EP3209810A1 - Creuset de vaporisation - Google Patents

Creuset de vaporisation

Info

Publication number
EP3209810A1
EP3209810A1 EP15784684.1A EP15784684A EP3209810A1 EP 3209810 A1 EP3209810 A1 EP 3209810A1 EP 15784684 A EP15784684 A EP 15784684A EP 3209810 A1 EP3209810 A1 EP 3209810A1
Authority
EP
European Patent Office
Prior art keywords
head part
receiving part
receiving
threaded portion
diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP15784684.1A
Other languages
German (de)
English (en)
Inventor
Falk Krause
Johan MATHIASSON
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Apollo Ding Rong Solar Technology Co Ltd
Solibro Res AB
Solibro Research AB
Original Assignee
Beijing Apollo Ding Rong Solar Technology Co Ltd
Solibro Res AB
Solibro Research AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Apollo Ding Rong Solar Technology Co Ltd, Solibro Res AB, Solibro Research AB filed Critical Beijing Apollo Ding Rong Solar Technology Co Ltd
Publication of EP3209810A1 publication Critical patent/EP3209810A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Definitions

  • the invention relates to a device for receiving vaporized material and a method for producing such a device.
  • Carrier body or substrate are applied.
  • Copper, indium, gallium, sodium fluoride, potassium fluoride and / or selenium can be applied by means of such a vapor deposition method in an efficient manner on a surface of the carrier body. This allows e.g. the production of a solar cell in a so-called
  • Evaporation process can be called, evaporation devices are used. These may e.g. Means for generating thermal energy, means for transmitting thermal energy and at least one device for receiving evaporative material comprise.
  • the evaporating material can be cooled by the device for generating and transmitting thermal energy to a desired temperature, e.g. a temperature in the range of 1000 ° C to 1200 ° C, are heated, in which case the resulting material vapor moves to a support body or substrate and can condense there.
  • residual material may remain in the device for receiving vaporization.
  • the removal of this residual material from the device for receiving can be problematic, especially in devices in which a diameter of a filling or outlet opening is smaller than a diameter of the actual receiving volume.
  • Various methods are known for removing a residual amount of material in a crucible, such as smelting, etching, or using an open crucible built into a divisible graphite susceptor. Also known are two-part devices for receiving vaporization.
  • WO 2007/069865 A1 describes a crucible with a crucible body and a cap. The cap can be attached to the crucible body by a threaded fastener.
  • US 4,812,326 discloses an evaporator having a crucible and a cap. However, in this document no connection of the crucible and the cap is disclosed by a thread.
  • US 2007/0289526 A1 discloses a multi-part crucible with a base part and a top part. These can be put together. Also in this document no connection is revealed by a thread.
  • cylindrical crucible and an outlet unit that can be attached to an upper portion of the crucible. Also, this document does not disclose a connection by a thread.
  • US 2010/0040780 A1 discloses a container for evaporating material.
  • a two-part crucible includes a top and a bottom. The upper part can be joined together with the lower part. However, no connection is disclosed by a thread in this document.
  • US 2010/0031878 A1 discloses an applicator with a crucible. Here, however, the crucible is made in one piece.
  • JP 2290963 A discloses a crucible with a crucible lid and a crucible body. It is disclosed that the crucible body and the crucible lid can be fixed together by threaded parts.
  • Guaranteed absorption of the evaporation material in the high temperature range has good heat transfer properties, as possible reaction-free under the influence occurring process gases and has a high corrosion resistance and sufficient mechanical stability of the device for loading and unloading.
  • Proposed is a device for receiving evaporating material.
  • the evaporant may in particular be copper, indium, gallium, sodium fluoride, potassium fluoride, selenium or a mixture of at least two of these materials.
  • the device comprises a receiving part with a receiving volume.
  • the receiving part serves to accommodate the vaporized material.
  • the evaporating material in particular in the solid or liquid state, can be or can be arranged in the receiving volume.
  • the receiving part can be open in particular to one side.
  • the receiving part may be e.g. a hollow cylindrical portion having a first end-side, closed end and a further end-side, open end.
  • a central center line of the receiving part may in this case extend from the first front end to the further front end.
