EP2850469A1 - Revêtement dlc conçu pour un composant ir optique et composant ir optique pourvu d'un revêtement dlc - Google Patents

Revêtement dlc conçu pour un composant ir optique et composant ir optique pourvu d'un revêtement dlc

Info

Publication number
EP2850469A1
EP2850469A1 EP13732080.0A EP13732080A EP2850469A1 EP 2850469 A1 EP2850469 A1 EP 2850469A1 EP 13732080 A EP13732080 A EP 13732080A EP 2850469 A1 EP2850469 A1 EP 2850469A1
Authority
EP
European Patent Office
Prior art keywords
optical
coating
layer
dlc coating
elasticity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP13732080.0A
Other languages
German (de)
English (en)
Inventor
Elvira Gittler
Tino Wagner
Michael Degel
Peter MAUSHAKE
Marcus Serwazi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik Optical Systems GmbH
Original Assignee
Jenoptik Optical Systems GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Optical Systems GmbH filed Critical Jenoptik Optical Systems GmbH
Publication of EP2850469A1 publication Critical patent/EP2850469A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/046—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with at least one amorphous inorganic material layer, e.g. DLC, a-C:H, a-C:Me, the layer being doped or not
    • G02B1/105—
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14—Protective coatings, e.g. hard coatings

