EP2297772B1 - Dielectric barrier discharge lamp configured as a coaxial double tube having a getter - Google Patents
Dielectric barrier discharge lamp configured as a coaxial double tube having a getter Download PDFInfo
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- EP2297772B1 EP2297772B1 EP08775080A EP08775080A EP2297772B1 EP 2297772 B1 EP2297772 B1 EP 2297772B1 EP 08775080 A EP08775080 A EP 08775080A EP 08775080 A EP08775080 A EP 08775080A EP 2297772 B1 EP2297772 B1 EP 2297772B1
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- tube
- getter
- lamp according
- discharge
- outer tube
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- 230000004888 barrier function Effects 0.000 title claims abstract description 9
- 239000000463 material Substances 0.000 claims abstract description 23
- 229910052788 barium Inorganic materials 0.000 claims description 4
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 150000001247 metal acetylides Chemical class 0.000 claims description 2
- 150000004767 nitrides Chemical class 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 238000005192 partition Methods 0.000 abstract description 11
- 229910052724 xenon Inorganic materials 0.000 description 4
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 4
- 239000012535 impurity Substances 0.000 description 3
- 230000003071 parasitic effect Effects 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 230000005284 excitation Effects 0.000 description 2
- 238000005247 gettering Methods 0.000 description 2
- 230000005283 ground state Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052756 noble gas Inorganic materials 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000003848 UV Light-Curing Methods 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000003651 drinking water Substances 0.000 description 1
- 235000020188 drinking water Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/24—Means for obtaining or maintaining the desired pressure within the vessel
- H01J61/26—Means for absorbing or adsorbing gas, e.g. by gettering; Means for preventing blackening of the envelope
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/34—Double-wall vessels or containers
Definitions
- the invention is based on a dielectric barrier discharge lamp with a discharge vessel in coaxial double tube arrangement, i. an inner tube is coaxially disposed within an outer tube. Inner tube and outer tube are connected to each other and form the gas-tight discharge vessel.
- the discharge space enclosed by the discharge vessel thus extends between the inner and outer tubes and is filled with a discharge medium which typically contains one or more noble gases, for example xenon.
- This type of discharge lamp typically has a first electrode disposed within the inner tube and a second electrode disposed on the outer surface of the outer tube. Both electrodes are thus outside the discharge vessel. It is therefore a two-sided dielectrically impeded discharge.
- xenon excimers In a dielectric barrier discharge with, for example, the noble gas xenon as the discharge medium, xenon excimers (Xe 2 *) are generated which emit electromagnetic radiation with wavelengths in the region of about 172 nm when returning from the excited state to the ground state.
- Impurities for example oxygen or hydrogen, in the discharge medium reduce the efficiency of the useful radiation generation.
- part of the electrical excitation power goes into the unwanted excitation the atomic and / or molecular components of the impurities.
- the impurities cause some of the excimer to return to the ground state without radiation.
- This type of lamp is used in particular for UV irradiation in process technology, for example for surface cleaning and activation, photolytics, ozone generation, drinking water purification, metallization, and UV curing.
- the term radiator or UV lamps is also common.
- the font EP 0 607 960 A1 discloses a dielectric barrier discharge lamp in coaxial double tube arrangement.
- a getter material is arranged either in a one-sided extension of the annular gap-shaped discharge space (FIGS. 1-3), a flat, circular extension of the discharge vessel (FIG. 4) or in a separate vessel (FIG Discharge space is connected.
- measures are provided to prevent the getter material from inadvertently entering the discharge space, for example by connecting the getter space from the discharge space via a narrowed portion of the vessel.
- the problem is that parasitic discharges can form in the area of the getter space due to the proximity of the getter space to the discharge space. The parasitic discharges worsen the efficiency of the radiator.
- the object of the present invention is to provide a dielectric barrier discharge lamp in coaxial double tube arrangement with improved arrangement of a getter material.
- a dielectric barrier discharge lamp in a coaxial double tube arrangement with a discharge vessel comprising an outer tube and an inner tube, wherein the inner tube coaxially disposed within the outer tube, the inner tube and the outer tube are gas-tightly interconnected, whereby between inner and Outer tube, a discharge space filled with a discharge medium is formed, an outer electrode disposed on the outer side of the outer tube, an inner electrode disposed within the inner tube, a getter material, which is in contact with the discharge medium, characterized in that the inner tube is shorter as the outer tube, the inner tube and the outer tube are gas-tightly connected to each other at their respective one end, the outer tube is gas-tightly closed at its other end, the inner tube projecting into the outer tube comprises: a first tube section - the inner electr odenrohr -, in which the inner electrode is arranged, a second pipe section - the getter pipe -, in which the getter material is arranged, a partition which separates the two pipe sections gas-tight
- the getter space is limited to an area close to the axis, i. is not arranged in the extension of the annular gap-shaped discharge space.
