EP3304216B1 - Thermokompensierte resonator für uhrwerk und verfahren zur herstellung einer solchen resonator - Google Patents

Thermokompensierte resonator für uhrwerk und verfahren zur herstellung einer solchen resonator Download PDF

Info

Publication number
EP3304216B1
EP3304216B1 EP16728737.4A EP16728737A EP3304216B1 EP 3304216 B1 EP3304216 B1 EP 3304216B1 EP 16728737 A EP16728737 A EP 16728737A EP 3304216 B1 EP3304216 B1 EP 3304216B1
Authority
EP
European Patent Office
Prior art keywords
coil spring
modified portion
hairspring
cte
modified
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP16728737.4A
Other languages
English (en)
French (fr)
Other versions
EP3304216A1 (de
Inventor
Susana del Carmen TOBENAS BORRON
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Richemont International SA
Original Assignee
Richemont International SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Richemont International SA filed Critical Richemont International SA
Publication of EP3304216A1 publication Critical patent/EP3304216A1/de
Application granted granted Critical
Publication of EP3304216B1 publication Critical patent/EP3304216B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00—Mechanisms for stabilising frequency
    • G04B17/20—Compensation of mechanisms for stabilising frequency
    • G04B17/22—Compensation of mechanisms for stabilising frequency for the effect of variations of temperature
    • G04B17/227—Compensation of mechanisms for stabilising frequency for the effect of variations of temperature composition and manufacture of the material used

