EP1849178B1 - Dielectric barrier discharge lamp configured as a double tube - Google Patents
Dielectric barrier discharge lamp configured as a double tube Download PDFInfo
- Publication number
- EP1849178B1 EP1849178B1 EP06705909.7A EP06705909A EP1849178B1 EP 1849178 B1 EP1849178 B1 EP 1849178B1 EP 06705909 A EP06705909 A EP 06705909A EP 1849178 B1 EP1849178 B1 EP 1849178B1
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- EP
- European Patent Office
- Prior art keywords
- discharge lamp
- dielectric barrier
- barrier discharge
- lamp according
- electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
Definitions
- the invention is based on a dielectric barrier discharge lamp with a discharge vessel in coaxial double tube arrangement, i. an inner tube is coaxially disposed within an outer tube. Inner tube and outer tube are connected to each other at their two end faces and thus form the gas-tight discharge vessel. The discharge space enclosed by the discharge vessel thus extends between the inner and outer tubes.
- This type of discharge lamp typically has a first electrode disposed within the inner tube and a second electrode disposed on the outer surface of the outer tube. Both electrodes are thus outside the discharge vessel. It is in this case therefore a two-sided dielectrically impeded discharge.
- this term refers only to the spatial arrangement of the relevant electrode with respect to the coaxial double-tube arrangement, i. within the inner tube or on the outside of the outer tube.
- This type of lamp is used in particular for UV irradiation in process technology, for example for surface cleaning and activation, photolytics, ozone generation, drinking water purification, metallization, and UV curing.
- the term radiator or UV lamps is also common.
- the coaxial arrangement of two tubes allows the construction of lamps with very long lengths. Long lamps are for high performance Of importance, since the maximum coupled into the lamp power increases with the length.
- attaching the inner electrode causes problems with long lamps, for example longer than 1 m, as well as lamps with a small inner tube diameter.
- the inner electrode should rest firmly against the wall of the inner tube, ie without sagging, on the other hand, it should be as easy to assemble. This problem is exacerbated when the discharge vessel is bent, for example, U-shaped.
- a generic dielectric barrier discharge lamp is in the document DE 196 13 502 A1 described. It is an excimer radiator with a closed discharge space, which is formed as an annular gap between two coaxially arranged quartz glass tubes.
- the discharge space contains a discharge gas forming excimer under discharge conditions.
- On the outside of the wall of the outer quartz glass tube is provided an outer electrode in the form of a net, while the inner electrode is formed by a voltage applied to the inside of the wall of the inner quartz glass tube wire spiral. Due to the relatively large distance to the neighboring electrode, the areas of high field strength concentrate in a spatially small area and there is a high field strength gradient at the radiator surface. This can make it easier to form filaments in the area of the wire spiral.
- Radiation generation can be achieved by suitable choice of electrical operation, as in the Scriptures EP 733 266 B1 described, be made more efficient in connection with suitable electrode arrangements.
- a negative high voltage on the inner conductor (cathode side) form ⁇ -like discharge structures, the tip of which lies on the cathode side.
- the inner electrode is designed in the form of a metal tube with a longitudinal slot extending in the direction of the radiator axis.
- the slotted metal tube is slightly rolled up and then inserted into the inner tube.
- a firm abutment of the inner electrode on the wall of the inner tube is achieved, so that the discharge filaments forming numerous discharge filaments are distributed substantially homogeneously.
- the filaments tend to migrate along the longitudinal slot.
- the JPH10241633 A shows a dielectric barrier discharge lamp.
- the object of the present invention is to provide a dielectric barrier discharge lamp in a coaxial double tube arrangement with an improved inner electrode.
- the inner electrode is designed in the form of a conductive brush, which is formed, for example, by weaving thin metal threads, the braid wires or bristles, into two twisted metal wires, also called twisted wires.
- the rotary wires in the axial direction and the sizing wires in bristle tufts run radially in the direction of the inner wall of the inner tube and touch with the tips of the inner tube.
- the trimming wires can also be radially embedded in an elongated axial support.
- a very dense and uniform coverage of the internal surface of the radiator with individual electrodes is achieved with the aid of the conductive brush according to the invention as the inner electrode.
