EP2320281A3 - Method for manufacturing micromechanical parts - Google Patents

Method for manufacturing micromechanical parts Download PDF

Info

Publication number
EP2320281A3
EP2320281A3 EP10189691A EP10189691A EP2320281A3 EP 2320281 A3 EP2320281 A3 EP 2320281A3 EP 10189691 A EP10189691 A EP 10189691A EP 10189691 A EP10189691 A EP 10189691A EP 2320281 A3 EP2320281 A3 EP 2320281A3
Authority
EP
European Patent Office
Prior art keywords
wafer
glass
micromechanical parts
coefficient
manufacturing micromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10189691A
Other languages
German (de)
French (fr)
Other versions
EP2320281B1 (en
EP2320281A2 (en
Inventor
Marc-Alexandre Dubois
Jacek Baborowski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cartier Creation Studio SA
Original Assignee
Cartier Creation Studio SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cartier Creation Studio SA filed Critical Cartier Creation Studio SA
Publication of EP2320281A2 publication Critical patent/EP2320281A2/en
Publication of EP2320281A3 publication Critical patent/EP2320281A3/en
Application granted granted Critical
Publication of EP2320281B1 publication Critical patent/EP2320281B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00—Mechanisms for stabilising frequency
    • G04B17/04—Oscillators acting by spring tension
    • G04B17/06—Oscillators with hairsprings, e.g. balance
    • G04B17/066—Manufacture of the spiral spring
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00—Mechanisms for stabilising frequency
    • G04B17/04—Oscillators acting by spring tension
    • G04B17/06—Oscillators with hairsprings, e.g. balance
    • G04B17/063—Balance construction
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B29/00—Frameworks
    • G04B29/02—Plates; Bridges; Cocks
    • G04B29/027—Materials and manufacturing

Abstract

La présente invention concerne un procédé de réalisation d'au moins une pièce micromécanique en verre , comprenant les étapes suivantes :
- se doter d'un premier wafer de verre (10) présentant un coefficient de dilatation thermique inférieur à 5 x 10-6K-1,
- soudure d'un deuxième wafer de verre (14) présentant un coefficient de dilatation thermique inférieur à 5 x 10-6K-1, au premier wafer, par l'intermédiaire d'une couche d'accroche, ladite pièce étant destinée à être réalisée dans ledit deuxième wafer,
- croissance d'un masque métallique (16) sur le deuxième wafer,
- gravure traversante du deuxième wafer à travers le masque métallique, et
- libération de la pièce en dissolvant la couche d'accroche.

Figure imgaf001
The present invention relates to a method for producing at least one micromechanical glass part, comprising the following steps:
having a first glass wafer (10) having a coefficient of thermal expansion of less than 5 × 10 -6 K -1 ,
welding a second glass wafer (14) having a coefficient of thermal expansion of less than 5 × 10 -6 K -1 , to the first wafer, via a tie layer, said part being intended for to be performed in said second wafer,
- growth of a metal mask (16) on the second wafer,
- through etching of the second wafer through the metal mask, and
- Release of the piece by dissolving the bonding layer.
Figure imgaf001
EP10189691.8A 2009-11-10 2010-11-02 Method for manufacturing micromechanical parts Active EP2320281B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH01729/09A CH702151A1 (en) 2009-11-10 2009-11-10 Pieces of method for producing micromechanical including glass ceramic.

Publications (3)

Publication Number Publication Date
EP2320281A2 EP2320281A2 (en) 2011-05-11
EP2320281A3 true EP2320281A3 (en) 2012-09-26
EP2320281B1 EP2320281B1 (en) 2015-07-15

Family

ID=43567816

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10189691.8A Active EP2320281B1 (en) 2009-11-10 2010-11-02 Method for manufacturing micromechanical parts

Country Status (2)

Country Link
EP (1) EP2320281B1 (en)
CH (1) CH702151A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2590325A1 (en) * 2011-11-04 2013-05-08 The Swatch Group Research and Development Ltd. Thermally compensated ceramic resonator
EP2685325B1 (en) 2012-07-11 2016-04-06 Diamaze Microtechnology S.A. Spiral spring, method for producing the same, applications and micromechanical drives
CN102992638B (en) * 2012-11-30 2015-05-27 北京遥测技术研究所 Method for removing micro mask to improve quartz corrosion surface smoothness
CN104743499B (en) * 2013-12-30 2016-12-07 北京北方微电子基地设备工艺研究中心有限责任公司 The process of glass substrate
FR3039292B1 (en) * 2015-07-24 2019-05-31 Commissariat A L'energie Atomique Et Aux Energies Alternatives SPIRAL SPRING AND METHOD OF MAKING THE SPIRAL SPRING
EP3495894B1 (en) * 2017-12-05 2023-01-04 Rolex Sa Method for manufacturing a clock component
TWI774925B (en) * 2018-03-01 2022-08-21 瑞士商Ｃｓｅｍ瑞士電子及微技術研發公司 Method for manufacturing a spiral spring
EP3543796A1 (en) * 2018-03-21 2019-09-25 Nivarox-FAR S.A. Method for manufacturing a silicon hairspring
CN111968910A (en) * 2020-08-26 2020-11-20 北京北方华创微电子装备有限公司 Processing method of substrate in chip fan-out packaging structure
CN115647757B (en) * 2022-12-26 2023-04-04 西安航天精密机电研究所 Manufacturing method of two-floating-gyro conductive hairspring