- a getter tube provided for receiving the getter material coaxially adjoins the inner electrode tube provided for receiving the inner electrode, but is separated from it gas-tight by a partition wall.
- the way from the getter material to the outer electrodes is relatively long. Due to the long path between getter material and electrodes parasitic discharges are avoided or at least significantly reduced. Due to the partition wall between the getter tube and the inner electrode tube, the gettering space formed by the getter tube and consequently also the discharge space communicating with the gettering space via the getter tube opening is sealed to the outside in a gastight manner.
- the getter tube may be formed by extending the inner tube beyond the length of the inner electrode.
- the getter tube forming the getter space and the inner electrode tube receiving the inner electrode are functionally different and separated by the partition portions of the same one-piece inner tube.
- the getter tube may be formed by a separate tube which adjoins the end of the inner electrode tube protruding into the outer tube, ie in this case the inner tube comprises two separate tube parts: namely the inner electrode tube and the getter tube.
- the two tube parts gas-tight separating partition is formed by a corresponding gas-tight closed end of one of the two tube parts. That is, the partition wall is formed for example by the gas-tight closed end of the inner electrode tube (8), to which the getter tube is attached and thus connected gas-tight. But it can also reverse the first getter tube closed at one end and then attached and connected with this closed end to the open end of the inner electrode tube.
- the diameter of the inner electrode tube and the diameter of the getter tube may be the same or different.
- the length of the getter tube in the axial direction is adjusted so that a sufficient amount of getter material can be absorbed.
- the getter tube should not be too long, otherwise the radiating portion - this extends only to the area with the inner electrode - based on the total length of the radiator is reduced too much. In practice, depending on the total length of the radiator, lengths in the range between approximately 0.5 cm and 5 cm have proven suitable for the getter tube.
- the getter material may for example be applied to at least a part of the inner surface of the getter tube, for example by barium vapor deposition.
- the getter material can also be arranged in another way in the getter tube be, for example, clamped in strip form in Getterrohr or the like.
- barium other suitable getter materials come into consideration, for example, porous or powdery oxides, nitrides and carbides and titanium, tantalum, aluminum, zirconium and combinations thereof.
- the diameter of the opening of the getter tube is equal to or greater than the distance between the outside of the inner tube and the inside of the outer tube defining the distance of the discharge.
- the free end of the inner tube for example in the getter tube, with a suitable means, e.g. support a matching retaining washer between inner and outer tube.
- a suitable means e.g. support a matching retaining washer between inner and outer tube.
- the retaining plate In order not to interfere with the replacement of the discharge medium and thus the getter, but the retaining plate must have corresponding openings, such as holes, slots or the like.
- the longitudinal discharge vessel of the lamp 1 consists of an outer tube 2 and an inner tube 3 in coaxial double tube arrangement, whereby the longitudinal axis L of the discharge vessel is defined.
- the typical length of the outer tube 2 is depending on the application between about 10 and 250 cm.
- the outer tube 2 has a typical outer diameter of 44 mm and a wall thickness of 2 mm.
- the inner tube 3 has a typical outer diameter of 20 mm and a wall thickness of 1 mm.
- Both tubes 2, 3 consist of UV radiation permeable quartz glass.
- the discharge vessel is closed at its two end faces such that an elongated, annular gap-shaped discharge space 4 is formed.
- the discharge vessel has at one end a suitably shaped, annular vessel section 5, which connects there the corresponding ends of the inner and outer tubes. At its other end, the discharge vessel is closed with a circular vessel section 6, which adjoins there to the corresponding end of the outer tube 2.
- a pumping tube (not shown) attached, with the help of the discharge space. 4 first evacuated and then filled with 15 kPa xenon as a discharge medium. Then the pump tube is melted off.
- the inner tube 3 ends at a distance a of about 1 cm in front of the circular vessel section 6 at the end of the outer tube 2.
- the inner tube 3 consists of a first functional section, which serves to receive an inner electrode 7, the inner electrode tube 8.
- the getter tube 10 closes a second functional section, which serves to receive a getter material 9, the getter tube 10.
