EP3072994A1 - Dispositif d'inondation pour une ligne de processus galvanique horizontal ou chimique par voie humide pour le dépôt d'un métal sur un substrat - Google Patents

Dispositif d'inondation pour une ligne de processus galvanique horizontal ou chimique par voie humide pour le dépôt d'un métal sur un substrat Download PDF

Info

Publication number
EP3072994A1
EP3072994A1 EP15161394.0A EP15161394A EP3072994A1 EP 3072994 A1 EP3072994 A1 EP 3072994A1 EP 15161394 A EP15161394 A EP 15161394A EP 3072994 A1 EP3072994 A1 EP 3072994A1
Authority
EP
European Patent Office
Prior art keywords
flooding
guiding element
substrate
substrate guiding
treated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15161394.0A
Other languages
German (de)
English (en)
Other versions
EP3072994B1 (fr
Inventor
Stefan Grüßner
Wolfgang Richert
Christian Thein
Norbert Walliser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atotech Deutschland GmbH and Co KG
Original Assignee
Atotech Deutschland GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atotech Deutschland GmbH and Co KG filed Critical Atotech Deutschland GmbH and Co KG
Priority to EP15161394.0A priority Critical patent/EP3072994B1/fr
Priority to CN201680018314.1A priority patent/CN107636210B/zh
Priority to KR1020177030116A priority patent/KR102056528B1/ko
Priority to JP2017550763A priority patent/JP6748106B2/ja
Priority to PCT/EP2016/055971 priority patent/WO2016156067A1/fr
Priority to TW105109546A priority patent/TWI685589B/zh
Publication of EP3072994A1 publication Critical patent/EP3072994A1/fr
Application granted granted Critical
Publication of EP3072994B1 publication Critical patent/EP3072994B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00—Electroplating characterised by the article coated
    • C25D7/06—Wires; Strips; Foils
    • C25D7/0614—Strips or foils
    • C25D7/0621—In horizontal cells
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1619—Apparatus for electroless plating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/08—Rinsing