- the homogeneous discharge structure remains because of the large number of possible Discharge points received.
- the inner electrode is designed as a round brush.
- the round brush electrode may be made of fine filaments of conductive material (bristles) woven into two or more spirally wound carrier wires (twisted wires). At least one of the twisted wires is electrically conductive.
- the bristles are aligned substantially perpendicular to the twisted wires and spiral around the twisted wires in bristle tufts.
- the outer diameter of the round brush is a little larger than the inner diameter of the inner tube to ensure a secure contact. Due to the larger outer diameter of the brush in the relaxed state compared with the inner diameter of the inner tube, a concern of the bristles or fine metal wires, preferably not only with the tips guaranteed.
- the diameter in the relaxed state results when the brush is not installed.
- Under the outer diameter is understood to mean the maximum diameter of the cross section perpendicular to the brush longitudinal axis.
- the spiral shape of the inner electrode prevents unwanted migration of the discharge filaments very effectively regardless of the spatial orientation of the discharge lamp.
- the preferably elastic deformability of the round brush facilitates installation in the inner tube.
- the inner electrode thus formed is also suitable for bent inner tubes.
- the distance of the bristles within a bristle tuft in the relaxed state is 0.01 mm to 1 mm.
- the distance is between 0.05 mm and 0.2 mm.
- twisted wires As favorable in view of their elastic deformability, twisted wires have been found with thicknesses between 0.2 mm and 2 mm.
- a material for both the twisted wires and the bristles is preferably stainless steel.
- the inner electrode in the form of a brush according to the invention is particularly well suited. Due to its flexibility, the inner electrode according to the invention can adapt to the bending of the inner tube. The bend can be executed both as a kink and as a continuous curvature. As examples, a circular, semicircular, banana-shaped or U-shaped curvature of the inner tube should be mentioned.
- the internal electrode according to the invention combines simple assembly with a uniform occupancy of the inner surface of the inner tube and consequently a homogeneous discharge within the discharge vessel. Plus, it's easy to make.
- the at least one further electrode is typically arranged on the outside of the outer tube.
- outer electrode inter alia, both net-like and strip or line-shaped electrodes come into consideration.
- a reflector can be provided on the rear side of the lamp according to the invention, ie on the side opposite to the side intended for the light emission, preferably of aluminum, which can simultaneously act as an earth electrode.
- the lamp according to the invention can be embedded in a metal block, for example made of aluminum, and also several lamps next to one another. At this Variant, the metal block acts as an outer electrode, preferably at ground potential.
- a cooling system can be connected.
- FIGS. 1a, 1b show a highly schematic representation of a side view and a cross-sectional view of a first embodiment of the inventive dielectric barrier discharge lamp 1.
- the elongated discharge vessel of the lamp 1 consists of an outer tube 2 and an inner tube 3 in coaxial double tube arrangement, which define the longitudinal axis of the discharge vessel.
- the length of the dielectric barrier discharge lamp 1 designed for an electric power consumption of 20 W is 20 cm.
- the outer tube 2 has a diameter of 40 mm and a wall thickness of 1 mm.
- the inner tube 3 has a Diameter of 11 mm and a wall thickness of 1.2 mm. Both tubes 2, 3 consist of UV radiation permeable quartz glass.
- the discharge vessel is closed at its two end faces such that an elongated, annular gap-shaped discharge space 4 is formed.
- the discharge vessel has suitably shaped, annular vessel sections 5 at its two ends.
- a pumping tube (not shown) is attached to one of the vessel sections 5, with the aid of which the discharge space 4 is first evacuated and then filled with 15 kPa xenon.
- a total of eight uniformly distributed, line-shaped outer electrodes 5 of width 1 mm are arranged parallel to the longitudinal axis of the discharge vessel.
- a round brush-shaped inner electrode 6 is arranged inside the inner tube 3, ie also outside the discharge space 4 enclosed by the discharge vessel.
- the inner electrode 6 consists of an axial support element 7 (shown here only in simplified form) and numerous bristles 8.
