EP2735381A1 - Staubentfernungsvorrichtung - Google Patents

Staubentfernungsvorrichtung Download PDF

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Publication number
EP2735381A1
EP2735381A1 EP13188448.8A EP13188448A EP2735381A1 EP 2735381 A1 EP2735381 A1 EP 2735381A1 EP 13188448 A EP13188448 A EP 13188448A EP 2735381 A1 EP2735381 A1 EP 2735381A1
Authority
EP
European Patent Office
Prior art keywords
dust
jet
formula
velocity
umax
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP13188448.8A
Other languages
English (en)
French (fr)
Other versions
EP2735381B1 (de
Inventor
Kazuhiko Soemoto
Kenji Kato
Tatsuro Wakimoto
Hiroshi Uzawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osaka University NUC
Osaka City University
Shinko Co Ltd
Original Assignee
Osaka University NUC
Osaka City University
Shinko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka University NUC, Osaka City University, Shinko Co Ltd filed Critical Osaka University NUC
Publication of EP2735381A1 publication Critical patent/EP2735381A1/de
Application granted granted Critical
Publication of EP2735381B1 publication Critical patent/EP2735381B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04—Cleaning by suction, with or without auxiliary action

Definitions

  • This invention relates to a dust-removing apparatus.
  • a dust-removing apparatus of the present invention is provided with a cleaner head (dust-removing head) 9 having an air reserve chamber 11 to which pressurized air is supplied and a suction chamber 12 of negative pressure, and a blower device not shown in figures for pressurization and suction to supply air to the air reserve chamber 11 of the cleaner head 9 and to make the suction chamber 12 vacuum.
  • a cleaner head dust-removing head 9 having an air reserve chamber 11 to which pressurized air is supplied and a suction chamber 12 of negative pressure
  • a blower device not shown in figures for pressurization and suction to supply air to the air reserve chamber 11 of the cleaner head 9 and to make the suction chamber 12 vacuum.
  • inner pressure P of the air reserve chamber 11 can be regulated by an inverter regulating the air amount supplied to the air reserve chamber 11 by the blower device.
  • the cleaner head 9 has a nozzle portion 1 to jet the air out of the air reserve chamber 11, and a suction hole 19 to connect the suction chamber 12 to the outside.
  • the nozzle portion 1 has a jetting groove 10 to exhaust the air in the air reserve chamber 11.
  • the jetting groove 10 is formed along a longitudinal direction L 10 of the cleaner head 9.
  • the jetting groove 10 has an air flow-in portion 13 connected to the air reserve chamber 11 and straight in lateral cross section, a first cavity portion 14 (wide middle portion) continuing to a downstream side of the air flow-in portion 13, expanding as goes to an outer (jet) side, and triangular in lateral cross section, a cavity connecting portion 15 continuing to a downstream side of the first cavity portion 14 and straight in lateral cross section, a second cavity portion 16 (wide middle portion) continuing to a downstream side of the cavity connecting portion 15, expanding as goes to an outer side, and triangular in lateral cross section, a third cavity portion 17 continuing to a downstream side of the second cavity portion 16 and rectangular in cross section wider than the connecting portion 15, and a jetting slit 18 connecting a downstream side of the third cavity portion 17 and the outside.
  • the width dimensions of the air flow-in portion 13 and the cavity connecting portion 15 are formed into the same dimension.
  • the nozzle portion 1 gives the air flow variations of high frequency by feedback mechanism that disturbance generated by the first and second cavity portions 14 and 16 on the downstream side (corner portion on the downstream end in the cavity) is transmitted as to influence the flow on an upstream side (exfoliated flow on the upstream in the cavity), and the influenced (vortex) influences the disturbance generated on the downstream.
  • the jet 3 jetted from the jetting slit 18 has a potential core (area) 5 not reducing velocity (constant velocity), a transitional area (developed area) E on downstream side to an end (vanishing position) 50 of the potential core 5 in which disturbance is in a developed stage, and a perfect developed area (diffused area) F of sufficiently developed diffused disturbance through the transitional area E.
