EP2297772A1 - Dielectric barrier discharge lamp configured as a coaxial double tube having a getter - Google Patents

Dielectric barrier discharge lamp configured as a coaxial double tube having a getter

Info

Publication number
EP2297772A1
EP2297772A1 EP08775080A EP08775080A EP2297772A1 EP 2297772 A1 EP2297772 A1 EP 2297772A1 EP 08775080 A EP08775080 A EP 08775080A EP 08775080 A EP08775080 A EP 08775080A EP 2297772 A1 EP2297772 A1 EP 2297772A1
Authority
EP
European Patent Office
Prior art keywords
tube
getter
lamp according
outer tube
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP08775080A
Other languages
German (de)
French (fr)
Other versions
EP2297772B1 (en
Inventor
Oliver Rosier
Axel Hombach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osram GmbH
Original Assignee
Osram GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osram GmbH filed Critical Osram GmbH
Publication of EP2297772A1 publication Critical patent/EP2297772A1/en
Application granted granted Critical
Publication of EP2297772B1 publication Critical patent/EP2297772B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/24—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J61/26—Means for absorbing or adsorbing gas, e.g. by gettering; Means for preventing blackening of the envelope
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/34—Double-wall vessels or containers

Definitions

  • the invention is based on a dielectric barrier discharge lamp with a discharge vessel in coaxial double tube arrangement, i. an inner tube is coaxially disposed within an outer tube. Inner tube and outer tube are connected to each other and form the gas-tight discharge vessel.
  • the discharge space enclosed by the discharge vessel thus extends between the inner and outer tubes and is filled with a discharge medium which typically contains one or more noble gases, for example xenon.
  • This type of discharge lamp typically has a first electrode disposed inside the inner tube and a second electrode disposed on the outer side of the outer tube. Both electrodes are thus outside the discharge vessel. It is therefore a two-sided dielectrically impeded discharge.
  • xenon excimers In a dielectric barrier discharge with, for example, the noble gas xenon as the discharge medium, xenon excimers (Xe2 *) are produced which emit electromagnetic radiation with wavelengths in the region of approx. 172 nm when returning from the excited state to the ground state.
  • Impurities for example oxygen or hydrogen, in the discharge medium reduce the efficiency of the useful radiation generation.
  • part of the electrical excitation power goes into the unwanted stimulus tion of the atomic and / or molecular components of the impurities.
  • the impurities cause some of the excimer to return to the ground state without radiation.
  • This type of lamp is used in particular for UV irradiation in process technology, for example for surface cleaning and activation, photolytics, ozone generation, drinking water purification, metallization, and UV curing.
  • the term emitter or UV emitter is also common.
  • Document EP 0 607 960 A1 discloses a dielectric barrier discharge lamp in coaxial double tube arrangement.
  • a getter material is arranged either in a one-sided extension of the annular gap-shaped discharge space (FIGS. 1-3), a flat, circular extension of the discharge vessel (FIG. 4) or in a separate vessel (FIG. 5). which is connected to the discharge space.
  • measures are provided to prevent the getter material from inadvertently entering the discharge space, for example by connecting the getter space from the discharge space via a narrowed section of vessel.
  • the problem is that parasitic discharges can form in the area of the getter space due to the proximity of the getter space to the discharge space. The parasitic discharges worsen the efficiency of the radiator. Presentation of the invention
  • the object of the present invention is to provide a dielectric barrier discharge lamp in coaxial double tube arrangement with improved arrangement of a getter material.
  • a dielectric barrier discharge lamp in coaxial double tube arrangement with a discharge vessel comprising an outer tube and an inner tube, wherein the inner tube coaxially disposed within the outer tube, the inner tube and the outer OHrohr gas-tightly connected to each other, whereby between inside and outer tube is formed a discharge space filled with a discharge medium, an outer electrode disposed on the outer side of the outer tube, an inner electrode disposed inside the inner tube, a getter material in contact with the discharge medium, characterized in that the Inner tube is shorter than the outer tube, the inner tube and the outer tube are gas-tightly connected at their respective one end, the outer tube is gas-tightly sealed at its other end, which projects into the outer tube inner tube comprising: a first pipe section - the ĂȘtelek in which the inner electrode is arranged, a second tube section - the getter tube - in which the getter material is arranged, a dividing wall which separates the two tube sections in a gastight manner from one another.
  • the getter space is limited to a region close to the axis, that is, not arranged in the extension of the annular gap-shaped discharge space.
  • a getter tube provided for receiving the getter material coaxially adjoins the inner electrode tube provided for receiving the inner electrode, but is separated from it gas-tight by a partition wall.
  • the way from the getter material to the outer electrodes is relatively long. Due to the long path between getter material and electrodes parasitic discharges are avoided or at least significantly reduced. Due to the partition wall between the getter tube and the inner electrode tube, the getter space formed by the getter tube and consequently also the discharge space communicating with the getter space via the getter tube opening are closed to the outside in a gas-tight manner.
