EP2297772B1 - Dielectric barrier discharge lamp configured as a coaxial double tube having a getter - Google Patents

Dielectric barrier discharge lamp configured as a coaxial double tube having a getter Download PDF

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Publication number
EP2297772B1
EP2297772B1 EP08775080A EP08775080A EP2297772B1 EP 2297772 B1 EP2297772 B1 EP 2297772B1 EP 08775080 A EP08775080 A EP 08775080A EP 08775080 A EP08775080 A EP 08775080A EP 2297772 B1 EP2297772 B1 EP 2297772B1
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EP
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Prior art keywords
tube
getter
lamp according
discharge
outer tube
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German (de)
French (fr)
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EP2297772A1 (en
Inventor
Oliver Rosier
Axel Hombach
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Osram GmbH
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Osram GmbH
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/24Means for obtaining or maintaining the desired pressure within the vessel
    • H01J61/26Means for absorbing or adsorbing gas, e.g. by gettering; Means for preventing blackening of the envelope
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/30Vessels; Containers
    • H01J61/34Double-wall vessels or containers

Definitions

  • the invention is based on a dielectric barrier discharge lamp with a discharge vessel in coaxial double tube arrangement, i. an inner tube is coaxially disposed within an outer tube. Inner tube and outer tube are connected to each other and form the gas-tight discharge vessel.
  • the discharge space enclosed by the discharge vessel thus extends between the inner and outer tubes and is filled with a discharge medium which typically contains one or more noble gases, for example xenon.
  • This type of discharge lamp typically has a first electrode disposed within the inner tube and a second electrode disposed on the outer surface of the outer tube. Both electrodes are thus outside the discharge vessel. It is therefore a two-sided dielectrically impeded discharge.
  • xenon excimers In a dielectric barrier discharge with, for example, the noble gas xenon as the discharge medium, xenon excimers (Xe 2 *) are generated which emit electromagnetic radiation with wavelengths in the region of about 172 nm when returning from the excited state to the ground state.
  • Impurities for example oxygen or hydrogen, in the discharge medium reduce the efficiency of the useful radiation generation.
  • part of the electrical excitation power goes into the unwanted excitation the atomic and / or molecular components of the impurities.
  • the impurities cause some of the excimer to return to the ground state without radiation.
  • This type of lamp is used in particular for UV irradiation in process technology, for example for surface cleaning and activation, photolytics, ozone generation, drinking water purification, metallization, and UV curing.
  • the term radiator or UV lamps is also common.
  • the font EP 0 607 960 A1 discloses a dielectric barrier discharge lamp in coaxial double tube arrangement.
  • a getter material is arranged either in a one-sided extension of the annular gap-shaped discharge space (FIGS. 1-3), a flat, circular extension of the discharge vessel (FIG. 4) or in a separate vessel (FIG Discharge space is connected.
  • measures are provided to prevent the getter material from inadvertently entering the discharge space, for example by connecting the getter space from the discharge space via a narrowed portion of the vessel.
  • the problem is that parasitic discharges can form in the area of the getter space due to the proximity of the getter space to the discharge space. The parasitic discharges worsen the efficiency of the radiator.
  • the object of the present invention is to provide a dielectric barrier discharge lamp in coaxial double tube arrangement with improved arrangement of a getter material.
  • a dielectric barrier discharge lamp in a coaxial double tube arrangement with a discharge vessel comprising an outer tube and an inner tube, wherein the inner tube coaxially disposed within the outer tube, the inner tube and the outer tube are gas-tightly interconnected, whereby between inner and Outer tube, a discharge space filled with a discharge medium is formed, an outer electrode disposed on the outer side of the outer tube, an inner electrode disposed within the inner tube, a getter material, which is in contact with the discharge medium, characterized in that the inner tube is shorter as the outer tube, the inner tube and the outer tube are gas-tightly connected to each other at their respective one end, the outer tube is gas-tightly closed at its other end, the inner tube projecting into the outer tube comprises: a first tube section - the inner electr odenrohr -, in which the inner electrode is arranged, a second pipe section - the getter pipe -, in which the getter material is arranged, a partition which separates the two pipe sections gas-tight
  • the getter space is limited to an area close to the axis, i. is not arranged in the extension of the annular gap-shaped discharge space.
  • a getter tube provided for receiving the getter material coaxially adjoins the inner electrode tube provided for receiving the inner electrode, but is separated from it gas-tight by a partition wall.
  • the way from the getter material to the outer electrodes is relatively long. Due to the long path between getter material and electrodes parasitic discharges are avoided or at least significantly reduced. Due to the partition wall between the getter tube and the inner electrode tube, the gettering space formed by the getter tube and consequently also the discharge space communicating with the gettering space via the getter tube opening is sealed to the outside in a gastight manner.
  • the getter tube may be formed by extending the inner tube beyond the length of the inner electrode.
  • the getter tube forming the getter space and the inner electrode tube receiving the inner electrode are functionally different and separated by the partition portions of the same one-piece inner tube.
  • the getter tube may be formed by a separate tube which adjoins the end of the inner electrode tube protruding into the outer tube, ie in this case the inner tube comprises two separate tube parts: namely the inner electrode tube and the getter tube.
