EP3781992B1 - Herstellungsverfahren einer zugfeder aus silizium für eine uhr - Google Patents

Herstellungsverfahren einer zugfeder aus silizium für eine uhr Download PDF

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Publication number
EP3781992B1
EP3781992B1 EP18836894.8A EP18836894A EP3781992B1 EP 3781992 B1 EP3781992 B1 EP 3781992B1 EP 18836894 A EP18836894 A EP 18836894A EP 3781992 B1 EP3781992 B1 EP 3781992B1
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EP
European Patent Office
Prior art keywords
spring
piece
silicon
carried out
timepiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
EP18836894.8A
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English (en)
French (fr)
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EP3781992A1 (de
Inventor
Sylvain Jeanneret
Frédéric Maier
Jean-Luc Bucaille
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Patek Philippe SA Geneve
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Patek Philippe SA Geneve
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Publication date
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Publication of EP3781992A1 publication Critical patent/EP3781992A1/de
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Classifications

    • G—PHYSICS
    • G04—HOROLOGY
    • G04D—APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
    • G04D3/00—Watchmakers' or watch-repairers' machines or tools for working materials
    • G04D3/0069—Watchmakers' or watch-repairers' machines or tools for working materials for working with non-mechanical means, e.g. chemical, electrochemical, metallising, vapourising; with electron beams, laser beams
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B1/00—Driving mechanisms
    • G04B1/10—Driving mechanisms with mainspring
    • G04B1/14—Mainsprings; Bridles therefor
    • G04B1/145—Composition and manufacture of the springs
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00—Mechanisms for stabilising frequency
    • G04B17/04—Oscillators acting by spring tension
    • G04B17/06—Oscillators with hairsprings, e.g. balance
    • G04B17/066—Manufacture of the spiral spring
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B21/00—Indicating the time by acoustic means
    • G04B21/02—Regular striking mechanisms giving the full hour, half hour or quarter hour
    • G04B21/06—Details of striking mechanisms, e.g. hammer, fan governor
    • G—PHYSICS
    • G04—HOROLOGY
    • G04D—APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
    • G04D3/00—Watchmakers' or watch-repairers' machines or tools for working materials
    • G04D3/0074—Watchmakers' or watch-repairers' machines or tools for working materials for treatment of the material, e.g. surface treatment
    • G04D3/0076—Watchmakers' or watch-repairers' machines or tools for working materials for treatment of the material, e.g. surface treatment for components of driving mechanisms, e.g. mainspring
    • G—PHYSICS
    • G04—HOROLOGY
    • G04D—APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
    • G04D3/00—Watchmakers' or watch-repairers' machines or tools for working materials
    • G04D3/0074—Watchmakers' or watch-repairers' machines or tools for working materials for treatment of the material, e.g. surface treatment
    • G04D3/0089—Watchmakers' or watch-repairers' machines or tools for working materials for treatment of the material, e.g. surface treatment for components of the regulating mechanism, e.g. coil springs
    • G—PHYSICS
    • G04—HOROLOGY
    • G04F—TIME-INTERVAL MEASURING
    • G04F7/00—Apparatus for measuring unknown time intervals by non-electric means
    • G04F7/04—Apparatus for measuring unknown time intervals by non-electric means using a mechanical oscillator
    • G04F7/08—Watches or clocks with stop devices, e.g. chronograph
    • G04F7/0804—Watches or clocks with stop devices, e.g. chronograph with reset mechanisms

