EP2318322A1 - Dispositif et procede pour recevoir sans contact et maintenir et egalement pour transporter des objets plats - Google Patents

Dispositif et procede pour recevoir sans contact et maintenir et egalement pour transporter des objets plats

Info

Publication number
EP2318322A1
EP2318322A1 EP09736121A EP09736121A EP2318322A1 EP 2318322 A1 EP2318322 A1 EP 2318322A1 EP 09736121 A EP09736121 A EP 09736121A EP 09736121 A EP09736121 A EP 09736121A EP 2318322 A1 EP2318322 A1 EP 2318322A1
Authority
EP
European Patent Office
Prior art keywords
holding
conveying
conveyor
delivery
flat object
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09736121A
Other languages
German (de)
English (en)
Inventor
Jörg FRANZKE
Matthias Niese
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rena GmbH
Original Assignee
Rena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rena GmbH filed Critical Rena GmbH
Publication of EP2318322A1 publication Critical patent/EP2318322A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/066—Transporting devices for sheet glass being suspended; Suspending devices, e.g. clamps, supporting tongs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Definitions

  • the invention relates to a device and a method for conveying flat objects, in particular semiconductor sub-strats (wafers) of thin, fragile material such. B. of silicon.
  • the invention relates to a device and a method, which provides a non-contact recording of the objects.
  • CONFIRMATION COPY Recording direction perpendicular to the surface of the substrate, since the risk of breakage of flat objects in a direction perpendicular to its surface is much greater than parallel to the surface. In addition, it must be ensured that the usually very touch-sensitive surfaces of the substrates are largely spared.
  • the recording process should take place as quickly as possible in order to be able to comply with the high clock frequencies desired in the course of a continuous (inline) production.
  • the prior art provides devices which receive and convey the substrate by means of suitably shaped grippers. These grippers can act mechanically, but they can also provide a negative pressure holding forces that adhere the substrate to the gripper.
  • vacuum chucks of various designs, but also working with negative pressure flexible bands, suction cups, suction cups and the like are known, which are defined below the grippers to be attributed.
  • Such a device is disclosed, for example, in document EP 0 990 609 B1, which describes a device for picking up and conveying articles made of paper, wherein these articles are to be removed from a stack and are positioned standing on their edges.
  • the negative pressure conveying belt according to document EP 0 992 443 A2 is of the delivery level, that of the surface of the sheet stack corresponds, additionally designed tiltable.
  • the gripper is brought into direct physical contact with the same for receiving the respective object.
  • the provision of the holding force, ie the negative pressure which ensures adhesion of the object to the gripper takes place.
  • this direct contact with the recording is disadvantageous for the following reasons.
  • the lowering of the gripper in the direction of the delivery plane, the gentle contacting of the substrate, the subsequent also gentle lifting of the same and in turn gentle braking of the gripper on reaching the conveying plane (the plane in which the conveying movement takes place) includes, a certain period of time, which is undesirable in view of high clock frequencies.
  • the object of the invention is thus to provide a device and a method with which the disadvantages of the prior art are overcome.
  • the inclusion of a substrate should proceed as gently as possible and be able to take place quickly.
  • the present invention relates to a device for non-contact recording and holding as well as for subsequently conveying at least one flat object, in particular a silicon semiconductor substrate (wafer).
  • a flat object in particular a silicon semiconductor substrate (wafer).
  • the objects are provided lying horizontally as well as loosely and separately from one another sequentially by means of a delivery device such as a conveyor belt, the surface of which is hereinafter referred to as the delivery plane.
  • the delivery is preferably carried out in one lane;
  • B. parallel tracks to use, without having to change the device itself significantly.
  • the recording in the different tracks can be done at the same time.
  • the device can be provided without substantial changes for storage in multiple lanes.
  • the direction from which the at least a flat object is delivered is referred to in this case as delivery direction.
  • the device according to the invention comprises two essential components.
  • the first of these components forms a retention device providing holding device.
  • the holding device serves for receiving and holding the objects to be picked up and conveyed and is preferably designed as a vacuum device for generating the holding forces and preferably controllable, that is switched on and off.
  • the holding device may be stationary. Although it may also have movable parts, but is preferably arranged as a whole in a stationary manner in the device.
  • the second of these components forms a conveyor, which is also preferably controllable, that is switched on and off.