  • the jet 3 is a flow to which high-frequency variation (of velocity and pressure) is added by the feedback mechanism by the first and second cavity portions 14 and 16.
  • the inventors of the present invention through an eager research to improve dust-removing efficiency with saving energy, made a unique idea that the dust-removed face Wa of the work W is positioned in the transitional area E on the downstream side of the end 50 of the potential core 5 of the jet 3 and on the upstream side of the perfect developed area F.
  • a slit width dimension of the jetting slit 18 is made S[mm]
  • the length dimension L of the potential core 5 generated within a practical range of 0.1mm ⁇ S ⁇ 10mm is measured, and the results of measurement is that the length dimension L of the potential core 5 is 5 to 6 times of the slit width dimension S. Therefore, H > 6S is considered to certainly place the dust-removed face Wa on the downstream side to the end 50 of the potential core 5.
  • the slit width dimension S and the parting dimension H are set as to fulfill the formula 1 below to place the dust-removed face Wa within the transitional area E. H / 9 ⁇ S ⁇ H / 6
  • the slit width dimension S as to fulfill the formula 1 above within a range of 1mm ⁇ H ⁇ 2mm.
  • the embodiment is having the nozzle portion 1 of Figure 2 , and constructed as to fulfill the formula 1 with the parting dimension H of 1.5mm and the slit width dimension S of 0.2mm.
  • a dust-removing apparatus having the nozzle portion 1 of Figure 2 and not fulfilling the formula 1 with the parting dimension H of 1.5mm and the slit width dimension S of 0.4mm, (in other words, a dust-removing apparatus in which the dust-removed face Wa is on the upstream side to the end 50 of the potential core 5) is the comparison example.
  • inner pressure P in the air reserve chamber 11 is administrated (regulated) to the same (14kPa) in the embodiment and the comparison example.
  • Removal ratio ⁇ is measured for each of particles of which diameter is 3 ⁇ m and particles of which diameter is 1.6 ⁇ m.
  • the removal ratio ⁇ , average velocity of the jet 3, and strength of velocity variation of the jet 3 are shown in a table of Figure 4 . The method of measurement is described later.
  • the removal ratio ⁇ is similar to that of the comparison example relating to the particle of 3 ⁇ m, and the removal ratio ⁇ is better than that of the comparison example relating to the particle of 1.6 ⁇ m.
  • the flowing amount remarkably decreases in the embodiment in comparison with the comparison example because the embodiment has the inner pressure P same to that of the comparison example, and the slit width dimension S of 1/2. That is to say, in the embodiment, supplied air amount is approximately half in comparison with the comparison example, and the device to supply air to the cleaner head 9 (blower device) can be made small.
  • the removal ratio ⁇ is measured in a case that the dust-removed face Wa is gradually departed from the downstream side to the end 50 of the potential core 5.
  • the removal ratio ⁇ shows an inclination to decrease when H is increased.
  • H is beyond 1.8mm, the removal ratio ⁇ rapidly decreases.
  • the dust-removing apparatus relating to the present invention is constructed as to fulfill the following formula 2 and formula 3. 110 ⁇ Umax ⁇ 150 unit : m / s 6.0 ⁇ V ⁇ max / Umax ⁇ 100 ⁇ 12
  • the dust-removing apparatus is constructed as to fulfill the following formula 4 and formula 5.
  • 120 ⁇ Umax ⁇ 150 unit m / s 7.5 ⁇ V ⁇ max / Umax ⁇ 100 ⁇ 12
  • the first cavity portion 14, the cavity connecting portion 15, and the second cavity portion 16 of the nozzle portion 1 in Figure 2 are omitted, and the air flow-in portion 13 and the third cavity portion 17 are directly connected.
  • Dimensions of common components such as the slit width dimension S are the same.
  • both of the first apparatus and the second apparatus in which the slit width dimension S is 0.2mm and the parting dimension H is 1.5mm, fulfill the formula 1.
  • the inner pressure P of the air reserve chamber 11 is changed to 8kPa, 11kPa, and 14kPa in each of the apparatuses.
  • the maximum value Umax of time average velocity shows an inclination to be large along with increase of the inner pressure P in both of the first apparatus and the second apparatus.
