EP3486922A1 - Optische vorrichtung zum analysieren einer probe durch streuung eines röntgenstrahlbündels, entsprechende vorrichtung zur bündelung und entsprechender kollimator - Google Patents

Optische vorrichtung zum analysieren einer probe durch streuung eines röntgenstrahlbündels, entsprechende vorrichtung zur bündelung und entsprechender kollimator Download PDF

Info

Publication number
EP3486922A1
EP3486922A1 EP18215683.6A EP18215683A EP3486922A1 EP 3486922 A1 EP3486922 A1 EP 3486922A1 EP 18215683 A EP18215683 A EP 18215683A EP 3486922 A1 EP3486922 A1 EP 3486922A1
Authority
EP
European Patent Office
Prior art keywords
plate
enclosure
opening
faces
face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP18215683.6A
Other languages
English (en)
French (fr)
Inventor
Olivier Tache
Olivier Spalla
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of EP3486922A1 publication Critical patent/EP3486922A1/de
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • G21K1/025—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using multiple collimators, e.g. Bucky screens; other devices for eliminating undesired or dispersed radiation
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00—Arrangements for handling radiation or particles
    • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00—Arrangements for handling radiation or particles
    • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/062—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements the element being a crystal
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00—Arrangements for handling radiation or particles
    • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/067—Construction details

