EP2354769B1 - Winkelgeber und Verfahren zur Bestimmung eines Winkels zwischen einer Sensoranordnung und einem Magnetfeld - Google Patents

Winkelgeber und Verfahren zur Bestimmung eines Winkels zwischen einer Sensoranordnung und einem Magnetfeld Download PDF

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Publication number
EP2354769B1
EP2354769B1 EP20100001102 EP10001102A EP2354769B1 EP 2354769 B1 EP2354769 B1 EP 2354769B1 EP 20100001102 EP20100001102 EP 20100001102 EP 10001102 A EP10001102 A EP 10001102A EP 2354769 B1 EP2354769 B1 EP 2354769B1
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EP
European Patent Office
Prior art keywords
magnetic field
sensor
axis
rotation
sensor arrangement
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EP20100001102
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German (de)
English (en)
French (fr)
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EP2354769A1 (de
Inventor
Norbert Hunger
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TDK Micronas GmbH
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TDK Micronas GmbH
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Priority to EP20100001102 priority Critical patent/EP2354769B1/de
Priority to CN 201110056016 priority patent/CN102141371B/zh
Priority to US13/019,772 priority patent/US8884611B2/en
Publication of EP2354769A1 publication Critical patent/EP2354769A1/de
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Publication of EP2354769B1 publication Critical patent/EP2354769B1/de
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields

Definitions

  • the invention relates to an angle sensor for determining an angle between a sensor arrangement and a magnetic field, with a magnetic field generating relative to a rotation axis in different rotational positions relative to the sensor array adjustable magnet, wherein the sensor arrangement comprises a first magnetic field sensor for detecting a transverse to the rotational axis oriented first magnetic field component and a second magnetic field sensor for detecting a second magnetic field component, which is arranged transversely to a plane spanned by the rotation axis and the first magnetic field component plane.
  • the invention relates to a method for determining an angle between a sensor arrangement and a magnetic field rotatable about an axis of rotation relative to the sensor arrangement, wherein the sensor arrangement provided and the magnetic field is generated, wherein with the aid of the sensor arrangement, a first measured value for a transverse to the axis of rotation oriented first magnetic field component and a second measured value for detecting a second magnetic field component arranged transversely to a plane spanned by the rotation axis and the first magnetic field component plane, and wherein the measured values are used to determine the angle between the sensor arrangement and the magnetic field.
  • angle sensor and such a method are known from WO 96/16316 known.
  • Other arrangements are in the US 2005/275 399 A1 and the WO 2007/077389 A2 disclosed.
  • the angle encoder has a magnetic disc which is rotatably mounted on a holder about a rotational axis and is arranged concentrically to the axis of rotation.
  • the magnetic disk At its periphery, the magnetic disk on magnetic poles, which are offset in the circumferential direction to each other.
  • a semiconductor chip is arranged, which is aligned with its chip plane normal to the axis of rotation and parallel to the plane of the magnetic disk.
  • the measuring axes lie in the chip plane and are offset by 90 ° to each other.
  • Magnetic field sensors are used to measure magnetic field components for the x and y components of a magnetic field location located on or adjacent to the axis of rotation located.
  • An evaluation device is integrated in the semiconductor chip, which determines the angle between the sensor arrangement and the magnetic field from the magnetic field components thus obtained with the aid of an arc tangent function and generates a corresponding angle measurement signal.
  • the angle transmitter has the disadvantage that, due to mechanical tolerances and / or tolerances in the magnetization of the magnet, a deviation between the measuring point of the sensor arrangement and the axis of rotation of the magnetic field can occur. As a result, nonlinear measurement errors can occur during the angle measurement.
  • the object of the invention is to provide an angle sensor of the type mentioned, which can be adjusted in the assembly of the sensor assembly on the magnet in a simple manner such that it allows a high accuracy of measurement.
  • the task is fen fen, a method of the type mentioned, which allows a simple way, a precise measurement of the angle between a sensor array and the magnetic field.
  • the sensor arrangement has a third magnetic field sensor for detecting a third magnetic field component oriented in the direction of the axis of rotation.
  • the third magnetic field sensor it is possible by the third magnetic field sensor to measure during assembly of the angle sensor in the direction of the axis of rotation facing component of the magnetic field and to position the sensor assembly relative to the magnetic field that during a rotational movement of the magnet or the magnetic field in Direction of the axis of rotation facing third magnetic field component is largely constant.
  • the sensor arrangement is then positioned exactly on the magnetic axis of rotation and thus symmetrical to the magnetic field.