- the support element 7 is formed from two twisted stainless steel wires (twisted wires), each 1 mm in diameter (not shown). Numerous stainless steel wires, each 0.06 mm in diameter, are woven spirally along the entire length of the carrier element 7 in tufts into these two twisted wires of the carrier element 7, which are oriented radially to the carrier element 7 and act as bristles 8.
- FIG. 2 shows a further embodiment, wherein the same features as in FIG. 1a, 1b are provided with the same reference numerals.
- FIGS. 3a, 3b show in a highly schematic representation of a side view and a cross-sectional view of another embodiment. Again, same features as in FIG. 1a, 1b are provided with the same reference numerals.
- the dielectric barrier discharge lamp 9 shown schematically there differs from that in FIG. 1a, 1b shown lamp in that here the inner electrode is provided only semi-cylindrical with radial bristles 8.
- the outside of the wall of the outer tube 2 is half-shell-shaped with an outer electrode 16 made of aluminum, which extends along the entire length of the outer tube 2.
- the outer electrode 16 is oriented so that it is directly opposite the semicircular brush-shaped inner electrode. This causes a preferred direction for the radiation.
- the outer electrode 16 may for example be vapor-deposited, glued or plugged.
- the outer electrode may also be formed by a metal block, in which the lamp is partially embedded.
- FIG 5 an embodiment is shown schematically in which the discharge vessel and thus the inner tube 17 and the outer tube 18 are bent in a U-shape.
- the flexible inner electrode 6 according to the invention is easily able to follow this bend.
- the inner electrode 6 is relatively easy to insert into the inner tube.
Description
Die Erfindung geht aus von einer dielektrische Barriere-Entladungslampe mit einem Entladungsgefäß in koaxialer Doppelrohranordnung, d.h. ein Innenrohr ist koaxial innerhalb eines Außenrohrs angeordnet. Dabei sind Innenrohr und Außenrohr an ihren beiden Stirnseiten miteinander verbunden und bilden so das gasdichte Entladungsgefäß. Der vom Entladungsgefäß umschlossene Entladungsraum erstreckt sich also zwischen Innen- und Außenrohr.The invention is based on a dielectric barrier discharge lamp with a discharge vessel in coaxial double tube arrangement, i. an inner tube is coaxially disposed within an outer tube. Inner tube and outer tube are connected to each other at their two end faces and thus form the gas-tight discharge vessel. The discharge space enclosed by the discharge vessel thus extends between the inner and outer tubes.
Diese Art von Entladungslampen weist typischerweise eine erste Elektrode auf, die innerhalb des Innenrohrs angeordnet ist und eine zweite Elektrode, die auf der Außenseite des Außenrohrs angeordnet ist. Beide Elektroden befinden sich somit außerhalb des Entladungsgefäßes. Es handelt sich in diesem Fall also um eine zweiseitig dielektrisch behinderte Entladung. Wenn im Folgenden der Einfachheit wegen gelegentlich von der inneren Elektrode oder Innenelektrode und äußeren Elektrode oder Außenelektrode die Rede ist, so bezieht sich diese Bezeichnung folglich lediglich auf die räumliche Anordnung der betreffenden Elektrode bezüglich der koaxialen Doppelrohranordnung, d.h. innerhalb des Innenrohrs bzw. auf der Außenseite des Außenrohrs.This type of discharge lamp typically has a first electrode disposed within the inner tube and a second electrode disposed on the outer surface of the outer tube. Both electrodes are thus outside the discharge vessel. It is in this case therefore a two-sided dielectrically impeded discharge. In the following, for reasons of simplicity, when the internal electrode or inner electrode and outer electrode or outer electrode are occasionally referred to, this term refers only to the spatial arrangement of the relevant electrode with respect to the coaxial double-tube arrangement, i. within the inner tube or on the outside of the outer tube.
Anwendung findet dieser Lampentyp insbesondere für die UV-Bestrahlung in der Prozesstechnik, beispielsweise für die Oberflächenreinigung und - aktivierung, Photolytik, Ozonerzeugung, Trinkwasserreinigung, Metallisierung, und UV-Curing. In diesem Zusammenhang ist auch die Bezeichnung Strahler oder UV-Strahler gebräuchlich.This type of lamp is used in particular for UV irradiation in process technology, for example for surface cleaning and activation, photolytics, ozone generation, drinking water purification, metallization, and UV curing. In this context, the term radiator or UV lamps is also common.