Definitions

  • the present invention relates to the field of sample analysis by X-ray scattering.
  • It relates in particular to a collimation device for an X-ray beam, an optical device for the analysis of a sample by X-ray scattering comprising this collimation device and a collimator for such a beam.
  • X-ray beam means a photon beam whose energy is between 1keV and 30keV.
  • the invention relates to the field of the analysis of a sample by X-ray scattering at small angles.
  • small-angle scattering it should be understood that the rays scattered by a sample traversed by the beam (perpendicular incidence) to be analyzed are in the vicinity of the X-ray beam through which the sample is illuminated, in an angle generally between 0 , 1 ° and 10 ° with respect to the optical axis of the beam.
  • SAXS Spatial Angle X-Rays Scattering
  • FIG. 1 An optical device known for implementing a SAXS technique is represented on the figure 1 , in a perspective view, exploded.
  • the device comprises an X-ray source.
  • the beam 1 generated by the source 10 is then directed towards a monochromator mirror 11, which makes it possible to produce a monochromatic beam, that is to say containing only one wavelength of X-rays.
  • a beam is monochromatic when the ratio between the wavelength difference and the desired wavelength is less than 1%.
  • the beam has a preferential axis of propagation called "optical axis". Transversally to the optical axis, the beam has a quasi-uniform section when so-called “collimating” mirrors are used, or converging towards a distant point when mirrors called “convergent” are used.
  • geometric definition of the beam at the output of the monochromator is not sufficient to perform small angle scattering experiments.
  • geometric definition we mean the real difference between a geometry of the beam (parallel or convergent) perfect and that which is physically obtained.
  • obstacle an opaque X-ray device at the wavelength employed.
  • the first "obstacle” generally corresponds to four opaque mobile X-ray lips, referenced 12.
  • Two parallel lips with a spacing D in the plane perpendicular to the axis of the beam define a "slot".
  • a collimator is also generally formed of two "holes” whose centers must be aligned with the optical axis of the beam coming out of the monochromator.
  • the first obstacle in the form of a plate 12 provided with two pairs of lips forming these two slots, thus forms a hole.
  • the plate 12 provided with the two pairs of "lips" can be integrated into the mirror 11.
  • the plate 12 is generally followed by a calibrated attenuator (not referenced).
  • the beam is then directed to a second obstacle for collimation, placed at a distance from the first obstacle along the optical axis of the beam.
  • This second obstacle is also in the form of a plate 13 having two pairs of parallel lips, to form two slots whose centers are aligned with the optical axis of the beam.
  • optical path between the two sets of collimation "slots" can be evacuated. Sometimes, it may, alternatively, be placed in a helium atmosphere.
  • the coupling of the two collimation means 12 and 13 makes it possible to define the size of the beam that it is desired to obtain at the level of the sample 16.
  • the beam passes through a third pair of slots 15, which are placed along the optical axis just before the sample 16 to be analyzed.
  • These so-called “anti-scattering” slots do not, properly speaking, not be part of the collimator. Indeed, the anti-scattering slots 15 make it possible to eliminate the parasitic diffusions produced by the slots of the collimation means 12 and 13.
  • Adjusting the anti-scattering slots 15 is particularly delicate, since it is necessary to brush the beam without touching it to eliminate spurious broadcasts without changing the size of the beam.
  • beam 1 with sample 16 causes X-ray scattering, the beam being further transmitted at least partly through the sample.
  • the transmitted beam and the diffused part are then accommodated in a second vacuum chamber 18 at the end of which is a means 19 for stopping the beam.
  • the vacuum chamber makes it possible to limit both the additional absorption by the air, the scattered rays and the complementary diffusion of the beam 1 always by the air.
  • the plate 12 provided with collimation slots (first obstacle)
  • the plate 13 also provided with collimation slots (second obstacle) and anti-scattering slots 15, without which it would be difficult to detect the X-rays scattered by the sample, in particular the small-angle scattered rays located near the optical axis of the beam.
  • the relative position of the different obstacles 12, 13 and 15 is also important for this purpose.
  • these obstacles 12, 13, 15 are generally four independent lips forming rectangular or square slots. These lips are provided with blades that can be moved to adjust the dimensions of a slot. These blades are metal and usually made of steel, tantalum or made of tungsten rods.
  • a blade 21 at a slot is for example represented on the figure 2 , according to a sectional view. Conventionally, such a blade 21 has a thickness of about 1.5 mm.
  • monocrystalline structure blade By monocrystalline structure blade, it should be understood that the material forming the blade is made of a single solid material having a elementary mesh repeating itself in a regular way, to finally form an ordered structure.
