EP2729763A1 - Correction et/ou prévention d'erreurs lors de la mesure de coordonnées d'une pièce - Google Patents

Correction et/ou prévention d'erreurs lors de la mesure de coordonnées d'une pièce

Info

Publication number
EP2729763A1
EP2729763A1 EP11743041.3A EP11743041A EP2729763A1 EP 2729763 A1 EP2729763 A1 EP 2729763A1 EP 11743041 A EP11743041 A EP 11743041A EP 2729763 A1 EP2729763 A1 EP 2729763A1
Authority
EP
European Patent Office
Prior art keywords
measuring
sensor
relative
sensors
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP11743041.3A
Other languages
German (de)
English (en)
Inventor
Tobias Held
Dominik Seitz
Rainer Sagemüller
Tobias Woletz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss Industrielle Messtechnik GmbH
Original Assignee
Carl Zeiss Industrielle Messtechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Industrielle Messtechnik GmbH filed Critical Carl Zeiss Industrielle Messtechnik GmbH
Publication of EP2729763A1 publication Critical patent/EP2729763A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
    • G01B7/012—Contact-making feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00

Definitions

  • the invention relates to the correction and / or avoidance of errors in the measurement of coordinates of a workpiece.
  • the invention relates to an arrangement for measuring coordinates of a workpiece, a method for producing such an arrangement and a method for operating such an arrangement.
  • Coordinates of a workpiece can be specified and measured in different ways.
  • the coordinates are related, for example, to a reference system, for example the so-called laboratory system or the coordinate system related to the workpiece or a workpiece holder.
  • dimensions of the workpiece can be detected and indicated, which are based on at least two reference points of the workpiece, for example a length, a width or a diameter.
  • coordinate measuring devices in the following also briefly: CMM
  • the users of the coordinate measuring machines rely on knowing the position and often also the orientation of a probe for scanning the workpiece and also the position and orientation of the workpiece itself or at least one to know any change in position and orientation.
  • a change in the position and orientation can occur, in particular, when the workpiece and the probe are moved relative to one another in order to be able to carry out further measurements of the coordinates. Therefore, when various parts of an assembly for measuring coordinates of a workpiece are movable relative to one another, corresponding movements can lead to errors in the measurement of the coordinates of the workpiece.
  • Examples of such relative movements are rotations of a rotating device (this is the subject of a first aspect of the present invention), movements in adjusting the position and / or orientation of a stylus (having a sensor) for scanning the workpiece for the purpose of coordinate determination (this is the subject of a second aspect of the present invention) and the mechanical deflection due to mechanical forces and / or the thermal expansion or contraction of the material of a coordinate measuring assembly or a machine tool (this is the subject of a third aspect of the present invention). All of these mobilities are in addition to the movement of an optional existing probe that the probe performs while measuring the coordinates of a workpiece by mechanical scanning (ie, while the probe is contacting the workpiece).
  • such probes are known, which are deflected from a neutral position during mechanical scanning of the workpiece due to the mechanical forces acting between the workpiece and the probe, wherein the deflection is determined and evaluated for the purpose of determining the coordinates of the point of contact.
  • the additional mobilities therefore lead to errors in the coordinate measurement.
  • An arrangement is proposed for measuring coordinates of a workpiece and / or for machining the workpiece, wherein the arrangement has a first part and a second part movable relative to the first part, wherein the relative mobility of the parts in addition to a possible mobility of an optional additionally attached to the arrangement button is given, the at a
  • the mechanical scanning of the workpiece for the purpose of measuring the coordinates by a displacement of the probe from a neutral position, wherein on the first or second part of a measuring body is arranged and on the other part, i. is arranged on the second or first part, at least one sensor, wherein the sensor is configured to generate a measurement signal corresponding to a position of the measuring body and thus according to the relative position of the first and second part.
  • a first part of the arrangement and a second part of the arrangement are provided and the first and second part are designed to be movable relative to one another.
  • the relative movement of the parts is in addition to a possible mobility of an optionally additionally attached to the assembly button allows, which is given in a mechanical scanning of the workpiece for the purpose of measuring the coordinates by a deflection of the probe from a neutral position.
  • a measuring body is arranged and at the other part, i. at the second or first part.
  • at least one sensor is arranged. The sensor is designed to generate a measuring signal corresponding to a position of the measuring body and thus corresponding to the relative position of the first and second part during operation of the arrangement.
  • a first part of the arrangement and a second part of the arrangement are moved relative to each other, wherein the relative movement of the parts is made possible in addition to a possible mobility of an optionally additionally attached to the arrangement of the probe mechanical scanning of the workpiece for the purpose of measuring the coordinates is given by a deflection of the probe from a neutral position.
  • a measuring body is arranged and at the other part, i.
  • At the second or first part at least one sensor is arranged, wherein the sensor is designed to generate a measuring signal corresponding to a position of the measuring body and thus according to the relative position of the first and second part during operation of the arrangement.
  • the probe can be arranged on a measuring head or probe, which allows the mobility of the probe and in particular also detects the deflection by at least one sensor.
  • the sensor may be, for example, a magnetoresistive sensor, a Hall sensor operating in accordance with the electro-magnetic Hall effect, an optical sensor, a sensor operating in accordance with the piezoelectric effect, a capacitive sensor, a distance sensor, and / or. or relative position measurement designed
  • magnetoresistive sensors and Hall sensors may also be arranged to several on a common carrier, for. B. a microcarrier, similar to a microchip.
  • a common carrier for. B. a microcarrier, similar to a microchip.
  • Each of the sensors on the common carrier then detects in particular another degree of freedom of movement. For example, with two such carriers, each three sensors to capture three linearly from each other
  • Optical sensors detect e.g. one of a plurality of markings formed on the gauge body as the marker passes from the viewpoint of the sensor. In another kind of optical
  • Sensors are e.g. performed a laser triangulation and / or like a
  • Interferometer performed a comparison with a comparison light beam that is not affected by the measuring body.
  • projected patterns are detected on the measuring body.
  • the measuring body is designed in particular according to the measuring principle of the sensor.
  • the measuring body can have a permanent magnetic material in order to be able to measure according to the Hall effect or the magnetoresistive measuring principle.
  • the measuring body eg a cylinder or a spherical measuring body
  • the measuring body may have an electrically conductive surface for a capacitive or inductive sensor and / or a reflecting surface for reflection of measuring radiation for an optical sensor.
  • a specular or partially reflective surface may, for. B. be formed on a cylindrical, conical or toroidal measuring body.
  • the sensor generates a measuring signal which contains information about the position of the measuring body and thus about the relative position of the first and second part.
  • the plurality of line-shaped markings in the manner of a Stroke grating carries a single measurement signal of the sensor may not be sufficient to evaluate the information about the position or relative position can. For example, in addition a count may be required that corresponds to the number of previously detected markers, and / or a starting position of the first and second part.
  • the measuring signals supplied by the rotational position sensors can be used to perform a translatory movement (ie a movement of the two relatively rotatable parts in a direction transverse to the axis of rotation) to determine and / or taken into account. This will be discussed in more detail. In the same case or even with measuring systems with other sensors, a translatory movement (ie a movement of the two relatively rotatable parts in a direction transverse to the axis of rotation) to determine and / or taken into account.
  • a translatory movement ie a movement of the two relatively rotatable parts in a direction transverse to the axis of rotation
  • Calibration of the sensor assembly formed by the measuring body and the sensor may be required in order to determine the position of the measuring body and / or the relative position of the first and second part during operation of the arrangement for measuring coordinates of a workpiece. It is therefore preferred to calibrate the arrangement for measuring coordinates of a workpiece with respect to the determination of the position of the measuring body and / or the relative position of the first and second part, i.
  • Assign measuring signals of the sensor corresponding values of the position or relative position.
  • Shape error i. a deviation of a measuring body from an ideal
  • predetermined shape e.g., spherical or cylindrical shape
  • the sensors can be calibrated, e.g. due to nonlinearities of the relationship between the measuring signals of the sensor and the measured quantity detected by the sensor.
  • the first or second part is provided to determine the position of the first or second part, and in particular to determine the relative position of the first and second part, in particular the same applies to the characteristics of the sensors and / or the measuring body as already mentioned.
  • sensors may be disposed on either the first part or the second part. Alternatively or additionally, both at the first part as also at the second part, which is movable relative to the first part, in each case at least one sensor are arranged / be. The same applies to several measuring bodies.
  • sensors can use at least one measuring body on the other part together for signal generation.
  • each of a plurality of sensors is assigned a separate measuring body.
  • a sensor component it is possible for a sensor component to have more than one sensor. For example, Therefore, such a sensor component can provide information of the relative position of the first and second parts with respect to more than one degree of freedom of movement.
  • Carrying parts of the arrangement which carry at least one sensor and / or a measuring body, are preferably made of a material which has a low coefficient of thermal expansion or contraction coefficient. Furthermore, it is preferred that such supporting parts are made rigid against deformation. This also applies to an arrangement of several load-bearing parts. Therefore, external forces and temperature differences lead to no or a negligible error. Does the arrangement on a base on which directly or indirectly all other parts or most parts of the arrangement are supported, for. Legs
  • Base plate preferably at least a part of the sensors and / or measuring body is connected either directly or via such a supporting part to the base.
  • a supporting part is rod-shaped.
  • one end of the rod is preferably fixed to the base.
  • a rotating device is a part of the sensor (that is, the at least one sensor / measuring body pair), z.
  • B. a sensor disposed on the fixed part of the rotating device.
  • the corresponding, associated part of the sensor system for example an associated measuring body, is preferably fastened directly to the rotatable part of the rotating device.
  • the invention makes it possible, for example in rotary devices (first aspect of the present invention), which allow only discrete rotational positions of the first part relative to the second part or vice versa, to determine the actual rotational position or to determine a corresponding correction value, the deviation of the actual Turning position corresponds to the expected discrete rotational position.
  • rotary devices first aspect of the present invention
  • the invention even makes it possible to replace a rotary device with mechanical means for setting discrete rotational positions (for example with a so-called Hirth toothing) by a rotating device, in which such mechanical means are no longer available. Nevertheless, by an appropriate control of the rotating device can one or more predetermined
  • Rotational positions are repeatedly set. With appropriate design of the control can even be achieved that the rotational position can be reproduced exactly.
  • the controller can resort to the measurement signals of the at least one sensor, i. Measurement signals or information or signals obtained therefrom are fed to the controller which controls the rotational movement and in particular controls at least one drive device (eg motor) of the rotary device.
  • the controller controls the rotational movement and in particular controls at least one drive device (eg motor) of the rotary device.
  • the invention allows to determine the actual rotational position or to determine the above-mentioned corresponding correction value.
  • An adjustment of arbitrary rotational positions within a continuous range is e.g. when using a stepper motor that drives the rotation, not possible.
  • the exact reproduction of certain rotational positions is not possible with such a stepper motor, since the adjustable rotational positions can depend on external circumstances.
  • the drive mechanism used for the drive e.g., with gears for the transmission of torques
  • At least one relative position is predetermined for the first part and the second part, which is to be set during operation of the arrangement, wherein an evaluation device is provided, which is configured to determine using measurement signals of the sensor or the sensors of the arrangement which relative position the first part and the second part actually are when the predetermined relative position has been set.
  • an evaluation device is provided, which is configured to determine using measurement signals of the sensor or the sensors of the arrangement which relative position the first part and the second part actually are when the predetermined relative position has been set.
  • a range of relative positions may exist within which the predetermined relative position may vary, ie the relative position is not set exactly according to the default.
  • these ranges of variation of relative positions for the given relative positions can be so far apart in particular that they are uniquely associated with one of the predetermined relative positions.
  • the variation ranges can be separated by regions with respect to a degree of freedom of movement through which the parts, although z. B. through but in which they do not come to a halt.
  • At least one sensor (individual, relative position) associated sensor, i. z. B. at three predetermined relative positions are two additional sensors, so three sensors available.
  • the measuring body which is assigned to the additional sensor, is also used for the measurement of the relative position in other relative positions.