  • the conveying means is arranged on a plane (conveying plane) above the aforementioned delivery plane and serves to contact the at least one flat object to be picked up and to move in the conveying direction, ie is responsible for the actual (translational) movement of the objects.
  • the conveyor is designed to be substantially movable. While it is also possible stationary components such. Bearings and the like; however, in particular, the parts of the conveying means which come into contact with the objects move along with the objects.
  • the device makes it possible for a provided flat object to be liftable by the holding forces from the delivery plane to the plane of the conveying means and to be fixable on the underside of the conveying means.
  • the holding device is arranged such that the holding forces provided by it point downwards, ie in the direction of the objects.
  • the holding device according to the invention does not move with a conveyed object, it is clear that between the undersides of conveyor and holding device is arranged a secondary air gap.
  • This secondary air gap can be structurally kept so small that virtually no secondary air can pass through it. But it can also be permanently larger or adjustable to achieve in this way a regulation of the negative pressure and thus the holding forces.
  • the holding forces initially fulfill the task of lifting the object, since it is initially still at the delivery level and thus located at a distance below the conveying means of the device according to the invention.
  • This lifting is carried out according to the invention without contact, ie without the production of a physical contact between the top of the article and the underside of the conveyor.
  • the holding forces serve to hold or fix the now raised object on the conveyor, more precisely on the underside thereof.
  • the holding forces thus counteract the falling of the object and thus the force of gravity.
  • the article is conveyed in contact with the conveying means, ie no longer without contact.
  • the holding forces used for receiving as well as for fixing are of the same nature. In this case, holding forces which are generated by a negative pressure between the holding device and the objects are preferred, for which reason the holding device is preferably designed as a vacuum device. This type of holding forces is indispensable especially with regard to the non-contact picking up of the objects.
  • adhesion forces can additionally or alternatively also be used, which form, in particular, between objects wetted with liquid and a smooth surface of the conveying means.
  • adhesive forces it must be ensured that the objects are returned in the desired manner from the conveyor belt. are removable medium.
  • overpressure surges with air, another gas, or with liquid come into question, which are discharged from the holding device against the fixed surface of the object, ie pointing down.
  • the holding device and the conveyor must not interfere with each other functionally, that is to say that a conveying of the articles is possible while they are being held by the holding device at the same time.
  • This can be achieved, for example, by virtue of the fact that the conveying means and the holding device occupy only a part of the area which is available for receiving and conveying an article by being arranged side by side in the conveying direction.
  • the conveying means can partially or completely cover the holding device, if it is ensured that the holding forces either extend through the conveying means, or emanate from the conveying means itself.
  • the retaining forces are provided by means of negative pressure.
  • underpressure used according to the invention does not include a vacuum (less than 300 mbar) . This implies that, on the one hand, no technically complex solutions are necessary, as would be necessary for generating a vacuum, and that the underpressure desired according to the invention may be so dimensioned that damage to the flat objects, as would be the case with the application of a vacuum, is largely precluded.
  • the influence of the exact setting of the negative pressure on the mass of the substrate, on the geometry of the conveyor, on an object acting acceleration and deceleration forces, as well as the possibility to suck in secondary air correct setting can either be determined by calculation or determined by tests.
  • the device is positioned above the flat objects, so that the holding forces can be aligned with the upper sides of the flat objects. It follows that the flat objects are received and conveyed "head-on" by the device according to the invention.
  • the plane of delivery and the plane of conveyance are spaced apart to form a gap, which preferably corresponds to at least twice the thickness of the flat object, which means that there is also a gap between the upper side of the flat object.
  • the retaining forces which are preferably likewise produced by negative pressure and serve for fixing, are also to be dimensioned in such a way that they hold or fix a flat object resting against the conveying means.
  • the holding force must be selected to be correspondingly high. Does that know Conveyor on the other hand form-locking acting geometries, so sufficient holding force, which prevents just a drop of the object.
  • the device according to the invention can be made simple.