Definitions

  • the present invention relates to a flooding device for a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated.
  • the present invention is further directed to a treating module of a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated.
  • the substrates to be treated have been relatively thick, stiff and heavy compared to the presence.
  • the market requires more and more in consequence of the on-going worldwide technical miniaturization in the printed circuit board area devices and process lines, which can also safely treat substrates to be treated, which are much thinner than anything, which has been processed up to now.
  • the weight of each individual substrate to be treated is largely reduced while the flexibility of the substrate to be treated is largely increased.
  • a flooding device having all features of claim 1.
  • inventive device having all features of claim 1.
  • inventive device comprises a treating module of a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated comprising at least one pair of oppositely arranged such flooding devices.
  • inventive treating module are protected in dependent claims 13 to 15.
  • the present invention accordingly provides a flooding device for a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated, wherein the flooding device comprises at least a flooding element and at least a first substrate guiding element, wherein said flooding element is mechanically connected to the at least first substrate guiding element, and wherein the first substrate guiding element is spatially arranged on the entry side of the flooding element.
  • the inventive flooding device avoids that thin flexible substrates run between individual transport elements, which are commonly arranged above and below of the transport level of the process line.
  • the inventive flooding device avoids that at the most dangerous site, namely around the flooding device itself, the flexible thin substrates to be treated will flow upwards or downwards between the individual transport elements directly after having passed the flooding devices.
  • inventive device can be easily installed in already existing process lines without any large effort or cost.
  • the term "flooding device” refers to a device, which is required to provide a process liquid into a treating module of a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated.
  • substrate guiding element refers to an element, which is required, intended or supposed to support the transportation of a substrate to be treated in such a way that the substrate to be treated will not run between two adjacent individual transport elements of the horizontal process line. Conclusively, such a substrate guiding element serves the purpose of avoiding damages of the substrates to be treated during passing the horizontal process line.
  • the term "entry side” refers to said side of a flooding device of a horizontal process line, wherein a substrate to be treated will arrive in transport direction in the transportation area at the flooding device before entering the flooding device through which the substrate to be treated will run subsequently.
  • exit side refers to said side of a flooding device of a horizontal process line, wherein a substrate to be treated will arrive in transport direction in the transportation area at the flooding device after leaving the flooding device through which the substrate to be treated has been run before.
  • the flooding device further comprises at least a second substrate guiding element, wherein the flooding element is mechanically connected to the at least second substrate guiding element, and wherein the second substrate guiding element is spatially arranged on the exit side of the flooding element.
  • the first substrate guiding element and the second substrate guiding element comprise each a plurality of protrusions, wherein the protrusions of the first substrate guiding element are extending in axial direction from the flooding element against the transport direction of the substrates to be treated, and wherein the protrusions of the second substrate guiding element are extending in axial direction from the flooding element in transport direction of the substrates to be treated.
  • the plurality of protrusions can be extending in axial direction in a strictly linear manner or more or less bent up in order to simplify the substrates to be treated to enter or to pass, in particular to enter, the respective flooding device and flooding element.
  • a bent down of the protrusions would be disadvantageous due to an increased risk of damaging the respective substrates to be treated, which will enter or leave, in particular to enter, the flooding element.
  • the plurality of protrusions of the first substrate guiding element have longer axial dimensions against the transport direction of the substrate to be treated than the plurality of protrusions of the second substrate guiding element in transport direction of the substrate to be treated.
  • the plurality of protrusions on both sides of the flooding element can be of the same length or other spoken of the same axial dimension.
  • Entering or leaving of the flooding elements in the sense of the present invention means of course the entering of the substrate to be treated into the area between the oppositely arranged two individual flooding elements of a treating module as it can be seen exemplary in the enclosed Figures 1 , 2 , 3 , 6 , 7 , 9 , and 10 .
  • each individual protrusion of the plurality of protrusions of the first substrate guiding element and of the second substrate guiding element is directly connected to the flooding element and works independently from the adjacent protrusions.