  • Such a hybrid blade comprising a metal blade 21 and a monocrystalline structure plate 22 is for example represented on the figure 3 , according to the same section view as the figure 2 .
  • the slots provided with these blades thus make it possible to improve the quality of the device.
  • the monocrystalline structure which is placed at the edge of the blade returns the X-rays at well-defined angles which depend on the crystalline plane of this structure. These angles are large enough not to be confused with the beam.
  • the hybrid slot however, has a more complicated structure than the metal slits.
  • the displacement of the blades is also more complex, especially if the slots are made to be installed under vacuum or in a controlled atmosphere, such as helium (He).
  • An object of the invention is to provide a simplified optical device and comprising at least one collimation device of an X-ray beam having the advantages of a hybrid slot without presenting at least one of the disadvantages.
  • Another object of the invention is to provide a collimation device for an X-ray beam, in particular adapted to be implemented in this optical device.
  • Another objective is to propose a collimator of an X-ray beam, in particular intended to be used in this collimation device.
  • the invention proposes a collimation device for an X-ray beam, characterized in that it comprises a chamber intended to be evacuated or in a controlled atmosphere, the enclosure comprising an input and an output for the beam and at least one plate made of a diffracting periodic structure material, said plate comprising two main faces and at least one opening flaring between said faces.
  • the invention also proposes an optical device for analyzing a sample by diffusion of an X-ray beam, characterized in that it comprises a beam collimation device according to the invention.
  • the invention also proposes a collimator for an X-ray beam, characterized in that it comprises several parts, each part, made of a material having a periodic diffracting structure, comprising at least one opening flaring in the thickness of this part, the faces of the opening formed by the set of openings of each part of the collimator forming a sawtooth structure along the longitudinal axis of this opening.
  • An optical device 100 for analyzing a sample 105 by X-ray scattering according to the invention is represented on the figure 4 .
  • This optical device 100 comprises an X-ray source 101, 102, producing a monochromatic beam.
  • This source 101, 102 comprises, in known manner, the source 101 of X-rays itself and a monochromator mirror 102.
  • the X-ray source 101 itself is one-off, but it could be otherwise, for example in the form of a line.
  • the source 101, 102 might not be monochromatic, as defined previously.
  • upstream and downstream will be used with reference to the direction of propagation of the X-ray beam.
  • the device Downstream of the source 101, 102 of X-rays, the device comprises a first enclosure 110 intended to be under vacuum or in a controlled atmosphere, such as helium (He).
  • a controlled atmosphere such as helium (He).
  • This first enclosure 110 has an input and an output for the beam, at each of which is disposed at least one plate 104, 104 'made of a material having a periodic diffracting structure according to the invention.
  • this diffracting periodic structure will be a monocrystalline structure.
  • These plates 104, 104 ' are preferably mounted against the walls 120, 121 end of the enclosure 110, inside the enclosure 110. The positioning of these plates 104, 104' is easy. These walls 120, 121 also form, respectively, the input to the X-ray beam and the output to said beam.
  • This enclosure 110 is shown in sectional view on the figure 5 . Furthermore, a plate 104 made of a diffracting periodic structure material according to the invention is represented on the figure 7 .
  • Each plate 104, 104 ' comprises two main faces, and more precisely an upstream face 104a, 104'a and a downstream face 104b, 104'b and an opening 104c, 104'c widening between the upstream face and the downstream face of the plate considered.
  • the plate 104, 104 ' is arranged so that the opening 104c, 104'c flares from upstream to downstream, with reference to the direction of propagation of the beam.
  • the same plate 104, 104 'could be arranged in the other direction, that is to say that the opening 104c, 104'c narrows from upstream to downstream, with reference to the direction of propagation beam.
  • Thinning of the plate avoids X-ray reflection of the beam propagating at small angles, i.e. grazing incidence.
  • angle ⁇ acute, formed between a widening direction D of the opening and any of the upstream or downstream faces of the plate may be between 10 ° and 80 °.
  • the angle ⁇ is for example represented on the figure 6 .
  • the angle ⁇ may be equal to the angle between the ⁇ 100 ⁇ and ⁇ 111 ⁇ crystal planes of the material forming the plate 104.
  • This characteristic can be obtained when the method of manufacturing the plate, of a chemical nature, is a wet anisotropic etching. Indeed, with this process, the chemical etching of the material takes place between the ⁇ 100 ⁇ and ⁇ 111 ⁇ crystalline planes. The surface condition obtained is thus of very good quality.
  • the notations ⁇ 100 ⁇ and ⁇ 111 ⁇ correspond to the Miller indices. They make it possible to designate the planes in a crystalline material. These indices are well known to a person practicing in the field of crystallography and commonly accepted.
