EP2462636A1 - Procédé de fabrication de pièces piézoélectriques - Google Patents

Procédé de fabrication de pièces piézoélectriques

Info

Publication number
EP2462636A1
EP2462636A1 EP10724517A EP10724517A EP2462636A1 EP 2462636 A1 EP2462636 A1 EP 2462636A1 EP 10724517 A EP10724517 A EP 10724517A EP 10724517 A EP10724517 A EP 10724517A EP 2462636 A1 EP2462636 A1 EP 2462636A1
Authority
EP
European Patent Office
Prior art keywords
sub
block
workpieces
piezoelectric
blocks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10724517A
Other languages
German (de)
English (en)
Inventor
Peter Cromme
Karlheinz Fuchs
Bernhard Krapp
Jan Benes
Stefan Schneider
Helmut Sommariva
Alexander Klonczynski
Berthold Ficker
Alfred Linz
Thomas Merbecks
Robert Koellein
Hartwig Herrmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP2462636A1 publication Critical patent/EP2462636A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/085—Shaping or machining of piezoelectric or electrostrictive bodies by machining
    • H10N30/088—Shaping or machining of piezoelectric or electrostrictive bodies by machining by cutting or dicing

Definitions

  • the invention relates to a method for the production of piezoelectric workpieces, in particular piezoelectric actuators and a system for carrying out such a method.
  • the ceramic green sheet is first printed with internal electrode material and then stacked into a block and pressed, that is laminated. After this process step, there is a monolithic block in which the green sheets are no longer different from each other. During further processing, the block is then separated into individual green actuators. These individual, green actuators are then debinded and sintered and processed in the subsequent manufacturing step by the grinding process.
  • the manufacturing step grinding realizes the production of the so-called isolation zones of the actuator. These isolation zones are clearly specified in the actuator drawing.
  • the manufacturability of the isolation zone is primarily influenced by the sintering process, which primarily determines the final geometry after sintering by the thermal process. At certain points in Hubfanherdofen the sintering process causes an impermissible distortion of the actuator, which prevents reliable production of the isolation zone in the subsequent grinding process.
  • the method according to the invention with the features of claim 1 and the inventive system with the features of claim 14 have the advantage that a improved production of piezoelectric materials is possible. Specifically, there is the advantage of reducing scrap in the manufacture of piezoelectric workpieces.
  • the amount of bending of the manufactured piezoelectric workpieces can be significantly reduced.
  • the individual piezoelectric workpieces separated by a dicing method step to require no further post-processing, so that a grinding process or the like for straightening the piezoelectric workpieces can be dispensed with.
  • At least one sub-block mxn (m by n) has undivided piezoelectric workpieces arranged in m rows and n columns of the sub-block, and that n is not smaller than 2.
  • m is equal to 1 and that the sub-block lxn has undivided piezoelectric workpieces.
  • a Riegeiförmiger sub-block can be formed, wherein the width of the bolt corresponds exactly to a single green piezoelectric workpiece.
  • the block M has columns on piezoelectric workpieces and that the block is divided into sub-blocks, each having at least one row of piezoelectric workpieces.
  • the length of the latch corresponds to the length of the original block, thereby facilitating the separation of the block into sub-blocks.
  • the block has m columns of piezoelectric workpieces and that the block is divided into sub-blocks, each having at least one row of piezoelectric workpieces and that each sub-block has exactly two rows of piezoelectric workpieces. Due to the longer bar shape with a width of two individual parts and the associated wider footprint the positive effect on the curvature in the bolt longitudinal direction can also be exploited in the transverse direction transverse. Specifically, a torsion bending or other bending can be prevented. In particular, occurring in a large length of the bolt strong sintering shrinkage in bolt longitudinal direction, which leads by friction effects on the sintered substrate to deformations, in particular in the region of the bolt ends, be reduced in their effect on a bending of the bolt.
  • channels are provided between the rows and / or the columns of the undivided piezoelectric workpieces of the sub-block.
  • the channels are designed as through-holes and / or that the channels are formed at least approximately perpendicular to a longitudinal direction of the undivided piezoelectric workpieces of the sub-block.
  • recesses are provided on at least one outer side of the sub-block between the rows and / or the columns of the undivided piezoelectric workpieces. In this case, it is particularly advantageous that the on the outside of the partial blocks provided recesses in a longitudinal direction of the undivided piezoelectric workpieces of the sub-block.
