EP2549113B1 - Magnetischer Rotor sowie Rotationspumpe mit einem magnetischen Rotor - Google Patents

Magnetischer Rotor sowie Rotationspumpe mit einem magnetischen Rotor Download PDF

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Publication number
EP2549113B1
EP2549113B1 EP12174213.4A EP12174213A EP2549113B1 EP 2549113 B1 EP2549113 B1 EP 2549113B1 EP 12174213 A EP12174213 A EP 12174213A EP 2549113 B1 EP2549113 B1 EP 2549113B1
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EP
European Patent Office
Prior art keywords
rotor
permanent magnet
accordance
metal
metal jacket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP12174213.4A
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German (de)
English (en)
French (fr)
Other versions
EP2549113A2 (de
EP2549113A3 (de
Inventor
Reto Schöb
Thomas Eberle
Natale Barletta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Levitronix GmbH
Original Assignee
Levitronix GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Levitronix GmbH filed Critical Levitronix GmbH
Priority to EP12174213.4A priority Critical patent/EP2549113B1/de
Publication of EP2549113A2 publication Critical patent/EP2549113A2/de
Publication of EP2549113A3 publication Critical patent/EP2549113A3/de
Application granted granted Critical
Publication of EP2549113B1 publication Critical patent/EP2549113B1/de
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D13/00—Pumping installations or systems
    • F04D13/02—Units comprising pumps and their driving means
    • F04D13/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D13/00—Pumping installations or systems
    • F04D13/02—Units comprising pumps and their driving means
    • F04D13/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D13/0606—Canned motor pumps
    • F04D13/064—Details of the magnetic circuit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/026—Selection of particular materials especially adapted for liquid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/04—Shafts or bearings, or assemblies thereof
    • F04D29/046—Bearings
    • F04D29/048—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/18—Rotors
    • F04D29/22—Rotors specially for centrifugal pumps
    • F04D29/2205—Conventional flow pattern
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/13—Refractory metals, i.e. Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, W
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/14—Noble metals, i.e. Ag, Au, platinum group metals
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/14—Noble metals, i.e. Ag, Au, platinum group metals
    • F05D2300/143—Platinum group metals, i.e. Os, Ir, Pt, Ru, Rh, Pd
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
    • F05D2300/432—PTFE [PolyTetraFluorEthylene]

