EP2706237A2 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP2706237A2
EP2706237A2 EP13175496.2A EP13175496A EP2706237A2 EP 2706237 A2 EP2706237 A2 EP 2706237A2 EP 13175496 A EP13175496 A EP 13175496A EP 2706237 A2 EP2706237 A2 EP 2706237A2
Authority
EP
European Patent Office
Prior art keywords
rotor
shaft
rotor shaft
vacuum pump
pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP13175496.2A
Other languages
German (de)
English (en)
Other versions
EP2706237A3 (fr
EP2706237B1 (fr
Inventor
Robert Watz
Bernhard Tatzber
Herbert Stammler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2706237A2 publication Critical patent/EP2706237A2/fr
Publication of EP2706237A3 publication Critical patent/EP2706237A3/fr
Application granted granted Critical
Publication of EP2706237B1 publication Critical patent/EP2706237B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/263—Rotors specially for elastic fluids mounting fan or blower rotors on shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/266—Rotors specially for elastic fluids mounting compressor rotors on shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/30—Retaining components in desired mutual position
    • F05D2260/36—Retaining components in desired mutual position by a form fit connection, e.g. by interlocking

Definitions

  • the invention relates to a vacuum pump.
  • a vacuum pump for example a turbomolecular pump with a rotor having pump-active rotating components, and which is arranged on a rotor shaft.
  • These rotating pump-active components face stationary pump-active components, the so-called stator.
  • a rotation of the rotor is according to the prior art ( WO 2012/077411 A1 ) avoided.
  • this prior art it is known to provide a positive connection in which the rotor is to be fastened with a plurality of screws on the end face of the rotor shaft.
  • a rotation of the rotor and thus a release of the rotor is avoided by the shaft.
  • this belonging to the prior art embodiment has the disadvantage that the assembly is relatively complex and that, since several high-quality components are required in the form of screws, the pump is more expensive.
  • the technical problem underlying the invention is to provide a vacuum pump in which the disadvantages mentioned do not occur.
  • the vacuum pump according to the invention with at least one gas inlet opening and at least one gas outlet opening, wherein the vacuum pump has at least one rotor shaft on which at least one rotor with rotating pump-active components facing stationary pump-active components is fastened with at least one fastening element arranged centrally in or on the rotor shaft, characterized in that the at least one Rotor and the rotor shaft in addition to the at least one fastening element have a rotation.
  • the rotation can be constructed and designed in the simplest manner, so that an inexpensive solution to avoid rotation of the rotor relative to the rotor shaft and thus a release of the at least one centrally arranged in or on the rotor shaft fastener is avoided.
  • the anti-rotation device is arranged on a centering pin of the rotor.
  • the centering pin is easily accessible anyway for the centrally arranged fastener during assembly, so that the arrangement of the rotation in the centering is useful.
  • the centering pin is arranged on the rotor shaft and engages in a bore of the rotor.
  • centering pin is arranged on the rotor, which then in turn engages in a corresponding recess of the rotor shaft.
  • a particularly preferred embodiment of the invention provides that the rotation is formed as at least one through or into the rotor shaft and through or into the rotor or through or in the rotor pin engaging pin.
  • Such a pen is very inexpensive to design.
  • no high demands are made on the pin to a precision fit, since the rotation of the rotor relative to the rotor shaft is also avoided when the pin holds the rotor shaft and the rotor with a certain play in a certain position to each other.
  • the at least one pin is arranged axially or radially. In principle, there is also the possibility that the pin is arranged obliquely radially.
  • the pin is arranged in a groove or in a bore of the centering pin of the rotor.
  • the pin engages with one end in the groove or in the bore and with its other end in a groove or bore of the rotor shaft.
  • a further advantageous embodiment of the invention provides that a friction ring is provided as anti-rotation.
  • the friction ring has a higher coefficient of friction than that achieved directly between the rotor components becomes.
  • the friction ring is arranged between the rotor and the rotor shaft, preferably between the end face of the shaft and an aligned in the direction of the end face of the shaft surface of the centering pin of the rotor. This embodiment ensures that a rotation between the rotor and the rotor shaft is avoided without having to change the rotor or the rotor shaft structurally.
  • connection or stop surface between the rotor and shaft is coated on one or both sides to increase the coefficient of friction.
  • a further advantageous embodiment of the invention provides that in a contact surface between the rotor and rotor shaft in the rotor or in the rotor shaft, at least one projection is arranged, which is formed as a projection which causes a plastic deformation in the opposing component.
  • a projection may for example be a so-called grain point.
  • This grain point is formed from the material, for example the rotor.
  • the Grain point then creates a plastic deformation in the rotor.
  • the rotor and the rotor shaft consist of different materials.
  • the grain point is then introduced into the material, which has the higher strength, ie a higher yield strength R e . In this case, the at least one grain point presses into the softer counter material.
  • a further advantageous embodiment of the invention provides that in the rotor shaft or in the rotor in the radial direction a projection is arranged and that in the rotor or in the rotor shaft, a projection receiving the form-fitting recess is arranged.
  • a further advantageous embodiment of the invention provides that in the rotor shaft or the rotor in the radial direction a projection is arranged, and that in the rotor or the rotor shaft, a projection receiving the form-fitting recess is arranged.
  • a projection is arranged in the rotor shaft or the rotor in the radial direction
  • a projection receiving the form-fitting recess is arranged in this embodiment.
  • Fig. 1 shows a turbomolecular pump.