  • the loss of mass occurring during sintering is an important quality criterion for the piezoelectric workpieces, in particular the actuators.
  • the material homogeneity within the actuators depending on the longitudinal and transverse directions of the sub-block and in Dependence of the position of the actuator in the sub-block deteriorated.
  • actuators have a higher lead oxide evaporation rate at the edge of the sub-block during sintering than actuators that are located in the middle of the sub-block.
  • the sub-block has an unfavorable curvature in the edge region due to the higher evaporation rate of lead oxide after the sintering process, whereby a post-processing is required and possibly a Committee occurs.
  • debinder and sintered profiles for sintering of the sub-block are to be adapted, since the binder mass and sintering rates are preferably lowered due to the higher mass of the sub-block compared to isolated piezoelectric workpieces. This will require longer process times.
  • an influence on the sintering process can advantageously be taken by the channels and / or depressions.
  • the debindered and sintered sub-blocks are divided into individual piezoelectric workpieces.
  • the dividing the debindered and sintered sub-blocks is carried out in isolated piezoelectric workpieces by at least one dicing separation process.
  • FIG. 1 shows a configured as a bolt sub-block of piezoelectric workpieces for explaining a method according to the invention according to a first embodiment
  • FIG. 2 shows the partial block shown in FIG. 1 from the viewing direction designated by II in accordance with a second exemplary embodiment of the invention
  • FIG. 3 shows a film for producing a block of piezoelectric workpieces to explain a method according to the invention according to a third embodiment
  • FIG. 4 shows a partial block with piezoelectric workpieces for explaining a method according to a fourth embodiment
  • Fig. 5 shows a further sub-block for explaining a method according to a fifth embodiment of the invention.
  • FIG. 6 shows a schematically illustrated process flow for carrying out a method according to an exemplary embodiment of the invention.
  • Fig. 1 shows a partial block 1, which serves together with other sub-blocks for the production of piezoelectric workpieces 2, according to a first embodiment of a method for producing piezoelectric workpieces 2.
  • the sub-block 1 piezoelectric workpieces 2A to 2 E on.
  • the sub-block 1 is designed here as a bolt.
  • the sub-block 1 may have mxn undivided piezoelectric workpieces 2, which are arranged in m rows and n columns of the sub-block 1.
  • a lamination of a block of a plurality of piezoelectric layers and a plurality of electrode layers arranged between the piezoelectric layers takes place first.
  • a block is divided into sub-block 1 and into further sub-blocks which correspond to sub-block 1. This division takes place in the green state of the block.
  • the sub-block 1 is then subjected to a debinding and sintering process. In this case, there is the advantage that the scattering of properties of the piezoelectric workpieces 2 is reduced.
  • the variations in the characteristics of stroke and large-signal capacitance can be significantly reduced, which is particularly advantageous for the use of the piezoelectric workpieces 2 as injectors for fuel injection valves.
  • the division of the debindered and sintered sub-block 1 into the individual piezoelectric workpieces 2 takes place by means of a separation process, for example by means of dicing. This allows the separation of the sub-block 1 in the piezoelectric workpieces 2 in the hard, sintered state.
  • a combined debindering and sintering continuous furnace with subsequent dicing separating station for carrying out the dicing separation process can advantageously be used instead of different batch debinding and sintering furnaces.
  • the use of personnel can be further reduced because the treatment of the blocks can be carried out fully automated up to the finished ground piezoelectric workpiece 2.
  • the sub-block 1 has a plurality of channels 3, which are provided between the undivided piezoelectric workpieces 2.
  • the channels 3A, 3B are provided between the workpieces 2A, 2B, and the channels 3C, 3D are provided between the workpieces 2G, 2H.
  • the channels extend from an end face 4 of the sub-block 1 to an end face 5 of the sub-block 1, which faces away from the end face 4, in a longitudinal direction 6 of the piezoelectric workpieces 2.
  • the channels 3 are designed as through-holes 3.
  • the channels 3 are formed perpendicular to the longitudinal direction 6 of the undivided piezoelectric workpieces 2 of the sub-block 1.
  • the terminal workpieces 2A, 21 on three outer surfaces, with which These adjoin the surrounding atmosphere.
  • An evaporation rate of process-relevant substances, in particular lead oxide, during the sintering process is therefore increased in relation to the piezoelectric workpieces 2 A, 2 E.
  • the remaining workpieces 2 B to 2 H adjoin only on two outer surfaces of the surrounding furnace atmosphere.
  • the evaporation rate with respect to the piezoelectric workpieces 2B to 2H is reduced.