  • the relative movement between the goods delivered and the device according to the invention does not have to be compensated for mechanically, but rather is advantageously overcome during the picking process by the holding forces acting without contact, without further aids.
  • the article reduces its speed in the direction of delivery after lifting at least slightly due to its inertia, so leaving the delivery level, not completely abrupt, but at least slightly fluid until it finally rests on the conveyor, where it is then held or fixed. An adjustment of the two speeds is not necessary, since the object never rests simultaneously on the respective conveyor of the delivery level and the conveying plane, so that no direct shear force transmission by the conveyor medium is possible.
  • the conveyor is also fixed during the recording process to ensure a damage-free recording. Nevertheless, the time required for recording can be set very short so that, if desired, the actual conveying process can be started quickly. Cycle times of 5000 substrates and more per hour can thus be achieved.
  • the construction of the device according to the invention makes it possible to re-sort substrates in inline systems without exposing the substrates to great loads.
  • the delivery device is operated continuously.
  • the delivery device is operated intermittently. This means that it always stops when a flat object has arrived in a suitable area for receiving the device according to the invention. It only resumes operation when the delivered item has left the delivery level.
  • the device itself comprises a vacuum device for generating the holding forces required for lifting and possibly also for fixing.
  • the vacuum necessary for generating the holding forces is effected by means of an external device, which is merely associated with the device, for example a vacuum pump.
  • the vacuum device preferably encompassed by the device comprises at least one suction fan. Suitable for this purpose are, for example, fans, as used in commercial personal computers for cooling processors or power supplies.
  • the at least one suction fan is preferably to be arranged so that on its downwardly facing side, a negative pressure is created while the sucked air is blown up. The amount of suctioned air can be adjusted precisely by means of a control of the speed.
  • the required for the recording and / or transport vacuum can be adjusted.
  • it must be ensured via corresponding air ducts that the negative pressure side of the at least one fan is fluidically connected to the parts of the holding device described below. It is particularly preferable to provide a plurality of such fans, but alternatively it is also possible to use a single, central fan.
  • this secondary air gap is preferably in the direction of. Width of the device extends.
  • the secondary air gap can also be used to regulate the negative pressure. As the secondary air gap increases, it effectively reduces the holding force oppression and vice versa.
  • the secondary air gap is designed to be variable in height.
  • the secondary air gap may preferably be created by providing an offset between the side of the conveyor facing the article and the region of the holding device into which the ambient air flows.
  • lateral openings through which a certain amount of ambient air can flow at any time, serve to limit the pressure.
  • the conveying means is configured uncontrollable. This means that it is permanently switched on during operation of the device and is not stopped. In certain cases, where the material to be picked and conveyed is less sensitive (for example in the case of plastic panels), it may be sufficient to lift it against the moving conveyor without damaging the objects. Likewise, a depositing of the objects take place in such a way that they fall off upon reaching an end position due to disconnected holding forces from the conveyor, whereby they naturally first still the conveying speed is impressed. If the web of the objects after leaving the conveyor is substantially always the same, a suitably arranged container or a conveyor belt can collect the items and if necessary transport away.
  • the conveying means is controllable in order to have better control over the process of picking up and depositing, and to preserve the typically fragile objects as far as possible.
  • the described device is particularly advantageous when substrates are to be removed from a delivery device and stored in a direction which is arranged at right angles to the delivery direction of the flat objects.
  • this change direction is carried out by means of the above-described, gentle recording process without risk of breakage for the objects. It is therefore provided according to a preferred embodiment that the conveying direction is not a linear continuation of a direction from which the flat object is delivered.
  • the device may also be used to deposit the articles on a stack, in a magazine, or to separate from a stack. Also, the device may, if necessary, control several storage locations one after the other and deposit the items there in a targeted manner.
  • the device according to the invention is not limited to a rectangular arrangement of the transport directions to each other. Depending on the specific task, it is therefore possible or useful to provide oblique arrangements or even a structure with two collinear transport directions, for example, when substrates for the formation of gaps must be accelerated.