  • the getter tube can be formed in that the inner tube is extended beyond the length of the inner electrode.
  • the tube section provided for receiving the getter material is separated in a gastight manner from the remainder of the inner tube by means of a separately inserted and welded dividing wall.
  • the getter tube forming the getter space and the inner electrode tube receiving the inner electrode are functionally different and separated by the partition portions of the same one-piece inner tube.
  • the getter tube may be formed by a separate tube which adjoins the end of the inner electrode tube projecting into the outer tube, ie the inner tube in this case comprises two separate tube tubes. parts: namely the inner electrode tube and the getter tube.
  • the two tube parts gas-tight separating partition is formed by a corresponding gas-tight closed end of one of the two tube parts. That is, the partition wall is formed for example by the gas-tight closed end of the inner electrode tube (8), to which the getter tube is attached and thus connected gas-tight.
  • the getter tube can first be closed off at one end and then attached and connected to the open end of the inner electrode tube with this closed end.
  • the diameter of the inner electrode tube and the diameter of the getter tube may be the same or different.
  • the getter as it may also be advantageous to taper the getter tube in the direction of opening.
  • the length of the getter tube in the axial direction is adjusted so that a sufficient amount of getter material can be absorbed.
  • the getter tube should not be too long, otherwise the radiating portion - this extends only to the area with the inner electrode - based on the total length of the radiator is reduced too much. In practice, depending on the total length of the radiator, lengths in the range between approximately 0.5 cm and 5 cm have proven suitable for the getter tube.
  • the getter material may for example be applied to at least a part of the inner surface of the getter tube, for example by barium vapor deposition.
  • the getter material can also be attached to the getter tube in other ways. orders to be clamped, for example in strip form in Getterrohr or the like.
  • other suitable getter materials come into consideration, for example, porous or powdery oxides, nitrides and carbides and titanium, tantalum, aluminum, zirconium and combinations thereof.
  • the diameter of the opening of the getter tube is equal to or greater than the distance between the outside of the inner tube and the inside of the outer tube defining the distance of the discharge.
  • the retaining disk in order not to impair the exchange of the discharge medium and consequently the getter effect, the retaining disk must have corresponding openings, for example bores, slots or the like.
  • Fig. Ib is a cross-sectional view of the lamp of Fig. Ia along the section line AB.
  • the figures Ia, Ib show in a highly schematic representation of a longitudinal section and a cross section along the section line AB of an embodiment of the dielectric barrier discharge lamp according to the invention 1.
  • the elongated discharge vessel of the lamp 1 consists of an outer tube 2 and an inner tube 3 in coaxial double tube arrangement , whereby the longitudinal axis L of the discharge vessel is defined.
  • the typical length of the outer tube 2 is depending on the application between about 10 and 250 cm.
  • the outer tube 2 has a typical outer diameter of 44 mm and a wall thickness of 2 mm.
  • the inner tube 3 has a typical outer diameter of 20 mm and a wall thickness of 1 mm.
  • Both tubes 2, 3 consist of UV radiation permeable quartz glass.
  • the discharge vessel is closed at its two front sides in such a way that an elongate, annular-gap-shaped discharge space 4 is formed.
  • the discharge vessel has at one end a suitably shaped, annular vessel section 5, which connects there the corresponding ends of the inner and outer tubes.
  • the discharge vessel is closed with a circular vessel section 6, which adjoins there to the corresponding end of the outer tube 2.
  • a pumping tube (not shown) attached, with the help of the discharge space. 4 first evacuated and then filled with 15 kPa xenon as a discharge medium. Then the pump tube is melted off.
  • the inner tube 3 ends at a distance a of about 1 cm in front of the circular vessel section 6 at the end of the outer tube 2.
  • the inner tube 3 consists of a first functional section, which serves to receive an inner electrode 7, the inner electrode tube 8.
  • a second functional section which serves to receive a getter material as 9, the getter tube 10.
  • inner electrode tube 8 and getter tube 10 are separated by a partition wall 11. This partition 11 also closes off the discharge vessel in this region of the inner tube 3 gas-tight.
  • the getter tube 10 is open, so that the discharge medium from the discharge space 4 can get into the getter tube 10 and come into contact with the getter material 9.
  • the getter material 9 is made of barium and is evaporated on the inside of the getter tube 10 including the facing side of the partition wall 11.
  • the length d of the getter tube 10 is about 1 cm.
  • the inner diameter D is about 18 mm and is thus greater than the defined by the distance between the outside of the inner tube 3 and the inside of the outer tube 2 impact distance G, which is about 10 mm.
  • a wire mesh 12 is wound, which forms the outer electrode of the lamp 1.
  • the inner electrode 7 is formed as a slotted metal tube and consists of a 0.1 mm thick metal sheet, preferably VA sheet.
  • the holding plate is provided with suitable openings, for example holes, slots, etc.
  • the radiator can be provided with a base at least at one end, preferably at the end with the getter chamber, or at both ends (not shown).