  • the two tube parts gas-tight separating partition is formed by a corresponding gas-tight closed end of one of the two tube parts. That is, the partition wall is formed for example by the gas-tight closed end of the inner electrode tube (8), to which the getter tube is attached and thus connected gas-tight. But it can also reverse the first getter tube closed at one end and then attached and connected with this closed end to the open end of the inner electrode tube.
  • the diameter of the inner electrode tube and the diameter of the getter tube may be the same or different.
  • the length of the getter tube in the axial direction is adjusted so that a sufficient amount of getter material can be absorbed.
  • the getter tube should not be too long, otherwise the radiating portion - this extends only to the area with the inner electrode - based on the total length of the radiator is reduced too much. In practice, depending on the total length of the radiator, lengths in the range between approximately 0.5 cm and 5 cm have proven suitable for the getter tube.
  • the getter material may for example be applied to at least a part of the inner surface of the getter tube, for example by barium vapor deposition.
  • the getter material can also be arranged in another way in the getter tube be, for example, clamped in strip form in Getterrohr or the like.
  • barium other suitable getter materials come into consideration, for example, porous or powdery oxides, nitrides and carbides and titanium, tantalum, aluminum, zirconium and combinations thereof.
  • the diameter of the opening of the getter tube is equal to or greater than the distance between the outside of the inner tube and the inside of the outer tube defining the distance of the discharge.
  • the free end of the inner tube for example in the getter tube, with a suitable means, e.g. support a matching retaining washer between inner and outer tube.
  • a suitable means e.g. support a matching retaining washer between inner and outer tube.
  • the retaining plate In order not to interfere with the replacement of the discharge medium and thus the getter, but the retaining plate must have corresponding openings, such as holes, slots or the like.
  • the longitudinal discharge vessel of the lamp 1 consists of an outer tube 2 and an inner tube 3 in coaxial double tube arrangement, whereby the longitudinal axis L of the discharge vessel is defined.
  • the typical length of the outer tube 2 is depending on the application between about 10 and 250 cm.
  • the outer tube 2 has a typical outer diameter of 44 mm and a wall thickness of 2 mm.
  • the inner tube 3 has a typical outer diameter of 20 mm and a wall thickness of 1 mm.
  • Both tubes 2, 3 consist of UV radiation permeable quartz glass.
  • the discharge vessel is closed at its two end faces such that an elongated, annular gap-shaped discharge space 4 is formed.
  • the discharge vessel has at one end a suitably shaped, annular vessel section 5, which connects there the corresponding ends of the inner and outer tubes. At its other end, the discharge vessel is closed with a circular vessel section 6, which adjoins there to the corresponding end of the outer tube 2.
  • a pumping tube (not shown) attached, with the help of the discharge space. 4 first evacuated and then filled with 15 kPa xenon as a discharge medium. Then the pump tube is melted off.
  • the inner tube 3 ends at a distance a of about 1 cm in front of the circular vessel section 6 at the end of the outer tube 2.
  • the inner tube 3 consists of a first functional section, which serves to receive an inner electrode 7, the inner electrode tube 8.
  • the getter tube 10 closes a second functional section, which serves to receive a getter material 9, the getter tube 10.
  • inner electrode tube 8 and getter tube 10 are separated by a partition wall 11.
  • This partition 11 also closes off the discharge vessel in this region of the inner tube 3 gas-tight.
  • the getter tube 10 is open, so that the discharge medium from the discharge space 4 can get into the getter tube 10 and come into contact with the getter material 9.
  • the getter material 9 is made of barium and is evaporated on the inside of the getter tube 10 including the facing side of the partition wall 11.
  • the length d of the getter tube 10 is about 1 cm.
  • the inner diameter D is about 18 mm and is thus greater than the defined by the distance between the outside of the inner tube 3 and the inside of the outer tube 2 impact distance G, which is about 10 mm.
  • a wire mesh 12 is wound, which forms the outer electrode of the lamp 1.
  • the inner electrode 7 is formed as a slotted metal tube and consists of a 0.1 mm thick metal sheet, preferably VA sheet.
  • the retaining disc has a central bore, so that it fits on the inner tube.
  • the outer diameter of the retaining washer is also sized so that the retaining washer just fits between the inner and outer tube.
  • the retaining plate with suitable openings, such as holes, slots, etc. provided.
  • the radiator can be provided with a base at least at one end, preferably at the end with the getter chamber, or at both ends (not shown).

Abstract

A dielectric barrier discharge lamp (1) configured as a coaxial double tube comprises an inner tube (3), which is disposed coaxially inside an outer tube (2). The inner tube (3) comprises an inner electrode tube (8) provided for receiving the inner electrode (7) and a getter tube (10) provided for receiving getter material (9). The inner electrode tube (8) and getter tube (10) are separated from each other in a gastight manner by a partition (11).

Description

Technisches GebietTechnical area

Die Erfindung geht aus von einer dielektrischen Barriere-Entladungslampe mit einem Entladungsgefäß in koaxialer Doppelrohranordnung, d.h. ein Innenrohr ist koaxial innerhalb eines Außenrohrs angeordnet. Dabei sind Innenrohr und Außenrohr miteinander verbunden und bilden das gasdichte Entladungsgefäß. Der vom Entladungsgefäß umschlossene Entladungsraum erstreckt sich also zwischen Innen- und Außenrohr und ist mit einem Entladungsmedium gefüllt, das typischerweise ein oder mehrere Edelgase, beispielsweise Xenon enthält.The invention is based on a dielectric barrier discharge lamp with a discharge vessel in coaxial double tube arrangement, i. an inner tube is coaxially disposed within an outer tube. Inner tube and outer tube are connected to each other and form the gas-tight discharge vessel. The discharge space enclosed by the discharge vessel thus extends between the inner and outer tubes and is filled with a discharge medium which typically contains one or more noble gases, for example xenon.