  • a balance is created by the channels 3.
  • the evaporation of lead oxide is increased by the channels 3 and thus achieved a homogenization of the evaporation rate over the sub-block 1.
  • a curvature of the sub-block 1 in the edge region which can occur in the event of uneven evaporation, can be prevented or at least reduced.
  • the quality of the sintered piezoelectric workpieces 2 can be improved and a scrap rate can be further reduced.
  • the free surface is increased.
  • an evaporation between the undivided workpieces 2A to 21 is achieved in an advantageous manner.
  • the evaporation of lead oxide takes place uniformly in a longitudinal direction 7 and a transverse direction 8 of the sub-block 1.
  • conditions can be created that corresponds to a single sintering with separate workpieces 2.
  • the associated homogeneous loss of mass increases the quality, while a bending of the workpieces 2 at the edge of the sub-block 1 is prevented.
  • the proportion of a problematic secondary phase in the ceramic material of the workpieces 2 also decreases.
  • the proportion of workpieces 2 which have a mass loss of less than 0.85% and thus are rejected can be reduced and the yield of the product can be increased .
  • an existing procedure for the binder removal and sintering process can be maintained in an advantageous manner, since this does not have to be adapted to the larger mass of the partial block 1.
  • the process duration can be maintained and thus be relatively short.
  • it can be achieved via the channels 3 in an advantageous manner that the furnace atmosphere also within the sub-block 1 has an attack surface on the workpieces 2.
  • the course of the channels 3 can also take place in a different direction than in the transverse direction 8.
  • the channels 3 can also extend in the longitudinal direction 6 between the workpieces 2.
  • a combined configuration of channels 3 in both the longitudinal direction 6 and in the transverse direction 8 is possible.
  • the Design of the channels 3 can be done for example by drilling or water jet cutting.
  • the channels 3 can be introduced into the sub-block 1. It is also possible that the channels 3 are formed before the division of the original block in the sub-blocks 1.
  • FIG. 2 shows the partial block 1 shown in FIG. 1 from the viewing direction indicated by II when carrying out a method according to a second exemplary embodiment.
  • two recesses 11, 11 ' are provided on an outer side 10 of the sub-block 1 between the piezoelectric workpieces.
  • a recess 11 or 11 ' is provided between each two adjacent workpieces 2, wherein for simplicity of illustration only the depressions 11, 11' are marked.
  • a recess 12, 12 ' is provided, wherein only the recesses 12, 12' are marked.
  • the recesses 11, 11 ', 12, 12' are formed in the green state of the sub-block 1.
  • the recesses 11 ', 12' are located between the workpieces 2G, 2H.
  • a taper 13 in the form of a web 13 between the piezoelectric workpieces 2 G, 2 H is formed in the sub-block 1.
  • the surface of the sub-block 1 on the outer sides 10, 11 can be increased, so that an evaporation rate with respect to the workpieces 2 is increased and homogenized.
  • a curvature or bending of the sub-block 1 is prevented in the sintered state, or at least reduced.
  • the essential properties of the workpieces 2 are homogenized, so that a reject rate is reduced.
  • Fig. 3 shows a green sheet 15, which is printed with a plurality of inner electrode layers 16, 22.
  • the inner electrode layers 22A to 221 serve for the piezoelectric workpieces 2A to 21.
  • a plurality of such green sheets 15 are stacked on each other.
  • the green sheet 15 has a binder, which is selectively weakened chemically or thermally at defined locations.
  • a weakening of the lines 23, 23 'shown interrupted with only the lines 23, 23' shown interrupted are marked.
  • the chemical or thermal weakening takes place in such a way that decomposes at these points 23, 23 'when debinding the binder. In the area of the interrupted lines 23, 23 'there is then a high, open porosity.
  • a particularly advantageous method step for applying substances to form such Ausbrennkanäle can be done in a print or Jette technology. In such a print or jet technology, the substances which promote decomposition at low temperatures may be sprayed onto the green sheet 15.
  • Print or jet technology is a technology used in inkjet printers to spray ink onto paper for printing on paper.
  • an optionally reduced during sintering in sub-blocks 1 and inhomogeneous mass loss can be prevented or at least reduced and a homogeneous lead oxide evaporation rate can be achieved.
  • Fig. 4 shows a partial block 1, which is separated from a block 25, according to a fourth embodiment of the invention.
  • a sub-block 1 has 8 m rows in the transverse direction and n columns in the longitudinal direction.
  • the number m of the rows in the transverse direction 8 of the sub-block 1 is not less than 2, that is, the number m of the rows is greater than or equal to 2.
  • the number n of the columns in the longitudinal direction 7 is not less than 2, that is Number n of the columns is greater than or equal to 2.
