EP2978873B1 - Solution de dépôt de cuivre chimique - Google Patents

Solution de dépôt de cuivre chimique Download PDF

Info

Publication number
EP2978873B1
EP2978873B1 EP14714648.4A EP14714648A EP2978873B1 EP 2978873 B1 EP2978873 B1 EP 2978873B1 EP 14714648 A EP14714648 A EP 14714648A EP 2978873 B1 EP2978873 B1 EP 2978873B1
Authority
EP
European Patent Office
Prior art keywords
copper
copper plating
plating solution
electroless
complexing agent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP14714648.4A
Other languages
German (de)
English (en)
Other versions
EP2978873A1 (fr
Inventor
Dr. Frank Brüning
Birgit Beck
Elisa Langhammer
Dr. Johannes Etzkorn
Dr. Michael MERSCHKY
Jörg SCHULZE
Christian Lowinski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atotech Deutschland GmbH and Co KG
Original Assignee
Atotech Deutschland GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atotech Deutschland GmbH and Co KG filed Critical Atotech Deutschland GmbH and Co KG
Priority to EP14714648.4A priority Critical patent/EP2978873B1/fr
Publication of EP2978873A1 publication Critical patent/EP2978873A1/fr
Application granted granted Critical
Publication of EP2978873B1 publication Critical patent/EP2978873B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31—Coating with metals
    • C23C18/38—Coating with copper
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31—Coating with metals
    • C23C18/38—Coating with copper
    • C23C18/40—Coating with copper using reducing agents
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31—Coating with metals
    • C23C18/38—Coating with copper
    • C23C18/40—Coating with copper using reducing agents
    • C23C18/405—Formaldehyde