  • a solution of potassium hydroxide (KOH) can be used.
  • KOH potassium hydroxide
  • TMAH tetramethylammonium hydroxide
  • the enlargement of the opening 104c, 104c can be described as uniform.
  • uniform expansion it should be understood that the change in size that the opening undergoes between the upstream face and the downstream face of the plate is performed according to a homothety.
  • the center O corresponds to the intersection between the axis A passing through the centers C 1 , C 2 of the opening at the level, respectively, of the upstream and downstream faces of the plate with the direction axis D mentioned above. .
  • the upstream faces 104a, 104'a or downstream 104b, 104'b of the plate 104 made of a diffracting periodic structure material correspond to the plane ⁇ 100 ⁇ of this structure.
  • the faces of the plate inclined relative to the upstream and downstream faces then correspond to the plane ⁇ 111 ⁇ of the structure.
  • the plate 104 can in turn be inserted in place of the slotted plate 12 of the device according to the prior art shown in FIG. figure 1 , in order to collimate the beam without generating parasitic scattering.
  • the plate 104 then avoids any parasitic scattering on the collimated beam and can also improve the collimation, before the beam hits the sample 105.
  • the plates 104, 104 'thus have the same functions as a hybrid slot proposed in document D1.
  • the optical device 100 Downstream of the sample 105, the optical device 100 comprises means already known from the optical device shown in FIG. figure 1 .
  • the optical device 100 comprises a detector 108, disposed downstream of the second enclosure 106.
  • the plates 104 ', 104 respectively disposed at the inlet and the outlet of the first enclosure 110 may be identical.
  • the plates 104, 104 ' may also be made of silicon, the angle ⁇ between the ⁇ 100 ⁇ and ⁇ 111 ⁇ crystal planes being then about 54.7 ° if a KOH solution for example was used.
  • the shape of the opening is then defined by the crystalline planes.
  • the opening of a plate 104, 104 ' may be square or rectangular and the flare between the upstream face and the downstream face is given by the angle ⁇ .
  • this opening is square, its side, at the upstream face 104a, 104'a of the plate 104, 104 'can be 1 mm.
  • a plate 104, 104 ' may have a size of about 10mm * 10mm, and a thickness of about 1-2mm.
  • the openings 104c, 104c 'of these plates may differ in size and / or in the value of the angle ⁇ .
  • each plate 104, 104 ' may be made of another material of diffracting periodic structure, that silicon, in this case monocrystalline.
  • silicon in this case monocrystalline.
  • it may be a monocrystalline structure such as germanium.
  • optical device represented on the figure 4 can be the subject of alternative embodiments.
  • An alternative embodiment may consist in replacing the assembly formed by the collimation means 13 and the anti-diffusion slots 15 of the optical device according to the prior art shown in FIG. figure 1 by a plate 104 according to the invention.
  • This plate 104 is then disposed at the outlet of an enclosure intended to be under vacuum (or in a controlled atmosphere), as shown in FIG. figure 6 in order to form an X-ray collimation device.
  • this enclosure does not comprise a plate according to the invention at its entry, but this entry is preceded by the slots 12 and, if appropriate, the attenuator. calibrated (not referenced) as shown on the figure 1 .
  • an X-ray beam collimator comprising a plurality of plates made of a monocrystalline material, contiguous to each other so that said at least one opening of each plate widens between the upstream face and the downstream face. of the plate or the opposite.
  • the advantage of this arrangement is to limit, or even eliminate, the transmission of the beam 200 through the monocrystalline material at the contour of the opening.
  • the thickness e f of plate encountered by the beam 200 is low at the contour of this opening.
  • the thickness e f of plate encountered by the beam 200 is low at the contour of this opening.
  • the collimation of the beam 200 is thereby improved by transmitting only the beam passing through the space E left by the opening, on the upstream side of the plate.
  • the plate is made of silicon.
  • germanium which is a denser material than silicon, this arrangement will be of particular interest for the X-ray energy range of 15keV to 30keV.
  • the applicant made measurements and made some calculations.
  • attaching plates can be envisaged at each end of the enclosure 110 shown in FIG. figure 5 . This can also be envisaged only at the input or only at the output of this enclosure 110, in particular if only this output comprises a plate 104 according to the invention.
  • this opening 104C is thus similar to that obtained by joining several plates 104, as shown in FIG. figure 7 .
  • the plate 104, 104 'used in the context of the invention finally has several advantages over a hybrid slot as presented in document D1. Indeed, the structure is simple, made of a single crystal. In addition, this plate will most often be attached to the ends of a vacuum chamber or controlled atmosphere, so that the manipulator will not be made to make adjustments: the only adjustment is the initial positioning of the plate. In addition, the generally used manufacturing process, chemical, generates an excellent surface state, which limits the risks of spurious broadcasts.