Definitions

  • the invention relates to a DLC coating and optical IR components with a DLC coating, as is known generically from US 4,995,684 A.
  • Optical IR components in systems designed for the use of infrared radiation must, in particular, be able to transmit images and signals of high and consistent quality over a long-term stable period if they are used in measuring, testing or monitoring systems.
  • optical IR components are to be understood as meaning all elements which are provided for applications in wavelength ranges of the infrared radiation.
  • Optical IR components can be, for example, optical lenses, mirrors, filters, beam splitters or other substrates with coatings.
  • the optical IR component can be provided with a resistant protective layer.
  • Such protective layers may, for example, consist of carbon, which is applied in a diamond-like structure on the optical IR component.
  • Such protective layers are also referred to as "hard carbon layer” or “diamond-like carbon layer”. The following is therefore spoken of DLC coating.
  • DLC coatings have been developed for IR devices in optical systems of industrial, civil and military thermosensory monitoring systems. They can be applied to materials such as silicon and germanium. The application is carried out by means of methods known to the person skilled in the art, such as PECVD ("plasma-enhanced chemical vapor deposition") In the simplest case, the refractive indices of single layers are adjusted to the refractive indices of the materials of a support Layer of an anti-reflection coating serve.
  • PECVD plasma-enhanced chemical vapor deposition
  • DLC coatings are used in the IR range as single layers with high resistance (eg windshield wiper test) for the spectral ranges with wavelengths of 3 to 5 ⁇ m or 7 to 12 ⁇ m. DLC coatings are limited in terms of spectral bandwidth, either in the range medium-wave IR radiation (MWIR, 3 - 5 ⁇ ) or long-wave IR radiation (LWIR, 7.5 - 12 ⁇ ). For systems operating in a broad spectral range or in dual-band systems, a single-layer DLC coating is unsuitable.
  • MWIR medium-wave IR radiation
  • LWIR long-wave IR radiation
  • DLC coatings are known, for example, from US Pat. No. 5,502,442 A, in which several DLC layers are applied over an antireflection coating. Germanium arsenide is chosen as the substrate. If a layer of a material of low elasticity (high modulus of elasticity) is applied over more elastic layers, it can easily lead to a so-called eggshell effect. In the event of sudden stresses, the layers of low elasticity separate from those of high elasticity. Thus, an optical IR device would be destroyed or at least massively and in unpredictable extent impaired in its usability. In order to avoid these disadvantageous effects, it is proposed in US Pat. No. 5,502,442 A that connecting layers of silicon be applied between the layers of a DLC coating. These are up to 30 ⁇ partly very thick. With such a solution Although quite homogeneous transmission values can be achieved over a wavelength range of 3 to 12 ⁇ m, the reflection values of up to 78% are far too high for high-performance optics in the IR range.
  • DLC coatings can be used to protect a window of zinc sulfide transparent to IR radiation.
  • DLC coatings are transparent to IR radiation, but thick DLC coatings flake off easily under load ("eggshell effect"), it is proposed in GB 2280201 A to use up to 30 ⁇ layer of germanium carbide as the transparent intermediate layer Such a solution does not significantly degrade the optical properties of such a designed IR optical device.
  • the present invention does not significantly affect the optical properties of such an optical IR device Issues in the selection of the materials of IR optical components in terms of their mechanical and optical properties performed at the operating temperatures and mechanical stresses occurring.
  • the invention has for its object to propose a way to broadband transmission of IR radiation through an optical device, wherein the optical component has a high resistance to mechanical stress.
  • a DLC coating for an optical IR component in that the DLC coating consists of at least one inner layer having a first modulus of elasticity and an outer layer having a second modulus of elasticity applied one above another on a carrier surface of a carrier wherein the inner layer has an inner surface over which the inner layer directly contacts the carrier surface of the carrier and the outer layer has an outer surface facing away from the carrier surface.
  • the value of the first modulus of elasticity is greater than the value of the second modulus of elasticity.
  • the gist of the invention is that the at least one layer of the mechanical impact resistant DLC coating is designed to prevent mechanical impact on the outer surface but to avoid undamped transfer to the underlying at least one layer of the antireflection coating ,
  • This advantageous effect is achieved in that the outer surface has a higher modulus of elasticity than the underlying layers or the underlying regions of the at least one layer.
  • the DLC coating is therefore less elastic on its outer surface, which is directly exposed to ambient conditions, than on its inner surface.
  • a carrier can be formed by any material on which a DLC coating can be applied.
  • the carrier is a material which is transmissive to IR radiation.
  • the carrier can in other versions also from a Material that is little or not transmissive to IR radiation (eg filters or mirrors).
  • an outer surface of the DLC coating seals against an environment of the DLC coating while the inner surface forms a contact surface with a substrate.
  • the faces of the DLC coating remain unconsidered in this description. If the DLC coating according to the prior art is formed as a single layer, the single layer has an outer and an inner surface.
  • the outer layer has the outer surface and the inner layer the inner surface of the DLC coating.
  • further layers are present between the inner layer and the outer layer, the respective material of which each has a modulus of elasticity.
  • the other layers are DLC layers.
  • the values of the elastic moduli of the further layers are at most as great as the value of the first modulus of elasticity.
  • the values of the moduli of elasticity of the further layers of the DLC coating can remain the same over several layers, for example.
  • the values of the elastic moduli of the further layers decrease from the outer layer to the inner layer with each layer.
