a thermoelectric material based on iron, a lanthanide and silicon
- composition of the target itself also has a major influence on the coating rate.
- the existing bonds define how much impact energy (especially during sputtering) is necessary to convert an atom or cluster of atoms from the target surface into the gas phase.
- the working gas Ar is given below as an example for the working gas, this is not intended to be a limitation
- secondary electrons are also produced, which in turn result in more Ar ions being produced, which can sputter more atoms of the target.
- the effectiveness of these sputtering processes depends very much on the energy introduced and, above all, on the energy density. The target can only be sputtered when this is high enough.
- the coating rate also atomization rate, sputtering rate
- the energy density can be increased by higher energies of the arriving Ar ions or by other parameters of the coating systems (such as magnetic fields, which increase the interaction of the secondary electrons with the working gas and thus its degree of ionization). Mainly due to a higher energy of the Ar ions hitting it but also the thermal load on the targets (nearly 90% of the impacting energy of the Ar ions is converted into heat and only a small percentage is used for the desired sputtering). Essentially, these are all process-controlled parameters.
- the object of the invention is to provide a target and a method for producing targets in which there is an increased evaporation rate and thus an increased coating rate.
- the essential advantage of the invention lies in an increased coating rate (and thus faster layer growth), which can be achieved by relatively low doping of the target with the selected elements from the group of lanthanides: La, Ce, Nd, Sm and Eu.
- the invention is based on the applicant's finding that the coating rate can be influenced very effectively by adding doping elements. This is essentially based on two effects: On the one hand, the selected doping elements from the group of lanthanides: La, Ce, Nd, Sm and Eu, help to use the available energy of the Ar ions more effectively with regard to the spatial expansion of the interaction area. Due to their size and mass, the selected doping elements act like atomic "battering rams" (if they are distributed homogeneously in the target, as is the case with targets produced by powder metallurgy), which concentrate the existing impact energy or impulse on a smaller interaction area on the target surface .
- the selected doping elements from the group of lanthanides: La, Ce, Nd, Sm and Eu, help to use the available energy of the Ar ions more effectively with regard to the spatial expansion of the interaction area. Due to their size and mass, the selected doping elements act like atomic "battering rams" (if they are distributed homogeneously in the target, as
- the transferred kinetic energy is concentrated in fewer atomic layers and the total energy of the impinging Ar ions can be concentrated in a smaller area.
- This increases the sputtering rate with constant energy of the impinging Ar ions and a more efficient sputtering process occurs. This is accompanied by an increase in the secondary electron emission, which in turn leads to a higher degree of ionization of the working gas.
- the secondary electron emission can also be increased by the selected doping elements from the group of lanthanides: La, Ce, Nd, Sm and Eu, which have a particularly low electron work function.
- a lower electron work function means an increased number of secondary electrons and thus an increased probability of the formation of ions in the working gas, which in turn can eject more target atoms.
- Another positive effect in reactive sputtering processes is that poisoning of the target surface is more difficult due to the increased energy density (in the more concentrated near-surface interaction areas of the target due to the corresponding elements).
- the formation of poorly electrically conductive reaction products of the target with the reactive gas (e.g. N2) and their retention on the target surface (which leads to the well-known poisoning of the target) is made more difficult. If such products form, they are immediately removed again by the increased number of Ar ions present, and the target thus remains in the desired metallic sputtering mode longer (even with higher N2 proportions in the atmosphere).
- the reactive gas e.g. N2
- the positive effect of the invention lies above all in the increased electron density on the target surface, which in turn increases the arc events and thus the evaporation rate.
- the selected elements from the group of lanthanides: La, Ce, Nd, Sm and Eu also have a positive influence on the layer properties in terms of the achievable hardness or wear resistance.
- the doping elements are introduced into the targets in the form of ceramic compounds or, according to a variant not according to the invention, alternatively in the form of aluminum alloys in order to be able to ensure low oxygen contents in the target:
- the elements listed here have a high chemical affinity for oxygen and therefore oxidize very quickly in pure metallic or unalloyed form. If the doping elements were in the form of oxides, they would not be electrically conductive and would therefore be very difficult to convert into the vapor phase in the deposition process.
- ceramic compounds such as borides, carbides, nitrides and silicides or Al-based alloys, these elements are largely protected from oxidation.
- Cerium disilicide is particularly suitable for adding cerium, as it is much more resistant to oxidation in the target production temperature range (up to 350°C) compared to metallic cerium.
- cerium disilicide is very brittle, which means that particularly fine-grained powders can be produced by mechanical comminution (milling). This is favorable for the powder metallurgical production of the targets. A particularly homogeneous distribution of the doping element is achieved with fine-grained powders.