  • the receiving part may for example have a part-spherical, in particular hemispherical, section.
  • the device has a head part with at least one outlet opening.
  • the outlet opening can be designed in particular as a passage or passage opening in the head part.
  • Outlet opening conceivable.
  • the outlet opening can be bottle-necked
  • the head part may, for example, have a first inlet-side surface and a further, outlet-side surface, wherein the first surface may designate a surface of the head part lying opposite the further surface.
  • the outlet opening can extend from the first surface to the further surface.
  • the outlet opening can extend from the first surface to the further surface.
  • a diameter of the outlet opening can change.
  • a diameter in a first section to be constant and correspond to an inlet diameter, then to a
  • the vertical direction with respect to the receiving part from the first end to the further end of the receiving part and with respect to the head part from the first surface to the further surface is oriented. Furthermore, the vertical direction can be parallel to the central center lines of the receiving and head part. With respect to the vertical direction, the closed end of the receiving part may also be referred to as the lower end and the open end as the upper end. Further, the first surface may be lower than
  • the receiving part has a threaded portion for mechanical connection with the head part.
  • the threaded portion is in this case preferably arranged in the region of the further, ie upper, end of the receiving part.
  • the threaded portion may be arranged on the receiving part, that between a (upper) edge of the other end and the threaded portion no distance or a predetermined distance is provided. The distance may be along the previously explained
  • the threaded portion may immediately adjoin the edge of the open (upper) end or be spaced apart from the edge by the predetermined distance.
  • This receiving part-side threaded portion may be arranged in particular in or on the above-explained hollow cylindrical portion of the receiving part.
  • the head part has a corresponding threaded portion for mechanical connection with the receiving part.
  • This head part-side threaded portion is arranged in particular in the lower regions of the head part.
  • the receiving part can be mechanically connected to the head part via the threaded portions.
  • thread parameters of the receiving part-side threaded portion are adapted to the thread parameters of the head part side threaded portion such that a stable mechanical connection is possible.
  • the thread parameters can in this case be selected such that a play-free mechanical connection is ensured.
  • a mechanical connection is provided or made possible with a predetermined clearance.
  • manufacturing tolerances e.g. in bumps
  • the game can allow, in particular smooth running, screwing.
  • the thread parameters can be selected adapted to the respective material of the receiving part and the head part. This will be explained in more detail below.
  • An inner diameter of the receiving part can be between 10 mm and 200 mm.
  • An outer diameter of the receiving part may be between 10.4 mm to 200.4 mm.
  • a wall thickness of the receiving part can be between 0.4 mm to 5.0 mm.
  • a maximum diameter of the outlet opening may in this case be less than or equal to a maximum inner diameter of the receiving part.
  • Outer diameter of the head part can be greater than the maximum
  • the receiving part is formed from pyrolytic boron nitride (pBN).
  • pBN pyrolytic boron nitride
  • the use of pyrolytic boron nitride for the receiving part ensures in an advantageous manner that the receiving part is formed with a very high corrosion resistance and causes only a very low contamination of the evaporating material under the usual process conditions in a vapor deposition.
  • Pyrolytic boron nitride usually has only a low mechanical strength and rigidity.
  • a component made of pyrolytic boron nitride is easily deformable and easily fragile, in particular if the component has holes or incisions. So far, it has therefore been assumed that pyrolytic boron nitride is mechanically not suitable to form a threaded portion or provide a threaded portion on a pyrolytic boron nitride component. This also shows the above-explained prior art.
  • Thread parameters can be arranged or formed.
  • the threaded portion of the receiving part is formed as an internal thread, wherein the corresponding threaded portion of the head part is formed as an external thread.
  • the head part may have or form a stop edge or surface for an edge portion of the receiving part, wherein the stop element is a