  • the DLC coating has a gradient of decreasing elastic modulus values from its outer surface to its inner surface and the gradient includes at least a third modulus of elasticity between the value of the first and the value of the second Young's modulus lies.
  • a gradient of decreasing values of the moduli of elasticity is always formed.
  • the gradient may be due to a steady decrease in the modulus of elasticity across the thickness of the DLC. Be given coating.
  • it can also be formed by abruptly changing values of the moduli of elasticity, as is usually the case in a multilayer structure of the DLC coating of DLC layers with different moduli of elasticity. Combinations of steady and abrupt decrease are also possible in further embodiments.
  • each of the layers of the DLC coating during application for. Example, by means of PECVD, by changing the operating parameters, a different modulus of elasticity are given, so that over the thickness of the DLC coating, the gradient is generated.
  • an optical IR component with a DLC coating according to the invention in which a substrate transmissive for IR radiation acts as a carrier.
  • the DLC coating is applied to an outer surface of the substrate.
  • the outer surface acts as a carrier surface.
  • an antireflection coating is present on an inner surface of the substrate.
  • an antireflection coating acts as a carrier, which consists of at least one layer.
  • the DLC coating is applied with its inner surface on a surface of a layer of the anti-reflection coating, which acts as a support surface.
  • the antireflection coating may have up to 30 layers whose materials, sequence and respective layer thickness are designed in accordance with the requirements of the IR optical component.
  • the at least one layer of the anti-reflection coating is either a dielectric layer or a semiconductor layer.
  • the antireflection coating can be constructed of several layers, which in turn consist of different materials.
  • At least one of the following materials is selected: germanium, silicon, magnesia, silica, silica, zinc sulfide, zinc selenide, palladium telluride or a material from one of the material groups, metal fluorides and tellurides.
  • the antireflection coating may further include other materials.
  • the layer of the antireflection coating which is in direct contact with the inner surface of the DLC coating consists of germanium.
  • germanium By germanium a good connection of the DLC coating to the antireflection coating is achieved.
  • the layer may also consist of or contain doped germanium.
  • the antireflection coating acting as a support may be applied to an outer surface of a substrate transmissive to IR radiation, whereby a further optical IR component according to the invention is provided.
  • This embodiment of the optical IR component according to the invention can furthermore be configured by providing an additional antireflection coating on an inner surface of the substrate.
  • the material chosen for the substrate is germanium, silicon, zinc sulfide, zinc selenide, chalogogne glass or sapphire.
  • the material of the substrate may also be selected from other materials that are suitable for applications in the IR range.
  • a structure of the DLC coating, a structure of an existing antireflection coating, a structure of an existing additional antireflection coating and a structure of the substrate is selected by an optimization method. It is particularly preferred if the respective structure of said coatings and of the substrate takes place and is coordinated with one another such that a transmissivity of the IR radiation of at least 70% is present over at least one specific wavelength range.
  • the at least one specific wavelength range preferably ranges from 2.7 to 1 1, 6 ⁇ . There may be other specific wavelength ranges, eg. B. 3 - 8 ⁇ and / or> 8 - 15 ⁇ be selected.
  • the transmissivity is preferably at least 80% over these wavelength ranges.
  • first specific wavelength range and a second specific wavelength range are given and the first specific wavelength range in the range of medium-wave IR radiation (3 - 8 ⁇ m) and the second specific wavelength range in the range of long-wave IR radiation (> 8-15 ⁇ ) is located.
  • a combination of the very high resistance is realized by a diamond coating (DLC coating) with a significantly improved transmission of a dielectric coating or a coating with semiconductor materials.
  • the solution according to the invention it is possible to have very favorable spectral properties such as high transmission (eg at least 80%) and low reflection (eg, at most 2%) in at least two separate distinct wavelength ranges.
  • the specific wavelength ranges may, for example, be wholly or partially the wavelength ranges of the medium-wave IR radiation and the long-wave IR radiation. Therefore, multispectral usable optical IR components are proposed.
  • FIG. 1 Structure of an optical IR device according to the prior
  • FIG. 2 shows a schematic illustration of a first exemplary embodiment of an optical IR component according to the invention with a DLC coating
  • FIG. 3 is a schematic representation of a second embodiment of an optical IR device according to the invention with a DLC coating
  • FIG. 4 shows a schematic representation of a third exemplary embodiment of an optical IR component according to the invention with a DLC coating
  • FIG. 7 is a schematic comparison of transmission values of a further optical IR component according to the prior art and an optical IR component according to the invention with an additional antireflection coating on the inner surface of the substrate versus the wavelength,
  • Fig. 8 is a schematic representation of a fourth embodiment of an optical IR device according to the invention with a DLC coating according to the invention, a
  • Antireflection coating a substrate and an additional antireflection coating on an inner surface of the substrate.
  • Optical IR components 1 according to the prior art as well as optical components 1 according to the invention have as essential components a substrate 2 and a DLC coating 4. In other embodiments, they may also have an anti-reflection coating 3 (also short: AR coating 3).
  • a DLC coating 4 is applied as an individual layer on an outer surface 2.1 of the substrate 2.
  • An inner surface 4.6 of the DLC coating 4 is in direct contact with the outer surface 2.1 of the substrate 2.
  • An outer surface 4.5 of the DLC coating 4 forms the termination of the optical IR device 1 with respect to an environment.