Definitions

  • the present invention relates to an electroless copper plating solution, a method for electroless copper plating utilizing said solution and the use of the solution for the plating of substrates.
  • Electroless plating is the controlled autocatalytic deposition of a continuous film of metal without the assistance of an external supply of electrons.
  • Non-metallic surfaces may be pretreated to make them receptive or catalytic for deposition. All or selected portions of a surface may suitably be pretreated.
  • the main components of electroless copper baths are the copper salt, a complexing agent, a reducing agent, and, as optional ingredients, an alkaline agent, and additives, as for example stabilizers.
  • Complexing agents are used to chelate the copper to be deposited and prevent the copper from being precipitated from solution (i.e. as the hydroxide and the like). Chelating copper renders the copper available to the reducing agent which converts the copper ions to metallic form.
  • US 4,617,205 discloses a composition for electroless deposition of copper, comprising copper ions, glyoxylate as reducing agent, and a complexing agent, for example EDTA, which is capable of forming a complex with copper that is stronger than a copper oxalate complex.
  • US 7,220,296 teaches an electroless plating bath comprising a water soluble copper compound, glyoxylic acid and a complexing agent which may be EDTA.
  • US 2002/0064592 discloses an electroless bath comprising a source of copper ions, glyoxylic acid or formaldehyde as reducing agent, and EDTA, tartrate or alkanol amine as complexing agent.
  • GB 1 305 468 A discloses an electroless copper bath comprising at least two complexing agents, one of which is cyclohexane diaminetetraacetic acid.
  • the other complexing agent can be any of a list of several complexing agents including Quadrol, HEDTA or EDTA.
  • Performance of a copper plating solution is difficult to predict and strongly depends on its constituents, especially the complexing agent and the reducing agent, and the molar ratio of its constituents.
  • An object of the invention was to provide with an electroless copper plating solution with improved performance, particularly an improved copper deposition rate.
  • a further object of the present invention was to provide an electroless copper plating solution for obtaining copper deposits with low roughness.
  • the present invention provides with an electroless copper plating solution, comprising
  • the combination of complexing agents may further comprise
  • N,N,N',N'-Tetrakis (2-hydroxypropyl) ethylenediamine is hereinafter abbreviated as "Quadrol", which is a trademark of BASF company.
  • Ethylenediamine tetraacetic acid is hereinafter also named as "EDTA”.
  • HEDTA N'-(2-Hydroxyethyl)-ethylenediamine-N,N,N'-triacetic acid
  • the electroless copper plating solution preferably does not contain cyclohexane diamine tetraacetic acid (CDTA) in an amount ranging from 0.1 mM to 5.5 M. In another embodiment the electroless copper plating solution preferably does not contain CDTA at all.
  • CDTA cyclohexane diamine tetraacetic acid
  • the copper plating solution of the invention shows an improved copper deposition rate. At the same time, a low roughness of copper surfaces can be reached, which is crucial for performance of certain electronic devices. Due to a higher deposition rate, a higher thickness of copper layer can be reached at the same process time.
  • the solution according to the invention and the method according to the invention are preferably used for the coating of printed circuit boards, chip carriers and semiconductor wafers or also of any other circuit carriers and interconnect devices.
  • the solution is used in particular in printed circuit boards and chip carriers, but also in semiconductor wafers, to plate surfaces, trenches, blind micro vias, through hole vias (through holes) and similar structures with copper.
  • the solution of the invention or the method of the invention can be used for deposition of copper on surfaces, in trenches, blind-micro-vias, through-hole-vias, and comparable structures in printed circuit boards, chips, carriers, wafers and various other interconnect devices.
  • through hole vias or “through holes”, as used in the present invention, encompasses all kinds of through hole vias and includes so-called “through silicon vias” in silicon wafers.
  • Another application wherein the solution can be used with beneficial effects is metallization of smooth, substrates made from glass, ceramic or plastics, preferably with a large surface area.
  • Examples are any kind of displays, as for example any kind of TFT-displays and liquid crystal displays (LCD).
  • LCD liquid crystal displays
  • a low roughness of copper surfaces can be reached with the solution of the invention. This effect is advantageous particularly for display applications since a copper layer can be produced with a good conductivity.
  • the electroless copper plating solution of the invention can be beneficially used for deposition of copper on a glass substrate, particularly with large surface area, such as glass panels.
  • Glass substrates are used, without limitation, for display applications, as mentioned above.
  • Wet electroless copper deposition, with a solution as mentioned above, on a glass substrate is beneficial in comparison to metal sputtering processes that have been used so far. Benefits that can be reached with wet electroless deposition in comparison to sputtering techniques are, inter alia, reduced internal stress and reduced bending of a glass substrate, reduced equipment maintenance, effective use of metal, reduced material waste, reduced process temperature.
  • electroless copper plating solution of the invention can be beneficially used for plating of glass substrates, particularly glass panels for displays.