  • the conveyor is selected from the group consisting of smooth belts, toothed belts, belts, chains, rollers, wheels and grippers.
  • the conveyor comprises outwardly smooth toothed belts, which are designed as conveyor belts, wherein most preferably two mutually parallel conveyor belts are provided, which have a distance from one another, which corresponds to the width of the device according to the invention minus the widths of the conveyor belt.
  • Another embodiment provides a wide belt with air-permeable holes, through which the holding force according to the invention is constructed.
  • an air-permeable conveyor belt is used as conveying means, which provides the appended at its (upward facing) back to its negative pressure (downward) Front ready ⁇ .
  • conveying means which provides the appended at its (upward facing) back to its negative pressure (downward) Front ready ⁇ .
  • further means are to be provided which ensure sufficient tensioning of the conveying means. Due to the porosity of such a conveyor, it does not interfere or not significantly the effect of the holding device.
  • adhesive force to convey the surface must be such that sufficiently strong adhesion forces can form.
  • the recording and depositing according to the invention always takes place by means of the abovementioned holding force.
  • the gap between the upper side of the flat objects located on the delivery level and the underside of the conveying means is as small as possible.
  • the gap between the surface of the delivery device (delivery level) and the underside of the conveyor should accordingly be this amount plus the thickness of a flat object. Therefore, it is preferred that the gap corresponds to at least twice the thickness of the objects to be transported.
  • the gap is dimensioned at least slightly larger than twice the thickness of a flat object. It follows that the gap is sized to be greater than the thickness of a flat object.
  • the dimension for the gap is therefore preferably 1 to 4 mm.
  • the holding forces are not controllable. This means that they are available at all times.
  • a delivered item is then lifted "blindly" when the distance to the holding device is undershot and fixed to the conveying means, for depositing an item it is conveyed to a region preferably arranged at the end of the apparatus, in which case no holding forces are permanently present, so that the counterpart can be stopped - stood without further action and automatically drops only due to the conveying movement running into this region, but it is preferred that the holding forces are at least controllable in their entirety the pick and place process can be specifically be influences ⁇ .
  • the holding forces extend uniformly over the entire downwardly facing surface of the holding device;
  • the holding forces can be provided locally limited. This means in the case of vacuum generated by holding forces that not at each location of the holding device, the same or even a negative pressure is present, but that this negative pressure is provided only in certain places.
  • the holding forces "wander" with the objects, which is advantageous in particular when several items are conveyed at the same time. While a first item has just been picked up, another item may already have arrived at its depositing position Only by such a segmentation of the holding device can it be ensured that the further object can now be deposited without inadvertently losing the first object just taken up.
  • the holding device which according to the invention can also be controlled (that is to say switched on and off), comprises, according to a correspondingly preferred embodiment, a plurality of controllable valve flaps.
  • a valve flap preferably comprises a plurality of respective lamella-shaped elements, wherein these lamellae can tilt about their longitudinal axis.
  • the corresponding use of hinges also reduces the friction in the movement of the fins and thus the burden of particles generated by friction.
  • the outer surfaces of the lamellae run essentially parallel and spaced apart from one another; in the closed position, these outer surfaces of a lamella group thus formed lie approximately in the same plane, whereby the lamellae of a lamellae group mutually partially (in the edge region).
  • the individual lamellae of a valve ⁇ flap are connected by means of a common actuator, so that sufficient for actuation a single engine or the same.
  • the actuator may for example comprise a coupling rod or intermeshing gears.
  • slide groups can also be used instead of lamella groups.
  • the slides of a slide group are preferably arranged so that their active surfaces are possible at right angles to the air flow.
  • Particularly advantageous in the use of sliders is the concomitant reduction in the secondary air gap, which is also always the same due to the always the same distance between the outside of the slide and the substrate. This results in a better controllability of the flow conditions and thus the holding forces.
  • Another possibility of influencing the air flow is a single controllability of the slats or slides.
  • This individual controllability also leads to an effect that is comparable to a further reduction of the segments to the size of a single lamella or a single slide ⁇ bers.
  • the holding force is thus locally narrower.