Definitions

  • the invention relates to a magnetic rotor for a rotary pump according to independent claim 1.
  • magnetically mounted rotary pumps have prevailed in the art, in which an impeller is suspended in the interior of a preferably completely closed pump housing by magnetic forces and driven by a rotating field which is generated by a stator often arranged outside the pump housing.
  • Such pumps are particularly advantageous for those applications in which the fluid to be pumped must not be contaminated, for example for conveying biological fluids such as blood or highly pure fluids such as ultrapure water.
  • the WO 2006/039747 discloses a double-sealed pump rotor for such a blood pump.
  • Such rotary pumps are suitable for pumping aggressive liquids that would destroy mechanical bearings in a short time. Therefore, such rotary pumps are particularly preferably used in the semiconductor industry, for example for conveying mechanically aggressive fluids when processing a surface of semiconductor wafers.
  • CMP chemical-mechanical polishing processes
  • a suspension commonly referred to as a slurry
  • a slurry typically consists of very fine solid particles and a liquid on a rotating wafer applied and serves there for polishing or lapping the very fine semiconductor structures.
  • Another example is the application of photoresist to the wafer, or the roughening of surfaces of computer hard disks to prevent sticking of the read / write heads by adhesion forces, for example by van der Waals forces.
  • magnetically levitated rotary pumps are preferably used in practice.
  • highly aggressive chemicals such as sulfuric acid (H 2 SO 4 ), which often have to be provided even at elevated temperatures, eg at 150 ° C to 200 ° C or even higher.
  • phosphoric acid H 3 PO 4
  • H 3 PO 4 phosphoric acid
  • H 3 PO 4 hydrochloric acid
  • HF hydrofluoric acid
  • NO 3 nitric acid
  • NH 4 F 2 ammonium fluoride
  • mixtures such as sulfuric acid and ozone (H 2 SO 4 with O 3 ), sulfuric acid with hydrogen peroxide (H 2 SO 4 with H 2 O 2 ) or, for example, sulfuric acid with hydrofluoric acid and nitric acid (H 2 SO 4 with HF and HNO 3 ) often in use.
  • fluorinated hydrocarbons very often do not form a sufficient barrier to gaseous constituents of the chemicals.
  • an encapsulation made of a fluorinated hydrocarbon has only a very limited barrier effect against ozone (O 3 ), for example in a too pumping mixture of sulfuric acid and ozone (H 2 SO 4 with O 3 ) may be contained in substantial amounts.
  • an encapsulation contains, for example, a metal
  • the acids can be used to dissolve metal ions which, as a component of the fluid to be pumped, can then have an effect on subsequent work processes. This can lead to catastrophic consequences, for example, in applications in the semiconductor industry, since the dissolved metal ions can alter the doping of the semiconductors to be treated in an uncontrolled manner even in very low concentrations in the fluid, thus rendering the semiconductor products completely unusable in the worst case.
  • a rotary pump, in particular canned motor pump which is adequately protected analogously to the inventive rotor against the aforementioned and known from the prior art harmful influences.
  • a sufficient protection against aggressive acids with gaseous components even for use at high temperatures to be created.
  • the invention thus relates to a magnetic rotor for a rotary pump, wherein the rotor for driving a fluid in a pump housing within a stator of the rotary pump is magnetically non-contact drivable and storable, and the rotor is encapsulated by means of an outer encapsulation comprising a fluorinated hydrocarbon.
  • the rotor within the encapsulation comprises a permanent magnet encased in a metal jacket, the metal jacket comprising at least one metal Group of elements consisting of tantalum, niobium, zirconium, titanium, hafnium, gold, platinum, palladium, osmium, iridium, ruthenium and rhodium.
  • the permanent magnet of the rotor of the present invention is thus doubly encapsulated:
  • An inner metal shell encloses the permanent magnet of the rotor substantially completely, more preferably, the permanent magnet is gas-tightly enclosed by the metal shell.
  • the metal shell in turn is inside an outer encapsulation of a fluorinated hydrocarbon.
  • the metal sheath may preferably be completely encased directly by the encapsulation or, depending on requirements, a further material may be provided between the metal sheath and the outer encapsulation, for example to adapt the geometry, mass or other parameters of the rotor to particular requirements.
  • the permanent magnet may also be enclosed directly by the metal sheath or there may be another material between metal sheath and permanent magnet, e.g. serves as a thermal compensation means for compensating different thermal expansions of the metal shell and / or the permanent magnet.
  • a corresponding distance in the form of a gap between the metal shell and the permanent magnet can of course also be provided.
  • the permanent magnet is at the same time, for example, against aggressive liquids such as sulfuric acid (H 2 SO 4 ), even at elevated temperatures, for example at 150 ° C to 200 ° C or even protected at higher temperatures. These are shielded from the permanent magnet by the outer fluorinated hydrocarbon encapsulation. But any existing gaseous component such as ozone, which may also be present in the aggressive liquid chemical, is effectively shielded.
  • aggressive liquids such as sulfuric acid (H 2 SO 4 )
  • the shield possibly Existing gaseous components or ionic constituents of the acid, which are not or only insufficiently retained by the outer encapsulation and diffuse through the outer encapsulation into the interior of the rotor, are prevented at the latest by the metal jacket surrounding the permanent magnet.
  • the service lives of the rotors or the service lives of plant components according to the invention with an outer layer of fluorinated hydrocarbon and an underlying second layer of a metal of the group of elements consisting of tantalum, niobium, zirconium, titanium, hafnium, gold, platinum , Palladium, osmium, iridium, ruthenium and rhodium have been significantly extended by the present invention.
  • the metal shell of the magnetic rotor consists only of at least one metal of the group of elements consisting of tantalum, niobium, zirconium, titanium, hafnium, gold, platinum, palladium, osmium, iridium, ruthenium and rhodium. In one for the practice Particularly preferred embodiment, the metal shell consists essentially only of tantalum.
  • fluorinated hydrocarbons for external encapsulation are fluorinated ethylene-propylene (FEP), ethyltetrafluoroethylene (ETFE), polytetrafluoroethylene (PTFE), perfluoroalkoxyalkane (PFA), ethylene chlorotrifluoroethylene (ECTFE), polyvinylidene fluoride (PVDF) or a combination of different fluorinated hydrocarbons.
  • FEP fluorinated ethylene-propylene
  • ETFE ethyltetrafluoroethylene
  • PTFE polytetrafluoroethylene
  • PFA perfluoroalkoxyalkane
  • ECTFE ethylene chlorotrifluoroethylene
  • PVDF polyvinylidene fluoride
  • the permanent magnet of the magnetic rotor is usually positively and / or non-positively connected to the metal shell, so that the permanent magnet in the operating state with respect to the rest of the rotor body can not move substantially. This is crucial for safe driving of the rotor, since the external magnetic drive forces naturally act on the permanent magnet of the rotor, causing the rotor to rotate for pumping the fluid.
  • the metal shell is positively and / or non-positively connected to the encapsulation, in particular to the plastic jacket.
  • a recess is particularly advantageously provided, so that the metal shell is weldable without affecting the permanent magnet, which will be explained in more detail below with reference to the drawing.
