EP3376033B1 - Ölgedichtete vakuumpumpe - Google Patents

Ölgedichtete vakuumpumpe Download PDF

Info

Publication number
EP3376033B1
EP3376033B1 EP17160775.7A EP17160775A EP3376033B1 EP 3376033 B1 EP3376033 B1 EP 3376033B1 EP 17160775 A EP17160775 A EP 17160775A EP 3376033 B1 EP3376033 B1 EP 3376033B1
Authority
EP
European Patent Office
Prior art keywords
lubricant
vacuum pump
main seal
sealed vacuum
seal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP17160775.7A
Other languages
English (en)
French (fr)
Other versions
EP3376033A1 (de
Inventor
Christophe Gremillet
Hakim BOUHADID
Patrick Fournier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold GmbH filed Critical Leybold GmbH
Priority to EP17160775.7A priority Critical patent/EP3376033B1/de
Priority to TW107106611A priority patent/TWI750335B/zh
Priority to CN201880014004.1A priority patent/CN110337544B/zh
Priority to PCT/EP2018/055656 priority patent/WO2018166875A1/en
Priority to JP2019549422A priority patent/JP7231554B2/ja
Priority to KR1020197026666A priority patent/KR102519962B1/ko
Publication of EP3376033A1 publication Critical patent/EP3376033A1/de
Application granted granted Critical
Publication of EP3376033B1 publication Critical patent/EP3376033B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/809—Lubricant sump

