EP3557333B1 - Herstellungsverfahren einer zugfeder für eine uhr - Google Patents

Herstellungsverfahren einer zugfeder für eine uhr Download PDF

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Publication number
EP3557333B1
EP3557333B1 EP18167501.8A EP18167501A EP3557333B1 EP 3557333 B1 EP3557333 B1 EP 3557333B1 EP 18167501 A EP18167501 A EP 18167501A EP 3557333 B1 EP3557333 B1 EP 3557333B1
Authority
EP
European Patent Office
Prior art keywords
mainspring
silicon
reducing atmosphere
thermally
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP18167501.8A
Other languages
English (en)
French (fr)
Other versions
EP3557333A1 (de
Inventor
Sylvain Jeanneret
Frédéric Maier
Jean-Luc Bucaille
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Patek Philippe SA Geneve
Original Assignee
Patek Philippe SA Geneve
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to EP18167501.8A priority Critical patent/EP3557333B1/de
Application filed by Patek Philippe SA Geneve filed Critical Patek Philippe SA Geneve
Priority to CN201880090643.6A priority patent/CN111801627B/zh
Priority to JP2020556962A priority patent/JP7204776B2/ja
Priority to PCT/IB2018/060218 priority patent/WO2019202378A1/fr
Priority to EP18836894.8A priority patent/EP3781992B1/de
Priority to US17/047,936 priority patent/US11796966B2/en
Priority to TW108110063A priority patent/TWI793285B/zh
Publication of EP3557333A1 publication Critical patent/EP3557333A1/de
Application granted granted Critical
Publication of EP3557333B1 publication Critical patent/EP3557333B1/de
Active legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G04—HOROLOGY
    • G04D—APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
    • G04D3/00—Watchmakers' or watch-repairers' machines or tools for working materials
    • G04D3/0069—Watchmakers' or watch-repairers' machines or tools for working materials for working with non-mechanical means, e.g. chemical, electrochemical, metallising, vapourising; with electron beams, laser beams
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B1/00—Driving mechanisms
    • G04B1/10—Driving mechanisms with mainspring
    • G04B1/14—Mainsprings; Bridles therefor
    • G04B1/145—Composition and manufacture of the springs
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00—Mechanisms for stabilising frequency
    • G04B17/04—Oscillators acting by spring tension
    • G04B17/06—Oscillators with hairsprings, e.g. balance
    • G04B17/066—Manufacture of the spiral spring
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B21/00—Indicating the time by acoustic means
    • G04B21/02—Regular striking mechanisms giving the full hour, half hour or quarter hour
    • G04B21/06—Details of striking mechanisms, e.g. hammer, fan governor
    • G—PHYSICS
    • G04—HOROLOGY
    • G04D—APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
    • G04D3/00—Watchmakers' or watch-repairers' machines or tools for working materials
    • G04D3/0074—Watchmakers' or watch-repairers' machines or tools for working materials for treatment of the material, e.g. surface treatment
    • G04D3/0076—Watchmakers' or watch-repairers' machines or tools for working materials for treatment of the material, e.g. surface treatment for components of driving mechanisms, e.g. mainspring
    • G—PHYSICS
    • G04—HOROLOGY
    • G04D—APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
    • G04D3/00—Watchmakers' or watch-repairers' machines or tools for working materials
    • G04D3/0074—Watchmakers' or watch-repairers' machines or tools for working materials for treatment of the material, e.g. surface treatment
    • G04D3/0089—Watchmakers' or watch-repairers' machines or tools for working materials for treatment of the material, e.g. surface treatment for components of the regulating mechanism, e.g. coil springs
    • G—PHYSICS
    • G04—HOROLOGY
    • G04F—TIME-INTERVAL MEASURING
    • G04F7/00—Apparatus for measuring unknown time intervals by non-electric means
    • G04F7/04—Apparatus for measuring unknown time intervals by non-electric means using a mechanical oscillator
    • G04F7/08—Watches or clocks with stop devices, e.g. chronograph
    • G04F7/0804—Watches or clocks with stop devices, e.g. chronograph with reset mechanisms