  • the electroless copper plating solution of the invention is not only able to generate metal layers at higher deposition rate, but simultaneously with a low roughness in a range achieved by sputtering processes.
  • substrates for display production are activated by metal seed layers for subsequent deposition of metal layers in order to build necessary circuitry and switching elements.
  • the metal seed layers already display the future pattern of circuitry and switching elements that comprise small and/or isolated activated areas as well as a combination of small and larger activated areas.
  • a high copper deposition rate on glass substrate is reached with the solution of the invention, especially on glass substrates that have these small and/or isolated activated areas.
  • the solution of the invention also is able to deposit metal layers with uniform thickness simultaneously onto small and larger activated areas at high deposition rates.
  • the solution of the invention is an aqueous solution.
  • aqueous solution means that the prevailing liquid medium, which is the solvent in the solution, is water. Further liquids, that are miscible with water, as for example alcohols and other polar organic liquids, may be added.
  • the solution of the present invention may be prepared by dissolving all components in aqueous liquid medium, preferably in water.
  • the solution contains a copper ion source, which may for example be any water soluble copper salt. Copper may for example, and without limitation, be added as copper sulphate, copper chloride, copper nitrate, copper acetate, copper methane sulfonate ((CH 3 O 3 S) 2 Cu), copper hydroxide; or hydrates thereof.
  • a copper ion source which may for example be any water soluble copper salt. Copper may for example, and without limitation, be added as copper sulphate, copper chloride, copper nitrate, copper acetate, copper methane sulfonate ((CH 3 O 3 S) 2 Cu), copper hydroxide; or hydrates thereof.
  • the reducing agent serves for reducing the copper ions in order to obtain metallic copper for plating.
  • Reducing agents that can be employed are for example, and without limitation, formaldehyde, glyoxylic acid, hypophosphite, hydrazine, and borohydride.
  • Preferred reducing agents are formaldehyde and glyoxylic acid.
  • source of a reducing agent means a substance that is converted to a reducing agent in the solution.
  • the source is for example a precursor of a reducing agent that converted to the reducing agent.
  • An example is given below with respect to glyoxylic acid.
  • the electroless aqueous copper plating solution in one embodiment comprises glyoxylic acid or a source of glyoxylic acid.
  • the solution of the invention does not contain formaldehyde, or, in other words, the solution is according to this embodiment free of formaldehyde.
  • source of glyoxylic acid encompasses all compounds that can be converted to glyoxylic acid in aqueous solution, such as precursors.
  • a preferred precursor is dichloro acetic acid.
  • Glyoxylic acid is the reducing agent for the reduction of copper ions to elementary copper. In the solution, glyoxylic acid and glyoxylate-ions may be present.
  • glyoxylic acid includes salts thereof. The exact nature of the species, acid or salt, present will depend on the pH of the solution. The same consideration applies to other weak acids and bases.
  • one or more additional reducing agents may be added, as for example hypophosphoric acid, glycolic acid or formic acid, or salts of aforementioned acids.
  • the additional reducing agent is preferably an agent that acts as reducing agent but cannot be used as the sole reducing agent (cf. for example the disclosure in US 7,220,296 , col. 4, I. 20-43 and 54-62). Therefore, such additional reducing agent is in this sense also called an "enhancer".
  • Electroless copper baths using reducing agents described above preferably employ a relatively high pH, usually between 11 and 14, preferably between 12.5 and 13.5, and are adjusted generally by potassium hydroxide (KOH), sodium hydroxide (NaOH), lithium hydroxide (LiOH), ammonium hydroxide or quarternary ammonium hydroxide, such as tetramethylammonium hydroxide (TMAH).
  • KOH potassium hydroxide
  • NaOH sodium hydroxide
  • LiOH lithium hydroxide
  • TMAH tetramethylammonium hydroxide
  • the solution may contain a source of hydroxide ions, as for example and without limitation one or more of the compounds listed above.
  • a source of hydroxide is for example added if an alkaline pH of the solution is desired and if the pH is not already in the alkaline range by other constituents.
  • potassium hydroxide Preferred is the use of potassium hydroxide.
  • Potassium hydroxide is of advantage, if glyoxylic acid is used as the reducing agent, because the solubility of potassium oxalate is high. Oxalate anions are formed in the solution by the oxidation of the glyoxylic acid.
  • potassium hydroxide is especially preferable for stability of the solution of the present invention.
  • the solution of the present invention further comprises a mixture of the complexing agent i) Quadrol or a salt thereof with the complexing agent ii) HEDTA or a salt thereof.
  • the mixture of the complexing agent i) Quadrol or a salt thereof with the complexing agent ii) HEDTA or a salt thereof may further comprise the complexing agent iii) EDTA or a salt thereof.
  • the addition of Quadrol or a salt thereof to complexing agent ii) or to a mixture of complexing agent ii) and complexing agent iii) results in an efficient increase in copper deposition. Before the present invention was made, it had been observed that increase of metal deposition rate leads to increased roughness of metal surfaces.
  • the salts of Quadrol, HEDTA or EDTA may be any suitable, water soluble salts.