  • the angle encoder adjusted in this way allows a high measuring accuracy
  • the sensor arrangement is integrated in a semiconductor substrate, wherein the first magnetic field sensor and the second magnetic field sensor each have at least one vertical Hall plate arranged transversely to the plane of the semiconductor substrate and the third magnetic field sensor at least one parallel plane of the semiconductor substrate or in the plane comprising the semiconductor substrate arranged horizontal Hall plate.
  • the magnetic field sensors can thereby cost-effectively integrated into the semiconductor substrate. Elaborate flux guide, which deflect the magnetic flux, are avoided.
  • centroid of the at least one vertical Hall plate of the first magnetic field sensor coincides with the centroid of the at least one vertical Hall plate of the second magnetic field sensor.
  • the first and the second magnetic field component can then be measured at the same measuring location.
  • the vertical Hall plate of the first magnetic field sensor penetrates the vertical Hall plate of the second magnetic field sensor.
  • the two Hall plates then only a relatively small chip area is needed.
  • the centroid of the horizontal Hall plate and the centroid of the vertical Hall plate of the first magnetic field sensor and / or second magnetic field sensor are superimposed.
  • the angle encoder thus enables even greater measurement accuracy.
  • the third magnetic field sensor has an analog measurement signal output for the third magnetic field component, if a temperature sensor with an analog temperature signal output is arranged on the semiconductor chip, and if the measurement signal output and the temperature signal output via a switching device optionally or alternately with an input of an analog-digital Converters are connectable.
  • the analog-to-digital converter can be used to digitize the third magnetic field component and the temperature signal.
  • a digital output of the analog-to-digital converter can be connected to a digital signal processor stage for further processing of the measurement signals. With the help of the temperature signal, the temperature dependence of the measurement signals for the magnetic field components can be compensated or mitigated.
  • the magnet is mounted rotatably about the axis of rotation by means of a bearing, relative to the sensor arrangement, wherein between the storage and the sensor arrangement, an adjusting device is arranged, by means of which the axis of rotation in the direction of the first magnetic field component and in the direction of the second magnetic field component is adjustable relative to the sensor arrangement.
  • the sensor arrangement can be easily positioned on the magnetic axis of rotation of the magnetic field during assembly of the angle sensor.
  • the adjusting device can have an additional adjusting axis, by means of which the magnet can be adjusted in the direction of the third magnetic field component relative to the sensor arrangement.
  • a fluctuation is understood in particular to be the difference between the highest and the lowest value of the measurement signal.
  • the invention is based on the finding that the third magnetic field component remains constant when the magnetic field is rotated about an axis of rotation when the third magnetic field sensor and thus the sensor arrangement are arranged on the axis of rotation. If the fluctuation occurring during the rotational movement of the third magnetic field component is outside the predetermined setpoint range or does not coincide with the predetermined setpoint, the sensor arrangement is moved as long as transverse to the axis of rotation relative to this until the fluctuation is within the setpoint range or coincides with the desired value and thus the measuring point of the sensor assembly to an allowable tolerance the axis of rotation is approximated.
  • the sensor arrangement is therefore aligned first in the first and then in the second direction relative to the magnetic axis of rotation. This allows a quick and accurate positioning of the sensor arrangement on the axis of rotation.
  • the first magnetic field component and the second magnetic field component are preferably located in a plane arranged normal to the axis of rotation and are aligned at right angles to each other.
  • the magnetic field components then correspond to the axes of a Cartesian coordinate system. This allows a simple and quick adjustment of the angle encoder.
  • the angle may be formed by forming the arctangent from the quotient of the first and second magnetic field components and / or be determined with the help of the so-called CORDIC algorithm with relatively little computational effort from the first and second magnetic field component.
  • a generally designated 1 angle sensor for determining an angle between a sensor assembly 2 and a magnetic field has to generate the magnetic field a circular disk-shaped magnet 3 on the magnet 3 is mounted by means of a bearing 4 about a mechanical axis of rotation 5 rotatable.
  • Fig. 1 it can be seen that the axis of rotation 5 coincides with the z-axis of a Cartesian coordinate system.
  • the magnet 3 is magnetized at right angles to the axis of rotation 5 and has at its periphery on a north and a south pole, which are offset with respect to the axis of rotation 5 by 180 ° to each other. Due to manufacturing tolerances, the symmetry axis of the magnetic field is laterally spaced somewhat from the axis of rotation 5.