Abstract

A dielectric barrier discharge lamp (1) configured as a coaxial double tube comprises an inner tube (3), which is disposed coaxially inside an outer tube (2). The inner tube (3) comprises an inner electrode tube (8) provided for receiving the inner electrode (7) and a getter tube (10) provided for receiving getter material (9). The inner electrode tube (8) and getter tube (10) are separated from each other in a gastight manner by a partition (11).

Description

Beschreibung description
Dielektrische Barriere-Entladungslampe in koaxialer Doppelrohranordnung mit GetterDielectric barrier discharge lamp in coaxial double tube arrangement with getter
Technisches GebietTechnical area
Die Erfindung geht aus von einer dielektrischen Barriere- Entladungslampe mit einem EntladungsgefĂ€ĂŸ in koaxialer Doppelrohranordnung, d.h. ein Innenrohr ist koaxial innerhalb eines Außenrohrs angeordnet. Dabei sind Innenrohr und Außenrohr miteinander verbunden und bilden das gasdichte EntladungsgefĂ€ĂŸ. Der vom EntladungsgefĂ€ĂŸ umschlossene Entladungsraum erstreckt sich also zwischen Innen- und Außenrohr und ist mit einem Entladungsmedium gefĂŒllt, das typischerweise ein oder mehrere Edelgase, beispielsweise Xenon enthĂ€lt.The invention is based on a dielectric barrier discharge lamp with a discharge vessel in coaxial double tube arrangement, i. an inner tube is coaxially disposed within an outer tube. Inner tube and outer tube are connected to each other and form the gas-tight discharge vessel. The discharge space enclosed by the discharge vessel thus extends between the inner and outer tubes and is filled with a discharge medium which typically contains one or more noble gases, for example xenon.
Diese Art von Entladungslampen weist typischerweise eine erste Elektrode auf, die innerhalb des Innenrohrs ange- ordnet ist und eine zweite Elektrode, die auf der Außenseite des Außenrohrs angeordnet ist. Beide Elektroden befinden sich somit außerhalb des EntladungsgefĂ€ĂŸes. Es handelt sich also um eine zweiseitig dielektrisch behinderte Entladung.This type of discharge lamp typically has a first electrode disposed inside the inner tube and a second electrode disposed on the outer side of the outer tube. Both electrodes are thus outside the discharge vessel. It is therefore a two-sided dielectrically impeded discharge.
In einer dielektrischen Barriere-Entladung mit z.B. dem Edelgas Xenon als Entladungsmedium werden unter anderem Xenon-Excimere (Xe2*) erzeugt, die bei der RĂŒckkehr vom angeregten Zustand in den Grundzustand elektromagnetische Strahlung mit WellenlĂ€ngen im Bereich um ca. 172 nm emit- tieren. Verunreinigungen, z.B. Sauerstoff oder Wasserstoff, im Entladungsmedium verringern die Effizienz der Nutzstrahlungserzeugung. Zum einen geht ein Teil der elektrischen Anregungsleistung in die unerwĂŒnschte Anre- gung der atomaren und/oder molekularen Bestandteile der Verunreinigungen. Zum anderen bewirken die Verunreinigungen, dass ein Teil der Excimere strahlungslos in den Grundzustand zurĂŒckkehrt.In a dielectric barrier discharge with, for example, the noble gas xenon as the discharge medium, xenon excimers (Xe2 *) are produced which emit electromagnetic radiation with wavelengths in the region of approx. 172 nm when returning from the excited state to the ground state. Impurities, for example oxygen or hydrogen, in the discharge medium reduce the efficiency of the useful radiation generation. On the one hand, part of the electrical excitation power goes into the unwanted stimulus tion of the atomic and / or molecular components of the impurities. On the other hand, the impurities cause some of the excimer to return to the ground state without radiation.
Anwendung findet dieser Lampentyp insbesondere fĂŒr die UV-Bestrahlung in der Prozesstechnik, beispielsweise fĂŒr die OberflĂ€chenreinigung und -aktivierung, Photolytik, Ozonerzeugung, Trinkwasserreinigung, Metallisierung, und UV-Curing. In diesem Zusammenhang ist auch die Bezeich- nung Strahler oder UV-Strahler gebrĂ€uchlich.This type of lamp is used in particular for UV irradiation in process technology, for example for surface cleaning and activation, photolytics, ozone generation, drinking water purification, metallization, and UV curing. In this context, the term emitter or UV emitter is also common.
Stand der TechnikState of the art
Die Schrift EP 0 607 960 Al offenbart eine dielektrische Barriere-Entladungslampe in koaxialer Doppelrohranordnung. Zum Binden von Verunreinigungen ist ein Gettermate- rial entweder in einer einseitigen VerlĂ€ngerung des ring- spaltförmigen Entladungsraumes angeordnet (Fig. 1 - 3), einem flachen, kreisförmigen Fortsatz des EntladungsgefĂ€ĂŸes (Fig. 4) oder in einem separaten GefĂ€ĂŸ (Fig. 5), das mit dem Entladungsraum verbunden ist. In jedem Fall sind Maßnahmen vorgesehen, um zu verhindern, dass das Getter- material unbeabsichtigt in den Entladungsraum gelangt, beispielsweise indem der Getterraum vom Entladungsraum ĂŒber einen verengten GefĂ€ĂŸabschnitt verbunden ist. Problematisch ist allerdings, dass sich aufgrund der rĂ€umlichen NĂ€he des Getterraums zum Entladungsraum parasitĂ€re Entladungen im Bereich des Getterraums ausbilden können. Die parasitĂ€ren Entladungen verschlechtern nĂ€mlich die Effizienz des Strahlers. Darstellung der ErfindungDocument EP 0 607 960 A1 discloses a dielectric barrier discharge lamp in coaxial double tube arrangement. For binding impurities, a getter material is arranged either in a one-sided extension of the annular gap-shaped discharge space (FIGS. 1-3), a flat, circular extension of the discharge vessel (FIG. 4) or in a separate vessel (FIG. 5). which is connected to the discharge space. In any case, measures are provided to prevent the getter material from inadvertently entering the discharge space, for example by connecting the getter space from the discharge space via a narrowed section of vessel. The problem, however, is that parasitic discharges can form in the area of the getter space due to the proximity of the getter space to the discharge space. The parasitic discharges worsen the efficiency of the radiator. Presentation of the invention
Die Aufgabe der vorliegenden Erfindung ist es, eine dielektrische Barriere-Entladungslampe in koaxialer Doppelrohranordnung mit verbesserter Anordnung eines Getterma- terials bereitzustellen.The object of the present invention is to provide a dielectric barrier discharge lamp in coaxial double tube arrangement with improved arrangement of a getter material.