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
EP18215683.6A 2010-04-26 2011-04-26 Optische vorrichtung zum analysieren einer probe durch streuung eines röntgenstrahlbündels, entsprechende vorrichtung zur bündelung und entsprechender kollimator Withdrawn EP3486922A1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1001774A FR2959344B1 (fr) 2010-04-26 2010-04-26 Dispositif optique pour analyser un echantillon par diffusion d'un faisceau de rayon x, dispositif de collimation et collimateur associes
EP11722906.2A EP2564398B1 (de) 2010-04-26 2011-04-26 Kollimator für röntgenstrahl
PCT/IB2011/051805 WO2011135510A1 (fr) 2010-04-26 2011-04-26 Dispositif optique pour analyser un echantillon par diffusion d'un faisceau de rayons x, dispositif de collimation et collimateur associes.

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP11722906.2A Division EP2564398B1 (de) 2010-04-26 2011-04-26 Kollimator für röntgenstrahl
EP11722906.2A Division-Into EP2564398B1 (de) 2010-04-26 2011-04-26 Kollimator für röntgenstrahl

Publications (1)

Publication Number Publication Date
EP3486922A1 true EP3486922A1 (de) 2019-05-22

Family

ID=43065708

Family Applications (2)

Application Number Title Priority Date Filing Date
EP11722906.2A Active EP2564398B1 (de) 2010-04-26 2011-04-26 Kollimator für röntgenstrahl
EP18215683.6A Withdrawn EP3486922A1 (de) 2010-04-26 2011-04-26 Optische vorrichtung zum analysieren einer probe durch streuung eines röntgenstrahlbündels, entsprechende vorrichtung zur bündelung und entsprechender kollimator

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP11722906.2A Active EP2564398B1 (de) 2010-04-26 2011-04-26 Kollimator für röntgenstrahl

Country Status (6)

Country Link
US (1) US9153351B2 (de)
EP (2) EP2564398B1 (de)
JP (1) JP2013525794A (de)
CN (1) CN102971801B (de)
FR (1) FR2959344B1 (de)
WO (1) WO2011135510A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012208710B3 (de) 2012-05-24 2013-09-19 Incoatec Gmbh Verfahren zur Herstellung einer einkristallinen Röntgenblende und Röntgenanalysegerät mit einkristalliner Röntgenblende
US9575017B2 (en) * 2014-02-24 2017-02-21 Rigaku Innovative Technologies, Inc. High performance Kratky assembly
CN106062542B (zh) 2014-03-27 2019-06-07 株式会社理学 射束生成单元以及小角度x射线散射装置
CN104599735B (zh) * 2014-11-24 2017-02-08 中国船舶重工集团公司第七一九研究所 一种用于参考γ辐射场的γ射线准直器
CN106979957B (zh) * 2017-05-23 2023-10-31 中国科学院上海应用物理研究所 一种利用真空冷热台进行掠入射x射线小角散射实验的方法
CN110993142B (zh) * 2019-12-16 2022-03-11 中国原子能科学研究院 用于准单能中子参考辐射场的准直器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1744610A1 (ru) * 1989-12-13 1992-06-30 Московский Геологоразведочный Институт Им.Серго Орджоникидзе Коллиматор устройства дл ретгенофлуоресцентного анализа
JPH05107400A (ja) * 1991-10-15 1993-04-27 Nikon Corp 位置合わせの簡単なｘ線顕微鏡用の試料ホルダ
JPH0643300A (ja) * 1992-03-13 1994-02-18 Agency Of Ind Science & Technol Ｘ線顕微鏡を用いた観察方法及びそれに使用され る試料ホルダ

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6119752U (ja) * 1984-07-11 1986-02-05 理学電機株式会社 Ｘ線誘導筒
DE4212077A1 (de) * 1992-04-10 1993-10-14 Fraunhofer Ges Forschung Piezoelektrisch verstellbares Ventil und Verfahren zu ihrer Herstellung
JP3918104B2 (ja) * 1997-10-02 2007-05-23 日本政策投資銀行 蛍光ｘ線分析装置および蛍光ｘ線検出器
JP2002250704A (ja) * 2001-02-26 2002-09-06 Rigaku Corp Ｘ線測定装置及びｘ線測定方法
US6594341B1 (en) * 2001-08-30 2003-07-15 Koninklijke Philips Electronics, N.V. Liquid-free x-ray insert window
JP4561312B2 (ja) * 2004-07-08 2010-10-13 富士電機ホールディングス株式会社 Ｘ線画像再構成装置
JP4589882B2 (ja) * 2006-02-14 2010-12-01 株式会社リガク 背面反射ｘ線回折像観察装置
US7400703B2 (en) * 2006-08-11 2008-07-15 General Electric Company Method and system for controlling radiation intensity of an imaging system
JP5074105B2 (ja) * 2007-06-08 2012-11-14 株式会社島津製作所 エネルギ分散型ｘ線検出装置
US7742574B2 (en) * 2008-04-11 2010-06-22 Mats Danielsson Approach and device for focusing x-rays
US8223925B2 (en) * 2010-04-15 2012-07-17 Bruker Axs Handheld, Inc. Compact collimating device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1744610A1 (ru) * 1989-12-13 1992-06-30 Московский Геологоразведочный Институт Им.Серго Орджоникидзе Коллиматор устройства дл ретгенофлуоресцентного анализа
JPH05107400A (ja) * 1991-10-15 1993-04-27 Nikon Corp 位置合わせの簡単なｘ線顕微鏡用の試料ホルダ
JPH0643300A (ja) * 1992-03-13 1994-02-18 Agency Of Ind Science & Technol Ｘ線顕微鏡を用いた観察方法及びそれに使用され る試料ホルダ

