EP2335329A1 - Appareil de manipulation d objets, en particulier des puces à semiconducteurs, et câble plat souple - Google Patents

Appareil de manipulation d objets, en particulier des puces à semiconducteurs, et câble plat souple

Info

Publication number
EP2335329A1
EP2335329A1 EP09782385A EP09782385A EP2335329A1 EP 2335329 A1 EP2335329 A1 EP 2335329A1 EP 09782385 A EP09782385 A EP 09782385A EP 09782385 A EP09782385 A EP 09782385A EP 2335329 A1 EP2335329 A1 EP 2335329A1
Authority
EP
European Patent Office
Prior art keywords
flexible flat
flat cable
fixation
previous
cable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09782385A
Other languages
German (de)
English (en)
Inventor
Joachim Trinks
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kulicke and Soffa Die Bonding GmbH
Original Assignee
Kulicke and Soffa Die Bonding GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kulicke and Soffa Die Bonding GmbH filed Critical Kulicke and Soffa Die Bonding GmbH
Publication of EP2335329A1 publication Critical patent/EP2335329A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R35/00—Flexible or turnable line connectors, i.e. the rotation angle being limited
    • H01R35/02—Flexible line connectors without frictional contact members
    • H01R35/025—Flexible line connectors without frictional contact members having a flexible conductor wound around a rotation axis

