Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
  • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
  • B23K26/042—Automatically aligning the laser beam
  • B23K26/043—Automatically aligning the laser beam along the beam path, i.e. alignment of laser beam axis relative to laser beam apparatus
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
  • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
  • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
  • B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
  • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
  • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
  • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
  • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
  • B23K26/073—Shaping the laser spot
  • B23K26/0738—Shaping the laser spot into a linear shape
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
• • C—CHEMISTRY; METALLURGY
  • C21—METALLURGY OF IRON
  • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
  • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
  • C21D1/34—Methods of heating
  • C21D1/38—Heating by cathodic discharges
• • C—CHEMISTRY; METALLURGY
  • C21—METALLURGY OF IRON
  • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
  • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
  • C21D9/50—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for welded joints
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F21—LIGHTING
  • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
  • F21V7/00—Reflectors for light sources
  • F21V7/0083—Array of reflectors for a cluster of light sources, e.g. arrangement of multiple light sources in one plane
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
  • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
  • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
  • G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
  • G02B19/0057—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode in the form of a laser diode array, e.g. laser diode bar
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
  • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
  • G02B27/0905—Dividing and/or superposing multiple light beams
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
  • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
  • G02B27/0938—Using specific optical elements
  • G02B27/0977—Reflective elements
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
  • G02B27/10—Beam splitting or combining systems
  • G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
  • G02B27/10—Beam splitting or combining systems
  • G02B27/14—Beam splitting or combining systems operating by reflection only
  • G02B27/143—Beam splitting or combining systems operating by reflection only using macroscopically faceted or segmented reflective surfaces
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
  • H01S5/00—Semiconductor lasers
  • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
  • H01S5/4012—Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
  • H01S5/00—Semiconductor lasers
  • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
  • H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
  • H01S5/4031—Edge-emitting structures
  • H01S5/4043—Edge-emitting structures with vertically stacked active layers
  • H01S5/405—Two-dimensional arrays
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
  • H01S2301/00—Functional characteristics
  • H01S2301/20—Lasers with a special output beam profile or cross-section, e.g. non-Gaussian
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
  • H01S5/00—Semiconductor lasers
  • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
  • H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
  • H01S5/4031—Edge-emitting structures
  • H01S5/4043—Edge-emitting structures with vertically stacked active layers