  • the outer surface 4.5 is exposed to direct-acting environmental influences such as rain, wind or radiation.
  • an AR coating 3 is applied, which is formed here by way of example from a sequence of a first layer 3.1 to a fifth layer 3.5 of the AR coating 3.
  • the layers 3.1 to 3.5 may have different thicknesses and consist of different materials to desired optical and mechanical To achieve properties, as is known in the art.
  • the layers 3.1 to 3.5 and different materials are symbolized by different hatching.
  • the AR coating 3 is protected by the DLC coating 4 and by the substrate 2 from the direct effects of environmental influences.
  • FIG. 2 shows a first exemplary embodiment of an optical IR component 1 according to the invention with a first embodiment of a DLC coating 4 according to the invention.
  • the DLC coating 4 consists of an outer layer 4.1 and an inner layer 4.2.
  • the outer layer 4.1 has a first modulus of elasticity E1
  • the inner layer 4.2 has a second modulus of elasticity E2.
  • the value of the first modulus of elasticity E1 is greater than the value of the second modulus of elasticity E2.
  • the DLC coating 4 is applied on a support surface of a germanium substrate 2.
  • the outer surface 4.5 of the DLC coating 4 forms the termination of the optical IR device 1 with respect to an environment.
  • the substrate 2 acts as a carrier, an outer surface 2.1 of the substrate 2 acts as a carrier surface.
  • the substrate 2 is transmissive to IR radiation.
  • the substrate 2 can be made of silicon, zinc sulfide, zinc selenide, chalogogmide glass, sapphire, or other materials that are transmissive to IR radiation.
  • the substrate 2 may also be made of materials that are not transmissive to IR radiation.
  • FIG. 1 A second exemplary embodiment of an optical IR component 1 according to the invention with the first embodiment of the DLC coating 4 according to the invention is shown in FIG.
  • the DLC coating 4 and the substrate 2 are designed as explained with reference to FIG. 2.
  • an AR coating 3 is applied, which consists of a first layer 3.1, a second layer 3.2 and a third layer 3.3.
  • FIG. 4 shows a third exemplary embodiment of an optical IR component 1 according to the invention.
  • the AR coating 3 is formed by a sequence of ten layers with a first layer 3.1, a second layer 3.2,... Up to one formed tenth layer 3.10.
  • the AR coating 3 may include layers 3.1 to 3.10 for voltage compensation.
  • the DLC coating 4 which is formed as a series of four layers with a first layer 4.1 (outer layer), a second layer 4.2 (inner layer), a third layer 4.3 and a fourth layer 4.4 is.
  • an additional AR coating 8 is present, which consists of a first layer 8.1, a second layer 8.2 and a third layer 8.3.
  • the outer surface 4.5 terminates the IR optical device 1 from the environment.
  • the first layer 4.1 of the DLC coating 4 has the first modulus of elasticity E1.
  • the inner layer 4.2 is in direct contact with the first layer 3.1 of the AR coating 3 via the inner surface 4.6.
  • the inner layer 4.2 has the second elastic modulus E2.
  • the third layer 4.3 and the fourth layer 4.4 of the DLC coating 4 each have a third elastic modulus E3.
  • the value of the third elastic modulus E3 is between the values of the first modulus of elasticity E1 and the value of the second modulus of elasticity E2.
  • FIG. 5 shows, by way of example, in a first curve 6, which reflection values (indication in percent) of an inventive optical IR component 1 with hybrid coating 9 (see FIG. 4) were determined over a wavelength range of 7 to 13 ⁇ .
  • the first curve 6 is compared with a second curve 7, through which the relationship of reflection values and wavelength of a conventional curve DLC coating 4 is shown on a substrate 2 in the wavelength range of 7 to 13 ⁇ .
  • a conventional DLC coating 4 is applied as a single layer on the substrate 2.
  • the first curve 6 over a wavelength range of about 7.5 to 1 1, 75 ⁇ does not exceed the limit of two percent reflection, while the second curve 7 reflectance values of two percent and less only over a wavelength range of shows about 9 to 10.5 ⁇ .
  • the relationship between achievable transmission (transmissivity) (in percent) and the wavelength over a wavelength range of 2 to 12 ⁇ m is shown in FIG.
  • values of a hybrid coating IR 9 according to the invention determined by the first curve 6 and the values of a conventional DLC coating 4 on a substrate according to the prior art are shown by the second curve 7.
  • the first curve 6 shows over a wavelength range of about 2.75 ⁇ to about 5.75 ⁇ (MWIR) and over a wavelength range of about 6.75 ⁇ and 10.9 ⁇ (LWIR) transmission values of at least 80 percent.
  • the second curve 7 has transmittance values of at least 80 percent only over a wavelength range of about 6.75 to 12 ⁇ , and thus exclusively in the range of long-wave IR radiation on.
  • the transmission values of an optical IR device 1 according to the invention shown by the first curve 6 were achieved by using an optimization method by adjusting the materials of the layers, the thicknesses of the layers and the sequence of layers of the AR coating 3 and the DLC coating 4 ,
  • the AR coating 3 and / or the additional AR coating 8 can be constructed from up to 30 layers.
  • FIG. 7 the first and second waveforms 6, 7 of a further inventive optical IR device 1 (first curve 6) and a conventional optical IR device 1 (second curve 7).
  • a conventional optical IR device 1 has a structure according to FIG. 1.
  • the further inventive optical IR component 1 has the basic structure according to FIG. 4.
  • the first curve 6 shows over a wavelength range from about 2.9 ⁇ to about 3.6 ⁇ fluctuations in the transmission values by 80%. From about 3.6 ⁇ (MWIR) to about 1 1 ⁇ (LWIR), the transmission values are over 80 percent.
  • the second curve 7 has transmittance values of at least 80 percent only over a wavelength range of about 6.9 to 12 ⁇ , and thus exclusively in the range of long-wave IR radiation on.
  • FIG. 8 shows a fourth exemplary embodiment of an optical component 1 according to the invention.
  • the AR coating 3 is present, which is formed from a total of nine layers 3.1 to 3.9.
  • the DLC coating 4 with the outer layer 4.1 and the inner layer 4.2 is present.
  • the DLC coating 4 may also be formed from a plurality of layers 4.1 to 4.n.
  • the AR coating 3 and the DLC coating 4 form a hybrid coating 9.
  • the numbers of layers of the AR coating 3, the DLC coating 4 and / or the additional AR coating 8 may be chosen differently.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