Diese Aufgabe wird gelöst durch eine dielektrische Barriere-Entladungslampe in koaxialer Doppelrohranordnung mit einem EntladungsgefĂ€ĂŸ, das ein Außenrohr und ein Innenrohr umfasst, wobei das Innenrohr koaxial innerhalb des Außenrohrs angeordnet ist, das Innenrohr und das Au- ßenrohr gasdicht miteinander verbunden sind, wodurch zwischen Innen- und Außenrohr ein mit einem Entladungsmedium gefĂŒllter Entladungsraum gebildet ist, einer Außenelektrode, die auf der Außenseite des Außenrohrs angeordnet ist, einer Innenelektrode, die innerhalb des Innenrohrs angeordnet ist, einem Gettermaterial, das mit dem Entladungsmedium in Kontakt steht, dadurch gekennzeichnet, dass das Innenrohr kĂŒrzer als das Außenrohr ist, das Innenrohr und das Außenrohr an ihrem jeweiligen einen Ende miteinander gasdicht verbunden sind, das Außenrohr an seinem anderen Ende gasdicht verschlossen ist, das in das Außenrohr hineinragende Innenrohr Folgendes umfasst: einen ersten Rohrabschnitt - das Innenelektrodenrohr -, in dem die Innenelektrode angeordnet ist, einen zweiten Rohrabschnitt - das Getterrohr -, in dem das Gettermate- rial angeordnet ist, eine Trennwand, die die beiden Rohrabschnitte gasdicht voneinander trennt.This object is achieved by a dielectric barrier discharge lamp in coaxial double tube arrangement with a discharge vessel comprising an outer tube and an inner tube, wherein the inner tube coaxially disposed within the outer tube, the inner tube and the outer ßenrohr gas-tightly connected to each other, whereby between inside and outer tube is formed a discharge space filled with a discharge medium, an outer electrode disposed on the outer side of the outer tube, an inner electrode disposed inside the inner tube, a getter material in contact with the discharge medium, characterized in that the Inner tube is shorter than the outer tube, the inner tube and the outer tube are gas-tightly connected at their respective one end, the outer tube is gas-tightly sealed at its other end, which projects into the outer tube inner tube comprising: a first pipe section - the Innenelek in which the inner electrode is arranged, a second tube section - the getter tube - in which the getter material is arranged, a dividing wall which separates the two tube sections in a gastight manner from one another.
Besonders vorteilhafte Ausgestaltungen finden sich in den abhĂ€ngigen AnsprĂŒchen. Der Grundgedanke der Erfindung besteht darin, dass der Getterraum auf einen achsnahen Bereich beschrĂ€nkt ist, d.h. nicht in der VerlĂ€ngerung des ringspaltförmigen Entladungsraums angeordnet ist. Zu diesem Zweck schließt sich erfindungsgemĂ€ĂŸ ein fĂŒr die Aufnahme des Gettermate- rials vorgesehenes Getterrohr an das fĂŒr die Aufnahme der Innenelektrode vorgesehene Innenelektrodenrohr koaxial an, ist von diesem aber durch eine Trennwand gasdicht getrennt. Dadurch ist der Weg vom Gettermaterial zu den Au- ßenelektroden relativ lang. Durch den langen Weg zwischen Gettermaterial und Elektroden werden parasitĂ€re Entladungen vermieden oder zumindest deutlich reduziert. Durch die Trennwand zwischen Getterrohr und Innenelektrodenrohr ist der durch das Getterrohr gebildete Getterraum und folglich auch der mit dem Getterraum ĂŒber die Getterroh- röffnung in Verbindung stehende Entladungsraum nach Außen gasdicht abgeschlossen.Particularly advantageous embodiments can be found in the dependent claims. The basic idea of the invention is that the getter space is limited to a region close to the axis, that is, not arranged in the extension of the annular gap-shaped discharge space. For this purpose, according to the invention, a getter tube provided for receiving the getter material coaxially adjoins the inner electrode tube provided for receiving the inner electrode, but is separated from it gas-tight by a partition wall. As a result, the way from the getter material to the outer electrodes is relatively long. Due to the long path between getter material and electrodes parasitic discharges are avoided or at least significantly reduced. Due to the partition wall between the getter tube and the inner electrode tube, the getter space formed by the getter tube and consequently also the discharge space communicating with the getter space via the getter tube opening are closed to the outside in a gas-tight manner.
Das Getterrohr kann dadurch ausgebildet sein, dass das Innenrohr ĂŒber die LĂ€nge der Innenelektrode hinaus ver- lĂ€ngert ist. Dabei ist der fĂŒr die Aufnahme des Getterma- terials vorgesehene Rohrabschnitt vom Rest des Innenrohrs mittels einer separat eingesetzten und eingeschweißten Trennwand gasdicht getrennt. Mit anderen Worten sind in diesem Fall das den Getterraum bildende Getterrohr und das die Innenelektrode aufnehmende Innenelektrodenrohr funktional unterschiedliche und durch die Trennwand getrennte Abschnitte des selben einteiligen Innenrohrs.The getter tube can be formed in that the inner tube is extended beyond the length of the inner electrode. In this case, the tube section provided for receiving the getter material is separated in a gastight manner from the remainder of the inner tube by means of a separately inserted and welded dividing wall. In other words, in this case, the getter tube forming the getter space and the inner electrode tube receiving the inner electrode are functionally different and separated by the partition portions of the same one-piece inner tube.
Alternativ kann das Getterrohr durch ein separates Rohr ausgebildet sein, das sich an das in das Außenrohr hin- einragende Ende des Innenelektrodenrohrs anschließt, d.h. das Innenrohr umfasst in diesem Fall zwei separate Rohr- teile: nĂ€mlich das Innenelektrodenrohr und das Getter- rohr. Die die beiden Rohrteile gasdicht trennende Trennwand ist durch ein entsprechendes gasdicht verschlossenes Ende einer der beiden Rohrteile ausgebildet. D.h. die Trennwand ist beispielsweise durch das gasdicht verschlossene Ende des Innenelektrodenrohrs (8) ausgebildet, an das das Getterrohr angesetzt und damit gasdicht verbunden wird. Es kann aber auch umgekehrt erst das Getterrohr an einem Ende verschlossen und dann mit diesem ver- schlossenen Ende an das offene Ende des Innenelektrodenrohrs angesetzt und verbunden werden.Alternatively, the getter tube may be formed by a separate tube which adjoins the end of the inner electrode tube projecting into the outer tube, ie the inner tube in this case comprises two separate tube tubes. parts: namely the inner electrode tube and the getter tube. The two tube parts gas-tight separating partition is formed by a corresponding gas-tight closed end of one of the two tube parts. That is, the partition wall is formed for example by the gas-tight closed end of the inner electrode tube (8), to which the getter tube is attached and thus connected gas-tight. However, conversely, the getter tube can first be closed off at one end and then attached and connected to the open end of the inner electrode tube with this closed end.