  • Thread portion following section wherein the diameter of the following section is greater than an outer diameter of the threaded portion of the head part and thus a projection or a stop surface is provided.
  • the stop edge or surface may in this case be e.g. be provided by a sudden increase in the (outer) diameter of the head part of the threaded portion to the following section. It is also conceivable that the diameter increases continuously along the center line, in particular in the vertical direction, from the threaded section to the following section and / or in the following section, e.g. linear. Thus, the following section may have a cone-shaped outer surface whose diameter increases along the center line, in particular in the vertical direction. As a result, good sealing properties can be achieved when screwing.
  • the threaded portion of the receiving part is formed as an external thread, wherein the corresponding threaded portion of the head part is formed as an internal thread.
  • the head part may have or form a stop edge or surface for an edge portion of the receiving part.
  • the threaded portion of the receiving part is formed as a stiffening element. This can mean that at least one
  • Threaded parameter of the threaded portion of the receiving part is selected such that a desired mechanical stability of the receiving part is provided.
  • the depressions of the receiving part-side threaded portion can serve to stiffen the receiving part.
  • the at least one thread parameter can thus be selected such that a torsional strength and / or shear strength and / or a compressive strength and / or a tensile strength and / or a compression strength and / or a Bending strength and / or a shear strength of the receiving part with the threaded portion is greater than that of a receiving part without threaded portion.
  • the receiving part without threaded portion except for the threaded portion of the same configuration as the receiving part with threaded portion in particular the same shape and dimensions on.
  • the mechanical strength of the receiving part is advantageously increased by the provision of the threaded portion.
  • Evaporator device can be removed. This was previously possible only with great caution and thus a high expenditure of time, since in such an oblique removal of the formed from pyrolytic boron nitride receiving part due to remaining
  • Residual material which is e.g. may still weigh up to 20 kg, deformed and due to deformation e.g. could come into mechanical contact with other components of the evaporation device, in particular with heating wires. This in turn could lead to destruction or damage to these components and the receiving part.
  • Residual material which is e.g. may still weigh up to 20 kg, deformed and due to deformation e.g. could come into mechanical contact with other components of the evaporation device, in particular with heating wires. This in turn could lead to destruction or damage to these components and the receiving part.
  • By providing a threaded portion such a deformation of the receiving part is reduced or even prevented, so that now also the previously described oblique removal is possible.
  • the threaded portion of the receiving part has a pitch of a range between 2 mm (inclusive) and 50 mm
  • the threaded portion of the female part has a number of turns ranging from 1 (inclusive) to 10 (inclusive).
  • the threaded portion of the receiving part has a
  • the threaded portion of the receiving part has a
  • Inner diameter in the range between 10 mm (inclusive) and 200 mm (inclusive).
  • the threaded portion of the receiving part has a
  • Core diameter ranging between 10 mm (inclusive) and 200 mm (inclusive).
  • the outer diameter, the inner diameter and the core diameter are adapted to each other adapted to provide a thread with desired properties.
  • the threaded portion of the receiving part has a
  • Flank angle from a range of 20 ° (inclusive) to 120 ° (inclusive).
  • the thread parameters are specially adapted to the use of pyrolytic boron nitride as a material for the receiving part.
  • the screwed device can be handled, in particular with already arranged in the receiving volume evaporation material, as a one-piece component, with deformations, in particular of the receiving part can be reduced or even avoided.
  • the threaded portion of the receiving part is formed as a round thread.
  • the head part is made of graphite. This results in an advantageous manner that the head part sufficient mechanical Has strength for the proposed threaded connection. At the same time, the head part has a desired thermal conductivity and also causes only minimal contamination of the vaporization vaporization. Furthermore, there is advantageously a cost savings in the production of the proposed device for receiving evaporative material.