  • magnet 3 has a plurality of pole pairs on its circumference in the circumferential direction alternate while North and South poles from each other.
  • the sensor arrangement 2 has a semiconductor chip with a semiconductor substrate 6, in which magnetic field sensors 7, 8, 9 are integrated.
  • a first magnetic field sensor 7 is sensitive to a first magnetic field component oriented in the x direction of the coordinate system.
  • a second magnetic field sensor 8 is sensitive to a second magnetic field component oriented in the y direction of the coordinate system, and a third magnetic field sensor 9 is sensitive to a third magnetic field component oriented in the z direction of the coordinate system.
  • the first and second magnetic field components are arranged at right angles to each other and at right angles to the mechanical axis of rotation 5.
  • the first magnetic field sensor 6 and the second magnetic field sensor 7 each have a vertical Hall plate on the Hall plates are rotated by 180 ° with respect to the normal to the plane of extension of the semiconductor substrate 6 to each other and penetrate the center. It is also conceivable that the vertical Hall plates are arranged one above the other in the z-direction and cross in the middle.
  • the vertical Hall plates can also open two or more plate elements, which are arranged in a plane and radially spaced from each other to the rotation axis 5.
  • the third magnetic field sensor 9 has a horizontal Hall plate disposed above the vertical Hall plates.
  • the centroid of the horizontal Hall plate is arranged on or in straight extension of the intersection of the vertical Hall plates.
  • the first magnetic field sensor 7 has a first measuring signal output, which is connected via a first analog-to-digital converter 10 to a first digital input of a signal processor 11.
  • the second magnetic field sensor 8 has a second measuring signal output, which is connected via a second analog-to-digital converter 12 to a second digital input of the signal processor 11.
  • the third magnetic field sensor 9 has a third measurement signal output, which is connected to a first input of a switching device 13. At a second input of the switching device 13, a temperature signal output of a temperature sensor integrated in the semiconductor substrate 6 is connected. An output terminal of the switching device 13 3 is connected to a third digital input of the signal processor 11. With the aid of the switching device 13, the measuring signal output of the third magnetic field sensor 9 and the temperature signal output of the temperature sensor 14 can be alternately connected to the third digital input of the signal processor 11. The selection of the corresponding input via an addressing signal that applies the signal processor 11 via an address line to an address signal input 15 of the switching device 13.
  • an adjusting device 17 is arranged, by means of which the axis of rotation 5 is adjustable relative to the sensor arrangement 2 at least in the direction of the first magnetic field component and in the direction of the second magnetic field component.
  • the sensor arrangement 2 is positioned in the magnetic field of the magnet 3 by means of a holder (not illustrated in detail) in such a way that the measuring point of the sensor arrangement 2 is at a predetermined side of the magnetic axis of rotation at a distance therefrom ( Fig. 1
  • the magnetic axis of rotation can due to mounting and / or Magnetization tolerances slightly different from the mechanical axis of rotation 5 and in particular be offset parallel to this.
  • the position of the sensor arrangement 2 is adjusted relative to the magnetic axis of rotation before carrying out the actual angle measurement. This adjustment is preferably carried out during assembly of the angle sensor 1. However, the adjustment can also be performed or repeated at a later time.
  • a first measurement signal for the third magnetic field component oriented in the direction of the rotation axis 5 is detected as a function of the rotational position in the relative position into which the sensor arrangement 2 was previously brought.
  • the magnet 3 is set in rotary motion about the rotation axis 5, while the third magnetic field component is measured and recorded.
  • the fluctuation of the first measurement signal is detected by calculating the difference between the largest and the smallest value of the measurement signal. If necessary, the first measurement signal can be filtered beforehand in order to smooth out or remove any interference contained therein.
  • the sensor arrangement 2 is moved toward the axis of rotation 5 in a first direction and brought into a further relative position.
  • a further measurement signal for the third magnetic field component as a function of the rotational position is detected for the further relative position.
  • the fluctuation is determined for the further measurement signal.
  • a fifth method step while maintaining the direction in which the sensor arrangement 2 is moved relative to the magnetic axis of rotation, the method steps two to four are repeated until the change in the fluctuation of the measuring signals changes its sign or equals zero.
  • the method steps one to five are repeated in a corresponding manner, but the sensor assembly 2 is moved in step two of a second direction to the axis of rotation, which is perpendicular to the first direction and at right angles to the axis of rotation 5. If, in method step five, the change in the fluctuation of the measuring signals changes its sign or is equal to zero, the measuring point of the sensor arrangement 2 is located on or close to the magnetic axis of rotation (FIG. Fig. 6 ).