Definitions

  • the present invention relates to a lubricant-sealed vacuum pump, particularly a rotary vane pump.
  • Lubricant-sealed vacuum pumps such as e.g. rotary vane pumps comprise a pump housing in which a suction chamber is defined. Within the suction chamber, at least one rotor element is arranged. In a rotary vane pump, the rotor element is arranged eccentrically within a cylindrical suction chamber. The rotor element is provided with a plurality of sliding vanes which are radially slideable in the rotor element, with the outer edge of the sliding vanes being in abutment on the inner wall of the suction chamber. As a result of the eccentric arrangement of the rotor element, the volume of the individual chambers formed by the sliding vanes will be changing so that the to-be-conveyed medium will be compressed.
  • lubricant is supplied to the at least one rotor element.
  • the lubricant is provided to achieve a sealing between the rotor element and the inner wall of the suction chamber.
  • the lubricant serves for generating a sealing effect between the sliding vanes connected to the rotor element, and the inner wall of the suction chamber.
  • the lubricant supply duct normally extends within the rotor, wherein the lubricant will be supplied to the recesses of the rotor in which the sliding vanes are held for radial displacement. Under the effect of the centrifugal forces, the lubricant will then reach the outer edge of the sliding vane that has the inner wall of the suction chamber abutting on it.
  • the rotor element is enclosed by a housing in which the shaft is arranged.
  • the shaft is driven by an electric drive motor.
  • a main seal is provided.
  • the latter normally comprises a sealing lip which is in abutment on the shaft surface or e.g. also on an outer side of a shell which is connected to the shaft in this area.
  • the provision of a shell may, depending on the given circumstances, have advantages in the assembly process and/or the advantage that the shell can be formed of a material improving the sealing tightness. Even in seals of high quality, leakages may happen to occur, particularly after many hours of use. Such leakages may be caused e.g. by particles intruding into the lubricant.
  • These particles may intrude into the lubricant e.g. as a result of abrasion or the like, or they may enter the lubricant out of the medium which is to be conveyed by the vacuum pump. If such particles happen to reach the area between the sealing lip of the seal and the shaft surface or the outer side of the shell surrounding the shaft, leakages will occur on the shaft seal.
  • US5,697,771 discloses a vacuum pump having the features defined within the preamble of claim 1.
  • the lubricant-sealed vacuum pump comprises, apart from the main seal, an additional seal.
  • the main seal normally comprises a seal lip arranged in abutment on the shaft surface or on an outer side of a shell surrounding the shaft.
  • the preferably annular additional seal is arranged on an inner side of the main seal that is facing toward the suction chamber.
  • the additional seal comprises a sealing lip arranged in abutment on the shaft surface or on the outer side of the shell surrounding the shaft.
  • two seals are provided directly adjacent to each other, wherein it is preferred that both seals comprise a sealing lip arranged in abutment on the shaft surface or on the outer side of the shell.
  • the sealing lip of the additional seal By providing a main seal and an additional seal, it is e.g. possible to produce the sealing lip of the additional seal within a mold and or to produce it from a material which is especially suited to prevent the intrusion of particles into the area between the additional seal and the main seal and respectively to reduce the risk of such an intrusion.
  • the additional seal serves as a kind of filter preventing the transport of particles in the direction of the main seal.
  • the material for the main seal can thus be selected substantially under the aspect of achieving the best possible sealing effect, while the material for the additional seal will be selected substantially under the aspect of a safe retention of damaging particles.
  • material for the main seal the use of Viton, FKM, FPM, PTFE and/or EPDM is preferred.
  • the additional seal is preferably made of textile fiber and/or non-woven textile. It is possible to use organic or non-organic textiles.
  • the additional seal is connected to the main seal, particularly fixedly.
  • the additional seal can be fixedly connected to an inner side of the main seal by bonding, locking engagement or the like.
  • the additional seal comprises a particularly annular projection extending into a particularly annular recess of the main seal.
  • the additional seal comprises a holding element.
  • the holding element carries the sealing element of the additional comprising the sealing lip.
  • the sealing element can be connected to the holding element e.g. by bonding, welding or the like.
  • the additional seal is provided with a holding element
  • the holding element is connected - particularly fixedly - to the main seal and, according to a preferred embodiment, comprises the above described projections for connection to the main seal. Further, the holding element can also be connected to the main seal in one piece.
  • the sealing lip is arranged at an inclination and is facing in the direction of the suction chamber. Achieved in this manner is a better retention of particles and respectively a better filtering effect of the additional seal.
  • the holding element comprises a support element which supports the sealing lip and respectively has the sealing lip resting on it.
  • the support element is preferably arranged at an inclination in the direction of the suction chamber.
  • the inclination of the support element and/or of the sealing lip relative to the shaft surface and respectively the outer side of the shell is preferably in an angular range from 10° to 60°.
  • an outer side of the main seal has an annular cover element connected to it.
  • the outer side of the main seal is the side of the main seal that faces away from the suction chamber.
  • Said cover element which particularly can also be formed as an annular protrusion, is preferably formed in one piece with the main seal and is connected to it by bonding, welding, locking engagement of the like.
  • the annular cover element there is formed a collection chamber for lubricant existent outside the main seal. In cases where, particularly after long operating periods and particularly in spite of the provision of the additional seal, lubricant should happen to issue from the main seal, this lubricant will be trapped in said collection chamber.