Definitions

  • the invention relates to a method of manufacturing a spiral spring.
  • the time base of a timepiece uses a resonator whose oscillations must be maintained.
  • a resonator with a given resonant frequency most often performs this function.
  • resonators such as the pendulum (which involves gravity), the quartz (piezoelectricity), the tuning fork (vibrating blades) or the return springs of more diverse forms, depending on whether they are designed to oscillate over large or small amplitudes.
  • the regulating member consists of the balance wheel/hairspring assembly.
  • the hairspring is in this case fixed by one end to the balance shaft and by the other end to a bridge in which the balance shaft pivots. In this way, the spring contracts and relaxes alternately around its center during the oscillations of the balance wheel. Since its creation, a few hundred years ago, and until today, the spiral springs are mainly made from a metallic blade of rectangular section wound on itself in the form of an Archimedean spiral.
  • Current metal spiral springs are mainly made from FeNiCr (commonly called elinvar) or NbZr, which the latter having in addition to the first a reduced magnetic susceptibility.
  • elinvar commonly called elinvar
  • NbZr which the latter having in addition to the first a reduced magnetic susceptibility.
  • the choice of these materials is mainly dictated by the need to have a resonator whose mechanical and geometric properties vary as little as possible during temperature changes to which the watch may be exposed, i.e. a range of up to sixty degrees, more specifically within a range of 8 to 38°C for watches certified to meet the criteria governing “chronometer” certification.
  • the high amplitude of the balance wheel and a low maintenance torque of its oscillations favored the development of a spiral-shaped spring to equip the regulating organ of mechanical watches.
  • this geometric shape has drawbacks, such as the action of gravity. Indeed, the slight deformations due to the own weight of the hairspring can induce defects in the concentric development of the hairspring around the axis of the balance wheel and therefore affect the precision of the watch.
  • thermoelastic coefficient of the modulus of elasticity of this material is however too great to guarantee the frequency precision of such a resonator.
  • Research on the subject has led to the addition of a layer of a material whose thermoelastic coefficient is opposite to that of silicon.
  • Berry and Pritchet IBM Technical Disclosure Bulletin #1237, Vol. 14, No. 4, 1971 ) have shown that amorphous silica (SiO 2 ) responds advantageously to this condition. That's what Shen et al.
  • the document EP1422436 discloses a spiral spring resulting from the cutting of a ⁇ 001 ⁇ silicon plate.
  • the aim of this invention is to overcome the drawbacks described above, proposing a hairspring whose sensitivity to variations in temperature and to magnetic fields is minimized.
  • the precision manufacturing technology (Ion Etching) proposed for the shaping of these hairsprings combined with modeling and compensation of the anisotropy due to the crystalline orientation of the material, makes it possible to reduce the retouching of the regulating organ and to improve the reproducibility of the process.
  • the frequency drift of resonators made of monocrystalline silicon may require complex corrections depending on the application. This comes from the anisotropic character of physical quantities such as the Young's modulus and the coefficient of thermal expansion of this material.
  • thermocompensated resonator comprising a ceramic spring whose surface is coated with at least a second material whose CTE (thermoelastic coefficient) has the opposite sign to the
  • thermoelastic properties of a so-called photopatternable glass following exposure to a UV source This technique has several limitations inherent in the choice of material and process.
  • the material is on the one hand limited to a particular category of so-called “photostructurable” glasses, which are glasses doped in particular with a photoactive element such as cerium and with a nucleating agent such as silver.
  • a photoactive element such as cerium
  • a nucleating agent such as silver
  • the photostructuring process described in the patent EP1958031 requires the use of masks in order to hide some areas of the photopatternable material from exposure to UV radiation.
  • the irradiation process may involve multiphoton absorption in the vitreous material.
  • the modified portion is adjusted so that its physical properties compensate for the physical properties of the rest of the vitreous material (unmodified portion).
  • the resonator is thermocompensated, and its stiffness can also be adjusted.
  • the resonator thus obtained is non-magnetic and thermocompensated while avoiding the use of coatings.
  • the material also comprises a locally modified portion so that said modified portion has a second stiffness which differs from the first stiffness of the unmodified material.
  • the method includes adjusting the frequency of the hairspring. This adjustment can be made before assembling the hairspring with a balance wheel.
  • the frequency of the hairspring is adjusted so as to pair the hairspring with the balance wheel.
  • a balance-spring intended to equip a resonator of the balance-spring type of a mechanical watch is made of a vitreous material.
  • the expression "vitreous material” includes in particular pseudo-amorphous (that is to say non-crystalline) materials exhibiting the glass transition phenomenon.
  • the glass transition is a reversible phenomenon of transition between the hard form and the "molten” or rubbery form of an amorphous material.
  • the temperature of The glass transition of an amorphous material is always lower than the melting point of its crystalline form.
  • the term “vitreous material” also means a material that is partially vitreous (therefore at least partially amorphous).
  • the vitreous material can comprise any glass as defined above.
  • the vitreous material has a low coefficient of thermal expansion, that is to say less than 1 ppm/°C.
  • the vitreous material is based on silica (amorphous ⁇ SiO 2 ) having a coefficient of thermal expansion of around 0.5 ppm/°C.