Definitions

  • the present invention relates to a method of manufacturing a mainspring for a timepiece.
  • mainspring any spring, other than a spring exercising a simple return function, capable of storing energy to supply the operation of a mechanism.
  • a typical example of a mainspring is the barrel spring.
  • the barrel spring provides the energy to maintain the oscillator of the watch.
  • the barrel spring is housed in a barrel drum and provides its energy through a system of wheels and pinions which mesh with the barrel drum.
  • the space available for storing energy namely the volume of the barrel drum, is limited, especially in wristwatches, all the more so when the watch is thin.
  • the amount of energy that can be stored depends on this available space. This amount of energy is used to guarantee a certain running time of the watch.
  • the precision of the rate is determined by the frequency and the inertia of the oscillator. A high frequency and high inertia oscillator will have very good running precision but will require a significant energy input, which can penalize the running time. A compromise must therefore be made between the running time and the precision of the oscillator.
  • the amount of energy that can be stored is also related to the material from which the mainspring is made.
  • Nivaflex® an alloy based on Co, Ni, Cr and Fe developed by the company Vacuumschmelze GmbH & Co. KG. This alloy has the notable advantage of having a very high elastic limit, of about 3.7 GPa, given by work hardening and heat treatments, while retaining a part of ductility.
  • Silicon is a material increasingly used in watchmaking and which has many advantages.
  • its elastic limit and the ratio of its elastic limit squared to its modulus of elasticity ( ⁇ 2 / E) are too low to be able to store enough energy to supply the operation of a watch movement. This is why, in the patent CH 706020 , it is associated with diamond, but in practice this does not give complete satisfaction in terms of mechanical resistance.
  • the present invention aims to remedy these drawbacks, at least in part, and to this end proposes a method according to claim 1 or claim 2.
  • a first step consists in etching in a silicon wafer, preferably by deep reactive ionic etching (DRIE), a part having the desired shape, typically spiral, and substantially the desired dimensions of the mainspring.
  • DRIE deep reactive ionic etching
  • Silicon can be monocrystalline, polycrystalline or amorphous. If it is single crystal, its crystal orientation is preferably ⁇ 111 ⁇ so that its Young's modulus is isotropic. Polycrystalline silicon is preferred over silicon monocrystalline for its isotropy and greater mechanical strength.
  • the silicon used in the invention can also be doped or not.
  • a second step of the process consists in thermally oxidizing the part, typically at a temperature between 600 ° C and 1300 ° C, preferably between 800 ° C and 1200 ° C, so as to cover it with a layer of oxide.
  • silicon SiO 2
  • This silicon oxide layer is formed by consuming silicon, which pushes back the interface between silicon and silicon oxide and attenuates silicon surface defects.
  • the silicon oxide layer is removed, for example by wet etching, vapor phase etching or dry etching.
  • annealing treatment in English is carried out in a reducing atmosphere, preferably at a pressure strictly greater than 100 Torr and less than or equal to atmospheric pressure (760 Torr), but which may be of the order atmospheric pressure, and preferably at a temperature between 800 ° C and 1300 ° C.
  • the duration of the annealing treatment can be from a few minutes to several hours.
  • the reducing atmosphere can consist mainly or totally of hydrogen. It can also include argon or any other neutral gas.
  • the combination of the second, third and fourth stages gives the part remarkable mechanical properties for a mainspring. Chips and other defects liable to create the initiators of rupture are greatly reduced or even eliminated. The roughness of the surfaces is smoothed out. The wavelets created by the DRIE engraving on the sides of the part are attenuated or even eliminated. The edges are rounded, which decreases the stress concentrations. The tensile strength of silicon, corresponding to its elastic limit, is increased.
  • a silicon oxide layer (SiO 2 ) is formed on the part, making it possible to increase its mechanical strength.
  • This layer of silicon oxide can be formed by thermal oxidation, in the same way as in the second step, or by deposition, in particular chemical or physical vapor deposition (CVD, PVD). It is preferably formed over all or almost the entire surface of the part. Its thickness is for example a few micrometers.
  • said part is part of a batch of parts made from the same silicon wafer.
  • the part and the other parts of the batch are detached from the wafer.
  • the process according to the invention by virtue of the surface treatments described above, makes it possible to obtain motor springs reaching elastic limits in bending greater than 3 GPa and even being able to go up to 6 GPa.
  • the energy storage capacity ( ⁇ 2 / E) is increased.
  • the motor spring (s) obtained according to the method according to the invention can (can) comprise parts fulfilling additional functions with respect to the storage and return of energy, for example parts serving as a plug or flange as described in the patent CH 705368 .
  • the fourth step is implemented before the second step (thermal oxidation).