  • first substrate guiding element and/or the second substrate guiding element each comprises at least one section of at least two adjacent protrusions, which are mechanically connected by at least a mechanical connecting element.
  • Each section of connected protrusions on each side of the flooding element can be individually adapted to customer needs, such as specific substrate materials, thicknesses or compositions.
  • Such sections offer the advantage of having more flexibility for adapting the first and/or second substrate guiding element in dependence of the process line conditions.
  • all protrusions of the first substrate guiding element and/or all protrusions of the second substrate guiding element are mechanically connected by at least a mechanical connecting element on the respective side of the flooding element.
  • such a case will offer on at least one side of the flooding element a kind of grating structure of the respective first and/or second substrate guiding element.
  • the first and/or second substrate guiding element can be easily adapted to existing flooding elements of already running process lines, which are making use of wheel axis as transport elements. An expensive modification of the transport system can be thereby avoided.
  • the sole requirement is the adaption of the free space between the adjacent protrusions of the first and/or second substrate guiding element to the size of the wheels of the wheel axis.
  • Wheel axis and rollers are both well-known individual transport elements of the prior art, which are commonly arranged in form of at least a lower series of transport elements below the transportation level of the substrates to be treated. Very often an analogues upper series of such individual transport elements is also arranged above the transportation level of the substrates to be treated.
  • the flooding element further comprises at least a third substrate guiding element, which is connecting the first substrate guiding element from the entry side of the flooding element with the second substrate guiding element of the exit side of the flooding element; wherein the first, second and third substrate guiding element form an attachment part, which is mechanically connected in one piece to the flooding element.
  • the flooding element comprises at least a first step and a second step on the flooding element surface, which is directed to the transport pathway of the substrate to be treated, and wherein the process liquid flows out of said flooding element surface.
  • the first substrate guiding element and/or the second substrate guiding element is/are a continuous piece, such as a sheet or plate, wherein the first substrate guiding element is extending in axial direction from the flooding element against the transport direction of the substrates to be treated, and wherein the second substrate guiding element is extending in axial direction from the flooding element in transport direction of the substrates to be treated.
  • the first substrate guiding element has longer axial dimensions against the transport direction of the substrate to be treated than the second substrate guiding element in transport direction of the substrate to be treated.
  • the present invention also relates to a treating module of a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated characterized in that the treating module comprises at least one pair of oppositely arranged such inventive flooding devices as described above, wherein each flooding device comprises at least a flooding element and at least a first substrate guiding element, wherein said flooding element is mechanically connected to the at least first substrate guiding element, and wherein the first substrate guiding element is spatially arranged on the entry side of the flooding element.
  • Such a pair of flooding devices generates a defined flow of treatment liquid, which enters the respective treating module thereby.
  • Said flow of treatment liquid can cause problems if the substrate to be treated is thin and flexible.
  • the substrates to be treated will be influenced by the generated treatment liquid flow and will leave the desired transportation level by running between the first transport elements, which are in front of or behind the respective flooding device. This problem of the prior art can be solved by said treating module.
  • each flooding element comprises at least a first step and a second step on the flooding element surface, which is directed to the transport pathway of the substrate to be treated, and wherein the process liquid flows out of said flooding element surface.
  • each flooding device further comprises at least a second substrate guiding element, wherein the flooding element is mechanically connected to the at least second substrate guiding element, and wherein the second substrate guiding element is spatially arranged on the exit side of the flooding element; and wherein each flooding element further comprises at least a third substrate guiding element, which is connecting the first substrate guiding element from the entry side of the flooding element with the second substrate guiding element of the exit side of the flooding element; wherein the first, second and third substrate guiding element form an attachment part, which is mechanically connected in one piece to the flooding element.
  • the first substrate guiding element and the second substrate guiding element comprise each a plurality of protrusions, wherein the protrusions of the first substrate guiding element are extending in axial direction from each flooding element against the transport direction of the substrates to be treated, and wherein the protrusions of the second substrate guiding element are extending in axial direction from each flooding element in transport direction of the substrates to be treated; wherein all protrusions of the first substrate guiding element and/or all protrusions of the second substrate guiding element are mechanically connected by at least a mechanical connecting element on the respective side of the flooding element.