  • the vitreous material can comprise a pure amorphous silica, a borosilicate, an aluminosilicate, or a silica-based glass with a controlled level of impurities.
  • the spiral spring 1 comprises a vitreous material having a first ⁇ 1 .
  • the vitreous material is locally modified so as to produce a modified portion 3 directly from the vitreous material, the modified portion 3 of the vitreous material having a second CTE ⁇ 2 different from the first CTE ⁇ 1 .
  • the modified portion comprises said vitreous material having undergone, locally, structural modifications.
  • the hairspring 1 is characterized by an effective CTE ⁇ eff which is defined by the combination of the first CTE ⁇ 1 and the second CTE ⁇ 2 .
  • the presence of the modified portion makes it possible to minimize the thermal drift of the resonator formed by the hairspring and the balance wheel.
  • the vitreous material also has a first coefficient of thermal expansion ⁇ 1 and the modified portion has a second coefficient of thermal expansion ⁇ 2 which may be different from the first coefficient of thermal expansion ⁇ 1 .
  • the vitreous material also has a first Young's modulus E 1 and the modified portion has a second Young's modulus E 2 which may be different from the first Young's modulus E 1 .
  • the hairspring 1 is therefore also characterized by an effective coefficient of thermal expansion ⁇ eff which is defined by the combination of the first and second coefficients of thermal expansion ⁇ 1 , ⁇ 2 and by an effective Young's modulus E eff which is defined by the combination of the first and second Young's modulus E 1 , E 2 .
  • the figures 1 to 6 represent a section of the blade of a hairspring 1 comprising a matrix in an at least partially vitreous material 2 and a modified portion 3.
  • Said modified portion may comprise a central modified zone 3 ( figures 1 and 4 ), two surface modified areas 3 ( figures 2 and 3 ) according to examples useful for understanding the invention.
  • the exposed zones 3 may have varied geometries and distributions, an asymmetry of these zones also being able to be chosen to overcome different compressive and tensile stresses with respect to the neutral fiber of the blade. These different geometries can be, if necessary, combined on portions distributed along the blade to respect the isotropy of the material or to meet other needs.
  • the exposed zones 3 can be located anywhere on the blade, preferably without contact with the surface of the latter.
  • the configuration of the modified portion 3 can also vary along the hairspring 1.
  • this variation can include the geometric configuration of the modified portion 3 which varies along the hairspring 1, but also a variation of the value of the second CTE ⁇ 2 , and possibly also of the second coefficient of thermal expansion ⁇ 2 and of the second Young's modulus E 2 , in the various modified portions 3, along the hairspring 1.
  • the modified portion 3 can be arranged so as to extend in the longitudinal direction of the hairspring 1 in a continuous manner (such as continuous fibers) or in a discontinuous manner.
  • elongated geometries of the modified portion 3 can be oriented in any direction, preferably in the longitudinal direction of the hairspring 1.
  • the geometry of the hairspring 1 may advantageously incorporate attachment means at its two ends, as they are known to man. trade, with rigid mounting means or, preferably, elastics.
  • attachment means at its two ends, as they are known to man. trade, with rigid mounting means or, preferably, elastics.
  • identification references can be micro-engraved on the hairspring 1.
  • the thermal drift of the resonator relates to the relative variations in the frequency of oscillation of the regulating organ following changes in temperature in the range of 8 to 38°C.
  • the relative frequency variations with temperature depend mainly on the effective coefficient of thermal expansion ⁇ eff and on the effective CTE ⁇ eff of the hairspring 1.
  • K the stiffness of the hairspring and l the moment of inertia of the balance.
  • I mr 2 where m is the mass of the pendulum and r is the radius of gyration of the pendulum
  • K is described by equation (3):
  • K E delete Hey 3 12 L
  • E eff is the effective Young's modulus of the hairspring-hairspring, h the height of the hairspring-hairspring, e the thickness of the hairspring-hairspring and L the length of the hairspring-hairspring.
  • thermal compensation is obtained thanks to the growth of a layer of amorphous SiO 2 around the core of the spring-spring.
  • Amorphous SiO 2 is one of the rare materials with a positive CTE, around 200 ppm/C.
  • the thickness of the SiO 2 layer for the thermal compensation of the hairspring is predicted according to the dimensions of the blade of the hairspring as described in the document EP1422436 .
  • the CTE of the hairspring is in this case an effective CTE ⁇ eff comprising the contribution of the monocrystalline silicon core of the hairspring and the contribution of the outer layer of amorphous SiO 2 .
  • said structural modifications of the vitreous material result in a second CTE ⁇ 2 of the locally modified vitreous material (modified portion) which differs from the first CTE ⁇ 1 of the unmodified vitreous material.
  • the hairspring therefore has an effective CTE ⁇ eff which differs from that which it would have in the absence of the modified portion (which would then correspond to the first CTE ⁇ 1 ). Equation (6) can therefore be satisfied for the resonator using the contributions of the first CTE ⁇ 1 and of the second CTE ⁇ 2 to the effective CTE ⁇ eff .
  • An advantage of the proposed solution is that it is not necessary to add or grow a different material to that forming the hairspring to modify the effective CTE ⁇ eff of the hairspring.
  • the second CTE ⁇ 2 can be modulated in a controlled manner.
  • the machining step can be carried out by a chemical etching process, by a physical etching process or by a combination of the two processes.
  • the step of forming said modified portion 3 can be performed before, during or after the machining step.
  • the method can also comprise another step of forming the modified portion, after the machining step.