- An oxygen content in the target below 5000 ⁇ g/g, preferably below 3000 ⁇ g/g, is also found to be particularly favorable for the layer properties.
- high levels of oxygen lead to a weakening of the strength of grain boundaries (softening of the interfaces), which in turn leads to a reduction in the hardness and the modulus of elasticity of the layers.
- a large difference in the work functions of the elements that make up the target can also mean that the different grains that make up the structure of the target z.
- figure 1 shows the coating rate in nm/min as a function of the content y [at.%] of the doping elements Ce or La for a TiAl, TiAlCe, and TiAILaB6 target.
- the deposition rate was determined by SEM in cross-sectional configuration for Ti 1-x Al x N, Ti 1-xy Al x Ce y N, and Ti 1-xy Al x (LaB 6 ) y N layers.
- the coating rate for the undoped TiAl target corresponds to the point with 0 at.% doping element.
- the contents y of the doping elements Ce and La were determined in the deposited layer, the molecular formula for the composition of the layer is Ti 1-xy Al x (Ce/La) y N.
- the concentrations of the elements in the layer were determined by EDX.
- Targeted alloying of the targets with approx. 2 to 2.5 at% enabled the sputtering rate to be increased by 50 to 80% for reactive sputtering (gas mixture: Ar/N2).
- the lanthanum is present in the target as LaB6, but in the layer deposited from it as elemental lanthanum—preferably on lattice sites of Ti or Al—is present.
- figure 2 shows a light micrograph of a TiAILaB6 target in cross section. As marked in the picture, the light areas are made of aluminum, the gray areas are made of titanium and the black areas are made of LaB6 powder particles.
- figure 3 shows a light micrograph of a TiAlCe target in cross section.
- the light areas are made of aluminum
- the gray areas are made of titanium powder particles
- the fine-grained dark gray agglomerates are made of a CeAl alloy.
- the black areas in the structure correspond to cavities caused by the preparation (breakouts when the sample was ground).
- the powder batch was then forged at room temperature to form a compact and then at 350° C. to form a blank.
- a target with dimensions of ⁇ 75 x 6 mm was machined from the blank by mechanical machining.
- the nature of such a material is figure 2 shown, using a light micrograph of a cross section of the material.
- the targets produced in this way, disks with the dimensions ⁇ 75 x 6 mm, were then bonded to copper cathodes of a laboratory coating system (adapted Leybold Heraeus Z400) using indium and installed in the system. in one In the PVD process, the targets were sputtered at a total pressure of 0.35 Pa in a gas mixture of Ar and N 2 (20% N 2 content).
- the targets were operated at a power density of 9.0 W/cm 2 for a period of 35 minutes.
- the resulting layers were deposited on monocrystalline Si flakes (100 orientation, 20x7x0.38 mm 3 ) and metallographically polished austenite flakes (20x7x0.8 mm 3 ).
- the substrate materials were cleaned in acetone and ethanol before being thermally etched in the coating system at 430 ⁇ 20 °C. Subsequent to this thermal etching process, plasma etching was also carried out in a pure Ar atmosphere at a total pressure of 6 Pa (duration 10 min). During the coating process, the substrate temperature was 430 ⁇ 20 °C, the bias potential was -50 V.
- the layers deposited in this way have a very dense morphology and a face-centered cubic crystal structure, which was determined using scanning electron microscopy (SEM) and X-ray diffraction (XRD). was investigated.
- the chemical composition was determined using energy-dispersive X-ray spectroscopy (EDX) in the SEM.
- EDX energy-dispersive X-ray spectroscopy
- the thickness of the layers was approx. 3650 and 4800 nm (the 3650 nm were achieved for the layer with approx. 1.5 at% La in the layer), for the respective La contents ( figure 1 ).
- the mechanical properties of the Ti 1-xy Al x La y N layers were tested by nanoindentation and showed an increase compared to pure Ti 1-x Al x N deposited under the same conditions.
- the powder batch was then forged at room temperature to form a compact and then at 350° C. to form a blank.
- a target with dimensions of ⁇ 75 x 6 mm was machined from the blank by mechanical machining.
- the nature of such a material is figure 3 shown, using a light micrograph of a cross section of the material.
- the targets produced in this way, with the dimensions ⁇ 75 x 6 mm, were then bonded to copper cathodes of a laboratory coating system (adapted Leybold Heraeus Z400) using indium and installed in the system.
- the targets were sputtered at a total pressure of 0.35 Pa in a gas mixture of Ar and N 2 (20% N 2 proportion).
- the targets were operated at a power density of 9.0 W/cm 2 for a period of 45 min.