  • an outer edge of the cover element faces in the direction of the shaft and has a smaller diameter than the outer diameter of the shell.
  • the cover element covers the shell in radial direction.
  • the invention additionally provides a conveying element arranged on the inner side of the collection chamber.
  • a conveying element arranged on the inner side of the collection chamber.
  • the lubricant that has reached the collection chamber will be conveyed in the direction of the suction chamber.
  • said conveying element is formed as a feed screw arranged on the inner side of the collection chamber. Due to the movement of the lubricant in the collection chamber, a conveyance in the direction of the suction chamber is effected.
  • the inner side of the collection chamber particularly in the area where the conveying element is arranged, has a - particularly continuously - decreasing diameter in the direction of the suction chamber. In this manner, returning the lubricant in the direction of the suction chamber is improved. Particularly, it is thereby rendered possible in a simple manner, by providing a projection or a groove, to form a helical conveying means on the inner side of the collection chamber.
  • a collection element for lubricant on an outer side of the main seal and/or on an outer side of the housing that surrounds the main seal there is additionally provided a collection element for lubricant on an outer side of the main seal and/or on an outer side of the housing that surrounds the main seal.
  • the function of said collection element resides in that, if lubricant should issue from the collection chamber, this lubricant will be received or sucked by the collection element.
  • Said collection element herein is particularly formed similar to a sponge or the like.
  • the collection element can be of an annular shape and surround the shaft particularly entirely.
  • a cover element on the outer side of the main seal particularly in connection with the collection element on the outer side of the main seal and/or the outer side of the housing, represents an invention in its own right that is independent from the additional seal provided on the inner side of the main seal.
  • the combination of the two inventions is preferred.
  • a rotary vane pump comprises a suction chamber 10 formed by a housing 12. Suction chamber 10 is connected to an inlet 14. Inlet 14 is connected to a chamber, not shown, which is to be evacuated, and again comprises an inlet valve, not shown.
  • a rotor element 16 is eccentrically arranged, so that different chambers 18 are formed in the cylindrical suction chamber 10. Said chambers 18 are respectively delimited by sliding vanes 20 which are held in the rotor element in slots and respectively recesses 22 in a manner allowing for radial displacement of the vanes therein. Said recesses 22 are connected to lubricant supply channels 24 (only schematically outlined in the Figures).
  • Rotor element 16 is carried by a rotor shaft 26.
  • the rotor element 16 and the rotor shaft 26 can be made of one part.
  • the smallest chamber 18 has an outlet 28 connected to it.
  • an outlet valve is provided, particularly in the form of an oil-sealed valve plate or the like.
  • the two inventions related to an additional seal arranged within the main seal, and related to the collection chamber arranged outside the main seal and to the collection element, are combined.
  • the shaft 26 is surrounded by a shell 30 or sleeve ring.
  • the shell 30 is e.g. pressed onto the shaft 26.
  • shell 30 is surrounded by a main seal 32.
  • the main seal 32 comprises a sealing lip 34 arranged in abutment on an outer side 36 of shell 30.
  • an annular metallic spring 38 could be arranged on the inner side of the sealing lip 34.
  • Connected to the sealing lip 34 is a C-shaped annular element 40 of the main seal 32.
  • the main seal 32 is arranged in an annular recess of housing 12.
  • an annular additional seal 44 is arranged on an inner side 42 of main seal 32 facing in the direction of the suction chamber 10.
  • the additional seal 44 is of a two-part design and comprises a sealing element 46 and a holding element 48.
  • the sealing element 46 forms a sealing lip 50 which again is arranged in sealing abutment on the outer side 36 of shell 30.
  • the sealing lip 50 serves for filtering out or retaining particles so that these cannot advance in the direction of the sealing lip 34 of main seal 32.
  • Sealing lip 50 is inclined and respectively arranged at an inclination in the direction of the suction chamber 10.
  • the additional seal 44 comprises a holding element 52 supporting this portion of sealing element 46.
  • the supporting element 52 is not in contact with the rotating sleeve 30. There is a radial clearance between the supporting element 52 and the sleeve 30.
  • the holding element 48 of the additional seal 44 further comprises one or two axial annular projections 54,56. These serve particularly for connection to the C-shaped element 40 of main seal 32.
  • the two projections 54,56 extend into the opening 58 of main seal 32 formed by C-shaped element 40.
  • the additional seal 44 is connected to the main seal 32 by clamping or gluing of annular ring 54 in the C-shaped element 40.
  • a cover element 62 is arranged on an outer side 60 ( Figure 3 ) of the main seal 32.
  • Said cover element 62 which in the illustrated exemplary embodiment is formed as a part-ringshaped projection, comprises an outer edge 64 facing in the direction of a shaft surface 65, but not in contact with it. There is a clearance between the static lip 64 and the rotating surface 65. The diameter of said outer edge 64 is smaller than the outer diameter of shell 30. In this manner, there is formed a collection chamber 66 for collection of lubricant which may happen to leak out in the area of sealing lip 34.
  • a conveying element 72 For returning such leaked lubricant in the direction of the collection chamber 66, as illustrated by the arrow 68, a conveying element 72, particularly formed as a spiral, is arranged on an inner side 70 of collection chamber 66. Particularly because, in the area of the conveying element 72, said inner side 70 has a decreasing diameter in the direction of the suction chamber, possibly leaking lubricant will be reliably conveyed back from the collection chamber 66 into the suction chamber 10.
  • Collection element 74 is preferably made from an organic or non-organic sponge-like material.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
  • Sealing With Elastic Sealing Lips (AREA)