Diese Art von Entladungslampen weist typischerweise eine erste Elektrode auf, die innerhalb des Innenrohrs angeordnet ist und eine zweite Elektrode, die auf der Außenseite des Außenrohrs angeordnet ist. Beide Elektroden befinden sich somit außerhalb des Entladungsgefäßes. Es handelt sich also um eine zweiseitig dielektrisch behinderte Entladung.This type of discharge lamp typically has a first electrode disposed within the inner tube and a second electrode disposed on the outer surface of the outer tube. Both electrodes are thus outside the discharge vessel. It is therefore a two-sided dielectrically impeded discharge.

In einer dielektrischen Barriere-Entladung mit z.B. dem Edelgas Xenon als Entladungsmedium werden unter anderem Xenon-Excimere (Xe2*) erzeugt, die bei der Rückkehr vom angeregten Zustand in den Grundzustand elektromagnetische Strahlung mit Wellenlängen im Bereich um ca. 172 nm emittieren. Verunreinigungen, z.B. Sauerstoff oder Wasserstoff, im Entladungsmedium verringern die Effizienz der Nutzstrahlungserzeugung. Zum einen geht ein Teil der elektrischen Anregungsleistung in die unerwünschte Anregung der atomaren und/oder molekularen Bestandteile der Verunreinigungen. Zum anderen bewirken die Verunreinigungen, dass ein Teil der Excimere strahlungslos in den Grundzustand zurückkehrt.In a dielectric barrier discharge with, for example, the noble gas xenon as the discharge medium, xenon excimers (Xe 2 *) are generated which emit electromagnetic radiation with wavelengths in the region of about 172 nm when returning from the excited state to the ground state. Impurities, for example oxygen or hydrogen, in the discharge medium reduce the efficiency of the useful radiation generation. On the one hand, part of the electrical excitation power goes into the unwanted excitation the atomic and / or molecular components of the impurities. On the other hand, the impurities cause some of the excimer to return to the ground state without radiation.

Anwendung findet dieser Lampentyp insbesondere für die UV-Bestrahlung in der Prozesstechnik, beispielsweise für die Oberflächenreinigung und -aktivierung, Photolytik, Ozonerzeugung, Trinkwasserreinigung, Metallisierung, und UV-Curing. In diesem Zusammenhang ist auch die Bezeichnung Strahler oder UV-Strahler gebräuchlich.This type of lamp is used in particular for UV irradiation in process technology, for example for surface cleaning and activation, photolytics, ozone generation, drinking water purification, metallization, and UV curing. In this context, the term radiator or UV lamps is also common.

Stand der TechnikState of the art

Die Schrift EP 0 607 960 A1 offenbart eine dielektrische Barriere-Entladungslampe in koaxialer Doppelrohranordnung. Zum Binden von Verunreinigungen ist ein Gettermaterial entweder in einer einseitigen Verlängerung des ringspaltförmigen Entladungsraumes angeordnet (Fig. 1 - 3), einem flachen, kreisförmigen Fortsatz des Entladungsgefäßes (Fig. 4) oder in einem separaten Gefäß (Fig. 5), das mit dem Entladungsraum verbunden ist. In jedem Fall sind Maßnahmen vorgesehen, um zu verhindern, dass das Gettermaterial unbeabsichtigt in den Entladungsraum gelangt, beispielsweise indem der Getterraum vom Entladungsraum über einen verengten Gefäßabschnitt verbunden ist. Problematisch ist allerdings, dass sich aufgrund der räumlichen Nähe des Getterraums zum Entladungsraum parasitäre Entladungen im Bereich des Getterraums ausbilden können. Die parasitären Entladungen verschlechtern nämlich die Effizienz des Strahlers.The font EP 0 607 960 A1 discloses a dielectric barrier discharge lamp in coaxial double tube arrangement. For the purpose of binding contaminants, a getter material is arranged either in a one-sided extension of the annular gap-shaped discharge space (FIGS. 1-3), a flat, circular extension of the discharge vessel (FIG. 4) or in a separate vessel (FIG Discharge space is connected. In any case, measures are provided to prevent the getter material from inadvertently entering the discharge space, for example by connecting the getter space from the discharge space via a narrowed portion of the vessel. The problem, however, is that parasitic discharges can form in the area of the getter space due to the proximity of the getter space to the discharge space. The parasitic discharges worsen the efficiency of the radiator.

Darstellung der ErfindungPresentation of the invention

Die Aufgabe der vorliegenden Erfindung ist es, eine dielektrische Barriere-Entladungslampe in koaxialer Doppelrohranordnung mit verbesserter Anordnung eines Gettermaterials bereitzustellen.The object of the present invention is to provide a dielectric barrier discharge lamp in coaxial double tube arrangement with improved arrangement of a getter material.