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
  • Springs (AREA)

Claims (13)

  1. Verfahren zur Herstellung einer Zugfeder für eine Uhr, das die folgenden Schritte umfasst:
    a) Ausführen eines Teils aus Silizium, das die gewünschte Form der Zugfeder aufweist,
    b) thermisches Oxidieren des Teils,
    c) Desoxidieren des Teils,
    d) Durchführen eines Glühens des Teils in einer reduzierenden Atmosphäre,
    e) Bilden einer Siliziumoxidschicht auf dem Teil.
  2. Verfahren zur Herstellung einer Zugfeder für eine Uhr, das die folgenden Schritte umfasst:
    a) Ausführen eines Teils aus Silizium, das die gewünschte Form der Zugfeder aufweist,
    b) Durchführen eines Glühens des Teils in einer reduzierenden Atmosphäre,
    c) thermisches Oxidieren des Teils,
    d) Desoxidieren des Teils,
    e) Bilden einer Siliziumoxidschicht auf dem Teil.
  3. Verfahren nach Anspruch 1 oder 2, wobei der Schritt a) einen Ätzvorgang, vorzugsweise einen Vorgang zum reaktiven Ionentiefenätzen, umfasst.
  4. Verfahren nach einem der Ansprüche 1 bis 3, wobei der Schritt des thermischen Oxidierens bei einer Temperatur zwischen 600 °C und 1300 °C, vorzugsweise zwischen 800 °C und 1200 °C, durchgeführt wird.
  5. Verfahren nach einem der Ansprüche 1 bis 4, wobei der Schritt des Desoxidierens einen Ätzvorgang, vorzugsweise einen Vorgang zum Nassätzen, Gasphasenätzen oder Trockenätzen, umfasst.
  6. Verfahren nach einem der Ansprüche 1 bis 5, wobei der Schritt des Glühens bei einem Druck von strikt über 100 Torr durchgeführt wird.
  7. Verfahren nach einem der Ansprüche 1 bis 6, wobei der Schritt des Glühens bei einem Druck von niedriger als oder gleich dem atmosphärischen Druck durchgeführt wird.
  8. Verfahren nach einem der Ansprüche 1 bis 7, wobei der Schritt des Glühens bei einer Temperatur zwischen 800 °C und 1300 °C durchgeführt wird.
  9. Verfahren nach einem der Ansprüche 1 bis 8, wobei die reduzierende Atmosphäre Wasserstoff umfasst.
  10. Verfahren nach Anspruch 9, wobei die reduzierende Atmosphäre auch ein Neutralgas, zum Beispiel Argon, umfasst.
  11. Verfahren nach einem der Ansprüche 1 bis 10, wobei der Schritt e) durch thermisches Oxidieren durchgeführt wird.
  12. Verfahren nach einem der Ansprüche 1 bis 11, wobei das Silizium monokristallines oder polykristallines Silizium ist.
  13. Verfahren nach einem der Ansprüche 1 bis 12, wobei die Zugfeder eine Federhausfeder ist.
EP18167501.8A 2018-04-16 2018-04-16 Herstellungsverfahren einer zugfeder für eine uhr Active EP3557333B1 (de)