Außerdem können der Durchmesser des Innenelektrodenrohrs und der Durchmesser des Getterrohrs gleich oder unterschiedlich sein. Zur sicheren Anordnung des Gettermateri- als kann es auch vorteilhaft sein, das Getterrohr in Richtung Öffnung zu verjĂŒngen.In addition, the diameter of the inner electrode tube and the diameter of the getter tube may be the same or different. For safe arrangement of the getter as it may also be advantageous to taper the getter tube in the direction of opening.
Die LĂ€nge des Getterrohrs in Achsrichtung ist so abgestimmt, dass eine ausreichende Menge Gettermaterial aufgenommen werden kann. Andererseits sollte das Getterrohr nicht zu lang sein, da sonst der strahlende Abschnitt - dieser erstreckt sich nur auf den Bereich mit der Innenelektrode - bezogen auf die GesamtlĂ€nge des Strahlers zu sehr reduziert wird. In der Praxis haben sich, je nach GesamtlĂ€nge des Strahlers, fĂŒr das Getterrohr LĂ€ngen im Bereich zwischen ca. 0,5 cm und 5 cm als geeignet erwiesen .The length of the getter tube in the axial direction is adjusted so that a sufficient amount of getter material can be absorbed. On the other hand, the getter tube should not be too long, otherwise the radiating portion - this extends only to the area with the inner electrode - based on the total length of the radiator is reduced too much. In practice, depending on the total length of the radiator, lengths in the range between approximately 0.5 cm and 5 cm have proven suitable for the getter tube.
Das Gettermaterial kann beispielsweise zumindest auf einen Teil der InnenflÀche des Getterrohrs aufgebracht sein, z.B. indem Barium aufgedampft ist. Das Gettermate- rial kann aber auch in anderer Weise im Getterrohr ange- ordnet sein, beispielsweise in Streifenform im Getterrohr eingeklemmt oder Àhnliches. Neben Barium kommen auch andere geeignete Gettermaterialien in Betracht, beispielsweise poröse oder pulverige Oxide, Nitride und Carbide sowie Titan, Tantal, Aluminium, Zirkonium und Kombinationen davon.The getter material may for example be applied to at least a part of the inner surface of the getter tube, for example by barium vapor deposition. The getter material can also be attached to the getter tube in other ways. orders to be clamped, for example in strip form in Getterrohr or the like. In addition to barium, other suitable getter materials come into consideration, for example, porous or powdery oxides, nitrides and carbides and titanium, tantalum, aluminum, zirconium and combinations thereof.
Um den fĂŒr die Wirkung des Gettermaterials notwendigen Austausch des Entladungsmediums zwischen Entladungsraum und axialem Getterraum zu fördern, ist vorzugsweise der Durchmesser der Öffnung des Getterrohrs gleich groß oder grĂ¶ĂŸer als der die Schlagweite der Entladung definierende Abstand zwischen der Außenseite des Innenrohrs und der Innenseite des Außenrohrs.In order to promote the exchange of the discharge medium between the discharge space and the axial getter space, which is necessary for the effect of the getter material, preferably the diameter of the opening of the getter tube is equal to or greater than the distance between the outside of the inner tube and the inside of the outer tube defining the distance of the discharge.
Außerdem kann es insbesondere bei langen Rohren zur Un- terdrĂŒckung von Schwingungen sowie zur Stabilisierung des Innenrohrs vorteilhaft sein, das freie Ende des Innenrohrs, beispielsweise im Bereich des Getterrohrs, mit einem geeigneten Mittel, z.B. einer passenden Haltescheibe zwischen Innen- und Außenrohr abzustĂŒtzen. Um den Aus- tausch des Entladungsmediums und folglich die Getterwir- kung nicht zu beeintrĂ€chtigen, muss die Haltescheibe aber entsprechende Öffnungen, beispielsweise Bohrungen, Schlitze oder Ă€hnliches aufweisen.In addition, it may be advantageous, in particular for long tubes to suppress vibrations and to stabilize the inner tube, to connect the free end of the inner tube, for example in the region of the getter tube, with a suitable means, e.g. support a matching retaining washer between inner and outer tube. However, in order not to impair the exchange of the discharge medium and consequently the getter effect, the retaining disk must have corresponding openings, for example bores, slots or the like.
Kurze Beschreibung der ZeichnungenBrief description of the drawings
Im Folgenden soll die Erfindung anhand eines AusfĂŒhrungs- beispiels nĂ€her erlĂ€utert werden. Die Figuren zeigen:In the following, the invention will be explained in more detail using an exemplary embodiment. The figures show:
Fig. Ia eine LĂ€ngsschnittsdarstellung einer erfindungsgemĂ€ĂŸen dielektrischen Barriere-Entladungslampe, Fig. Ib eine Querschnittsdarstellung der Lampe aus Fig. Ia entlang der Schnittlinie AB.1a is a longitudinal sectional view of a dielectric barrier discharge lamp according to the invention, Fig. Ib is a cross-sectional view of the lamp of Fig. Ia along the section line AB.
Bevorzugte AusfĂŒhrung der ErfindungPreferred embodiment of the invention
In den Figuren werden gleiche oder funktionsgleiche Elemente mit den gleichen Bezugszeichen versehen.In the figures, identical or functionally identical elements are provided with the same reference numerals.
Die Figuren Ia, Ib zeigen in stark schematisierter Darstellung einen LĂ€ngsschnitt bzw. einen Querschnitt lĂ€ngs der Schnittlinie AB eines AusfĂŒhrungsbeispiels der erfindungsgemĂ€ĂŸen dielelektrischen Barriere-Entladungslampe 1. Das lĂ€ngliche EntladungsgefĂ€ĂŸ der Lampe 1 besteht aus ei- nem Außenrohr 2 und einem Innenrohr 3 in koaxialer Doppelrohranordnung, wodurch die LĂ€ngsachse L des EntladungsgefĂ€ĂŸes definiert ist. Die typische LĂ€nge des Außenrohrs 2 betrĂ€gt je nach Anwendung zwischen ca. 10 und 250 cm. Das Außenrohr 2 hat einen typischen Außendurch- messer von 44 mm und eine WandstĂ€rke von 2 mm. Das Innenrohr 3 hat einen typischen Außendurchmesser von 20 mm und eine WandstĂ€rke von 1 mm. Beide Rohre 2, 3 bestehen aus UV-Strahlung durchlĂ€ssigem Quarzglas. Außerdem ist das EntladungsgefĂ€ĂŸ an seinen beiden Stirnseiten derart ver- schlössen, dass ein lĂ€nglicher, ringspaltförmiger Entladungsraum 4 gebildet ist. Zu diesem Zweck weist das EntladungsgefĂ€ĂŸ an einem