EP2364438A1 - Verfahren und system zur analyse von feststoffteilchen in einem medium - Google Patents

Verfahren und system zur analyse von feststoffteilchen in einem medium

Info

Publication number
EP2364438A1
EP2364438A1 EP09795454A EP09795454A EP2364438A1 EP 2364438 A1 EP2364438 A1 EP 2364438A1 EP 09795454 A EP09795454 A EP 09795454A EP 09795454 A EP09795454 A EP 09795454A EP 2364438 A1 EP2364438 A1 EP 2364438A1
Authority
EP
European Patent Office
Prior art keywords
light field
solid particles
medium
light
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09795454A
Other languages
English (en)
French (fr)
Inventor
S.A. Environnement
D'orleans Universite
Jean-Baptiste Renard
Bertrand Gaubicher
Jean-Luc Mineau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Universite dOrleans
Original Assignee
Centre National de la Recherche Scientifique CNRS
Universite dOrleans
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Universite dOrleans filed Critical Centre National de la Recherche Scientifique CNRS
Publication of EP2364438A1 publication Critical patent/EP2364438A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
    • G01N21/51—Scattering, i.e. diffuse reflection within a body or fluid inside a container, e.g. in an ampoule
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging
    • G01N15/0211—Investigating a scatter or diffraction pattern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N2021/4704—Angular selective
    • G01N2021/4707—Forward scatter; Low angle scatter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N2021/4704—Angular selective
    • G01N2021/4709—Backscatter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G01N2201/0612—Laser diodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
EP09795454A 2008-11-18 2009-11-17 Verfahren und system zur analyse von feststoffteilchen in einem medium Withdrawn EP2364438A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0806447A FR2938649B1 (fr) 2008-11-18 2008-11-18 Procede et systeme d'analyse de particules solides dans un milieu
PCT/FR2009/001321 WO2010058102A1 (fr) 2008-11-18 2009-11-17 Procede et systeme d'analyse de particules solides dans un milieu

Publications (1)

Publication Number Publication Date
EP2364438A1 true EP2364438A1 (de) 2011-09-14

Family

ID=40756547

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09795454A Withdrawn EP2364438A1 (de) 2008-11-18 2009-11-17 Verfahren und system zur analyse von feststoffteilchen in einem medium

Country Status (6)

Country Link
US (1) US20110310386A1 (de)
EP (1) EP2364438A1 (de)
JP (1) JP2012509486A (de)
KR (1) KR20120013297A (de)
FR (1) FR2938649B1 (de)
WO (1) WO2010058102A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013063426A2 (en) 2011-10-26 2013-05-02 Research Triangle Institute, International Aerosol exposure monitoring
CN103364317B (zh) * 2013-07-22 2015-06-10 南通大学 检测微小颗粒大小及形状的光学系统
CN104390897B (zh) * 2013-07-22 2016-08-24 南通大学 提高了光束均匀性的检测微小颗粒大小及形状的光学系统
CN104390896B (zh) * 2013-07-22 2017-01-18 南通大学 提高了测量精度的检测微小颗粒大小及形状的光学系统
CN104458510B (zh) * 2013-07-22 2016-08-24 南通大学 提高检测准确性的检测微粒大小及形状的光学系统
DE102017001438B4 (de) * 2017-02-15 2023-04-27 Paragon Ag Partikelsensor
CN108051344A (zh) * 2017-11-23 2018-05-18 浙江工业大学 一种抛光过程中抛光液大颗粒的实时在线监测方法
EP3818354B1 (de) * 2018-07-04 2024-05-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und verfahren zur bestimmung einer aerosolabgabe
KR102103344B1 (ko) * 2019-12-03 2020-05-29 주식회사 다산에스엠 광산란 방식 미세먼지 측정시스템
KR102103333B1 (ko) * 2019-12-03 2020-04-22 주식회사 다산에스엠 광산란 방식 미세먼지 측정시스템
CN112504924B (zh) * 2020-12-21 2022-12-02 华南师范大学 一种用于动态光散射法的散射光接收系统
FR3119236B1 (fr) 2021-01-22 2023-12-22 Brgm Système de détection sur site de particules d’amiante dans des matériaux de construction