  • a maximum wall thickness of the receiving part is less than or equal to 5.0 mm, in particular less than or equal to 2.0 mm. This results in an advantageous adaptation to the requirements of the production of the receiving part.
  • the head part has at least one fastening means for arranging the head part on a holding structure or forms such
  • Fasteners off This can also mean that the fastening means can be attached to the head part.
  • the at least one fastening means can in this case be designed such that a non-positive and / or positive mechanical connection with the support structure is possible.
  • the holding structure can in this case in particular a further component of a
  • the support structure may at least partially by a cooling device, for example, a wall portion of such
  • Cooling device to be formed.
  • the support structure may be at least partially formed, for example, by a housing portion of the evaporation device.
  • the fastening means may be arranged or formed, for example in a mounting portion of the head part, for example in the form of a recess and / or recess, in particular blind hole-like depression and / or recess.
  • the head part may have a partial section, in particular a (hollow) cylindrical partial section, wherein a maximum diameter of this holding section is greater than an outer diameter of the threaded section of the
  • Edge portion which extends from a first inner diameter to a further inner diameter of the subsection, the subsection depressions and / or recesses, in particular blind hole-like depressions, have.
  • the first inner diameter larger than the maximum
  • outside diameter of the threaded portion can be selected.
  • Inner diameter can be chosen to be less than or equal to the maximum diameter of the subsection.
  • the edge portion may be a protruding or projecting portion (of the subsection) of the head part.
  • the fastening means may in this case also designate a partial element for producing a mechanical connection, for example a further thread, an element of a latching or clamping connection or an element of a further mechanical connection.
  • the head part has at least one partial section, wherein an outer diameter of the head part increases in this partial section.
  • the partial section may extend along or parallel to the center line of the head part. In particular, the outer diameter in the vertical direction
  • the outer diameter can thereby increase along the or parallel to the center line jump.
  • the outer diameter can increase continuously along or parallel to the center line, in particular differentiable, preferably linear. With a linear enlargement of the outer diameter of the head part so have a part conical or partially hollow cone-shaped portion.
  • Thread section following section is not mandatory.
  • the enlargement can also occur between and / or in further sections of the head part along the center line of the head part.
  • the outer diameter can be greater than a maximum outer diameter of the receiving part. This allows good sealing properties during
  • the head part has at least one partial section with a predetermined outside diameter, wherein the predetermined one
  • Partial sections of the head part which is / are arranged along or parallel to the center line of the head part adjacent to the portion with the predetermined outer diameter.
  • the portion (s) disposed along or parallel to the center line adjacent to the portion having the predetermined outer diameter may be e.g. the subsection (s) to which the subsection with the
  • predetermined outer diameter along or parallel to the center line, in particular in the vertical direction follows and / or follows along or parallel to the center line, in particular in the vertical direction, on the portion with the predetermined outer diameter.
  • the predetermined outer diameter of the section may be greater than the / the outer diameter of all other sections of the head part.
  • the head part may in particular have a projecting or cantilevered portion.
  • This projecting section can, for example, form the stop edge explained in more detail below.
  • Outer diameter may for example be in a range between 20 mm and 400 mm.
  • This portion having the predetermined outer diameter advantageously allows for improved transfer of thermal energy into the header. This In turn, advantageously results in that a growth of the passage opening of the head part can be minimized by vaporization or completely prevented.
  • a spatial distance between the head part and the heating device e.g. a heater formed by at least one heating wire to be reduced in the portion having the predetermined outer diameter.
  • the heating device surrounds or encloses the head part.