  • the step of locally modifying the vitreous material includes laser treatment.
  • the laser is operated in a non-ablative mode. That is to say that we do not remove material in the zone where the laser is focused.
  • the laser uses ultrashort pulse durations, that is to say pulse durations comprised between a few femtoseconds to a few nanoseconds, and preferably between a few femtoseconds to a few picoseconds.
  • Ultrashort laser pulse durations induce structural changes resulting from complex nonlinear phenomena which also give rise to a local modification of the CTE of the modulus of elasticity as well as of the modulus of elasticity itself.
  • pulse durations between a few femtoseconds and a few picoseconds promotes radiation-matter interaction mechanisms based on multiphoton absorption.
  • Pulse durations comprised between a few femtoseconds and a few nanoseconds can be obtained with several types of lasers of very diverse wavelengths such as, for example, and preferably, a Ti:Sapphire laser (650 to 1100 nm), a laser Yb (1030 nm) or even a mid-infrared laser (mid infrared, 1050 nm).
  • a Ti:Sapphire laser 650 to 1100 nm
  • a laser Yb (1030 nm)
  • a mid-infrared laser mid infrared, 1050 nm.
  • the precise nature of the laser-matter interaction will differ.
  • the first CTE ⁇ 1 of the vitreous matrix will be modified, at least locally so as to obtain the modified portion 3 having the second CTE ⁇ 2 .
  • the same reasoning also applies to obtain the modified portion 3 having the second coefficient of thermal expansion ⁇ 2 different from the first coefficient of thermal expansion ⁇ 1 and having a second Young's modulus E 2 different from the first Young's modulus E 1 .
  • Such a laser treatment would make it possible to modify the effective CTE ⁇ eff of the hairspring 1, to modify the effective coefficient of thermal expansion ⁇ eff and/or to adjust the value of the effective Young's modulus E eff of said spring 1.
  • the fine adjustment of the effective Young's modulus E eff of the spring 1 makes it possible to adjust its stiffness (and therefore the frequency of the resonator) without needing to modify either the height or the thickness of the vibrating body (1). This facilitates, for example, hairspring-balance pairing operations at the same time as allowing a significant increase in the output of these operations.
  • the figure 7 shows a top view of a spiral spring 1 .
  • the spiral spring 1 comprises an inner terminal curve 4 and an outer terminal curve 5.
  • a detail of a section 6 of the spiral spring 1 is shown in figure 8 .
  • the modified portion 3 comprises a portion 3' extending in the longitudinal direction of the hairspring 1 continuously and discontinuously.
  • the modification of the effective Young's modulus E eff in a specific portion of the balance-spring 1, such as for example in the terminal curve of the balance-spring, makes it possible to optimize the concentricity of its deployment with respect to the axis of the balance wheel. It is also possible to compensate for subsidence effects due to gravity or other isochronism defects.
  • the structure of a solid material exhibiting the glass transition phenomenon (in other words, its specific volume or its density) can be fixed according to the thermal cycle (heating-cooling ramp) to which it is subjected. It is therefore possible, depending on the thermal cycle, to freeze the structure of a material exhibiting the glass transition phenomenon, either in a particular vitreous state or even in a crystalline state. In the particular case of a glass, it is possible to freeze its structure by subjecting it to a thermal cycle which does not include passing through the liquid state of the material. That said, by remaining in the solid vitreous zone of the material, it is possible to change its structure by subjecting it to a particular thermal cycle.
  • Silica-based glasses become denser following an increase in their fictitious temperature.
  • the fictitious temperature of a glass is the temperature at which its structure (atomic arrangement) is fixed.
  • the fictitious temperature depends on the rate of cooling during a thermal cycle. For an ordinary glass, the higher is its fictitious temperature (the faster it is cooled), the greater its specific volume. In the particular case of silica, an opposite trend is observed. Indeed, at higher fictitious temperature one will find smaller specific volumes.
  • the local modification of the vitreous material by a focused laser treatment using ultrashort laser pulse durations makes it possible to obtain a modified portion thanks to phenomena of a thermal nature such as those described above.
  • the phenomena of a thermal nature leading to a local change in the structure of the vitreous material can be modulated, in particular by playing with the repetition rate of the laser.
  • the modified portion 3 has a density which differs from the density of the vitreous material.
  • the different density of the modified portion 3 can comprise the creation of a crystalline polymorph of an amorphous silica (such as for example alpha or beta quartz, stishovite, tridymite, chalcedony or even cristobalite), or the formation of metallic clusters according to the presence or absence of impurities or the formation of a densified region following a local increment of the fictitious temperature of the silica, or the formation of structurally modified zones due to any absorption mechanism nonlinear.
  • an amorphous silica such as for example alpha or beta quartz, stishovite, tridymite, chalcedony or even cristobalite
  • the laser is focused at the nano or micrometric scale.
  • Such a laser allows the generation of the modified portion whose CTE of the modulus of elasticity and the stiffness can be modified, and this in proportions which are not necessarily constant or linear.
  • the formation of the modified portion having a second CTE ⁇ 2 different from the first CTE ⁇ 1 makes it possible to adjust, case by case, the value of the effective CTE ⁇ eff of the resonator.
  • the method of the invention offers the advantage of being able to precisely and individually adjust the thermomechanical properties of each resonator with the aim of fine-tuning the temperature behavior of the oscillator.