Ende einen geeignet geformten, ringartigen GefĂ€ĂŸabschnitt 5 auf, der dort die korrespondierenden Enden von Innen- und Außenrohr verbindet. An seinem anderen Ende ist das EntladungsgefĂ€ĂŸ mit einem kreisförmigen GefĂ€ĂŸabschnitt 6 verschlossen, der sich dort an das entsprechende Ende des Außenrohrs 2 anschließt. Außerdem ist dort ein Pumprohr (nicht dargestellt) angesetzt, mit dessen Hilfe der Entladungsraum 4 zunĂ€chst evakuiert und anschließend mit 15 kPa Xenon als Entladungsmedium gefĂŒllt wird. Danach wird das Pumprohr abgeschmolzen. Das Innenrohr 3 endet im Abstand a von ca. 1 cm vor dem kreisförmigen GefĂ€ĂŸabschnitt 6 am Ende des Außenrohrs 2. Das Innenrohr 3 besteht aus einem ersten funktionalen Abschnitt, der zur Aufnahme einer Innenelektrode 7 dient, dem Innenelektrodenrohr 8. An dieses Innenelektrodenrohr 8 schließt sich ein zweiter funktionaler Abschnitt an, der zur Aufnahme eines Gettermateri- als 9 dient, dem Getterrohr 10. Innenelektrodenrohr 8 und Getterrohr 10 sind durch eine Trennwand 11 getrennt. Diese Trennwand 11 schließt außerdem das EntladungsgefĂ€ĂŸ in diesem Bereich des Innenrohrs 3 gasdicht ab. Auf der anderen Seite ist das Getterrohr 10 offen, so dass das Ent- ladungsmedium aus dem Entladungsraum 4 in das Getterrohr 10 gelangen und mit dem Gettermaterial 9 in Kontakt kommen kann. Das Gettermaterial 9 besteht aus Barium und ist auf die Innenseite des Getterrohrs 10 einschließlich der zugewandten Seite der Trennwand 11 aufgedampft. Die LĂ€nge d des Getterrohrs 10 betrĂ€gt ca. 1 cm. Der Innendurchmesser D betrĂ€gt ca. 18 mm und ist damit grĂ¶ĂŸer als die durch den Abstand zwischen der Außenseite des Innenrohrs 3 und der Innenseite des Außenrohrs 2 definierte Schlagweite G, die ca. 10 mm betrĂ€gt. Auf der Außenseite der Wand des Außenrohrs 2 ist ein Drahtnetz 12 aufgezogen, das die Außenelektrode der Lampe 1 bildet. Die Innenelektrode 7 ist als geschlitztes Metallrohr ausgebildet und besteht aus einem 0,1 mm dicken Metallblech, vorzugsweise VA-Blech.The figures Ia, Ib show in a highly schematic representation of a longitudinal section and a cross section along the section line AB of an embodiment of the dielectric barrier discharge lamp according to the invention 1. The elongated discharge vessel of the lamp 1 consists of an outer tube 2 and an inner tube 3 in coaxial double tube arrangement , whereby the longitudinal axis L of the discharge vessel is defined. The typical length of the outer tube 2 is depending on the application between about 10 and 250 cm. The outer tube 2 has a typical outer diameter of 44 mm and a wall thickness of 2 mm. The inner tube 3 has a typical outer diameter of 20 mm and a wall thickness of 1 mm. Both tubes 2, 3 consist of UV radiation permeable quartz glass. In addition, the discharge vessel is closed at its two front sides in such a way that an elongate, annular-gap-shaped discharge space 4 is formed. For this purpose, the discharge vessel has at one end a suitably shaped, annular vessel section 5, which connects there the corresponding ends of the inner and outer tubes. At its other end, the discharge vessel is closed with a circular vessel section 6, which adjoins there to the corresponding end of the outer tube 2. In addition, there is a pumping tube (not shown) attached, with the help of the discharge space. 4 first evacuated and then filled with 15 kPa xenon as a discharge medium. Then the pump tube is melted off. The inner tube 3 ends at a distance a of about 1 cm in front of the circular vessel section 6 at the end of the outer tube 2. The inner tube 3 consists of a first functional section, which serves to receive an inner electrode 7, the inner electrode tube 8. At this inner electrode tube 8 closes a second functional section, which serves to receive a getter material as 9, the getter tube 10. inner electrode tube 8 and getter tube 10 are separated by a partition wall 11. This partition 11 also closes off the discharge vessel in this region of the inner tube 3 gas-tight. On the other hand, the getter tube 10 is open, so that the discharge medium from the discharge space 4 can get into the getter tube 10 and come into contact with the getter material 9. The getter material 9 is made of barium and is evaporated on the inside of the getter tube 10 including the facing side of the partition wall 11. The length d of the getter tube 10 is about 1 cm. The inner diameter D is about 18 mm and is thus greater than the defined by the distance between the outside of the inner tube 3 and the inside of the outer tube 2 impact distance G, which is about 10 mm. On the outside of the wall of the outer tube 2, a wire mesh 12 is wound, which forms the outer electrode of the lamp 1. The inner electrode 7 is formed as a slotted metal tube and consists of a 0.1 mm thick metal sheet, preferably VA sheet.
Insbesondere bei relativ langen Rohren kann es zur Vermeidungen von Schwingungen des Innenrohrs vorgesehen sein, das Innenrohr, bevorzugt im Bereich des Getter- rohrs, mit Hilfe einer passenden Haltescheibe abzustĂŒtzen (nicht dargestellt) . Dazu weist die Haltescheibe eine zentrische Bohrung auf, damit sie auf das Innenrohr passt. Der Außendurchmesser der Haltescheibe ist außerdem so bemessen, dass die Haltescheibe gerade zwischen Innen- und Außenrohr passt. Um den Austausch des Entladungsmediums zwischen Entladungsraum und Getterraum und folglich die Getterwirkung nicht zu beeintrĂ€chtigen, ist die HaI- tescheibe mit geeigneten Öffnungen, beispielsweise Bohrungen, Schlitzen etc. versehen.Especially with relatively long pipes, it can be provided to avoid vibrations of the inner tube to support the inner tube, preferably in the area of the getter tube, with the aid of a suitable holding disc (not shown). For this purpose, the retaining disc has a central bore, so that it fits on the inner tube. The outer diameter of the retaining washer is also sized so that the retaining washer just fits between the inner and outer tube. In order not to impair the exchange of the discharge medium between the discharge space and the getter space and consequently the getter effect, the holding plate is provided with suitable openings, for example holes, slots, etc.
Zum Einbau in eine Prozesskammer kann der Strahler zumindest an einem Ende, vorzugsweise an dem Ende mit der Get- terkammer, oder auch an beiden Enden jeweils mit einem Sockel versehen sein (nicht dargestellt) . For installation in a process chamber, the radiator can be provided with a base at least at one end, preferably at the end with the getter chamber, or at both ends (not shown).