Definitions

• the present invention relates to an apparatus for laser annealing of substrates of large width formed of a plurality of juxtaposable laser modules without particular limitation.
• Laser annealing is used to heat thin coatings at high temperatures, on the order of several hundred degrees, while preserving the underlying substrate.
• the scroll speeds are of course preferably the highest possible, preferably at least several meters per minute.
• the present invention is particularly concerned with lasers using laser diodes. These are currently the most interesting laser sources in terms of price and power.
• each individual laser module must have side dimensions less than or equal to the length of the elementary line that it generates. If these lateral dimensions were larger, the juxtaposition of the modules would result in a discontinuous final line.
• the present invention provides laser modules using, as a light source, laser diode arrays for generating laser lines having a length greater than or equal to the module dimension in the direction parallel to the laser line generated by said module. Furthermore, the proposed laser modules do not have the drawbacks of the lasers with vertical stack of diodes of the state of the art and form laser lines having a satisfactory quality and a depth of field sufficiently high to withstand the defects of common flatness of the glass substrates, the effects of conveying, the vibrations of the system etc., which are generally of the order of a millimeter.
• a plurality of laser modules are aligned next to each other so that the elementary laser lines they generate combine into a single laser line of homogeneous power density over a large area. length.
• the spatial space of the laser apparatus in the direction parallel to the main axis of the laser line is not substantially greater than the length of the line.
• the idea underlying the present invention was to superpose two rows of diode strips, preferably substantially parallel to one another, and then to join the two parallel sets of laser beams into a laser line. unique by means of a set of mirrors described in more detail below.
• the clever system of mirrors used to gather the beams emitted by the two rows of superimposed bars makes it possible to avoid the known drawbacks resulting from the vertical stack of laser diodes of the state of the art, that is to say the loss of quality of the laser line obtained.
• the present invention relates to a laser apparatus comprising a plurality of laser modules each generating a laser line at a work plane, said laser modules being juxtaposed and aligned along their length so that the laser lines generated by the modules are combine in a single laser line, each of the laser modules comprising at least one means for generating a laser line,
• said laser apparatus being characterized in that the or each means for generating a laser line comprises two alignments of laser diode arrays, wherein the arrays are aligned along their length, each emitting a focused laser beam, the two alignments being arranged parallel to each other so that the bars are staggered, the two sets of parallel laser beams generated respectively by the two rows of bars being united into a single laser line by means of a set of mirrors, the alignments of laser diode bars and the mirrors being arranged so that all the laser beams, ie the two sets of laser beams, traverse an optical path of the same length before being united into a single laser line.
• the two superimposed diode array alignments in each laser line generation means may be perfectly identical to each other, i.e., have the same number of arrays or one of the two alignments may have one more than the other.
• the bars of the two alignments are advantageously all identical (power, wavelength, size, etc.). In each alignment, they are preferably juxtaposed with a minimum of space between them.
• Each array of diode arrays therefore has a periodicity with a period that is greater than or equal to the size of a bar.
• the two alignments are arranged parallel to each other so that the bars are arranged in staggered rows, in other words the two alignments are offset by half a period so as to that each bar of an alignment is exactly equidistant from the bars closest to the other alignment.
• Each bar array emits as many beams as the array has bars.
• the two sets of beams emitted respectively by the two alignments are parallel to each other and reproduce the lateral offset in staggered bars.
• the two sets of laser beams emitted by the two array alignments have traveled an optical path of the same length before being joined into a single monochromatic laser line. If this were not the case, the two sets of beams would not have the same size and / or divergence and the quality of the laser line resulting from their unification would be unsatisfactory.
• the "first set of laser beams” will be called the set of laser beams reflected by a segmented mirror and will be called “second set of laser beams" or "Other set of laser beams” means the set whose beams pass through the gaps between segments of the segmented mirror. This second / other set of beams is not reflected by any mirror (first embodiment, shown in FIG. 1) or is reflected by a mirror which can be continuous (second embodiment, represented in FIG. 2), but also segmented.
• first set of laser beams only one of the two sets of laser beams - hereinafter referred to as "first set of laser beams" - is redirected and brought by a set of mirrors in the plane of the second set of beams. laser beams.
• the optical path of this first set of laser beams is then lengthened because of this change of direction.
• the laser diode array alignment that emits the first set of laser beams is shifted - in the propagation direction of the second laser beam - a distance equal to the elongation of the optical path that entails its redirection by the set of mirrors.
• this double reflection resulting in the union of the two sets of beams is shown in FIG.
• these two successive reflections are at right angles, that is to say the first set of laser beams undergoes two orthogonal reflections.
• the optical path of the first set of laser beams is then extended by the initial distance between the two propagation planes.
• the alignment of laser diode arrays emitting the first set of laser beams is advanced - i.e. shifted in the direction of propagation of the second set of beams - by a distance equal to the distance between the two propagation planes of the two sets of beams.
• the orthogonal double reflection is only a particular embodiment and it is quite possible to position the mirrors so as to perform two non-orthogonal reflections.
• Those skilled in the art are able, by a simple trigonometric calculation, to calculate the offset of the first alignment of diode bars necessary to compensate for the elongation of the corresponding optical path.
• the first reflection of the first set of laser beams towards the plane of the second set of laser beams is by means of a single mirror, hereinafter referred to as a continuous mirror.
• a single mirror hereinafter referred to as a continuous mirror.
• this single continuous mirror could be replaced by several mirrors placed in the same plane, this would render this part of the apparatus unnecessarily complex and the use of a segmented mirror is therefore not desirable to perform the first reflection of the first mirror. set of beams.
