EP2320281A3 - Procédé de réalisation de pièces micromécaniques - Google Patents

Procédé de réalisation de pièces micromécaniques Download PDF

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Publication number
EP2320281A3
EP2320281A3 EP10189691A EP10189691A EP2320281A3 EP 2320281 A3 EP2320281 A3 EP 2320281A3 EP 10189691 A EP10189691 A EP 10189691A EP 10189691 A EP10189691 A EP 10189691A EP 2320281 A3 EP2320281 A3 EP 2320281A3
Authority
EP
European Patent Office
Prior art keywords
wafer
glass
micromechanical parts
coefficient
manufacturing micromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10189691A
Other languages
German (de)
English (en)
Other versions
EP2320281B1 (fr
EP2320281A2 (fr
Inventor
Marc-Alexandre Dubois
Jacek Baborowski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cartier Creation Studio SA
Original Assignee
Cartier Creation Studio SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cartier Creation Studio SA filed Critical Cartier Creation Studio SA
Publication of EP2320281A2 publication Critical patent/EP2320281A2/fr
Publication of EP2320281A3 publication Critical patent/EP2320281A3/fr
Application granted granted Critical
Publication of EP2320281B1 publication Critical patent/EP2320281B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00—Mechanisms for stabilising frequency
    • G04B17/04—Oscillators acting by spring tension
    • G04B17/06—Oscillators with hairsprings, e.g. balance
    • G04B17/066—Manufacture of the spiral spring
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00—Mechanisms for stabilising frequency
    • G04B17/04—Oscillators acting by spring tension
    • G04B17/06—Oscillators with hairsprings, e.g. balance
    • G04B17/063—Balance construction
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B29/00—Frameworks
    • G04B29/02—Plates; Bridges; Cocks
    • G04B29/027—Materials and manufacturing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Metallurgy (AREA)
  • Micromachines (AREA)

Abstract

La présente invention concerne un procédé de réalisation d'au moins une pièce micromécanique en verre , comprenant les étapes suivantes :
- se doter d'un premier wafer de verre (10) présentant un coefficient de dilatation thermique inférieur à 5 x 10-6K-1,
- soudure d'un deuxième wafer de verre (14) présentant un coefficient de dilatation thermique inférieur à 5 x 10-6K-1, au premier wafer, par l'intermédiaire d'une couche d'accroche, ladite pièce étant destinée à être réalisée dans ledit deuxième wafer,
- croissance d'un masque métallique (16) sur le deuxième wafer,
- gravure traversante du deuxième wafer à travers le masque métallique, et
- libération de la pièce en dissolvant la couche d'accroche.
EP10189691.8A 2009-11-10 2010-11-02 Procédé de réalisation de pièces micromécaniques Active EP2320281B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH01729/09A CH702151A1 (fr) 2009-11-10 2009-11-10 Procede de realisation de pieces micromecaniques, notamment en verre ceramique.

Publications (3)

Publication Number Publication Date
EP2320281A2 EP2320281A2 (fr) 2011-05-11
EP2320281A3 true EP2320281A3 (fr) 2012-09-26
EP2320281B1 EP2320281B1 (fr) 2015-07-15

Family

ID=43567816

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10189691.8A Active EP2320281B1 (fr) 2009-11-10 2010-11-02 Procédé de réalisation de pièces micromécaniques

Country Status (2)

Country Link
EP (1) EP2320281B1 (fr)
CH (1) CH702151A1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2590325A1 (fr) * 2011-11-04 2013-05-08 The Swatch Group Research and Development Ltd. Résonateur thermocompensé en céramique
EP2685325B1 (fr) 2012-07-11 2016-04-06 Diamaze Microtechnology S.A. Ressort spiralé, procédé de fabrication, possibilités d'application ainsi qu'un entraînement micro-mécanique
CN102992638B (zh) * 2012-11-30 2015-05-27 北京遥测技术研究所 用于提高石英腐蚀表面光洁度的微掩模去除方法
CN104743499B (zh) * 2013-12-30 2016-12-07 北京北方微电子基地设备工艺研究中心有限责任公司 玻璃衬底的工艺方法
FR3039292B1 (fr) * 2015-07-24 2019-05-31 Commissariat A L'energie Atomique Et Aux Energies Alternatives Ressort spiral et procede de realisation du ressort spiral
EP3495894B1 (fr) * 2017-12-05 2023-01-04 Rolex Sa Procédé de fabrication d'un composant horloger
TWI774925B (zh) * 2018-03-01 2022-08-21 瑞士商Ｃｓｅｍ瑞士電子及微技術研發公司 製造螺旋彈簧的方法
EP3543796A1 (fr) * 2018-03-21 2019-09-25 Nivarox-FAR S.A. Procede de fabrication d'un spiral en silicium
CN111968910A (zh) * 2020-08-26 2020-11-20 北京北方华创微电子装备有限公司 芯片扇出封装结构中衬底的加工方法
CN115647757B (zh) * 2022-12-26 2023-04-04 西安航天精密机电研究所 一种二浮陀螺导电游丝制造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19651321A1 (de) * 1996-12-11 1998-06-18 Lothar Schmidt Unruh
EP1791039A1 (fr) * 2005-11-25 2007-05-30 The Swatch Group Research and Development Ltd. Spiral en verre athermique pour mouvement d'horlogerie et son procédé de fabrication
DE102008029429A1 (de) * 2007-10-18 2009-04-23 Konrad Damasko Verfahren zum Herstellen von mechanischen Funktionselementen für Uhrwerke sowie nach diesem Verfahren hergestelltes Funktionselement
CH700032B1 (fr) * 2006-01-19 2010-06-15 Alain Laesser Mouvement d'horlogerie avec organe régulateur à ressort spiral.

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998055876A1 (fr) * 1997-06-06 1998-12-10 Robert Bosch Gmbh Couche protectrice anti-adherence pour composant micromecanique
US6905616B2 (en) * 2003-03-05 2005-06-14 Applied Materials, Inc. Method of releasing devices from a substrate
DE10317889B4 (de) * 2003-04-17 2008-10-30 GFD-Gesellschaft für Diamantprodukte mbH Mikromechanisches Bauteil und Verfahren zu seiner Herstellung
WO2005065433A2 (fr) * 2003-12-31 2005-07-21 Microfabrica Inc. Procedes de fabrication electrochimiques utilisant des matieres et/ou des substrats dielectriques
CH714952B1 (fr) * 2007-05-08 2019-10-31 Patek Philippe Sa Geneve Composant horloger, son procédé de fabrication et application de ce procédé.

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19651321A1 (de) * 1996-12-11 1998-06-18 Lothar Schmidt Unruh
EP1791039A1 (fr) * 2005-11-25 2007-05-30 The Swatch Group Research and Development Ltd. Spiral en verre athermique pour mouvement d'horlogerie et son procédé de fabrication
CH700032B1 (fr) * 2006-01-19 2010-06-15 Alain Laesser Mouvement d'horlogerie avec organe régulateur à ressort spiral.
DE102008029429A1 (de) * 2007-10-18 2009-04-23 Konrad Damasko Verfahren zum Herstellen von mechanischen Funktionselementen für Uhrwerke sowie nach diesem Verfahren hergestelltes Funktionselement

Also Published As

Publication number Publication date
EP2320281B1 (fr) 2015-07-15
EP2320281A2 (fr) 2011-05-11
CH702151A1 (fr) 2011-05-13

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