- inner electrode tube 8 and getter tube 10 are separated by a partition wall 11.
- This partition 11 also closes off the discharge vessel in this region of the inner tube 3 gas-tight.
- the getter tube 10 is open, so that the discharge medium from the discharge space 4 can get into the getter tube 10 and come into contact with the getter material 9.
- the getter material 9 is made of barium and is evaporated on the inside of the getter tube 10 including the facing side of the partition wall 11.
- the length d of the getter tube 10 is about 1 cm.
- the inner diameter D is about 18 mm and is thus greater than the defined by the distance between the outside of the inner tube 3 and the inside of the outer tube 2 impact distance G, which is about 10 mm.
- a wire mesh 12 is wound, which forms the outer electrode of the lamp 1.
- the inner electrode 7 is formed as a slotted metal tube and consists of a 0.1 mm thick metal sheet, preferably VA sheet.
- the retaining disc has a central bore, so that it fits on the inner tube.
- the outer diameter of the retaining washer is also sized so that the retaining washer just fits between the inner and outer tube.
- the retaining plate with suitable openings, such as holes, slots, etc. provided.
- the radiator can be provided with a base at least at one end, preferably at the end with the getter chamber, or at both ends (not shown).
Abstract
Description
Die Erfindung geht aus von einer dielektrischen Barriere-Entladungslampe mit einem Entladungsgefäß in koaxialer Doppelrohranordnung, d.h. ein Innenrohr ist koaxial innerhalb eines Außenrohrs angeordnet. Dabei sind Innenrohr und Außenrohr miteinander verbunden und bilden das gasdichte Entladungsgefäß. Der vom Entladungsgefäß umschlossene Entladungsraum erstreckt sich also zwischen Innen- und Außenrohr und ist mit einem Entladungsmedium gefüllt, das typischerweise ein oder mehrere Edelgase, beispielsweise Xenon enthält.The invention is based on a dielectric barrier discharge lamp with a discharge vessel in coaxial double tube arrangement, i. an inner tube is coaxially disposed within an outer tube. Inner tube and outer tube are connected to each other and form the gas-tight discharge vessel. The discharge space enclosed by the discharge vessel thus extends between the inner and outer tubes and is filled with a discharge medium which typically contains one or more noble gases, for example xenon.
Diese Art von Entladungslampen weist typischerweise eine erste Elektrode auf, die innerhalb des Innenrohrs angeordnet ist und eine zweite Elektrode, die auf der Außenseite des Außenrohrs angeordnet ist. Beide Elektroden befinden sich somit außerhalb des Entladungsgefäßes. Es handelt sich also um eine zweiseitig dielektrisch behinderte Entladung.This type of discharge lamp typically has a first electrode disposed within the inner tube and a second electrode disposed on the outer surface of the outer tube. Both electrodes are thus outside the discharge vessel. It is therefore a two-sided dielectrically impeded discharge.
In einer dielektrischen Barriere-Entladung mit z.B. dem Edelgas Xenon als Entladungsmedium werden unter anderem Xenon-Excimere (Xe2*) erzeugt, die bei der Rückkehr vom angeregten Zustand in den Grundzustand elektromagnetische Strahlung mit Wellenlängen im Bereich um ca. 172 nm emittieren. Verunreinigungen, z.B. Sauerstoff oder Wasserstoff, im Entladungsmedium verringern die Effizienz der Nutzstrahlungserzeugung. Zum einen geht ein Teil der elektrischen Anregungsleistung in die unerwünschte Anregung der atomaren und/oder molekularen Bestandteile der Verunreinigungen. Zum anderen bewirken die Verunreinigungen, dass ein Teil der Excimere strahlungslos in den Grundzustand zurückkehrt.In a dielectric barrier discharge with, for example, the noble gas xenon as the discharge medium, xenon excimers (Xe 2 *) are generated which emit electromagnetic radiation with wavelengths in the region of about 172 nm when returning from the excited state to the ground state. Impurities, for example oxygen or hydrogen, in the discharge medium reduce the efficiency of the useful radiation generation. On the one hand, part of the electrical excitation power goes into the unwanted excitation the atomic and / or molecular components of the impurities. On the other hand, the impurities cause some of the excimer to return to the ground state without radiation.