  • a shaft 232 In a housing part 260, a shaft 232, surrounding a backup bearing 295, a radial bearing coil 291, a radial sensor 293 and a motor coil 261 are arranged.
  • the motor coil 261 cooperates with the motor magnet 262 located on the shaft 232 and secured by a sleeve 263, so that when the motor coil 261 is energized, the shaft 232 is set in rapid rotation.
  • the radial sensor 293 cooperates with the shaft-side radial target target 294.
  • the turbomolecular pump facing the fore-vacuum has a Holweckstator 228, in which run helical channels, which cooperate with the sleeve 227 arranged on the rotor and together form a Holweckcut 226.
  • stator disks 212, 216, 220 and 224 provided with blade rings which are axially spaced by spacer rings 213, 217, 221 and 225 arranged between them.
  • the pump structures formed as rotor blade rings 211, 215, 219 and 223 are immersed.
  • Dormant and rotor-side pump structures interact in pairs.
  • the rotor blade ring 211 together with the stator disk 212 together form the pumping stage 210 facing the chamber and working in a high vacuum.
  • the subsequent second pumping stage 214, stator disk 220 and rotor blade ring 219 form the third pumping stage 218 and finally the stator disk 224 and the rotor blade ring 223 the at the transfer pressure to Holweckhave operating fourth pumping stage 222.
  • the rotor blade rings are each arranged in axially spaced-apart planes 250, 251, 252 and 253, the mounting portion of the rotor sleeve forms the plane 254th
  • the rotor-side pumping structures in the form of the rotor blade rings 219 and 223 are arranged on the first rotor part 201 and form with this a one-piece body.
  • the rotor sleeve 227 is connected to the first rotor part.
  • the first rotor part has a recess 230 in its center. This axially and radially extending from the center cavity takes the backup bearing 295 at least partially.
  • the first rotor part 201 is connected to a fastening element, in the example of a screw 280 with the end face 258 of the rotor shaft 232.
  • the shaft 232 has a recess with which a pin 289 of the first rotor member 201 is engaged, whereby the radial positioning is simplified.
  • the first rotor part 201 according to the embodiment has a support portion 201a. This extends from the first rotor part 201 axially in the direction of high vacuum, ie in the direction away from the shaft 232. On this support portion, a support ring 208 is arranged, with which the rotor blade ring 211 is connected. Another support ring 209 and the rotor blade ring 215 are also connected together.
  • the support rings with rotor blade ring are inexpensive to produce.
  • balancing bores 270 are provided in the balancing weights 271 can be used.
  • balancing weights 273 272 can be arranged in balancing bores.
  • a pin 281 is provided as anti-rotation, which is arranged with one end in the rotor part 201 and with its other end in the shaft 232. Since it radially spaced from the centrally located Screw 280 is disposed, it prevents the rotation of the rotor member 201 relative to the shaft 232.
  • Fig. 2a shows the rotor shaft 232 to which by means of the screw 280, a rotor part 201 is attached.
  • the pin 281 prevents the rotation of the rotor part 201 relative to the rotor shaft 232.
  • FIG. 2b An axial bore 300 is arranged in the centering pin 289. In the shaft 232, a bore 301 is also provided. The pin 281, the in Fig. 2b is not shown, engages with its ends in the holes 300 and 301.
  • the Fig. 3a and 3b show the rotor shaft 232, in turn, the bore 301 is arranged.
  • the centering pin 289 of the rotor 201 has a groove 302 instead of the bore.
  • the pin 281 is arranged with one end in the bore 301 of the rotor shaft 232 and with its other end in the groove 302 of the centering pin 289.
  • the embodiment with the groove 302 has over the embodiment with the bore has the advantage that the groove 302 makes it possible to build a statically determined fit system without adhering to very precise tolerances.
  • the radial centering of the rotor 201 and the rotor shaft 232 is taken over by the centering pin 289. Two more holes with pin that would need to be aligned would tense this solution depending on the existing tolerances and games and adversely affect.
  • the groove 302 ensures that the pin 281 alone ensures the rotational degree of freedom and does not affect the two radial degrees of freedom which are secured by the centering pin 289.
  • the pin 281 is arranged obliquely radially in a groove 303 of the centering pin 289 of the rotor part 201 and in a radially arranged bore 304 of the shaft 232.
  • the pin 281 is securely fixed by the centrifugal force.
  • the pin 281 is radially spaced outside the region of the centering pin 289 in a bore 305 of the rotor 201.
  • the corresponding counterbore 306 is disposed in the shaft 232.
  • the bore 305 is disposed in the outer abutment surface of the shaft 232 on the rotor 201.
  • the Fig. 6a and 6b show a further embodiment.
  • the pin 281 is inserted radially into the Rotorzentrierzapfen 289 and is thus arranged in the bore 307 of the Zentrierzapfens 289.
  • the other end of the pin 281 engages in a groove 308 of the shaft 232.
  • Fig. 7a and 7b show another embodiment.
  • a friction ring 309 is disposed between the centering pin 289 and an end face 258 of the shaft 232.
  • the screw 280 By the screw 280, the rotor part 200 is pressed with the shaft 232.
  • the friction ring 309 prevents rotation of the rotor part 201 relative to the shaft 232.
  • a grain point 311 is formed on a contact surface 310 of the shaft 232.
  • the grain point 311 rests on a contact surface 312 of the rotor part 201.
  • the shaft 232 is formed of a stronger material than the rotor part 201.
  • the shaft 232 has at its end a geometrical securing 313 projecting in the axial direction, whose counterpart 314 is arranged in the rotor part 201.
  • the axially protruding geometric fuse 313 has two projections 315a, 315b disposed in corresponding recesses 316a, 316b.
  • the centering pin 289 has a radially protruding shaped projection 317 which is disposed in a groove 318 of the rotor shaft 232.
  • a stopper (not shown) is provided in the groove 318 of the rotor shaft 232 so that rotation of the rotor member 201 relative to the shaft 232 is avoided.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP13175496.2A 2012-09-10 2013-07-08 Pompe à vide Active EP2706237B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102012108394.0A DE102012108394A1 (de) 2012-09-10 2012-09-10 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2706237A2 true EP2706237A2 (fr) 2014-03-12
EP2706237A3 EP2706237A3 (fr) 2015-07-29
EP2706237B1 EP2706237B1 (fr) 2019-07-10