Die koaxiale Anordnung zweier Rohre, z.B. aus Quarzglas, ermöglicht den Bau von Lampen mit sehr großen Längen. Lange Lampen sind für hohe Leistungen von Bedeutung, da die maximal in die Lampe einkoppelbare Leistung mit der Länge zunimmt. Allerdings bereitet das Anbringen der inneren Elektrode bei langen Lampen, z.B. länger als 1 m, sowie bei Lampen mit kleinem Innenrohrdurchmesser Probleme. Einerseits soll die innere Elektrode fest an der Wand des Innenrohrs anliegen, d.h. ohne durchzuhängen, andererseits soll sie möglichst leicht zu montieren sein. Dies Problematik verschärft sich noch, wenn das Entladungsgefäß gebogen ist, beispielsweise U-förmig.The coaxial arrangement of two tubes, such as quartz glass, allows the construction of lamps with very long lengths. Long lamps are for high performance Of importance, since the maximum coupled into the lamp power increases with the length. However, attaching the inner electrode causes problems with long lamps, for example longer than 1 m, as well as lamps with a small inner tube diameter. On the one hand, the inner electrode should rest firmly against the wall of the inner tube, ie without sagging, on the other hand, it should be as easy to assemble. This problem is exacerbated when the discharge vessel is bent, for example, U-shaped.
Eine gattungsgemäße dielektrische Barriere-Entladungslampe ist in der Schrift
Die Strahlungserzeugung kann durch geeignete Wahl der elektrischen Betriebsweise, wie in der Schrift
Aus der Schrift
In der Schrift
Eine andere Möglichkeit ist das Aufbringen von leitfähigen Beschichtung im Innern des inneren Rohrs. Auch dieses Verfahren ist recht aufwändig, da lange Trocken- und Einbrennzeiten benötigt werden. Die
Die Aufgabe der vorliegenden Erfindung ist es, eine dielektrische Barriere-Entladungslampe in koaxialer Doppelrohranordnung mit verbesserter inneren Elektrode anzugeben.The object of the present invention is to provide a dielectric barrier discharge lamp in a coaxial double tube arrangement with an improved inner electrode.
Diese Aufgabe wird gelöst durch eine dielektrische Barriere-Entladungslampe mit
- o einem Entladungsgefäß, das
- o ein Außenrohr und ein Innenrohr umfasst, wobei
- ▪ das Innenrohr innerhalb des Außenrohrs angeordnet ist,
- ▪ das Innenrohr und das Außenrohr gasdicht miteinander verbunden sind, wodurch zwischen Innen- und Außenrohr ein mit einem Entladungsmedium gefüllter Entladungsraum gebildet ist,
- o ein Außenrohr und ein Innenrohr umfasst, wobei
- o einer ersten Elektrode und mindestens einer weiteren Elektrode, wobei
- o die erste Elektrode innerhalb des Innenrohrs angeordnet ist,
die erste Elektrode in der Form einer elektrisch leitfähigen Bürste ausgebildet ist.This object is achieved by a dielectric barrier discharge lamp with
- o a discharge vessel, the
- o comprises an outer tube and an inner tube, wherein
- The inner tube is arranged inside the outer tube,
- ▪ the inner tube and the outer tube are connected to one another in a gastight manner, whereby a discharge space filled with a discharge medium is formed between the inner and outer tubes,
- o comprises an outer tube and an inner tube, wherein
- o a first electrode and at least one further electrode, wherein
- the first electrode is arranged inside the inner tube,
the first electrode is in the form of an electrically conductive brush.
Besonders vorteilhafte Ausgestaltungen finden sich in den abhängigen Ansprüchen.Particularly advantageous embodiments can be found in the dependent claims.