  • the first apparatus remarkably surpasses the second apparatus in spectral strength in a high frequency zone of 10 to 20kHz and contributes to the difference of the strength of velocity variation. That is to say, it is considered that the first cavity portion 14 and the second cavity portion 16 work effectively.
  • the first apparatus has the construction which fulfills the formula 2 and formula 3
  • the second apparatus has the construction which does not fulfill the formula 2 and formula 3.
  • the removal ratio ⁇ of particles becomes high along with the increase of the inner pressure P.
  • the removal ratio ⁇ is improved as the time average velocity becomes large.
  • the removal ratio ⁇ of the first apparatus surpasses the removal ratio ⁇ of the second apparatus.
  • the first apparatus fullfilling the formula 2 and formula 3 has the removal ratio ⁇ better than that of the second apparatus (not fulfilling the formula 2 and formula 3), sufficient dust-removing effect is obtained with small consumed energy.
  • the case that the inner pressure P is 8kPa does not fulfill the formula 4 and formula 5
  • the case that the inner pressure P is 11kPa or 14kPa fulfills the formula 4 and formula 5.
  • the constructions which fulfill the formula 4 and formula 5 show quite excellent dust-removing effect with the removal ratio ⁇ over 99%. That is to say, fulfilling the formula 4 and formula 5, the jet 3 optimum for dust removal is generated.
  • the construction fulfilling the formula 4 and formula 5 can be obtained by setting the slit width dimension S and regulating (setting) the inner pressure P of the air reserve chamber 11.
  • the measurement is conducted with an interval of 0.02mm in the X direction.
  • a glass base with chrome film of which thickness is 0.7mm and of which surface area is 300mm ⁇ 400mm, is used as the work W.
  • Test particles are uniformly diffused by a syringe onto the dust-removed face Wa of the work W sufficiently cleaned in advance.
  • the work W is fixed to an adsorption table, and cleaning (dust-removing test) is conducted on the whole surface of the dust-removed face Wa by the cleaner head 9 transferred with a speed of 100mm/sec.
  • Number of stuck particles n 0 before the diffusion of the particles, number of particles n 1 after the diffusion, and number of remaining stuck particles n 2 after the cleaning (dust-removing test) are measured.
  • the particle removal ratio(dust-removal ratio) ⁇ % is obtained by the formula 6 below.
  • a surface test apparatus (GI4830 produced by Hitachi High-Technologies Corporation) is used for counting the numbers of stuck particles in a class 100 clean room. Three or more times of measurement are conducted under the same test conditions, and the average value is adopted as the dust-removal ratio.
  • ⁇ 100 ⁇ n 1 - n 2 / n 1 - n 0
  • the cavity portion may be laterally long (long width) rectangular or triangular diminishing downward.
  • the work W may be a sheet body of paper, film, metal foil, etc., or a panel body of plastic base, glass base, etc.
  • the apparatus may be constructed as to conduct the dust removal with the nozzle portion 1 relatively moved.
  • the apparatus may be constructed that the cleaner head 9 is fixed and the work W is transferred by a transferring device to conduct the dust removal, or, the work W is fixed and the cleaner head 9 is moved to conduct the dust removal as in the removal test, or, both of the cleaner head 9 and the work W are moved to conduct the dust removal.
  • the air amount jetted from the nozzle portion 1 can be reduced, and sufficient dust-removing effect can be obtained with small consumed energy (electricity) because the dust-removed face Wa of the work W is disposed within the transitional area E formed on the downstream side to the end 50 of the potential core 5 of the jet 3 from the nozzle portion 1.
  • the jetted air amount is the same as the conventional apparatuses (energy consumption is the same as the conventional apparatuses)
  • cleaning ability can be improved.
  • very fine foreign matter of which size is 2 ⁇ m or less can be removed with high removal ratio.
  • the sufficient removal ratio ⁇ can be obtained with small air amount, and the apparatus can contribute to reduction of running cost of the cleaning process because the slit width dimension of the jetting slit 18 of the nozzle portion 1 is S, the parting dimension between the outlet portion J of the jetting slit 18 and the dust-removed face Wa is H, and S is set as to fulfill the above-mentioned formula 1 to dispose the dust-removed face Wa within the transitional area E.