  • substrates can be conveyed in a smaller spacing relative to one another.
  • each of the segments is fluidically connected to one of the fans mentioned above, which are present in a plurality, so that each fan can supply one segment each with negative pressure.
  • each fan can supply one segment each with negative pressure.
  • negative pressure can be distributed over suitable channels on the individual segments.
  • the voltage applied to a segment of negative pressure is influenced by the mode of the other segments; Thus, when all segments are open, the vacuum will be less than when only one of the segments is open and the others are closed. If necessary, appropriately controllable throttles or secondary air valves should be provided for this purpose.
  • the holding device has no valve flaps, but only openings, which are provided with controllable and arranged in the respective segment channel valves.
  • the valve function is provided by the plurality of existing fans or by influencing their speed.
  • the device according to the invention comprises a position detection device for detecting the position of the supplied flat objects, such as a reflection light scanner. Accordingly, it is not necessary that the articles are all delivered in exactly the same position and / or the same distance apart. Rather, the position detection device detects the position of an approaching object and only then gives the device according to the invention the signal for controlling (opening) the segment of the holding device arranged correspondingly above the object when the object is in the correct picking position.
  • the position detection device can also serve to detect flat objects of different sizes, whereby the size or at least one value related to the size (eg number of edges or diameter) for further processing (eg adaptation of the recording time or the Vacuum) is detected.
  • this signal can also be provided by the delivery device. This can be done, for example, to the Drive be coupled to the same and output whenever the conveyor belt of the delivery device has advanced by an amount that corresponds to the extent of an object in the delivery direction plus the (also regular) distance to the subsequent object.
  • the device according to the invention further comprises means for temporarily reducing the gap.
  • the reduction of the gap serves to further reduce the distance to be bridged by means of the holding forces. In this way, a particularly safe and quick picking up and dropping the flat objects can be achieved.
  • the reduction is achieved by temporarily moving towards each other on the delivery and the delivery level.
  • the reduction of the gap can be caused by the movement of one or both planes.
  • means for temporarily reducing eccentric drives are particularly preferably used, which allow due to their sinusoidal movement pattern, a particularly low-load acceleration or deceleration of the planes and thus the objects applied to them.
  • a method for non-contact receiving and holding and for subsequently conveying at least one flat article of the aforementioned type, in particular a semiconductor substrate using a device as described above.
  • the method according to the invention comprises the following steps:
  • the method according to the invention further comprises the deposition of the article by switching off the holding device as soon as the article has arrived at a storage position.
  • the provision of the holding forces on the underside of the holding device takes place permanently.
  • a temporal controllability of the holding device and thus of the holding forces is preferred.
  • the holding forces are generated and provided by negative pressure.
  • Controlling the holding means for providing the holding forces is achieved in a preferred embodiment by opening a valve or a valve group, so that ambient air is sucked through this opening and forms a corresponding negative pressure between the holding device and the male substrate. It should be ensured that the holding forces can bridge the gap between the bottom of the conveyor and the top of a flat object in the receiving position, so that the product of negative pressure in the area of the delivered good and surface of the top of the goods is greater than the weight of the goods ,
  • the holding forces provided for lifting so preferably the negative pressure, lead to an aspiration of the article in Direction of the conveyor and thus to a lifting of the article from the delivery device.
  • the corresponding conveyor can be made porous or arranged so that it leaves room for a passage of corresponding air streams. In this way, the strength of the holding forces during recording and subsequent fixing can remain the same; the additional amount needed only for picking up is then provided by the external blast of air.
  • the vertical movement of the article comes to a halt by abutment on the underside of the conveyor, which is preferably formed by two parallel conveyor belts.
  • a possibly initially existing movement of the article in the direction of delivery also decreases successively during the picking process since, after picking up, no forces act in the direction of delivery on the article.
  • the holding force will now continue to be maintained, for example, by keeping open the corresponding valve flap (s) or slider.
  • the recorded object is now held or fixed on the underside of the conveying means.