- the resulting layers were deposited on monocrystalline Si flakes (100 orientation, 20x7x0.38 mm 3 ) and metallographically polished austenite flakes (20x7x0.8 mm 3 ).
- the substrate materials were cleaned in acetone and ethanol before being thermally etched in the coating system at 430 ⁇ 20 °C.
- plasma etching was also carried out in a pure Ar atmosphere at a total pressure of 6 Pa (duration 10 min).
- the substrate temperature was 430 ⁇ 20 °C.
- the bias potential was -50 V.
- the layers deposited in this way have a very dense morphology and a face-centered cubic crystal structure, which was examined by means of scanning electron microscopy (SEM) and X-ray diffractometry (XRD).
- the chemical composition was determined using energy-dispersive X-ray spectroscopy (EDX) in the SEM.
- the layers have thicknesses of approx. 3600 and 5000 nm. These two different layer thicknesses were obtained by placing 8 pieces of TiAl (4x4x4 mm 3 , chemical composition of Ti/Al 50/50 at%) in the racetrack to reduce the Ce content, thus reducing the amplification of the coating rate .
- the powder batch was then forged at room temperature to form a compact and then at 350° C. to form a blank. Finally, a target with dimensions of ⁇ 75 x 6 mm was machined from the blank by mechanical machining.
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Claims (8)
- Cible pour l'utilisation dans un processus de dépôt physique en phase vapeur, comportant une matrice composée d'un matériau composite choisi dans le groupe constitué par un matériau à base d'aluminium, un matériau à base de titane ainsi que de quelconques combinaisons correspondantes, les éléments de la matrice formant une proportion supérieure ou égale à 60 % at et inférieure ou égale à 99 % at de la cible, la matrice étant dopée avec des éléments de dopage, les éléments de dopage étant choisis dans le groupe des lanthanoïdes : La, Ce, Nd, Sm et Eu, caractérisée en ce que les éléments de dopage sont incorporés en tant qu'ingrédients de composés céramiques dans la matrice et en ce que les éléments de dopage sont présents au total en une concentration dans la cible dans une plage de supérieur ou égal à 1 % at et inférieur ou égal à 10 % at, de préférence inférieur ou égal à 5 % at.
- Cible selon la revendication 1, la matrice étant présente en tant que matériau à base d'aluminium dans une composition de AlxM1-x, M étant un ou plusieurs éléments du groupe de Ti, V, Cr, Zr, Nb, Mo, Ta, W, Si et x étant supérieur à 25 % at.
- Cible selon au moins l'une quelconque des revendications précédentes, la teneur en oxygène dans la cible se situant en dessous de 5 000 µg/g, préférablement en dessous de 3 000 pg/g.
- Cible selon au moins l'une quelconque des revendications précédentes, la proportion d'éléments dotés d'un travail d'extraction supérieur ou égal à 4,5 eV dans la cible étant inférieure à 10 % at.
- Cible selon au moins l'une quelconque des revendications précédentes, les composés céramiques étant choisis dans le groupe des borures et/ou des carbures et/ou des nitrures et/ou des siliciures.
- Cible selon au moins l'une quelconque des revendications précédentes, l'élément de dopage étant le cérium et étant présent en tant que composé céramique sous forme de disiliciure de cérium.
- Procédé de préparation par métallurgie des poudres d'une cible selon l'une quelconque des revendications précédentes, qui est destinée à l'utilisation dans un processus de dépôt physique en phase vapeur, dans lequel, pour la préparation d'un lot de poudres, des éléments de dopage sont introduits dans une poudre métallique et le lot de poudres est densifié, et la poudre métallique étant choisie dans le groupe constitué par un matériau à base d'aluminium et/ou un matériau à base de titane, caractérisé en ce que les éléments de dopage sont introduits en tant qu'ingrédients de composés céramiques dans la poudre métallique et en ce que des éléments du groupe des lanthanoïdes : La, Ce, Nd, Sm et Eu sont utilisés en tant qu'éléments de dopage, les composés céramiques contenant les éléments de dopage étant utilisés en une concentration supérieure à 1 % en moles jusqu'à inférieure ou égale à 25 % en moles, de préférence inférieure ou égale à 10 % en moles à chaque fois par rapport au lot de poudres.
- Utilisation d'une cible selon au moins l'une quelconque des revendications 1 à 6 ou préparée selon la revendication 7 dans un processus de dépôt physique en phase vapeur.