  • the first and second magnetic field component are measured and in the signal processor, the angle between the sensor arrangement 2 and the magnetic field or the magnetic axis of rotation is determined from the digital signals for the first and the second magnetic field component with the aid of an arc tangent function. If necessary, changes in the measured magnetic field components caused by temperature fluctuations can be compensated with the aid of the temperature signal provided by the temperature sensor 14.
  • the measured angle values are in the form of an angle measurement signal output to an angle signal output 16 of the semiconductor chip.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
EP20100001102 2010-02-03 2010-02-03 Winkelgeber und Verfahren zur Bestimmung eines Winkels zwischen einer Sensoranordnung und einem Magnetfeld Active EP2354769B1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP20100001102 EP2354769B1 (de) 2010-02-03 2010-02-03 Winkelgeber und Verfahren zur Bestimmung eines Winkels zwischen einer Sensoranordnung und einem Magnetfeld
CN 201110056016 CN102141371B (zh) 2010-02-03 2011-02-01 用于确定传感器装置和磁场之间角度的角度传感器和方法
US13/019,772 US8884611B2 (en) 2010-02-03 2011-02-02 Angle sensor and method for determining an angle between a sensor system and a magnetic field

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Application Number Priority Date Filing Date Title
EP20100001102 EP2354769B1 (de) 2010-02-03 2010-02-03 Winkelgeber und Verfahren zur Bestimmung eines Winkels zwischen einer Sensoranordnung und einem Magnetfeld

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EP2354769A1 EP2354769A1 (de) 2011-08-10
EP2354769B1 true EP2354769B1 (de) 2015-04-01

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Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9018943B2 (en) 2010-12-20 2015-04-28 Joral Llc Magnetically coupled rotary magnetic encoder with angle error reduction
JP5801566B2 (ja) * 2011-02-15 2015-10-28 株式会社ミクニ 回転角度検出装置
US10155090B2 (en) 2011-10-07 2018-12-18 Novo Nordisk A/S System for determining position of an element in relation to another element using magnetic fields
DE102012202404B4 (de) * 2012-02-16 2018-04-05 Infineon Technologies Ag Drehwinkelsensor zur absoluten Drehwinkelbestimmung auch bei mehrfachen Umdrehungen
DE102012015792B4 (de) 2012-08-07 2017-03-23 Micronas Gmbh Verfahren zur Bestimmung eines Drehwinkels
JP6056482B2 (ja) 2013-01-08 2017-01-11 株式会社ジェイテクト 回転角センサの異常検出装置
DE102013021693B4 (de) * 2013-01-09 2015-12-31 Micronas Gmbh Messsystem
DE102013000431A1 (de) 2013-01-14 2014-07-17 Micronas Gmbh Schaltung und Messsystem
DE102013000430A1 (de) 2013-01-14 2014-07-17 Micronas Gmbh Messsystem
DE102013000432A1 (de) 2013-01-14 2014-07-17 Micronas Gmbh Messsystem
JP6364067B2 (ja) 2013-04-05 2018-07-25 ノボ・ノルデイスク・エー／エス 薬剤送達装置の投与記録装置
JP6306827B2 (ja) * 2013-05-16 2018-04-04 アズビル株式会社 回転角度検出器
DE102013222073A1 (de) * 2013-10-30 2015-04-30 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US9470552B2 (en) * 2014-02-06 2016-10-18 Infineon Technologies Ag Axial and perpendicular angle sensor in single package
DE102014004625A1 (de) 2014-03-31 2015-10-01 Micronas Gmbh Sensorvorrichtung
ES2597780T3 (es) * 2014-04-09 2017-01-23 Magcam Nv Dispositivos y métodos para determinar un campo magnético
DE102014005247B4 (de) * 2014-04-10 2020-12-10 Tdk-Micronas Gmbh Sensorvorrichtung
US11125768B2 (en) 2014-06-17 2021-09-21 Infineon Technologies Ag Angle based speed sensor device