Claims (11)

  1. Schmiermittelgedichtete Vakuumpumpe, insbesondere Drehschieberpumpe, die aufweist
    ein Pumpengehäuse (12), das eine Saugkammer (10) bildet,
    ein Rotorelement (16, 20), das in der Saugkammer (10) angeordnet ist,
    einen Schmiermittelzuführkanal (24) zum Zuführen von Schmiermittel zu dem Rotorelement (20),
    eine Welle (26), die das Rotorelement (16) trägt und in dem Pumpengehäuse (12) gelagert ist, und
    eine Hauptdichtung (32), die die Welle (26) umgibt und in dem Pumpengehäuse (12) angeordnet ist,
    dadurch gekennzeichnet,
    dass auf einer Innenseite (42) der Hauptdichtung (32), die in Richtung der Saugkammer (10) weist, eine weitere ringförmige Dichtung (44) vorgesehen ist, wobei die weitere ringförmige Dichtung (44) eine Dichtungslippe (50) aufweist, die in direkter Anlage an der Wellenfläche (65) oder an einer Außenseite (36) einer Ummantelung (30), die die Welle (26) umgibt, angeordnet ist, und
    dass eine Außenseite (60) der Hauptdichtung (32) ein ringförmiges Abdeckelement (62) aufweist, das mit dieser verbunden ist, wobei das Abdeckelement (62) eine Aufnahmekammer (66) für ein Schmiermittel bildet, die außerhalb der Hauptdichtung (32) beziehungsweise außerhalb einer Dichtungslippe (34) der Hauptdichtung (32) angeordnet ist, wodurch auf einer Innenseite (70) der Aufnahmekammer (66) ein Förderelement (72) zum Fördern von Schmiermittel in Richtung der Saugkammer (10) angeordnet ist.
  2. Schmiermittelgedichtete Vakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, dass ein Außenrand (64) des ringförmigen Abdeckelements (62) in Richtung der Welle (26) weist und vorzugsweise einen kleineren Durchmesser als den Außendurchmesser der Ummantelung (30) hat.
  3. Schmiermittelgedichtete Vakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, dass das Förderelement (72) eine Förderschnecke (72) aufweist.
  4. Schmiermittelgedichtete Vakuumpumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die Innenseite (70) der Aufnahmekammer (66), insbesondere in dem Bereich, in dem das Förderelement (72) angeordnet ist, einen sich verkleinernden Durchmesser in Richtung der Saugkammer (10) hat, wobei sich der Durchmesser insbesondere kontinuierlich verkleinert.
  5. Schmiermittelgedichtete Vakuumpumpe nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass die zusätzliche ringförmige Dichtung (44) fest mit der Hauptdichtung (32) verbunden ist.
  6. Schmiermittelgedichtete Vakuumpumpe nach einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, dass die weitere ringförmige Dichtung (44) mindestens einen Vorsprung (54, 56) insbesondere mit einer Ringform aufweist, der sich in eine insbesondere ringförmige Ausnehmung (58) der Hauptdichtung (32) erstreckt.
  7. Schmiermittelgedichtete Vakuumpumpe nach einem der Ansprüche 1-6, dadurch gekennzeichnet, dass die weitere ringförmige Dichtung (44) ein Halteelement (48) aufweist, das ein Dichtungselement (46), welches eine Dichtungslippe (50) umfasst, trägt.
  8. Schmiermittelgedichtete Vakuumpumpe nach einem der Ansprüche 1-7, dadurch gekennzeichnet, dass die Dichtungslippe (50) an einer Neigung angeordnet ist und in Richtung der Saugkammer (10) weist.
  9. Schmiermittelgedichtete Vakuumpumpe nach Anspruch 7 oder 8, dadurch gekennzeichnet, dass das Halteelement (48) ein Lagerungselement (52) aufweist, in dem die Dichtungslippe (50) gelagert ist, wobei das Lagerungselement (52) vorzugsweise an einer Neigung in Richtung der Saugkammer (10) angeordnet ist.
  10. Schmiermittelgedichtete Vakuumpumpe nach einem der Ansprüche 1-9, dadurch gekennzeichnet, dass ein Aufnahmeelement (74) für Schmiermittel auf einer Außenseite (60) der Hauptdichtung (32) und/oder einer Außenseite des Gehäuses (12), welches die Hauptdichtung (32) umgibt, vorgesehen ist.
  11. Schmiermittelgedichtete Vakuumpumpe nach Anspruch 10, dadurch gekennzeichnet, dass das Aufnahmeelement (74) eine Ringform hat und die Welle (26) umgibt.
EP17160775.7A 2017-03-14 2017-03-14 Ölgedichtete vakuumpumpe Active EP3376033B1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
EP17160775.7A EP3376033B1 (de) 2017-03-14 2017-03-14 Ölgedichtete vakuumpumpe
TW107106611A TWI750335B (zh) 2017-03-14 2018-02-27 潤滑劑密封式真空幫浦
CN201880014004.1A CN110337544B (zh) 2017-03-14 2018-03-07 润滑油密封式真空泵
PCT/EP2018/055656 WO2018166875A1 (en) 2017-03-14 2018-03-07 Lubricant-sealed vacuum pump
JP2019549422A JP7231554B2 (ja) 2017-03-14 2018-03-07 潤滑剤封入式真空ポンプ
KR1020197026666A KR102519962B1 (ko) 2017-03-14 2018-03-07 윤활유-밀봉된 진공 펌프

