EP3053703A4 - Polishing device and polishing method - Google Patents

Polishing device and polishing method Download PDF

Info

Publication number
EP3053703A4
EP3053703A4 EP14851309.6A EP14851309A EP3053703A4 EP 3053703 A4 EP3053703 A4 EP 3053703A4 EP 14851309 A EP14851309 A EP 14851309A EP 3053703 A4 EP3053703 A4 EP 3053703A4
Authority
EP
European Patent Office
Prior art keywords
polishing
polishing device
polishing method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP14851309.6A
Other languages
German (de)
French (fr)
Other versions
EP3053703A1 (en
Inventor
Hitoshi Morinaga
Hiroshi Asano
Shingo OTSUKI
Kazusei Tamai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujimi Inc
Original Assignee
Fujimi Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujimi Inc filed Critical Fujimi Inc
Publication of EP3053703A1 publication Critical patent/EP3053703A1/en
Publication of EP3053703A4 publication Critical patent/EP3053703A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • B24B19/08—Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding non-circular cross-sections, e.g. shafts of elliptical or polygonal cross-section
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • B24B19/02—Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding grooves, e.g. on shafts, in casings, in tubes, homokinetic joint elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/002—Grinding heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/02—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • B24B9/107—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass for glass plates while they are turning
EP14851309.6A 2013-10-04 2014-10-02 Polishing device and polishing method Withdrawn EP3053703A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013209602 2013-10-04
PCT/JP2014/076360 WO2015050186A1 (en) 2013-10-04 2014-10-02 Polishing device and polishing method

Publications (2)

Publication Number Publication Date
EP3053703A1 EP3053703A1 (en) 2016-08-10
EP3053703A4 true EP3053703A4 (en) 2017-07-26

Family

ID=52778773

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14851309.6A Withdrawn EP3053703A4 (en) 2013-10-04 2014-10-02 Polishing device and polishing method

Country Status (7)

Country Link
US (1) US20160236314A1 (en)
EP (1) EP3053703A4 (en)
JP (2) JPWO2015050186A1 (en)
KR (1) KR20160067106A (en)
CN (1) CN105658377A (en)
TW (1) TW201529224A (en)
WO (1) WO2015050186A1 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015174180A (en) * 2014-03-14 2015-10-05 株式会社東京精密 ultrasonic chamfering machine
JP6398902B2 (en) * 2014-08-19 2018-10-03 信越化学工業株式会社 Rectangular substrate for imprint lithography and method for manufacturing the same
JP6568006B2 (en) * 2016-04-08 2019-08-28 株式会社荏原製作所 Polishing apparatus and polishing method
CN108436650A (en) * 2018-03-08 2018-08-24 北京铂阳顶荣光伏科技有限公司 Edging method and device
US11799150B2 (en) 2020-07-17 2023-10-24 Toyota Motor Engineering & Manufacturing North America, Inc. Cooling structure for hybrid-electric vehicle battery cell assemblies
CN115365928A (en) * 2022-08-23 2022-11-22 北京航空航天大学宁波创新研究院 Grinding method and grinding machine

Citations (2)

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US4667443A (en) * 1984-09-06 1987-05-26 Kaoru Sakurai End face grinding apparatus
EP2537634A1 (en) * 2011-06-21 2012-12-26 WENDT GmbH Method for grinding the circulating edge surface of glazing