DE102014110974A1 (de) 2014-08-01 2016-02-04 Micronas Gmbh Verfahren zur Unterdrückung von Streufeldeinflüssen von stromdurchflossenen Leitern auf Systeme zur Messung von Winkeln mittels X/Y Hall-Sensoren und Permanentmagneten
DE102014218544A1 (de) * 2014-09-16 2016-03-17 Schaeffler Technologies AG & Co. KG Sensorikeinheit zur Bestimmung einer Rotorlage eines Elektromotors und ein Elektromotor, vozugsweise für einen Kupplungsaktor eines Kupplungsbetätigungssystems eines Kraftfahrzeuges
DE102014116115A1 (de) * 2014-11-05 2016-05-12 Pierburg Gmbh Magnet-basiertes Messsystem zur Erfassung einer Bewegung und/oder Winkelposition eines Bauelements
US9739640B2 (en) * 2016-01-15 2017-08-22 Infineon Technologies Ag Rotation angle sensor system and method
US10215593B2 (en) * 2016-03-24 2019-02-26 Infineon Technologies Ag Magnetic sensor
US20170275930A1 (en) * 2016-03-25 2017-09-28 Tesla Motors, Inc. Angle-detecting door handle assembly
DE102016118390B4 (de) 2016-09-28 2024-01-18 Infineon Technologies Ag Magnetische Winkelsensorvorrichtung und Betriebsverfahren
DE102016124948B4 (de) * 2016-12-20 2019-05-29 Infineon Technologies Ag Magnetische Winkelsensorvorrichtung und Betriebsverfahren
DE102018117459A1 (de) * 2017-07-20 2019-01-24 Infineon Technologies Ag Sensorvorrichtung, System und Winkelerfassungsverfahren
JP2019131176A (ja) * 2018-01-31 2019-08-08 ボーンズ・インコーポレーテッドＢｏｕｒｎｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ スロット付磁石を有する車両
US11162815B2 (en) * 2018-09-14 2021-11-02 Allegro Microsystems, Llc Angular magnetic field sensor and rotating target with stray field immunity
EP4184122A1 (en) * 2018-11-13 2023-05-24 Ratier-Figeac SAS Magnetic angular position sensor
CN111219754B (zh) * 2018-11-23 2021-07-23 宁波方太厨具有限公司 一种智能升降吸油烟机
US10829201B2 (en) * 2019-03-20 2020-11-10 Pratt & Whitney Canada Corp. Blade angle position feedback system with extended markers
JP7295686B2 (ja) * 2019-03-29 2023-06-21 ミネベアミツミ株式会社 アブソリュートエンコーダ
DE102019005876A1 (de) * 2019-08-22 2021-02-25 Tdk-Micronas Gmbh Integrierte Drehwinkelbestimmungssensoreinheit in einem Messsystem zur Drehwinkelbestimmung
DE102019006138B3 (de) * 2019-08-30 2020-06-18 Tdk-Micronas Gmbh Integrierte Drehwinkelbestimmungssensoreinheit in einem Messsystem zur Drehwinkelbestimmung
DE102019006137A1 (de) * 2019-08-30 2021-03-04 Tdk-Micronas Gmbh Drehwinkelmessverfahren und Drehwinkelmessschaltkreis
DE102019124371B9 (de) * 2019-09-11 2021-04-29 Infineon Technologies Ag Vorrichtung und verfahren zum ermitteln eines drehwinkels
CN112576636B (zh) * 2020-11-18 2021-11-19 潍柴动力股份有限公司 弹性联轴器及具有其的发动机
EP4095491B1 (en) * 2021-05-27 2023-06-28 Melexis Technologies SA Magnetic position sensor system, method and device with error detection
US20240111004A1 (en) * 2022-10-03 2024-04-04 Panda Hardware LLC Hall effect sensor assembly for use with game controller joysticks

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2188430B (en) * 1986-03-19 1990-01-17 Honda Motor Co Ltd Angle-of-rotation sensor
US5532681A (en) * 1993-05-26 1996-07-02 Bodysonics, Inc. Protection device for power frequency magnetic fields
US5633546A (en) * 1993-12-30 1997-05-27 Emerson Electric Co. Magnetic sensor for switched reluctance motor
WO1996016316A1 (de) * 1994-11-22 1996-05-30 Robert Bosch Gmbh Anordnung zur berührungslosen drehwinkelerfassung eines drehbaren elements
JP3281561B2 (ja) * 1996-12-25 2002-05-13 シャープ株式会社 モータ速度制御装置
US5946813A (en) * 1997-02-10 1999-09-07 Leica Geosystems Ag Method and device for determining correction parameters
