EP3230492B1 - Procédé de projection de gaz froid à l'aide d'un masque - Google Patents

Procédé de projection de gaz froid à l'aide d'un masque Download PDF

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Publication number
EP3230492B1
EP3230492B1 EP16700806.9A EP16700806A EP3230492B1 EP 3230492 B1 EP3230492 B1 EP 3230492B1 EP 16700806 A EP16700806 A EP 16700806A EP 3230492 B1 EP3230492 B1 EP 3230492B1
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EP
European Patent Office
Prior art keywords
mask
masks
thickness
coating
openings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP16700806.9A
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German (de)
English (en)
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EP3230492A1 (fr
Inventor
Daniel Reznik
Oliver Stier
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Siemens AG
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Siemens AG
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Publication of EP3230492A1 publication Critical patent/EP3230492A1/fr
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/02—Coating starting from inorganic powder by application of pressure only
    • C23C24/04—Impact or kinetic deposition of particles

Definitions

  • the invention relates to a method for coating a carrier component by cold gas spraying.
  • a mask is placed on the carrier component prior to coating and a material is applied to the carrier component in the region of a mask opening of this mask, wherein the material completely fills the mask opening.
  • Cold gas spraying is a process known per se, in which particles intended for coating are preferably accelerated to supersonic speed by means of a convergent-divergent nozzle, so that they adhere to the surface to be coated on account of their impressed kinetic energy.
  • the kinetic energy of the particles is used, which leads to a plastic deformation of the same, wherein the coating particles are melted on impact only on their surface. Therefore, this method is referred to as cold gas spraying in comparison to other thermal spraying methods, because it is carried out at comparatively low temperatures at which the coating particles remain substantially fixed.
  • a cold gas spraying system which has a gas heater for heating a gas.
  • a stagnation chamber is connected, which is connected on the output side with the convergent-divergent nozzle, preferably a Laval nozzle.
  • Convergent-divergent nozzles have a converging section and a flared section connected by a nozzle throat.
  • the convergent-divergent nozzle produces on the output side a powder jet in the form of a gas stream with particles therein at high speed, preferably supersonic speed.
  • At least one structured, electrically insulating layer and a structured, electrically conductive layer can be formed on a heat sink.
  • masks are used whose openings are designed according to the structuring.
  • the structured layers serve as circuit structures which have to satisfy electrical requirements such as a specific conductor cross-section for this purpose.
  • the layers can be superimposed in several layer planes.
  • a support member is coated by cold gas spraying.
  • a mask is placed on the carrier component and in the region of a mask opening of this mask a material is applied to the carrier component by cold gas spraying. The material completely fills the mask opening, which mask can be removed after making the layer.
  • a mask can be used in a method for cold gas spraying.
  • the mask is shaped and the process parameters of the cold gas spraying chosen so that a deposition in the shadow area of the mask is possible.
  • undercuts can be filled with material.
  • a method for cold gas spraying can be used with a mask having a certain distance from the substrate. A part of the material is applied to the mask, whereby an application to the substrate outside the mask opening is prevented or at least reduced.
  • the object of the invention is to improve a method for cold gas spraying in such a way that a coating result can be produced in which the geometry of the flanks can be manufactured with comparatively high accuracy.
  • a removing process is performed, wherein the applied material, which is located above the level of the (the cold gas jet facing) top of the mask is removed.
  • a further mask is applied to the upper side of the mask and a material applied to the already applied material in the region of a mask opening of this mask (this material can have the same composition as the previously applied material or differ in its composition ).
  • the two last-mentioned method steps can be carried out until the material applied has reached the required (that is, structurally predetermined) thickness on the carrier component.
  • the coating is completed and the masks can be removed, leaving the coating result on the support member.
  • the main advantage in the use of multiple masks is that regardless of the thickness of the coating result, the thickness of the masks can only be designed according to aspects of a flow dynamic favorable filling by the material. In other words, multiple masks are superimposed to produce the required thickness of the coating result. Each of the masks is filled individually, whereby the complete filling is ensured by the choice of the mask thickness.
  • flanks of the produced layer layers which lie directly against the walls of the mask openings, advantageously arise.
  • This also advantageous structures by cold gas spraying to produce their lateral boundaries run exactly perpendicular to the surface of the support member.
  • columnar structures can thus also be produced if the mask openings of the adjacent masks are in each case completely superimposed on one another.
  • the mask openings of adjacent masks must overlap, at least in some areas, so that the coating result is formed in one piece.