  • the counterions of the salts of Quadrol, HEDTA or EDTA are preferably selected from alkali metal ions, earth alkali metal ions and ammonium ions.
  • the counterions of the salts of Quadrol, HEDTA or EDTA are more preferably selected from lithium ions, sodium ions, potassium ions, magnesium ions, calcium ions and ammonium ions.
  • the solution of the present invention is free of toxic co-metals.
  • the solution of the present invention is especially free of nickel. Nickel forms a more stable complex with the complexing agents used herein than copper. It therefore reduces copper complexation and negatively affects or impedes copper deposition. Moreover, the presence of nickel in the bath would lead to unwanted nickel deposition, which has to be avoided especially in display production.
  • the molar ratio of the complexing agents, related to the total molar amount of all complexing agents, to copper ions is in the range of 1:1 to 10:1, preferably 1:1 to 8:1, more preferably 2:1 to 8:1, even more preferably 2:1 to 5:1, still even more preferably 1.5:1 to 4:1, most preferably 2:1 to 4:1.
  • the molar ratio of the complexing agents, related to the total molar amount of all complexing agents, to copper ions is defined as the ratio of the total molar amount of all complexing agents to the molar amount of copper ions.
  • the total molar amount of all complexing agents is the sum of the individual molar amounts of all complexing agents.
  • All complexing agents may be a mixture of complexing agent i) and complexing agent ii) or may be a mixture of complexing agent i), complexing agent ii) and complexing agent iii).
  • the amount of complexing agents is also given as equivalents.
  • One equivalent is the amount of a complexing agent which completely complexes a given amount of copper ions.
  • one equivalent of complexing agent corresponds to a molar ratio of complexing agent to copper ions of 1:1.
  • a molar ratio of 1:1 to 10:1 of complexing agent(s) to copper ions means 1 to 10 equivalents of complexing agent(s) related to copper. Less complexing agent leads to instability of the bath or deposition does not start. More complexing agent in relation to copper leads to a high density of the bath, which also leads to reduced lifetime and instability of the bath. Using these ranges leads to a beneficial combination of high copper deposition rate and low roughness.
  • the molar ratio of the complexing agents, related to the total molar amount of all complexing agents, to copper ions is in the range of 3:1 to 8:1, more preferably 3:1 to 5:1, even more preferably 3:1 to 4:1. Using these ranges leads to a particularly beneficial combination of high copper deposition rate and low roughness. A very reproducible performance, a very reproducible copper deposition, and copper layers with very uniform thickness can be obtained.
  • the ratio of the molar amount of complexing agent i) to the molar amount of complexing agent ii) ranges from 1:0.05 to 1:20, preferably from 1:0.1 to 1:10, more preferably from 1:1 to 1:5, even more preferably from 1:1 to 1:4, most preferably from 1:2 to 1:4.
  • the ratio of the molar amount of complexing agent i) to the molar amount of a mixture of complexing agent ii) and complexing agent iii) ranges from 1:0.05 to 1:20, preferably from 1:0.1 to 1:10, more preferably from 1:1 to 1:5, even more preferably from 1:1 to 1:4, most preferably from 1:2 to 1:4.
  • the molar amount of a mixture of complexing agent ii) and complexing agent iii) is the sum of the individual molar amounts of complexing agent ii) and complexing agent iii).
  • the ratio of the molar amount of complexing agent i) to the molar amount of complexing agent ii) ranges from 1:0.05 to 1:5, preferably from 1:0.05 to 1:3, more preferably from 1:0.1 to 1:2.
  • the ratio of the molar amount of complexing agent i) to the molar amount of a mixture of complexing agent ii) and complexing agent iii) (complexing agent i) : [complexing agent ii) + complexing agent iii)]) ranges from 1:0.05 to 1:5, preferably from 1:0.05 to 1:3, more preferably from 1:0.1 to 1:2.
  • the ratio of the molar amount of complexing agent i) to the molar amount of complexing agent ii) ranges from 1:5 to 1:20, preferably from 1:7 to 1:15, more preferably from 1:7 to 1:10.
  • the ratio of the molar amount of complexing agent i) to the molar amount of a mixture of complexing agent ii) and complexing agent iii) (complexing agent i) : [complexing agent ii) + complexing agent iii)]) ranges from :5 to 1:20, preferably from 1:7 to 1:15, more preferably from 1:7 to 1:10.
  • the electroless aqueous copper plating solution comprises, as complexing agents, a combination of
  • the electroless aqueous copper plating solution comprises, as complexing agents, a combination of
  • Stabilizing agents are compounds that stabilize the electroless plating solution against unwanted outplating in the bulk solution.
  • the term "outplating” means unwanted and/or uncontrolled deposition of copper, for example on the bottom of a reaction vessel or on other surfaces.
  • Stabilizing function can for example be accomplished by substances acting as catalyst poison (for example sulfur or other chalcogenide containing compounds) or by compounds forming copper(I)-complexes, thus inhibiting the formation of copper(I)oxide.
  • the solution of the present invention may comprise one or more of a stabilizing agent.
  • Suitable stabilizers are, without limitation, dipyridyls (2,2'-dipyridyl, 4,4'dipyridyl), phenanthroline, mercapto-benzothiazole, thio-urea or its derivatives, cyanides like NaCN, KCN, K 4 [Fe(CN) 6 ]; Na 2 S 2 O 3 , K 2 S 2 O 3 , thiocyanates, iodides, ethanolamines, polymers like polyacrylamides, polyacrylates, polyethylene glycols, or polypropylene glycols and their copolymers.