Family

ID=48747427

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13175496.2A Active EP2706237B1 (fr) 2012-09-10 2013-07-08 Pompe à vide

Country Status (4)

Country Link
US (1) US9453514B2 (fr)
EP (1) EP2706237B1 (fr)
JP (1) JP5706483B2 (fr)
DE (1) DE102012108394A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104019057A (zh) * 2014-05-26 2014-09-03 河南众力空分设备有限公司 一种悬臂式叶轮与传动轴的传动连接装置
IT201800007964A1 (it) * 2018-08-08 2018-11-08 Agilent Technologies Inc A Delaware Corp Pompa da vuoto rotativa e metodo per il suo bilanciamento

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6252336B2 (ja) * 2014-04-23 2017-12-27 株式会社島津製作所 真空ポンプ
US10557471B2 (en) * 2017-11-16 2020-02-11 L Dean Stansbury Turbomolecular vacuum pump for ionized matter and plasma fields
US10808712B2 (en) * 2018-03-22 2020-10-20 Raytheon Technologies Corporation Interference fit with high friction material
GB202018692D0 (en) * 2020-11-27 2021-01-13 Lm Wp Patent Holding As A mechanism for restraining movement of a locking pin

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202005019644U1 (de) 2005-12-16 2007-04-26 Leybold Vacuum Gmbh Turbomolekularpumpe
WO2012077411A1 (fr) 2010-12-10 2012-06-14 エドワーズ株式会社 Pompe à vide

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4447684B2 (ja) * 1999-01-13 2010-04-07 株式会社島津製作所 ターボ分子ポンプ
JP2006194083A (ja) * 2003-09-16 2006-07-27 Boc Edwards Kk ロータ軸と回転体との固定構造及び該固定構造を有するターボ分子ポンプ
GB2435675B (en) * 2006-03-02 2011-02-09 Boc Group Plc Rotor assembly
JP2008286179A (ja) * 2007-05-21 2008-11-27 Ebara Corp ターボ型真空ポンプ、及び該ターボ型真空ポンプを備えた半導体製造装置
CN102762869B (zh) 2010-02-16 2016-01-13 株式会社岛津制作所 真空泵
DE102010040288A1 (de) * 2010-09-06 2012-03-08 Siemens Aktiengesellschaft Rotor
JP2012127326A (ja) * 2010-12-17 2012-07-05 Shimadzu Corp 真空ポンプ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202005019644U1 (de) 2005-12-16 2007-04-26 Leybold Vacuum Gmbh Turbomolekularpumpe
WO2012077411A1 (fr) 2010-12-10 2012-06-14 エドワーズ株式会社 Pompe à vide

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104019057A (zh) * 2014-05-26 2014-09-03 河南众力空分设备有限公司 一种悬臂式叶轮与传动轴的传动连接装置
IT201800007964A1 (it) * 2018-08-08 2018-11-08 Agilent Technologies Inc A Delaware Corp Pompa da vuoto rotativa e metodo per il suo bilanciamento

Also Published As

Publication number Publication date
US20140072408A1 (en) 2014-03-13
JP5706483B2 (ja) 2015-04-22
JP2014051969A (ja) 2014-03-20
DE102012108394A1 (de) 2014-03-13
EP2706237A3 (fr) 2015-07-29
EP2706237B1 (fr) 2019-07-10
US9453514B2 (en) 2016-09-27

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