  • several such coating results can be generated on the carrier component, which do not touch each other. If the successive masks have congruent mask openings or decreasing, completely superimposed mask openings, there is the additional advantage that the masks after completion of the coating can be easily removed from the component. These can then simply be lifted upwards (ie perpendicularly away from the carrier component), since no undercuts have formed in the produced coating results.
  • the coating result formed on the material is separated from the carrier component.
  • the coating result thus advantageously represents itself a component which, after the separation from the carrier component, can be supplied to its use.
  • the carrier component itself is therefore to be understood only as a construction platform for the coating result.
  • the method according to the invention can therefore be used as a generative manufacturing method for components.
  • provision may be made for the shape of the mask openings, taking into account the mask thickness for a component, to be determined by mathematically dividing the geometry of this component into superimposed disks.
  • the calculation methods customary for this purpose are generally known and are preferably based on CAD models of the components to be manufactured.
  • the calculated slices of the component result in the said embodiment of the method according to the invention exactly the volume of the mask openings.
  • the method according to the invention can of course also be used to provide a component with a structured layer.
  • This component which can be used, for example, in a machine, in this variant of the method according to the invention represents the carrier component.
  • the coating result in this case is the structured layer to be produced on the carrier component.
  • the masks has a thickness of at most 1 mm.
  • Masks with a thickness of 1 mm have proven to be a good compromise in order to be able to produce even finer structures with the required accuracy.
  • Portions of the coating result which have larger cross-sectional areas as seen in the direction of propagation of the cold gas jet, can also be produced with larger mask openings. In this case, larger mask thicknesses can be realized, so that overall process steps can be saved in the method according to the invention. This advantageously increases the efficiency in the application of the method.
  • At least one of the masks is filled in several steps.
  • a removing process is carried out in which the applied material, which is located above the level of the top of the mask, is removed.
  • This may be unevenness in the layering results that form, which already protrude beyond the plane of the upper side of the mask.
  • these may be deposits of particles of the material which have formed on the mask edges on the top of the mask.
  • the said deposits are also formed when using thin masks with mask openings of small width. Due to the small thickness of the mask, however, its growth during the filling of the mask openings affects comparatively small depth is not enough. It is therefore sufficient to remove these deposits after completely filling the mask opening with the material so that the subsequent mask can be placed on a flat surface that can be formed by the machined surface of the mask and the deposited material.
  • all masks whose mask openings have widths of at most 1 mm in at least one direction have a thickness of at most 1 mm.
  • a ratio between the thickness of the mask and the smallest width of the mask opening of at most 1 is maintained for all masks.
  • the permissible thickness of at least one of the masks is determined by completely filling the mask with the material to be processed.
  • the coating result formed from the applied material is then examined as to whether a required quality is achieved.
  • the required quality must be described by measurable parameters.
  • the density of the coating result can be used. This gives information about the proportion of pores in the coating result.
  • the pore size itself can also be investigated, since in particular in the wall region of the mask openings pores can accumulate and / or occur with a larger volume. This can For example, be checked by making cuts.
  • either samples or the coating result to be generated itself can be produced. If the quality requirements for the coating result are met, the examination can be repeated with a mask of greater thickness.
  • the test can thus contain several iteration steps. Alternatively, however, the method can also be used to confirm the suitability of a selected mask thickness, without exhausting any latitude in the direction of larger mask thicknesses by further iteration steps.
  • the determined suitable thicknesses of the masks are stored together with the process parameters of the coating in a database.
  • the determination of the mask thickness is simplified, since empirical knowledge can be used. This contains information on the geometry of the mask openings and the mask thicknesses as well as the processed materials and coating parameters set on the cold gas spraying system, such as powder delivery rate, powder type and gas temperature, gas pressure and type of carrier gas used.
  • a particular embodiment of the invention is obtained if at least one mask is designed in several parts, with parting lines extending from the outer edge of the mask to the mask openings. These are arranged so that the mask parts can be pulled apart parallel to their surface. This has the advantage that the mask parts can be better separated from the coating result.
  • the coating result has undercuts, it is not possible, as stated above, to lift the masks upwards from the carrier component. However, if there is enough room on the sides of the coating result, the mask parts can, so to speak, at least at low undercuts be pulled aside and thereby solve the coating result.
  • the removal of the masks up or in parts to the side has the great advantage that they can be reused for a subsequent procedure.