  • the measuring body is therefore arranged on one of the two parts so that it passes in the relative movement of the two parts in a position in which it allows the measurement of the relative position together with the at least one associated sensor.
  • measuring body (s) is assigned, but is also used for the measurement of
  • the sensor is therefore arranged on one of the two parts so that it passes in the relative movement of the two parts in a position in which it allows the measurement of the relative position together with the at least one associated measuring body.
  • a plurality of associated sensors may be present, which in each case permit, together with the measuring body (or sensor)
  • Invention is that inadvertent movements of the first and second parts relative to each other, in particular due to mechanical forces and / or due to thermal expansion or contraction, the unintentional, unwanted movement with respect to their effect on the relative position of the first and second part and thus - in the case of a CMM - on the error or the result of the
  • Coordinate measurement can be determined.
  • a correction is possible and / or on the other hand the measurement signal of the at least one sensor must be taken into account directly in the determination of the coordinates of the workpiece.
  • the accuracy in the measurement signal of the at least one sensor In the case of a machine tool, the accuracy in the measurement signal of the at least one sensor must be taken into account directly in the determination of the coordinates of the workpiece.
  • the bending device can be adjusted. It is preferred that such a change in bending be taken into account.
  • the bending can be adjusted. It is preferred that such a change in bending be taken into account.
  • the finite element responds to the force vector and moment vector with a strain correction vector consisting of a translation vector and a moment vector
  • the first part and the second part are parts of a rotating device having a rotational mobility about at least one axis of rotation, wherein the first part and the second part are rotatable relative to each other due to the rotational movement of the rotating device and wherein the first or the second part is configured, either the workpiece or a
  • Coordinate measuring device As the probe or probe to hold to allow rotation of the workpiece or the coordinate measuring device.
  • the first aspect therefore also relates to rotary devices which have rotational rotations around two axes of rotation (eg so-called rotary / pivot joint with two mutually perpendicular axes of rotation) or by more than two axes of rotation.
  • the first or second part is configured to hold the workpiece.
  • the other part is in particular configured to be attached to a base of the assembly and / or positioned on a base so that this part is immovable relative to the base and the workpiece with the other part can be rotated relative to the base.
  • the first and second parts may be parts of a so-called rotary table, on or on which the workpiece is arranged, in order to be able to be brought into different rotational positions and to measure its coordinates in the different rotational positions.
  • the first or the second part is configured to hold a coordinate measuring device.
  • the first and second parts allow a rotation of the coordinate measuring device by a relative movement.
  • so-called rotary joints and swiveling joints are known, which have a rotational mobility allow with respect to two transverse and in particular perpendicular to each other extending axes of rotation.
  • rotary devices which only one
  • the measuring body is configured as an additional material region of the first or second part that is not required for the rotational function of the rotating device and / or the sensor is arranged on an additional material region of the second or first part that is not required for the rotational function of the rotating device.
  • Required material areas for the rotational function of the rotating device are in particular pivot bearings, material areas which hold or support the pivot bearings and the material areas required for the stable rotary motion, such as e.g. a shaft or other rotor whose rotary motion is supported by the pivot bearings.
  • the material areas required for the turning function is in many cases existing material area which is designed to carry and / or hold the workpiece or the probe, so that the workpiece or the probe at a
  • Rotary movement of the rotatable part is rotated.
  • This area of material carries the workpiece or the push-button during the rotary movement of the rotatable part. Furthermore, one of the necessary for the rotational function of the rotary device
  • Material areas a possible material area which is configured to connect the rotating device with other parts of the arrangement.
  • a swivel joint typically is connected to an arm (e.g., a quill) of a CMM to pivot and rotate the button, which in turn is mounted on the swivel joint, relative to the arm.
  • a turntable is configured with a range of materials for placing and / or attaching the turntable to a base of the assembly.
  • required material area e.g. a spherical surface or the part of a
  • the additional material area at least over one predetermined angular range of angles of rotation of the rotary motion about the axis of rotation is rotationally symmetrical to the axis of rotation shaped and arranged, as z. B. in a semicircular disc with respect to the center of the circle is the case. at
  • the senor can therefore each detect a portion of the surface of the measuring body or of the measuring body according to the relative position of said portion of the
  • the rotationally symmetrical design of the measuring body surface causes the sensor in the ideal case, when the measuring body is formed and arranged without errors rotationally symmetrical to the axis of rotation and when the rotational movement with respect to the axis of rotation without errors (eg wobble error, runout error, concentricity error) is performed always the same measuring signal or always the same sequence of measuring signals (eg in the case of measuring bodies with line gratings (see above)) deviations from the ideal case of the rotationally symmetrical design of the additional material area, which can not be attributed to an error of the axis of rotation, can
  • Calibration be taken into account, so that a corresponding correction in the evaluation of the measurement signals of the sensor is possible, and / or can be kept so small that the deviations of the rotational movement of the ideal rotational movement cause much greater changes in the measurement signal than the deviations of the measuring body of the ideal rotationally symmetrical design.
  • a sphere or a cylinder as a measuring body can be manufactured so precisely and rotationally symmetrically with respect to the axis of rotation and / or calibrated that the error is small for the purposes of determining the rotational movement errors.
  • the additional material region may be an elongated material region that extends in the direction of the axis of rotation and in particular is rotationally symmetrical (ie, cylindrical, for example) shaped and arranged relative to the axis of rotation.
  • Rotary device based, in which a rod-shaped shaft of the rotary device is required for the rotary function.
  • the measuring body may have a greater distance from the axis of rotation of the rotating device than an adjacent, for the
  • Rotational function of the rotating device required material portion of the first or second part and / or the additional material region on which the sensor is arranged can have a greater distance from the axis of rotation of the rotating device than an adjacent, required for the rotational function of the rotating device portion of the second or first part.
  • an additional material region which forms the measuring body or on which the sensor is arranged, arranged at a greater distance from the axis of rotation than the adjacent, required for the rotational function of the rotating device area.
  • the additional material area is due to a rotational movement of the
  • At least one of the two mutually rotatable parts of the rotating device has a hollow cylindrical shape - or has an area with this Shape.
  • a rotary bearing can be located at an end, axial end of the hohizylinderformigen area over which the other part of the rotating device is rotatably mounted.
  • the other part may be arbitrary, e.g. a circular disk.
  • the already mentioned measuring body may be a first measuring body which is arranged at a first axial position, wherein a second measuring body is arranged on the first or second part at a second axial position spaced from the first axial position.
  • the sensor or at least a second sensor is configured in this case to generate a measurement signal corresponding to a position of the second measuring body and thus the relative position of the first and second parts.
  • the axial Position may be an axial position with respect to the axis of rotation or with respect to another axis or direction which extends transversely or skewed to the axis of rotation.
  • the measurement at different axial positions allows, for example, wobble errors due to a deviation of the orientation of rotatable and / or
  • Rotational motion can be superimposed on this tumbling motion further movements.
  • more errors may occur, so that the axis of symmetry in practice can also perform other movements.
  • At least one sensor / measuring body pair (in this case, for example, the same measuring body can interact with another sensor) is provided, which is designed to measure changes in the axial position between the measuring body and the sensor. If two such additional sensor / measuring body pairs are arranged at different axial positions, consequently, the corresponding two
  • Degrees of freedom of movement are detected and z. B. be determined from the total information available the tumbling error or other errors. There does not have to be a separate measuring body for each of the pairs. Rather, the same Measuring body z. B. be used by two sensors, multiple sensors or all sensors.
  • an additional sensor / measuring body pair is sufficient for determining the degree of freedom in the axial direction, e.g. if due to an air bearing axial relative movement of the parts is excluded in total with high accuracy, but z. B. tilting movements relative to the axis of rotation or axial runout should be detected.
  • gauges and / or sensors located at the different axial positions are interconnected via an axially extending member.
  • the element can perform mechanical vibrations due to its axial length. It is therefore preferred that in addition a damping device for damping mechanical vibrations of the element is provided. This damping device is preferably arranged in at least one region approximately in the middle of the axial extent of the element.
  • Damping devices are in particular devices in question, in which the damping is effected due to the viscosity of a fluid. But particularly preferred is a damping device, generate in the movements of the element eddy currents, so that due to the eddy currents, the relative movement is slowed down and thus enters the desired damping effect of the vibrations.
  • a first part of the eddy current damping device is attached to the element. This first part can be z. B. starting from the element in the radial direction, d. H. transverse to the axial direction, extend.
  • a second part of the damping device is attached to the element. This first part can be z. B. starting from the element in the radial direction, d. H. transverse to the axial direction, extend.
  • a second part of the damping device is attached to the element. This first part can be z. B. starting from the element in the radial direction, d. H. transverse to the axial direction, extend.
  • Eddy current damping device arranged so relative to each other that
  • Movements of the element transverse to the axial direction lead to a relative movement of the first and the second part of the eddy current damping device. In this relative movement, the eddy currents are generated and, as mentioned above, the
  • the above-mentioned sensor may be a first sensor which is arranged at a first position in the circumferential direction with respect to the axis of rotation, wherein arranged on the first or second part at a second position spaced from the first position in the circumferential direction with respect to the axis of rotation, a second sensor is, wherein the second sensor is configured to generate a measurement signal corresponding to a position of the measuring body or a second measuring body and thus the relative position of the first and second part.
  • the circumferentially distributed sensors need not serve to determine the axial errors, i. do not have to measure changes in the relative position in the axial direction. Rather, with appropriate configuration of the sensors (eg as rotation angle sensors) and also of the at least one measuring body (eg with a plurality of markings distributed around the axis of rotation), they can be configured to rotate the rotational position of a rotating device and / or or to determine and / or to take into account the translational relative position of two parts which are rotatable relative to one another.
  • a suitable measuring body is e.g.
  • the above-mentioned grating disc are distributed in the markings on the disc, which are detected by the sensors in a passing movement in the circumferential direction with respect to the axis of rotation on the disc.
  • a disc can therefore also be used a ring that carries the markings.
  • the markings are in the radial direction extending bar-shaped markings, so that it can be spoken by a running in the circumferential direction grating.
  • Rotational position (s) are evaluated such that effects of a translational Movement of the first and second parts are corrected relative to each other, wherein the translational movement is transverse to the extension of the axis of rotation.
  • the redundant information is redundant with respect to the detection of the rotational position. But they also contain information about the translational movement transverse to the axis of rotation of the rotating device.
  • a plurality of sensors which are arranged distributed around the axis of rotation and are configured to respectively detect the rotational position of the first and second part relative to each other and to generate a corresponding measurement signal, in particular the sensors- in the axial direction of the axis of rotation - at the same Side of the measuring body or are arranged at the axial position of the measuring body,
  • Measuring signals of the sensors is connected and which is configured to evaluate detected by the sensors rotational positions of the first and second parts relative to each other such that effects of a translational movement of the first and second parts are corrected relative to each other, wherein the translational movement transverse to the extension of the axis of rotation runs.
  • the arrangement not only to consider the translational movement of the first and second part relative to each other and in particular to correct, but also by evaluating the measurement signals of at least one of the sensors to determine the rotational position of the first and second parts relative to each other. Therefore, only a small amount of space is required for the measuring system of the arrangement.
  • At least one sensor can be provided, which is designed to detect a distance of the measuring body from the other part in the axial direction of the axis of rotation or by observation of the measuring body, an axial relative position of the first part and the second part.
  • the information about the axial distance or the axial relative position allows to consider further degrees of freedom of movement of the rotary device and the corresponding errors (i.e., deviations of the movement from an ideal one)
  • Rotational movement are determined and / or corrected.
  • two of the Distance sensors or sensors for determining the axial relative position are present, which are aligned to different areas of the measuring body, with further consideration of the measurement signals of the rotational position sensors (ie with the information about the rotational position and the translational position transverse to the axis of rotation), in particular the wobble error of the rotating device , be determined.
  • the same measuring body serves to be observed by the rotational angle sensors for detecting the rotational position and serves to be observed by the at least one distance sensor or sensor for determining the axial position, the configuration of the measuring system of the arrangement is particularly space-saving.