  • the sub-block 1 is divided by suitable hard-machining steps, preferably by dicing.
  • the cutting can also be done by a water jet cutting method, laser beam cutting method, belt grinding, milling or similar methods.
  • Fig. 5 shows the partial block 1 shown in Fig. 4 according to a fifth embodiment.
  • the block 25 shown in FIG. 4 is in this case also subdivided in the longitudinal direction 7 so that sub-blocks 1 of 2 ⁇ 2 undivided piezoelectric workpieces 2 result in the green state.
  • This embodiment is an example of a sub-block 1 in which the number m of rows is equal to the number n of columns.
  • the evaporation rate for each workpiece 2 is the same.
  • the total footprint of the sub-block 1 is significantly larger than that of a single piezoelectric workpiece 2. This can prevent curvatures of the sintered piezoelectric workpieces 2.
  • FIG. 6 shows a schematically illustrated process flow for carrying out a method according to an exemplary embodiment of the invention.
  • the process flow with steps 30 to 40 is shown.
  • the process is carried out starting from step 30 and is shown up to steps 37, 38, 39 and 40.
  • further steps, not shown, may be provided which are executed before step 30, after steps 37 to 40 and / or as intermediate steps.
  • steps 30 to 40 The following keywords are assigned to steps 30 to 40: the step 30 "block construction";
  • step 32 debinding and sintering / continuous furnace
  • Steps 33 to 36 each "dicing separation process"
  • Steps 37 to 40 each "loops and the like".
  • a block structure is formed by superimposed films.
  • the block construction can be done in any size.
  • a lamination of a block 25 is made of a plurality of piezoelectric layers and a plurality of electrode layers arranged between the piezoelectric layers.
  • a block 25 is formed, as shown for example in FIG. 4 or FIG. 5.
  • the block 25 is divided into sub-blocks 1. Furthermore, the sub-blocks 1 can still be processed in a suitable manner.
  • channels 3 can be incorporated between the rows and / or the columns of the sub-block. These channels 3 can be configured here as through holes. Furthermore, the channels 3 can be formed at least approximately perpendicular to a longitudinal direction 8 of the undivided piezoelectric workpieces 2 of the sub-block 1. As a result, for example, the partial block 1 shown in FIG. 1 can be formed. Additionally or alternatively, recesses 12, 13 may be formed on at least one outer side 10, 11 of the sub-block 1 between the rows and / or the columns of the undivided piezoelectric workpieces 2.
  • the depressions 12, 13 provided on the outer side 10, 11 of the sub-block 1 can run in a longitudinal direction 6 of the undivided piezoelectric workpieces 2 of the sub-block 1.
  • the partial block 1 shown in FIG. 2 can be formed.
  • a process step can be changed compared with a conventional production.
  • a separation of the block 25 is carried out in sub-blocks 1, eliminating the separation into piezoelectric workpieces, which are still in the green state at this stage.
  • the subsequent step 32 is a thermal process step.
  • individual debindering and sintering furnaces can be replaced by a combined debindering / sintering continuous furnace.
  • the combined process step 32 in which both the binder removal and the sintering takes place when passing through the continuous furnace, such damage is prevented since a higher mechanical strength is achieved after sintering.
  • the debinding and sintering is performed not on individual workpieces, but on sub-blocks 1. As a result, inter alia, the handling is improved.
  • the thermal process step 32 is then followed by a dicing process for the respective sub-block 1, which makes it possible to separate the sub-blocks 1 in the sintered state into piezoelectric workpieces 2 (so-called stacks).
  • one or more dicing separation stations may be connected to the combined continuous furnace, which has been passed through by the partial blocks 1 in step 32.
  • the separation of the sub-blocks according to steps 33 to 36 takes place at four parallel usable dicing separation stations.
  • the first sub-block 1 can be divided in step 33. the.
  • the next sub-block 1, which comes from the continuous furnace and for which the step 32 is completed, can be subjected to the dicing separation process in step 34.
  • the next subblocks can then be split in steps 35 and 36.
  • the following fifth sub-block can in turn be edited in step 33. This makes it possible to adapt the individual processing stages to each other. In particular, a degree of utilization of the individual processing stages can be optimized.
  • a subsequent step 37 to 40 is provided for each of the steps 33 to 36, respectively.
  • steps 37 to 40 in each case a grinding and possibly a further processing of the piezoelectric formed and separated in steps 33 to 36 by dividing the sub-blocks 1 takes place
  • the thus designed process chain with the steps 30 to 40 enables a process-capable production of ceramics with piezoelectric properties, that is, piezoelectric workpieces 2.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