Definitions

  • the present invention pertains to the field of automation technology. It relates to an apparatus for manipulating objects, in particular semiconductor chips, and to a flexible flat cable, in accordance with the preamble of the independent patent claims.
  • slip rings are in general very reliable for configurations where an orientation of a rotation remains constant over a large number of revolutions, and allow for very large numbers of revolutions, they often fail after a relatively low number of cycles when used in a configuration in which a rotation direction of a ro- table part is always reversed after a cycle of a few, typically around 3 to 7 revolutions.
  • the situation becomes particularly problematic in a swivel mode, in which the rotation direction is always reversed before a full revolution of 360° is carried out.
  • Such a swivel mode is for example used in die bonders for picking chips from a semiconductor wafer by means of a pick tool and handing them over to a place tool at a location above the wafer, as described in International Application Publication No. WO 2007/118511 Al, which is hereby incorporated by reference in its entirety.
  • FIG. 1 For configurations where the rotation direction always reverses after a limited number of revolutions, a configuration as shown in Fig. 1 is often used.
  • a flexible flat cable 5 - shown from its side - is fixed to a first body section 10 of a machine by means of a first fixation 101, and fixed to a second body section 11 by means of a second fixation 111.
  • the second body part 11 is capable of rotating about a rotational axis perpendicular to the plane of Fig. 1, with the second fixation 111 located on the rotational axis.
  • an apparatus for manipulating objects comprises: a first body section comprising a first plurality of electrical terminals; a second body section comprising a second plurality of electrical terminals, and configured to swivel relative to the first body section around a swivel axis; a flexible flat cable for facilitating an electric connection between the first plurality of electrical terminals and the second plurality of electrical terminals, said flexible flat cable being configured for sustaining repeated bending around at least one bending axis; and means for fixing the flexible flat cable with the bending axis or the bending axes essentially parallel to the swivel axis, said means for fixing comprising a first fixation mounted to the first body portion, and a second fixation mounted to the second body portion.
  • a flexible flat cable having a plurality of isolated lines comprises: a first termination at a first end of said flexible cable, said first termination comprising a first number of electrical contacts, each connected to at least one isolated line; a second termination at a second end of said flexible cable, said second termination comprising a second number of electrical contacts, each connected to at least one isolated line; a first holder fixed to the flexible cable and configured to be attached to a first external fixation; and a second holder fixed to the flexible cable and configured to be attached to a second external fixation.
  • Fig. 1 shows a schematic of an apparatus according to the state of the art.
  • Fig. 2 shows a perspective view of an apparatus in accordance with an exemplary embodiment of the present invention.
  • Fig. 3 shows another perspective view of the apparatus shown in Fig. 2, with some parts removed for better visibility.
  • Fig. 4 shows a schematic of an apparatus in accordance with an exemplary embodiment of the present invention.
  • Fig. 5 shows another schematic of an apparatus in accordance with an exemplary embodiment of the present invention.
  • Fig. 6 shows a schematic of a flexible flat cable in accordance with an exemplary embodiment of the present invention.
  • Fig. 2 shows a perspective view of machine parts from a die bonder.
  • a swivel range is defined as
  • the second body section 11 may e.g. comprise a pick tool not shown in the drawing for picking dies from a wafer table.
  • a bearing unit 109 contains a bearing for the second body section 11 and a drive unit (not visible in the drawing) for swivelling said second body section 11.
  • a flexible flat cable 5 comprising a first termination 511 and a second termination 512 is fixed to first fixation 101 provided on the first body section 10 by means of a first holder 521 and to a second fixation 111 provided on the second body section 11 by means of a second holder 522.
  • a damper 108 made of foamed material is provided in a vicinity of the flexible flat cable 5 to dampen lateral movements that an upper section of the flexible flat cable 5 may exhibit in operation.
  • the first fixation 101 is mounted on a leaf spring 107 to allow for a small movement of said first fixation 101 in a direction towards the swivel axis.
  • This permits to choose a length / of the flexible flat cable between the first and second fixation 101, 111 sufficiently short so that a corresponding section of the cable forms a straight line when the second body section 11 is at an angular position ⁇ 0, which corresponds to the angular position shown in Fig. 2.
  • the first and second fixation form an essentially straight line intersected by the swivel axis, and such that length / of the flexible flat 5 cable between the first and second fixation 101, 111 runs along said straigth line.
  • / is chosen such that leaf spring 107 is under tension for angular positions ⁇ ⁇ 0, and is relaxed for angular positions with
  • a flexible tube 9 is fixed to the flexible flat cable 5 by means of clamps
  • the second body section 11 comprises a cable mounting section 110 on which the second fixation 111 is provided.
  • Two cable guiding blocks 115 are provided on the cable mounting section 110.
  • Each cable guiding block 115 has a curved surface 1151 having a curvature redius r guide that equals at least approximately a minimum bending radius r bend , mm of the flexible flat cable 5, preferably satisfying 0.9 ''bend, mm ⁇ ''guide ⁇ 1.5 r ben d, mm-
  • the minimum bending radius r ben d, mm is commonly specified by a vendor and/or manufacturer of the flexible flat cable 5.
  • the cable may be bent repeatedly without failure for a given number of bending cycles.
  • the flexible tube 9 is also guided by the guiding blocks 115 to prevent that kinks form in said flexible tube 9 as a result of the swivel movement.
  • Slits 11511 formed in the curved surfaces 1151 allow for usage of flexible tubes having a diameter larger than a thickness of the flexible flat cable 5 while permitting the guiding blocks 115 to be positioned directly adjacent to said flexible flat cable 5, thus preventing that the cable may be forced into shapes comprising bending radii smaller than r bend , mm -
  • one or more spikes or poles may also be provided for the same purpose.
  • FIG. 3 shows another perspective view of the machine parts shown in
  • a hollow axis 117 acts as support for cable mounting section 110, and also for the pick tool (not shown in Fig. 3).
  • a cable 8 having a plurality of lines extends from the cable mounting section 110 to the pick tool through the hollow axis 117.
  • the lines are preferably formed by wires, braids or strands electrically insulated with respect to one another.
  • the flexible tube 9 also extents through the hollow axis 117 to allow for the pick tool to be provided with vacuum and/or pressurized air.
  • FIG. 4 shows a schematic of an exemplary embodiment of the inventive apparatus, illustrating how angular position ⁇ and a distance d between the second fixation 522 and the swivel axis S are measured.
  • Fig. 5 shows another schematic of an exemplary embodiment of the inventive apparatus. If parameters, in particular d and /, are properly chosen, the flexible flat cable does not come into contact with the cable guiding blocks 115 as long as the second body section 11 is not swivelling, independent of the angular position ⁇ . Under such conditions, a shape assumed by the flexible flat cable 5 is governed by an equilibrium state, which in turn depends primarily on a flexibility and a weight of the flexible flat cable 5, the angular position ⁇ and an orientation of the first body section 10. Only when the second body section 11 swivels with high frequency does the flexible flat cable 5 touch the cable guiding blocks 115 at angular positions ⁇ ⁇ 0. [0019] Fig. 6 shows a flexible flat cable 5 comprising a plurality of lines 50.
  • the lines are preferably formed by wires, braids or strands electrically insulated with respect to one another.
  • a first termination 511 at a first end of said flexible cable comprises a first number N 1 of electrical contacts, each connected to at least one of the plurality of lines 50.
  • a second termination 512 at a second end of said flexible cable comprises a second number /V 2 of electrical contacts, each connected to at least one of the plurality of lines 50.
  • First and second outer lines 501 and 502 are connected to one another at the second end and are used for monitoring a state of the flexible flat cable 5.
  • outer lines of flexible flat cables are generally the first to fail, e.g. by breaking, due to fatigue after repeated bending cycles, an indication when to replace the flexible flat cable 5 may thus be obtained when a electrical circuit between contacts of the first termination 511 connected to the first outer line 501 and the second outer line 502 is interrupted.
  • N 2 ⁇ N 1 in such a configuration.