• a segmented mirror consisting of at least as many mirror segments as the first set of laser beams has laser beams is therefore used for the second reflection, each beam of the first set of laser beams being reflected by a mirror segment.
• the use of a segmented mirror takes advantage of the half-period lateral shift of two rows of diode strips. Indeed, thanks to this shift, the beams of the first set of beams are alternating with those of the second set of beams and a mirror segment of appropriate size can reflect the beams of the first set without intercepting those of the second set.
• the first set of laser beams propagates in the plane of propagation of the second set of laser beams, the two sets forming a single monochromatic laser line.
• the set of mirrors used in the present invention therefore preferably comprises
• a second segmented mirror consisting of at least as many mirror segments as the first set of laser beams comprises laser beams, each beam of the first set of laser beams being reflected by a mirror segment.
• the first and second sets of beams each undergo mirror reflection.
• the two sets of beams are reflected at the same angle so that after this reflection, the two propagation planes of the two sets of laser beams coincide and form a single laser line.
• the first set of laser beams is reflected by a segmented mirror that allows both to reflect the beams of the first set and to let the beams of the other set at the intervals between the mirror segments.
• the other set of beams is preferably reflected by a continuous mirror.
• the laser beams generated by each of the laser diode arrays are focussed beams thanks to a focusing lens at the output of the bar.
• segments of the segmented mirror are positioned to reflect the laser beams of the first set at their focus point. This positioning of the mirror segments at the focal point of the first beams is advantageous because it makes it possible to limit as much as possible the surface of these mirror segments and thus to prevent them blocking the passage of the beams of the second set of beams. .
• Each means of generating a laser line as described above results in the formation of a monochromatic laser line having a given linear polarization state. Indeed, all the laser diodes of the two rows of diode arrays produce laser radiation of the same wavelength and the same state of polarization. Double reflection does not change the linear polarization state of the laser radiation.
• the laser apparatus of the present invention thus comprises at least two means for generating a laser line, each means generating a monochromatic laser line which differs from the other one or more monochromatic laser lines by its wavelength and / or its state of polarization. It comprises for example four pairs of means for generating a laser line, each pair generating two monochromatic laser lines of the same wavelength and which differ from each other by their polarization state.
• the various laser lines thus generated, eight in number in the aforementioned example, are then combined in a known manner by means of combining laser lines into a single polychromatic laser line and / or double polarization.
• double polarization here describes a line or a mixture of laser beams polarized in two planes perpendicular to each other.
• the modular laser apparatus of the present invention preferably comprises at least 5 modules, in particular at least 10 modules.
• a plurality of laser modules are aligned next to each other so that the elementary laser lines they generate combine into a single laser line of homogeneous power density over a large area. length.
• the laser modules are juxtaposed so that the laser lines generated by the modules combine in a single laser line with a total length preferably greater than 1.2 m, in particular greater than 2 m, and ideally greater than 3 m.
• the central part of the laser line where the power density is substantially constant preferably has a length of between 3.20 and 3. , 22 m.
• the laser modules are assembled and mounted on the laser apparatus so that the generated laser lines cut the substrate, or working plane, preferably at a small angle, typically less than 20 °, preferably less than 10 ° by compared to normal to the substrate.
• the apparatus may be designed so that the laser modules are stationary, the substrate to be treated moving below or above the array of modules, generally in a direction perpendicular to the main axis of the laser line .
• the apparatus may be designed so that the substrate is fixed and the alignment of laser modules scrolls above or below the substrate by projecting the laser line preferably at right angles.
• Figure 1 is a perspective view of a first embodiment of a means for generating a laser line.
• Figure 2 is a perspective view of a second embodiment of a means for generating a laser line.
• each of the alignments 1 a, 1 b here comprises only two bars.
• the alignments comprise more than two bars, they are spaced regularly, each row of bars thus emitting a set of regularly spaced laser beams.
• the first set of beams 3a generated by the bars 2 of the lower alignment 1a undergoes two orthogonal successive reflections: a first upward reflection provided by a continuous mirror 4, then a second reflection provided by a series of mirror segments 5 , also called segmented mirror.
• the beams 3b of the upper laser diode array alignment 1b are not reflected.
• the segments of the segmented mirror 5 intersect the propagation plane of the second set of beams 3b and are positioned in the intervals between the beams of the second set of beams 3b, more particularly in the vicinity of the focusing points 6 thereof where the intervals between beams are maximal.
• the staggered arrangement of the bars 2 of the two alignments 1 a, 1 b means that, in this position, the mirrors 5 intercept and reflect the beams of the first set of beams 3a emitted by the lower alignment of diode bars 1 a. These beams are focused so as to be reflected by the mirror segments 5 at their focus point.
• the focusing of the two sets of beams 3a, 3b is thus adjusted so that all the focusing points are aligned on the same line, which is essentially superimposed on the line defined by the second orthogonal reflection of the first set of laser beams 3a. .
• the two sets of beams propagate in the same plane, thus forming a single laser line 8.
• the two sets of laser beams 3a, 3b traverse an optical path of the same length before being united in a single propagation plane.
• the two sets of beams 3a, 3b generated by the two rows of bars 1a, 1b are each reflected once.
• the first set of beams 3a generated by the first alignment 1a is reflected at right angles by a segmented mirror 5 positioned at focus point of the beams, each mirror segment 5 reflecting a beam 3a.
• the second set of beams 3b emitted by the second alignment of bars 1b propagates first parallel to the first set of beams 3a, then, when its plane of propagation intersects the second propagation plane of the first set of beams 1a, the second set of beams undergoes a reflection identical to that of the first set of beams which results in a superposition of the propagation planes of the two sets of beams.
• the focal points of the first and second sets of beams are identical and the second alignment 1b of bars is positioned in such a way that the focusing points of all the beams 3a, 3b are aligned at the level of the segmented mirror 5.
• the reflecting mirror 4 the second beam assembly 3b is a continuous mirror.