  • the measuring body may be a disk-shaped measuring body, for example a circular disk-shaped measuring body
  • Measuring body or annular measuring body which is preferably designed and arranged rotationally symmetrical with respect to the axis of rotation.
  • This at least one rotation angle sensor thus replaces the aforementioned additional sensor.
  • all of the additional sensors that detect the axial distance or the axial relative position are replaced by at least two of the rotation angle sensors. This saves costs for additional sensors and additional space.
  • the rotation angle sensors are designed to generate a periodic signal in the course of a rotational movement of the rotary device, the period duration corresponding to the chronological sequence of markings which are in the
  • the period duration of the measurement signal corresponds to the time sequence of the markers entering the detection range or emerging from the detection range on the measurement body.
  • a periodic measurement signal is sinusoidal.
  • the periodic measurement signal can also be interpreted such that the period corresponds to a distance of the successive markings distributed in the circumferential direction about the rotation axis.
  • the period or period is used to determine the rotational position or speed.
  • the sensors detect as a primary measured variable a radiation intensity of electromagnetic radiation (eg visible light or infrared radiation) which is reflected by the measuring body or passes through the measuring body.
  • the detected radiation intensity depends on the rotational position.
  • the markings on the measuring body reduce the measured radiation intensity to almost zero and in other rotational positions make the measured radiation intensity maximum and in this way generate the periodic measuring signal.
  • Corresponding effects can also be achieved with magnetic markers and magnetic sensors.
  • the amplitude of the periodic measuring signal generated during a rotational movement depends on the distance of the sensor to the measuring body in the axial direction. Therefore, from the amplitude of the periodic measurement signal or from the intensity of the measurement signal z. B. detect at rotational positions with maximum intensity of the distance between the sensor and the measuring body, i. the distance can be determined from the amplitude or intensity of the measurement signal.
  • the determination of the axial relative position or of the axial distance is not effected by the sensor itself, but by a corresponding evaluation device. It can be an individual
  • Evaluation device of the sensors act.
  • the redundant information can also be obtained by at least three different positions in the circumferential direction with respect to the axis of rotation a sensor is arranged, which detects the passing past markings.
  • the redundant information can be used to reduce or even eliminate as far as possible the systematic errors in the measurement and evaluation of the sensor signals.
  • the first or the second part is configured to hold a coordinate measuring device configured as a probe for mechanically scanning the workpiece and / or as a probe for the probe, in order to allow mobility of the probe and / or the probe the sensor and / or the measuring body is also designed, except for determining the relative mobility of the first and second part, to measure a displacement of the probe from a neutral position during mechanical scanning of the workpiece for the purpose of measuring the coordinates of the workpiece.
  • the configuration for holding a button is in particular that the part has an interface for attaching the button. As is known per se in the field of the present invention, this may be a so-called
  • the second aspect of the invention is based on the problem that probes for the mechanical scanning of a workpiece for certain measurement tasks are designed to be movable in order to orient and / or position the probe in different ways relative to the coordinate measuring apparatus.
  • the movement and thus alignment and / or positioning should be performed before the actual probing of the workpiece.
  • a rotation of the probe should be possible around at least one axis of rotation.
  • the rotary device In order to be able to determine errors such as wobble error, concentricity error and axial misalignment of the rotary device, it is possible, as described above, to use one or more sensors on the rotary device which measures the relative position of mutually movable parts of the rotary device at least with respect to one degree of freedom of movement.
  • the sensor at least one sensor / measuring body pair
  • the sensor for measuring the deflection of the probe when contacting the workpiece from the perspective of the rotating device can be arranged on the switch side, ie the button is connected via the sensor with the rotating device.
  • the sensors are, for example, a standard probe head, to which buttons can be attached interchangeably (see above).
  • compact rotary devices and sensors which should also have a total of the lowest possible mass and should be inexpensive to produce.
  • Measuring body of the sensor which is designed to measure the movement of the probe during mechanical probing of the workpiece, also for measuring the
  • the procedure in the operation of the arrangement is for example as follows: First, a desired rotational position of the probe is adjusted by means of the rotating device. At least one sensor is used to determine the actual rotational position of the probe and / or a fault of the rotating device (eg wobble error, concentricity error or runout error). As a result, it can be precisely determined in which rotational position, the button relative to another part of the rotating device.
  • Coordinate measuring machine is located.
  • the information about the previously set rotational position and / or the error of the rotary device can be taken into account in the evaluation of the measurement signals, which are obtained in the following measurement of the workpiece by the mechanical scanning by means of the probe.
  • a device which allows a linear movement of the probe so that with respect to at least one linear degree of freedom of movement of the probe, a position of the probe can be set.
  • at least one sensor or at least one measuring body is used both for the determination of the set linear position and for the measurement of the movement of the probe during the mechanical scanning of the workpiece.
  • the rotational position or linear position of the probe is fixed before scanning the workpiece, so that the rotational position and / or linear position no longer changes.
  • a separate locking device may be used, e.g. causes a mechanical locking of the button in the set position.
  • the drive device e.g an electric motor
  • the electric motor inhibits the movement when no current flows, or a brake is provided or a control of the motor controls the position by appropriate control of the motor.
  • the rotational position and / or the linear position may change. Therefore, it is preferred, after the scanning of the workpiece, when between the button and the
  • the position of the probe may be running, i. continuously or quasi-continuously (e.g., cyclically recurring).
  • the additional sources of error for the exact reproduction of a rotational position or linear position of the probe decrease before scanning the workpiece.
  • the additional sources of error for the exact reproduction of a rotational position or linear position of the probe decrease before scanning the workpiece.
  • the number of signals to be transmitted can be reduced. Electrical interfaces are eliminated or their number is lower.
  • the sensor / measuring body combinations preferably be measured in which position the probe is located before scanning the workpiece. It is therefore even possible to measure whether a desired position of the probe is actually set or how far the actually set position deviates from the desired position.
  • the known arrangements have, for example, as described above, a rotating device and an additional sensor coupled to the rotating device button.
  • the first part and the second part are portions of the same arm of a coordinate measuring machine or a machine tool located at different axial positions in the direction of the longitudinal axis of the arm, the relative mobility of the parts due to mobility
  • the measuring body or the sensor is attached to a first axial end of an elongate, extending in the direction of the longitudinal axis element.
  • the elongate member is connected to the first part at its second axial end, which is opposite to the first end.
  • the at least one sensor if the measuring body is attached to the elongated element or the measuring body (if the sensor is attached to the elongate element) is attached to the second part. If there are multiple sensors, the sensors are preferably located on the same part.
  • the arrangement according to the third aspect of the invention may have the following further features or any combination of these further features:
  • the elongated element may extend inside the arm.
  • the arm can therefore be referred to as a hollow arm.
  • the arm may be the quill of a coordinate measuring machine, for example a gantry coordinate measuring machine or gantry type.
  • the arm may be an arm of a machine tool, e.g. B. a robot.
  • the first axial end of the elongate member is in an axial position of the arm, on which also the second part is located.
  • the first axial end of the element may be at an axial position of the arm which is only a small distance from an axial position of the second part.
  • a small distance is, for example, a distance which corresponds to the distance of a sensor from an associated measuring body, the sensor e.g. attached to the first axial end of the element and the measuring body to the second part (or vice versa).
  • the second part may have an interface for attaching and connecting a probe, a rotating device, a sensor with integrated rotating device according to the second aspect of the invention or a button.
  • the second axial end of the elongated member may be connected at an axial position of the arm to the first part, which also has a reference point of scale for measuring the position of the arm. For example, in a quill of a coordinate measuring machine, this position of the arm is movable relative to a base of the coordinate measuring machine, for example in the vertical direction.
  • the elongated member may extend in the axial direction over the entire length of the arm or even beyond.
  • the at least one sensor / measuring body pair is therefore located in the region of a first axial end of the arm and in the region of the first axial end of the elongated element.
  • the second axial end of the elongate member is in this case attached to the opposite, second axial end of the arm forming the first part.
  • the elongated element extends over the entire length of the arm or in the general case that the elongate element due to its axial length can perform mechanical vibrations, it is preferred that in addition a damping device for damping mechanical
  • Vibrations of the elongated element is provided.
  • Damping device is preferably in at least one area approximately in the Center of the axial extent of the elongated element arranged.
  • damping devices are in particular devices in question, in which the damping is effected due to the viscosity of a fluid.
  • a damping device generate in the movements of the elongated member relative to the arm eddy currents, so that due to the eddy currents, the relative movement is slowed down and thus enters the desired damping effect of the vibrations.
  • a first part of the eddy current damping device is fastened to the elongated element, which extends in the interior of the arm. This first part can be z. B.
  • a second part of the eddy current damping device On the arm, in particular on the inside of the wall of the arm, located approximately at the same axial position, a second part of the eddy current damping device.
  • the first and the second part of the eddy current damping device are arranged relative to one another such that movements of the elongate element transversely to the axial direction to a relative movement of the first and the second part of
  • Effects of oscillations of the elongate element may alternatively or additionally be reduced or eliminated by applying a low-pass filter to the time sequence of repeatedly acquired measured values of the sensors.
  • the elongate element is preferably made of a material which has a much lower (in particular at least a factor of 100 lower) thermal expansion or thermal
  • the elongated element can be considered to be temperature stable. For this reason, it is possible to use the sensor or the sensors and the measuring body or the measuring body, the effects of thermal
  • a thermally stable elongated element also has the advantage that at different temperatures the effects of mechanical bending due to
  • the temperature of the elongated element or in the immediate vicinity of the elongate element can be measured and the effect of thermal expansion or contraction of the elongated element can be calculated to account for the effect of evaluating the measurement signals of the at least one sensor.
  • more than one sensor be provided for determining the relative position of the first axial end of the elongated member and thus indirectly the first part of the arm relative to the second part of the arm and used to determine the relative position with respect to a plurality of To determine degrees of freedom of movement. At least the determination of three degrees of freedom of the movement, namely two linear degrees of freedom in different, preferably mutually perpendicular directions, each perpendicular to the longitudinal axis of the arm, and the linear degree of freedom of movement in the direction of the longitudinal axis of the arm is preferred. If these degrees of freedom are determined, can
  • arms of coordinate measuring machines are torsionally stiff, so that further degrees of freedom of movement, namely rotational degrees of freedom of movement, can be neglected.
  • Movement of the second part can be taken into account in another way, e.g. by calibrating a probe directly or indirectly attached to the second part for mechanical scanning of a workpiece.
  • the second axial end of the elongated member when the second axial end of the elongated member is connected to the first part at the reference point of a scale, or at least at the axial position of the reference point, the
  • Measurement results of the at least one sensor are directly and easily related to the reference point. For example, succeeds in this way, a correction in the calculation of coordinates of a measured by a probe workpiece with little effort, since the coordinate system of the scale and the
  • Coordinate system of the second part in a unique manner via the elongated element are coupled together.
  • the elongate element alternatively or additionally extends inside the arm, the construction volume of the arm is not increased.
  • the measuring body and the sensor are preferably disposed within the arm and thus protected from external influences, without the need for an additional housing.
  • the third aspect of the present invention has the advantage that the arm, e.g. As the sleeve or the robot arm, not with great effort stiff against shape changes must be executed and therefore costs and weight can be reduced.
  • Occurring relative movements of the first and second parts can rather be measured and taken into account.
  • the arm itself need not be made of a material that has a low thermal expansion or contraction coefficient.
  • FIG. 1 shows schematically a longitudinal section through the end region of a quill of a
  • FIG. 3 shows schematically a partial view of the arm of FIG. 2, wherein in
  • Fig. 4 shows an arrangement of two relatively movable parts, wherein the
  • Arrangement comprises a measuring system for measuring the relative position and / or relative orientation of the two parts
  • Fig. 4a shows an arrangement as in Fig. 4, but in addition a
  • Fig. 5 shows an arrangement as in Fig. 4, but with respect to the measuring system
  • Fig. 6 schematically shows an axial longitudinal section through a first example of a
  • FIG. 7 is a plan view in the axial direction of a variant of the arrangement in FIG.