  • the holding forces are provided only in the region of the subsidized object, ie locally limited. In the context of this embodiment, it is particularly preferred that the retaining forces are provided locally limited so that they act purely borrowed on the top of the at least one flat object. Alternatively, the holding forces can also be provided in the entire region of the holding device.
  • the funding can now set in motion and the Move the object to a desired location along the conveying direction of the device according to the invention.
  • the transmission of the corresponding acceleration and deceleration forces is preferably achieved by means of stiction between the surface of the article and the conveyor.
  • the object falls off and can either be magazined or transported away with another transport device.
  • the article can also be conveyed into a region of the device in which no holding forces act more (for example, because there are no more corresponding openings there).
  • the delivery plane and the conveyor plane are spaced apart to form a gap, which is preferably at least twice the thickness of the flat article (16).
  • a detection step precedes the steps listed above. This means that first of all a detection of the arrival of the receiving object located at the delivery level takes place, so that the picking process can be precisely timed to match the arrival of the item. Also, by supplementary detection of the size of the object in the delivery direction of the recording time can be selected so that objects of different lengths are each taken in the middle of the device according to the invention.
  • the detection of the arrival of a receiving object located at the delivery level takes place either by means of a corresponding sensor or, if one of them regular arrangement of the delivered objects can be assumed via a coupling with eg the drive of the delivery device.
  • a temporary reduction of the gap takes place for lifting and / or depositing the flat object.
  • the distance between delivery and conveying plane for lifting and / or depositing the flat object is temporarily reduced using suitable means, so that the holding forces have to bridge a smaller distance, or the fall distance of the object to be deposited is as low as possible .
  • the gap is increased to a normal extent, which allows safe and collision-free transport of the objects at all times.
  • not the entire respective plane is moved for temporary reduction of the gap, but only that part of it which is located in the immediate vicinity of the lifting or depositing point.
  • This can be achieved for example by eccentric drives, which act locally limited to the delivery side respectively opposite side of the funding.
  • the conveying means are resilient, they will deform in particular directly in the region of the A ⁇ site of action and so cause the desired localized reduction of the gap.
  • the set forth and applicable in the context of an inline production invention allows a recording particular fragile good without producing a physical contact during the recording process. In this way, damage is avoided, and also relative movements between the first moving in a direction of delivery object and the device according to the invention are without abrupt change in direction and acceleration and without the compelling need to stop the delivery device, overcome.
  • the recording process is still fast, since the positioning of a gripper or the like is eliminated. Likewise, an otherwise necessary complex control of such a gripper can be dispensed with.
  • the holding forces can be sufficiently accurately metered with the simplest means, without the need for special vacuum valves or the like.
  • the device and the method according to the invention have been set forth in the preferred example of a dry environment. However, it is also possible to apply the invention with a view to receiving and conveying in a wet environment and in particular in a liquid, without having to deviate from the above-disclosed idea of non-contact picking up and subsequent conveying.
  • Fig. 1A shows a preferred embodiment of the device according to the invention in a perspective view obliquely from below.
  • Fig. 1B shows the preferred embodiment of he ⁇ inventive device of FIG. 1 in a perspective view obliquely from above.
  • Fig. 2 shows the preferred embodiment of the device according to the invention in a plan view.
  • FIGS. 3A-D show a preferred embodiment of the method according to the invention.
  • FIG. 1A shows a preferred embodiment of the device 1 according to the invention in a perspective view obliquely from below.
  • This consists of a long elongated frame, which houses the individual components of the device 1.
  • These are in particular the preferably controllable holding device, which serves to receive and hold the objects 16 to be picked up and conveyed, and the conveying means 6, which is responsible for the actual (translational) movement of the objects 16, as well as additional components.
  • valve flaps 3 are arranged, which are assigned to several (here: six) segments 4.
  • the movable lamellae 3 'comprehensive valve flaps 3 are by means of a mechanism, not shown' operable in segments, so that each of all slats 3 'a valve flap 3 of a segment 4 together, so in groups, can be opened or closed.