  • the present invention relates to a method for electroless copper plating, the method comprising contacting a substrate with an electroless copper plating solution as described above.
  • the substrate may be dipped or immersed in the solution of the invention.
  • a whole surface of a substrate may be plated with copper, or only selected portions.
  • the solution be agitated during use.
  • work- and/or solution-agitation may be used.
  • the method will be carried out for a sufficient time to yield a deposit of the thickness required, which in turn will depend on the particular application.
  • the electroless deposition of copper according to the method of the invention can particularly be used for the through-plating of holes, surfaces, trenches, blind micro vias in printed circuit boards.
  • Double sided or multilayer boards may be plated by means of the present invention.
  • the method of the invention may be useful in providing electroless copper deposits with a thickness in the range of 0.05 ⁇ m to 10 ⁇ m, preferably between 0.1 ⁇ m - 10 ⁇ m, 0.1 ⁇ m - 5 ⁇ m, 0.5 ⁇ m - 3 ⁇ m.
  • the thickness of copper layer is determined with white light interferometry, as described in the examples.
  • the method of the invention produces copper layers on the substrate with a roughness, expressed as the root-mean-square roughness parameter, of 5nm to 60 nm, preferably 5nm - 55nm and more preferably 10nm - 45nm.
  • the obtained roughness is lower by 30 % to 60 %, preferably by 40 % to 50 %, than a method using complexing agent ii) only or using complexing agent iii) only or using a mixture of complexing agents ii) and iii) only.
  • the term "only" means: without addition of Quadrol.
  • the roughness of the copper layer is determined with white light interferometry, as described in the examples.
  • Substrates that are generally used for printed circuit board manufacture are most frequently epoxy resins or epoxy glass composites. But other substances, notably phenolic resins, polytetrafluoroethylene (PTFE), polyimides, polyphenyleneoxides, BT(bismaleintriazine)-resins, cyanate esters and polysulphones can be used.
  • phenolic resins polytetrafluoroethylene (PTFE)
  • PTFE polytetrafluoroethylene
  • polyimides polyphenyleneoxides
  • BT(bismaleintriazine)-resins cyanate esters and polysulphones
  • the substrate is a substrate made from glass, ceramic or plastics, preferably with a large surface area.
  • a large surface area means preferably an area of at least one m 2 , preferably at least 3 m 2 , more preferably at least 5 m 2 .
  • a large surface area means in another embodiment preferably an area of 1 m 2 to 9 m 2 , more preferably 3 m 2 to 9 m 2 , even more preferably 3 m 2 to 6 m 2 , still more preferably 5 m 2 to 6 m 2 .
  • the substrate has preferably a smooth surface.
  • the term smooth means preferably a roughness (Sq or RMS) of a few nanometers. Preferably the roughness is 5 - 30 nm, measured as RMS. Explanations of the method for roughness measurement and the terms "Sq" and "RMS" are given in the examples.
  • the substrate is a glass substrate, preferably a glass panel.
  • Said glass substrates, especially glass panels can be used for application in TFT displays, such as liquid crystal displays.
  • the glass substrate is particularly such one that fulfils the specifications as used in display production, as for example thickness and smoothness.
  • a preferred glass is free from alkali, such as alkali free boro-silicate-glass.
  • Glass substrates may be pretreated before the method of the invention is carried out, for example with metal seeds, as further explained below.
  • the method is carried out at a temperature in the range of 20 - 60°C, preferably 30 - 55°C. It has been shown in the present invention that when Quadrol is used as complexing agent, in combination with another complexing agent, copper deposition can be done at lower temperatures than in absence of this component. Even though the temperature is lower, the deposition rate is higher than with a bath that does not contain Quadrol.
  • the substrate i.e. the surfaces of the substrate that are to be plated with copper, particularly non-metallic surfaces, may be pretreated by means within the skill in the art (as for example described in US 4,617,205 , col 8) to make it/them more receptive or autocatalytic for copper deposition. All or selected portions of a surface may be pretreated.
  • a pretreatment is, however, not necessary in every case and depends on the kind of substrate and surface. Within the pretreatment, it is possible to sensitise substrates prior to the deposition of electroless copper on them. This may be achieved by the adsorption of a catalysing metal (such as a noble metal, for example palladium) onto the surface of the substrate.
  • a catalysing metal such as a noble metal, for example palladium
  • a pretreatment process strongly depends on parameters such as the substrate, the desired application, and the desired properties of the copper surface.
  • An exemplary and non-limiting pretreatment process may comprise one or more of the following steps
  • a permanganate etching step is employed.
  • the so-called Desmear process is a multi-stage process, the steps of which are a swelling step, a permanganate etching step and a reduction step.
  • the sweller used in the swelling step is made of a mixture of organic solvents.
  • drill smear and other impurities are removed from the surfaces of the substrate.
  • a high temperature of 60 - 80 °C promotes the infiltration of the sweller which leads to a swelled surface. Therefore a stronger attack of the subsequently applied permanganate solution is possible during the permanganate etching step.
  • the reduction solution of the reduction step removes the manganese dioxides produced during the permanganate step from the surfaces.
  • the reduction solution contains a reducing agent and optionally a conditioner.