Landscapes

  • Cleaning In General (AREA)
  • Combined Means For Separation Of Solids (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
EP13188448.8A 2012-11-22 2013-10-14 Verfahren zur Verwendung einer Staubentfernungsvorrichtung Active EP2735381B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012256229A JP5814902B2 (ja) 2012-11-22 2012-11-22 除塵装置

Publications (2)

Publication Number Publication Date
EP2735381A1 true EP2735381A1 (de) 2014-05-28
EP2735381B1 EP2735381B1 (de) 2019-09-18

Family

ID=49356274

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13188448.8A Active EP2735381B1 (de) 2012-11-22 2013-10-14 Verfahren zur Verwendung einer Staubentfernungsvorrichtung

Country Status (5)

Country Link
EP (1) EP2735381B1 (de)
JP (1) JP5814902B2 (de)
KR (1) KR101615543B1 (de)
CN (1) CN103831274B (de)
TW (1) TWI523695B (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104399711A (zh) * 2014-10-30 2015-03-11 苏州德鲁森自动化系统有限公司 一种液晶玻璃基板除尘方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0513632A1 (de) * 1991-05-17 1992-11-19 SUNDWIGER EISENHÜTTE MASCHINENFABRIK GmbH & CO. Vorrichtung zum Entfernen von Flüssigkeit von der Oberfläche eines bewegten Bandes
EP0565811A1 (de) * 1992-04-13 1993-10-20 Shinko Co., Ltd. System zum Entfernen von Staub für plattenähnliche Körper
EP0682992A2 (de) * 1994-05-16 1995-11-22 Valmet Paper Machinery Inc. Verfahren und Vorrichtung zum Sammeln und Entfernen von von einer Papierbahn abgetrennendem Staub, für eine Papierherstellungs- oder Papierveredelungsmaschine
JPH11235559A (ja) 1997-05-09 1999-08-31 Shinko:Kk 除塵ヘッド

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2791257B2 (ja) * 1993-01-27 1998-08-27 株式会社東芝 超音波洗浄の評価方法およびその装置
JP2005259849A (ja) * 2004-03-10 2005-09-22 Matsushita Electric Ind Co Ltd プリント配線板の液体除去方法及びその装置
JP2006007012A (ja) * 2004-06-22 2006-01-12 Koganei Corp 除電除塵装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0513632A1 (de) * 1991-05-17 1992-11-19 SUNDWIGER EISENHÜTTE MASCHINENFABRIK GmbH & CO. Vorrichtung zum Entfernen von Flüssigkeit von der Oberfläche eines bewegten Bandes
EP0565811A1 (de) * 1992-04-13 1993-10-20 Shinko Co., Ltd. System zum Entfernen von Staub für plattenähnliche Körper
EP0682992A2 (de) * 1994-05-16 1995-11-22 Valmet Paper Machinery Inc. Verfahren und Vorrichtung zum Sammeln und Entfernen von von einer Papierbahn abgetrennendem Staub, für eine Papierherstellungs- oder Papierveredelungsmaschine
JPH11235559A (ja) 1997-05-09 1999-08-31 Shinko:Kk 除塵ヘッド

Also Published As

Publication number Publication date
CN103831274B (zh) 2017-04-26
TWI523695B (zh) 2016-03-01
JP5814902B2 (ja) 2015-11-17
KR101615543B1 (ko) 2016-04-26
JP2014100694A (ja) 2014-06-05
TW201420200A (zh) 2014-06-01
KR20140066078A (ko) 2014-05-30
EP2735381B1 (de) 2019-09-18
CN103831274A (zh) 2014-06-04

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