EP3008385A1 - Épuration de gaz de procédé - Google Patents

Épuration de gaz de procédé

Info

Publication number
EP3008385A1
EP3008385A1 EP14728250.3A EP14728250A EP3008385A1 EP 3008385 A1 EP3008385 A1 EP 3008385A1 EP 14728250 A EP14728250 A EP 14728250A EP 3008385 A1 EP3008385 A1 EP 3008385A1
Authority
EP
European Patent Office
Prior art keywords
diluent
combustion chamber
fuel
process gas
oxidant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP14728250.3A
Other languages
German (de)
English (en)
Other versions
EP3008385B1 (fr
Inventor
Andrew James Seeley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of EP3008385A1 publication Critical patent/EP3008385A1/fr
Application granted granted Critical
Publication of EP3008385B1 publication Critical patent/EP3008385B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23L—SUPPLYING AIR OR NON-COMBUSTIBLE LIQUIDS OR GASES TO COMBUSTION APPARATUS IN GENERAL ; VALVES OR DAMPERS SPECIALLY ADAPTED FOR CONTROLLING AIR SUPPLY OR DRAUGHT IN COMBUSTION APPARATUS; INDUCING DRAUGHT IN COMBUSTION APPARATUS; TOPS FOR CHIMNEYS OR VENTILATING SHAFTS; TERMINALS FOR FLUES
    • F23L7/00—Supplying non-combustible liquids or gases, other than air, to the fire, e.g. oxygen, steam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23L—SUPPLYING AIR OR NON-COMBUSTIBLE LIQUIDS OR GASES TO COMBUSTION APPARATUS IN GENERAL ; VALVES OR DAMPERS SPECIALLY ADAPTED FOR CONTROLLING AIR SUPPLY OR DRAUGHT IN COMBUSTION APPARATUS; INDUCING DRAUGHT IN COMBUSTION APPARATUS; TOPS FOR CHIMNEYS OR VENTILATING SHAFTS; TERMINALS FOR FLUES
    • F23L2900/00—Special arrangements for supplying or treating air or oxidant for combustion; Injecting inert gas, water or steam into the combustion chamber
    • F23L2900/07002—Injecting inert gas, other than steam or evaporated water, into the combustion chambers