L'invention concerne un revêtement DLC (4) conçu pour des composants IR optiques (1) ainsi que des composants IR optiques (1) pourvus d'un tel revêtement DLC (4). Le revêtement DLC (4) selon l'invention est caractérisé en ce qu'il (4) est constitué d'au moins une couche externe (4.1) présentant un premier module d'élasticité (E1) et d'une couche interne (4.2) présentant un deuxième module d'élasticité (E2) qui sont appliquées de manière superposée sur une surface porteuse d'un support. La couche interne (4.2) comporte une surface interne (4.6) par l'intermédiaire de laquelle la couche interne (4.2) est en contact direct avec la surface porteuse du support, tandis que la couche externe (4.1) comporte une surface externe (4.5) qui est dirigée à l'opposé de la surface porteuse. De plus, la valeur du premier module d'élasticité (E1) est supérieure à la valeur du deuxième module d'élasticité (E2). Le revêtement DLC (4) peut être utilisé dans un composant IR optique (1) avec un substrat (2) et un revêtement antireflet (3, 8). Selon le mode de réalisation, le composant IR optique (1) selon l'invention est conçu à la fois pour des applications à large bande et des applications multispectrales.
EP13732080.0A 2012-05-18 2013-05-17 Revêtement dlc conçu pour un composant ir optique et composant ir optique pourvu d'un revêtement dlc Withdrawn EP2850469A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE201210010291 DE102012010291A1 (de) 2012-05-18 2012-05-18 Hybride DLC-Beschichtung für IR-Optiken
PCT/DE2013/100184 WO2013170854A1 (fr) 2012-05-18 2013-05-17 Revêtement dlc conçu pour un composant ir optique et composant ir optique pourvu d'un revêtement dlc