  • the evaporation device comprises a heating device, wherein the heating device encloses the head part or at least a partial section of the head part.
  • the heating device may include or enclose a hollow cylindrical portion, in the internal volume of the head part can be arranged.
  • the head part can in this case be arranged over a holding structure in the evaporation device.
  • An inner diameter of the heater can be greater than a maximum
  • the inner diameter of the heater is preferably constant.
  • the head part may in this case have the previously described partial section with the predetermined outside diameter.
  • a (radial) distance between header and heater in at least a portion of a space between header and heater may be less than the pitch (s) in portions of the gap that are along or parallel to the centerline of the header adjacent to that portion of the gap is / are, be.
  • an insulating material in particular an insulating material other than air, for thermal insulation of the head part is arranged.
  • the insulating material may be disposed in the entire space.
  • Interspace in the region of the portion of the head portion with the predetermined outer diameter insulating material free This means that in this section of the Interspace no insulating material is arranged. For example, air can be arranged in this section. This improves the transmission of thermal energy in exactly this subarea.
  • the head part has a stop edge or forms a stop edge.
  • the stop edge limits this a Einbring- or
  • Screw-in depth of the head part relative to the receiving part can only be screwed so deep into the receiving part until the receiving part, in particular an end face of the receiving part, formed on one of the stop edge
  • the stop edge may be provided or arranged or formed on a lateral surface of the head part.
  • Stop edge are provided by a sudden increase in the diameter of the head part in a threaded portion to a diameter of the head part in a following section, wherein the following section along the center line, in particular in the vertical direction, the head part follows the threaded portion.
  • the diameter of the passage opening decreases along or parallel to the center line of the head part from an inlet side end of the head part
  • Diameter at the inlet end is greater than the diameter at the end of the first section, wherein the diameter at the outlet end is greater than the diameter at the end of the first section corresponding to the beginning of the remaining section.
  • the diameter along the center line of the head part can thus be reduced and / or increased.
  • the diameter in a first alternative can exclusively increase or remain constant, in a second alternative it can only be reduced or constant stay or in a third alternative both increase and decrease as well as remain constant.
  • the inlet-side end of the passage opening may in this case designate the opening of the passage opening facing the receiving volume in the screwed-on state.
  • the outlet end may refer to the end of the passage opening opposite the inlet end.
  • the diameter can in this case in particular change continuously, preferably differentiable.
  • a receiving part is provided with a receiving volume. Furthermore, a head part is provided with an outlet opening. Further, the receiving part is provided with a threaded portion for mechanical connection with the head part. Next, the headboard with a corresponding
  • Threaded portion provided for mechanical connection with the receiving part.
  • the receiving part is or is formed of pyrolytic boron nitride.
  • the method advantageously makes it possible to produce a device according to one of the previously explained embodiments.
  • the threaded portion can be produced by a vapor deposition of boron nitride on a corresponding negative mold.
  • the evaporation device can continue the
  • FIG. 1 is a side view of a device according to the invention for receiving evaporative
  • FIG. 2 shows a cross section through a device according to the invention in one
  • Fig. 5 shows a cross section through a head part in a further embodiment
  • FIG. 6 shows a cross section through an evaporation device.
  • FIG. 1 is a perspective view of a device 1 according to the invention for receiving not shown evaporating material is shown.
  • the device 1 has a receiving part 2 with a receiving volume 3 (see FIG. 2). Furthermore, the device 1 has a head part 4 with an outlet opening 5 (see FIG. 2).
  • the receiving part 2 has a receiving part-side threaded portion 6 which is formed as an internal thread.
  • the receiving part-side threaded portion 6 has a number of turns of four.
  • the head part 4 has a head part-side threaded portion 7 which is formed as an external thread.