Definitions

  • the present invention relates to a process gas abatement apparatus and method.
  • Apparatus for treating an effluent gas stream from a manufacturing process tool operating at a sub-atmospheric pressure used in, for example, the semiconductor or flat panel display manufacturing industry are known. During such
  • PFCs residual perfluorinated compounds
  • One way of performing effluent gas abatement is to pump the effluent gas from the process tool to a higher sub-atmospheric pressure before being fed to a radiant burner.
  • the radiant burner uses combustion to remove the PFCs and other compounds from the process gas stream.
  • the effluent gas stream is a nitrogen stream containing PFCs and other compounds.
  • a fuel gas is mixed with the effluent gas stream and that gas stream mixture is conveyed into a combustion chamber that is laterally surrounded by the exit surface of a foraminous gas burner.
  • Fuel gas and air are simultaneously supplied to the foraminous burner to affect flameless combustion at the exit surface, with the amount of air passing through the foraminous burner being sufficient to consume not only the fuel gas supplied to the burner, but also all the combustibles in the gas stream mixture injected into the combustion chamber.
  • the resultant treated gas stream is exhausted from the radiant burner. Thereafter, the treated gas stream is pumped to atmospheric pressure before being vented.
  • a process gas abatement apparatus comprising: a burner comprising: a combustion chamber operable to receive an effluent gas stream from a manufacturing process tool to be treated within the combustion chamber at a sub-atmospheric pressure, the combustion chamber being further operable to receive a fuel, oxidant and diluent, the fuel, oxidant and diluent controlling combustion within the combustion chamber to treat the effluent gas stream to produce a treated exhaust stream, the diluent being condensable in the treated exhaust stream.
  • the burner will be operated at a pressure between that of the process tool, but below atmospheric pressure.
  • the burner is typically operated at approximately 200mbar, with process gases being brought up to this pressure by means of a multi-stage dry pumping mechanism, with the combustion byproducts being brought up to a second pressure, for example atmospheric pressure by means of second pump such as, for example, a liquid ring pump.
  • second pump such as, for example, a liquid ring pump.
  • a hydrocarbon fuel provides the energy source for the combustive abatement within the combustion chamber and often this fuel is methane. This burns with the process gas 'P' to produce a treated process gas P' according to reaction (1 ) below:
  • the first aspect recognises that the volumetric gain between the volume of gas being input to the combustion chamber and the volume of gas being output by the combustion chamber almost doubles (i.e. 1 0 slm of process gas input into the combustion chamber and 19 slm output from the combustion chamber).
  • the apparatus may comprise a burner.
  • the burner may comprise a combustion chamber which receives a process or effluent gas stream from a manufacturing process tool.
  • the effluent gas stream may be treated within the combustion chamber at a sub-atmospheric pressure.
  • the combustion chamber may receive a fuel, oxidant and diluent.
  • the fuel, oxidant and diluent may control combustion within the combustion chamber to treat the effluent gas stream and produce a treated exhaust stream.
  • the diluent may be condensable in the treated exhaust stream.
  • the first aspect recognises that since the purpose of the N2 provided in existing approaches is to moderate the flame speed and temperature within the combustion chamber, it is only by convenience that N2 is used as it is ordinarily present in air. If this N2 could be replaced with a diluent in the form of, for example, an inert condensable, the volume gain within the combustion chamber will be reduced, which reduces the volume of the exhaust stream and reduces the volumetric load on the second pump. The volume gain reduces because the diluent shifts phase in the exhaust stream, thereby effectively removing the contribution of the diluent to the volume of the exhaust stream. This leads to considerable power saving since a lower volume of gas is output from the combustion chamber which would need to be brought up to the second pressure, for example atmospheric pressure, by means of the second pump.
  • the second pressure for example atmospheric pressure
  • the diluent when introduced to the combustion chamber, comprises a vapour.
  • the diluent may be mixed in vapour form with the fuel and oxidant to effect combustion with the required characteristics in order to treat the effluent gas stream.
  • the transition from, for example, an inert condensable vapour to a liquid within the exhaust stream enables the diluent to both contribute to the characteristics of the combustion whilst also reducing the volume gain because the diluent shifts phase in the exhaust stream, thereby effectively removing the contribution of the diluent to the volume of the exhaust stream.
  • the diluent comprises a liquid prior to being vaporised for introduction to the combustion chamber. It will be appreciated that this
  • the diluent condenses to a liquid in the treated exhaust stream. It will be appreciated that the phase from a vapour to a liquid causes a significant reduction in volume.
  • the diluent is introduced into the combustion chamber with a first volumetric rate and occupies the treated exhaust stream with a second volumetric rate, the second volumetric rate being lower than the first volumetric rate.
  • the diluent is provided at specified volumetric rate to control combustion conditions within the combustion chamber to treat the effluent gas stream.
  • the diluent is combined with at least one of the fuel and oxidant prior to being introduced into the combustion chamber. It will be appreciated that this significantly simplifies storage of the diluent and/or the fuel and oxidant.
  • at least one of the fuel and the oxidant is dissolved by the diluent prior to being introduced into the combustion chamber.
  • both the fuel and the oxidant are dissolved by the diluent prior to being introduced into the combustion chamber.
  • At least one of the fuel and the oxidant dissolved by the diluent is vaporised prior to being introduced into the combustion chamber.
  • At least one of the fuel and the oxidant dissolved by the diluent and the diluent are co-vaporised prior to being introduced into the combustion chamber.
  • the diluent comprises at least one of water, a
  • the burner comprises a radiant burner and the combustion chamber has a porous sleeve through which the fuel, oxidant and diluent pass for combustion proximate to a combustion surface of the porous sleeve.
  • the treated exhaust stream is provided to a liquid ring pump for compression to atmospheric pressure.
  • the diluent condenses in the liquid ring pump.
  • the liquid ring pump may also act as an efficient condenser.
  • the liquid ring pump is operable to scrub the treated exhaust stream.
  • the liquid ring pump may also act as an efficient scrubber.