  • valve flaps 3 By opening the valve flaps 3 ambient air can be sucked in the suction 5. If a male object 16 is located in the region of a segment 4 with the valve flap 3 open, it is sucked in the suction direction 5 and moves in the direction of the underside 2 of the device 1.
  • the controllable conveying means 6 is also arranged.
  • the conveyor 6 comprises two parallel conveyor belts 7A and 7B. Via a number of deflection rollers 8 and a drive belt 9, both conveyor belts 7A, 7B communicate with a preferably incrementally operating drive 10 (servo drive). Since the conveyor belts 7A, 7B are widely spaced from one another and are also narrow in relation to the width of the device 1, they only cover a small part of the underside 2 of the device 1 according to the invention. Accordingly, they do not hinder or only insignificantly hinder the holding device in its effect.
  • the conveyor belts 7A, 7B are according to the illustrated embodiment arranged so that their flat object 16 facing side (bottom) of the underside of the holding device, so the valve flaps 3, always surmounted, regardless of whether the valve flaps 3 in open or closed position. This ensures that at least one secondary air gap 21 can form, through which secondary air also comes in the direction of the valve flaps 3 during the abutment of a flat object 16 on the underside of the conveyor belts 7A, 7B.
  • FIG. 1A there are therefore two secondary air gaps 21, one of which is arranged in the region of the front edge pointing in the conveying direction 15, and the other in the region of the rear edge of the substrate 16 pointing counter to the conveying direction 15.
  • a sensor 11 which serves for position and width recognition approaching good (not shown).
  • the sensor 11 is arranged so that it is located above the approaching good, which in the illustrated embodiment, approximately in the middle, ie at half the length of the device 1, moves toward the same. This is represented by the arrow, which symbolizes the delivery direction 17, which runs at right angles to the conveying direction 15.
  • FIG. 1B the preferred embodiment of the device 1 according to the invention shown in FIG. 1A is shown in a perspective view obliquely from above, but without material picked up.
  • a number of fans 13, which corresponds to the number of segments 4 are arranged on the upper side 12.
  • the electronics 14 which is connected, inter alia, with the sensor 11 and the control of the valve flaps 3, the drive 10 and the fan 13 is used.
  • FIG. 2 shows the preferred embodiment of the device 1 according to the invention from FIGS. 1A and 1B in a plan view.
  • Well visible are the segment-like arranged in the conveying direction 15 and permanently rotating fan 13, and the sensor 11, which protrudes laterally from the device 1 in the delivery direction 17.
  • FIGS. 3A-D show the schematic cross-section of the device 1 in a side view.
  • the material 16 to be accommodated is below the device 1 on the delivery level 18 of a delivery device.
  • a gap 19 is present between the top of the delivery level 18 and the bottom 2 of the device 1, more precisely: the underside of the conveyor 6 and in particular the arranged there transport belt 7A, 7B.
  • This gap 19 is dimensioned so that it is always greater than the thickness of the flat objects 16.
  • the top side of the articles 16 does not therefore touch the underside 2 of the device 1, in particular not the Conveyor belt 7A, 7B or the valve flaps 3.
  • a gap 20th Between a not yet recorded object 16 and the conveyor belt 7A, 7B exists according to the invention.
  • the product 16 is now in a position suitable for receiving, which is detected by the sensor 11 (not shown) and reported to the electronics 14 (not shown), this causes the valve flap 3 of the corresponding segment 4 to open flows into the corresponding segment 4 in the suction direction 5, generates a negative pressure that provides the holding force, and lifts the substrate 16 so that it lifts off from the delivery level 18 of the delivery device 17 (FIG. 3B).
  • the substrate 16 is then stopped after overcoming the gap 20, which is only a few millimeters, on the outer surfaces of the conveyor belts 7A, 7B. There, it is now due to the still acting on its upper holding force, so it is fixed or held on the underside of the conveyor 6.
  • FIG. 3C shows the actual conveying process.
  • the material 16 firmly attached to the conveyor belts 7A, 7B by means of the holding force is conveyed along the underside 2 of the device 1 by the drive 10 driving the conveyor belts 7A, 7B.
  • the estate 16 thus moves to the right. It must be ensured that the retaining force acts on the material 16 at any time by at least each of the valve flap 3 of the segment or segments 4, in the region of which the product 16 is located, are open. This is represented by the groupwise vertically or horizontally arranged lamellae 3 'of individual valve flaps 3 shown in the side view.
  • the removal of the goods 16 takes place such that at least the valve flap 3 of that segment 4 is closed, in the region of which the deposit is to take place (here: the segment on the far right in the image).
  • the holding force disappears or falls below at least one indwelling value necessary for holding, and the product 16 falls down. According to the figure, even the valve flaps 3 of all segments 4 are closed.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Specific Conveyance Elements (AREA)