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JAN SKOV PEDERSEN: "A flux and Background-optimized version of the NanoSTAR small-angle X-ray scattering camera for solution scattering", J. OF APPLIED CRYSTALLOGRAPHY, vol. 37, 2004, pages 369 - 380, XP009141266
YOULI: "Scatterless hybrid metal-single crystal slit for small-angle X-ray scattering and high-resolution X-ray diffraction", J. APPL. CRYSTALLOGRAPHY, vol. 41, 2008, pages 1134 - 1139, XP002594567, DOI: doi:10.1107/s0021889808031129

Also Published As

Publication number Publication date
FR2959344B1 (fr) 2013-03-22
US20130064354A1 (en) 2013-03-14
JP2013525794A (ja) 2013-06-20
EP2564398A1 (de) 2013-03-06
EP2564398B1 (de) 2019-05-22
FR2959344A1 (fr) 2011-10-28
WO2011135510A1 (fr) 2011-11-03
CN102971801B (zh) 2016-06-01
US9153351B2 (en) 2015-10-06
CN102971801A (zh) 2013-03-13

Similar Documents

Publication Publication Date Title
EP2564398B1 (de) Kollimator für röntgenstrahl
EP2526412B1 (de) Kompaktes röntgenuntersuchungssystem
FR2996962A1 (fr) Cellule a vapeur alcaline notamment pour horloge atomique et procede de fabrication.
EP1514279B1 (de) Optische vorrichtung für röntgenstrahlungsanwendungen
EP4052073B1 (de) Diffraktives optisches element mit einer metaoberfläche für die tirf-mikroskopie
EP2284510B1 (de) Statischer Interferometer mit kompensiertem Feld für die Fourier-Transform-Spektrometrie
EP3959506A1 (de) Kompakter gassensor
EP3329331B1 (de) Vorrichtung zur formung eines laserstrahls für einen atomsensor
EP1920234B1 (de) Optisches system mit mehrfachreflexion
EP2396806A1 (de) Massenanalyseeinrichtung mit grosser winkelannahmefähigkeit mit einem reflektron
EP2473824B1 (de) Feldkompensiertes interferometer
WO2010001015A1 (fr) Collecteur de rayonnement
EP2104871A1 (de) Vorrichtung zur abtastung mehrerer teile eines lichtstrahls
EP4016055A1 (de) Optische komponente für eine interferometrische atr-bildgebungsvorrichtung
EP4394487B1 (de) Vorrichtung zur beobachtung einer probe mittels bildgebung
WO2019137918A1 (fr) Dispositif optique pour rayons x
FR2754102A1 (fr) Procede de generation d'un microfaisceau de rayons x et dispositif pour celui-ci
FR3090135A1 (fr) Télescope comprenant un miroir secondaire monté sur lames « araignées » comportant un dispositif anti-lumière parasite
FR3059156B1 (fr) Module de detection optique
EP2423720B1 (de) Wellenlängen-abstimmbares optisches Filter und reflektierendes Bauteil
FR3115104A1 (fr) Dispositif d'émission de lumière optimisé pour capteur de gaz , et procédé de fabrication
FR3069380A1 (fr) Lentille pour systeme antennaire
FR2862139A1 (fr) Lame separatrice

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN PUBLISHED

AC Divisional application: reference to earlier application

Ref document number: 2564398

Country of ref document: EP

Kind code of ref document: P

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20191121

RBV Designated contracting states (corrected)

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

17Q First examination report despatched

Effective date: 20200117

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20200728