  • a process gas abatement method comprising: receiving an effluent gas stream to be treated from a manufacturing process tool within a combustion chamber at a sub-atmospheric pressure, receiving a fuel, oxidant and diluent within the combustion chamber, the fuel, oxidant and diluent controlling combustion within the combustion chamber to treat the effluent gas stream to produce a treated exhaust stream; and condensing the diluent in the treated exhaust stream.
  • the step of receiving comprises introducing the diluent to the combustion chamber as a vapour.
  • the diluent comprises a liquid prior to being vaporised for introduction to the combustion chamber.
  • step of condensing comprises condensing the diluent to a liquid in the treated exhaust stream.
  • the step of receiving comprises introducing the diluent into the combustion chamber with a first volumetric rate and the step of condensing comprises occupying the treated exhaust stream with a second volumetric rate, the second volumetric rate being lower than the first volumetric rate.
  • the step of receiving comprises providing the diluent at specified volumetric rate to control combustion conditions within the combustion chamber to treat the effluent gas stream.
  • the method comprises the step of combining the diluent with at least one of the fuel and oxidant prior to being introduced into the combustion chamber.
  • the method comprises the step of dissolving at least one of the fuel and the oxidant by the diluent prior to being introduced into the
  • the method comprises the step of dissolving both the fuel and the oxidant by the diluent prior to being introduced into the combustion.
  • the step of receiving comprises vaporising at least one of the fuel and the oxidant dissolved by the diluent prior to being introduced into the combustion chamber.
  • the step of receiving comprises co-vaporising at least one of the fuel and the oxidant dissolved by the diluent and the diluent prior to being introduced into the combustion chamber.
  • the diluent comprises at least one of water, a
  • the burner comprises a radiant burner and the combustion chamber has a porous sleeve through which the fuel, oxidant and diluent pass for combustion proximate to a combustion surface of the porous sleeve.
  • the method comprises providing the treated exhaust stream to a liquid ring pump for compression to atmospheric pressure.
  • the step of condensing comprises condensing the diluent in the liquid ring pump.
  • the method comprises the step of scrubbing the treated exhaust stream using the liquid ring pump.
  • Figure 1 illustrates a process gas abatement apparatus according to one embodiment. DESCRIPTION OF THE EMBODIMENTS
  • a sub-atmospheric combustion system is operated with a diluent which condenses in its exhaust stream in order to reduce the volume of exhaust emitted. This reduces the volume of exhaust which needs to be compressed to atmospheric pressure prior to be vented to atmosphere.
  • Figure 1 illustrates a process gas abatement apparatus, generally 1 00, according to one embodiment.
  • a first pump stage 1 0 evacuates a process chamber, such as a semiconductor process chamber, and takes a process or effluent gas stream P provided at a first pressure, such as 1 mbar and compresses the effluent gas stream P to an intermediate pressure, such as 100-200 mbar.
  • the first pump stage 10 typically comprises a dry pump.
  • a radiant burner 20 or other combustion apparatus receives the effluent gas stream P at the intermediate pressure.
  • the radiant burner 20 receives a fuel/oxidant mixture, in addition to a diluent D.
  • the effluent gas stream P is provided into a combustion chamber that is laterally surrounded by the exit surface of a foraminous gas burner.
  • the fuel/oxidant mixture is simultaneously supplied with the diluent D to the foraminous burner to affect flameless
  • the amount of oxidant passing through the foraminous burner is sufficient to consume not only the fuel supplied to the burner, but also all the combustibles in the effluent gas stream injected into the combustion chamber.
  • the diluent D is provided with an amount sufficient to control the flame speed at the exit surface of the foraminous burner and to control the temperature and other combustion characteristics within the combustion chamber.
  • the treated effluent gas stream P' is exhausted from the radiant burner, together with the other by-products of the combustion within the
  • the diluent D condenses within the treated effluent gas stream.
  • the treated effluent gas stream P' is provided to a secondary pump stage 30, such as a liquid ring pump, which compresses the treated effluent gas stream P', together with the other by-products of the combustion within the combustion chamber to a second pressure, such as atmospheric pressure, prior to being vented to atmosphere.
  • a secondary pump stage 30 such as a liquid ring pump, which compresses the treated effluent gas stream P', together with the other by-products of the combustion within the combustion chamber to a second pressure, such as atmospheric pressure, prior to being vented to atmosphere.
  • the effluent gas stream P is provided at a rate of 10 slm
  • the fuel/oxidant mixture is provided at a rate of 3 slm, together with the diluent D at a rate of 8 slm in order to
  • the diluent D condenses in the effluent gas stream P', it is typically a liquid under ambient conditions and so is heated in order to be vaporised prior to being provided to the combustion chamber.
  • the liquid diluent D can therefore be mixed with the fuel and/or with the oxidant in order to store these in a convenient manner prior to being introduced into the combustion chamber.
  • the diluent D is conveniently water.
  • An added advantage of the provision of substantial quantities of water vapour at flame temperature in the combustion chamber is that this provides additional reagent for F2 abatement in the effluent gas stream P according to equation (4) below:
  • the excess O2 generated also helps since it reacts with deposition gases such as, for example, SiH 4 .
  • the fuel may be dissolved within the water for convenient storage.
  • an alcohol may be dissolved within the water to provide an aqueous solution, which is then vaporised prior to being introduced into the combustion chamber.
  • the oxidant may be dissolved within the water for convenient storage.
  • hydrogen peroxide may be dissolved within the water to provide an aqueous solution, which is then vaporised prior to being introduced into the combustion chamber.
  • both the fuel and oxidant may be dissolved within the water for convenient storage. If this is derived from a 70 °C / 300mbar source, this would require approximately 2600 J/g to produce. The power to do this would be around:
  • This power may be derived from waste heat generated in the vacuum pump.
  • the water (and the pump) may be pre-heated electrically and the temperature maintained by the balance between evaporation and heat generation.
  • process gas P typically, around 1 slm of CH 4 and 2 slm of O2 will be required.
  • O2 the diluent
  • the secondary pump stage 30 may be a liquid ring pump. Providing a liquid ring pump is particularly advantageous as this assists both the condensation of the diluent and can be used to scrub the gas stream provided.
  • the diluent may be any suitable compound which condenses in the effluent gas stream such as, for example, a perfluorocarbon or a hydrocarbon.