  • the desmear process may be combined with the above described steps.
  • the desmear process may be performed before step a) of the above described pretreatment process or the desmear process may be performed instead of steps a) and b) of the above described pretreatment process.
  • a surface is only contacted with a pre-dip solution and an activator solution and then with the solution of the invention.
  • Contacting with a cleaning solution and an adhesion enhancer before the pre-dip step are optional steps that can be carried out in advance.
  • Still another process which is often used for glass substrates, may be carried out with following steps before copper plating:
  • a glass surface that is to be plated exhibits metal seed layers.
  • the metal seed layers may be brought onto the surface by sputtering techniques.
  • Exemplary seeds are layers composed of copper, molybdenum, titanium, or a mixture thereof.
  • Said pretreated glass surface is contacted with an activator solution that contains ionic catalysing metal, such as a noble metal, preferably palladium, causing the surface to become catalytic.
  • the ionic catalysing metal is reduced onto the surface by the seed metal.
  • the exemplary pretreatment processes, or single steps thereof, may be combined to alternative pretreatment processes, if found necessary.
  • the present invention relates to the use of the electroless copper plating solution as described above for the plating of printed circuit boards, wafers, Integrated circuit substrates, molded interconnect device (MID) components, displays, such as liquid crystal or plasma displays, particularly displays for electronic devices or TVs, display components, or plastic parts, such as plastic parts for functional or decorative purposes.
  • MID molded interconnect device
  • White light interferometer Model MIC - 520, of ATOS GmbH (Germany) was used to measure the thickness (Height difference between base plane and plated pattern) and surface roughness of electrolessly plated copper layers.
  • White light interferometry is an optical microscopy method known to persons skilled in the art which projects the target area of a sample onto a CCD camera. Using interference objectives equipped with an internal beam splitter, a high-precision reference mirror is projected onto the CCD camera as well. Due to the overlay of both images, a spatially resolved interferogram is created which reflects the height differences between the very flat reference mirror and the sample of interest. In order to image samples with large height distribution a vertical scan scheme is used, i.e.
  • interferograms of the area of interest are imaged as a series within a range of different sample-objective distances. From these data a full three dimensional image is compiled. Using this method, topographic images in the range of 60 ⁇ m x 60 ⁇ m to 1.2 mm x 1.2 mm can be recorded with a vertical resolution in the range of a few nm.
  • the topographic data are used to calculate surface roughness expressed as the root-mean-square roughness parameter, abbreviated as Rq or RMS on surface profiles (profile roughness parameter) and abbreviated as Sq on surface topographies (areal roughness parameter).
  • Rq root-mean-square roughness parameter
  • Sq on surface topographies
  • topographic data are used to calculate the thickness of the plated copper layers as height difference between the substrate surface (base plane) and the surface of the plated metal pattern.
  • layer thickness and surface roughness the Optical profilometer / White light interferometer, Model MIC - 520, of ATOS GmbH (Germany) was equipped with the computer software Micromap 123, version 4.0, by Micromap Corporation.
  • the mode of measurement was Focus 560 M.
  • the topographic images were measured with an objective lens with 10 times magnification and an ocular with 2 times magnification.
  • the topographic images were recorded in the range of 312 ⁇ m x 312 ⁇ m and consist of 480 x 480 points.
  • Substrate Alkali-free borosilicate glass, thickness 0.7mm, sputtered seed layer of copper. Pre treatment:
  • Electroless copper plating solutions were manufactured. As complexing agents combinations of Quadrol/EDTA (comparative example) and Quadrol/HEDTA (inventive example) were employed. Quadrol was added in amounts of 0 g/l, 2.7 g/l and 5.4 g/l, respectively. Cu 2+ ions were added as CuSO 4 *6H 2 O. The pH of the baths was 13.2 at 21 °C.
  • Dwell time means the time of contacting the substrates with the electroless copper plating solutions.
  • a combination of Quadrol/EDTA (table 1, Fig. 1 ) or a combination of Quadrol/HEDTA (table 2, Fig. 2 ) leads to increased copper thicknesses in comparison to EDTA alone or HEDTA alone, respectively, when the same process time is chosen.
  • the results show that addition of Quadrol increases the deposition rate while significantly reducing the roughness of the deposited copper layers. If Quadrol is added to a solution already containing HEDTA the roughness in relation to the deposition rate is lower than if Quadrol is added to a solution already containing EDTA alone.
  • Electroless copper plating solutions were prepared as described in Example 1.
  • the copper plating solutions contained a combination of complexing agents Quadrol and HEDTA in a molar ratio of 1:20.
  • the total molar amount of complexing agents was varied in relation to the molar amount of copper ions as shown in Table 3.
  • As stabilizer a mixture of cyanide and sulphur compounds was added.
  • Example A and B Two pre-treated substrates (sample A and B) were contacted with the respective plating solutions as described above at 45 °C for 10 min each.
  • the samples of deposited Cu layers were analysed as described in Example 1. The results are shown in Table 3.
  • Table 3 Variation of ratio of complexing agents to copper ions.