Landscapes

• Physics & Mathematics (AREA)
• Optics & Photonics (AREA)
• Engineering & Computer Science (AREA)
• General Physics & Mathematics (AREA)
• Chemical & Material Sciences (AREA)
• Mechanical Engineering (AREA)
• Plasma & Fusion (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• Electromagnetism (AREA)
• Thermal Sciences (AREA)
• Crystallography & Structural Chemistry (AREA)
• Materials Engineering (AREA)
• Metallurgy (AREA)
• Organic Chemistry (AREA)
• General Engineering & Computer Science (AREA)
• Laser Beam Processing (AREA)
• Semiconductor Lasers (AREA)
• Lasers (AREA)

Applications Claiming Priority (2)

Publications (1)

Family

ID=50101948

Family Applications (1)

Country Status (9)

Families Citing this family (18)

Citations (1)

Family Cites Families (18)

• 2013
  • 2013-10-18 FR FR1360143A patent/FR3012226B1/fr not_active Expired - Fee Related
• 2014
  • 2014-10-13 US US15/026,684 patent/US9742155B2/en active Active
  • 2014-10-13 CN CN201480056834.2A patent/CN105659451B/zh not_active Expired - Fee Related
  • 2014-10-13 KR KR1020167009578A patent/KR102257001B1/ko active IP Right Grant
  • 2014-10-13 EA EA201690770A patent/EA030114B1/ru not_active IP Right Cessation
  • 2014-10-13 EP EP14796810.1A patent/EP3058412A1/de not_active Withdrawn
  • 2014-10-13 JP JP2016523299A patent/JP6542764B2/ja not_active Expired - Fee Related
  • 2014-10-13 WO PCT/FR2014/052600 patent/WO2015055932A1/fr active Application Filing
  • 2014-10-15 TW TW103135691A patent/TWI643690B/zh not_active IP Right Cessation

Patent Citations (1)

Also Published As

Similar Documents

Legal Events