Diese Aufgabe wird gelöst durch eine dielektrische Barriere-Entladungslampe in koaxialer Doppelrohranordnung mit einem Entladungsgefäß, das ein Außenrohr und ein Innenrohr umfasst, wobei das Innenrohr koaxial innerhalb des Außenrohrs angeordnet ist, das Innenrohr und das Außenrohr gasdicht miteinander verbunden sind, wodurch zwischen Innen- und Außenrohr ein mit einem Entladungsmedium gefüllter Entladungsraum gebildet ist, einer Außenelektrode, die auf der Außenseite des Außenrohrs angeordnet ist, einer Innenelektrode, die innerhalb des Innenrohrs angeordnet ist, einem Gettermaterial, das mit dem Entladungsmedium in Kontakt steht, dadurch gekennzeichnet, dass das Innenrohr kürzer als das Außenrohr ist, das Innenrohr und das Außenrohr an ihrem jeweiligen einen Ende miteinander gasdicht verbunden sind, das Außenrohr an seinem anderen Ende gasdicht verschlossen ist, das in das Außenrohr hineinragende Innenrohr Folgendes umfasst: einen ersten Rohrabschnitt - das Innenelektrodenrohr -, in dem die Innenelektrode angeordnet ist, einen zweiten Rohrabschnitt - das Getterrohr -, in dem das Gettermaterial angeordnet ist, eine Trennwand, die die beiden Rohrabschnitte gasdicht voneinander trennt.This object is achieved by a dielectric barrier discharge lamp in a coaxial double tube arrangement with a discharge vessel comprising an outer tube and an inner tube, wherein the inner tube coaxially disposed within the outer tube, the inner tube and the outer tube are gas-tightly interconnected, whereby between inner and Outer tube, a discharge space filled with a discharge medium is formed, an outer electrode disposed on the outer side of the outer tube, an inner electrode disposed within the inner tube, a getter material, which is in contact with the discharge medium, characterized in that the inner tube is shorter as the outer tube, the inner tube and the outer tube are gas-tightly connected to each other at their respective one end, the outer tube is gas-tightly closed at its other end, the inner tube projecting into the outer tube comprises: a first tube section - the inner electr odenrohr -, in which the inner electrode is arranged, a second pipe section - the getter pipe -, in which the getter material is arranged, a partition which separates the two pipe sections gas-tight from each other.

Besonders vorteilhafte Ausgestaltungen finden sich in den abhängigen Ansprüchen.Particularly advantageous embodiments can be found in the dependent claims.

Der Grundgedanke der Erfindung besteht darin, dass der Getterraum auf einen achsnahen Bereich beschränkt ist, d.h. nicht in der Verlängerung des ringspaltförmigen Entladungsraums angeordnet ist. Zu diesem Zweck schließt sich erfindungsgemäß ein für die Aufnahme des Gettermaterials vorgesehenes Getterrohr an das für die Aufnahme der Innenelektrode vorgesehene Innenelektrodenrohr koaxial an, ist von diesem aber durch eine Trennwand gasdicht getrennt. Dadurch ist der Weg vom Gettermaterial zu den Außenelektroden relativ lang. Durch den langen Weg zwischen Gettermaterial und Elektroden werden parasitäre Entladungen vermieden oder zumindest deutlich reduziert. Durch die Trennwand zwischen Getterrohr und Innenelektrodenrohr ist der durch das Getterrohr gebildete Getterraum und folglich auch der mit dem Getterraum über die Getterrohröffnung in Verbindung stehende Entladungsraum nach Außen gasdicht abgeschlossen.The basic idea of the invention is that the getter space is limited to an area close to the axis, i. is not arranged in the extension of the annular gap-shaped discharge space. For this purpose, according to the invention, a getter tube provided for receiving the getter material coaxially adjoins the inner electrode tube provided for receiving the inner electrode, but is separated from it gas-tight by a partition wall. As a result, the way from the getter material to the outer electrodes is relatively long. Due to the long path between getter material and electrodes parasitic discharges are avoided or at least significantly reduced. Due to the partition wall between the getter tube and the inner electrode tube, the gettering space formed by the getter tube and consequently also the discharge space communicating with the gettering space via the getter tube opening is sealed to the outside in a gastight manner.

Das Getterrohr kann dadurch ausgebildet sein, dass das Innenrohr über die Länge der Innenelektrode hinaus verlängert ist. Dabei ist der für die Aufnahme des Gettermaterials vorgesehene Rohrabschnitt vom Rest des Innenrohrs mittels einer separat eingesetzten und eingeschweißten Trennwand gasdicht getrennt. Mit anderen Worten sind in diesem Fall das den Getterraum bildende Getterrohr und das die Innenelektrode aufnehmende Innenelektrodenrohr funktional unterschiedliche und durch die Trennwand getrennte Abschnitte des selben einteiligen Innenrohrs.The getter tube may be formed by extending the inner tube beyond the length of the inner electrode. In this case, provided for the reception of the getter material pipe section from the rest of the inner tube by means of a separately inserted and welded partition gas-tight manner. In other words, in this case, the getter tube forming the getter space and the inner electrode tube receiving the inner electrode are functionally different and separated by the partition portions of the same one-piece inner tube.

