EP3561306B1 - Vakuumpumpe - Google Patents

Vakuumpumpe Download PDF

Info

Publication number
EP3561306B1
EP3561306B1 EP18184605.6A EP18184605A EP3561306B1 EP 3561306 B1 EP3561306 B1 EP 3561306B1 EP 18184605 A EP18184605 A EP 18184605A EP 3561306 B1 EP3561306 B1 EP 3561306B1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
shielding means
pump
housing section
accordance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP18184605.6A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP3561306A1 (de
Inventor
Michael Schweighöfer
Tobias Stoll
Martin Lohse
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP18184605.6A priority Critical patent/EP3561306B1/de
Priority to JP2019131612A priority patent/JP2020012467A/ja
Publication of EP3561306A1 publication Critical patent/EP3561306A1/de
Application granted granted Critical
Publication of EP3561306B1 publication Critical patent/EP3561306B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/50—Intrinsic material properties or characteristics

Definitions

  • the shielding means has a shielding area and a contact area, the contact area having a plurality of contact elements that are spaced apart from one another and protrude from the shielding area for contacting the shielding means with the housing section.
  • the shielding area can thereby be optimized with regard to its shielding function.
  • the shielding element can be manufactured and installed particularly easily if the shielding means is designed in one piece.
  • the shielding means can be produced by etching, punching and / or laser cutting.
  • the shielding means can also be a bent part. A particularly simple and inexpensive production of the shielding means can thus be realized.
  • the turbo molecular pump 111 shown comprises a pump inlet 115 which is surrounded by an inlet flange 113 and to which a recipient (not shown) can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbo molecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a purging gas connection via which purging gas is used to protect the electric motor 125 (see e.g. Fig. 3 ) can be brought into the engine compartment 137, in which the electric motor 125 in the vacuum pump 111 is accommodated, before the gas conveyed by the pump.
  • the Lower part 121 also has two coolant connections 139, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be fed into the vacuum pump for cooling purposes.
  • Fastening bores 147 are also arranged on the underside 141, via which the pump 111 can be fastened to a support surface, for example.
  • the turbo-molecular pump 111 comprises several turbo-molecular pump stages connected in series with one another with several radial rotor disks 155 fastened to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular one Pumping stage.
  • the stator disks 157 are held at a desired axial distance from one another by spacer rings 159.
  • the active pumping surfaces of the Holweck pump stages are formed by the jacket surfaces, that is to say by the radial inner and / or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies on the radial outer surface of the outer Holweck rotor sleeve 163 with the formation of a radial Holweck gap 171 opposite and with this forms the first Holweck pump stage following the turbo molecular pumps.
  • the permanent magnetic bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, each of which comprises a ring stack of several permanent magnetic rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 are opposite one another with the formation of a radial bearing gap 199, the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203.
  • a plate spring 213 can also be provided between the fastening ring 211 and the ring magnet 197.
  • the vacuum pump 111 comprises the electric motor 125 for rotatingly driving the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 extending through the motor stator 217.
  • an intermediate space 219 is arranged, which comprises a radial motor gap over which the motor stator 217 and the permanent magnet arrangement for transmitting the drive torque can influence each other magnetically.
  • a shielding means designed as a grid 20 is arranged in each of the two inlets 16.
  • a respective grille 20 is flat and shields an interior of the pump 10 from an interior of the recipient or recipients.
  • the grid 20 has a shielding area and a contact area, the contact elements 22 and 24 being provided in the contact area which is formed by the edge area of the grid 20.
  • the contact elements 22 and 24 are spaced from one another and protrude from the shielding area in order to make contact between the grid 20 and the housing section.
  • the grid 20 is formed in one piece. Different types of contact elements are provided, namely a set of contact elements 22 and a set of contact elements 24.
  • a respective contact element 22 which is comparatively large and has a tab-like or tongue-like design, not only ensures contact, but also serves to hold the grid 20 in the inlet 16.
  • the contact element 22 is designed as a tab or tongue which extends from the edge 28 essentially perpendicular to a main surface of the grid 20.
  • the contact elements 22 are arranged in rows, the contact elements 22 extend parallel to one another in a row and have a spacing that is constant over the row.
  • a respective contact element 24, which is comparatively small, is also designed to be resilient, namely as a tab or tongue which extends from the edge 28 essentially parallel to the main surface of the grid 20 and essentially perpendicular to the inner wall 14.
  • These contact elements 24 are only provided in the respective corner regions of the inlet flange 16 or of the grille 20, the inner wall 14 having a radius in a respective corner region.
  • the grid 20 is recessed in the respective corner areas, the contact elements 24 remaining.
  • the contact elements 24 of a corner region thus extend essentially in one plane, but are not parallel to one another, but rather extend in respective directions which preferably intersect at a center point of the radius.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP18184605.6A 2018-07-20 2018-07-20 Vakuumpumpe Active EP3561306B1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP18184605.6A EP3561306B1 (de) 2018-07-20 2018-07-20 Vakuumpumpe
JP2019131612A JP2020012467A (ja) 2018-07-20 2019-07-17 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP18184605.6A EP3561306B1 (de) 2018-07-20 2018-07-20 Vakuumpumpe

Publications (2)

Publication Number Publication Date
EP3561306A1 EP3561306A1 (de) 2019-10-30
EP3561306B1 true EP3561306B1 (de) 2021-06-09

Family

ID=63014344

Family Applications (1)

Application Number Title Priority Date Filing Date
EP18184605.6A Active EP3561306B1 (de) 2018-07-20 2018-07-20 Vakuumpumpe

Country Status (2)

Country Link
EP (1) EP3561306B1 (ja)
JP (1) JP2020012467A (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005052792A1 (de) * 2004-11-24 2006-06-01 Pfeiffer Vacuum Gmbh Splitterschutz für Vakuumpumpe mit schnelldrehendem Rotor

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4384165A (en) * 1981-09-14 1983-05-17 Motorola, Inc. Radio frequency shield with force multiplier interconnection fingers for an electromagnetic gasket
JP4211658B2 (ja) * 2004-03-31 2009-01-21 株式会社島津製作所 ターボ分子ポンプ
JP2006144783A (ja) * 2004-11-24 2006-06-08 Pfeiffer Vacuum Gmbh 高速回転ロータを有する真空ポンプのフランジと結合可能な破損防止装置
JP3119272U (ja) * 2005-12-08 2006-02-16 株式会社島津製作所 分子ポンプ
WO2012018111A1 (ja) * 2010-08-06 2012-02-09 株式会社島津製作所 真空ポンプ
US9816530B2 (en) * 2010-11-24 2017-11-14 Edwards Japan Limited Splinter shield for vacuum pump, and vacuum pump with the splinter shield
EP3034881B1 (de) * 2014-12-18 2018-10-31 Pfeiffer Vacuum GmbH Vakuumpumpe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005052792A1 (de) * 2004-11-24 2006-06-01 Pfeiffer Vacuum Gmbh Splitterschutz für Vakuumpumpe mit schnelldrehendem Rotor

Also Published As

Publication number Publication date
EP3561306A1 (de) 2019-10-30
JP2020012467A (ja) 2020-01-23

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