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3600094A (en) * 1968-11-12 1971-08-17 American Standard Inc Suspended solids concentration measurement using circular polarized light
US3770351A (en) * 1971-11-23 1973-11-06 Science Spectrum Optical analyzer for microparticles
GB2141553B (en) * 1983-06-14 1987-06-03 Standard Telephones Cables Ltd Scatter cells for photo sensors
CH671329A5 (de) * 1986-01-21 1989-08-31 Interzeag Ag
GB8726305D0 (en) 1987-11-10 1987-12-16 Secr Defence Portable particle analysers
DE3917571A1 (de) 1989-05-30 1990-12-06 Sick Optik Elektronik Erwin Verfahren zur messung auf intensitaet von streulicht und messvorrichtung zur durchfuehrung des verfahrens
JPH05149865A (ja) * 1991-12-01 1993-06-15 Horiba Ltd 微粒子カウンター
JPH09273987A (ja) * 1996-04-03 1997-10-21 Fuji Electric Co Ltd 液体中の微粒子の粒径、個数濃度または濁度の測定方法およびその測定装置
US5943130A (en) * 1996-10-21 1999-08-24 Insitec, Inc. In situ sensor for near wafer particle monitoring in semiconductor device manufacturing equipment
US6052184A (en) * 1996-11-13 2000-04-18 The Administrators Of The Tulane Educational Fund Miniature, submersible, versatile, light scattering probe for absolute equilibrium and non-equilibrium characterization of macromolecular and colloidal solutions
US20040004717A1 (en) * 1996-11-13 2004-01-08 Reed Wayne F. Automatic mixing and dilution methods and apparatus for online characterization of equilibrium and non-equilibrium properties of solutions containing polymers and/or colloids
JP2001330551A (ja) * 2000-05-24 2001-11-30 Shimadzu Corp 粒子測定装置
DE10036860A1 (de) * 2000-07-28 2002-02-07 Basf Ag Verfahren und Vorrichtung zur Bestimmung von physikalischen Kollektivparametern von Partikeln in Gasen
DE10136555A1 (de) 2001-07-27 2003-02-13 Boehringer Ingelheim Int Optimierte Verfahren zur Bestimmung der Aerosol-Partikelgrößenverteilung und Vorrichtung zur Durchführung derartiger Verfahren
GB2429058B (en) * 2004-03-06 2008-12-03 Michael Trainer Method and apparatus for determining the size and shape of particles
US7464581B2 (en) * 2004-03-29 2008-12-16 Tokyo Electron Limited Vacuum apparatus including a particle monitoring unit, particle monitoring method and program, and window member for use in the particle monitoring
US20070237938A1 (en) * 2006-03-31 2007-10-11 3M Innovative Properties Company Reinforced Optical Films
JP4713530B2 (ja) * 2007-03-23 2011-06-29 日本電信電話株式会社 浮遊粒子状物質測定装置
JP4713531B2 (ja) * 2007-03-26 2011-06-29 日本電信電話株式会社 浮遊粒子状物質測定装置
JP5399415B2 (ja) * 2008-02-06 2014-01-29 ビーエーエスエフ ソシエタス・ヨーロピア 多元的エアロゾル特性決定のための測定システム

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2010058102A1 *

Also Published As

Publication number Publication date
FR2938649A1 (fr) 2010-05-21
WO2010058102A1 (fr) 2010-05-27
WO2010058102A8 (fr) 2011-06-30
KR20120013297A (ko) 2012-02-14
FR2938649B1 (fr) 2012-03-30
JP2012509486A (ja) 2012-04-19
US20110310386A1 (en) 2011-12-22

Similar Documents

Publication Publication Date Title
EP2364438A1 (de) Verfahren und system zur analyse von feststoffteilchen in einem medium
EP2352984B1 (de) Durchflusszytometrieverfahren und-vorrichtung ohne hüllflüssigkeit
EP2291636B1 (de) Elektro-optische messvorrichtung und verfahren zur klassifizierung und zählung mikroskopischer elemente
FR2619923A1 (fr) Procede et appareil pour controler les composants sanguins
EP0425381A1 (de) Vorrichtung zum Zählen und zur Bestimmung mindestens einer Leukozytensubpopulation
EP0035437B1 (de) Verfahren und Vorrichtung zum Bestimmen des Durchmessers eines in einer Flüssigkeit suspendierten Teilchens unter Verwendung einer kohärenten elektromagnetischen Strahlung
FR2475224A1 (fr) Cuve, appareil et procede pour l'analyse spectroscopique d'echantillons fluides
WO2001040766A1 (fr) Dispositif de mesure, par diffraction, de tailles de particules sensiblement spheriques, notamment de gouttes opaques
EP3625549B1 (de) Sensor zur messung der partikelkonzentration in der luft
EP2356429A1 (de) Vorrichtung zur analyse eines mehrphasengemischs über einen durch das gemisch zurückgestreuten lichtstrahl
EP0654661A1 (de) Streulichtintensitätsdetektor für von Filmen in Kolloidalen Medien gestreuten Lichtes
FR2947626A1 (fr) Dispositif de mesure pour la caracterisation d'ecoulements diphasiques.
FR3066599A1 (fr) Capteur pour la mesure de la concentration de particules dans l'air
WO2021136889A1 (fr) Dispositif de detection de presence de pollens dans l'air, et procede de detection correspondant
FR3012220A1 (fr) Dispositif de mesure de la vitesse de chute de particules en suspension dans un fluide et procede de mesure a l'aide d'un tel dispositif
FR2865545A1 (fr) Lidar compact
FR3049710A1 (fr) Procede et systeme d'inspection par effet doppler laser de plaquettes pour la microelectronique ou l'optique
JP2008249363A (ja) 濁度計
CN103267744A (zh) 基于直角棱镜的浊度光学检测装置
EP0064110B1 (de) Streuungsphotometer
CN111537414A (zh) 一种液体光学腔增强测量系统
FR2859531A1 (fr) Procede et dispositif de mesure en ligne des caracteristiques d'un systeme disperse liquide-liquide ou liquide-solide contenu dans une installation principale
FR3106408A1 (fr) Dispositif électro-optique de mesures en flux
FR2535053A1 (fr) Appareil d'identification optique des proprietes multiparametriques individuelles de particules ou objets en flux continu
FR3066600A1 (fr) Capteur pour la mesure de la concentration de particules dans l'air

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20110511

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

DAX Request for extension of the european patent (deleted)
17Q First examination report despatched

Effective date: 20120906

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20140603