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19651321A1 (en) * 1996-12-11 1998-06-18 Lothar Schmidt Oscillation system for mechanical clock
EP1791039A1 (en) * 2005-11-25 2007-05-30 The Swatch Group Research and Development Ltd. Hairspring made from athermic glass for a timepiece movement and its method of manufacture
DE102008029429A1 (en) * 2007-10-18 2009-04-23 Konrad Damasko Method for producing mechanical functional elements for movements as well as functional element produced by this method
CH700032B1 (en) * 2006-01-19 2010-06-15 Alain Laesser Mechanical timepiece movement i.e. pallet movement, for wrist watch, has hairspring whose attachment point is arranged opposite to another attachment point of another hairspring with respect to rotation axis of balance wheel

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100509873B1 (en) * 1997-06-06 2005-08-25 로베르트 보쉬 게엠베하 Nonstick layer for a micromechanical component
US6905616B2 (en) * 2003-03-05 2005-06-14 Applied Materials, Inc. Method of releasing devices from a substrate
DE10317889B4 (en) * 2003-04-17 2008-10-30 GFD-Gesellschaft für Diamantprodukte mbH Micromechanical component and method for its production
WO2005065433A2 (en) * 2003-12-31 2005-07-21 Microfabrica Inc. Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates
CH714952B1 (en) * 2007-05-08 2019-10-31 Patek Philippe Sa Geneve Watchmaking component, its method of manufacture and application of this method.

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19651321A1 (en) * 1996-12-11 1998-06-18 Lothar Schmidt Oscillation system for mechanical clock
EP1791039A1 (en) * 2005-11-25 2007-05-30 The Swatch Group Research and Development Ltd. Hairspring made from athermic glass for a timepiece movement and its method of manufacture
CH700032B1 (en) * 2006-01-19 2010-06-15 Alain Laesser Mechanical timepiece movement i.e. pallet movement, for wrist watch, has hairspring whose attachment point is arranged opposite to another attachment point of another hairspring with respect to rotation axis of balance wheel
DE102008029429A1 (en) * 2007-10-18 2009-04-23 Konrad Damasko Method for producing mechanical functional elements for movements as well as functional element produced by this method

Also Published As

Publication number Publication date
EP2320281B1 (en) 2015-07-15
EP2320281A2 (en) 2011-05-11
CH702151A1 (en) 2011-05-13

Similar Documents

Publication Publication Date Title
EP2320281A3 (en) Method for manufacturing micromechanical parts
JP5416719B2 (en) Frit sealing of large equipment
EP2157623A4 (en) Semiconductor light emitting element and method for manufacturing the same
AU2016259367A1 (en) Room temperature glass-to-glass, glass-to-plastic and glass-to-ceramic/semiconductor bonding
TWI266435B (en) Nitride-based compound semiconductor light emitting device and fabricating method thereof
JP2009065182A (en) Method of manufacturing semiconductor element
EP2075826A3 (en) Method of manufacturing a semiconductor-on-insulant substrate comprising a step with localised Ge enrichment
EP2172981A3 (en) Double-doped photovoltaic cell with heterojunction and manufacturing method
JP2007158133A5 (en)
MA29868B1 (en) SUPPORT ARM, CYLINDRO-PARABOLIC SOLAR COLLECTOR SUPPORT, AND METHOD OF MANUFACTURING THE SAME
WO2002092872A3 (en) Honeycomb structure thermal barrier coating
EP1903616A3 (en) Method of annealing photovoltaic cells
TW200720204A (en) Glass substrate and a manufacturing method thereof
JP2005336049A5 (en)
TW200702898A (en) EUV reflective mask and method for producing it
CH701499B1 (en) A method of manufacturing a micromechanical part reinforced silicon.
WO2013079131A1 (en) Method for producing structured optical components
FR2910890A1 (en) DEVELOPING A PULSE FRICTION DRIVE MICRO-ACTUATOR WITH A LOW POWER SUPPLY VOLTAGE USING A ULTRA-LOW RESISTIVITY SILICON PLATEBOARD
JP2007194514A5 (en)
JP6284164B2 (en) Junction structure and manufacturing method of junction structure
JP2008041707A (en) Semiconductor device and manufacturing method therefor
SG151235A1 (en) Glass substrate for magnetic disc and manufacturing method thereof
JP2019050366A (en) Thermal stress compensation junction layer and power electronics assembly including the same
JP2024052748A (en) Windows, optical packages
JP2009099760A (en) Membrane structure element, and manufacturing method thereof

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

RIC1 Information provided on ipc code assigned before grant

Ipc: G04B 29/02 20060101ALI20120821BHEP

Ipc: G04B 17/06 20060101AFI20120821BHEP

17P Request for examination filed

Effective date: 20130326

17Q First examination report despatched

Effective date: 20130508

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

INTG Intention to grant announced

Effective date: 20150212

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: NV

Representative=s name: GLN S.A., CH

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: FRENCH

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 737090

Country of ref document: AT

Kind code of ref document: T

Effective date: 20150815

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 602010025874

Country of ref document: DE

REG Reference to a national code

Ref country code: AT

Ref legal event code: MK05

Ref document number: 737090

Country of ref document: AT

Kind code of ref document: T

Effective date: 20150715

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20150715

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151016

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151015

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151116

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 602010025874

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

REG Reference to a national code

Ref country code: CH

Ref legal event code: PUE

Owner name: CARTIER INTERNATIONAL AG, CH

Free format text: FORMER OWNER: CARTIER CREATION STUDIO S.A., CH

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

26N No opposition filed

Effective date: 20160418

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20151102

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20151102

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20160729

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

REG Reference to a national code

Ref country code: DE

Ref legal event code: R081

Ref document number: 602010025874

Country of ref document: DE

Owner name: CARTIER INTERNATIONAL AG, CH

Free format text: FORMER OWNER: CARTIER CREATION STUDIO S.A., GENEVE, CH

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20151102

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20151102

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20151130

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20101102

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20151130

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20150715

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20191121

Year of fee payment: 10

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 602010025874

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20210601

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 20231201

Year of fee payment: 14