Anwendung findet dieser Lampentyp insbesondere für die UV-Bestrahlung in der Prozesstechnik, beispielsweise für die Oberflächenreinigung und -aktivierung, Photolytik, Ozonerzeugung, Trinkwasserreinigung, Metallisierung, und UV-Curing. In diesem Zusammenhang ist auch die Bezeichnung Strahler oder UV-Strahler gebräuchlich.This type of lamp is used in particular for UV irradiation in process technology, for example for surface cleaning and activation, photolytics, ozone generation, drinking water purification, metallization, and UV curing. In this context, the term radiator or UV lamps is also common.
Die Schrift
Die Aufgabe der vorliegenden Erfindung ist es, eine dielektrische Barriere-Entladungslampe in koaxialer Doppelrohranordnung mit verbesserter Anordnung eines Gettermaterials bereitzustellen.The object of the present invention is to provide a dielectric barrier discharge lamp in coaxial double tube arrangement with improved arrangement of a getter material.
Diese Aufgabe wird gelöst durch eine dielektrische Barriere-Entladungslampe in koaxialer Doppelrohranordnung mit einem Entladungsgefäß, das ein Außenrohr und ein Innenrohr umfasst, wobei das Innenrohr koaxial innerhalb des Außenrohrs angeordnet ist, das Innenrohr und das Außenrohr gasdicht miteinander verbunden sind, wodurch zwischen Innen- und Außenrohr ein mit einem Entladungsmedium gefüllter Entladungsraum gebildet ist, einer Außenelektrode, die auf der Außenseite des Außenrohrs angeordnet ist, einer Innenelektrode, die innerhalb des Innenrohrs angeordnet ist, einem Gettermaterial, das mit dem Entladungsmedium in Kontakt steht, dadurch gekennzeichnet, dass das Innenrohr kürzer als das Außenrohr ist, das Innenrohr und das Außenrohr an ihrem jeweiligen einen Ende miteinander gasdicht verbunden sind, das Außenrohr an seinem anderen Ende gasdicht verschlossen ist, das in das Außenrohr hineinragende Innenrohr Folgendes umfasst: einen ersten Rohrabschnitt - das Innenelektrodenrohr -, in dem die Innenelektrode angeordnet ist, einen zweiten Rohrabschnitt - das Getterrohr -, in dem das Gettermaterial angeordnet ist, eine Trennwand, die die beiden Rohrabschnitte gasdicht voneinander trennt.This object is achieved by a dielectric barrier discharge lamp in a coaxial double tube arrangement with a discharge vessel comprising an outer tube and an inner tube, wherein the inner tube coaxially disposed within the outer tube, the inner tube and the outer tube are gas-tightly interconnected, whereby between inner and Outer tube, a discharge space filled with a discharge medium is formed, an outer electrode disposed on the outer side of the outer tube, an inner electrode disposed within the inner tube, a getter material, which is in contact with the discharge medium, characterized in that the inner tube is shorter as the outer tube, the inner tube and the outer tube are gas-tightly connected to each other at their respective one end, the outer tube is gas-tightly closed at its other end, the inner tube projecting into the outer tube comprises: a first tube section - the inner electr odenrohr -, in which the inner electrode is arranged, a second pipe section - the getter pipe -, in which the getter material is arranged, a partition which separates the two pipe sections gas-tight from each other.
Besonders vorteilhafte Ausgestaltungen finden sich in den abhängigen Ansprüchen.Particularly advantageous embodiments can be found in the dependent claims.
Der Grundgedanke der Erfindung besteht darin, dass der Getterraum auf einen achsnahen Bereich beschränkt ist, d.h. nicht in der Verlängerung des ringspaltförmigen Entladungsraums angeordnet ist. Zu diesem Zweck schließt sich erfindungsgemäß ein für die Aufnahme des Gettermaterials vorgesehenes Getterrohr an das für die Aufnahme der Innenelektrode vorgesehene Innenelektrodenrohr koaxial an, ist von diesem aber durch eine Trennwand gasdicht getrennt. Dadurch ist der Weg vom Gettermaterial zu den Außenelektroden relativ lang. Durch den langen Weg zwischen Gettermaterial und Elektroden werden parasitäre Entladungen vermieden oder zumindest deutlich reduziert. Durch die Trennwand zwischen Getterrohr und Innenelektrodenrohr ist der durch das Getterrohr gebildete Getterraum und folglich auch der mit dem Getterraum über die Getterrohröffnung in Verbindung stehende Entladungsraum nach Außen gasdicht abgeschlossen.The basic idea of the invention is that the getter space is limited to an area close to the axis, i. is not arranged in the extension of the annular gap-shaped discharge space. For this purpose, according to the invention, a getter tube provided for receiving the getter material coaxially adjoins the inner electrode tube provided for receiving the inner electrode, but is separated from it gas-tight by a partition wall. As a result, the way from the getter material to the outer electrodes is relatively long. Due to the long path between getter material and electrodes parasitic discharges are avoided or at least significantly reduced. Due to the partition wall between the getter tube and the inner electrode tube, the gettering space formed by the getter tube and consequently also the discharge space communicating with the gettering space via the getter tube opening is sealed to the outside in a gastight manner.