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IT1073031B (en) * 1975-10-15 1985-04-13 Monsanto Co SHAPING FORMER ROLLER FOR ABRASIVE RIBS
JPS5388291A (en) * 1977-01-12 1978-08-03 Fukuyama Tetsukoushiyo Kk Machine for automatically pol shuing all circumference of plate glass
JPS591548U (en) * 1982-06-29 1984-01-07 小出　▲けん▼ Grinding wheel device for copying polishing
JPS60143646U (en) * 1984-03-02 1985-09-24 豊田工機株式会社 grinding equipment
JPS6165763A (en) * 1984-09-06 1986-04-04 Nippon Sheet Glass Co Ltd Grinding device for end face of a plate
JPH01170558U (en) * 1988-05-24 1989-12-01
US5083401A (en) * 1988-08-08 1992-01-28 Mitsubishi Denki Kabushiki Kaisha Method of polishing
JPH04360772A (en) * 1991-06-05 1992-12-14 Toto Ltd Plate chamfering grinding-wheel and plate chamfering device
JP2559650B2 (en) * 1991-11-27 1996-12-04 信越半導体株式会社 Wafer chamfer polishing device
KR100277320B1 (en) * 1992-06-03 2001-01-15 가나이 쓰도무 Rolling mill and rolling method with on-line roll grinding device and grinding wheel
JP3010572B2 (en) * 1994-09-29 2000-02-21 株式会社東京精密 Wafer edge processing equipment
JPH1170471A (en) * 1997-07-03 1999-03-16 Asahi Glass Co Ltd Glass chamfering method and machine therefor
JPH11188590A (en) 1997-12-22 1999-07-13 Speedfam Co Ltd Edge polishing device
JP2000176805A (en) * 1998-12-17 2000-06-27 Mitsubishi Materials Silicon Corp Chamfering device for semiconductor-wafer
DE19914174A1 (en) * 1999-03-29 2000-10-12 Wernicke & Co Gmbh Method and device for shaping the peripheral edge of spectacle lenses
JP2001038589A (en) * 1999-08-03 2001-02-13 Speedfam Co Ltd Polishing device for outer peripheral part of work
JP2001062686A (en) * 1999-08-25 2001-03-13 Speedfam Co Ltd Index type edge polisher
JP2001205549A (en) 2000-01-25 2001-07-31 Speedfam Co Ltd One side polishing method and device for substrate edge portion
US6962521B2 (en) * 2000-07-10 2005-11-08 Shin-Etsu Handotai Co., Ltd. Edge polished wafer, polishing cloth for edge polishing, and apparatus and method for edge polishing
TWI352645B (en) * 2004-05-28 2011-11-21 Ebara Corp Apparatus for inspecting and polishing substrate r
JP2007088143A (en) * 2005-09-21 2007-04-05 Elpida Memory Inc Edge grinding device
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CN101284365A (en) * 2007-04-13 2008-10-15 奇美电子股份有限公司 Rotary device, edging device of baseplate and edging method
US20080293329A1 (en) * 2007-05-21 2008-11-27 Applied Materials, Inc. Methods and apparatus for identifying a substrate edge profile and adjusting the processing of the substrate according to the identified edge profile
JP2011515944A (en) * 2008-03-20 2011-05-19 テレフオンアクチーボラゲット エル エム エリクソン（パブル） Method and apparatus for data packet communication between local networks
US8585467B2 (en) * 2008-10-31 2013-11-19 Corning Incorporated Linear pressure feed grinding with voice coil
JP2010182813A (en) * 2009-02-04 2010-08-19 Noritake Super Abrasive Co Ltd Cmp pad conditioner
CN201380419Y (en) * 2009-03-02 2010-01-13 湖北新火炬科技股份有限公司 Diamond roller grinding wheel for grinding inner roller way of hub assembly
JP5352331B2 (en) * 2009-04-15 2013-11-27 ダイトエレクトロン株式会社 Wafer chamfering method
JPWO2010131610A1 (en) * 2009-05-15 2012-11-01 旭硝子株式会社 Processing position setting method for grinding wheel for glass end face grinding
CN101612717A (en) * 2009-07-17 2009-12-30 李留江 Digital-controlled ball bear inner ring grooved railway multifunctional grinder
US8892238B2 (en) * 2009-10-06 2014-11-18 Edward T. Sweet Edge break details and processing
JP5519256B2 (en) * 2009-12-03 2014-06-11 株式会社荏原製作所 Method and apparatus for polishing a substrate whose back surface is ground
US8747188B2 (en) * 2011-02-24 2014-06-10 Apple Inc. Smart automation of robotic surface finishing
US8986072B2 (en) * 2011-05-26 2015-03-24 Corning Incorporated Methods of finishing an edge of a glass sheet
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Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4667443A (en) * 1984-09-06 1987-05-26 Kaoru Sakurai End face grinding apparatus
EP2537634A1 (en) * 2011-06-21 2012-12-26 WENDT GmbH Method for grinding the circulating edge surface of glazing

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2015050186A1 *

Also Published As

Publication number Publication date
JPWO2015050186A1 (en) 2017-03-09
TW201529224A (en) 2015-08-01
CN105658377A (en) 2016-06-08
WO2015050186A1 (en) 2015-04-09
KR20160067106A (en) 2016-06-13
JP2018001406A (en) 2018-01-11
EP3053703A1 (en) 2016-08-10
US20160236314A1 (en) 2016-08-18

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