  • the present invention thus addresses the problem of transporting thin (down to 25 micrometers) and flexible substrates to be treated through a horizontal process line without damaging them.
  • the flexible thin substrates to be treated cannot more flow upwards or downwards between the individual transport elements directly after having passed the flooding devices.
  • a first embodiment is shown in the following Figures 1 to 5 .
  • Figure 1 shows a schematic side view of the inventive treating module 1 of a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated wherein the treating module 1 comprises one pair of oppositely arranged such inventive flooding devices in accordance with a first embodiment of the present invention.
  • each of the two shown flooding devices comprises a flooding element 2 and a first substrate guiding element 5, wherein said flooding element 2 is mechanically connected to the first substrate guiding element 5, and wherein the first substrate guiding element 5 is spatially arranged on the entry side 8 of the flooding element 2.
  • Each shown flooding device further comprises a second substrate guiding element 6, wherein the flooding element 2 is mechanically connected to the second substrate guiding element 6, and wherein the second substrate guiding element 6 is spatially arranged on the exit side 9 of the flooding element 2.
  • first substrate guiding element 5 and the second substrate guiding element 6 comprise each a plurality of protrusions, wherein the protrusions of the first substrate guiding element 5 are extending in axial direction from the flooding element 2 against the transport direction of the substrates to be treated.
  • the protrusions of the second substrate guiding element 6 are extending in axial direction from the flooding element 2 in transport direction of the substrates to be treated.
  • the plurality of protrusions of the first substrate guiding element 5 have longer axial dimensions against the transport direction of the substrate to be treated than the plurality of protrusions of the second substrate guiding element 6 in transport direction of the substrate to be treated.
  • each individual protrusion of the plurality of protrusions of the second substrate guiding element 6 is directly connected to the flooding element 2 and works independently from the adjacent protrusions.
  • Each flooding element 2 shown in Figure 1 further comprises a third substrate guiding element 4, which is connecting the first substrate guiding element 5 from the entry side 8 of the flooding element 2 with the second substrate guiding element 6 of the exit side 9 of the flooding element 2; wherein the first 5, second 6, and third 4 substrate guiding element form an attachment part, which is mechanically connected in one piece to the flooding element 2.
  • the flooding element 2 comprises a first step 7a and a second step 7b on the flooding element 2 surface, which is directed to the transport pathway of the substrate to be treated, and wherein the process liquid flows out of said flooding element 2 surface.
  • the transport elements 3 of the first preferred embodiment are wheel axis.
  • Figure 2 shows a schematic perspective side view of the inventive treating module comprising one pair of oppositely arranged inventive flooding devices in accordance with the first embodiment of the present invention shown in Figure 1 .
  • a fastening element 10 which serves the purpose of detachably connecting the attachment part comprising the first 5, second 6, and third 4 substrate guiding element to the respective flooding element 2.
  • an attachment part can be also used as reinforcement for providing an increased overall stiffness of the flooding device, if the flooding element is manufactured of polymeric material, such as polypropylene, polyvinylchloride or polyethylene.
  • the attachment part would be made of metal or metal alloys, such as stainless steel, titanium, or nickel alloys.
  • Such a combination of a plastic flooding element 2 and an attachment part of metal is exemplarily advantageous in rinsing modules of a horizontal process line.
  • a second embodiment is shown in the following Figures 6 to 8 .
  • Figure 6 shows a schematic side view of the inventive treating module 1' of a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated wherein the treating module 1' comprises one pair of oppositely arranged such inventive flooding devices in accordance with a second embodiment of the present invention.
  • each of the two shown flooding devices comprises a flooding element 2' and a first substrate guiding element 5', wherein said flooding element 2' is mechanically connected to the first substrate guiding element 5', and wherein the first substrate guiding element 5' is spatially arranged on the entry side 8' of the flooding element 2'.
  • Each shown flooding device further comprises a second substrate guiding element 6', wherein the flooding element 2' is mechanically connected to the second substrate guiding element 6', and wherein the second substrate guiding element 6' is spatially arranged on the exit side 9' of the flooding element 2'.
  • first substrate guiding element 5' and the second substrate guiding element 6' comprise each a plurality of protrusions, wherein the protrusions of the first substrate guiding element 5' are extending in axial direction from the flooding element 2' against the transport direction of the substrates to be treated.
  • the protrusions of the second substrate guiding element 6' are extending in axial direction from the flooding element 2' in transport direction of the substrates to be treated.