Publications (1)

Publication Number Publication Date
EP2850469A1 true EP2850469A1 (fr) 2015-03-25

Family

ID=48700233

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13732080.0A Withdrawn EP2850469A1 (fr) 2012-05-18 2013-05-17 Revêtement dlc conçu pour un composant ir optique et composant ir optique pourvu d'un revêtement dlc

Country Status (8)

Country Link
US (1) US20150109663A1 (fr)
EP (1) EP2850469A1 (fr)
JP (1) JP2015517686A (fr)
CN (1) CN104303078B (fr)
CA (1) CA2873932A1 (fr)
DE (2) DE102012010291A1 (fr)
IL (1) IL235616A0 (fr)
WO (1) WO2013170854A1 (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107710025A (zh) * 2015-06-19 2018-02-16 三菱电机株式会社 光学部件及激光加工机
JP6181905B1 (ja) * 2016-03-04 2017-08-16 株式会社リケン 摺動部材及びピストンリング
EP3318656B1 (fr) 2016-03-04 2019-08-07 Kabushiki Kaisha Riken Élément coulissant et segment de piston
CN107217259A (zh) * 2016-03-22 2017-09-29 杨阳 红外硫系玻璃表面镀类金刚石薄膜的制备方法
CN105911616A (zh) * 2016-06-23 2016-08-31 南京波长光电科技股份有限公司 一种镀覆在红外玻璃上的增透膜及其制备方法
GB2559957A (en) 2017-02-15 2018-08-29 Univ Of The West Of Scotland Infrared spectrophotometer
GB201702478D0 (en) 2017-02-15 2017-03-29 Univ Of The West Of Scotland Apparatus and methods for depositing variable interference filters
US20180299587A1 (en) * 2017-04-12 2018-10-18 Corning Incorporated Anti-reflection coatings for infrared optics
US10705273B2 (en) * 2018-03-26 2020-07-07 Raytheon Company Multispectral interference coating with diamond-like carbon (DLC) film
CN111175856B (zh) * 2018-11-09 2021-04-06 北京理工大学 一种锗表面草莓状宽波段增透微纳结构及其制备方法
JPWO2020153046A1 (ja) * 2019-01-22 2021-11-04 三菱電機株式会社 レーザ加工機用保護窓およびレーザ加工機
KR20220098373A (ko) * 2019-11-08 2022-07-12 비아비 솔루션즈 아이엔씨. 광학 코팅 및 광학 코팅을 포함하는 장치
CN111485237A (zh) * 2020-04-09 2020-08-04 有研国晶辉新材料有限公司 基底红外增透保护膜及其制备方法
US11476630B1 (en) 2021-06-01 2022-10-18 Robert Neil Campbell Thin film brewster coupling device
CN114019591B (zh) * 2021-09-23 2023-08-01 有研国晶辉新材料有限公司 一种包括增透保护膜的光学元件及其制备方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4995684A (en) * 1986-06-18 1991-02-26 Raytheon Company Impact resistant and tempered optical elements
US4777090A (en) * 1986-11-03 1988-10-11 Ovonic Synthetic Materials Company Coated article and method of manufacturing the article
US4939043A (en) * 1987-02-13 1990-07-03 Northrop Corporation Optically transparent electrically conductive semiconductor windows
GB8713922D0 (en) * 1987-06-15 1994-06-22 Secr Defence Infra red transparent windows
JPS649401A (en) * 1987-06-30 1989-01-12 Idemitsu Petrochemical Co Infrared ray transmittable optical material
JPH01302203A (ja) * 1988-05-30 1989-12-06 Idemitsu Petrochem Co Ltd 赤外線透過性光学材
GB9018608D0 (en) * 1989-08-30 2013-11-13 Texas Instruments Inc Durable wideband anti-reflection coating for infrared windows
US5190807A (en) * 1990-10-18 1993-03-02 Diamonex, Incorporated Abrasion wear resistant polymeric substrate product
US5376455A (en) * 1993-10-05 1994-12-27 Guardian Industries Corp. Heat-treatment convertible coated glass and method of converting same
JP3704739B2 (ja) * 1995-04-03 2005-10-12 住友電気工業株式会社 ＺｎＳを基板とする耐環境性赤外線透過構造体
US6277480B1 (en) * 1999-05-03 2001-08-21 Guardian Industries Corporation Coated article including a DLC inclusive layer(s) and a layer(s) deposited using siloxane gas, and corresponding method
US6844070B2 (en) * 2002-08-30 2005-01-18 Lockheed Martin Corporation Low-temperature plasma deposited hydrogenated amorphous germanium carbon abrasion-resistant coatings
JP2006153976A (ja) * 2004-11-25 2006-06-15 Nippon Shinku Kogaku Kk 赤外光透過フィルタ
JP5503145B2 (ja) * 2005-08-18 2014-05-28 スルザー メタプラス ゲーエムベーハー 四面体炭素層および軟質外層を備える層状構造によって被覆された基板
JP2009116219A (ja) * 2007-11-09 2009-05-28 Seiko Epson Corp 反射防止膜、反射防止膜の形成方法、及び透光部材
CN101464528B (zh) * 2008-01-23 2011-01-12 四川大学 一种dlc红外抗反射保护膜及其制备方法
CN101414017B (zh) * 2008-12-01 2010-08-18 中国船舶重工集团公司第七一七研究所 一种红外双波段窗口保护膜及其制造方法
JP5342365B2 (ja) * 2009-08-05 2013-11-13 株式会社豊田中央研究所 低摩擦摺動部材
JP5489824B2 (ja) * 2010-04-02 2014-05-14 富士フイルム株式会社 反射防止膜及び赤外線用光学素子
CN103814326B (zh) 2011-09-20 2016-08-17 业纳光学系统有限公司 带有应力补偿的涂层的针对红外线范围的光学结构元件

