EP3230492A1 - Procédé de projection de gaz froid à l'aide d'un masque - Google Patents

Procédé de projection de gaz froid à l'aide d'un masque

Info

Publication number
EP3230492A1
EP3230492A1 EP16700806.9A EP16700806A EP3230492A1 EP 3230492 A1 EP3230492 A1 EP 3230492A1 EP 16700806 A EP16700806 A EP 16700806A EP 3230492 A1 EP3230492 A1 EP 3230492A1
Authority
EP
European Patent Office
Prior art keywords
mask
masks
thickness
coating
openings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP16700806.9A
Other languages
German (de)
English (en)
Other versions
EP3230492B1 (fr
Inventor
Daniel Reznik
Oliver Stier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP3230492A1 publication Critical patent/EP3230492A1/fr
Application granted granted Critical
Publication of EP3230492B1 publication Critical patent/EP3230492B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/02—Coating starting from inorganic powder by application of pressure only
    • C23C24/04—Impact or kinetic deposition of particles

Definitions

  • the invention relates to a method for coating a carrier component by cold gas spraying.
  • a mask is placed on the carrier component prior to coating and a material is applied to the carrier component in the region of a mask opening of this mask, wherein the material completely fills the mask opening.
  • Cold gas spraying is a process known per se, in which particles intended for coating are preferably accelerated to supersonic speed by means of a convergent-divergent nozzle, so that they adhere to the surface to be coated on account of their impressed kinetic energy.
  • the kinetic energy of the particles is used, which leads to a plastic deformation of the same, wherein the coating particles are melted on impact only on their surface. Therefore, this method is referred to as cold gas spraying in comparison to other thermal spraying methods, because it is carried out at comparatively low temperatures at which the coating particles remain substantially fixed.
  • a cold gas spraying system which has a gas heater for heating a gas.
  • a stagnation chamber is connected, which is connected on the output side with the convergent-divergent nozzle, preferably a Laval nozzle.
  • Convergent-divergent nozzles have a converging section and a flared section connected by a nozzle throat.
  • the convergent-divergent nozzle produces on the output side a powder jet in the form of a gas stream with it
  • Particles at high speed preferably supersonic speed.
  • a method of the type described above is known from the prior art.
  • DE 10 2004 058 806 Al for example, it is provided that at least one structured, electrically insulating layer and a structured, electrically conductive layer can be formed on a heat sink.
  • masks are used whose openings are designed according to the structuring.
  • the structured layers serve as circuit structures which have to satisfy electrical requirements such as a certain conductor cross-section for this purpose.
  • the layers can be superimposed in several layer planes.
  • Cross-sectional shape plays a minor role in comparison to this.
  • the object of the invention is to improve a method for cold gas spraying in such a way that a coating result can be produced in which the geometry of the flanks can be manufactured with comparatively high accuracy.
  • a removal process is carried out in which the applied material, which is located above the level of the (the cold gas jet facing) top of the mask is removed.
  • a further mask is applied to the upper side of the mask and a material is applied to the already applied material in the region of a mask opening of this mask (this material can have the same composition as the previously applied material or can be in its Differ composition).
  • the further mask can be placed on the surface of the preceding mask which has been leveled thereby. Also in the area of the mask opening, a flat surface is created which lies exactly in the plane of the surface of the already filled mask. Therefore, the additional overlaid mask can be completely filled with the material again.
  • the two last-mentioned method steps can be carried out so often until the applied material has reached the required (ie structurally predetermined) thickness on the carrier component.
  • the coating is completed and the masks can be removed, leaving the coating result on the support member.
  • the essential advantage in the use of multiple masks is that, regardless of the thickness of the coating result, the thickness of the masks can only be designed according to aspects of a flow dynamic favorable filling by the material. In other words, multiple masks are superimposed to produce the required thickness of the coating result.
  • Each of the masks is filled individually, whereby the complete filling is ensured by the choice of the mask thickness.
  • the subsequent removal of the excess material further ensures that the adjacent masks are sufficiently close to each other so that an undisturbed development of the corresponding subarea of the coating structure can arise.
  • Masks are advantageously formed flanks of the generated layer layers, which lie directly on the walls of the mask openings. This also advantageous structures by cold gas spraying to produce their lateral boundaries run exactly perpendicular to the surface of the support member.
  • columnar structures can thus also be produced if the mask openings of the adjacent masks are in each case completely superimposed on one another.
  • the mask openings of adjacent masks must overlap, at least in some areas, so that the coating result is formed in one piece.
  • several such coating results can be generated on the carrier component, which do not touch each other. If the successive masks congruent
  • Mask openings or diminishing, completely superimposed mask openings there is the additional advantage that the masks after completion of the loading Layering can be easily removed from the component. These can then simply be lifted upwards (ie perpendicularly away from the carrier component), since there are no results in the coating results produced
  • the coating result formed on the material is separated from the carrier component.
  • the coating result thus advantageously constitutes a component itself, which after its separation from the carrier component can be supplied to its use.
  • the support component itself is therefore to be understood only as a construction platform for the coating result.
  • the method according to the invention can therefore be used as a generative manufacturing method for components.
  • the shape of the mask openings, taking into account the mask thickness for a component be determined by the fact that the geometry of this component is mathematically superimposed
  • Slices is disassembled.
  • the calculation methods customary for this purpose are generally known and are preferably based on CAD models of the components to be manufactured.
  • the calculated slices of the component result in the said embodiment of the method according to the invention exactly the volume of the mask openings. When determining the thickness of the discs, it is therefore necessary to take into account the thickness of the masks.
  • the method according to the invention can of course also be used to provide a component with a structured layer.
  • This component which can be used, for example, in a machine, in this variant of the method according to the invention represents the carrier component.
  • the coating result in this case is the structured layer to be produced on the carrier component.
  • at least a part of the masks has a thickness of at most 1 mm. Masks with a thickness of 1 mm have proven to be a good compromise in order to be able to produce even finer structures with the required accuracy. However, it is not absolutely necessary that all masks have a thickness of at most 1 mm.
  • Subareas of the coating result which, seen in the direction of propagation of the cold gas jet, have larger cross-sectional areas, can also be produced with larger mask openings.
  • larger mask thicknesses can be realized, so that overall process steps can be saved in the method according to the invention. This advantageously increases the efficiency in the application of the method.