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Incineration Of Waste (AREA)
  • Treating Waste Gases (AREA)
  • Air Supply (AREA)

Abstract

L'invention concerne un appareil et un procédé d'épuration de gaz de procédé. L'appareil d'épuration de gaz de procédé comprend : un brûleur comprenant : une chambre de combustion exploitable pour recevoir un courant de gaz effluent provenant d'un outil de procédé de fabrication à traiter au sein de la chambre de combustion à une pression sub-atmosphérique, la chambre de combustion étant en outre exploitable pour recevoir un combustible, un oxydant et un diluant, le combustible, l'oxydant et le diluant commandant la combustion au sein de la chambre de combustion pour traiter le courant de gaz effluent pour produire un courant d'évacuation traité, le diluant étant condensable dans le courant d'évacuation traité. En fournissant un diluant sous la forme, par exemple, d'un composé condensable inerte, le gain de volume au sein de la chambre de combustion est réduit, ce qui réduit le volume du courant d'évacuation et réduit la charge volumétrique sur la seconde pompe. Le gain de volume diminue parce que le diluant change de phase dans le courant d'évacuation, ce qui supprime effectivement la contribution du diluant au volume du courant d'évacuation. Ceci entraîne une économie d'énergie considérable étant donné qu'un volume réduit de gaz est produit par la chambre de combustion, lequel devrait être amené à la seconde pression, par exemple, la pression atmosphérique, au moyen de la seconde pompe.
EP14728250.3A 2013-06-10 2014-05-29 Épuration de gaz de procédé Active EP3008385B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1310252.0A GB2515017B (en) 2013-06-10 2013-06-10 Process gas abatement
PCT/GB2014/051631 WO2014199123A1 (fr) 2013-06-10 2014-05-29 Épuration de gaz de procédé

Publications (2)

Publication Number Publication Date
EP3008385A1 true EP3008385A1 (fr) 2016-04-20
EP3008385B1 EP3008385B1 (fr) 2018-03-14

Family

ID=48875984

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14728250.3A Active EP3008385B1 (fr) 2013-06-10 2014-05-29 Épuration de gaz de procédé

Country Status (8)

Country Link
US (1) US20160230989A1 (fr)
EP (1) EP3008385B1 (fr)
JP (1) JP6422953B2 (fr)
KR (1) KR102315105B1 (fr)
CN (1) CN105556211B (fr)
GB (1) GB2515017B (fr)
TW (1) TWI633926B (fr)
WO (1) WO2014199123A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018221021A1 (fr) * 2017-05-29 2018-12-06 カンケンテクノ株式会社 Procédé de détoxication par décompression de gaz d'échappement et dispositif associé
GB2579197B (en) * 2018-11-22 2021-06-09 Edwards Ltd Abatement method
GB2594078B (en) * 2020-04-16 2024-10-16 Edwards Ltd Flammable gas dilution