Claims

AnsprĂŒche claims
1. Dielektrische Barriere-Entladungslampe (1) in koaxialer Doppelrohranordnung mit o einem EntladungsgefĂ€ĂŸ, das ein Außenrohr (2) und ein Innenrohr (3) umfasst, wobei1. Dielectric barrier discharge lamp (1) in coaxial double tube arrangement with o a discharge vessel comprising an outer tube (2) and an inner tube (3), wherein
- das Innenrohr (3) koaxial innerhalb des Außenrohrs (2) angeordnet ist,- The inner tube (3) is arranged coaxially within the outer tube (2),
- das Innenrohr (3) und das Außenrohr (2) gasdicht miteinander verbunden sind, wodurch zwi- sehen Innen- und Außenrohr ein mit einem Entladungsmedium gefĂŒllter Entladungsraum (4) gebildet ist, o einer Außenelektrode (12), die auf der Außenseite des Außenrohrs (2) angeordnet ist, o einer Innenelektrode (7), die innerhalb des Innenrohrs (2) angeordnet ist, o einem Gettermaterial (9), das mit dem Entladungsmedium in Kontakt steht, dadurch gekennzeichnet, dass o das Innenrohr (3) kĂŒrzer als das Außenrohr (2) ist, o das Innenrohr (3) und das Außenrohr an ihrem jeweiligen einen Ende miteinander gasdicht verbunden sind, o das Außenrohr (2) an seinem anderen Ende gasdicht verschlossen ist, o das in das Außenrohr (2) hineinragende Innenrohr (3) Folgendes umfasst: - einen ersten Rohrabschnitt - das Innenelekt- rodenrohr (8) -, in dem die Innenelektrode (7) angeordnet ist,- The inner tube (3) and the outer tube (2) are gas-tightly interconnected, whereby between see inner and outer tube filled with a discharge medium discharge space (4) is formed, o an outer electrode (12) on the outside of the outer tube (2), o an inner electrode (7) disposed within the inner tube (2), o a getter material (9) in contact with the discharge medium, characterized in that o the inner tube (3) is shorter than the outer tube (2) is o, the inner tube (3) and the outer tube are gas-tightly connected to each other at their respective one end, o the outer tube (2) is gas-tightly closed at its other end, o the inner tube projecting into the outer tube (2) (3) The following includes: a first tube section - the inner electrode tube (8) - in which the inner electrode (7) is arranged,
- einen zweiten Rohrabschnitt - das Getter- röhr (10) -, in dem das Gettermaterial (9) angeordnet ist,a second tube section, the getter tube (10), in which the getter material (9) is arranged,
- eine Trennwand (11), die die beiden Rohrabschnitte gasdicht voneinander trennt.- A partition (11) which separates the two pipe sections gas-tight from each other.
2. Lampe nach Anspruch 1, wobei das Innenrohr (3) mit den beiden Rohrabschnitten Innenelektrodenrohr (8) und Getterrohr (10) einteilig ist.2. Lamp according to claim 1, wherein the inner tube (3) with the two pipe sections inner electrode tube (8) and getter tube (10) is in one piece.
3. Lampe nach Anspruch 1, wobei das Getterrohr (10) durch ein separates Rohr ausgebildet ist, das sich an das in das Außenrohr (2) hineinragende Ende des In- nenelektrodenrohrs (8) koaxial anschließt und wobei die Trennwand (11) durch das entsprechende gasdicht verschlossene Ende des Getterrohrs (10) oder des In- nenelektrodenrohrs (8) ausgebildet ist.3. A lamp according to claim 1, wherein the getter tube (10) is formed by a separate tube coaxially adjoining the end of the inner electrode tube (8) projecting into the outer tube (2) and wherein the dividing wall (11) passes through the corresponding gas-tight closed end of the getter tube (10) or of the inner electrode tube (8) is formed.
4. Lampe nach einem der vorstehenden AnsprĂŒche, wobei der Durchmesser der Öffnung (D) des Getterrohrs (10) gleich groß oder grĂ¶ĂŸer ist als der die Schlagweite (G) der Entladung definierende Abstand zwischen der Außenseite des Innenrohrs (3) und der Innenseite des Außenrohrs (2) . 4. Lamp according to one of the preceding claims, wherein the diameter of the opening (D) of the getter tube (10) is equal to or greater than the gap (G) of the discharge defining distance between the outside of the inner tube (3) and the inside of the Outer tube (2).
5. Lampe nach einem der vorstehenden AnsprĂŒche, wobei zumindest ein Teil der InnenflĂ€che des Getter- rohrs (10) mit Gettermaterial versehen ist.5. Lamp according to one of the preceding claims, wherein at least a part of the inner surface of the getter tube (10) is provided with getter material.
6. Lampe nach einem der vorstehenden AnsprĂŒche, wobei die Durchmesser des Innenelektrodenrohrs (8) und des6. Lamp according to one of the preceding claims, wherein the diameter of the inner electrode tube (8) and of the
Getterrohrs (10) unterschiedlich sind.Getter tube (10) are different.
7. Lampe nach einem der vorstehenden AnsprĂŒche, wobei die LĂ€nge des Getterrohrs (10) in LĂ€ngsachsrichtung des EntladungsgefĂ€ĂŸes im Bereich zwischen 0,5 cm und 5 cm liegt.7. Lamp according to one of the preceding claims, wherein the length of the getter tube (10) in the longitudinal axis of the discharge vessel in the range between 0.5 cm and 5 cm.
8. Lampe nach einem der vorstehenden AnsprĂŒche, wobei das Innenrohr mit Hilfe eines Haltemittels abgestĂŒtzt ist.8. Lamp according to one of the preceding claims, wherein the inner tube is supported by means of a holding means.
9. Lampe nach Anspruch 8, wobei das Haltemittel im Be- reich des Getterrohrs angeordnet ist.9. The lamp according to claim 8, wherein the holding means is arranged in the region of the getter tube.
10. Lampe nach einem der AnsprĂŒche 8 oder 9, wobei das10. Lamp according to one of claims 8 or 9, wherein the
Haltemittel eine ringförmige Haltescheibe ist, die sich zwischen der Außenseite des Innenrohrs und der Innenseite des Außenrohrs erstreckt.Holding means is an annular retaining washer which extends between the outside of the inner tube and the inside of the outer tube.
11. Lampe nach Anspruch 10, wobei die Haltescheibe neben einer zentrischen Bohrung mindestens eine weitere Öffnung aufweist.11. The lamp according to claim 10, wherein the retaining disk in addition to a central bore has at least one further opening.
12. Lampe nach einem der vorstehenden AnsprĂŒche, wobei das Gettermaterial die folgenden Elemente einzeln oder in Kombination umfasst: poröse oder pulverige Oxide, Nitride und Carbide sowie Barium, Titan, Tantal, Aluminium, Zirkonium. 12. A lamp according to any one of the preceding claims, wherein the getter material, the following elements individually or in combination comprises: porous or powdery oxides, nitrides and carbides and barium, titanium, tantalum, aluminum, zirconium.
EP08775080A 2008-07-15 2008-07-15 Dielectric barrier discharge lamp configured as a coaxial double tube having a getter Active EP2297772B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2008/059220 WO2010006642A1 (en) 2008-07-15 2008-07-15 Dielectric barrier discharge lamp configured as a coaxial double tube having a getter

Publications (2)

Publication Number Publication Date
EP2297772A1 true EP2297772A1 (en) 2011-03-23
EP2297772B1 EP2297772B1 (en) 2012-02-15

Family

ID=39892322

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08775080A Active EP2297772B1 (en) 2008-07-15 2008-07-15 Dielectric barrier discharge lamp configured as a coaxial double tube having a getter

Country Status (8)

Country Link
US (1) US8174191B2 (en)
EP (1) EP2297772B1 (en)
JP (1) JP5165108B2 (en)
KR (1) KR101216481B1 (en)
CN (1) CN102084456B (en)
AT (1) ATE545947T1 (en)
TW (1) TWI467630B (en)
WO (1) WO2010006642A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8399869B2 (en) * 2008-12-11 2013-03-19 Osram Gesellschaft Mit Beschraenkter Haftung UV luminaire having a plurality of UV lamps, particularly for technical product processing
WO2012127484A1 (en) 2011-03-24 2012-09-27 Yogesh Chunilal Rathod A system and method for managing, monitoring, tracking, updating, measuring and facilitate maintaining user status & state
US9368338B2 (en) * 2011-06-16 2016-06-14 Mocon, Inc. Gas discharge lamp with an axially extending strip of getter and method of manufacture
JP6365096B2 (en) * 2014-08-07 2018-08-01 ă‚Šă‚·ă‚Ș電機æ ȘćŒäŒšç€Ÿ UV irradiation type ozone generator
JP6662238B2 (en) * 2015-10-19 2020-03-11 æ±èŠăƒ©ă‚€ăƒ†ăƒƒă‚Żæ ȘćŒäŒšç€Ÿ Packing structure of multiple tube discharge lamp and package of multiple tube discharge lamp
USD797984S1 (en) 2016-03-24 2017-09-19 Mocon, Inc. UV lamp
US11037778B1 (en) 2021-01-14 2021-06-15 Mocon, Inc. UV lamp
WO2023217824A1 (en) 2022-05-12 2023-11-16 Signify Holding B.V. Disinfection lamp with reflector