Das Getterrohr kann dadurch ausgebildet sein, dass das Innenrohr über die Länge der Innenelektrode hinaus verlängert ist. Dabei ist der für die Aufnahme des Gettermaterials vorgesehene Rohrabschnitt vom Rest des Innenrohrs mittels einer separat eingesetzten und eingeschweißten Trennwand gasdicht getrennt. Mit anderen Worten sind in diesem Fall das den Getterraum bildende Getterrohr und das die Innenelektrode aufnehmende Innenelektrodenrohr funktional unterschiedliche und durch die Trennwand getrennte Abschnitte des selben einteiligen Innenrohrs.The getter tube may be formed by extending the inner tube beyond the length of the inner electrode. In this case, provided for the reception of the getter material pipe section from the rest of the inner tube by means of a separately inserted and welded partition gas-tight manner. In other words, in this case, the getter tube forming the getter space and the inner electrode tube receiving the inner electrode are functionally different and separated by the partition portions of the same one-piece inner tube.
Alternativ kann das Getterrohr durch ein separates Rohr ausgebildet sein, das sich an das in das Außenrohr hineinragende Ende des Innenelektrodenrohrs anschließt, d.h. das Innenrohr umfasst in diesem Fall zwei separate Rohrteile: nämlich das Innenelektrodenrohr und das Getterrohr. Die die beiden Rohrteile gasdicht trennende Trennwand ist durch ein entsprechendes gasdicht verschlossenes Ende einer der beiden Rohrteile ausgebildet. D.h. die Trennwand ist beispielsweise durch das gasdicht verschlossene Ende des Innenelektrodenrohrs (8) ausgebildet, an das das Getterrohr angesetzt und damit gasdicht verbunden wird. Es kann aber auch umgekehrt erst das Getterrohr an einem Ende verschlossen und dann mit diesem verschlossenen Ende an das offene Ende des Innenelektrodenrohrs angesetzt und verbunden werden.Alternatively, the getter tube may be formed by a separate tube which adjoins the end of the inner electrode tube protruding into the outer tube, ie in this case the inner tube comprises two separate tube parts: namely the inner electrode tube and the getter tube. The two tube parts gas-tight separating partition is formed by a corresponding gas-tight closed end of one of the two tube parts. That is, the partition wall is formed for example by the gas-tight closed end of the inner electrode tube (8), to which the getter tube is attached and thus connected gas-tight. But it can also reverse the first getter tube closed at one end and then attached and connected with this closed end to the open end of the inner electrode tube.
Außerdem können der Durchmesser des Innenelektrodenrohrs und der Durchmesser des Getterrohrs gleich oder unterschiedlich sein. Zur sicheren Anordnung des Gettermaterials kann es auch vorteilhaft sein, das Getterrohr in Richtung Öffnung zu verjüngen.In addition, the diameter of the inner electrode tube and the diameter of the getter tube may be the same or different. For a secure arrangement of the getter material, it may also be advantageous to taper the getter tube in the direction of the opening.
Die Länge des Getterrohrs in Achsrichtung ist so abgestimmt, dass eine ausreichende Menge Gettermaterial aufgenommen werden kann. Andererseits sollte das Getterrohr nicht zu lang sein, da sonst der strahlende Abschnitt - dieser erstreckt sich nur auf den Bereich mit der Innenelektrode - bezogen auf die Gesamtlänge des Strahlers zu sehr reduziert wird. In der Praxis haben sich, je nach Gesamtlänge des Strahlers, für das Getterrohr Längen im Bereich zwischen ca. 0,5 cm und 5 cm als geeignet erwiesen.The length of the getter tube in the axial direction is adjusted so that a sufficient amount of getter material can be absorbed. On the other hand, the getter tube should not be too long, otherwise the radiating portion - this extends only to the area with the inner electrode - based on the total length of the radiator is reduced too much. In practice, depending on the total length of the radiator, lengths in the range between approximately 0.5 cm and 5 cm have proven suitable for the getter tube.