Alternativ kann das Getterrohr durch ein separates Rohr ausgebildet sein, das sich an das in das Außenrohr hineinragende Ende des Innenelektrodenrohrs anschließt, d.h. das Innenrohr umfasst in diesem Fall zwei separate Rohrteile: nämlich das Innenelektrodenrohr und das Getterrohr. Die die beiden Rohrteile gasdicht trennende Trennwand ist durch ein entsprechendes gasdicht verschlossenes Ende einer der beiden Rohrteile ausgebildet. D.h. die Trennwand ist beispielsweise durch das gasdicht verschlossene Ende des Innenelektrodenrohrs (8) ausgebildet, an das das Getterrohr angesetzt und damit gasdicht verbunden wird. Es kann aber auch umgekehrt erst das Getterrohr an einem Ende verschlossen und dann mit diesem verschlossenen Ende an das offene Ende des Innenelektrodenrohrs angesetzt und verbunden werden.Alternatively, the getter tube may be formed by a separate tube which adjoins the end of the inner electrode tube protruding into the outer tube, ie in this case the inner tube comprises two separate tube parts: namely the inner electrode tube and the getter tube. The two tube parts gas-tight separating partition is formed by a corresponding gas-tight closed end of one of the two tube parts. That is, the partition wall is formed for example by the gas-tight closed end of the inner electrode tube (8), to which the getter tube is attached and thus connected gas-tight. But it can also reverse the first getter tube closed at one end and then attached and connected with this closed end to the open end of the inner electrode tube.

Außerdem können der Durchmesser des Innenelektrodenrohrs und der Durchmesser des Getterrohrs gleich oder unterschiedlich sein. Zur sicheren Anordnung des Gettermaterials kann es auch vorteilhaft sein, das Getterrohr in Richtung Öffnung zu verjüngen.In addition, the diameter of the inner electrode tube and the diameter of the getter tube may be the same or different. For a secure arrangement of the getter material, it may also be advantageous to taper the getter tube in the direction of the opening.

Die Länge des Getterrohrs in Achsrichtung ist so abgestimmt, dass eine ausreichende Menge Gettermaterial aufgenommen werden kann. Andererseits sollte das Getterrohr nicht zu lang sein, da sonst der strahlende Abschnitt - dieser erstreckt sich nur auf den Bereich mit der Innenelektrode - bezogen auf die Gesamtlänge des Strahlers zu sehr reduziert wird. In der Praxis haben sich, je nach Gesamtlänge des Strahlers, für das Getterrohr Längen im Bereich zwischen ca. 0,5 cm und 5 cm als geeignet erwiesen.The length of the getter tube in the axial direction is adjusted so that a sufficient amount of getter material can be absorbed. On the other hand, the getter tube should not be too long, otherwise the radiating portion - this extends only to the area with the inner electrode - based on the total length of the radiator is reduced too much. In practice, depending on the total length of the radiator, lengths in the range between approximately 0.5 cm and 5 cm have proven suitable for the getter tube.

Das Gettermaterial kann beispielsweise zumindest auf einen Teil der Innenfläche des Getterrohrs aufgebracht sein, z.B. indem Barium aufgedampft ist. Das Gettermaterial kann aber auch in anderer Weise im Getterrohr angeordnet sein, beispielsweise in Streifenform im Getterrohr eingeklemmt oder ähnliches. Neben Barium kommen auch andere geeignete Gettermaterialien in Betracht, beispielsweise poröse oder pulverige Oxide, Nitride und Carbide sowie Titan, Tantal, Aluminium, Zirkonium und Kombinationen davon.The getter material may for example be applied to at least a part of the inner surface of the getter tube, for example by barium vapor deposition. However, the getter material can also be arranged in another way in the getter tube be, for example, clamped in strip form in Getterrohr or the like. In addition to barium, other suitable getter materials come into consideration, for example, porous or powdery oxides, nitrides and carbides and titanium, tantalum, aluminum, zirconium and combinations thereof.

Um den für die Wirkung des Gettermaterials notwendigen Austausch des Entladungsmediums zwischen Entladungsraum und axialem Getterraum zu fördern, ist vorzugsweise der Durchmesser der Öffnung des Getterrohrs gleich groß oder größer als der die Schlagweite der Entladung definierende Abstand zwischen der Außenseite des Innenrohrs und der Innenseite des Außenrohrs.In order to promote the exchange of the discharge medium between the discharge space and the axial getter space, which is necessary for the effect of the getter material, preferably the diameter of the opening of the getter tube is equal to or greater than the distance between the outside of the inner tube and the inside of the outer tube defining the distance of the discharge.

Außerdem kann es insbesondere bei langen Rohren zur Unterdrückung von Schwingungen sowie zur Stabilisierung des Innenrohrs vorteilhaft sein, das freie Ende des Innenrohrs, beispielsweise im Bereich des Getterrohrs, mit einem geeigneten Mittel, z.B. einer passenden Haltescheibe zwischen Innen- und Außenrohr abzustützen. Um den Austausch des Entladungsmediums und folglich die Getterwirkung nicht zu beeinträchtigen, muss die Haltescheibe aber entsprechende Öffnungen, beispielsweise Bohrungen, Schlitze oder ähnliches aufweisen.In addition, it may be advantageous in particular for long pipes to suppress vibrations and to stabilize the inner tube, the free end of the inner tube, for example in the getter tube, with a suitable means, e.g. support a matching retaining washer between inner and outer tube. In order not to interfere with the replacement of the discharge medium and thus the getter, but the retaining plate must have corresponding openings, such as holes, slots or the like.