  • the receiving part-side threaded portion 6 and the head part-side threaded portion 7 in this case form corresponding threaded portions, which allow a mechanical connection of the receiving part and the head part 4.
  • the receiving part 2 is formed of pyrolytic boron nitride. Further illustrated is a vertical direction z, which is oriented in Fig. 1 from bottom to top.
  • the receiving part-side threaded portion 6 is in this case arranged at an upper end of the receiving part 2 and the head part-side threaded portion 7 at a lower end of the head part 4.
  • vaporization material arranged in the receiving part 2 is heated and can by the receiving volume 3 and through the
  • Outlet opening 5 emerge from the receiving volume 3 towards the substrate.
  • FIG. 2 shows a cross section through an apparatus 1 according to the invention. Shown again is the receiving part 2 and the head part 4, which are screwed together in the state shown in Fig. 2. Here, the receiving part-side threaded portion 6 interacts with the head portion side threaded portion. 7
  • the receiving part 2 has a first hollow cylindrical portion 8 and a bottom portion 9.
  • the bottom portion 9 is here formed hemispherical and closes the first hollow cylindrical portion 8 at a first end of the hollow cylindrical portion 8, which may also be referred to as the lower end, from.
  • a lower end denotes a lower end of the hollow cylindrical section 8 with respect to a vertical direction z.
  • the vertical direction z is oriented from bottom to top.
  • the hollow cylindrical portion 8 is open.
  • the receiving part-side threaded portion 6 is arranged on a vertical direction z upper end of the receiving part 2, in particular of the hollow cylindrical portion 8.
  • the receiving part-side threaded portion 6 in this case forms part of the lateral surface of the hollow cylindrical portion 8.
  • Outer surface of the hollow cylindrical portion 8 in the region of the receiving part side threaded portion 6 surveys and depressions on the receiving part side Form threaded portion 6 or part thereof. This advantageously makes possible a thin-walled design of the receiving part-side threaded section 6.
  • the passage opening 5 is formed in the cross-section carafe neck. This can mean that one
  • the diameter can remain constant in a first section and can be reduced in a second section, which adjoins the first section in the vertical direction z, until a second, in particular minimum, diameter is reached.
  • the diameter may increase again, e.g. to a further diameter (outlet diameter) which forms a diameter of the outlet opening 5 at a further end of the head part 4, which may also be referred to as an upper end. This can be the other
  • Fig. 3 is a cross section through the receiving part 2 shown in Fig. 1 is shown.
  • the first hollow cylindrical section 8 has a first inner diameter ID1 2.
  • a further hollow cylindrical portion 10 connects, which has a further inner diameter ID2 2, wherein the further inner diameter ID2 2 may be greater than the first inner diameter ID1 2.
  • the receiving part-side threaded section 6 is formed as a round thread.
  • a total height H_2 of the receiving part 2 which may for example be in a range of 250 mm to 600 mm.
  • FIG. 4 shows a cross section through the head part 4 shown in FIG.
  • the first diameter ID1 4 of the outlet opening is hereby smaller than the further inner diameter ID2 2 of the further hollow cylindrical section 10 shown in FIG of the receiving part 2.
  • a difference between the minimum outer diameter ADmin_7 and the first diameter ID1 4 of the outlet opening 5 in this case forms a minimum wall thickness of the head part 4. Further shown is a maximum
  • the head part 4 in this case comprises the head part side threaded portion 7, a first hollow cylindrical portion 27 and a further hollow cylindrical portion 28, wherein in the vertical direction z of the first hollow cylindrical portion 27 connects to the head part side threaded portion 7 and the further hollow cylindrical portion 28 to the first hollow cylindrical portion 27 ,
  • An outer diameter of the first hollow cylindrical portion 27 is larger than the maximum outer diameter ADmax_7 of the head portion side threaded portion 7.
  • the head part 4 forms stop edges 12 and surfaces for the receiving part 2,
  • An outer diameter of the further hollow cylindrical portion 28 is again smaller than the outer diameter of the first hollow cylindrical portion 27 and smaller than the first diameter ID1 4 of the outlet opening 5.
  • Outer diameter of the further hollow cylindrical portion 28 is greater than the minimum inner diameter of the outlet opening. 5
  • Fig. 5 shows a cross section through a head part 4 in a further embodiment.
  • the head part 4 shown in FIG. 5 has a holding section 13 for holding the head part 4 at one not