Das Gettermaterial kann beispielsweise zumindest auf einen Teil der Innenfläche des Getterrohrs aufgebracht sein, z.B. indem Barium aufgedampft ist. Das Gettermaterial kann aber auch in anderer Weise im Getterrohr angeordnet sein, beispielsweise in Streifenform im Getterrohr eingeklemmt oder ähnliches. Neben Barium kommen auch andere geeignete Gettermaterialien in Betracht, beispielsweise poröse oder pulverige Oxide, Nitride und Carbide sowie Titan, Tantal, Aluminium, Zirkonium und Kombinationen davon.The getter material may for example be applied to at least a part of the inner surface of the getter tube, for example by barium vapor deposition. However, the getter material can also be arranged in another way in the getter tube be, for example, clamped in strip form in Getterrohr or the like. In addition to barium, other suitable getter materials come into consideration, for example, porous or powdery oxides, nitrides and carbides and titanium, tantalum, aluminum, zirconium and combinations thereof.
Um den für die Wirkung des Gettermaterials notwendigen Austausch des Entladungsmediums zwischen Entladungsraum und axialem Getterraum zu fördern, ist vorzugsweise der Durchmesser der Öffnung des Getterrohrs gleich groß oder größer als der die Schlagweite der Entladung definierende Abstand zwischen der Außenseite des Innenrohrs und der Innenseite des Außenrohrs.In order to promote the exchange of the discharge medium between the discharge space and the axial getter space, which is necessary for the effect of the getter material, preferably the diameter of the opening of the getter tube is equal to or greater than the distance between the outside of the inner tube and the inside of the outer tube defining the distance of the discharge.
Außerdem kann es insbesondere bei langen Rohren zur Unterdrückung von Schwingungen sowie zur Stabilisierung des Innenrohrs vorteilhaft sein, das freie Ende des Innenrohrs, beispielsweise im Bereich des Getterrohrs, mit einem geeigneten Mittel, z.B. einer passenden Haltescheibe zwischen Innen- und Außenrohr abzustützen. Um den Austausch des Entladungsmediums und folglich die Getterwirkung nicht zu beeinträchtigen, muss die Haltescheibe aber entsprechende Öffnungen, beispielsweise Bohrungen, Schlitze oder ähnliches aufweisen.In addition, it may be advantageous in particular for long pipes to suppress vibrations and to stabilize the inner tube, the free end of the inner tube, for example in the getter tube, with a suitable means, e.g. support a matching retaining washer between inner and outer tube. In order not to interfere with the replacement of the discharge medium and thus the getter, but the retaining plate must have corresponding openings, such as holes, slots or the like.
Im Folgenden soll die Erfindung anhand eines Ausführungsbeispiels näher erläutert werden. Die Figuren zeigen:
- Fig. 1a
- eine Längsschnittsdarstellung einer erfindungsgemäßen dielektrischen Barriere-Entladungslampe,
- Fig. 1b
- eine Querschnittsdarstellung der Lampe aus
Fig. 1a entlang der Schnittlinie AB.
- Fig. 1a
- a longitudinal sectional view of a dielectric barrier discharge lamp according to the invention,
- Fig. 1b
- a cross-sectional view of the lamp
Fig. 1a along the section line AB.
In den Figuren werden gleiche oder funktionsgleiche Elemente mit den gleichen Bezugszeichen versehen.In the figures, identical or functionally identical elements are provided with the same reference numerals.
Die
Insbesondere bei relativ langen Rohren kann es zur Vermeidungen von Schwingungen des Innenrohrs vorgesehen sein, das Innenrohr, bevorzugt im Bereich des Getterrohrs, mit Hilfe einer passenden Haltescheibe abzustützen (nicht dargestellt). Dazu weist die Haltescheibe eine zentrische Bohrung auf, damit sie auf das Innenrohr passt. Der Außendurchmesser der Haltescheibe ist außerdem so bemessen, dass die Haltescheibe gerade zwischen Innen- und Außenrohr passt. Um den Austausch des Entladungsmediums zwischen Entladungsraum und Getterraum und folglich die Getterwirkung nicht zu beeinträchtigen, ist die Haltescheibe mit geeigneten Öffnungen, beispielsweise Bohrungen, Schlitzen etc. versehen.Especially with relatively long pipes, it can be provided to avoid vibrations of the inner tube be, to support the inner tube, preferably in the area of the getter tube, with the aid of a suitable retaining washer (not shown). For this purpose, the retaining disc has a central bore, so that it fits on the inner tube. The outer diameter of the retaining washer is also sized so that the retaining washer just fits between the inner and outer tube. In order not to interfere with the replacement of the discharge medium between the discharge space and Getterraum and consequently the Getterwirkung, the retaining plate with suitable openings, such as holes, slots, etc. provided.