  • Fig. 8 is a plan view in the axial direction of a further arrangement for
  • Fig. 9 shows schematically the integration of an arrangement according to Fig. 4 in a
  • FIG. 10 shows schematically an axial longitudinal section through a second example of a
  • FIG. 1 1 schematically shows an axial longitudinal section through a third example of a
  • Fig. 12 shows schematically an axial longitudinal section through a fourth example of a
  • Fig. 13 schematically shows an axial longitudinal section through a fifth example of a
  • the measuring system comprises a plurality of
  • Fig. 15 schematically shows an axial longitudinal section through a sixth example of a
  • Arrangement having a first part and a second part movable relative thereto, the device having a measuring system for determining the axial relative position of the parts
  • Arrangement having a first part and a second part movable relative thereto, the device having, in addition to the arrangement in FIG. 15, a measuring system for determining the radial position or radial positions of the parts,
  • Fig. 17 schematically shows an axial longitudinal section through an eighth example of a
  • Arrangement having a first part and a second part movable relative thereto, the arrangement having a combination of a measuring system of the arrangement according to FIG. 13 with a measuring system of the arrangement according to FIG. 12,
  • Fig. 18 schematically shows an axial longitudinal section through a ninth example of a
  • buttons 20 shows a button with a movement device for setting the position and / or orientation of the button
  • 21 schematically shows a perspective view of a probe disposed on a probe, which can be deflected when touching a workpiece from a rest position, the probe is rotatable about a rotation axis with the probe relative to an arm of a Koordinatenmessgerats and wherein both the deflection and the rotation of the probe together with the probe can be measured with the same sensors
  • FIG. 22 is a plan view of a mounting plate shown in FIG. 21.
  • FIG. 22 is a plan view of a mounting plate shown in FIG. 21.
  • the mounting plate has a plurality of pairs of magnets to allow the sensors to determine the respective position with respect to a certain degree of freedom of movement
  • FIG. 23 shows a side view of the arrangement according to FIG. 21 in the mounted state
  • Fig. 24 is a plan view of a part of the mounting plate of the arrangement
  • FIGS. 21 to 23 wherein two magnet pairs can be seen, which are each assigned to a sensor of the probe,
  • Fig. 25 is a side view of an arrangement similar to that in Fig. 23, wherein for a single or a selected degree of freedom of movement, the measurement of the relative position of the movable part of the probe and the mounting plate is shown, said degree of freedom of movement in particular during a tumbling motion the axis of rotation is relevant,
  • FIG. 26 shows an illustration of the arrangement according to FIG. 25, likewise in side view, wherein a deflection of the probe is shown on the basis of a probing of a workpiece.
  • Fig. 1 shows a quill 200 of a coordinate measuring machine. As indicated by two approximately parallel curved lines, the sleeve 200 may extend over an unspecified section in its longitudinal direction. The Longitudinal direction runs in Fig. 1 from top to bottom. At the bottom in Fig. 1 lying free end of the sleeve, which is formed by an end portion 202 is a
  • the interface may be a so-called changeover interface which facilitates the coupling of various modules, e.g. alternatively, another rotating device or a probe allowed.
  • corresponding electronics 205 may be arranged, e.g. for identifying and / or operating the module connected via the interface.
  • a scale 204 In a central area 201 of the quill 200, a scale 204, e.g. in the form of a grating, which extends in the longitudinal direction of the quill 200 arranged.
  • a reference point 203 of the scale 204 is defined at the end of the scale 204 which is closest to the end portion 202.
  • an angled rod 206 of temperature-stable material is attached as an elongated element. Starting from the reference point 203, the rod 206 initially extends into the interior of the sleeve 200 in a direction perpendicular to the longitudinal direction of the quill 200.
  • the rod 206 extends in the direction of the longitudinal axis of the quill 200 to the end portion 202.
  • a plurality of sensors 207a, 207b arranged, for example capacitive sensors, i. Sensors whose capacity is dependent on the relative position of a measuring body measured electrically. For example, has the measuring body
  • dielectric material located near or between electrodes of the capacitive sensor.
  • the end portion 208 at the free end of the rod 206 serves as the measuring body
  • the free end 208 made of a permanent magnetic material or carries a permanent magnetic material.
  • Fig. 1 shows schematically a holder 209, which is attached to the end of the end portion 202 and the sensors 207 carries and holds.
  • a first sensor 207a is positioned radially outward of the end portion 208 of the rod 206.
  • This sensor 207a is therefore designed to provide the relative Position of the end portion 208 and the sensor 207a in the radial direction to measure.
  • a further sensor (not shown) positioned radially outside the end region 208 is preferably provided, for example, with respect to the plane of the figure of FIG. 1 below or above the end region 208. With this sensor, therefore, the radial distance between the sensor and the end region 208 in another direction be measured.
  • further sensors may be disposed at other positions in the circumferential direction about the longitudinal axis and thus around the rod 206.
  • redundant information about the position of the end region 208 of the rod 206 in a plane perpendicular to the longitudinal axis of the quill 200 or of the rod 206 can be obtained.
  • a second sensor 207b is arranged in the axial direction (relative to the longitudinal axis of the quill 200) at a distance from the end region 208. This sensor 207b therefore provides measurement signals that contain information about the relative position of the sensor 207b in the axial direction to the end portion 208 of the rod 206.
  • the arm shown in Fig. 1 may also be another arm of a coordinate measuring machine, e.g. around a so-called horizontal arm of a horizontal arm coordinate measuring machine.
  • the longitudinal axis of the arm extends approximately in the horizontal direction.
  • the deflection of the free end of the arm is dependent on the weight of the devices located at the free end. With the proposed arrangement, this bending can be measured during the operation of the CMM.
  • a rotating device 210 is coupled to the end portion 202 of the sleeve 200 and the arm.
  • Turning device 210 is attached to end portion 202 of arm 200.
  • the rotor 212 of the rotating device 210 shown schematically below in FIG. 1, is rotatably mounted.
  • a temperature-stable rod 216 is non-rotatably connected to the rotor 212 and extends in the longitudinal direction of the stator 21 1 in its interior to a region at the interface between the arm 200 and the rotating device 210
  • a plurality of sensors 217 a, 217 b is on the stator 21st 1, wherein the corresponding attachment or holder in Fig. 1 is not shown.
  • the end portion of the temperature stable rod 216 at the interface to the arm 200 is as Measuring body designed or carries at least one measuring body 218a, 218b. In the exemplary embodiment, these measuring bodies 218 are balls or cylinders which
  • the two sensors 217a, 217b which are shown in Fig. 1, are located at different axial positions with respect to the axis of rotation and are configured, the relative position of the respective
  • Measuring body and the sensor to measure in the radial direction Preferably, at least one further sensor is arranged at each axial position, but at a different position in the circumferential direction about the rotation axis, so that the radial distance between the sensor and the measuring body is in another, preferably perpendicular to the radial direction of the sensor 217a or 217b Direction, is measured.
  • additional, redundant sensors can be provided.
  • the measuring body is used at the respective axial position of the plurality of sensors at this axial position as an associated measuring body.
  • the senor is in each case arranged radially outside the measuring body, insofar as it is the measurement of a radial distance.
  • the sensor is also arranged, as in the sensors for measuring the radial distance at the end portion 202 of the arm and thus on the movable part of the arm 200.
  • the sensor and the measuring body can be interchanged at least in one of the pairs of sensor / measuring body.
  • at least one sensor can be arranged on the end region 208 of the rod 206 or on the interface-near end region of the rod 216 and a corresponding measuring body can be arranged approximately where the sensor is located in the exemplary embodiment of FIG.
  • further modifications may be made.
  • the temperature-stable rod 216 of the rotating device 210 can be replaced at least in its end region near the interface to the arm 200 by a hollow cylinder which forms the measuring body.
  • the sensors may be located in the interior of the hollow cylinder.
  • the axial position of the rotor by measuring the axial position of the end portion of the temperature-stable rod 216 are measured. For this purpose, for example, at a distance from the measuring body 218b in the axial direction, there is another sensor within the rotating device 210.
  • Fig. 2 shows an arm 220 of a CMM, in particular a quill.
  • This quill may be the quill 200 shown in FIG. 1, if at the lower end of the quill, not a rotary device as shown in FIG. 1, but the one shown in FIG.
  • the probe 221 is arranged.
  • the probe 221 carries at its lower end a stylus 222 with a spherical probe element 223.
  • the arm 220 is
  • Fig. 3 which is preferably disposed within the arm 220, but can also be arranged outside the arm, it is a variant of the already described with reference to FIG. 1 measuring system.
  • the temperature-stable, in the longitudinal direction of the arm 220 extending rod 226 is attached at its lower end to the lower end of the arm 220.
  • the rod 226 In its upper end region, the rod 226 carries two spherical measuring bodies 224, 225, which are arranged in the axial direction at a distance from one another.
  • the rod 226 extends with its upper end portion to the upper end of the arm 220, or even beyond. Thereby, a possible deformation of the arm 220 can be measured over its entire longitudinal extent.
  • the upper ball 224 is located in particular at the upper end of the rod 226.
  • an arrangement of sensors 227, 228, 229 is attached to the arm 220.
  • a first sensor 227 is directed toward the upper ball 224 in the axial direction to measure the relative position in the axial direction.
  • Second and third sensors 228a, 228b are radially aligned with upper ball 224, with sensors 228 oriented in different (eg, mutually perpendicular) directions to measure radial relative position in two different directions.
  • Fourth and fifth sensors 229a, 229b are also aligned in two mutually perpendicular radial directions, but on the lower ball 225, about two independent radial relative positions on another axial one To measure position. All sensors are shown in Fig. 3 only schematically by arrows representing the orientation of the respective sensor. Not to scale and thus schematically in Fig. 3, the representation of the length of the rod 226 and the arm 220. This length may be in relation to the width of the arm much larger than shown.
  • Fig. 4 shows similar to Fig. 3, but schematically for a general case, a measuring system with a plurality of sensors, namely in the embodiment five sensors, which in turn are shown schematically by arrows.
  • the direction of the arrow indicates the orientation of the sensor, d. H.
  • a relative position in particular a distance between the sensor and the measuring body, can be measured.
  • the sensors are designated by the reference symbols s1, s2, s3, s4, s5, and in the following equations the same reference symbols s1 ... s5 are also used for the respective measured values of the sensors.
  • Connection (not shown in Fig. 4, this may, for example, a rotatable connection or a fixed but due to forces and / or temperature changes
  • the information of a single sensor s1 for determining the axial relative position of the parts 1, 3 is sufficient to work together with
  • there is another sensor aligned in the axial direction wherein the two sensors aligned in the axial direction and spaced apart from one another in the axial direction are in this case preferably not arranged coaxially to any axis of rotation around which the two parts 1 , 3 can be rotated relative to each other.
  • a rotation axis is not available in all cases.
  • a rotation axis is not present in one arm of a coordinate measuring machine, in which the relative movement of two different axial regions of the arm to be measured with the measuring system.
  • Rotary axis can be rotated relative to each other.
  • sensors can directly measure the so-called axial runout error of an axis of rotation or torsion axis.
  • the sensors can be configured and operate in different ways.
  • three of the sensors s1... S3 are preferably aligned with a first measuring body K1, which is fastened to the second part 3 of the arrangement and is spherical in the exemplary embodiment.
  • the second part 3 carries an elongate element 4 (eg a cylindrical or other shaped rod) to which in turn the first measuring body K1 is attached at its free end.
  • an elongate element 4 eg a cylindrical or other shaped rod
  • a second measuring body K2 is arranged in the
  • Embodiment is in turn spherical. Alternatively to a single
  • the measuring body can be attached to the second part 3 via a plurality of different elements or be attached directly to the second part.
  • the fourth sensor s4 and the fifth sensor s5 are aligned.
  • the second sensor s2 and the third sensor s3 and the fourth sensor s4 and the fifth sensor s5 are aligned in the radial direction, perpendicular to the longitudinal axis of the elongated element 4.