  • At least one of the masks is filled in several steps.
  • a removing process is carried out in which the applied material, which is located above the level of the top of the mask, is removed.
  • This may be unevenness in the layering results that form, which already protrude beyond the plane of the upper side of the mask.
  • these may be deposits of particles of the material which have formed on the mask edges on the top of the mask. These can gain a negative influence on the formation of the coating result as the growth progresses, which is why it may be advantageous to remove them again and again during filling of the mask.
  • the said deposits are also formed when using thin masks with mask openings of small width. Due to the small thickness of the mask affects its
  • a ratio between the thickness of the mask and the smallest width of the mask opening of at most 1 is maintained for all masks.
  • the permissible thickness of at least one of the masks is determined by completely filling the mask with the material to be processed.
  • the coating result formed from the applied material is then examined as to whether a required quality is achieved.
  • the required quality must be described by measurable parameters.
  • the density of the coating result can be used. This gives information about the proportion of pores in the coating result.
  • the pore size itself can also be investigated, since in particular in the wall region of the mask openings pores can accumulate and / or occur with a larger volume. This can For example, be checked by making cuts.
  • the examination can be repeated with a mask of greater thickness.
  • the test can thus contain several iteration steps.
  • the method all kinds of recently be applied to confirm the suitability of a selected mask thickness, without exhausting any latitude in the direction of larger mask thicknesses by further iteration steps.
  • the determined suitable thicknesses of the masks are stored together with the process parameters of the coating in a database. In this way, the determination of the mask thickness is simplified in subsequent methods since empirical knowledge is used.
  • a particular embodiment of the invention is obtained if at least one mask is designed in several parts, with parting lines extending from the outer edge of the mask to the mask openings.
  • the mask parts can, at least with slight undercuts, be pulled aside to the side and thereby solve the coating result.
  • FIG. 17 shows an exemplary embodiment of a possible component in a three-dimensional view.
  • the process steps of the process according to the invention can generally be represented as follows.
  • the preparation of the method consists of the production of the masks, wherein the mask thickness of the individual masks is predetermined.
  • the process begins with the application of the first mask to the carrier component and filling by cold gas spraying with the material to be sprayed. Subsequently, excess material is removed from the coating result that is being formed and the top of the mask. Then the next mask is applied and filled again by cold gas spraying.
  • the thickness of the mask ensures that, on the surface left free by it (the carrier component or the preceding deposit of the material), a spray layer can be deposited defect-free up to the mask edges immediately after placement. After a renewed removal of excess material can be checked whether the mask holes are completely filled. In other words, it must be determined whether the sprayed surface within the mask opening is aligned with the mask surface everywhere after ablation. This can be ensured, for example, by an automatic optical inspection method.
  • FIG. 1 shows how a first mask 12 has been placed on a carrier component 11. This has a mask opening 13, which in the method step according to FIG. 1 is being filled by a material 14. This is done by a non-illustrated cold gas spraying process.
  • a convergent-divergent spray nozzle 15 is shown, which is part of the cold gas spraying system, not shown.
  • the spray nozzle 15 is a Particle beam 16 directed to the support member 11, wherein both the mask opening 13 and the surface 18 of the mask 12 is provided at the edges of the mask opening 13 with layer deposits of the material 14.
  • FIG. 2 it can be seen that the excess material according to FIG. 1 has been removed by means of a milling head 19.
  • the milling head 19 is moved in the direction of the arrow over the surface 18, wherein it can also be seen in FIG. 2 that the mask opening 13 is completely filled with the material 14.
  • FIG. 3 shows the next two process steps. Another mask 12 a is placed on the first mask 12, wherein the mask opening 13 of this mask 12 a is exactly aligned with that of mask 12. By means of the spray nozzle 15 material is again deposited until the mask opening 13 is completely filled again. In FIG. 4 it can be seen that the excess material was removed again by means of the milling head 19 (analogously to the method step illustrated in FIG. 2).
  • FIG. 5 It can be seen in FIG. 5 that, analogously to FIG. 3, two further method steps were carried out, to which a mask 12b was initially applied, and this was filled with material 14 by means of the spray nozzle 15, not shown here.
  • the milling head 19 is now in the process of removing excess material 14 from the surface 18 of the mask 12b.
  • the mask opening 13 of the further mask 12b is congruent with the two preceding ones.
  • the material 14 now fills all three mask openings 13.
  • the component is now completed, which is why the masks 12, 12a, 12b can be removed according to the arrows drawn upwards.
  • the material 14 is a columnar Structure with vertical sides (in the form of a prism) has.
  • Layer 20 remains on the support member 11.
  • the carrier component can now be supplied to its function.
  • a possible carrier component is shown for example in FIG. 17. It could be a tool for embossing a symbol.
  • the carrier component 11 in this case provides a surface on which the symbols to be embossed are constructed as a layer 20.
  • FIGS. 8 to 15 show a method in which the coating result yields a component 21 (compare FIG. 15). The method essentially proceeds as that according to FIGS. 1 to 7 and will be explained in more detail here only with regard to its differences.
  • FIG. 10 in contrast to FIG. 3, a further mask 12d is applied, the mask opening 13 of which is larger than that of the mask 12. This produces an undercut 22 in the material, which can be seen better in FIGS. 14 and 15.
  • the removal of the material according to FIG. 11 takes place analogously to FIG. 4.
  • FIG. 12 differs from FIG. 5 again in that the further mask 12e is provided with a larger mask opening 13 than the mask 12d.
  • the coating result from the material 14, which can be seen in Figure 13, therefore, the shape of a fungus. This makes the removal of the masks 12, 12d, 12e difficult. Have this perpendicular to the plane of a not-shown
  • the coating result of the material 14 may also have a geometry that does not allow lateral removal of the mask parts.
  • the resulting component 21 can be removed, for example, by wire erosion of the support member 11, which only serves as a construction platform in this process variant.
  • the finished component 21 is shown in Figure 15 as a side view.
  • FIG. 16 shows a mask 12f, which is constructed in two parts. This could serve, for example, for a method indicated in FIG.
  • the mask 12f has two half masks 23, which are divisible by a parting line 24.
  • a component which has been produced in the mask opening 13 does not interfere with removal of the mask even if overlying masks form undercuts in the component to be produced due to larger or overlapping mask openings.
  • the undercuts are not too large (that is, the "undercuts jumps" from mask to mask), if this leads to the deposition of material on a mask that images the undercut, as this results in adhesion of the mask to the coating result , which must be overcome by the peel force of the mask.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Chemical Vapour Deposition (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