Definitions

  • the present invention relates to a process for manufacturing a silicon-based watch spring, in particular for a wristwatch or pocket watch.
  • Silicon is a highly appreciated material in mechanical watchmaking for its advantageous properties, in particular its low density, its high resistance to corrosion, its non-magnetic character and its ability to be machined by micro-fabrication techniques. It is thus used to manufacture spiral springs, balance wheels, oscillators with flexible guidance, escapement anchors and escape wheels.
  • Silicon nevertheless has the disadvantage of low mechanical resistance, a disadvantage which is aggravated by the etching method generally used for its machining, deep reactive ion etching known as DRIE, which leaves sharp edges and creates flatness defects in the shape ripples (called “scalloping"), as well as defects in the crystal lattice, on the sides of the part.
  • This low mechanical resistance is problematic for the manipulation of the components during their assembly in a movement or in the event of shocks to which the watch is subjected. Components can easily break.
  • watch components made of silicon are generally reinforced by a coating of silicon oxide with a thickness much greater than that of the native oxide, as described in the patent application WO 2007/000271 . This coating is generally left on the final component but, according to the teaching of the patent application EP 2277822 , it can be removed without significantly affecting the mechanical strength.
  • the mechanical strength must also be sufficient for the component to be able to deform elastically without breaking during its operation to perform its function.
  • the stresses in operation are relatively low, of the order of a few hundred MPa at most, so that the mechanical resistance provided by the layer of silicon oxide may in theory be sufficient.
  • the oscillation frequencies in operation (4 Hz, 10 Hz or even 50 Hz)
  • the number of cycles is high, which can lead to risks of fatigue failure.
  • the document EP3181938 describes a spiral spring subjected to an oxidation step and a deoxidation step.
  • the present invention aims to substantially increase the maximum stress that a silicon-based watch spring is capable of undergoing during its operation and/or the fatigue strength of such a watch spring.
  • a particular embodiment of the method for manufacturing a silicon-based watch spring according to the invention comprises steps E1 to E5.
  • a first step E1 consists in etching in a silicon wafer, preferably by deep reactive ion etching (DRIE), a part having the desired shape and substantially the desired dimensions of the watch spring, or a part of which a part has the desired shape and substantially the desired dimensions of the watch spring.
  • DRIE deep reactive ion etching
  • Silicon can be monocrystalline, polycrystalline or amorphous. For isotropy of all physical characteristics, polycrystalline silicon may be preferred.
  • the silicon used in the invention can also be doped or not. Instead of the silicon itself, the part can be produced in a composite material comprising thick layers of silicon separated by one or more thin intermediate layers of silicon oxide, by etching in a silicon-on-insulator substrate (SOI substrate).
  • SOI substrate silicon-on-insulator substrate
  • a second step E2 of the method consists in thermally oxidizing the part, typically at a temperature between 600°C and 1300°C, preferably between 800°C and 1200°C, so as to cover it with a layer of oxide of silicon (SiO 2 ).
  • the thickness of this layer of silicon oxide is typically between 0.5 ⁇ m and a few micrometers, preferably between 0.5 and 5 ⁇ m, more preferably between 1 and 5 ⁇ m, for example between 1 and 3 ⁇ m.
  • This layer of silicon oxide is formed by growth by consuming silicon, which pushes back the interface between the silicon and the silicon oxide and attenuates the surface defects of the silicon.
  • the silicon oxide layer is removed, for example by wet etching, vapor phase etching or dry etching.
  • a fourth step E4 the annealing treatment described in the patent application is applied to the part. CH 702431 .
  • This thermal annealing treatment is carried out in a reducing atmosphere, preferably at a pressure strictly greater than 50 Torr, or even 100 Torr, and less than or equal to atmospheric pressure (760 Torr), but which may be of the order of atmospheric pressure, and preferably at a temperature between 800°C and 1300°C.