  • the longitudinal axis A1 of the elongated element 4 (or alternatively a rotation axis about which the parts 1, 3 can be rotated relative to each other) coincides with the longitudinal axis A2 of the first part 1 or at least parallel to you go. In the embodiment shown in Fig. 4, this is not the case.
  • the two longitudinal axes A1, A2 are skewed or intersect.
  • the sensors s2 ... s5 are preferably aligned perpendicular to the longitudinal axis A2 of the first part 1.
  • All sensors are z. B. attached to a common carrier 2, which in turn is attached to the first part 1.
  • the sensors can also be arranged on different supports and / or regions of the first part 1.
  • more than the two measuring bodies K1, K2 shown in FIG. 4 may be present.
  • the first sensor s1 can be aligned with a different measuring body than the two sensors aligned in the radial direction s2, s3.
  • the two in the radial direction aligned sensors s2, s3 and / or s4, s5 may be aligned with different associated measuring body.
  • FIG. 4 a shows a variant of the arrangement shown in FIG. 4. It is provided in addition to the measuring system in Fig. 4, which allows the determination of the relative position of the rotatable parts in the radial position at different axial positions with respect to the axis of rotation, an additional measuring system which measures the rotational position of the two relatively rotatable parts 1, 3. For example, On the second part 3, a multiplicity of markings are arranged distributed around the longitudinal axis A1, so that a measuring body 9 is formed. Another sensor s6 detects the markings of the measuring body 9 when they enter a detection range of the sensor s6 or through this
  • the sensor detects s6 all markings of the measuring body 9.
  • the sensor s6 z. B. each generate a pulse signal when a mark enters the detection area or reaches or passes a certain point in the detection area.
  • the sensor s6 z. B. as also known per se increase a counter reading of an incremental counter by the value 1 when it detects a marker in its detection range.
  • Rotary position sensor for measuring the relative rotational position of the two parts 1, 3 are also possible.
  • a measuring system other than the measuring system implemented by the sensors s1 to s5 may also be present, which also allows the radial position of the two relatively movable parts 1, 3 to be detected and preferably at the axial position of the measuring system for measuring the To detect rotational position, at least to allow the determination of the radial relative position at the axial position of the rotational position measuring system.
  • the radial relative position can be determined at the axial position of the rotational position measuring system, since the measuring system measures the radial position at two different axial positions. In particular, not only the radial position in one direction, but the relative position of the parts 1, 3 in a plane transverse to the axis of rotation is determined.
  • the sensor detects this movement in a manner which leads to a measurement signal which apparently indicates a rotational movement in a direction about the axis of rotation.
  • the sensor can generate a measurement signal which apparently indicates a faster rotational movement about the axis of rotation.
  • rotational movement and translational motion can be fully or partially compensated so that the sensor apparently detects no or a changed (slowed or reversed) rotational movement.
  • the first measuring system which detects the translational position and / or translatory movement of the first and second parts relative to one another
  • a second measuring system which detects the rotational position of the first and second parts relative to one another. From measuring signals and / or measured values of the first measuring system derived therefrom, at least one measuring signal or measured value derived therefrom of the second measuring system is corrected. The correction is performed in such a way that portions of the translational motion to the
  • Measuring signals and / or measured values of the rotational position measuring system are reduced or eliminated.
  • FIG. 5 A variant of the arrangement according to FIG. 4 or FIG. 4 a is shown in FIG. 5.
  • the elongate element 4 with the measuring bodies K1, K2 disposed thereon is replaced by a cylindrical rod 14, which is arranged concentrically to the longitudinal axis A1 of the second part 3.
  • the end face at the free end of the cylindrical rod 14 forms a measuring surface for the first sensor s1.
  • the cylindrical outer surface of the rod 14 forms a measuring surface for the further sensors s2 ... s5.
  • the cylindrical rod 14 according to FIG. 5 does not have to be continuous in the axial direction Cylinder surface having a constant diameter. Rather, can be formed at the axial positions where, according to FIG. 4, the measuring body K1, K2, cylindrical portions of the rod, wherein the rod is otherwise shaped differently, for. B. has a smaller outer diameter.
  • the measuring signals of the sensors s1... S5 can be taken into account as follows in order to determine the relative position and / or orientation of the parts 1, 3 and / or to determine a change in the relative position and / or orientation of the parts 1, 3 and / or correct.
  • the sensors s2, s4 are aligned to measure the relative position with respect to the X-axis of the coordinate system, the sensors s3, s5 are oriented to be the relative position with respect to the perpendicular to the Y-axis
  • X axis of the coordinate system and the sensor s1 is aligned so that it is the relative position parallel or coaxial with the Z-axis of the
  • Coordinate system measures, with the Z-axis perpendicular to the Y-axis and to the X-axis. This coordinate system is thus a coordinate system which rests with respect to the second part 3. Conversely, this means that the first part 1 is movable relative to the coordinate system and this relative movement or the position and / or orientation relative to the coordinate system can be determined.
  • tan r x is the tangent of the angle of rotation about the x-axis.
  • d K iK2 is the distance of the sensors s2, s4 in the axial direction (Z direction), which is approximately equal to the distance of the first measuring body K1 from the second measuring body K2 in the case of
  • Embodiment of Figure 4 is, as long as the inclination of the two longitudinal axes A1, A2 relative to each other is small, z. B. is less than three degrees. Accordingly, the rotation angle around the Y axis can be calculated from Equation 2 as follows: s3 - s5
  • tan r y is the tangent of the angle of rotation about the y-axis.
  • d K iK2 is the distance of the sensors s3, s5, which in turn is approximately equal to the distance between the two measuring bodies K1, K2 and corresponding axial positions of the rod 14 according to FIG. 5, to which the sensors are directed.
  • V A , B, C is the position vector, which can also be used as a correction vector when the position of the part 3 relative to the part 1 changes.
  • the expression is for computing the X component of the vector.
  • the second line on the right side of Equation 3 is the
  • relatively movable parts 1, 3 are parts of a rotary device in which the parts can be rotated relative to each other about an axis of rotation, an example of a corresponding correction of the errors of the rotary device is described.
  • the error is, as mentioned above, in particular the wobble error, the
  • Runout error and / or concentricity error With the correction, the corrected position of a predefined location, eg. Example, the location of the ball center of a probe ball of a coordinate measuring machine, with which the CMM mechanically probes a workpiece for determining its coordinates, or the location of a touch point on the surface of a workpiece on which a CMM probes the workpiece to determine the coordinates.
  • the predefined location is described by a corresponding location vector, which is from the origin of a laboratory coordinate system to the predefined one Place runs.
  • the laboratory coordinate system is a coordinate system in which a base of the rotary device rests, that is, the rotary part of the rotary device is rotated relative to the base when rotational movement takes place about the rotation axis of the rotary device.
  • the non-rotatable part of the rotating device rests in the laboratory coordinate system, but in principle an elastic bending of the non-rotatable part is possible and can optionally be taken into account.
  • a mathematical model may be used which has at least one finite element (see above).
  • the result of the model is a corresponding vector that describes the bending in a coordinate system.
  • T P "1 denote the inverse matrix of the matrix T P , which denotes the inclination of the
  • Turning device in particular the inclination of the rotation axis of the rotating device, describes in the laboratory coordinate system.
  • T A "1 describes the inverse matrix of the matrix T A , which describes the position of the rotary device, in particular a reference point on the axis of rotation of the rotary device in the laboratory coordinate system D A stands for the matrix containing the correction values due to the errors of the rotary device.
  • D A stands for the matrix containing the correction values due to the errors of the rotary device.
  • This vector t is on a
  • This vector b A is z.
  • Equation 6 differs from Equation 5 by an additional term S u, i. the product of a matrix S and a vector u. This term S is added to the vector t from Equation 5.
  • the vector u is a displacement vector containing the
  • the matrix S is the
  • Transmission matrix of the probe which takes into account in particular the elastic and geometric properties of the probe and can be obtained by calibration of the probe. If, as in the second aspect of the present invention, at least one sensor / measuring body pair is used both for determining the position and / or orientation of a probe prior to probing a workpiece and for determining the displacement of the probe when touching the workpiece the weight of the button its position and / or orientation.
  • the influence of the weight is dependent on the rotational position of a rotary device for adjusting the orientation of the probe and / or dependent on a linear position of a linearly movable device for adjusting the position of the probe.
  • the influence of the weight by the already mentioned finite element model can be taken into account.
  • sensors for determining at least five degrees of freedom of movement of the stylus and the rotatable part of the rotating device relative to the non-rotatable part of the rotating device are therefore sensors for determining at least five degrees of freedom of movement of the stylus and the rotatable part of the rotating device relative to the non-rotatable part of the rotating device.
  • Fig. 6 shows schematically an axial longitudinal section through an arrangement with a first part 13 and a second part 1 1, which is movable relative to the first part 13.
  • the arrangement may be a rotary device in which the second part 11 is rotatably mounted relative to the first part 13 about a rotational axis R extending in the vertical direction in FIG.
  • Fig. 6 shows the measuring principle of a sensor comprising a magnet 15 which is fixed to the second part 1 1 and is preferably arranged rotationally symmetrical to the axis of rotation R.
  • This is z. B. the north pole at a higher axial position with respect to the axis R than the south pole.
  • the longitudinal axis of the magnet defined by the two opposite poles of the magnet is aligned parallel or preferably coaxially to the axis of rotation R.
  • the second part 1 1 also comprises an element 12
  • the element 12 is preferably shaped and arranged rotationally symmetrical to the axis of rotation R. It has at the one pole of the magnet 15 (here the north pole) on a disc-shaped region which extends in the radial direction to the axis of rotation R. On its outer circumference, a cylindrical portion extends coaxially with the axis of rotation R in the axial direction parallel to the longitudinal axis of the magnet 15 and thus in the direction of the axial position of the other magnetic pole (here South pole) of the magnet 15.
  • the one pole of the magnet 15 here the north pole
  • a cylindrical portion extends coaxially with the axis of rotation R in the axial direction parallel to the longitudinal axis of the magnet 15 and thus in the direction of the axial position of the other magnetic pole (here South pole) of the magnet 15.
  • At the end of the cylindrical region may optionally be present a further radially inner region of the element 12 (as shown in Fig. 6), so that the remaining annular gap between the radially inner region 16 and the magnet 15 is smaller,
  • this annular gap is at least one sensor 14, in the exemplary embodiment, two sensors 14a, 14b for measuring the radial position or relative position of the first part 13 and the second part 1 1.
  • the at least one sensor 14th is attached to the first part 13, z. B. over a parallel to the axis of rotation R extending carrier 17.
  • the two sensors 14a, 14b with respect to the rotation axis R opposite radial positions
  • sensors that provide redundant information about the relative position of the first part 13 and the second part 1 1, in a direction that runs in Fig. 6 in the plane of the figure in the horizontal direction.
  • Flux guide part eg made of ferrite, for example, the sensor may be a Hall sensor or a magneto-resistive sensor.
  • Fig. 7 shows a variant of the arrangement of Fig. 6, wherein the view is directed in the axial direction of the axis of rotation R of Fig. 6, and is directed to the underside of the magnet 15 and the element 12.
  • the annular gap between the radially inner region 16 and the magnet 15 there are, in addition to the two sensors 14a, 14b shown in FIG. 6, two further magnetic sensors 14c, 14d.
  • these other sensors 14c, 14d are viewed circumferentially around the rotation axis R at a different position so as to have the relative position of the first part 13 (not shown in FIG. 7) and the second part 11 in a different direction than the sensors 14a , 14b measure.
  • the direction in which the sensors 14a, 14b measure the relative position, designated by X, since it is z. B. may be the direction of the X-axis of a Cartesian coordinate system.
  • the perpendicular Y direction is the direction in which the sensors 14c, 14d measure. In Fig. 6, the X direction is from right to left.
  • FIG. 8 shows a variant of an arrangement for measuring the position of a first part 23 relative to a second part 21.
