EP3053703A4 - Polishing device and polishing method - Google Patents

Polishing device and polishing method Download PDF

Info

Publication number
EP3053703A4
EP3053703A4 EP14851309.6A EP14851309A EP3053703A4 EP 3053703 A4 EP3053703 A4 EP 3053703A4 EP 14851309 A EP14851309 A EP 14851309A EP 3053703 A4 EP3053703 A4 EP 3053703A4
Authority
EP
European Patent Office
Prior art keywords
polishing
polishing device
polishing method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP14851309.6A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP3053703A1 (en
Inventor
Hitoshi Morinaga
Hiroshi Asano
Shingo OTSUKI
Kazusei Tamai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujimi Inc
Original Assignee
Fujimi Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujimi Inc filed Critical Fujimi Inc
Publication of EP3053703A1 publication Critical patent/EP3053703A1/en
Publication of EP3053703A4 publication Critical patent/EP3053703A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • B24B19/08—Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding non-circular cross-sections, e.g. shafts of elliptical or polygonal cross-section
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • B24B19/02—Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding grooves, e.g. on shafts, in casings, in tubes, homokinetic joint elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/002—Grinding heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/02—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • B24B9/107—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass for glass plates while they are turning
EP14851309.6A 2013-10-04 2014-10-02 Polishing device and polishing method Withdrawn EP3053703A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013209602 2013-10-04
PCT/JP2014/076360 WO2015050186A1 (ja) 2013-10-04 2014-10-02 研磨装置及び研磨方法

Publications (2)

Publication Number Publication Date
EP3053703A1 EP3053703A1 (en) 2016-08-10
EP3053703A4 true EP3053703A4 (en) 2017-07-26

Family

ID=52778773

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14851309.6A Withdrawn EP3053703A4 (en) 2013-10-04 2014-10-02 Polishing device and polishing method

Country Status (7)

Country Link
US (1) US20160236314A1 (ja)
EP (1) EP3053703A4 (ja)
JP (2) JPWO2015050186A1 (ja)
KR (1) KR20160067106A (ja)
CN (1) CN105658377A (ja)
TW (1) TW201529224A (ja)
WO (1) WO2015050186A1 (ja)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015174180A (ja) * 2014-03-14 2015-10-05 株式会社東京精密 超音波面取り機
JP6398902B2 (ja) * 2014-08-19 2018-10-03 信越化学工業株式会社 インプリント・リソグラフィ用角形基板及びその製造方法
JP6568006B2 (ja) * 2016-04-08 2019-08-28 株式会社荏原製作所 研磨装置および研磨方法
CN108436650A (zh) * 2018-03-08 2018-08-24 北京铂阳顶荣光伏科技有限公司 磨边方法及装置
US11799150B2 (en) 2020-07-17 2023-10-24 Toyota Motor Engineering & Manufacturing North America, Inc. Cooling structure for hybrid-electric vehicle battery cell assemblies
CN115365928A (zh) * 2022-08-23 2022-11-22 北京航空航天大学宁波创新研究院 一种研磨方法及研磨机

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US4667443A (en) * 1984-09-06 1987-05-26 Kaoru Sakurai End face grinding apparatus
EP2537634A1 (de) * 2011-06-21 2012-12-26 WENDT GmbH Verfahren zum Schleifen der umlaufenden Kantenfläche einer Verglasung

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JPS60143646U (ja) * 1984-03-02 1985-09-24 豊田工機株式会社 研削装置
JPS6165763A (ja) * 1984-09-06 1986-04-04 Nippon Sheet Glass Co Ltd 板状体の端面研磨装置
JPH01170558U (ja) * 1988-05-24 1989-12-01
US5083401A (en) * 1988-08-08 1992-01-28 Mitsubishi Denki Kabushiki Kaisha Method of polishing
JPH04360772A (ja) * 1991-06-05 1992-12-14 Toto Ltd 平板面取用砥石及び平板面取装置
JP2559650B2 (ja) * 1991-11-27 1996-12-04 信越半導体株式会社 ウエーハ面取部研磨装置
KR100277320B1 (ko) * 1992-06-03 2001-01-15 가나이 쓰도무 온라인 롤 연삭 장치를 구비한 압연기와 압연 방법 및 회전 숫돌
JP3010572B2 (ja) * 1994-09-29 2000-02-21 株式会社東京精密 ウェーハエッジの加工装置
JPH1170471A (ja) * 1997-07-03 1999-03-16 Asahi Glass Co Ltd ガラス面取り方法およびその装置
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TWI352645B (en) * 2004-05-28 2011-11-21 Ebara Corp Apparatus for inspecting and polishing substrate r
JP2007088143A (ja) * 2005-09-21 2007-04-05 Elpida Memory Inc エッジ研磨装置
ES2279719B1 (es) * 2006-01-26 2008-07-16 Timac Agro España, S.A. Nuevo activador metabolico y nutricional para las plantas.
CN101284365A (zh) * 2007-04-13 2008-10-15 奇美电子股份有限公司 基板的旋转装置、磨边装置及磨边方法
US20080293329A1 (en) * 2007-05-21 2008-11-27 Applied Materials, Inc. Methods and apparatus for identifying a substrate edge profile and adjusting the processing of the substrate according to the identified edge profile
WO2009116945A1 (en) * 2008-03-20 2009-09-24 Telefonaktiebolaget Lm Ericsson (Publ) Method and apparatus for communication of data packets between local networks
US8585467B2 (en) * 2008-10-31 2013-11-19 Corning Incorporated Linear pressure feed grinding with voice coil
JP2010182813A (ja) * 2009-02-04 2010-08-19 Noritake Super Abrasive Co Ltd Ｃｍｐパッドコンディショナー
CN201380419Y (zh) * 2009-03-02 2010-01-13 湖北新火炬科技股份有限公司 金刚滚轮磨削砂轮用于磨削轮毂总成内滚道的装置
JP5352331B2 (ja) * 2009-04-15 2013-11-27 ダイトエレクトロン株式会社 ウェーハの面取り加工方法
CN102427913B (zh) * 2009-05-15 2014-01-15 旭硝子株式会社 玻璃端面磨削用磨具的加工位置设定方法
CN101612717A (zh) * 2009-07-17 2009-12-30 李留江 数控球轴承内圈沟道多功能磨床
US8892238B2 (en) * 2009-10-06 2014-11-18 Edward T. Sweet Edge break details and processing
JP5519256B2 (ja) * 2009-12-03 2014-06-11 株式会社荏原製作所 裏面が研削された基板を研磨する方法および装置
US8747188B2 (en) * 2011-02-24 2014-06-10 Apple Inc. Smart automation of robotic surface finishing
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JP5898984B2 (ja) * 2012-02-03 2016-04-06 中村留精密工業株式会社 硬質脆性板の側辺加工装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4667443A (en) * 1984-09-06 1987-05-26 Kaoru Sakurai End face grinding apparatus
EP2537634A1 (de) * 2011-06-21 2012-12-26 WENDT GmbH Verfahren zum Schleifen der umlaufenden Kantenfläche einer Verglasung

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2015050186A1 *

Also Published As

Publication number Publication date
JP2018001406A (ja) 2018-01-11
CN105658377A (zh) 2016-06-08
EP3053703A1 (en) 2016-08-10
JPWO2015050186A1 (ja) 2017-03-09
US20160236314A1 (en) 2016-08-18
KR20160067106A (ko) 2016-06-13
TW201529224A (zh) 2015-08-01
WO2015050186A1 (ja) 2015-04-09

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