  • the holding portion 13 in this case has a hollow cylindrical portion 14 and forms this. Furthermore, the holding section 13 has an annular section 16 or forms it. About the annular portion 16, an upper end of the head part 4 are connected to an upper end of the hollow cylindrical portion 14. In particular, the annular portion 16 can the above-described first hollow cylindrical portion 27 of the head part 4 with the
  • Hohizylindriform portion 14 of the holding portion 13 connect.
  • the annular portion 16 and the hollow cylindrical portion 14 may be formed integrally.
  • headboard 4 and holding portion 13 may be integrally formed.
  • the hollow cylindrical portion 14 is in this case at a first end face, which may also be referred to as the lower end face, open.
  • the annular section 16 in this case forms an end face of the hollow cylindrical section 14 on a further end face, which may also be referred to as the upper end side.
  • the hollow cylindrical portion 14 has a closed further end.
  • the head part 4 or the head part structure shown in FIG. 4 is here in one
  • Inner volume of the hollow cylindrical portion 14 is disposed and protrudes at the first end of the hollow cylindrical portion 14 from this inner volume.
  • An inner diameter of the hollow cylindrical portion 14 is greater than a maximum outer diameter of the head part 4.
  • the head part 4 forms with the holding portion 13 a blind hole-like receiving opening 15 in the form of an annular recess, which can serve to receive portions of a support structure.
  • the annular gap blind hole-like receiving opening 15 is stepped, wherein an inner diameter of the hollow cylindrical portion 14 along the vertical direction z jump-like and / or steadily, in particular linear, change, in particular reduce, can.
  • Fig. 6 shows a cross section through a vertical direction z upper end of a
  • the evaporation device comprises a
  • Inventive device 1 for receiving evaporable material with a head part 4, which is formed according to the embodiment shown in Fig. 5. It is shown that the head part 4 is placed on an upper portion 17 of the evaporation device.
  • the evaporation device in this case comprises an at least partially hohizylinder-shaped heating device 18, which comprises a large part of the head part 4. Between the heating device 18 and the head part 4, at least in sections, an unspecified insulating material can be arranged.
  • the evaporation device comprises a hollow cylindrical insulating space 19 and a hollow cylinder-shaped cooling device 20, wherein the insulating space 19 is arranged between the cooling device 20 and the heating device 18.
  • Insulating space 19 denotes a cavity, e.g. a vacuumized cavity.
  • the insulating space 19 is enclosed by a hollow cylindrical insulating cylinder 22.
  • the cooling device 20 in turn consists of an outer cylinder and an inner cylinder, wherein between the inner and the outer cylinder, a cooling fluid can be arranged or flow.
  • this retaining ring 21 on the one hand forms a stop element for the insulating cylinder 22 and / or the cooling device 20 and on the other hand another hollow-cylindrical insulating sheet 23 jammed.
  • the insulating sheet 23 protrudes with its upper end into an annular groove in the annular portion 16.
  • the retaining ring 21 may in this case comprise an inner ring and an outer ring, wherein the outer ring rests against an outer circumferential surface of the insulating sheet 23 and the inner ring on an inner circumferential surface of the insulating sheet 23 , Further, the retaining ring 21 may comprise connecting webs for connecting the inner ring and the outer ring, which extend through slots in the insulating sheet 23, wherein the slots are arranged at the lower end of the insulating sheet 23.
  • the retaining ring 21 can be tensioned by a retaining screw 24.
  • the hollow cylindrical portion 14 is supported in particular via the retaining ring 21 and the retaining screw 24 and a support member 26 on the cooling device 20, in particular on an upper cooling jacket element 25 from.
  • the cooling jacket element 25 in this case closes off the cavity enclosed between the outer and inner cylinders of the cooling device 20.
  • a hanging attachment of the device 1 according to the invention is made possible.
  • this type of hanging attachment to parts of the evaporator device is only possible because the formation of the receiving part-side threaded portion as stiffening element sufficient mechanical strength of the device 1, in particular of the receiving part 2, guaranteed.
  • ID1_2 first inner diameter of the receiving part
  • ID2 2 further inner diameter of the receiving part
  • ID1 4 first inner diameter of the head part
  • ADmin_7 minimum outside diameter of the head part side threaded portion ADmax_7 maximum outside diameter of the head part side threaded portion