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06994A (en) * 1992-06-18 1994-01-11 Tokyo Electric Co Ltd Line head
EP0607960B2 (en) 1993-01-20 2001-05-16 Ushiodenki Kabushiki Kaisha Dielectric barrier discharge lamp
JP2775695B2 (en) * 1993-05-27 1998-07-16 ă‚Šă‚·ă‚Ș電機æ ȘćŒäŒšç€Ÿ Dielectric barrier discharge lamp
TW324106B (en) * 1993-09-08 1998-01-01 Ushio Electric Inc Dielectric barrier layer discharge lamp
JP2775699B2 (en) * 1994-09-20 1998-07-16 ă‚Šă‚·ă‚Ș電機æ ȘćŒäŒšç€Ÿ Dielectric barrier discharge lamp
JP3319330B2 (en) * 1997-04-03 2002-08-26 ă‚Šă‚·ă‚Ș電機æ ȘćŒäŒšç€Ÿ Discharge lamp
JP2000173554A (en) * 1998-12-01 2000-06-23 Md Komu:Kk Dielectric barrier discharge lamp
JP3666407B2 (en) * 2001-04-19 2005-06-29 ă‚Šă‚·ă‚Ș電機æ ȘćŒäŒšç€Ÿ Dielectric barrier discharge lamp
JP2006228563A (en) * 2005-02-17 2006-08-31 Ushio Inc Excimer lamp
JP2006244898A (en) * 2005-03-04 2006-09-14 Ushio Inc Excimer lamp
JP5303905B2 (en) * 2007-11-06 2013-10-02 ă‚Šă‚·ă‚Ș電機æ ȘćŒäŒšç€Ÿ Excimer lamp

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2010006642A1 *

Also Published As

Publication number Publication date
CN102084456A (en) 2011-06-01
JP2011528157A (en) 2011-11-10
EP2297772B1 (en) 2012-02-15
KR101216481B1 (en) 2013-01-09
US20110101858A1 (en) 2011-05-05
CN102084456B (en) 2012-11-28
TW201009890A (en) 2010-03-01
WO2010006642A1 (en) 2010-01-21
JP5165108B2 (en) 2013-03-21
ATE545947T1 (en) 2012-03-15
KR20110041523A (en) 2011-04-21
TWI467630B (en) 2015-01-01
US8174191B2 (en) 2012-05-08

Similar Documents

Publication Publication Date Title
EP2297772B1 (en) Dielectric barrier discharge lamp configured as a coaxial double tube having a getter
EP1307898A2 (en) Flash lamp and flash lamp structure
EP1849178B1 (en) Dielectric barrier discharge lamp configured as a double tube
EP1506567A2 (en) Dielectric barrier discharge lamp with a base
EP0572835B1 (en) Low-pressure mercury vapor discharge lamp
EP1334510B1 (en) Dielectric-barrier discharge lamp
DE102009025667A1 (en) lamp unit
WO2008135076A1 (en) Dielectric barrier discharge lamp configured as a double tube
EP1088335A1 (en) Discharge lamp with base
DE112008003418B4 (en) Dielectric barrier discharge lamp with retaining washer
WO2009068073A1 (en) Dielectric barrier discharge lamp configured as a double tube
EP2909856B1 (en) Uv light source having combined ionization and formation of excimers
DE102014207688A1 (en) Apparatus for the photochemical treatment of contaminated water
DE10336088A1 (en) UV lamp with tubular discharge vessel
DE102012209078B4 (en) Flash lamp with prismatic lamp body
WO2013017304A1 (en) High-pressure discharge lamp having a starting aid
DE102012107468B4 (en) Gas discharge lamp with a jacket tube and a lamp tube supported therein
DE102009030310A1 (en) Dielectric barrier discharge lamp with discharge spaces
DE102010003352A1 (en) Dielectric barrier discharge lamp with retaining washer
DE1539134C (en) Ion vacuum pump or ionization manometer
EP2399267A1 (en) Reflector lamp and associated production method
WO2008089838A1 (en) High-pressure discharge lamp
DE102009054670A1 (en) Electrode i.e. anode, for use in e.g. xenon- or mercury-vapor short-arc lamp, has core extending in longitudinal direction and partially surrounded by cylindrical shell that is made of material, where material consists of carbon
DE19519518A1 (en) Gas discharge vessel for low pressure discharge lamps
DE102013222577A1 (en) High intensity discharge lamp for general lighting or for photo-optical purposes, has ignition aid placed in outer envelope and extends from each pole of power supply towards frame wire, where ignition aid has local field amplifier

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20101124

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA MK RS

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

DAX Request for extension of the european patent (deleted)
RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: OSRAM AG

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 545947

Country of ref document: AT

Kind code of ref document: T

Effective date: 20120315

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502008006422

Country of ref document: DE

Effective date: 20120419

REG Reference to a national code

Ref country code: NL

Ref legal event code: VDEP

Effective date: 20120215

LTIE Lt: invalidation of european patent or patent extension

Effective date: 20120215

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120515

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120215

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120215

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120615

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120215

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120215

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120516

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120615

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120215

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120215

REG Reference to a national code

Ref country code: IE

Ref legal event code: FD4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120215

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120215

Ref country code: IE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120215

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120215

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120215

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120215

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120215

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120215

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120215

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120215

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20121116

BERE Be: lapsed

Owner name: OSRAM A.G.

Effective date: 20120731

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120731

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502008006422

Country of ref document: DE

Effective date: 20121116

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20120715

REG Reference to a national code

Ref country code: DE

Ref legal event code: R081

Ref document number: 502008006422

Country of ref document: DE

Owner name: OSRAM GMBH, DE

Free format text: FORMER OWNER: OSRAM AG, 81543 MUENCHEN, DE

Effective date: 20130205

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20130329

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120526

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120731

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120731

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120715

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120731

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120731

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120215

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120515

REG Reference to a national code

Ref country code: DE

Ref legal event code: R081

Ref document number: 502008006422

Country of ref document: DE

Owner name: OSRAM GMBH, DE

Free format text: FORMER OWNER: OSRAM GMBH, 81543 MUENCHEN, DE

Effective date: 20130823

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120215

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120715

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20080715

REG Reference to a national code

Ref country code: AT

Ref legal event code: MM01

Ref document number: 545947

Country of ref document: AT

Kind code of ref document: T

Effective date: 20130715

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130715

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20230727

Year of fee payment: 16