Claims (14)

  1. Solution aqueuse de cuivrage sans courant, comprenant
    - une source d'ions cuivre,
    - un réducteur ou une source d'un réducteur,
    caractérisée en ce que la solution aqueuse de cuivrage sans courant comprend en outre une combinaison comprenant
    i) de la N,N,N',N'-tétrakis(2-hydroxypropyl)éthylènediamine ou un sel de celle-ci, et
    ii) de l'acide N'-(2-hydroxyéthyl)-éthylènediaminetriacétique ou un sel de celui-ci,
    comme agents complexants ; et
    dans laquelle le rapport de la quantité molaire totale de tous les agents complexants aux ions cuivre se situe dans la gamme de 1:1 à 10:1.
  2. Solution aqueuse de cuivrage sans courant selon la revendication 1, dans laquelle la combinaison d'agents complexants comprend en outre
    iii) de l'acide éthylènediamine-tétraacétique ou un sel de celui-ci.
  3. Solution aqueuse de cuivrage sans courant selon une des revendications précédentes, dans laquelle le rapport de la quantité molaire totale de tous les agents complexants aux ions cuivre se situe dans la gamme de 1:1 à 8:1.
  4. Solution aqueuse de cuivrage sans courant selon une des revendications précédentes, dans laquelle le rapport de la quantité molaire d'agent complexant i) à la quantité molaire d'agent complexant ii) va de 1:0,05 à 1:20.
  5. Solution aqueuse de cuivrage sans courant selon les revendications 2 ou 3, dans laquelle le rapport de la quantité molaire d'agent complexant i) à la quantité molaire d'un mélange d'agent complexant ii) et d'agent complexant iii) va de 1:0,05 à 1:20.
  6. Solution aqueuse de cuivrage sans courant selon une des revendications précédentes, dans laquelle le réducteur est choisi entre l'acide glyoxylique et le formaldéhyde.
  7. Procédé de cuivrage sans courant, le procédé comprenant la mise en contact d'un substrat avec une solution aqueuse de cuivrage sans courant selon une des revendications 1 à 6.
  8. Procédé selon la revendication 7, dans lequel le substrat est un substrat fabriqué à partir de verre, de céramique ou de plastique.
  9. Procédé selon la revendication 7 ou 8, dans lequel le substrat est un substrat de verre, de préférence un panneau de verre.
  10. Procédé selon les revendications 7 à 9, dans lequel le substrat a une grande surface et la grande surface est une surface d'au moins 5 m2.
  11. Procédé selon les revendications 7 à 10, dans lequel une couche de cuivre avec une épaisseur de 0,5 µm à 3 µm est produite sur le substrat.
  12. Procédé selon les revendications 7 à 11, dans lequel une couche de cuivre avec une rugosité exprimée comme le paramètre de rugosité moyenne quadratique de 5 à 60 nm est produite sur le substrat.
  13. Utilisation d'une solution aqueuse de cuivrage sans courant selon une des revendications 1 à 6 pour le revêtement de cartes de circuits imprimés, de substrats de circuits intégrés, de tranches, de dispositifs d'interconnexion moulés, d'écrans, de composants d'écrans ou de pièces en plastique.
  14. Utilisation d'une solution de cuivrage sans courant selon une des revendications 1 à 6 pour le revêtement de substrats de verre, en particulier de panneaux de verre pour écrans.
EP14714648.4A 2013-03-27 2014-03-25 Solution de dépôt de cuivre chimique Active EP2978873B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP14714648.4A EP2978873B1 (fr) 2013-03-27 2014-03-25 Solution de dépôt de cuivre chimique