  • the figure shows a section through the arrangement transverse to a rotation axis R, around which the parts 21, 23 are rotatable relative to each other.
  • At the first part 21 are arranged from the perspective of the axis of rotation R in different, preferably mutually perpendicular radial directions magnets 25a, 25b.
  • the magnets 25 may alternatively be arranged at a greater distance from the rotation axis R, namely at a distance which is approximately equal to the distance of sensors 14 attached to the second part 21.
  • the sensors 14 are arranged on the first part 23, which are associated with the magnets 25a, 25b, ie the sensors 14 can in any case, when the magnets 25a, 25b are in their vicinity, their position in the radial direction, ie perpendicular to the Measure the rotation axis R.
  • the magnets 25a, 25b therefore perform the function of measuring bodies which are assigned to the sensors 14a to 14h.
  • These sensors 14 are distributed over the circumference of the first part 23 at equal angular intervals with respect to the axis of rotation R. With eight sensors 14, therefore, there is a sensor every 45 ° in the circumferential direction.
  • the sensors 14 and the magnets 25 are equidistant from the axis of rotation R, the sensors and magnets in the axial direction, that is offset from each other parallel to the axis R against each other, so that the rotational movement about the rotation axis R is possible.
  • FIG. 8 are an alternative realization of a sensor system to the measuring system, which is shown in FIGS. 4 and 5.
  • the sensors s2, s3 or the sensors s4, s5 can be replaced by their, s5 with the respective associated measuring body by the arrangement of FIG. 8.
  • Arrangements according to Fig. 8 are in this case at different axial positions with respect to the axis of rotation R.
  • z. B at least one sensor s1 be present, which measures the axial relative position of the mutually movable parts.
  • the arrangement shown in FIG. 8 can be modified, in particular in which the two magnets 25a, 25b are replaced by a respective sensor and accordingly the eight sensors are replaced by a respective magnet.
  • other sensors can be used as magnetic sensors, for. B. capacitive or inductive sensors with corresponding associated measuring bodies.
  • the number of sensors 14 can be varied. For example, only four sensors can be distributed over the circumference, or sixteen sensors.
  • the embodiment according to FIG. 8 makes it possible, in particular for certain rotational positions of the first part 23 relative to the second part 21, to measure the two radial positions. In these specific rotational positions, the magnets 25 are each located in the vicinity of one of the sensors 14, so that the measurement of the radial relative position succeeds with high accuracy.
  • the principle of the arrangement according to FIG. 8 can also be applied to an arrangement similar to that according to FIG. H. the sensors in a gap between a permanent magnet and another permanent magnet or in a gap between a permanent magnet and a magnetic flux guide element or in a gap between two magnetic flux guide elements
  • the signals of the plurality of sensors 14 according to FIG. 8 (or another number of several sensors) to be interrogated and thus detected cyclically or otherwise via a multiplexer.
  • the signals of the plurality of sensors 14 according to FIG. 8 or another number of several sensors
  • the signals of the plurality of sensors 14 according to FIG. 8 to be interrogated and thus detected cyclically or otherwise via a multiplexer.
  • the measurement signals of the sensors 14a, 14g would assume values that provide information about the radial relative position.
  • analog electrical signals of a sensor can be digitized by an analog / digital converter and then digitally, in particular by using a computer, can be processed.
  • Angle positions can be determined by means of the same sensors, which are also used to determine the error of the rotating device.
  • the sensors 14a, 14g deliver measurement signals that indicate the proximity of a magnet 25.
  • the left position is clearly determined from the signals of the sensors.
  • the exact position and orientation may then be determined by means of the sensors 14a, 14g (or at other angular positions or rotational positions by other sensors 14) and optionally by further sensors for determining the radial relative position at another axial position and optionally by at least one additional sensor for determination the axial position can be determined.
  • a further measuring system is preferably additionally used which is designed to determine the angular position or rotational position. Such systems are known in the art and will not be further described here.
  • Fig. 9 shows schematically the integration of an arrangement according to Fig. 4 in a turntable.
  • the rotatable part 33 of the turntable serves in particular to arrange a workpiece on the turntable 33.
  • the base of the turntable is connected to or formed by the non-rotatable part 31.
  • the part of the measuring system which carries the measuring body K1, K2, z. B. as in Fig. 4 on a rod 34, is fixed to the underside of the rotatable member 33 and is moved in a rotational movement of the rotatable member 33 with.
  • the rod 34 with the measuring bodies K1, K2 extends from top to bottom in the interior of the non-rotatable member 31st
  • the sensors s2, s3, s4, s5 are schematically indicated by arrows as in FIG. 4 and are fastened to the non-rotatable part 31.
  • another measuring system can also be integrated in the turntable with the parts 31, 33 which can be rotated relative to one another.
  • the sensors can rotate with the rotatable part 33 and the measuring bodies can be arranged on the non-rotatable part 31.
  • other measuring bodies than the spherical measuring bodies K1, K2 can be used.
  • the measuring system according to FIG. 8 can also be integrated in the turntable according to FIG. 9.
  • a measuring system is similarly integrated not in a turntable but in a turning device for rotating a probe of a CMM or for turning a tool of a machine tool. In this case is located also, as shown in Fig. 9, the measuring system within the one of the two mutually rotatable parts.
  • Fig. 10 shows a measuring system as in Fig. 6 and / or Fig. 7.
  • the same reference numerals as in Fig. 6 and Fig. 7 are used.
  • another measuring system e.g. as shown schematically in Fig. 4 and Fig. 5 are used. This also applies to the embodiments shown in the following figures.
  • the embodiment according to FIG. 10 has a rotatable part 41 which is firmly connected to the part 11 of the measuring system.
  • the sensors 14a, 14b of the measuring system are connected to a non-rotatable part 43, i. the rotatable part 41 can be rotated relative to the non-rotatable part 43 about the axis of rotation R, wherein the rotation also results in a different rotational position of the element 12 of the measuring system relative to the sensors 14.
  • these sensors 14 are not configured to detect the rotational position. But this would be e.g. when using a measuring system according to Fig. 8 of the case (see above).
  • the arrangement according to FIG. 10 permits the calibration of the measuring system, since the position of the rotatable part 41 and thus the parts of the measuring system connected to the part 41 can be changed in the radial direction relative to the axis of rotation R.
  • the rotatable part 41 via fastening means, in the exemplary embodiment screws 46a, 46b, attached to an intermediate part 45.
  • This intermediate part 45 is rotatable about the rotation axis R and mounted for this purpose via a pivot bearing 44 on the non-rotatable part 43.
  • the non-rotatable member 43 is rotatably coupled via a pivot bearing 44 to a first rotatable member 45 so that the first rotatable member and the fixed member 43 can rotate about an axis of rotation R relative to each other.
  • a second rotatable member 41 is fixedly but releasably connected so that the relative position of the first rotatable member 45 and the second rotatable member 41 is adjustable.
  • the second rotatable part 41 is fixed relative to the first rotatable part 45 in different relative positions in the radial direction (in particular by loosening and fixing again of Fixing agent, changing the relative position and fixing the fixative again).
  • measured values of the corresponding sensors or the sensor associated with this degree of freedom of movement are determined and information for calibration is obtained therefrom.
  • the relative position of the non-movable member 43 relative to the second movable member 41 changes due to errors (in particular, tumble errors)
  • Turning device can be determined using the obtained calibration information, in which relative position, the parts 41, 43 are located.
  • nonlinearities between the relative position and the sensor signal of the respective sensor are determined by the calibration.
  • Movement between a first and a second rotatable part be present, so that these two rotatable parts can be fixed in different relative positions with respect to the degree of freedom of movement.
  • the sensors can be calibrated in a special measuring arrangement, i. the sensors are then not in the turning device but in a reference turning device or other special setup for calibration. After the calibration values have been obtained, the sensors are inserted into the turning device and deliver during operation of the rotating device
  • Readings The same applies, e.g. even if the sensors are not in one
  • a non-parallel alignment of the two measuring systems or partial measuring systems is preferably also determined and / or corrected by calibration.
  • Rotational movement about the axis of rotation is preferably determined and / or corrected by calibration. Again, it is possible to determine the error of the entire measuring system or both measuring systems in a separate calibration arrangement.
  • the two measuring systems or partial measuring systems are firmly connected and in a reference turning device, which has a negligibly small or exactly known error of the rotational movement, operated, ie corresponding measured values of the sensors are recorded in different rotational positions of the reference rotary device.
  • the arrangement of the measuring systems or partial measuring systems is used in the rotating device in which the sensors are to deliver signals permanently during operation. This is the firm connection of the two
  • FIG. 11 shows two of the measuring systems according to FIG. 6 and FIG. 7, wherein the measuring systems can in turn be replaced by other measuring systems.
  • the special measuring systems can in turn be replaced by other measuring systems.
  • Embodiment is only a sensor for determining the radial
  • the fixed part 53 (the stator) is in the embodiment shown in the longitudinal section U-shaped and contains in its interior the lower measuring system and a connection 59 between the lower and the upper measuring system.
  • both measuring systems are rotated during a rotational movement of the rotatable part 51.
  • the stator 53 and the movable part 51 are in turn rotatably supported by a pivot bearing 44 to each other.
  • a motor 54 drives a rotational movement of a drive shaft 58 through which a drive wheel (e.g., a friction wheel or gear 57) is rotated, which is a corresponding one
  • Torque on the rotatable part 51 transmits.
  • a second sensor which is additionally present, for measuring a radial relative position of the rotatable part 51 and the stator 53 in a direction perpendicular to the first radial direction, in which the direction shown in FIG. 1 1 sensors 14a and 14b measure the radial relative position.
  • Fig. 12 shows an arrangement as in Fig. 1 1, but wherein the two measuring systems have been replaced by another measuring system, which corresponds to the embodiment described with reference to FIG.
  • a rod-shaped support 4 is fixed, which runs rotationally symmetrical to the rotation axis R from top to bottom in the interior of the stator 53.
  • the rod-shaped carrier 4 carries as a measuring body two spherical regions K1, K2 at an axial distance with respect to the axis of rotation R.
  • the sensors 64a, 64b, 69 are directed and two additional sensors for determining the radial distance in a different direction than the sensors 64a, 64b.
  • the sensor 69 for determining the axial distance of the stator 53 to the spherical measuring body K1 is supported by the lower base of the stator 53.
  • Connecting cable 63a of the sensor 69 is guided through the base of the stator 53 from top to bottom. Via the cable 63, the sensor signal of the sensor is fed to an evaluation device, not shown.
  • the two sensors 64a, 64b which are directed onto the first spherical measuring body K1 and the second spherical measuring body K2, respectively, are attached to a side wall (i.e.
  • a connecting cable 63b, 63c is guided through the side wall of the stator 53, wherein the cables 63 are likewise connected to the evaluation device.
  • the sensors 64, 69 are e.g. around optical sensors. Alternatively, it may be e.g. to act on capacitive sensors.
  • the measuring bodies K1, K2 are e.g. of electrically conductive material, e.g. Made of steel.
  • FIG. 13 shows a stator 53 and a rotor (rotatable part) 51 as in FIG. 11 and FIG. 12, which are likewise rotatably mounted via a rotary bearing 44.
  • the measuring systems from FIG. 11 or the measuring system from FIG. 12 is replaced by another measuring system.
  • From the rotor 51 projects a rod-shaped carrier 73 down into the cavity of the stator 53, wherein the rod-shaped carrier 73 is rotatably attached to the rotor 51 and is arranged coaxially to the rotation axis R.
  • the rod 73 carries in each case a disk 75a, 75b which, for example as shown in FIG.
  • the markings have a structure with a multiplicity of markings which are arranged at a distance from one another on the disk or on the disk , These spaced-apart markers can thus be referred to as a grid, in the case of line-shaped markings as a grating.
  • the markings of which some are designated by reference numeral 82 in FIG. 14, preferably run along a circular line, ie their distance from each other corresponds to the corresponding one Section of the circle between the marks.
  • the circular line extends around the rotation axis R. Similar to FIG. 7, the transverse and respectively perpendicular X and Y axes are also shown in FIG. 14, in the direction of which relative positions of the stator and of the rotor are to be determined.