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP17160775.7A EP3376033B1 (de) 2017-03-14 2017-03-14 Ölgedichtete vakuumpumpe

Publications (2)

Publication Number Publication Date
EP3376033A1 EP3376033A1 (de) 2018-09-19
EP3376033B1 true EP3376033B1 (de) 2020-11-25

Family

ID=58347120

Family Applications (1)

Application Number Title Priority Date Filing Date
EP17160775.7A Active EP3376033B1 (de) 2017-03-14 2017-03-14 Ölgedichtete vakuumpumpe

Country Status (6)

Country Link
EP (1) EP3376033B1 (de)
JP (1) JP7231554B2 (de)
KR (1) KR102519962B1 (de)
CN (1) CN110337544B (de)
TW (1) TWI750335B (de)
WO (1) WO2018166875A1 (de)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0173579A1 (de) * 1984-08-31 1986-03-05 Sanden Corporation Wellendichtung für einen Kompressor
WO2005001290A1 (de) * 2003-06-30 2005-01-06 Luk Fahrzeug-Hydraulik Gmbh & Co. Kg Pumpe
US20080289926A1 (en) * 2007-05-24 2008-11-27 Gm Global Technology Operations, Inc. Seal assembly for reducing fluid loss from transmission pump
EP2554844A1 (de) * 2010-03-31 2013-02-06 Mitsubishi Heavy Industries, Ltd. Verdichter
WO2016198793A1 (fr) * 2015-06-12 2016-12-15 Poclain Hydraulics Industrie Systeme hydraulique a chambre drainee

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2758120A1 (de) * 1977-12-24 1979-06-28 Pfeiffer Vakuumtechnik Oelfuehrung in einer drehschiebervakuumpumpe
JPS59173592A (ja) * 1983-03-18 1984-10-01 Noritake Co Ltd ベ−ン型真空ポンプの封液注入方法とその装置
DE3619309C1 (de) * 1986-06-07 1987-09-17 Freudenberg Carl Fa Kuehlwasserpumpendichtung
JPS63230969A (ja) * 1987-03-20 1988-09-27 Hitachi Ltd バキユ−ムポンプ直結形発電機
JPH0726624B2 (ja) * 1989-08-10 1995-03-29 三菱電機株式会社 油回転真空ポンプの軸封装置
JP2931009B2 (ja) * 1990-01-25 1999-08-09 エヌオーケー株式会社 密封装置及び密封装置の製造方法
JPH0544852A (ja) * 1991-08-09 1993-02-23 Hitachi Ltd 真空ポンプ用オイルシール
JP2570192Y2 (ja) * 1992-07-30 1998-05-06 キーパー株式会社 オイルシール装置
DE4327583A1 (de) * 1993-08-17 1995-02-23 Leybold Ag Vakuumpumpe mit Ölabscheider
JPH0960732A (ja) * 1995-08-25 1997-03-04 Arai Pump Mfg Co Ltd ウオーターポンプのシール構造
JPH09303569A (ja) * 1996-05-17 1997-11-25 Eagle Ind Co Ltd リップ型シール
JP2000110946A (ja) * 1998-10-06 2000-04-18 Koyo Sealing Techno Co Ltd 密封装置
CN201651326U (zh) * 2010-04-06 2010-11-24 中国重汽集团济南动力有限公司 一种装配式旋转轴密封圈
CN203730767U (zh) * 2014-03-28 2014-07-23 广东京汕密封件有限公司 一种防尘耐高速轴用组合油封
CN204042005U (zh) * 2014-06-18 2014-12-24 上海大亚密封技术有限公司 油封