Zum Einbau in eine Prozesskammer kann der Strahler zumindest an einem Ende, vorzugsweise an dem Ende mit der Getterkammer, oder auch an beiden Enden jeweils mit einem Sockel versehen sein (nicht dargestellt).For installation in a process chamber, the radiator can be provided with a base at least at one end, preferably at the end with the getter chamber, or at both ends (not shown).
Claims (12)
- Dielectric barrier discharge lamp (1) with a coaxial double-tube arrangement witho a discharge vessel, which- comprises an outer tube (2) and an inner tube (3), wherein- the inner tube (3) is arranged coaxially within the outer tube (2),- the inner tube (3) and the outer tube (2) are connected to one another in a gas-tight manner, as a result of which a discharge space (4) filled with a discharge medium is formed between the inner and outer tubes,o an outer electrode (12), which is arranged on the outside of the outer tube (2),o an inner electrode (7), which is arranged within the inner tube (2),o a getter material (9), which is in contact with the discharge medium,characterized in thato the inner tube (3) is shorter than the outer tube (2),o the inner tube (3) and the outer tube are connected to one another in a gas-tight manner at one of their respective ends,o the outer tube (2) is sealed in a gas-tight manner at its other end,o the inner tube (3), which protrudes into the outer tube (2), comprises the following:- a first tube section, the inner electrode tube (8), in which the inner electrode (7) is arranged,- a second tube section, the getter tube (10), in which the getter material (9) is arranged,- a dividing wall (11), which separates the two tube sections from one another in a gas-tight manner.
- Lamp according to Claim 1, wherein the inner tube (3) with the two tube sections, the inner electrode tube (8) and the getter tube (10), is formed as one part.
- Lamp according to Claim 1, wherein the getter tube (10) is formed by a separate tube which coaxially adjoins that end of the inner electrode tube (8) which protrudes into the outer tube (2), and wherein the dividing wall (11) is formed by the corresponding end, which is sealed in a gas-tight manner, of the getter tube (10) or the inner electrode tube (8).
- Lamp according to one of the preceding claims, wherein the diameter of the opening (D) of the getter tube (10) is equal to or greater than the distance between the outer side of the inner tube (3) and the inner side of the outer tube (2), which distance defines the flashover path (G) of the discharge.
- Lamp according to one of the preceding claims, wherein at least part of the inner surface of the getter tube (10) is provided with getter material.
- Lamp according to one of the preceding claims, wherein the diameters of the inner electrode tube (8) and the getter tube (10) are different.
- Lamp according to one of the preceding claims, wherein the length of the getter tube (10) in the direction of the longitudinal axis of the discharge vessel is in the range between 0.5 cm and 5 cm.
- Lamp according to one of the preceding claims, wherein the inner tube is supported with the aid of a holding means.
- Lamp according to Claim 8, wherein the holding means is arranged in the region of the getter tube.
- Lamp according to either of Claims 8 and 9, wherein the holding means is an annular holding disk, which extends between the outer side of the inner tube and the inner side of the outer tube.
- Lamp according to Claim 10, wherein the holding disk has, in addition to a central bore, at least one further opening.