  • the thermal compensation means is simply a suitably narrow selected gap between the permanent magnet and metal shell, so that a positive and / or frictional connection between the metal shell and the permanent magnet despite the gap is still sufficiently ensured.
  • the invention further relates to a rotary pump with the inventive magnetic rotor.
  • an inner surface of a housing wall of the pump housing may be provided with a plastic barrier of the fluorinated hydrocarbon, wherein between the inner surface of the housing wall and the stator preferably provided a metal barrier, for example in the form of a pot or cylinder is, which includes at least one metal of the group of elements consisting of tantalum, niobium, zirconium, titanium, hafnium, gold, platinum, palladium, osmium, iridium, ruthenium and rhodium, so that the stator in completely analogous function as the permanent magnet in Inside of the rotor is protected against aggressive fluids to be pumped, especially against the above-mentioned acid mixtures with gaseous components optimally.
  • the metal jacket of the rotor and / or the metal barrier towards the stator, in particular of the pump housing consists in a specific embodiment only of at least one metal of the group consisting of tantalum, niobium, zirconium, titanium, hafnium, gold, platinum, palladium, osmium , Iridium, ruthenium and rhodium.
  • the fluorinated hydrocarbon particularly advantageously comprises fluorinated ethylene propylene (FEP), ethyltetrafluoroethylene (ETFE), polytetrafluoroethylene (PTFE), perfluoroalkoxyalkane (PFA), ethylene chlorotrifluoroethylene (ECTFE), or polyvinylidene fluoride (PVDF), or the encapsulation and / or the plastic barrier at the inner surface of the metal barrier to the stator consists essentially only of at least one of polytetrafluoroethylene, perfluoroalkoxyalkane, ethylene chlorotrifluoroethylene, or polyvinylidene fluoride.
  • FEP fluorinated ethylene propylene
  • ETFE ethyltetrafluoroethylene
  • PTFE polytetrafluoroethylene
  • PFA perfluoroalkoxyalkane
  • ECTFE ethylene chlorotrifluoroethylene
  • PVDF polyvinylidene fluoride
  • a drive for the rotary pump of the present invention is advantageously a per se long known bearingless motor, in principle in any embodiment in question, wherein in a particularly preferred embodiment, the stator is configured simultaneously as a bearing and drive stator, and an axial height of the rotor preferred is less than or equal to half the diameter of the rotor, so the rotor is a known so-called pancake.
  • the Fig. 1 shows in schematic representation in section a magnetic rotor 1 according to the present invention.
  • the magnetic rotor 1 according Fig. 1 for a rotary pump 2, as in a specific embodiment based on the Fig. 2 will be discussed below, is for conveying a fluid 3 in a pump housing 4 within a stator 5 of the rotary pump 2 in a conventional manner magnetically non-contact and drivable storable.
  • the rotor 1 is encapsulated by means of an outer encapsulation 6 comprising a fluorinated hydrocarbon, wherein the fluorinated hydrocarbon of the encapsulation 6 comprises, for example, polytetrafluoroethylene, perfluoroalkoxyalkane, ethylene, chlorotrifluoroethylene, or polyvinylidene fluoride.
  • an outer encapsulation 6 comprising a fluorinated hydrocarbon
  • the fluorinated hydrocarbon of the encapsulation 6 comprises, for example, polytetrafluoroethylene, perfluoroalkoxyalkane, ethylene, chlorotrifluoroethylene, or polyvinylid
  • the encapsulation 6 consists only of at least one of the aforementioned fluorinated hydrocarbons.
  • the rotor 1 comprises within the encapsulation 6 a permanent magnet 8 sheathed by the metal sheath 7, the metal sheath 7 comprising at least one metal of the group consisting of tantalum, niobium, zirconium, titanium, hafnium, gold, platinum, palladium, osmium, Iridium, ruthenium and rhodium includes.
  • the metal shell is only tantalum, except impurities.
  • the permanent magnet 8 is positively connected to the metal shell 7, wherein between the permanent magnet 8 and the metal shell 7, a recess 9 is provided in the form of a chamfer on the permanent magnet, so that the metal shell 7 could be welded without affecting the permanent magnet 8 by excessive temperatures in the manufacture of the rotor 1.
  • the metal jacket 7 preferably forms a gas-tight jacket of the permanent magnet 8, which is often ensured in practice by first placing the permanent magnet 8 inside the metal jacket 7 is and then the metal shell 7 gas-tight welded or soldered.
  • a thermal compensation means 10 which is simply a suitable narrow gap between the permanent magnet 8 and metal shell 7 and serves to compensate for different thermal expansion of the metal shell 7 and the permanent magnet 8 here.
  • the Fig. 2 finally shows schematically a section of a known rotary pump 2, which is equipped with a rotor 1 according to the present invention.
  • the rotary pump 2 comprises a pump housing 4 with an inlet 11 for supplying a fluid 3 into the pump housing 4 and an outlet 12 for discharging the fluid 3 from the pump housing 4.
  • the fluid 3 is for example a chemically aggressive acid with a proportion of a gas , for example, sulfuric acid with ozone.
  • a magnetic rotor 1 is mounted without contact magnetically in a known manner in the pump housing 4, wherein the rotor 1 is likewise known to a drive 13, which comprises electrical coils 131 and the stator as essential elements 5, in particular formed by laminated iron, which are in magnetic operative connection with the permanent magnet 8 of the rotor 1.
  • the drive is here in a special embodiment, a so-called known bearingless Motor is, in which the stator 5 is designed simultaneously as a storage and drive stator.
  • Fig. 2 is the rotor 1 to a so-called pancake, wherein preferably an axial height of the rotor 1 is less than or equal to half a diameter of the rotor 1.
  • the invention is not restricted to pancake, but is in principle applicable to all rotor types of any magnetically levitated rotary machines.
  • the rotor 1 is encapsulated by means of an outer encapsulation 6 made of a fluorinated hydrocarbon and within the encapsulation 6 of the sheathed by the metal shell 7 permanent magnet 8 is provided.
  • the metal shell 7 in this case comprises at least one metal of the group of elements consisting of tantalum, niobium, zirconium, titanium, hafnium, gold, platinum, palladium, osmium, iridium, ruthenium and rhodium.
  • a plastic barrier made of the fluorinated hydrocarbon provided on an inner surface 411 of a housing wall 41 of the pump housing 4 is provided, wherein a metal barrier in the form of a pot 400 is provided between the inner surface 411 of the housing wall 41 and the stator 5.
  • the permanent magnet 8 is as in Fig. 1 already described in detail positively and / or non-positively connected to the metal shell 7, wherein a thermal compensation means 10 is provided in the form of a narrow gap between metal shell 7 and permanent magnet 8 to compensate for different thermal expansions of the metal shell 7 and the permanent magnet.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Details And Applications Of Rotary Liquid Pumps (AREA)
  • Permanent Field Magnets Of Synchronous Machinery (AREA)
EP12174213.4A 2011-07-20 2012-06-28 Magnetischer Rotor sowie Rotationspumpe mit einem magnetischen Rotor Active EP2549113B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP12174213.4A EP2549113B1 (de) 2011-07-20 2012-06-28 Magnetischer Rotor sowie Rotationspumpe mit einem magnetischen Rotor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP11174669 2011-07-20
EP12174213.4A EP2549113B1 (de) 2011-07-20 2012-06-28 Magnetischer Rotor sowie Rotationspumpe mit einem magnetischen Rotor