  • the removal of the masks in a short time is possible, so that advantageous production time is saved.
  • a removal of the masks in whole or in parts is not possible, it is also possible to destroy them. If these are made, for example, from a less noble material than the coating result, they can be dissolved chemically or electrochemically.
  • the process steps of the process according to the invention can generally be represented as follows.
  • the preparation of the method consists of the production of the masks, wherein the mask thickness of the individual masks is predetermined.
  • the process begins with the application of the first mask to the carrier component and filling by cold gas spraying with the material to be sprayed. Subsequently, excess material is removed from the resulting coating result and the top of the mask. Then the next mask is applied and filled again by cold gas spraying.
  • the thickness of the mask ensures that, on the surface left free by it (the carrier component or the preceding deposit of the material), a spray layer can be deposited defect-free up to the mask edges immediately after placement. After a renewed removal of excess material can be checked whether the mask holes are completely filled. In other words, it must be determined whether the sprayed surface within the mask opening is aligned with the mask surface everywhere after ablation. This can be ensured, for example, by an automatic optical inspection method.
  • FIG. 1 It can be seen how a first mask 12 has been placed on a carrier component 11. This has a mask opening 13, which in the method step according to FIG. 1 is being filled by a material 14. This is done by a non-illustrated cold gas spraying process.
  • a convergent-divergent spray nozzle 15 is shown, which is part of the cold gas spraying system, not shown.
  • the spray nozzle 15 is a Particle beam 16 directed to the support member 11, wherein both the mask opening 13 and the surface 18 of the mask 12 is provided at the edges of the mask opening 13 with layer deposits of the material 14.
  • FIG. 2 It can be seen that by means of a milling head 19, the excess material according to FIG. 1 was removed. For this purpose, the milling head 19 is moved in the direction of arrow over the surface 18, wherein in FIG. 2 It can also be seen that the mask opening 13 is completely filled with the material 14.
  • FIG. 3 the next two process steps are shown.
  • Another mask 12 a is placed on the first mask 12, wherein the mask opening 13 of this mask 12 a is exactly aligned with that of mask 12.
  • the spray nozzle 15 material is again deposited until the mask opening 13 is completely filled again.
  • FIG. 5 it can be seen that analogous to FIG. 3 two further process steps were carried out, which according to a first mask 12 b was placed and this was filled by means of the spray nozzle 15, not shown here with material 14.
  • the milling head 19 is now about to remove excess material 14 from the surface 18 of the mask 12b.
  • the mask opening 13 of the further mask 12b is congruent with the two preceding ones.
  • the material 14 now fills all three mask openings 13.
  • the component is now completed, which is why the masks 12, 12a, 12b can be removed according to the arrows drawn upwards.
  • the material 14 is a columnar Structure with vertical sides (in the form of a prism) has.
  • the material 14 remains as a layer 20 on the support member 11.
  • the carrier component can now be supplied to its function.
  • a possible carrier component is for example in FIG. 17 shown. It could be a tool for embossing a symbol.
  • the carrier component 11 in this case provides a surface on which the symbols to be embossed are constructed as a layer 20.
  • FIGS. 8 to 15 a method is shown in which the coating result results in a component 21 (cf. FIG. 15 ).
  • the process is essentially the same as that according to the FIGS. 1 to 7 and will be explained in more detail here only in terms of its differences.
  • FIG. 10 is unlike FIG. 3 another mask 12d placed, the mask opening 13 is greater than that of the mask 12. This creates an undercut 22 in the material, which in the FIGS. 14 and 15 is better to recognize.
  • the removal of the material according to FIG. 11 takes place analogously to FIG. 4 ,
  • FIG. 12 differs from FIG. 5 again, in that the further mask 12e is provided with a larger mask opening 13 than the mask 12d.
  • the coating result of the material 14, which is in FIG. 13 can recognize, therefore, the shape of a mushroom. This makes the removal of the masks 12, 12d, 12e difficult.
  • the respective mask halves according to FIG 13 in the direction of the two arrows indicated parallel to the surface of the support member 11 are deducted.
  • the coating result of the material 14 may also have a geometry that does not allow lateral removal of the mask parts.
  • FIG. 14 shown how the masks 12, 12a, 12b can be dissolved in an electrochemical bath 25, wherein the masks in FIG. 14 are no longer recognizable because they are already resolved.
  • the resulting component 21 can be removed, for example, by wire erosion of the support member 11, which only serves as a construction platform in this process variant.
  • the finished component 21 is in FIG. 15 shown as a side view.
  • FIG. 16 shows a mask 12f, which is constructed in two parts. For example, this could be for a in FIG. 13 serve indicated procedure.
  • the mask 12f has two half masks 23, which are divisible by a parting line 24.
  • a component which has been produced in the mask opening 13 does not interfere with removal of the mask even if overlying masks form undercuts in the component to be produced due to larger or overlapping mask openings.
  • the prerequisite is that the undercuts are not too large (that is, the "undercuts jumps" from mask to mask), if this leads to a deposition of material on a mask showing the undercut.
  • an adhesion of the mask to the coating result is achieved, which must be overcome by the peel force of the mask.