  • the transport elements 3' of the second preferred embodiment are wheel axis.
  • this second embodiment is preferably used, if the treating module 1' requires the application of higher temperatures inside of the respective treating module 1' or if it requires the application of aggressive or oxidizing chemicals, such as permanganate.
  • the entire flooding device will be made of metal, preferably of stainless steel, in order to provide on the one hand a good chemical resistance of the material of the flooding device and on the other hand a sufficient mechanical stiffness to avoid material distortions. Such distortions are exemplarily taking place if flooding devices made of plastic materials are getting used at higher process liquid temperatures.
  • Figure 7 shows a schematic perspective side view of the inventive treating module 1' comprising one pair of oppositely arranged inventive flooding devices in accordance with the second embodiment of the present invention shown in Figure 6 .
  • all protrusions of the first substrate guiding element 5' and all protrusions of the second substrate guiding element 6' are mechanically connected by a mechanical connecting element 11' on the respective side of the flooding element 2'.
  • Figure 8 shows a schematic perspective top view of an individual inventive flooding device in accordance with the second embodiment of the present invention shown in Figure 6 .
  • a third embodiment is shown in the following Figures 9 to 11 .
  • Figure 9 shows a schematic side view of the inventive treating module 1" of a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated wherein the treating module 1 comprises one pair of oppositely arranged such inventive flooding devices in accordance with a third embodiment of the present invention.
  • each of the two shown flooding devices comprises a flooding element 2" and a first substrate guiding element 5", wherein said flooding element 2" is mechanically connected to the first substrate guiding element 5", and wherein the first substrate guiding element 5" is spatially arranged on the entry side 8" of the flooding element 2".
  • Each shown flooding device further comprises a second substrate guiding element 6", wherein the flooding element 2" is mechanically connected to the second substrate guiding element 6", and wherein the second substrate guiding element 6" is spatially arranged on the exit side 9" of the flooding element 2".
  • first substrate guiding element 5" and the second substrate guiding element 6" comprise each a plurality of protrusions, wherein the protrusions of the first substrate guiding element 5" are extending in axial direction from the flooding element 2" against the transport direction of the substrates to be treated.
  • the protrusions of the second substrate guiding element 6" are extending in axial direction from the flooding element 2" in transport direction of the substrates to be treated.
  • the flooding element 2" comprises a first step 7a' and a second step 7b' on the flooding element 2" surface, which is directed to the transport pathway of the substrate to be treated, and wherein the process liquid flows out of said flooding element 2" surface.
  • the transport elements 3" of the first preferred embodiment are rollers, wherein each roller comprises a plurality of recesses 13. Said recesses serve the purpose of being in conjunction with a corresponding protrusion in order to minimize the amount of process liquid, which can flow upwards or downwards (depending if the recess, the roller with the recesses, and the corresponding protrusions are arranged above or below the transportation level of the substrates to be treated).
  • the flooding device provides a reinforcement element 12 for the flooding element 2", which can be necessary to increase the stiffness, if the flooding element 2" is made of plastics.
  • a dam roller 14 is also shown for illustrative purposes.
  • Figure 10 shows a schematic perspective side view of the inventive treating module comprising one pair of oppositely arranged inventive flooding devices in accordance with the third embodiment of the present invention shown in Figure 9 .
  • each individual protrusion of the plurality of protrusions of the first substrate guiding element 5" and of the second substrate guiding element 6" is directly connected to the flooding element 2" and works independently from the adjacent protrusions.
  • Figure 11 shows a schematic perspective top view of an individual inventive flooding device in accordance with the third embodiment of the present invention shown in Figure 9 .
EP15161394.0A 2015-03-27 2015-03-27 Dispositif d'inondation pour une ligne de processus galvanique horizontal ou chimique par voie humide pour le dépôt d'un métal sur un substrat Active EP3072994B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
EP15161394.0A EP3072994B1 (fr) 2015-03-27 2015-03-27 Dispositif d'inondation pour une ligne de processus galvanique horizontal ou chimique par voie humide pour le dépôt d'un métal sur un substrat
CN201680018314.1A CN107636210B (zh) 2015-03-27 2016-03-18 用于在衬底上进行金属沉积的水平电流或湿式化学工艺线的放流装置
KR1020177030116A KR102056528B1 (ko) 2015-03-27 2016-03-18 기판에서 금속 디포지션을 위한 수평 갈바닉 또는 습식-화학 프로세스 라인용 플러딩 디바이스
JP2017550763A JP6748106B2 (ja) 2015-03-27 2016-03-18 基板への金属付着のための水平方向のガルバニックまたは湿式化学プロセスラインのためのフラッディング装置
PCT/EP2016/055971 WO2016156067A1 (fr) 2015-03-27 2016-03-18 Dispositif d'injection pour une ligne horizontale de traitement galvanique ou chimique par voie humide ligne pour le dépôt de métal sur un substrat
TW105109546A TWI685589B (zh) 2015-03-27 2016-03-25 用於基板上金屬沉積之水平電流或濕式化學生產線之放流裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP15161394.0A EP3072994B1 (fr) 2015-03-27 2015-03-27 Dispositif d'inondation pour une ligne de processus galvanique horizontal ou chimique par voie humide pour le dépôt d'un métal sur un substrat