  • the figure 9 shows a wafer 7 of vitreous material in which a plurality of spiral springs 1 are made.
  • figure 10 shows a sectional view of the wafer of the figure 9 during the local modification step making it possible to form the modified portion 3, for example, by irradiation with a focused laser 8.
  • the laser beam 8 can move, for example in x, y, z, so as to carry out the local modification according to a more or less complex shape, here an "annular" shape in the mass of the body of the hairspring 1.
  • the parts indicated by the number "9" correspond to the vitreous material which is machined in the machining step.
  • the figure 11 illustrates the sectional view of the figure 9 after the machining step during which the parts 9 have been eliminated by the machining releasing the spiral springs 1 comprising the modified portion 3.
  • the figure 9 also shows parts 7a, 7b, 7c of the wafer 7 for which the hairsprings 1 have undergone a different irradiation treatment depending on the part 7a, 7b, 7c of the wafer in which the hairsprings 1 are located. Consequently, the spiral springs 1 in one of the different parts 7a, 7b, 7c may have a modified portion 3 whose physical properties differ from those of the modified portion 3 of the spiral springs 1 in the other parts 7a, 7b, 7c of the wafer 7.
  • the step of locally modifying the vitreous material can therefore be carried out locally not only on the scale of the body used in deformation (spring-spiral) 1 but also on the scale of the wafer 7.
  • the method also has the advantage of being applicable to a vast category of glasses, in particular those said to be “non-photostructurable”. Consequently, the process of transformation of the vitreous material takes place directly without the need for additional steps such as the heat treatments required in the case of so-called “photostructurable” glasses.
  • the use of multiphoton absorption mechanisms makes it possible to use a wide range of wavelengths ranging from infrared to ultraviolet. Also, such a method makes it possible to locally modify the thermoelastic properties of the vitreous material without any restriction as to the location of the modified portion in the volume of the vitreous material.
  • the material is locally modified (using a laser, preferably of the femtosecond type) so as to produce a modified portion 3 having a second Young's modulus E 2 which differs from a first Young's modulus E 1 of the unmodified portion of the material .
  • a value of the effective Young's modulus E eff of the hairspring 1 defined by the combination of the first and second Young's modulus E 1 , E 2 .
  • the stiffness of the hairspring 1 depends on its Young's modulus (its rigidity) but also on the ratio of its section to its length. It can however be assumed that the ratio of the section to the length of the hairspring will not be changed by the local modification.
  • the material has a first stiffness K 1 and the modified portion has a second stiffness K 2 which may be different from the first stiffness K 1 .
  • the adjustment of the effective Young's modulus E eff of the balance-spring 1 therefore makes it possible to adjust a value of the effective stiffness K eff of the balance-spring 1, without needing to modify either the height or the thickness of the balance-spring 1.
  • the effective stiffness K eff of the hairspring 1 is defined by the combination of the first and the second stiffness K 1 , K 2 .
  • the local modification of the stiffness of the hairspring 1 can be used to adjust the frequency of the hairspring 1, for example before it is assembled with a balance wheel. This facilitates, for example, balance-spring pairing operations, or even pairing of the regulating member as a whole with respect to the movement, at the same time as allowing a significant increase in the efficiency of this operation.
  • the local modification of the Young's modulus and of the stiffness can be applied to the outer terminal curve 5 and/or to the curve inner terminal 4 of spiral spring 1, as shown in figure 7 .
  • the modified portion 3 may comprise a portion 3' extending in the longitudinal direction of the hairspring 1 continuously and/or discontinuously.
  • the modification of the effective Young's modulus E eff and/or of the effective stiffness K eff in a specific portion of the hairspring 1, such as for example in the terminal curve of the hairspring, makes it possible to optimize the concentricity of its deployment with respect to the axis of the balance. It is also possible to compensate for subsidence effects due to gravity or other isochronism defects.
  • the material is locally modified so as to adjust the internal stresses in the modified portion 3.
  • the local modification is carried out using laser treatment, preferably using a laser using ultrashort pulse durations, that is to say pulse durations between a few femtoseconds to a few nanoseconds, and preferably between a few femtoseconds to a few picoseconds.
  • the use of such lasers allows the precise control of very localized modifications of the material by the nonlinear methods of absorption of the energy of the laser.
  • the modifications thus induced in the modified portion of the material can be of a continuous nature, formation of (nano) self-organized structures, and/or the formation of nanovoids.
  • These modifications can induce different types of anisotropy in the modified portion of the material, which can have important effects on the chemical, optical, thermal and/or mechanical properties.
  • the change in the volume of the material resulting from the exposure induces stresses around the zones exposed by laser, and thus modifications of the internal stresses, which can be compressive or tensile stresses, in the modified portion.
  • the induced stress depends mainly on two parameters: the polarization and the energy per pulsation.
  • the local modification can be carried out in such a way as not to influence the thermocompensation of the modified portion of the material, or at least not in a linear manner.
  • the effective Young's modulus and the effective CTE can be controlled by the total quantity of modified zones while the residual stresses can be controlled by the location of the affected zones with respect to the component produced.