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ATGM46/2017U AT15596U1 (de) | 2017-02-28 | 2017-02-28 | Sputtertarget und Verfahren zur Herstellung eines Sputtertargets |
PCT/EP2018/054041 WO2018158101A1 (fr) | 2017-02-28 | 2018-02-19 | Cible de pulvérisation et procédé de production d'une cible de pulvérisation |
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US (1) | US11767587B2 (fr) |
EP (1) | EP3589773B1 (fr) |
JP (1) | JP7198211B2 (fr) |
KR (1) | KR20190117556A (fr) |
CN (1) | CN110536974B (fr) |
AT (1) | AT15596U1 (fr) |
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EP3547333B1 (fr) * | 2016-12-21 | 2022-05-18 | Baotou Research Institute of Rare Earths | Procédé de préparation de matériau magnétique permanent néodyme-fer-bore |
DE112019007736T5 (de) * | 2019-10-15 | 2022-06-02 | Guangdong University Of Technology | Beschichtetes Schneidwerkzeug zum Bearbeiten von Titanlegierungen und Superlegierungen und Herstellungsverfahren hierfür |
CN111188016B (zh) * | 2019-12-30 | 2023-07-04 | 苏州六九新材料科技有限公司 | 一种高性能CrAlSiX合金靶材及其制备方法 |
CN111057905B (zh) * | 2020-01-13 | 2022-03-04 | 西安理工大学 | 一种粉末冶金制备铌钛合金的方法 |
CN112063893B (zh) * | 2020-09-29 | 2021-12-10 | 中国科学院金属研究所 | 一种高热稳定性等轴纳米晶Ti6Al4V-Fe合金及其制备方法 |
CN112962069B (zh) * | 2021-02-02 | 2023-04-28 | 长沙淮石新材料科技有限公司 | 一种含金属间化合物的铝合金靶材及其制备方法 |
CN114727467B (zh) * | 2022-04-13 | 2023-06-16 | 中国科学技术大学 | 一种组合式直热六硼化镧等离子体源 |
CN114934259A (zh) * | 2022-05-06 | 2022-08-23 | 有研工程技术研究院有限公司 | 一种多元混合涂层用高强韧铝基复合靶材及其制备方法 |
CN116904942A (zh) * | 2023-08-01 | 2023-10-20 | 苏州六九新材料科技有限公司 | 一种铝基合金靶材及其制备方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08151269A (ja) * | 1994-11-28 | 1996-06-11 | Tokuyama Corp | 熱電変換材料 |
US20080253925A1 (en) * | 2007-04-11 | 2008-10-16 | Beijing Boe Optoelectronics Technology Co., Ltd | Target material for electrode film, methods of manufacturing the target material and electrode film |
US20090229976A1 (en) * | 2008-03-11 | 2009-09-17 | Mitsui Mining & Smelting Co., Ltd. | Sputtering Target Material Containing Cobalt/Chromium/Platinum Matrix Phase and Oxide Phase, and Process for Producing the Same |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT386612B (de) * | 1987-01-28 | 1988-09-26 | Plansee Metallwerk | Kriechfeste legierung aus hochschmelzendem metall und verfahren zu ihrer herstellung |
JPH0384402A (ja) | 1989-08-28 | 1991-04-10 | Yokohama Haitetsuku Kk | 曲面形状測定装置 |
JPH07157835A (ja) | 1993-12-02 | 1995-06-20 | Nippon Tungsten Co Ltd | 焼結チタン・アルミニウム合金とその製造方法 |
JP2860064B2 (ja) * | 1994-10-17 | 1999-02-24 | 株式会社神戸製鋼所 | Ti−Al合金ターゲット材の製造方法 |
US20020014406A1 (en) * | 1998-05-21 | 2002-02-07 | Hiroshi Takashima | Aluminum target material for sputtering and method for producing same |
JP3825191B2 (ja) * | 1998-12-28 | 2006-09-20 | 株式会社神戸製鋼所 | アルミニウム合金スパッタリングターゲット材料 |
JP3084402B1 (ja) | 1999-04-14 | 2000-09-04 | 工業技術院長 | AlTi系合金スパッタリングターゲット及び耐摩耗性AlTi系合金硬質皮膜並びに同皮膜の形成方法 |
JP2001181838A (ja) | 1999-12-22 | 2001-07-03 | Toppan Printing Co Ltd | 真空成膜装置 |
JP4608090B2 (ja) | 2000-12-27 | 2011-01-05 | 三井金属鉱業株式会社 | 低酸素スパッタリングターゲット |
JP4603841B2 (ja) | 2004-09-29 | 2010-12-22 | 株式会社アライドマテリアル | 耐酸化性を有するタングステン合金とその製造方法 |