WO1999003060A1 (en) * 1997-07-08 1999-01-21 Koninklijke Philips Electronics N.V. Input device
US6522130B1 (en) * 1998-07-20 2003-02-18 Uqm Technologies, Inc. Accurate rotor position sensor and method using magnet and sensors mounted adjacent to the magnet and motor
US6433536B1 (en) * 1998-12-31 2002-08-13 Pacsci Motion Control, Inc. Apparatus for measuring the position of a movable member
US6356076B1 (en) * 1999-07-15 2002-03-12 Optek Technology, Inc. System for outputting a plurality of signals as a collective representation of incremental movements of an object
JP4936299B2 (ja) * 2000-08-21 2012-05-23 メレクシス・テクノロジーズ・ナムローゼフェンノートシャップ 磁場方向検出センサ
DE10122277A1 (de) * 2001-05-08 2002-11-14 Faulhaber Gmbh & Co Kg Feinmec Winkelgeber
US6853953B2 (en) * 2001-08-07 2005-02-08 Tokyo Electron Limited Method for characterizing the performance of an electrostatic chuck
US8397883B2 (en) * 2001-10-25 2013-03-19 Lord Corporation Brake with field responsive material
DE10225518B4 (de) * 2002-06-10 2004-07-08 Rayonex Schwingungstechnik Gmbh Verfahren und Vorrichtung zur Steuerung und Positionsbestimmung eines Instruments oder Gerätes
JP4058378B2 (ja) * 2003-05-16 2008-03-05 Ｔｄｋ株式会社 角速度センサおよび角速度検出装置
FR2855874B1 (fr) * 2003-06-06 2005-08-05 Siemens Vdo Automotive Capteur de position angulaire absolue sur 360° d'un organe rotatif
JP2005333103A (ja) * 2004-03-30 2005-12-02 Denso Corp 縦型ホール素子およびその製造方法
JP2005351849A (ja) * 2004-06-14 2005-12-22 Denso Corp 回転角度検出装置および回転角度検出方法
JP4385911B2 (ja) * 2004-09-28 2009-12-16 株式会社デンソー 回転角度検出装置
JP3945527B2 (ja) * 2004-11-30 2007-07-18 住友電気工業株式会社 ウェハプローバ用ウェハ保持体およびそれを搭載したウェハプローバ
WO2006070826A1 (ja) * 2004-12-28 2006-07-06 Asahi Kasei Emd Corporation 磁気方式回転角センサ、および、角度情報処理装置
US7561051B1 (en) * 2005-04-20 2009-07-14 Creare Inc. Magnet locating apparatus and method of locating a magnet using such apparatus
US7536218B2 (en) * 2005-07-15 2009-05-19 Biosense Webster, Inc. Hybrid magnetic-based and impedance-based position sensing
JP3848670B1 (ja) * 2005-07-20 2006-11-22 株式会社トーメンエレクトロニクス 回転角度検出装置
JP4519750B2 (ja) * 2005-09-29 2010-08-04 株式会社日本自動車部品総合研究所 回転角度検出装置
FR2896036B1 (fr) * 2006-01-06 2008-11-07 Skf Ab Systeme de detection de position angulaire absolue par comparaison differentielle, roulement et machine tournante
JP4674578B2 (ja) * 2006-01-13 2011-04-20 株式会社デンソー 磁気センサ及び磁気検出方法
JP2007232589A (ja) * 2006-03-01 2007-09-13 Ntn Corp 回転センサ付軸受
CN101443632B (zh) * 2006-05-12 2010-10-13 株式会社安川电机 磁性编码装置
US7868610B2 (en) * 2006-06-09 2011-01-11 The Regents Of The University Of California Angular motion tracking sensor
JP2008003182A (ja) * 2006-06-21 2008-01-10 Pentax Corp ブレ量検出装置
JP2008151822A (ja) * 2006-12-14 2008-07-03 Pentax Corp 像ブレ補正装置
DE102007041230B3 (de) * 2007-08-31 2009-04-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Kalibrierbarer mehrdimensionaler magnetischer Punktsensor sowie entsprechendes Verfahren und Computerprogramm dafür
EP2117103B1 (de) * 2008-05-09 2010-07-14 Micronas GmbH Integrierte Schaltung zum Ansteuern eines Elektromotors
JP4646044B2 (ja) * 2008-06-09 2011-03-09 三菱電機株式会社 磁気検出装置
US8148977B2 (en) * 2009-01-27 2012-04-03 Applied Materials, Inc. Apparatus for characterizing a magnetic field in a magnetically enhanced substrate processing system

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CN102141371B (zh) 2013-11-06
CN102141371A (zh) 2011-08-03
EP2354769A1 (de) 2011-08-10
US20110187351A1 (en) 2011-08-04

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