Landscapes

  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Springs (AREA)

Claims (12)

  1. Verfahren zur Fertigung einer Spiralfeder einer Unruh-Spiral-Anordnung einer Uhr, wobei die Spiralfeder einen Körper (1) aufweist, der in Verformung verwendet wird, wobei der Körper (1) aus einem glasartigen Material mit einem ersten thermoelastischen Koeffizienten CTE (β1) und einer ersten Steifigkeit (K1) hergestellt ist, wobei das Verfahren Folgendes umfasst:
    Bearbeiten eines Teils des glasartigen Materials, um den in Verformung verwendeten Körper (1) der Spiralfeder zu bilden; und
    lokales Verändern des glasartigen Materials, um einen veränderten Abschnitt (3) mit einem zweiten CTE (β2) zu bilden, der sich vom ersten CTE (β1) unterscheidet, damit die Spiralfeder thermokompensiert ist;
    dadurch gekennzeichnet, dass die lokale Veränderung durch Laserbestrahlung mittels ultrakurzer Impulse erzeugt wird, und dadurch, dass der veränderte Abschnitt (3) in der Matrix des glasartigen Materials verteilt wird und
    so verändert wird, dass er eine zweite Steifigkeit (K2) aufweist, die sich von der ersten Steifigkeit (K1) unterscheidet, und dadurch, dass es die Veränderung der zweiten Steifigkeit (K2) des veränderten Abschnitts (3) gestattet, die Frequenz der Spiralfeder (1) so anzupassen, dass die Spiralfeder (1) auf die Unruh abgestimmt wird.
  2. Verfahren nach Anspruch 1,
    wobei die lokale Veränderung ohne die Notwendigkeit zusätzlicher Schritte direkt durchgeführt wird.
  3. Verfahren nach Anspruch 1 oder 2,
    wobei der Laser ein Laser ist, der im Nano- oder Mikrometer-Maßstab fokussiert ist.
  4. Verfahren nach einem der Ansprüche 1 bis 3,
    wobei der Laser ultrakurze Impulse verwendet, die zwischen einigen Femtosekunden bis einigen Nanosekunden oder zwischen einigen Femtosekunden und einigen Pikosekunden liegen.
  5. Verfahren nach einem der Ansprüche 1 bis 4 wobei die Bearbeitung mittels eines chemischen Ätzverfahrens, eines physikalischen Ätzverfahrens oder einer Kombination der zwei Verfahren durchführt werden kann.
  6. Verfahren nach einem der Ansprüche 1 bis 5,
    wobei die Frequenz der Spiralfeder (1) vor deren Zusammenbau mit einer Unruh angepasst wird.
  7. Verfahren nach einem der Ansprüche 1 bis 6,
    wobei die Frequenz der Spiralfeder (1) so angepasst wird, dass das Regelorgan in der Bewegung abgestimmt wird
  8. Verfahren nach einem der Ansprüche 1 bis 7,
    wobei der veränderte Abschnitt (3) ein amorphes Siliciumdioxid umfasst, das durch die Erzeugung eines kristallinen Polymorphen verändert wurde.
  9. Verfahren nach Anspruch 8,
    wobei der kristalline Polymorph eins von Folgendem umfasst: Alpha-Quarz, Beta-Quarz, Stishovit, Tridymit, Chalcedon oder Cristobalit.
  10. Verfahren nach einem der Ansprüche 1 bis 9,
    wobei der veränderte Abschnitt (3) innere Spannungen aufweist, die sich von jenen des nicht veränderten Abschnitts des Materials unterscheiden.
  11. Verfahren nach einem der Ansprüche 1 bis 10,
    wobei der veränderte Abschnitt (3) einen Abschnitt (3') umfasst, der sich durchgehend und/oder unterbrochen in der Längsrichtung der Spiralfeder (1) erstreckt.
  12. Verfahren nach einem der Ansprüche 1 bis 11,
    wobei sich der veränderte Abschnitt (3) in der äußeren Endkrümmung (5) und/oder der inneren Endkrümmung (4) der Spiralfeder (1) befindet.
EP16728737.4A 2015-06-08 2016-06-08 Thermokompensierte resonator für uhrwerk und verfahren zur herstellung einer solchen resonator Active EP3304216B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH8162015 2015-06-08
PCT/IB2016/053369 WO2016199039A1 (fr) 2015-06-08 2016-06-08 Résonateur horloger thermocompensé et méthode pour réaliser un tel résonateur