- Lamp according to one of the preceding Claims, wherein the getter material comprises the following elements individually or in combination: porous or pulverulent oxides, nitrides and carbides as well as barium, titanium, tantalum, aluminum, zirconium.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/EP2008/059220 WO2010006642A1 (en) | 2008-07-15 | 2008-07-15 | Dielectric barrier discharge lamp configured as a coaxial double tube having a getter |
Publications (2)
Publication Number | Publication Date |
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EP2297772A1 EP2297772A1 (en) | 2011-03-23 |
EP2297772B1 true EP2297772B1 (en) | 2012-02-15 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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EP08775080A Active EP2297772B1 (en) | 2008-07-15 | 2008-07-15 | Dielectric barrier discharge lamp configured as a coaxial double tube having a getter |
Country Status (8)
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US (1) | US8174191B2 (en) |
EP (1) | EP2297772B1 (en) |
JP (1) | JP5165108B2 (en) |
KR (1) | KR101216481B1 (en) |
CN (1) | CN102084456B (en) |
AT (1) | ATE545947T1 (en) |
TW (1) | TWI467630B (en) |
WO (1) | WO2010006642A1 (en) |
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WO2010066298A1 (en) * | 2008-12-11 | 2010-06-17 | Osram Gesellschaft mit beschränkter Haftung | Uv light having a plurality of uv lamps, particularly for technical product processing |
WO2012127484A1 (en) | 2011-03-24 | 2012-09-27 | Yogesh Chunilal Rathod | A system and method for managing, monitoring, tracking, updating, measuring and facilitate maintaining user status & state |
US9368338B2 (en) | 2011-06-16 | 2016-06-14 | Mocon, Inc. | Gas discharge lamp with an axially extending strip of getter and method of manufacture |
JP6365096B2 (en) * | 2014-08-07 | 2018-08-01 | ウシオ電機株式会社 | UV irradiation type ozone generator |
JP6662238B2 (en) * | 2015-10-19 | 2020-03-11 | 東芝ライテック株式会社 | Packing structure of multiple tube discharge lamp and package of multiple tube discharge lamp |
USD797984S1 (en) | 2016-03-24 | 2017-09-19 | Mocon, Inc. | UV lamp |
US11037778B1 (en) | 2021-01-14 | 2021-06-15 | Mocon, Inc. | UV lamp |
WO2023217824A1 (en) | 2022-05-12 | 2023-11-16 | Signify Holding B.V. | Disinfection lamp with reflector |
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JPH06994A (en) * | 1992-06-18 | 1994-01-11 | Tokyo Electric Co Ltd | Line head |
EP0607960B2 (en) * | 1993-01-20 | 2001-05-16 | Ushiodenki Kabushiki Kaisha | Dielectric barrier discharge lamp |
JP2775695B2 (en) * | 1993-05-27 | 1998-07-16 | ウシオ電機株式会社 | Dielectric barrier discharge lamp |
TW348262B (en) * | 1993-09-08 | 1998-12-21 | Ushio Electric Inc | Dielectric barrier discharge lamp |
JP2775699B2 (en) * | 1994-09-20 | 1998-07-16 | ウシオ電機株式会社 | Dielectric barrier discharge lamp |
JP3319330B2 (en) | 1997-04-03 | 2002-08-26 | ウシオ電機株式会社 | Discharge lamp |
JP2000173554A (en) * | 1998-12-01 | 2000-06-23 | Md Komu:Kk | Dielectric barrier discharge lamp |
JP3666407B2 (en) | 2001-04-19 | 2005-06-29 | ウシオ電機株式会社 | Dielectric barrier discharge lamp |
JP2006228563A (en) * | 2005-02-17 | 2006-08-31 | Ushio Inc | Excimer lamp |
JP2006244898A (en) * | 2005-03-04 | 2006-09-14 | Ushio Inc | Excimer lamp |
JP5303905B2 (en) * | 2007-11-06 | 2013-10-02 | ウシオ電機株式会社 | Excimer lamp |
-
2008
- 2008-07-15 CN CN2008801302459A patent/CN102084456B/en active Active
- 2008-07-15 JP JP2011517760A patent/JP5165108B2/en not_active Expired - Fee Related
- 2008-07-15 EP EP08775080A patent/EP2297772B1/en active Active
- 2008-07-15 KR KR1020117003525A patent/KR101216481B1/en active IP Right Grant
- 2008-07-15 US US12/737,405 patent/US8174191B2/en active Active
- 2008-07-15 AT AT08775080T patent/ATE545947T1/en active
- 2008-07-15 WO PCT/EP2008/059220 patent/WO2010006642A1/en active Application Filing
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TWI467630B (en) | 2015-01-01 |
KR20110041523A (en) | 2011-04-21 |
US20110101858A1 (en) | 2011-05-05 |
WO2010006642A1 (en) | 2010-01-21 |
JP2011528157A (en) | 2011-11-10 |
JP5165108B2 (en) | 2013-03-21 |
ATE545947T1 (en) | 2012-03-15 |
EP2297772A1 (en) | 2011-03-23 |
CN102084456A (en) | 2011-06-01 |
KR101216481B1 (en) | 2013-01-09 |
TW201009890A (en) | 2010-03-01 |
US8174191B2 (en) | 2012-05-08 |
CN102084456B (en) | 2012-11-28 |
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