FR2881757B1 (fr) * | 2005-02-08 | 2007-03-30 | Saint Gobain | Procede d'elaboration par projection thermique d'une cible a base de silicium et de zirconium |
GB2425780B (en) * | 2005-04-27 | 2007-09-05 | Univ Sheffield Hallam | PVD coated substrate |
CN101395296B (zh) | 2006-03-06 | 2012-03-28 | 陶斯摩有限公司 | 溅射靶 |
US20090186230A1 (en) * | 2007-10-24 | 2009-07-23 | H.C. Starck Inc. | Refractory metal-doped sputtering targets, thin films prepared therewith and electronic device elements containing such films |
JP5297388B2 (ja) * | 2008-04-30 | 2013-09-25 | 住友電気工業株式会社 | 表面被覆切削工具 |
CN101835921A (zh) * | 2008-05-22 | 2010-09-15 | 佳能安内华股份有限公司 | 溅射用靶、薄膜的制造方法以及显示装置 |
WO2011062450A2 (fr) | 2009-11-19 | 2011-05-26 | 한국생산기술연구원 | Cible pour dépôt par pulvérisation formée d'un seul corps constitué de plusieurs composants et son procédé de préparation, et procédé de production de couches minces nanostructurées à base d'alliages à plusieurs composants au moyen de cette cible |
CN101962721A (zh) | 2010-11-02 | 2011-02-02 | 中南大学 | 一种粉末冶金钛合金及其制备方法 |
CN102041474B (zh) * | 2010-12-20 | 2013-03-06 | 昆明理工大学 | 纳米贵金属颗粒改性二氧化锡气敏材料的制备方法 |
CN102905495A (zh) * | 2011-07-29 | 2013-01-30 | 鸿富锦精密工业(深圳)有限公司 | 壳体及其制备方法 |
JP2013067835A (ja) | 2011-09-22 | 2013-04-18 | Spm Ag Semiconductor Parts & Materials | スパッタリングターゲット、トランジスタ、焼結体の製造方法、トランジスタの製造方法、電子部品または電気機器、液晶表示素子、有機elディスプレイ用パネル、太陽電池、半導体素子および発光ダイオード素子 |
DE102012023260A1 (de) * | 2012-11-29 | 2014-06-05 | Oerlikon Trading Ag, Trübbach | Verfahren zur Strukturierung von Schichtoberflächen und Vorrichtung dazu |
CN104183790A (zh) | 2013-05-22 | 2014-12-03 | 海洋王照明科技股份有限公司 | 一种有机电致发光器件及其制备方法 |
AT14346U1 (de) * | 2014-07-08 | 2015-09-15 | Plansee Se | Target und Verfahren zur Herstellung eines Targets |
CN104451277B (zh) * | 2014-12-30 | 2017-02-15 | 山东昊轩电子陶瓷材料有限公司 | 铬铝合金靶材及其制备方法 |
CN104480444A (zh) | 2014-12-30 | 2015-04-01 | 山东昊轩电子陶瓷材料有限公司 | 钛铝合金靶材及其制备方法 |
JP6680995B2 (ja) | 2015-03-26 | 2020-04-15 | 三菱マテリアル株式会社 | 窒化物熱電変換材料及びその製造方法並びに熱電変換素子 |
CN106319454A (zh) | 2015-06-15 | 2017-01-11 | 中国科学院金属研究所 | 梯度MCrAlX涂层单靶电弧离子镀一步制备方法 |
-
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- 2017-02-28 AT ATGM46/2017U patent/AT15596U1/de unknown
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- 2018-02-19 US US16/489,435 patent/US11767587B2/en active Active
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08151269A (ja) * | 1994-11-28 | 1996-06-11 | Tokuyama Corp | 熱電変換材料 |
US20080253925A1 (en) * | 2007-04-11 | 2008-10-16 | Beijing Boe Optoelectronics Technology Co., Ltd | Target material for electrode film, methods of manufacturing the target material and electrode film |
US20090229976A1 (en) * | 2008-03-11 | 2009-09-17 | Mitsui Mining & Smelting Co., Ltd. | Sputtering Target Material Containing Cobalt/Chromium/Platinum Matrix Phase and Oxide Phase, and Process for Producing the Same |
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US11767587B2 (en) | 2023-09-26 |
US20190368029A1 (en) | 2019-12-05 |
EP3589773A1 (fr) | 2020-01-08 |
JP2020511598A (ja) | 2020-04-16 |
JP7198211B2 (ja) | 2022-12-28 |
CN110536974B (zh) | 2022-03-04 |
AT15596U1 (de) | 2018-03-15 |
WO2018158101A1 (fr) | 2018-09-07 |
CN110536974A (zh) | 2019-12-03 |
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