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0173579A1 (de) * 1984-08-31 1986-03-05 Sanden Corporation Wellendichtung für einen Kompressor
WO2005001290A1 (de) * 2003-06-30 2005-01-06 Luk Fahrzeug-Hydraulik Gmbh & Co. Kg Pumpe
US20080289926A1 (en) * 2007-05-24 2008-11-27 Gm Global Technology Operations, Inc. Seal assembly for reducing fluid loss from transmission pump
EP2554844A1 (de) * 2010-03-31 2013-02-06 Mitsubishi Heavy Industries, Ltd. Verdichter
WO2016198793A1 (fr) * 2015-06-12 2016-12-15 Poclain Hydraulics Industrie Systeme hydraulique a chambre drainee

Also Published As

Publication number Publication date
TWI750335B (zh) 2021-12-21
CN110337544B (zh) 2021-10-08
CN110337544A (zh) 2019-10-15
WO2018166875A1 (en) 2018-09-20
JP7231554B2 (ja) 2023-03-01
TW201833443A (zh) 2018-09-16
JP2020510787A (ja) 2020-04-09
EP3376033A1 (de) 2018-09-19
KR20190120246A (ko) 2019-10-23
KR102519962B1 (ko) 2023-04-07

Similar Documents

Publication Publication Date Title
US20130089451A1 (en) Scroll compressor with supporting member in axial direction
US10570738B2 (en) Pump device with deformable pump ring
AU2015331688B2 (en) Sealing device
US20240084812A1 (en) Side channel compressor having a seal assembly
US20220235772A1 (en) Vacuum pumping system having an oil-lubricated vacuum pump
EP3376033B1 (de) Ölgedichtete vakuumpumpe
US9447793B2 (en) Centrifugal pump and impeller protector for centrifugal pump
US10240617B2 (en) Water pump bearing with active condensate purging system
US20140369809A1 (en) Turbomolecular pump
JP2019007382A (ja) スクロール圧縮機
KR102124490B1 (ko) 압축기
US20060280599A1 (en) Centrifugal pump and a static seal thereof
CN107533966B (zh) 带静压密封件的马达
JP6559717B2 (ja) メカニカルシール
US12049891B2 (en) Scroll pump having a biasing apparatus for axially movable fixed and orbiting scrolls against each other via first and second pads that formed material from fixed and orbiting scrolls
CN116745548A (zh) 具有减少的工艺气体消耗的压缩机装置
CN110836184B (zh) 旋转式压缩机
EP1586799B1 (de) Wellendichtung
KR101803273B1 (ko) 오일 펌프의 윤활구조
CN113994095A (zh) 可变排量润滑剂泵
US10415565B2 (en) Vane cell machine

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN PUBLISHED

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20190318

RBV Designated contracting states (corrected)

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

17Q First examination report despatched

Effective date: 20191122

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20200630

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: CH

Ref legal event code: NV

Representative=s name: ISLER AND PEDRAZZINI AG, CH

Ref country code: AT

Ref legal event code: REF

Ref document number: 1338632

Country of ref document: AT

Kind code of ref document: T

Effective date: 20201215

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 602017028062

Country of ref document: DE

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: AT

Ref legal event code: MK05

Ref document number: 1338632

Country of ref document: AT

Kind code of ref document: T

Effective date: 20201125

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20201125

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210226

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20201125

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20201125

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210325

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210225

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20201125

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210325

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20201125

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210225

Ref country code: AT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20201125

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20201125

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG9D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20201125

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20201125

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20201125

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20201125

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20201125

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20201125

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20201125

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 602017028062

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20201125

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20201125

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20201125

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20201125

26N No opposition filed

Effective date: 20210826

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20201125

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20210331

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20201125

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20210314

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20210314

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210325

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20210331

P01 Opt-out of the competence of the unified patent court (upc) registered

Effective date: 20230424

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20201125

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20170314

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20201125

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20240315

Year of fee payment: 8

Ref country code: GB

Payment date: 20240322

Year of fee payment: 8

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20240329

Year of fee payment: 8

Ref country code: FR

Payment date: 20240320

Year of fee payment: 8

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 20240401

Year of fee payment: 8