Priority Applications (7)

Application Number Priority Date Filing Date Title
EP18167501.8A EP3557333B1 (de) 2018-04-16 2018-04-16 Herstellungsverfahren einer zugfeder für eine uhr
JP2020556962A JP7204776B2 (ja) 2018-04-16 2018-12-18 シリコンベースの時計用バネの製作方法
PCT/IB2018/060218 WO2019202378A1 (fr) 2018-04-16 2018-12-18 Procede de fabrication d'un ressort horloger a base de silicium
EP18836894.8A EP3781992B1 (de) 2018-04-16 2018-12-18 Herstellungsverfahren einer zugfeder aus silizium für eine uhr
CN201880090643.6A CN111801627B (zh) 2018-04-16 2018-12-18 硅基钟表弹簧的制造方法
US17/047,936 US11796966B2 (en) 2018-04-16 2018-12-18 Method for producing a silicon-based timepiece spring
TW108110063A TWI793285B (zh) 2018-04-16 2019-03-22 用於生產矽基時計彈簧的方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP18167501.8A EP3557333B1 (de) 2018-04-16 2018-04-16 Herstellungsverfahren einer zugfeder für eine uhr

Publications (2)

Publication Number Publication Date
EP3557333A1 EP3557333A1 (de) 2019-10-23
EP3557333B1 true EP3557333B1 (de) 2020-11-04

Family

ID=62002087

Family Applications (2)

Application Number Title Priority Date Filing Date
EP18167501.8A Active EP3557333B1 (de) 2018-04-16 2018-04-16 Herstellungsverfahren einer zugfeder für eine uhr
EP18836894.8A Active EP3781992B1 (de) 2018-04-16 2018-12-18 Herstellungsverfahren einer zugfeder aus silizium für eine uhr

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP18836894.8A Active EP3781992B1 (de) 2018-04-16 2018-12-18 Herstellungsverfahren einer zugfeder aus silizium für eine uhr

Country Status (6)

Country Link
US (1) US11796966B2 (de)
EP (2) EP3557333B1 (de)
JP (1) JP7204776B2 (de)
CN (1) CN111801627B (de)
TW (1) TWI793285B (de)
WO (1) WO2019202378A1 (de)

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* Cited by examiner, † Cited by third party
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EP3882710A1 (de) 2020-03-19 2021-09-22 Patek Philippe SA Genève Verfahren zur herstellung einer uhrenkomponente auf siliziumbasis
EP4075204A1 (de) * 2020-03-31 2022-10-19 ETA SA Manufacture Horlogère Suisse Sperrklinke für uhrwerk
EP4191346B1 (de) * 2021-12-06 2024-06-26 The Swatch Group Research and Development Ltd Stossdämpfungsschutz eines resonatormechanismus mit flexibler drehführung

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CH714952B1 (fr) * 2007-05-08 2019-10-31 Patek Philippe Sa Geneve Composant horloger, son procédé de fabrication et application de ce procédé.
CH706020B1 (fr) * 2007-09-07 2013-07-31 Patek Philippe Sa Geneve Ressort-moteur pour barillet de mouvement d'horlogerie présentant une durée de marche accrue.
EP2105807B1 (de) * 2008-03-28 2015-12-02 Montres Breguet SA Monoblockspirale zur Erhöhung der Kurve und ihr Herstellungsverfahren
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Also Published As

Publication number Publication date
CN111801627A (zh) 2020-10-20
CN111801627B (zh) 2021-12-28
JP7204776B2 (ja) 2023-01-16
EP3781992B1 (de) 2022-05-04
EP3781992A1 (de) 2021-02-24
US11796966B2 (en) 2023-10-24
EP3557333A1 (de) 2019-10-23
WO2019202378A1 (fr) 2019-10-24
US20210109483A1 (en) 2021-04-15
JP2021521455A (ja) 2021-08-26
TWI793285B (zh) 2023-02-21
TW201944182A (zh) 2019-11-16

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