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

L'invention concerne un dispositif destiné à recevoir une matière à vaporiser ; le dispositif (1) comprend une partie de réception (2) ayant un volume de réception (3) ; le dispositif (1) comprend une partie de tête (4) pourvue d'une ouverture de sortie (5) ; la partie de réception (2) comporte une partie filetée (6) destinée à être reliée mécaniquement à la partie de tête (4) ; la partie de tête (4) comporte une partie filetée correspondante (7) destinée à être reliée mécaniquement à la partie de réception (2) ; la partie de réception (2) est formée à partir de nitrure de bore pyrolytique ; l'invention concerne également un procédé de fabrication d'un tel dispositif (1).
EP15784684.1A 2014-10-23 2015-10-23 Creuset de vaporisation Withdrawn EP3209810A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014221561.7A DE102014221561A1 (de) 2014-10-23 2014-10-23 Vorrichtung zur Aufnahme von Verdampfungsgut und Verfahren zur Herstellung einer Vorrichtung
PCT/EP2015/074569 WO2016062845A1 (fr) 2014-10-23 2015-10-23 Creuset de vaporisation

Publications (1)

Publication Number Publication Date
EP3209810A1 true EP3209810A1 (fr) 2017-08-30

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP15784684.1A Withdrawn EP3209810A1 (fr) 2014-10-23 2015-10-23 Creuset de vaporisation

Country Status (4)

Country Link
EP (1) EP3209810A1 (fr)
CN (1) CN107109627A (fr)
DE (1) DE102014221561A1 (fr)
WO (1) WO2016062845A1 (fr)

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JPS63190163A (ja) * 1987-01-31 1988-08-05 Sumitomo Electric Ind Ltd 蒸発源るつぼにおける気密構造

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US3572672A (en) * 1968-11-22 1971-03-30 Rca Corp Vacuum evaporation apparatus
US4700660A (en) * 1984-06-12 1987-10-20 Kievsky Politekhnichesky Institut Evaporator for depositing films in a vacuum
JPS6353259A (ja) 1986-08-22 1988-03-07 Mitsubishi Electric Corp 薄膜形成方法
JPH02290963A (ja) 1989-04-28 1990-11-30 Matsushita Electric Ind Co Ltd 蒸着用るつぼ
JPH083748A (ja) * 1994-06-14 1996-01-09 Seiko Instr Inc 蒸着用坩堝およびその製造方法
TWI330997B (en) 2005-12-16 2010-09-21 Doosan Mecatec Co Ltd Crucible assembly for deposition of organic thin film
US8747554B2 (en) 2006-06-20 2014-06-10 Momentive Performance Materials Inc. Multi-piece ceramic crucible and method for making thereof
KR100980729B1 (ko) 2006-07-03 2010-09-07 주식회사 야스 증착 공정용 다중 노즐 증발원
WO2010019213A2 (fr) 2008-08-11 2010-02-18 Veeco Instruments Inc. Sources de dépôt sous vide ayant des orifices d'effusion chauffés
US8512806B2 (en) 2008-08-12 2013-08-20 Momentive Performance Materials Inc. Large volume evaporation source
CN101619439A (zh) * 2009-07-23 2010-01-06 东南大学 有机材料纳米团簇热蒸发制备方法

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Publication number Priority date Publication date Assignee Title
JPS63190163A (ja) * 1987-01-31 1988-08-05 Sumitomo Electric Ind Ltd 蒸発源るつぼにおける気密構造

Non-Patent Citations (1)

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Title
See also references of WO2016062845A1 *

Also Published As

Publication number Publication date
WO2016062845A1 (fr) 2016-04-28
DE102014221561A1 (de) 2016-04-28
CN107109627A (zh) 2017-08-29

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