Publications (2)

Publication Number Publication Date
EP3072994A1 true EP3072994A1 (fr) 2016-09-28
EP3072994B1 EP3072994B1 (fr) 2018-08-08

Family

ID=52737006

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15161394.0A Active EP3072994B1 (fr) 2015-03-27 2015-03-27 Dispositif d'inondation pour une ligne de processus galvanique horizontal ou chimique par voie humide pour le dépôt d'un métal sur un substrat

Country Status (6)

Country Link
EP (1) EP3072994B1 (fr)
JP (1) JP6748106B2 (fr)
KR (1) KR102056528B1 (fr)
CN (1) CN107636210B (fr)
TW (1) TWI685589B (fr)
WO (1) WO2016156067A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3375911A1 (fr) * 2017-03-16 2018-09-19 ATOTECH Deutschland GmbH Module de dépôt galvanique d'une ligne de dépôt galvanique horizontal pour un dépôt électrolytique sur un substrat

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0054302A1 (fr) * 1980-12-16 1982-06-23 Nippon Steel Corporation Procédé et appareillage pour le traitement électrolytique en continu d'une bande métallique utilisant des électrodes insolubles horizontales
EP0520324A1 (fr) * 1991-06-26 1992-12-30 Gebr. Schmid GmbH & Co. Appareils pour traiter des objets de panneau, notamment des plaques de circuit
DE19717511A1 (de) * 1997-04-25 1998-10-29 Atotech Deutschland Gmbh Verfahren zur spezifischen naßchemischen Behandlung von flachem Behandlungsgut in Durchlaufanlagen
EP0894561A2 (fr) * 1997-07-31 1999-02-03 Teledyne Industries, Inc. Système de brasage horizontal avec un recouvrement d'huile

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5718172B2 (ja) * 2011-06-15 2015-05-13 丸仲工業株式会社 表面処理装置における薄板状被処理物の水平搬送装置、及びこの水平搬送装置のクランプ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0054302A1 (fr) * 1980-12-16 1982-06-23 Nippon Steel Corporation Procédé et appareillage pour le traitement électrolytique en continu d'une bande métallique utilisant des électrodes insolubles horizontales
EP0520324A1 (fr) * 1991-06-26 1992-12-30 Gebr. Schmid GmbH & Co. Appareils pour traiter des objets de panneau, notamment des plaques de circuit
DE19717511A1 (de) * 1997-04-25 1998-10-29 Atotech Deutschland Gmbh Verfahren zur spezifischen naßchemischen Behandlung von flachem Behandlungsgut in Durchlaufanlagen
EP0894561A2 (fr) * 1997-07-31 1999-02-03 Teledyne Industries, Inc. Système de brasage horizontal avec un recouvrement d'huile

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3375911A1 (fr) * 2017-03-16 2018-09-19 ATOTECH Deutschland GmbH Module de dépôt galvanique d'une ligne de dépôt galvanique horizontal pour un dépôt électrolytique sur un substrat

Also Published As

Publication number Publication date
JP2018511703A (ja) 2018-04-26
CN107636210B (zh) 2019-11-12
KR20170131518A (ko) 2017-11-29
EP3072994B1 (fr) 2018-08-08
TWI685589B (zh) 2020-02-21
KR102056528B1 (ko) 2019-12-16
WO2016156067A1 (fr) 2016-10-06
CN107636210A (zh) 2018-01-26
TW201706462A (zh) 2017-02-16
JP6748106B2 (ja) 2020-08-26