L'invention concerne un procédé de revêtement d'un composant de support (11) par projection de gaz froid. Ce procédé nécessite l'utilisation d'un masque (12). Selon l'invention, il est prévu d'utiliser au moins un autre masque (12a) en plus du masque (12). Les masques ont donc une épaisseur plus faible. Par conséquent, même en tenant compte des conditions d'écoulement du jet de gaz froid (16) dans les orifices de masque (13), il est possible de remplir complètement les orifices de masque avec une matière (14). Selon l'invention, pour pouvoir placer les masques (12, 12a) l'un sur l'autre, il est en outre prévu de supprimer, entre les étapes de revêtement, la matière excédentaire (14) de la surface (18) du masque (12, 12a) utilisé à chaque fois et au-dessus de l'orifice de masque. Avantageusement, le procédé de l'invention permet de créer des structures qui sont très hautes par rapport à leur surface et qui ont cependant des parois latérales perpendiculaires (structure en colonne).
EP16700806.9A 2015-02-04 2016-01-13 Procédé de projection de gaz froid à l'aide d'un masque Active EP3230492B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015201927.6A DE102015201927A1 (de) 2015-02-04 2015-02-04 Verfahren zum Kaltgasspritzen mit Maske
PCT/EP2016/050533 WO2016124362A1 (fr) 2015-02-04 2016-01-13 Procédé de projection de gaz froid à l'aide d'un masque