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Chemical Vapour Deposition (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Claims (11)

  1. Procédé de revêtement d'un élément ( 11 ) de support par projection de gaz froid, dans lequel, avant le revêtement, on met un masque ( 12 ) sur l'élément ( 11 ) de support et on dépose, dans la région d'une ouverture ( 13 ) de ce masque ( 12 ) de la matière ( 14 ) sur l'élément ( 11 ) de support, la matière ( 14 ) remplissant complètement l'ouverture ( 13 ) du masque,
    caractérisé
    en ce que
    • dans un stade du procédé, on effectue, après le dépôt de la matière ( 14 ) un procédé d'enlèvement, dans lequel on enlève la matière ( 14 ) déposée, qui se trouve au-dessus du niveau du côté supérieur du masque ( 12 ) et il se constitue une surface plane dans la région de l'ouverture ( 13 ) du masque et sur le masque ( 12 ),
    • dans un autre stade du procédé, on met, sur le côté supérieur du masque, un autre masque ( 12a, 12b, 12c, 12d ) et on dépose, dans la région d'une ouverture ( 13 ) de ce masque ( 12a, 12b, 12c, 12d ), une matière sur la matière ( 14 ) déjà déposée,
    dans lequel on effectue les deux stades du procédé mentionnés ci-dessus aussi souvent qu'il le faut jusqu'à ce que la matière ( 14 ) déposée ait atteint l'épaisseur nécessaire sur l'élément ( 11 ) de support et en ce que, lorsque le revêtement est achevé, on retire les masques.
  2. Procédé suivant la revendication 1,
    caractérisé
    en ce que l'on sépare de l'élément ( 1 ) de support le résultat du revêtement constitué de la matière ( 14 ) déposée.
  3. Procédé suivant l'une des revendications précédentes,
    caractérisé
    en ce qu'au moins une partie des masques ( 12, 12a, 12b, 12c, 12d ) a une épaisseur d'au plus 1 mm.
  4. Procédé suivant la revendication 3,
    caractérisé
    en ce que tous les masques ( 12, 12a, 12b, 12c, 12d ), dont les ouvertures ( 13 ) ont au moins, dans une direction, des largeurs d'au plus 1 mm, ont une épaisseur d'au plus 1 mm.
  5. Procédé suivant la revendication 1 à 3,
    caractérisé
    en ce que, pour tous les masques ( 12, 12a, 12b, 12c, 12d ), on maintient un rapport entre l'épaisseur du masque et la largeur la plus petite de l'ouverture ( 13 ) du masque d'au plus 1.
  6. Procédé suivant l'une des revendications précédentes,
    caractérisé
    en ce que des masques ( 12, 12a, 12b ) successifs ont des ouvertures ( 13 ) de masque en coïncidence ou des ouvertures ( 13 ) de masque complètement superposées se rapetissant.
  7. Procédé suivant l'une des revendications précédentes,
    caractérisé
    en ce qu'au moins un masque ( 12f ) est en plusieurs parties, des joints ( 24 ) de séparation s'étendant du bord extérieur du masque aux ouvertures du masque, de manière à ce que les parties ( 23 ) du masque puissent se séparer l'une de l'autre, en les tirant parallèlement à leur côté supérieur.
  8. Procédé suivant l'une des revendications précédentes,
    caractérisé
    en ce que l'on remplit au moins l'un des masques ( 12, 12a, 12b, 12c, 12d ) en plusieurs stades, dans lequel, après le stade respectif du dépôt de la matière ( 14 ), on effectue un procédé d'enlèvement dans lequel on enlève la matière ( 14 ) déposée, qui se trouve au-dessus du niveau du côté supérieur du masque.
  9. Procédé suivant l'une des revendications précédentes,
    caractérisé
    en ce que l'on détermine l'épaisseur admissible au moins de l'un des masques ( 12, 12a, 12b, 12c, 12d ) en remplissant complètement le masque de la matière ( 14 ) à traiter et en ce que l'on étudie ensuite, à partir du résultat de revêtement formé de la matière ( 14 ) déposée, si l'on a obtenu une qualité exigée.
  10. Procédé suivant la revendication 9,
    caractérisé
    en ce que l'on mémorise dans une base de données l'épaisseur appropriée déterminée des masques ( 12, 12a, 12b, 12c, 12d ) ensemble avec les paramètres de procédé du revêtement.
  11. Procédé suivant l'une des revendications précédentes,
    caractérisé
    en ce que l'on détermine la conformation des ouvertures ( 13 ) du masque en tenant compte de l'épaisseur du masque pour un élément ( 21 ) en décomposant la géométrie de l'élément ( 21 ) par le calcul en des disques superposés, qui définissent le volume des ouvertures ( 13 ) du masque.
EP16700806.9A 2015-02-04 2016-01-13 Procédé de projection de gaz froid à l'aide d'un masque Active EP3230492B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015201927.6A DE102015201927A1 (de) 2015-02-04 2015-02-04 Verfahren zum Kaltgasspritzen mit Maske
PCT/EP2016/050533 WO2016124362A1 (fr) 2015-02-04 2016-01-13 Procédé de projection de gaz froid à l'aide d'un masque