Landscapes

  • Electric Cable Arrangement Between Relatively Moving Parts (AREA)
  • Insertion, Bundling And Securing Of Wires For Electric Apparatuses (AREA)

Abstract

L'invention concerne un appareil destiné à manipuler des objets, en particulier des puces à semiconducteurs, et comportant : une première section de corps comportant une première pluralité de bornes électriques; une deuxième section de corps comportant une deuxième pluralité de bornes électriques et configurée de façon à pivoter par rapport à la première section de corps autour d’un axe de pivotement; un câble plat souple destiné à faciliter un branchement électrique entre la première pluralité de bornes électriques et la deuxième pluralité de bornes électriques, ledit câble plat souple étant configuré en vue de résister à une flexion répétée autour d’au moins un axe de flexion; et des moyens servant à fixer le câble plat souple de telle sorte que l’axe ou les axes de flexion soient essentiellement parallèles à l’axe de pivotement, lesdits moyens servant à fixer comportant une première fixation montée sur la première section de corps et une deuxième fixation montée sur la deuxième section de corps. L'invention concerne également un câble plat souple.
EP09782385A 2008-09-02 2009-08-31 Appareil de manipulation d objets, en particulier des puces à semiconducteurs, et câble plat souple Withdrawn EP2335329A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US9350308P 2008-09-02 2008-09-02
PCT/EP2009/061194 WO2010026123A1 (fr) 2008-09-02 2009-08-31 Appareil de manipulation d’objets, en particulier des puces à semiconducteurs, et câble plat souple

Publications (1)

Publication Number Publication Date
EP2335329A1 true EP2335329A1 (fr) 2011-06-22

Family

ID=41128096

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09782385A Withdrawn EP2335329A1 (fr) 2008-09-02 2009-08-31 Appareil de manipulation d objets, en particulier des puces à semiconducteurs, et câble plat souple

Country Status (3)

Country Link
EP (1) EP2335329A1 (fr)
CN (1) CN102204036A (fr)
WO (1) WO2010026123A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102412693B1 (ko) * 2016-11-09 2022-06-23 후루카와 덴키 고교 가부시키가이샤 접속 구조체 및 그 접속 구조체를 구비하는 회전 커넥터 장치

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4744763A (en) * 1986-04-15 1988-05-17 Furukawa Electric Co., Ltd. Connector device for a transmission line connecting two relatively rotating members
DE3732124A1 (de) * 1987-09-24 1989-04-13 Kabelmetal Electro Gmbh Vorrichtung zur stromuebertragung zwischen zwei relativ zueinander bewegbaren kontaktstellen
JP3100643B2 (ja) 1991-01-28 2000-10-16 株式会社東芝 スリップリング装置
US5593310A (en) * 1993-12-27 1997-01-14 Nihon Plast Co., Ltd. Cable type electric connector
JP3153741B2 (ja) * 1995-09-01 2001-04-09 矢崎総業株式会社 相対回転部材間継電装置
US6547606B1 (en) * 2001-10-10 2003-04-15 Methode Development Company Termination assembly formed by diverse angularly disposed conductors and termination method
PL1800957T3 (pl) * 2005-12-21 2009-04-30 Nexans Przyrząd do przesyłania sygnałów albo prądu między końcówkami
WO2007118511A1 (fr) 2006-04-12 2007-10-25 Alphasem Gmbh Procédé et dispositif de mise en place de composants électroniques, en particulier de puces à semi-conducteur sur un substrat

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2010026123A1 *

Also Published As

Publication number Publication date
WO2010026123A1 (fr) 2010-03-11
CN102204036A (zh) 2011-09-28

Similar Documents

Publication Publication Date Title
EP2312590A1 (fr) Faisceau de fils
EP1864621A1 (fr) Outil de traitement pour endoscope
US10611038B2 (en) Cable-management system, a rotary joint and a robot
CN104275707A (zh) 机器人用驱动线缆的处理构造体和机器人装置
US7719158B2 (en) Slip-ring brush and slip-ring unit equipped with such a slip-ring brush
CA2570309A1 (fr) Technique et procede de contact electrique pour la fabrication de bagues collectrices a large diametre
JP5606812B2 (ja) 内視鏡用ガイドチューブ
CN104723357B (zh) 机器人臂及包括该机器人臂的机器人
JP5151514B2 (ja) 線条体案内機構を備えた産業用ロボット
US20160089778A1 (en) Robot
JP4001224B2 (ja) アーク溶接ケーブル
JP2007212458A (ja) 電気接触装置ならびに電気接触方法
JP5709813B2 (ja) ケーブル類保護案内装置
US20200037851A1 (en) Endoscope and stiffness varying method
JP2013182716A (ja) 断線検知機能付ケーブル
CN208922792U (zh) 扭绞设备
WO2010026123A1 (fr) Appareil de manipulation d’objets, en particulier des puces à semiconducteurs, et câble plat souple
JP5358048B2 (ja) 自立型ケーブル
WO2009125894A1 (fr) Appareil pour inspecter l’intérieur d’un tuyau
CN100415070C (zh) 元件安装机的配线配管装置
JP6539233B2 (ja) 旋回機構及び位置決め装置
US20240116195A1 (en) Bending structure and conductive device
CN215811229U (zh) 一种无刷电机振动测试机构
CN108364728A (zh) 用于一对电气式或光学式的导线的夹钳和导线夹持器
JP5295659B2 (ja) ワイヤハーネス製造治具及びワイヤハーネスの製造方法

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20110404

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

AX Request for extension of the european patent

Extension state: AL BA RS

DAX Request for extension of the european patent (deleted)
17Q First examination report despatched

Effective date: 20120213

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20120626