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2616884B1 (fr) * 1987-06-19 1991-05-10 Air Liquide Procede de traitement d'effluents gazeux provenant de la fabrication de composants electroniques et appareil d'incineration pour sa mise en oeuvre
JP2742562B2 (ja) * 1988-10-11 1998-04-22 千代田化工建設株式会社 有毒性排ガスの燃焼処理方法
JP3486022B2 (ja) * 1995-10-16 2004-01-13 ジャパン・エア・ガシズ株式会社 排ガス処理装置
US6261524B1 (en) * 1999-01-12 2001-07-17 Advanced Technology Materials, Inc. Advanced apparatus for abatement of gaseous pollutants
JP2001104751A (ja) * 1999-10-04 2001-04-17 Mitsubishi Electric Corp 排ガス除害装置
US6423284B1 (en) * 1999-10-18 2002-07-23 Advanced Technology Materials, Inc. Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases
JP3994605B2 (ja) * 1999-11-26 2007-10-24 株式会社日立製作所 Ｐｆｃガスの処理方法及び処理装置
JP2001185539A (ja) * 1999-12-24 2001-07-06 Toshiba Corp ガス回収システムおよびガス回収方法
US6579085B1 (en) * 2000-05-05 2003-06-17 The Boc Group, Inc. Burner and combustion method for the production of flame jet sheets in industrial furnaces
US7338629B2 (en) * 2001-02-02 2008-03-04 Consolidated Engineering Company, Inc. Integrated metal processing facility
US6602323B2 (en) * 2001-03-21 2003-08-05 Samsung Electronics Co., Ltd. Method and apparatus for reducing PFC emission during semiconductor manufacture
JP2003056830A (ja) * 2001-08-10 2003-02-26 Ebara Corp 排ガス処理装置
US6568185B1 (en) * 2001-12-03 2003-05-27 L'air Liquide Societe Anonyme A'directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude Combination air separation and steam-generation processes and plants therefore
AT411019B (de) * 2002-03-19 2003-09-25 Tribovent Verfahrensentwicklg Verfahren zum aufarbeiten von rückständen aus der zellstoff- und papierindustrie
GB0416385D0 (en) * 2004-07-22 2004-08-25 Boc Group Plc Gas abatement
GB0417378D0 (en) * 2004-08-04 2004-09-08 Boc Group Plc Gas abatement
GB0521944D0 (en) * 2005-10-27 2005-12-07 Boc Group Plc Method of treating gas
JP2007197271A (ja) * 2006-01-27 2007-08-09 Canon Inc 燃料改質装置
GB0611968D0 (en) * 2006-06-16 2006-07-26 Boc Group Plc Method and apparatus for the removal of fluorine from a gas system
US8845323B2 (en) * 2007-03-02 2014-09-30 Air Products And Chemicals, Inc. Method and apparatus for oxy-fuel combustion
DE102007015309B4 (de) * 2007-03-27 2023-01-05 Ansaldo Energia Switzerland AG Betriebsverfahren für eine Turbogruppe
GB0706544D0 (en) * 2007-04-04 2007-05-09 Boc Group Plc Combustive destruction of noxious substances
GB0902234D0 (en) * 2009-02-11 2009-03-25 Edwards Ltd Method of treating an exhaust gas stream
JP2013044479A (ja) * 2011-08-24 2013-03-04 Japan Pionics Co Ltd 塩化珪素化合物を含む排ガスの浄化方法

Also Published As

Publication number Publication date
WO2014199123A1 (fr) 2014-12-18
CN105556211A (zh) 2016-05-04
JP6422953B2 (ja) 2018-11-14
GB2515017A (en) 2014-12-17
TWI633926B (zh) 2018-09-01
JP2016526648A (ja) 2016-09-05
CN105556211B (zh) 2017-10-24
TW201509509A (zh) 2015-03-16
GB201310252D0 (en) 2013-07-24
US20160230989A1 (en) 2016-08-11
KR20160019428A (ko) 2016-02-19
EP3008385B1 (fr) 2018-03-14
GB2515017B (en) 2017-09-20
KR102315105B1 (ko) 2021-10-19

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