Publications (2)

Publication Number Publication Date
EP3230492A1 true EP3230492A1 (fr) 2017-10-18
EP3230492B1 EP3230492B1 (fr) 2018-11-07

Family

ID=55173829

Family Applications (1)

Application Number Title Priority Date Filing Date
EP16700806.9A Active EP3230492B1 (fr) 2015-02-04 2016-01-13 Procédé de projection de gaz froid à l'aide d'un masque

Country Status (8)

Country Link
US (1) US10648085B2 (fr)
EP (1) EP3230492B1 (fr)
JP (1) JP6538862B2 (fr)
CN (1) CN107208274B (fr)
CA (1) CA2975774C (fr)
DE (1) DE102015201927A1 (fr)
DK (1) DK3230492T3 (fr)
WO (1) WO2016124362A1 (fr)

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CN111344840B (zh) * 2017-11-22 2023-07-07 三菱电机株式会社 半导体装置以及半导体装置的制造方法
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US11935662B2 (en) 2019-07-02 2024-03-19 Westinghouse Electric Company Llc Elongate SiC fuel elements
EP3772546B1 (fr) * 2019-08-05 2022-01-26 Siemens Aktiengesellschaft Fabrication d'une structure au moyen d'un procédé de pulvérisation de gaz froid
US11662300B2 (en) 2019-09-19 2023-05-30 Westinghouse Electric Company Llc Apparatus for performing in-situ adhesion test of cold spray deposits and method of employing
US11980938B2 (en) 2020-11-24 2024-05-14 Rolls-Royce Corporation Bladed disk repair process with shield
US11629412B2 (en) * 2020-12-16 2023-04-18 Rolls-Royce Corporation Cold spray deposited masking layer

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Also Published As

Publication number Publication date
US20180274104A1 (en) 2018-09-27
CN107208274A (zh) 2017-09-26
US10648085B2 (en) 2020-05-12
JP6538862B2 (ja) 2019-07-03
CA2975774C (fr) 2019-03-19
DE102015201927A1 (de) 2016-08-04
DK3230492T3 (en) 2019-02-04
CN107208274B (zh) 2020-12-11
WO2016124362A1 (fr) 2016-08-11
EP3230492B1 (fr) 2018-11-07
JP2018507555A (ja) 2018-03-15
CA2975774A1 (fr) 2016-08-11

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