Abstract

L'invention concerne un dispositif et un procédé pour transporter des objets plats (16) tels que notamment des substrats semi-conducteurs (tranches) en matériau mince, fragile. L'invention concerne notamment un dispositif et un procédé avec lesquels une réception sans contact des objets (16) peut avoir lieu. Selon l'invention, le dispositif (1) comporte un moyen de transport (6), le processus de transport ayant lieu en contact avec le moyen de transport. Le dispositif (1) comporte également un dispositif de retenue produisant une force de retenue. Selon l'invention, un objet plat (16) peut être soulevé au moyen de la force de retenue en direction du moyen de transport (6) et ensuite être fixé sur son côté inférieur.
EP09736121A 2009-09-15 2009-09-15 Dispositif et procede pour recevoir sans contact et maintenir et egalement pour transporter des objets plats Withdrawn EP2318322A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2009/006657 WO2011032567A1 (fr) 2009-09-15 2009-09-15 Dispositif et procédé pour recevoir sans contact et maintenir et également pour transporter des objets plats

Publications (1)

Publication Number Publication Date
EP2318322A1 true EP2318322A1 (fr) 2011-05-11

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EP09736121A Withdrawn EP2318322A1 (fr) 2009-09-15 2009-09-15 Dispositif et procede pour recevoir sans contact et maintenir et egalement pour transporter des objets plats

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EP (1) EP2318322A1 (fr)
WO (1) WO2011032567A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202012102503U1 (de) 2012-07-06 2012-08-03 Rena Gmbh Vorrichtung zum mehrspurigen Transport von flachen Gegenständen

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016214093A1 (de) * 2016-07-29 2018-02-01 Asys Automatisierungssysteme Gmbh Vorrichtung zum Greifen und Transportieren von Substraten
DE102019217033B4 (de) * 2019-11-05 2022-06-30 Asys Automatisierungssysteme Gmbh Be- und Entladeeinrichtung für ein Substratmagazin, Substratmagazinsystem

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Publication number Priority date Publication date Assignee Title
JP2008172046A (ja) * 2007-01-12 2008-07-24 Asahi Kosan Kk 基板浮上搬送装置
DE102007061410A1 (de) * 2007-12-11 2009-06-18 Gebr. Schmid Gmbh & Co. Verfahren und Vorrichtung zum Vereinzeln von Wafern von einem Waferstapel

Non-Patent Citations (1)

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Title
See references of WO2011032567A1 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202012102503U1 (de) 2012-07-06 2012-08-03 Rena Gmbh Vorrichtung zum mehrspurigen Transport von flachen Gegenständen

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