Publications (2)

Publication Number Publication Date
EP3230492A1 EP3230492A1 (fr) 2017-10-18
EP3230492B1 true EP3230492B1 (fr) 2018-11-07

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EP16700806.9A Active EP3230492B1 (fr) 2015-02-04 2016-01-13 Procédé de projection de gaz froid à l'aide d'un masque

Country Status (8)

Country Link
US (1) US10648085B2 (fr)
EP (1) EP3230492B1 (fr)
JP (1) JP6538862B2 (fr)
CN (1) CN107208274B (fr)
CA (1) CA2975774C (fr)
DE (1) DE102015201927A1 (fr)
DK (1) DK3230492T3 (fr)
WO (1) WO2016124362A1 (fr)

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US11662300B2 (en) 2019-09-19 2023-05-30 Westinghouse Electric Company Llc Apparatus for performing in-situ adhesion test of cold spray deposits and method of employing
US11898986B2 (en) 2012-10-10 2024-02-13 Westinghouse Electric Company Llc Systems and methods for steam generator tube analysis for detection of tube degradation
US11935662B2 (en) 2019-07-02 2024-03-19 Westinghouse Electric Company Llc Elongate SiC fuel elements

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DE102015201927A1 (de) 2015-02-04 2016-08-04 Siemens Aktiengesellschaft Verfahren zum Kaltgasspritzen mit Maske
CN111344840B (zh) * 2017-11-22 2023-07-07 三菱电机株式会社 半导体装置以及半导体装置的制造方法
DE102018127774A1 (de) * 2018-11-07 2020-05-07 Bayerische Motoren Werke Aktiengesellschaft Bauteil sowie Verfahren zum Herstellen eines Bauteils
EP3772546B1 (fr) * 2019-08-05 2022-01-26 Siemens Aktiengesellschaft Fabrication d'une structure au moyen d'un procédé de pulvérisation de gaz froid
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EP3230492A1 (fr) 2017-10-18
US20180274104A1 (en) 2018-09-27
CN107208274A (zh) 2017-09-26
US10648085B2 (en) 2020-05-12
JP6538862B2 (ja) 2019-07-03
CA2975774C (fr) 2019-03-19
DE102015201927A1 (de) 2016-08-04
DK3230492T3 (en) 2019-02-04
CN107208274B (zh) 2020-12-11
WO2016124362A1 (fr) 2016-08-11
JP2018507555A (ja) 2018-03-15
CA2975774A1 (fr) 2016-08-11

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