Similar Documents

Publication Publication Date Title
EP3072994A1 (fr) Dispositif d'inondation pour une ligne de processus galvanique horizontal ou chimique par voie humide pour le dépôt d'un métal sur un substrat
US10407793B2 (en) Substrate holder for vertical galvanic metal deposition
ATE403623T1 (de) Vorrichtung und verfahren für das ausrichten eines aus einem zumindest im bereich der unteren aussenkanten leicht deformierbaren guts auf einer transportunterlage
JP6403739B2 (ja) 表面処理装置
CN204874792U (zh) 垂直连续电镀装置
EP2886685A1 (fr) Dispositif destiné à accumuler un liquide de traitement à l'intérieur d'une zone de traitement d'un appareil de traitement horizontal ou galvanique pour un dépôt métallique par voie chimique humide
CN102333680B (zh) 线束安装结构
JP6325787B2 (ja) 化学処理装置
EP3221497B1 (fr) Dispositif de dépôt galvanique d'une ligne de traitement de dépôt galvanique horizontal pour un dépôt électrolytique et son utilisation
JP2010179987A (ja) 表面処理システムおよび表面処理方法
EP3375911A1 (fr) Module de dépôt galvanique d'une ligne de dépôt galvanique horizontal pour un dépôt électrolytique sur un substrat
KR20200025259A (ko) 열경화성 smc 복합섬유 기반 선박용 케이블 트레이
WO2014173693A1 (fr) Dispositif et procédé de traitement chimique en milieu humide de matériau plat à traiter
KR102113690B1 (ko) Pcb기판 무전해 바스켓 장치
TW201531584A (zh) 在用於電流或溼式化學金屬沉積之水平處理裝置之處理區域內積聚處理液之裝置
JP6048357B2 (ja) 化学処理装置
EP2854490A1 (fr) Procédé et appareil pour un traitement électrochimique ou chimique par voie humide
KR102433121B1 (ko) 기판 처리 장치
CN107841784A (zh) 印刷电路板电镀阴极遮蔽装置
CN219394775U (zh) 光伏接头用固定支架
KR20220155656A (ko) 배관 고정 장치
CN203620395U (zh) 楔形丝筛网装置
WO2001030481A1 (fr) Dispositif de filtrage pour systeme d'egouts et procede de filtrage des eaux parasitaires dans un systeme d'egouts
DE20117852U1 (de) Kantenschutzwinkel für die Aufbringung auf den Kantenbereich empfindlicher Transportgüter wie Papierrollen o.dgl.
JP2006274410A (ja) 鋼帯の電気めっき装置

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20170324

RBV Designated contracting states (corrected)

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

17Q First examination report despatched

Effective date: 20170614

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

RIC1 Information provided on ipc code assigned before grant

Ipc: C23C 18/16 20060101ALN20180223BHEP

Ipc: C25D 21/08 20060101ALN20180223BHEP

Ipc: C25D 7/06 20060101AFI20180223BHEP

Ipc: C25D 17/00 20060101ALI20180223BHEP

RIC1 Information provided on ipc code assigned before grant

Ipc: C25D 21/08 20060101ALN20180315BHEP

Ipc: C25D 17/00 20060101ALI20180315BHEP

Ipc: C23C 18/16 20060101ALN20180315BHEP

Ipc: C25D 7/06 20060101AFI20180315BHEP

INTG Intention to grant announced

Effective date: 20180326

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

Ref country code: AT

Ref legal event code: REF

Ref document number: 1027128

Country of ref document: AT

Kind code of ref document: T

Effective date: 20180815

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 602015014501

Country of ref document: DE

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20180808

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20181109

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20181108

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20181108

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180808

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180808

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180808

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20181208

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180808

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180808

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180808

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180808

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180808

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180808

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180808

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180808

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180808

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180808

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180808

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 602015014501

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180808

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180808

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180808

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20190509

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180808

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180808

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20190327

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190327

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20190331

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190331

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190327

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190331

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190327

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190331

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190331

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180808

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190327

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20181208

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180808

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20150327

REG Reference to a national code

Ref country code: AT

Ref legal event code: UEP

Ref document number: 1027128

Country of ref document: AT

Kind code of ref document: T

Effective date: 20180808

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180808

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: AT

Payment date: 20230322

Year of fee payment: 9

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: AT

Payment date: 20240321

Year of fee payment: 10

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20240320

Year of fee payment: 10