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2013170854A1 *

Also Published As

Publication number Publication date
IL235616A0 (en) 2015-01-29
DE112013002563A5 (de) 2015-01-29
CA2873932A1 (fr) 2013-11-21
DE102012010291A1 (de) 2013-11-21
WO2013170854A1 (fr) 2013-11-21
US20150109663A1 (en) 2015-04-23
JP2015517686A (ja) 2015-06-22
CN104303078A (zh) 2015-01-21
CN104303078B (zh) 2016-04-20

Similar Documents

Publication Publication Date Title
WO2013170854A1 (fr) Revêtement dlc conçu pour un composant ir optique et composant ir optique pourvu d'un revêtement dlc
EP2437084B1 (fr) Lentille optique avec revêtement anti-rayure et anti-refléchissant
EP3011370B1 (fr) Procédé de fabrication d'une couche antireflet
DE102014114330B4 (de) Solar-Control-Schichtsystem mit neutraler schichtseitiger Reflexionsfarbe und Glaseinheit
DE112016001087B4 (de) Antireflexionsfilm und Verfahren zu seiner Herstellung
DE102012103076B4 (de) Linsensystem für ein Kameramodul mit Infrarotfilter und Kameramodul mit einem Linsensystem sowie Verfahren zur Herstellung eines Linsensystems
EP3158370B1 (fr) Élément optique muni d'un revêtement réfléchissant
DE102015103494B4 (de) Verfahren zur Herstellung eines Reflektorelements und Reflektorelement
DE102015100091A1 (de) Schichtsystem und optisches Element mit einem Schichtsystem
WO2013041089A1 (fr) Composant optique pour le domaine de l'infrarouge, muni d'un revêtement à compensation de tension
DE69838706T2 (de) Umgebungbeständige und infrarotdurchlässige fensterschicht
EP3832356A1 (fr) Composant optique avec revêtement antiréfléchissant résistant aux rayures et procédé pour sa production
EP3850406B1 (fr) Élément optique comportant un empilement d'ensembles de couches et procédé de fabrication dudit élément optique
DE102018116993B4 (de) Optische Komponente mit kratzresistenter Anti-Reflexionsbeschichtung und Verfahren zu deren Herstellung
DE102017104523B4 (de) Verfahren zur Herstellung eines transparenten Elements mit einer Antireflex-Beschichtung mit stabiler Reflektivität und Farbe unter Winkel und unter Abrasion sowie nach dem Verfahren hergestelltes transparentes Element
DE102014003192A1 (de) Apochromatisches Mikroskopobjektiv
EP2101208A1 (fr) Système optique
DE102005056110A1 (de) Temperaturstabiles Schichtsystem
WO2010048975A1 (fr) Revêtement d'oxyde d'hafnium
EP2711762B1 (fr) Cube de séparation de faisceau non polarisant
DE10134157B4 (de) Bauelement mit ultrapräziser Oberfläche und Verfahren zu seiner Herstellung
DE102011102345B4 (de) Apochromatischer Vorsatz für Zoomobjektive
EP2379767B1 (fr) Revêtement d'oxyde d'hafnium ou de zirconium
DE102013111845B4 (de) Kratzfestes Infrarotstrahlung reflektierendes Schichtsystem und Verfahren zu dessen Herstellung
DE10341681A1 (de) Optische Funktionsschichten, insbesondere Zinkoxid-Sulfid-Schichten mit variabler dielektrischer Response

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20141208

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

DAX Request for extension of the european patent (deleted)
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN

18W Application withdrawn

Effective date: 20180409