Publications (2)

Publication Number Publication Date
EP3304216A1 EP3304216A1 (de) 2018-04-11
EP3304216B1 true EP3304216B1 (de) 2022-04-27

Family

ID=53397746

Family Applications (1)

Application Number Title Priority Date Filing Date
EP16728737.4A Active EP3304216B1 (de) 2015-06-08 2016-06-08 Thermokompensierte resonator für uhrwerk und verfahren zur herstellung einer solchen resonator

Country Status (2)

Country Link
EP (1) EP3304216B1 (de)
WO (1) WO2016199039A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2781968A1 (de) * 2013-03-19 2014-09-24 Nivarox-FAR S.A. Resonator, der weniger empfindlich gegenüber klimatischen Schwankungen ist
EP3839644A1 (de) * 2019-12-20 2021-06-23 Nivarox-FAR S.A. Flexible uhrwerkskomponente, insbesondere für oszillationsmechanismus, und eine solche komponente umfassendes uhrwerk

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1791039A1 (de) * 2005-11-25 2007-05-30 The Swatch Group Research and Development Ltd. Spiralfeder aus athermisches Glas für ein Uhrwerk und Herstellungsverfahren dafür
EP2597536A1 (de) * 2011-11-25 2013-05-29 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Verbesserte Spiralfeder, und Herstellungsverfahren dieser Spiralfeder

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06117470A (ja) 1992-10-07 1994-04-26 Yokogawa Electric Corp 渦巻きバネ及び指示電気計器
DE60206939T2 (de) 2002-11-25 2006-07-27 Csem Centre Suisse D'electronique Et De Microtechnique S.A. Spiraluhrwerkfeder und Verfahren zu deren Herstellung
EP2590325A1 (de) 2011-11-04 2013-05-08 The Swatch Group Research and Development Ltd. Thermokompensierter Resonator aus Keramik

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1791039A1 (de) * 2005-11-25 2007-05-30 The Swatch Group Research and Development Ltd. Spiralfeder aus athermisches Glas für ein Uhrwerk und Herstellungsverfahren dafür
EP2597536A1 (de) * 2011-11-25 2013-05-29 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Verbesserte Spiralfeder, und Herstellungsverfahren dieser Spiralfeder