L'invention concerne un procédé de fabrication de pièces piézoélectriques (2), comprenant plusieurs étapes : - laminage d'un bloc (25) fait d'une pluralité de couches piézoélectriques et d'une pluralité de couches d'électrode disposées entre les couches piézoélectriques ; - sectionnement du bloc (25) en blocs élémentaires (1) ; et – élimination du liant et frittage des blocs élémentaires (1).
EP10724517A 2009-08-05 2010-06-15 Procédé de fabrication de pièces piézoélectriques Withdrawn EP2462636A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009028259A DE102009028259A1 (de) 2009-08-05 2009-08-05 Verfahren zur Herstellung von piezoelektrischen Werkstücken
PCT/EP2010/058383 WO2011015403A1 (fr) 2009-08-05 2010-06-15 Procédé de fabrication de pièces piézoélectriques

Publications (1)

Publication Number Publication Date
EP2462636A1 true EP2462636A1 (fr) 2012-06-13

Family

ID=42634936

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10724517A Withdrawn EP2462636A1 (fr) 2009-08-05 2010-06-15 Procédé de fabrication de pièces piézoélectriques

Country Status (3)

Country Link
EP (1) EP2462636A1 (fr)
DE (1) DE102009028259A1 (fr)
WO (1) WO2011015403A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011003081A1 (de) 2011-01-25 2012-07-26 Robert Bosch Gmbh Verfahren zur Herstellung von piezoelektrischen Werkstücken
DE102013111121B4 (de) * 2013-08-27 2020-03-26 Tdk Electronics Ag Verfahren zur Herstellung von keramischen Vielschichtbauelementen
DE102014112207A1 (de) * 2014-08-26 2016-03-03 Epcos Ag Verfahren zur Herstellung von keramischen Vielschichtbauelementen und keramisches Vielschichtbauelement

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008092740A2 (fr) * 2007-01-31 2008-08-07 Siemens Aktiengesellschaft Actionneur multicouche piézocéramique et procédé de fabrication associé

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19757877A1 (de) * 1997-12-24 1999-07-01 Bosch Gmbh Robert Verfahren zur Herstellung piezoelektrischer Aktoren und piezoelektrischer Aktor
DE10217097A1 (de) * 2001-04-18 2002-11-21 Denso Corp Verfahren zur Herstellung eines keramischen Laminats
JP2003124766A (ja) * 2001-10-17 2003-04-25 Murata Mfg Co Ltd 積層型圧電共振子の製造方法
JP4894143B2 (ja) * 2004-12-20 2012-03-14 株式会社デンソー セラミック積層体の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008092740A2 (fr) * 2007-01-31 2008-08-07 Siemens Aktiengesellschaft Actionneur multicouche piézocéramique et procédé de fabrication associé

Also Published As

Publication number Publication date
DE102009028259A1 (de) 2011-02-10
WO2011015403A1 (fr) 2011-02-10

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