  • the sensors 74a, 74b and 74c, 74d for measuring the radial relative position in the radial direction or diameter direction with respect to the rotation axis R are arranged opposite to each other, the arrangement of the sensors 74a, 74b, 74c, 74d, 74e, which in FIG. 14, designed differently.
  • the plan view of Fig. 14 shows that a total of five sensors 74 are distributed approximately uniformly over the circumference. Therefore, none of the sensors 74 in Fig. 14 is exactly opposite to another sensor with respect to the rotation axis R.
  • the sensors 74 of FIG. 13 and FIG. 14 are configured to detect not only the rotational position or change in the rotational position of the disc 75 with respect to the axis of rotation R, but also the radial position of the disc 75 relative to the sensors and thus Radial position of the rotor 51 relative to the stator 53. It is not absolutely necessary that the signals of the individual sensors are evaluated and from each a radial position with respect to the connecting line of the sensor to the rotation axis R is determined. Rather, from the totality of the signals from more than one of the sensors 74, the position of the disk 75 and thus of the rotor 51 can be determined within the plane defined by the disk, which is perpendicular to the axis of rotation R.
  • the effect is utilized that the distance between linear markings 82, which run in the radial direction and thus perpendicular to said circular line, increases with increasing distance to the rotation axis R or becomes smaller in the opposite direction. This also changes the measurement signal of the sensors 74, which simultaneously detect several markings.
  • the sensors 74 are again attached to the inside of the side wall of the stator 53. Suitable sensors are e.g. in EP 1 923 670 A1
  • Fig. 15 shows a variant of a partial measuring system for determining the axial
  • a magnetic sensor 89 is fixedly connected via a carrier 87 to a side wall of the stator 53. It is located in the region of the axis of rotation R, ie it is pierced by the imaginary axis of rotation R. Located at an axial distance above the sensor 89 is a first magnet 85b, which is fixedly arranged on the underside of the rotor 51 via a rod-shaped carrier 84.
  • a second magnet 85a is disposed below the sensor 89 at an axial distance and also attached to the stator 53 like the sensor 89. Due to the two magnets 85, a particularly strong magnetic field is generated at the location of the sensor 89, so that the local resolution in the measurement of the axial position is particularly high.
  • the lower magnet 85a is not mandatory.
  • the sensor may be directly attached to the lower part of the stator 53 and the lower magnet 85a of Fig. 15 omitted.
  • Measuring system for determining the radial position or radial positions of the rotor 51 is provided relative to the stator 53.
  • the additional measuring system is implemented, for example, as already described with reference to FIGS. 13 and 14.
  • a disc 75 with a plurality of spaced apart markers is rotatably mounted on a rod-shaped carrier 84 with respect to the rotor 51.
  • At least two sensors 74a, 74b for detecting the spaced apart marks on or on the disc 75 are fixedly connected to the side walls of the stator 53.
  • Sensors of the embodiment of FIG. 16 serve to determine three degrees of freedom of movement, wherein drum errors can not be detected.
  • the arrangement is therefore suitable for rotary devices in which wobble errors e.g. structurally limited are negligible.
  • the advantage of the arrangement according to Fig. 14 lies in the low height, i. in the slight extension along the axis of rotation R.
  • Fig. 17 shows a combination of the upper measuring system of the arrangement according to Fig. 13 with the lower measuring system of the arrangement according to Fig. 12.
  • the same reference numerals as in Fig. 12 and Fig. 13 have the same meaning in Fig. 17.
  • With the two sensors 74a , 74b and the disc 75 can be linearly independent radial
  • Relative positions of the rotor 51 and the stator 53 at a first axial position determine with respect to the axis of rotation R.
  • the sensor 64a and another sensor, not shown, which are aligned on the measuring body K1 which is arranged on the rod-shaped carrier 73 in the lower end region, two radial, mutually independent radial relative positions of the stator 53 and the rotor 51 at a determine the second axial position of the axis of rotation R.
  • Relative position of the ball K1 and the sensor 69, which is fixed to the stator 53 below, can be additionally determined.
  • FIG. 18 shows a further combination of two different measuring systems or partial measuring systems.
  • the stator 53, the pivot bearing 44, the rotor 51 together with the downwardly projecting rod-shaped support 73 and the upper part measuring system with the disk 75 are configured as in FIG. 17 or FIG. 13 and FIG. 14.
  • the lower, arranged at a different axial position of the axis of rotation R second part measuring system is designed differently than in Fig. 13 and Fig. 17. It has a cylindrical disc 95, on whose circumferentially extending outer edge, a first sensor 64a for determining the radial relative position between the cylinder plate 95 and the stator 53 is aligned. Furthermore, two in the axial direction, i.
  • extending level requires the information of at least two sensors 74, which are not opposite to each other with respect to the axis of rotation R.
  • FIG. 19 A particularly low-build embodiment, ie the extension along the axis of rotation R is particularly small, is shown in Fig. 19.
  • a measuring system is provided with a disk 75 arranged on the rod-shaped carrier 73 of the rotor 51 and carrying a multiplicity of markings.
  • the associated sensors 74 which measure the relative position of the disk 75 with respect to two independent radial relative positions, are disposed on one axial side (namely, at the top of FIG. 19) of the disk 75.
  • two sensors 94a, 94b are similar as in FIG. 18 arranged in the lower part measuring system. These sensors 94 are aligned parallel to the axis of rotation R. Again, these two sensors 94 allow the
  • the sensors 74 can also be used to determine the translatory movement or the translational position transversely to the direction of the
  • Rotary axis R can be used. In this case, the determination of the wobble error is also possible with the arrangement.
  • the sensors 94 can be dispensed with, and the rotation angle sensors 74 are also configured, the axial ones
  • FIG. 20 Shown is a stylus 122 for
  • the stylus 122 has at its free end on a Tastkugel 123 or another probe element. As indicated by two concentric circles, the stylus 122 is movably mounted (bearing 120) to be deflected from its rest position during scanning of the workpiece can. This deflection is measured as usual and the coordinates of the respective touched point on the surface of the workpiece are determined therefrom.
  • the stylus is combined with a sensor, which is shown schematically in Fig. 20 by two sensors s1, s2.
  • the sensors s1, s2 are rigidly connected (i.e., without the possibility of relevant relative movement) to the stylus 122, while the
  • a plurality of measuring bodies M1 to M5 on the support 1 15 and on the non-movable part is shown. This will be discussed in more detail.
  • This plurality of measuring bodies M1 to M5 is assigned to only one of the sensors, namely the sensor s1.
  • the other sensor s2 or optional other sensors associated measuring body are not shown in Fig. 20, since it is a
  • the stylus 122 In addition to the mobility due to the bearing 120, the stylus 122 together with the sensors (or measuring bodies) fixedly connected to it can be rotated about an axis of rotation R. This is done in particular for the purpose that before touching a point on a surface of the workpiece, the stylus 122 is to be aligned differently. Dashed lines show a different rotational position of the stylus and the sensors into which the stylus 122 has been brought by rotation about the axis of rotation R. It can be seen that thus also the bearing 120 has rotated. Subsequently, in this changed orientation of the stylus 122, a workpiece can be touched.
  • the rotation about the rotation axis R does not change the position or orientation of the non-movable part 15 of the assembly with the measuring bodies M1 to M5 attached thereto.
  • the rotation axis R preferably crosses a fixed point of the bearing 120.
  • the sensors and the associated measuring bodies of the arrangement are arranged according to the second aspect of the invention such that, on the one hand, the change in the orientation of the stylus 122 due to the rotation about the axis of rotation R (or the rotational position about the axis of rotation R) can be determined from the sensor signals, as well as the
  • the measuring bodies associated sensor may also occur in other cases in which only the relative position of first and second part of the arrangement to be measured, but no additional mobility of a stylus or another button.
  • the measuring bodies M1 to M5 may be magnets and the sensor S1 may be a magnetic sensor, e.g. a magnetoresistive sensor or a Hall sensor.
  • the measurement signal of the sensor s1 can be recorded continuously and / or repeatedly. From this it is possible to determine the angle of rotation covered with respect to the axis of rotation R or at least one component of the angle of rotation, since the measuring signal changes in a characteristic manner when moving the sensor s1 along the different measuring bodies M1 to M5, in particular the magnetic field at the location of the sensor s1 cyclically stronger and becomes weaker.
  • the sensor s1 When deflecting the stylus 122, the sensor s1 again moves relative to at least one associated measuring body, wherein the relative movement of the sensor s1 relative to the measuring body is generally different than during a rotational movement of the stylus 122 about the rotation axis R.
  • Fig. 20 is merely illustrative of the principle. Variants are therefore possible. For example, it need not be a stylus, but may be another button for mechanical probing a workpiece provided. Also, other possibilities of movement of the button may be given, for. B. only a linear
  • Movement capability or the button may have two or more rotational degrees of freedom of movement. An additional linear movement possibility can be given. These multiple degrees of freedom of movement may be partial or all be measurable with the measuring system, at least in partial areas of the total possible relative positions.
  • Fig. 21 shows an exploded view of an embodiment for the use of sensors for both the measurement of the deflection of a probe when probing a workpiece and for the determination of the position and / or
  • the probe also called measuring head
  • the probe and thus the probe may have different and / or additional degrees of freedom of movement, i. the probe can be moved in particular before touching a workpiece by the button according to the degrees of freedom of movement.
  • Coordinate measuring device or relative to another part of a coordinate measuring machine on which the probe is arranged This arm or part of the CMM may in turn be movable relative to a base of the CMM.
  • the probe may be attached to a quill of the CMM and be movable relative to the quill.
  • a probe 130 is e.g. via a support plate 141 (or via another fastening and support member) rotatably connected to a quill 142 (or with another turn movable part) of a CMM.
  • the support plate 141 by means of through holes 148a, 148b in the support plate 141 and by means of bores 149a, 149b in the sleeve 142 and fastening means not shown in detail (e.g.
  • Fixing screws may be fixed to the sleeve 142.
  • Carrier plate 141 and other fastening means not described in detail e.g.
  • the axis of rotation R extends in the horizontal direction. This direction may in particular run parallel to the X-axis of a Cartesian coordinate system or with this coordinate axis
  • the drive motor 135 may be e.g. be a stepper motor, which is controllable such that the probe 130 can be brought into certain predetermined rotational positions with respect to the axis of rotation R and relative to the support plate 141. However, to bring the probe 130 in these predetermined rotational positions, another drive can be used. In particular, the rotational movement of the
  • Probe be carried out manually. In this case, however, it is preferred that the respective set rotational position be adjusted by corresponding means (e.g.
  • Clamping device can be secured so that it remains in the rotational position, even if external forces act, e.g. when probing a workpiece 140 are transmitted to the rotary mechanism via the attached to the probe 130 button 132.
  • Fig. 21 shows the attached below the probe 130 button 132, which is designed as a pin-shaped probe with a designed as Tastkugel 133 probe element.
  • the button 132 can be removably attached to the probe 130.
  • the stylus 132 or other stylus is attached to the probe 130, the stylus 132 may be deflected from the neutral position shown by solid bars in FIG. 21, particularly when the workpiece 140 is being touched. The deflection is indicated by a small arrow pointing to the left, which is designated by the reference symbol s. Due to the deflection from the neutral position, the button performs a movement relative to the probe 130.
  • the pushbutton is connected to at least one sensor and / or one measuring body of a measuring system.
  • Embodiment five sensors s1 to s5 are connected to a rod 134 of the probe 130, wherein the rod 134 is fixedly connected to the button 132, so that upon deflection of the button 132 and the rod with the sensors is deflected from a neutral position.