Publications (3)

Publication Number Publication Date
EP2549113A2 EP2549113A2 (de) 2013-01-23
EP2549113A3 EP2549113A3 (de) 2017-07-26
EP2549113B1 true EP2549113B1 (de) 2018-10-24

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Application Number Title Priority Date Filing Date
EP12174213.4A Active EP2549113B1 (de) 2011-07-20 2012-06-28 Magnetischer Rotor sowie Rotationspumpe mit einem magnetischen Rotor

Country Status (6)

Country Link
US (1) US20130022481A1 (https=)
EP (1) EP2549113B1 (https=)
JP (1) JP2013024239A (https=)
KR (1) KR20130011940A (https=)
CN (1) CN102891553A (https=)
TW (1) TWI588370B (https=)

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EP3425204B1 (de) * 2017-07-04 2021-04-14 Levitronix GmbH Magnetisch lagerbarer rotor sowie rotationsmaschine mit einem solchen rotor
GB2565592A (en) * 2017-08-18 2019-02-20 Cooltera Ltd A cooling unit
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CN110661353A (zh) * 2019-10-18 2020-01-07 捷和电机制品(深圳)有限公司 电机转子和永磁电机
EP3865709B1 (de) * 2020-02-13 2023-11-22 Levitronix GmbH Pumpvorrichtung, einmalvorrichtung und verfahren zum betreiben einer pumpvorrichtung
US12173965B2 (en) 2020-03-23 2024-12-24 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Hybrid loop heat pipe with integrated magnetically levitating bearingless pump
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US20130022481A1 (en) 2013-01-24
EP2549113A2 (de) 2013-01-23
TW201323728A (zh) 2013-06-16
JP2013024239A (ja) 2013-02-04
CN102891553A (zh) 2013-01-23
KR20130011940A (ko) 2013-01-30
EP2549113A3 (de) 2017-07-26
TWI588370B (zh) 2017-06-21

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