Also Published As

Publication number Publication date
EP3304216A1 (de) 2018-04-11
WO2016199039A1 (fr) 2016-12-15

Similar Documents

Publication Publication Date Title
EP3181938B1 (de) Herstellungsverfahren einer spiralfeder mit einer vorbestimmten steifigkeit durch wegnahme von material
EP1958031B1 (de) Aus athermischem glas hergestellte haarfeder für ein uhrwerk und herstellungsverfahren dafür
EP3181940B2 (de) Herstellungsverfahren einer spiralfeder mit einer vorbestimmten steifigkeit durch lokalisierte wegnahme von material
EP3958066B1 (de) Herstellungsverfahren eines thermokompensierten spiralfeders
EP2514094B1 (de) Thermokompensierter resonator mindestens ersten und zweiten grades
EP1519250B1 (de) Spiralfeder-Unruh-Resonator mit Thermokompensation
EP3759554B1 (de) Herstellungsverfahren einer spiralfeder
EP0886195A1 (de) Selbstkompensierende Spiralfeder für mechanische Uhrwerkunruhspiralfederoszillator und Verfahren zu deren Herstellung
EP2774268A1 (de) Temperaturkompensierter keramischer resonator
CH707554A2 (fr) Résonateur thermocompensé par un métal à mémoire de forme.
EP3304216B1 (de) Thermokompensierte resonator für uhrwerk und verfahren zur herstellung einer solchen resonator
EP2795411B1 (de) Verfahren zur herstellung eines resonators
EP3002638A2 (de) Herstellungsverfahren einer thermokompensierten spiralfeder
CH705945A2 (fr) Procédé de réalisation d'un résonateur et résonateur obtenu par un tel procédé
EP3285124B1 (de) Mechanischer resonator für uhrwerk, sowie herstellungsverfahren eines solchen resonators
EP3982205A1 (de) Verfahren zur herstellung einer uhrfeder mit einer präzisen steifigkeit
CH718081A2 (fr) Élément élastique pour un système micromécanique.
EP4030241A1 (de) Verfahren zur herstellung von uhrwerk-spiralfedern
EP4212965A1 (de) Verfahren zur begrenzung der verformung einer uhrenkomponente aus silizium
CH719361A2 (fr) Procédé de limitation de la déformation d'une pièce d'horlogerie en silicium au cours d'une oxydation thermique.
WO2021170473A1 (fr) Composant horloger en silicium pour pièce d'horlogerie
CH712824A1 (fr) Composant mécanique horloger ainsi que procédé de réalisation d'un tel composant.
CH705725A2 (fr) Résonateur thermocompensé en céramique.
CH711960B1 (fr) Procédé de fabrication d'un spiral d'une raideur prédéterminée avec retrait de matière.
CH710581A1 (fr) Ressort spiral et son procédé de fabrication.

Legal Events

Date Code Title Description
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE

PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20180108

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

DAV Request for validation of the european patent (deleted)
DAX Request for extension of the european patent (deleted)
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

17Q First examination report despatched

Effective date: 20190725

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20211202

GRAJ Information related to disapproval of communication of intention to grant by the applicant or resumption of examination proceedings by the epo deleted

Free format text: ORIGINAL CODE: EPIDOSDIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

INTC Intention to grant announced (deleted)
INTG Intention to grant announced

Effective date: 20220225

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 602016071481

Country of ref document: DE

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 1487411

Country of ref document: AT

Kind code of ref document: T

Effective date: 20220515

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: FRENCH

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG9D

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20220427

REG Reference to a national code

Ref country code: AT

Ref legal event code: MK05

Ref document number: 1487411

Country of ref document: AT

Kind code of ref document: T

Effective date: 20220427

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220829

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220727

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220728

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220727

Ref country code: AT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220827

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 602016071481

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20220630

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20220727

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427

26N No opposition filed

Effective date: 20230130

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220608

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220608

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220627

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220727

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20230103

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220630

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 20230702

Year of fee payment: 8

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20160608

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220427