  • the duration of the annealing treatment can be from a few minutes to several hours.
  • the reducing atmosphere can consist mainly or entirely of hydrogen. It can also comprise argon, nitrogen or any other neutral gas.
  • This annealing treatment causes a migration of silicon atoms which leave the convex parts of the surface to accumulate in the concave parts and thus round off the edges and attenuate the ripples and other defects left on the sides by the etching.
  • a layer of silicon oxide (SiO 2 ) is formed on the part, making it possible to increase its mechanical strength.
  • This layer of silicon oxide can be formed by thermal oxidation, in the same way as in the second step E2, or by deposition, in particular chemical or physical vapor deposition (CVD, PVD). It is preferably formed over all or almost all of the surface of the part. Its thickness is typically between 0.5 ⁇ m and a few micrometers, preferably between 0.5 and 5 ⁇ m, more preferably between 1 and 5 ⁇ m, for example between 1 and 3 ⁇ m.
  • said part is part of a batch of parts produced in the same silicon wafer.
  • the part and the other parts of the batch are detached from the wafer.
  • the final watch spring according to the invention can be the spare part itself or a part of this part.
  • step E5 the oxidation - deoxidation (steps E2 and E3), the annealing (step E4) and the formation of a layer of silicon oxide (step E5) complement each other remarkably well so that the overall effect obtained clearly exceeds what could be expected by combining these steps.
  • the apparent flexural breaking stress obtained with the process according to the invention is very high. It is on average around 5 GPa, can even reach values close to 6 GPa and the minimum value is greater than 3 GPa. Since silicon is a brittle material, its apparent breaking stress or breaking limit merges with its elastic limit. It is therefore possible to produce silicon springs capable, in current operation, of exerting high-intensity forces, like the springs produced in the most efficient alloys or in metallic glass.
  • the picture 3 illustrates a mainspring, more precisely a mainspring, intended to store mechanical energy during its winding and to restore it gradually to power the operation of a cog or other watch mechanism.
  • a mainspring manufactured according to the method according to the invention will have an excellent energy storage capacity, determined by the ratio of the elastic limit squared to the modulus of elasticity ( ⁇ 2 /E).
  • This mainspring, shown in picture 3 in its relaxed state when it is out of the barrel, may comprise parts fulfilling additional functions with respect to the storage and the return of energy, for example parts serving as a plug or as a flange as described in the patent CH 705368 .
  • the figure 4 illustrates a hammer spring whose end is intended to act on a pin carried by a hammer in order to actuate the latter for resetting a chronograph counter.
  • the very high apparent breaking stress in bending obtained by the method according to the invention can be used to reduce the dimensions of the spring compared to a spring made of a material more classic like steel or nickel-phosphorus, for the same force exerted in normal operation.
  • the method according to the invention can also be used to increase the fatigue resistance of watch springs exerting forces of moderate intensity but stressed at high frequency, such as spiral springs fitted to balances or flexible guides of oscillators without pivots such as the flexible guide with separate cross blades of the oscillator described in the patent application WO 2017/055983 .
  • Oxidation - deoxidation eliminates the thickness of the silicon most affected by the defects of surface. Annealing rearranges the atoms in matter. The formation of the silicon oxide layer brings compressive stress to the silicon surface. The result is that the watch springs obtained are of remarkable quality. Chips and other defects likely to create incipient fractures are greatly reduced or even removed. Surface roughness is smoothed. The ripples and other surface defects created by the DRIE engraving on the sides of the part are reduced or even eliminated. The edges are rounded, which reduces stress concentrations.
  • the method according to the invention can be applied to watch springs other than those mentioned above, for example to toggle springs, lever springs, pawl springs or jumper springs.
  • step E4 annealing
  • step E2 thermal oxidation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Micromachines (AREA)
  • Springs (AREA)