Kurze Beschreibung der ZeichnungenBrief description of the drawings

Im Folgenden soll die Erfindung anhand eines Ausführungsbeispiels näher erläutert werden. Die Figuren zeigen:

Fig. 1a
eine Längsschnittsdarstellung einer erfindungsgemäßen dielektrischen Barriere-Entladungslampe,
Fig. 1b
eine Querschnittsdarstellung der Lampe aus Fig. 1a entlang der Schnittlinie AB.
In the following, the invention will be explained in more detail with reference to an embodiment. The figures show:
Fig. 1a
a longitudinal sectional view of a dielectric barrier discharge lamp according to the invention,
Fig. 1b
a cross-sectional view of the lamp Fig. 1a along the section line AB.

Bevorzugte Ausführung der ErfindungPreferred embodiment of the invention

In den Figuren werden gleiche oder funktionsgleiche Elemente mit den gleichen Bezugszeichen versehen.In the figures, identical or functionally identical elements are provided with the same reference numerals.

Die Figuren 1a, 1b zeigen in stark schematisierter Darstellung einen Längsschnitt bzw. einen Querschnitt längs der Schnittlinie AB eines Ausführungsbeispiels der erfindungsgemäßen dielelektrischen Barriere-Entladungslampe 1. Das längliche Entladungsgefäß der Lampe 1 besteht aus einem Außenrohr 2 und einem Innenrohr 3 in koaxialer Doppelrohranordnung, wodurch die Längsachse L des Entladungsgefäßes definiert ist. Die typische Länge des Außenrohrs 2 beträgt je nach Anwendung zwischen ca. 10 und 250 cm. Das Außenrohr 2 hat einen typischen Außendurchmesser von 44 mm und eine Wandstärke von 2 mm. Das Innenrohr 3 hat einen typischen Außendurchmesser von 20 mm und eine Wandstärke von 1 mm. Beide Rohre 2, 3 bestehen aus UV-Strahlung durchlässigem Quarzglas. Außerdem ist das Entladungsgefäß an seinen beiden Stirnseiten derart verschlossen, dass ein länglicher, ringspaltförmiger Entladungsraum 4 gebildet ist. Zu diesem Zweck weist das Entladungsgefäß an einem Ende einen geeignet geformten, ringartigen Gefäßabschnitt 5 auf, der dort die korrespondierenden Enden von Innen- und Außenrohr verbindet. An seinem anderen Ende ist das Entladungsgefäß mit einem kreisförmigen Gefäßabschnitt 6 verschlossen, der sich dort an das entsprechende Ende des Außenrohrs 2 anschließt. Außerdem ist dort ein Pumprohr (nicht dargestellt) angesetzt, mit dessen Hilfe der Entladungsraum 4 zunächst evakuiert und anschließend mit 15 kPa Xenon als Entladungsmedium gefüllt wird. Danach wird das Pumprohr abgeschmolzen. Das Innenrohr 3 endet im Abstand a von ca. 1 cm vor dem kreisförmigen Gefäßabschnitt 6 am Ende des Außenrohrs 2. Das Innenrohr 3 besteht aus einem ersten funktionalen Abschnitt, der zur Aufnahme einer Innenelektrode 7 dient, dem Innenelektrodenrohr 8. An dieses Innenelektrodenrohr 8 schließt sich ein zweiter funktionaler Abschnitt an, der zur Aufnahme eines Gettermaterials 9 dient, dem Getterrohr 10. Innenelektrodenrohr 8 und Getterrohr 10 sind durch eine Trennwand 11 getrennt. Diese Trennwand 11 schließt außerdem das Entladungsgefäß in diesem Bereich des Innenrohrs 3 gasdicht ab. Auf der anderen Seite ist das Getterrohr 10 offen, so dass das Entladungsmedium aus dem Entladungsraum 4 in das Getterrohr 10 gelangen und mit dem Gettermaterial 9 in Kontakt kommen kann. Das Gettermaterial 9 besteht aus Barium und ist auf die Innenseite des Getterrohrs 10 einschließlich der zugewandten Seite der Trennwand 11 aufgedampft. Die Länge d des Getterrohrs 10 beträgt ca. 1 cm. Der Innendurchmesser D beträgt ca. 18 mm und ist damit größer als die durch den Abstand zwischen der Außenseite des Innenrohrs 3 und der Innenseite des Außenrohrs 2 definierte Schlagweite G, die ca. 10 mm beträgt. Auf der Außenseite der Wand des Außenrohrs 2 ist ein Drahtnetz 12 aufgezogen, das die Außenelektrode der Lampe 1 bildet. Die Innenelektrode 7 ist als geschlitztes Metallrohr ausgebildet und besteht aus einem 0,1 mm dicken Metallblech, vorzugsweise VA-Blech.The FIGS. 1a, 1b The longitudinal discharge vessel of the lamp 1 consists of an outer tube 2 and an inner tube 3 in coaxial double tube arrangement, whereby the longitudinal axis L of the discharge vessel is defined. The typical length of the outer tube 2 is depending on the application between about 10 and 250 cm. The outer tube 2 has a typical outer diameter of 44 mm and a wall thickness of 2 mm. The inner tube 3 has a typical outer diameter of 20 mm and a wall thickness of 1 mm. Both tubes 2, 3 consist of UV radiation permeable quartz glass. In addition, the discharge vessel is closed at its two end faces such that an elongated, annular gap-shaped discharge space 4 is formed. For this purpose, the discharge vessel has at one end a suitably shaped, annular vessel section 5, which connects there the corresponding ends of the inner and outer tubes. At its other end, the discharge vessel is closed with a circular vessel section 6, which adjoins there to the corresponding end of the outer tube 2. In addition, there is a pumping tube (not shown) attached, with the help of the discharge space. 4 first evacuated and then filled with 15 kPa xenon as a discharge medium. Then the pump tube is melted off. The inner tube 3 ends at a distance a of about 1 cm in front of the circular vessel section 6 at the end of the outer tube 2. The inner tube 3 consists of a first functional section, which serves to receive an inner electrode 7, the inner electrode tube 8. At this inner electrode tube 8 closes a second functional section, which serves to receive a getter material 9, the getter tube 10. inner electrode tube 8 and getter tube 10 are separated by a partition wall 11. This partition 11 also closes off the discharge vessel in this region of the inner tube 3 gas-tight. On the other hand, the getter tube 10 is open, so that the discharge medium from the discharge space 4 can get into the getter tube 10 and come into contact with the getter material 9. The getter material 9 is made of barium and is evaporated on the inside of the getter tube 10 including the facing side of the partition wall 11. The length d of the getter tube 10 is about 1 cm. The inner diameter D is about 18 mm and is thus greater than the defined by the distance between the outside of the inner tube 3 and the inside of the outer tube 2 impact distance G, which is about 10 mm. On the outside of the wall of the outer tube 2, a wire mesh 12 is wound, which forms the outer electrode of the lamp 1. The inner electrode 7 is formed as a slotted metal tube and consists of a 0.1 mm thick metal sheet, preferably VA sheet.