  • the deflection of the button 132 corresponding position is with shown dashed lines. Due to the fixed connection of bar 134 and button 132 and the deflected from the neutral position position of the rod 134 is shown. For better visibility, however, are attached to the rod 134
  • the sensors are moved together with the rod 134 and the probe 130 not only on deflection of the probe 132 relative to the support plate 141, but also in a driven by the drive motor 135 or otherwise rotational movement of the probe 130th
  • two sensors s2, s3; s4, s5 arranged at the same distance from the axis of rotation R or in other words at the same axial position in the longitudinal direction of the rod 134. Furthermore, the sensors s1, s2; s3, s4 located at the same axial position, each designed to determine the position of another linear degree of freedom of movement. As shown in particular in the plan view of FIG. 24 for the sensors s4, s5, the sensors are at 90 ° with respect to the longitudinal axis of the rod 134
  • the associated measuring body M of the sensors s4, s5 are aligned at 90 ° to each other angled.
  • the sensors s1 to s5 are in each of the predetermined rotational positions according to the embodiment between two magnets of a magnetic pair and are configured to measure the magnetic field strength.
  • the magnetic field strength varies along an imaginary connecting line of the magnets of the magnetic field pair and can therefore be determined based on the magnetic field strength measured by the sensor, the position on the imaginary connecting line of the two magnets of the magnetic pair.
  • the sensors and magnet pairs may be designed so that the sensor has a
  • FIGS. 21 to 24 The magnets which are assigned to the sensors as measuring bodies are shown in FIGS. 21 to 24 respectively by the capital letter M, followed by the digit of the sensor (1 to 5) and in turn followed by the digit of the predetermined rotational position (in FIGS. 21 to 24 respectively by the capital letter M, followed by the digit of the sensor (1 to 5) and in turn followed by the digit of the predetermined rotational position (in FIGS. 21 to 24).
  • Embodiment 1 to 3 At three rotational positions and five sensors are Therefore, as shown in FIG. 22, fifteen pairs of magnets are provided.
  • the position of the rod 134 shown in FIG. 22 is the first predetermined rotational position, which also corresponds to the positions shown in FIGS. 21, 23 and 24.
  • At the second predetermined rotational position At the second predetermined rotational position
  • the longitudinal axis of the rod 134 in the plan view of FIG. 22 would be rotated by 45 ° about the axis of rotation R in the clockwise direction.
  • the longitudinal axis of the rod 134 In the third predetermined rotational position, the longitudinal axis of the rod 134 would run in a clockwise direction by 90 ° relative to the position shown about the axis of rotation R. Of course they are
  • Rotary positions over a larger angular range than 90 ° may be present. It is also possible that measuring body and sensors for at least a part of
  • Measuring body / sensor combinations are reversed.
  • the sensors could be attached to the support plate 141 and the gauges (e.g., magnet pairs) to the support rod 134.
  • the s1 is designed to measure the exact position of the rod 134 and thus of the probe 132 in the direction of the longitudinal axis of the rod in the predetermined rotational positions.
  • the fourth sensor s4 is able to be in the given position
  • the sensor s5 is able to measure in the predetermined rotational positions, the exact position with respect to a direction of movement, which also extends in the plane which intersects the longitudinal axis of the rod 134.
  • the plane extends in particular perpendicular to the longitudinal axis of the rod, if small deviations from this ideal course of the plane due to manufacturing tolerances and inaccurate reproduction of the predetermined rotational position is disregarded. Such deviations can be taken into account by calibration, eg. B. be corrected. Due to the measuring system with the measuring bodies M and the sensors s1 to s5 but just these deviations can be determined.
  • the sensors s2, s3 are able to determine the exact position of the rod 134 with respect to two further directions which are parallel to the directions with respect to which the sensors s4, s5 determine the exact position of the rod.
  • the measuring directions of the sensors s2, s3 are in a common plane which intersects the longitudinal axis of the rod 134 at another axial position of the rod and runs parallel to the plane of the measuring directions of the sensors s4, s5.
  • the sensors s1 to s5 are therefore able to determine the exact position of the rod 134 and thus of the probe 132 with respect to five degrees of freedom of movement.
  • the remaining sixth degree of freedom of the movement (the button 132 with respect to the sleeve 142) can be neglected or does not change during operation of the coordinate measuring machine.
  • the exact position of the probe and thus in particular the center of the probe ball 133 of the probe relative to the quill or relative be determined to another reference point.
  • the sensors In the side view of FIG. 23, for the sake of simplicity of illustration, only one of the sensors, namely sensor s4, can be seen.
  • the probe 130 with the rod 134 is in the first predetermined rotational position, which is also shown in Fig. 22. Therefore, the sensor s4 is disposed between the magnets M4a and M4b.
  • FIG. 24 shows two dashed lines running in the plane of the figure from top to bottom, which mark the edges of the area in which a sensor lies between the two
  • Magnet pairs M41, M51 can be moved through. Further, the distance of the magnet pairs is chosen so large that the sensors s1 to s5 on deflection of the probe 132 (as shown in Fig. 21) do not abut on one of the magnets.
  • FIGS. 25 and 26 show a variant of that shown in FIGS. 21 to 24
  • Embodiment Like reference numerals designate the same or functionally identical elements. There are the following differences of the embodiments: In a through hole 147 of the support plate 141 is a bearing 145, which allows a rotational movement of the drive shaft 136 of the drive motor 135, ie the drive shaft 136 rotatably supports.
  • the bearing 145 is designed so that run-out errors and concentricity errors are negligibly small.
  • rolling bearings Eg ball bearings or cylindrical or conical bearing elements containing bearing
  • Probe 130 from the support plate 141 or from another with the quill 142 firmly connected part are measured.
  • this distance measurement should be performed in a direction which is approximately parallel to the axis of rotation at the greatest possible distance from the axis of rotation R.
  • Fig. 25 and Fig. 26 is schematically indicated by a circle with an inclined arrow and another arrow extending in the distance measuring direction that a corresponding distance sensor is provided.
  • the distance sensor may be a capacitive sensor.
  • other sensor types or measuring systems come into question.
  • Tumbling motion also changes the position of the stylus ball 133 of the stylus in a direction parallel to the axis of rotation R.
  • FIG. 26 shows that a movement of the stylus ball 133 in the same direction parallel to the axis of rotation R can also take place when a workpiece 150 is engaged.
  • a circular, enlarged area can be seen that the Tastkugel 133 is no longer in the neutral position due to the presence of the workpiece 150, but was deflected by the amount s.
  • Deflection can in turn be measured by the distance measurement between the rod 134 and the carrier plate 141.
  • FIGS. 25 and 26 also show that a reference point P can be selected, for example, at the lower end of quill 142. It is indicated that for this point P a Cartesian coordinate system X, Y, Z can be defined, the X-axis being parallel to the axis of rotation R and the longitudinal axis of the rod 134 being parallel to the Z-axis.
  • the probe and the associated rod 134 of the probe 130 are rotatably mounted at a point L, at which the longitudinal axis of the rod 134 intersects with the axis of rotation R, to the deflection of the probe when the workpiece 150 to enable.
  • An axis perpendicular to the plane of the figure through this point L runs parallel to the Y direction of the Cartesian coordinate system at point P.
  • Embodiments as shown in FIG. 25 and FIG. 26 are valid.
  • the correction is based on the following assumptions:
  • the axis of rotation has negligible axial and concentricity errors.
  • the axis of rotation can be fixed in its rotational position after a rotational movement, e.g. be clamped, or has a design due to a self-locking (for example, by the drive motor).
  • This storage at point L can e.g. can be achieved via a spring parallelogram, as is the case with conventional probes.
  • the measured value u changes starting with the touch of the workpiece by the probe element of the probe, and continuously with increasing deflection of the probe from its neutral position. It is known that By calibration for different deflections of the probe from its neutral position, a transfer function or a transfer matrix can be determined which, when a workpiece to be measured is touched, allows the measured value u to calculate the coordinates of the touched point on the workpiece surface.
  • the transfer function is referred to below as f K (u).
  • positions or measured values u in the X-direction can occur in a corresponding manner and can also in this case a transfer function or transmission matrix can be determined by calibration.
  • this function contains in particular a correction on account of the deformation of the probe head and its components occurring when the workpiece is being touched.
  • the probe is movable relative to the reference point P and, in particular in the embodiment of FIGS. 25 and 26, is rotatable about the axis of rotation R.
  • the calibration must therefore be appropriate
  • P is the location vector of the reference point which can be set to zero when the reference point is at the origin of the considered coordinate system
  • t is the vector leading from the reference point P to the probe element, in particular to the center of the probe ball 133
  • f K (FIG. u) the mentioned transfer function
  • a first measurement signal u T i results (as shown, for example, in FIG. 25).
  • This measurement signal or the corresponding measured value which is related to the X-axis, can be considered as the neutral position of the calibration.
  • the parameters for the correction function and at the same time the vector t can be determined without further rotation of the probe head.
  • a transfer function f K for other rotational positions of the probe can in each case the difference of the measured value u then measured to the corresponding measured value u T i in the other allowable rotational positions of the probe
  • Neutral position can be used.
  • Measured value u to the measured value u T i in the neutral position is another parameter of the calibration available, which under the assumptions made above the
  • the vector t can be related to the wobble point, ie to the point on the rotation axis R, which does not change due to a wobbling motion. In the case of FIGS. 25 and 26, this is the center of the pivot bearing 145.
  • Rotary movement to another rotational position of the probe is due to the wobbling movement in general results in another measured value u and thus another
  • the wobble error may be due to its own
  • u - u T is the difference of the measured value from the measured value for the neutral position.
  • the wobble angle r y can be used to determine a corresponding rotation matrix in equation (5) given above, where d denotes the distance of the wobble point from the bearing point L (see FIG. 25).
  • the rotation matrix has been referred to above as D A.
  • the correction function p: p P + c A + D A (t A + f K (u - u T i))
  • the rotation matrix D A for the correction of the wobble error acts on the sum of the vector t A and the calibration function f K with respect to a difference of the respective measurement signal or measured value to the measured value of the neutral position in the first rotational position.
  • the corresponding shift of the bearing point L can be additionally taken into account in the equation.
  • Embodiment of the rod 134) can determine. This concept can be transferred to other applications.
  • the sensors and / or measuring bodies need not be used both for the exact determination of the carrier or the parts connected thereto and for the determination of a displacement of a probe when a workpiece is being probed.
  • the sensors and / or measuring bodies need not be used both for the exact determination of the carrier or the parts connected thereto and for the determination of a displacement of a probe when a workpiece is being probed.
  • a rotatable holder or support of a workpiece may have discrete, predetermined rotational positions and may be the exact one
  • Rotational position e.g. may vary due to the load of the rotating device through the workpiece or which may vary due to other influences, with the aid of
  • Measuring system to be measured and corrected.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)

Abstract

L'invention concerne un système destiné à la mesure de coordonnées d'une pièce et/ou au traitement de ladite pièce, ledit système comportant une première partie (1) et une deuxième partie (3) qui est mobile par rapport à la première partie (1), la mobilité relative des parties (1, 3) s'ajoutant le cas échéant à celle d'un palpeur qui est fixé audit système de manière optionnelle et supplémentaire et dont la mobilité est sollicitée lors d'un palpage mécanique d'une pièce permettant de mesurer les coordonnées en déplaçant ledit palpeur depuis une position neutre, un corps de mesure (K1, K2) étant disposé sur la première ou deuxième (3) partie et au moins un capteur (s1...s5) étant disposé sur l'autre partie, c'est-à-dire sur la deuxième ou première (1) partie, le capteur (s1...s5) étant conçu pour générer un signal de mesure correspondant à une position du corps de mesure (K1, K2) et, par conséquent, à la position relative des première (1) et deuxième (3) parties.
EP11743041.3A 2011-07-08 2011-07-08 Correction et/ou prévention d'erreurs lors de la mesure de coordonnées d'une pièce Withdrawn EP2729763A1 (fr)

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US10429178B2 (en) 2019-10-01
CN107255462B (zh) 2019-07-23
CN103782130A (zh) 2014-05-07
WO2013007285A1 (fr) 2013-01-17
CN107255462A (zh) 2017-10-17
US20170234681A1 (en) 2017-08-17
CN103782130B (zh) 2017-06-20
US20140167745A1 (en) 2014-06-19

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