Claims (14)

  1. Verfahren zur Herstellung einer Uhrfeder, das die folgenden Schritte umfasst:
    a) Fertigen eines Bauteils auf Siliziumbasis, das die gewünschte Form der Uhrfeder aufweist oder einen Teil umfasst, der die gewünschte Form der Uhrfeder aufweist,
    b) thermisches Oxidieren des Bauteils,
    c) Desoxidieren des Bauteils,
    d) Durchführen eines Glühens des Bauteils in einer reduzierenden Atmosphäre,
    e) Bilden einer Siliziumoxidschicht auf dem Bauteil.
  2. Verfahren zur Herstellung einer Uhrfeder, das die folgenden Schritte umfasst:
    a) Fertigen eines Bauteils auf Siliziumbasis, das die gewünschte Form der Uhrfeder aufweist oder einen Teil umfasst, der die gewünschte Form der Uhrfeder aufweist,
    b) Durchführen eines Glühens des Bauteils in einer reduzierenden Atmosphäre,
    c) thermisches Oxidieren des Bauteils,
    d) Desoxidieren des Bauteils,
    e) Bilden einer Siliziumoxidschicht auf dem Bauteil.
  3. Verfahren nach Anspruch 1 oder 2, wobei der Schritt a) einen Ätzvorgang, vorzugsweise einen Vorgang zum reaktiven Ionentiefenätzen, umfasst.
  4. Verfahren nach einem der Ansprüche 1 bis 3, wobei der Schritt des thermischen Oxidierens bei einer Temperatur von zwischen 600 °C und 1300 °C, vorzugsweise zwischen 800 °C und 1200 °C, durchgeführt wird.
  5. Verfahren nach einem der Ansprüche 1 bis 4, wobei der Schritt des Desoxidierens einen Ätzvorgang, vorzugsweise einen Nassätz-, Gasphasenätz- oder Trockenätzvorgang, umfasst.
  6. Verfahren nach einem der Ansprüche 1 bis 5, wobei der Schritt des Glühens bei einem Druck von strikt über 50 Torr durchgeführt wird.
  7. Verfahren nach einem der Ansprüche 1 bis 6, wobei der Schritt des Glühens bei einem Druck von strikt über 100 Torr durchgeführt wird.
  8. Verfahren nach einem der Ansprüche 1 bis 7, wobei der Schritt des Glühens bei einem Druck von niedriger oder gleich dem Atmosphärendruck durchgeführt wird.
  9. Verfahren nach einem der Ansprüche 1 bis 8, wobei der Schritt des Glühens bei einer Temperatur von zwischen 800 °C und 1300 °C durchgeführt wird.
  10. Verfahren nach einem der Ansprüche 1 bis 9, wobei die reduzierende Atmosphäre Wasserstoff umfasst.
  11. Verfahren nach Anspruch 10, wobei die reduzierende Atmosphäre auch ein Neutralgas, zum Beispiel Argon, umfasst.
  12. Verfahren nach einem der Ansprüche 1 bis 11, wobei der Schritt e) durch thermisches Oxidieren durchgeführt wird.
  13. Verfahren nach einem der Ansprüche 1 bis 12, wobei das Silizium monokristallin oder polykristallin ist.
  14. Verfahren nach einem der Ansprüche 1 bis 13, wobei die Uhrfeder eine Triebfeder, vorzugsweise eine Federhausfeder, eine Hammerfeder, eine Hebelfeder, eine Wippenfeder, eine Sperrkegelfeder, eine Rastenfeder, eine Spiralfeder oder eine biegsame Führung ist.
EP18836894.8A 2018-04-16 2018-12-18 Herstellungsverfahren einer zugfeder aus silizium für eine uhr Active EP3781992B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP18167501.8A EP3557333B1 (de) 2018-04-16 2018-04-16 Herstellungsverfahren einer zugfeder für eine uhr
PCT/IB2018/060218 WO2019202378A1 (fr) 2018-04-16 2018-12-18 Procede de fabrication d'un ressort horloger a base de silicium

Publications (2)

Publication Number Publication Date
EP3781992A1 EP3781992A1 (de) 2021-02-24
EP3781992B1 true EP3781992B1 (de) 2022-05-04

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EP18167501.8A Active EP3557333B1 (de) 2018-04-16 2018-04-16 Herstellungsverfahren einer zugfeder für eine uhr
EP18836894.8A Active EP3781992B1 (de) 2018-04-16 2018-12-18 Herstellungsverfahren einer zugfeder aus silizium für eine uhr

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Application Number Title Priority Date Filing Date
EP18167501.8A Active EP3557333B1 (de) 2018-04-16 2018-04-16 Herstellungsverfahren einer zugfeder für eine uhr

Country Status (6)