Insbesondere bei relativ langen Rohren kann es zur Vermeidungen von Schwingungen des Innenrohrs vorgesehen sein, das Innenrohr, bevorzugt im Bereich des Getterrohrs, mit Hilfe einer passenden Haltescheibe abzustützen (nicht dargestellt). Dazu weist die Haltescheibe eine zentrische Bohrung auf, damit sie auf das Innenrohr passt. Der Außendurchmesser der Haltescheibe ist außerdem so bemessen, dass die Haltescheibe gerade zwischen Innen- und Außenrohr passt. Um den Austausch des Entladungsmediums zwischen Entladungsraum und Getterraum und folglich die Getterwirkung nicht zu beeinträchtigen, ist die Haltescheibe mit geeigneten Öffnungen, beispielsweise Bohrungen, Schlitzen etc. versehen.Especially with relatively long pipes, it can be provided to avoid vibrations of the inner tube be, to support the inner tube, preferably in the area of the getter tube, with the aid of a suitable retaining washer (not shown). For this purpose, the retaining disc has a central bore, so that it fits on the inner tube. The outer diameter of the retaining washer is also sized so that the retaining washer just fits between the inner and outer tube. In order not to interfere with the replacement of the discharge medium between the discharge space and Getterraum and consequently the Getterwirkung, the retaining plate with suitable openings, such as holes, slots, etc. provided.

Zum Einbau in eine Prozesskammer kann der Strahler zumindest an einem Ende, vorzugsweise an dem Ende mit der Getterkammer, oder auch an beiden Enden jeweils mit einem Sockel versehen sein (nicht dargestellt).For installation in a process chamber, the radiator can be provided with a base at least at one end, preferably at the end with the getter chamber, or at both ends (not shown).

Claims (12)