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP13161418 2013-03-27
EP14714648.4A EP2978873B1 (fr) 2013-03-27 2014-03-25 Solution de dépôt de cuivre chimique
PCT/EP2014/055979 WO2014154702A1 (fr) 2013-03-27 2014-03-25 Solution de cuivrage autocatalytique

Publications (2)

Publication Number Publication Date
EP2978873A1 EP2978873A1 (fr) 2016-02-03
EP2978873B1 true EP2978873B1 (fr) 2016-12-28

Family

ID=47997197

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14714648.4A Active EP2978873B1 (fr) 2013-03-27 2014-03-25 Solution de dépôt de cuivre chimique

Country Status (7)

Country Link
US (1) US20160273112A1 (fr)
EP (1) EP2978873B1 (fr)
JP (1) JP6388910B2 (fr)
KR (1) KR102162540B1 (fr)
CN (1) CN105008587B (fr)
TW (1) TWI629376B (fr)
WO (1) WO2014154702A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2784181B1 (fr) * 2013-03-27 2015-12-09 ATOTECH Deutschland GmbH Solution de dépôt de cuivre chimique
US20160145745A1 (en) * 2014-11-24 2016-05-26 Rohm And Haas Electronic Materials Llc Formaldehyde-free electroless metal plating compositions and methods
EP3035122B1 (fr) 2014-12-16 2019-03-20 ATOTECH Deutschland GmbH Procédé de fabrication de lignes fines
EP3034650B1 (fr) 2014-12-16 2017-06-21 ATOTECH Deutschland GmbH Compositions de bain de placage pour un dépôt autocatalytique de métaux et d'alliages métalliques
CN107429399B (zh) 2015-03-20 2020-02-07 埃托特克德国有限公司 用于硅基材的活化方法
US20160348245A1 (en) * 2015-05-28 2016-12-01 Macdermid, Incorporated Method of Pretreatment for Electroless Plating
EP3578683B1 (fr) 2018-06-08 2021-02-24 ATOTECH Deutschland GmbH Bain de placage de cuivre ou d'alliage de cuivre autocatalytique et procédé de galvanoplastie
JP6733016B1 (ja) * 2019-07-17 2020-07-29 上村工業株式会社 無電解銅めっき浴
CN114990533B (zh) * 2022-04-13 2023-06-16 江苏富乐华半导体科技股份有限公司 一种改善陶瓷基板表面电镀铜结合力的方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE757573A (fr) * 1969-10-16 1971-04-15 Philips Nv Depot sans courant de cuivre flexible
CA925252A (en) * 1969-11-20 1973-05-01 Paunovic Milan Dual and multiple complexers for electroless plating baths
US3920864A (en) * 1973-07-30 1975-11-18 Charles B Greenberg Transparent metal film having a brown-gray appearance
US4303443A (en) * 1979-06-15 1981-12-01 Hitachi, Ltd. Electroless copper plating solution
JPS60200969A (ja) * 1984-03-26 1985-10-11 Toshiba Corp 化学銅めつき液
US4549946A (en) * 1984-05-09 1985-10-29 Electrochem International, Inc. Process and an electrodialytic cell for electrodialytically regenerating a spent electroless copper plating bath
US4617205A (en) * 1984-12-21 1986-10-14 Omi International Corporation Formaldehyde-free autocatalytic electroless copper plating
US4814009A (en) * 1986-11-14 1989-03-21 Nippondenso Co., Ltd. Electroless copper plating solution
JPS63297574A (ja) * 1987-05-29 1988-12-05 Matsushita Electric Ind Co Ltd 無電解銅めっき液
JP2794741B2 (ja) * 1989-01-13 1998-09-10 日立化成工業株式会社 無電解銅めっき液
IL153498A0 (en) * 2002-12-17 2003-07-06 J G Systems Inc Electroless copper metallization of electronic devices
JP4559936B2 (ja) * 2004-10-21 2010-10-13 アルプス電気株式会社 無電解めっき方法およびこの方法を用いた回路形成方法
US7160583B2 (en) * 2004-12-03 2007-01-09 3M Innovative Properties Company Microfabrication using patterned topography and self-assembled monolayers
US7871670B2 (en) * 2005-08-10 2011-01-18 3M Innovative Properties Company Microfabrication using replicated patterned topography and self-assembled monolayers
TWI347982B (en) * 2006-07-07 2011-09-01 Rohm & Haas Elect Mat Improved electroless copper compositions
WO2008049019A2 (fr) * 2006-10-17 2008-04-24 Enthone Inc. Cuivrage permettant de remplir des caractéristiques lors de la fabrication de dispositifs microélectroniques
CN102051607B (zh) * 2009-10-29 2012-09-26 比亚迪股份有限公司 一种化学镀铜溶液

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
CN105008587A (zh) 2015-10-28
KR102162540B1 (ko) 2020-10-08
TWI629376B (zh) 2018-07-11
JP2016516902A (ja) 2016-06-09
JP6388910B2 (ja) 2018-09-12
EP2978873A1 (fr) 2016-02-03
US20160273112A1 (en) 2016-09-22
KR20150136066A (ko) 2015-12-04
CN105008587B (zh) 2018-04-17
TW201447038A (zh) 2014-12-16
WO2014154702A1 (fr) 2014-10-02

Similar Documents

Publication Publication Date Title
EP2978873B1 (fr) Solution de dépôt de cuivre chimique
US9650718B2 (en) Electroless copper plating solution
JP6161691B2 (ja) ニッケル層の無電解堆積用のめっき浴
TWI557271B (zh) 不含甲醛之無電鍍銅溶液、其用途及無電鍍銅之方法
TWI554643B (zh) 無電鍍覆用催化劑溶液
KR102427122B1 (ko) 구리 및 구리 합금 회로의 광학 반사율을 감소시키는 방법 및 터치 스크린 디바이스
TW201720955A (zh) 用於金之無電電鍍之鍍浴組合物及沉積金層之方法
EP3049550B1 (fr) Procédé de dépôt d'une couche de germe de cuivre sur une couche barrière et bain de cuivrage
TWI814822B (zh) 無電解銅或銅合金鍍浴及用於鍍覆之方法
Bamberg et al. P-66: Wet chemical metallization for high-end flat panel display manufacturing

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20150903

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

DAX Request for extension of the european patent (deleted)
GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

INTG Intention to grant announced

Effective date: 20160909

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 857370

Country of ref document: AT

Kind code of ref document: T

Effective date: 20170115

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 602014005865

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170328

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170329

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20161228

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170428

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170328

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170428

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

Ref country code: BE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 602014005865

Country of ref document: DE

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

26N No opposition filed

Effective date: 20170929

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20171130

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170331

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170325

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170331

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170325

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170331

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170325

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20180325

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180325

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20140325

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

REG Reference to a national code

Ref country code: AT

Ref legal event code: UEP

Ref document number: 857370

Country of ref document: AT

Kind code of ref document: T

Effective date: 20161228

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161228

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: AT

Payment date: 20230322

Year of fee payment: 10

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20230321

Year of fee payment: 10

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: AT

Payment date: 20240321

Year of fee payment: 11

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20240320

Year of fee payment: 11