Country Link
US (1) US11796966B2 (de)
EP (2) EP3557333B1 (de)
JP (1) JP7204776B2 (de)
CN (1) CN111801627B (de)
TW (1) TWI793285B (de)
WO (1) WO2019202378A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3882710A1 (de) 2020-03-19 2021-09-22 Patek Philippe SA Genève Verfahren zur herstellung einer uhrenkomponente auf siliziumbasis
EP4075204A1 (de) * 2020-03-31 2022-10-19 ETA SA Manufacture Horlogère Suisse Sperrklinke für uhrwerk
EP4191346B1 (de) * 2021-12-06 2024-06-26 The Swatch Group Research and Development Ltd Stossdämpfungsschutz eines resonatormechanismus mit flexibler drehführung

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DE602006004055D1 (de) 2005-06-28 2009-01-15 Eta Sa Mft Horlogere Suisse Verstärktes mikromechanisches teil
EP1835339B1 (de) * 2006-03-15 2012-05-16 Rolex S.A. LIGA Verfahren zur Herstellung einer einzel- oder mehrlagigen metallischen Struktur und damit hergestellte Struktur
CH714952B1 (fr) * 2007-05-08 2019-10-31 Patek Philippe Sa Geneve Composant horloger, son procédé de fabrication et application de ce procédé.
CH706020B1 (fr) * 2007-09-07 2013-07-31 Patek Philippe Sa Geneve Ressort-moteur pour barillet de mouvement d'horlogerie présentant une durée de marche accrue.
EP2105807B1 (de) 2008-03-28 2015-12-02 Montres Breguet SA Monoblockspirale zur Erhöhung der Kurve und ihr Herstellungsverfahren
CH698962B1 (fr) 2008-06-10 2014-10-31 Rolex Sa Ressort de barillet et procédé pour sa mise en forme.
CH699476B1 (fr) * 2008-08-29 2013-03-28 Patek Philippe Sa Geneve Procédé de fabrication d'un composant horloger en silicium.
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CH702431B1 (fr) 2009-12-21 2015-05-29 Suisse Electronique Microtech Procédé de fabrication d'une pièce micromécanique.
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EP2390732A1 (de) 2010-05-27 2011-11-30 Association Suisse pour la Recherche Horlogère Zugfeder für Federhaus
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CH704471B1 (fr) 2011-02-15 2016-08-15 Générale Ressorts Sa Ressort de barillet de pièce d'horlogerie.
EP2937311B1 (de) * 2014-04-25 2019-08-21 Rolex Sa Herstellungsverfahren einer verstärkten uhrkomponente, entsprechende uhrkomponente und entsprechende uhr
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WO2017055983A1 (fr) 2015-09-29 2017-04-06 Patek Philippe Sa Geneve Composant mécanique à pivot flexible et dispositif horloger le comprenant
CH711962B1 (fr) * 2015-12-18 2017-10-31 Csem Centre Suisse D'electronique Et De Microtechnique Sa – Rech Et Développement Procédé de fabrication d'un spiral d'une raideur prédéterminée avec retrait localisé de matière.
EP3181938B1 (de) * 2015-12-18 2019-02-20 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Herstellungsverfahren einer spiralfeder mit einer vorbestimmten steifigkeit durch wegnahme von material
US20170285573A1 (en) * 2016-11-30 2017-10-05 Firehouse Horology, Inc. Crystalline Compounds for Use in Mechanical Watches and Methods of Manufacture Thereof

Also Published As

Publication number Publication date
TWI793285B (zh) 2023-02-21
JP2021521455A (ja) 2021-08-26
CN111801627A (zh) 2020-10-20
EP3557333A1 (de) 2019-10-23
WO2019202378A1 (fr) 2019-10-24
CN111801627B (zh) 2021-12-28
EP3781992A1 (de) 2021-02-24
EP3557333B1 (de) 2020-11-04
US20210109483A1 (en) 2021-04-15
JP7204776B2 (ja) 2023-01-16
TW201944182A (zh) 2019-11-16
US11796966B2 (en) 2023-10-24

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