  1. Dielectric barrier discharge lamp (1) with a coaxial double-tube arrangement with
    o a discharge vessel, which
    - comprises an outer tube (2) and an inner tube (3), wherein
    - the inner tube (3) is arranged coaxially within the outer tube (2),
    - the inner tube (3) and the outer tube (2) are connected to one another in a gas-tight manner, as a result of which a discharge space (4) filled with a discharge medium is formed between the inner and outer tubes,
    o an outer electrode (12), which is arranged on the outside of the outer tube (2),
    o an inner electrode (7), which is arranged within the inner tube (2),
    o a getter material (9), which is in contact with the discharge medium,
    characterized in that
    o the inner tube (3) is shorter than the outer tube (2),
    o the inner tube (3) and the outer tube are connected to one another in a gas-tight manner at one of their respective ends,
    o the outer tube (2) is sealed in a gas-tight manner at its other end,
    o the inner tube (3), which protrudes into the outer tube (2), comprises the following:
    - a first tube section, the inner electrode tube (8), in which the inner electrode (7) is arranged,
    - a second tube section, the getter tube (10), in which the getter material (9) is arranged,
    - a dividing wall (11), which separates the two tube sections from one another in a gas-tight manner.
  2. Lamp according to Claim 1, wherein the inner tube (3) with the two tube sections, the inner electrode tube (8) and the getter tube (10), is formed as one part.
  3. Lamp according to Claim 1, wherein the getter tube (10) is formed by a separate tube which coaxially adjoins that end of the inner electrode tube (8) which protrudes into the outer tube (2), and wherein the dividing wall (11) is formed by the corresponding end, which is sealed in a gas-tight manner, of the getter tube (10) or the inner electrode tube (8).
  4. Lamp according to one of the preceding claims, wherein the diameter of the opening (D) of the getter tube (10) is equal to or greater than the distance between the outer side of the inner tube (3) and the inner side of the outer tube (2), which distance defines the flashover path (G) of the discharge.
  5. Lamp according to one of the preceding claims, wherein at least part of the inner surface of the getter tube (10) is provided with getter material.
  6. Lamp according to one of the preceding claims, wherein the diameters of the inner electrode tube (8) and the getter tube (10) are different.
  7. Lamp according to one of the preceding claims, wherein the length of the getter tube (10) in the direction of the longitudinal axis of the discharge vessel is in the range between 0.5 cm and 5 cm.
  8. Lamp according to one of the preceding claims, wherein the inner tube is supported with the aid of a holding means.
  9. Lamp according to Claim 8, wherein the holding means is arranged in the region of the getter tube.
  10. Lamp according to either of Claims 8 and 9, wherein the holding means is an annular holding disk, which extends between the outer side of the inner tube and the inner side of the outer tube.
  11. Lamp according to Claim 10, wherein the holding disk has, in addition to a central bore, at least one further opening.
  12. Lamp according to one of the preceding Claims, wherein the getter material comprises the following elements individually or in combination: porous or pulverulent oxides, nitrides and carbides as well as barium, titanium, tantalum, aluminum, zirconium.
EP08775080A 2008-07-15 2008-07-15 Dielectric barrier discharge lamp configured as a coaxial double tube having a getter Active EP2297772B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2008/059220 WO2010006642A1 (en) 2008-07-15 2008-07-15 Dielectric barrier discharge lamp configured as a coaxial double tube having a getter

Publications (2)

Publication Number Publication Date
EP2297772A1 EP2297772A1 (en) 2011-03-23
EP2297772B1 true EP2297772B1 (en) 2012-02-15

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EP (1) EP2297772B1 (en)
JP (1) JP5165108B2 (en)
KR (1) KR101216481B1 (en)
CN (1) CN102084456B (en)
AT (1) ATE545947T1 (en)
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WO2010066298A1 (en) * 2008-12-11 2010-06-17 Osram Gesellschaft mit beschränkter Haftung Uv light having a plurality of uv lamps, particularly for technical product processing
WO2012127484A1 (en) 2011-03-24 2012-09-27 Yogesh Chunilal Rathod A system and method for managing, monitoring, tracking, updating, measuring and facilitate maintaining user status & state
US9368338B2 (en) 2011-06-16 2016-06-14 Mocon, Inc. Gas discharge lamp with an axially extending strip of getter and method of manufacture
JP6365096B2 (en) * 2014-08-07 2018-08-01 ウシオ電機株式会社 UV irradiation type ozone generator
JP6662238B2 (en) * 2015-10-19 2020-03-11 東芝ライテック株式会社 Packing structure of multiple tube discharge lamp and package of multiple tube discharge lamp
USD797984S1 (en) 2016-03-24 2017-09-19 Mocon, Inc. UV lamp
US11037778B1 (en) 2021-01-14 2021-06-15 Mocon, Inc. UV lamp
WO2023217824A1 (en) 2022-05-12 2023-11-16 Signify Holding B.V. Disinfection lamp with reflector

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JPH06994A (en) * 1992-06-18 1994-01-11 Tokyo Electric Co Ltd Line head
EP0607960B2 (en) * 1993-01-20 2001-05-16 Ushiodenki Kabushiki Kaisha Dielectric barrier discharge lamp
JP2775695B2 (en) * 1993-05-27 1998-07-16 ウシオ電機株式会社 Dielectric barrier discharge lamp
TW348262B (en) * 1993-09-08 1998-12-21 Ushio Electric Inc Dielectric barrier discharge lamp
JP2775699B2 (en) * 1994-09-20 1998-07-16 ウシオ電機株式会社 Dielectric barrier discharge lamp
JP3319330B2 (en) 1997-04-03 2002-08-26 ウシオ電機株式会社 Discharge lamp
JP2000173554A (en) * 1998-12-01 2000-06-23 Md Komu:Kk Dielectric barrier discharge lamp
JP3666407B2 (en) 2001-04-19 2005-06-29 ウシオ電機株式会社 Dielectric barrier discharge lamp
JP2006228563A (en) * 2005-02-17 2006-08-31 Ushio Inc Excimer lamp
JP2006244898A (en) * 2005-03-04 2006-09-14 Ushio Inc Excimer lamp
JP5303905B2 (en) * 2007-11-06 2013-10-02 ウシオ電機株式会社 Excimer lamp

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KR20110041523A (en) 2011-04-21
US20110101858A1 (en) 2011-05-05
WO2010006642A1 (en) 2010-01-21
JP2011528157A (en) 2011-11-10
JP5165108B2 (en) 2013-03-21
ATE545947T1 (en) 2012-03-15
EP2297772A1 (en) 2011-03-23
CN102084456A (en) 2011-06-01
KR101216481B1 (en) 2013-01-09
TW201009890A (en) 2010-03-01
US8174191B2 (en) 2012-05-08
CN102084456B (en) 2012-11-28

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