EP3311145A1 - Methods and apparatus for inspecting a substrate for defects and locating such defects in three dimensions using optical techniques - Google Patents

Methods and apparatus for inspecting a substrate for defects and locating such defects in three dimensions using optical techniques

Info

Publication number
EP3311145A1
EP3311145A1 EP16732187.6A EP16732187A EP3311145A1 EP 3311145 A1 EP3311145 A1 EP 3311145A1 EP 16732187 A EP16732187 A EP 16732187A EP 3311145 A1 EP3311145 A1 EP 3311145A1
Authority
EP
European Patent Office
Prior art keywords
substrate
axis
defects
detector
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP16732187.6A
Other languages
German (de)
English (en)
French (fr)
Inventor
Jeffrey Scott TOUSCHNER
Leon Robert Zoeller, Iii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of EP3311145A1 publication Critical patent/EP3311145A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8845—Multiple wavelengths of illumination or detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8848—Polarisation of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8861—Determining coordinates of flaws

Landscapes

  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
EP16732187.6A 2015-06-19 2016-06-16 Methods and apparatus for inspecting a substrate for defects and locating such defects in three dimensions using optical techniques Withdrawn EP3311145A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201562181901P 2015-06-19 2015-06-19
PCT/US2016/037771 WO2016205456A1 (en) 2015-06-19 2016-06-16 Methods and apparatus for inspecting a substrate for defects and locating such defects in three dimensions using optical techniques

Publications (1)

Publication Number Publication Date
EP3311145A1 true EP3311145A1 (en) 2018-04-25

Family

ID=56204063

Family Applications (1)

Application Number Title Priority Date Filing Date
EP16732187.6A Withdrawn EP3311145A1 (en) 2015-06-19 2016-06-16 Methods and apparatus for inspecting a substrate for defects and locating such defects in three dimensions using optical techniques

Country Status (6)

Country Link
EP (1) EP3311145A1 (ko)
JP (1) JP2018528396A (ko)
KR (1) KR20180033186A (ko)
CN (1) CN107771281A (ko)
TW (1) TW201702585A (ko)
WO (1) WO2016205456A1 (ko)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6618136B1 (en) * 1998-09-07 2003-09-09 Minolta Co., Ltd. Method and apparatus for visually inspecting transparent body and translucent body
US20040207836A1 (en) * 2002-09-27 2004-10-21 Rajeshwar Chhibber High dynamic range optical inspection system and method
US7142295B2 (en) * 2003-03-05 2006-11-28 Corning Incorporated Inspection of transparent substrates for defects
TWI360652B (en) * 2005-04-06 2012-03-21 Corning Inc Glass inspection systems and method for using same
KR101427433B1 (ko) * 2006-08-02 2014-08-08 가부시키가이샤 니콘 결함 검출 장치 및 결함 검출 방법
DE102009043001A1 (de) * 2009-09-25 2011-04-14 Schott Ag Verfahren zur Bestimmung von Defekten in einem Für elektromagnetische Wellen transparenten Material, insbesonders für optische Zwecke, eine Vorrichtung hierzusowie die Verwendung dieser Materialien
KR101324015B1 (ko) * 2011-08-18 2013-10-31 바슬러 비전 테크놀로지스 에이지 유리기판 표면 불량 검사 장치 및 검사 방법
DE102012002174B4 (de) * 2012-02-07 2014-05-15 Schott Ag Vorrichtung und Verfahren zum Erkennen von Fehlstellen innerhalb des Volumens einer transparenten Scheibe und Verwendung der Vorrichtung
US20140268105A1 (en) * 2013-03-15 2014-09-18 Zygo Corporation Optical defect inspection system

Also Published As

Publication number Publication date
CN107771281A (zh) 2018-03-06
JP2018528396A (ja) 2018-09-27
TW201702585A (zh) 2017-01-16
KR20180033186A (ko) 2018-04-02
WO2016205456A1 (en) 2016-12-22

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