Ausgehend von der eingangs beschriebenen dielektrischen Barriere-Entladungslampe ist erfindungsgemäß die innere Elektrode in Form einer leitfähigen Bürste ausgebildet, die z.B. durch Einweben von dünnen Metallfäden, den Besatzdrähten oder Borsten, in zwei ineinander verdrehte Metalldrähte, auch Drehdrähte genannt, ausgebildet ist. Dabei verlaufen die Drehdrähte in Achsrichtung und die Besatzdrähte in Borstenbüscheln radial in Richtung der inneren Wand des Innenrohrs und berühren mit den Spitzen das Innenrohr. Alternativ können die Besatzdrähte auch in einen länglichen axialen Träger radial eingelassen sein. Jedenfalls wird mit Hilfe der erfindungsgemäßen leitfähigen Bürste als Innenelektrode eine sehr dichte und gleichmäßige Belegung der Strahlerinnenfläche mit Einzelelektroden erzielt. Die homogene Entladungsstruktur bleibt wegen der Vielzahl der möglichen Entladungspunkte erhalten. Darüber hinaus hat man aber noch den Vorteil einer geringfügigen lokalen Feldüberhöhung, die die Zünd- bzw. Betriebsspannung verringert.Starting from the dielectric barrier discharge lamp described above, according to the invention, the inner electrode is designed in the form of a conductive brush, which is formed, for example, by weaving thin metal threads, the braid wires or bristles, into two twisted metal wires, also called twisted wires. In this case, the rotary wires in the axial direction and the sizing wires in bristle tufts run radially in the direction of the inner wall of the inner tube and touch with the tips of the inner tube. Alternatively, the trimming wires can also be radially embedded in an elongated axial support. In any case, a very dense and uniform coverage of the internal surface of the radiator with individual electrodes is achieved with the aid of the conductive brush according to the invention as the inner electrode. The homogeneous discharge structure remains because of the large number of possible Discharge points received. In addition, one still has the advantage of a slight local field increase, which reduces the ignition or operating voltage.
In einer bevorzugten Ausgestaltung ist die innere Elektrode als Rundbürste ausgebildet. Die Rundbürstenelektrode kann beispielsweise aus feinen Fäden aus leitfähigem Material bestehen (Borsten), die in zwei oder mehr spiralförmig aufgewickelte Trägerdrähte (Drehdrähte) eingewebt sind. Mindestens einer der Drehdrähte ist elektrisch leitfähig. Die Borsten sind im wesentlichen senkrecht zu den Drehdrähten ausgerichtet und winden sich in Borstenbüscheln spiralförmig um die Drehdrähte. Der Außendurchmesser der Rundbürste ist dabei ein wenig größer als der Innendurchmesser des Innenrohres, um eine sichere Kontaktierung zu gewährleisten. Durch den größeren Außendurchmesser der Bürste im entspannten Zustand verglichen mit dem Innendurchmesser des Innenrohrs ist ein Anliegen der Borsten bzw. feinen Metalldrähte, vorzugsweise nicht nur mit deren Spitzen, gewährleistet. Der Durchmesser im entspannten Zustand ergibt sich bei nicht eingebauter Bürste. Unter dem Außendurchmesser wird dabei der maximale Durchmesser des Querschnitts senkrecht zur Bürsten-Längsachse verstanden. Durch das erwähnte geringfügige Anliegen der Borsten verringert sich auch der Effekt der unerwünscht übermäßigen lokalen Feldstärkeüberhöhungen. Die Spiralform der Innenelektrode verhindert ein unerwünschtes Wandern der Entladungsfilamente sehr effektiv und zwar unabhängig von der räumlichen Orientierung der Entladungslampe. Die vorzugsweise elastische Verformbarkeit der Rundbürste erleichtert die Montage im Innenrohr. Darüber hinaus ist die so ausgebildete innere Elektrode auch für gebogene Innenrohre geeignet.In a preferred embodiment, the inner electrode is designed as a round brush. For example, the round brush electrode may be made of fine filaments of conductive material (bristles) woven into two or more spirally wound carrier wires (twisted wires). At least one of the twisted wires is electrically conductive. The bristles are aligned substantially perpendicular to the twisted wires and spiral around the twisted wires in bristle tufts. The outer diameter of the round brush is a little larger than the inner diameter of the inner tube to ensure a secure contact. Due to the larger outer diameter of the brush in the relaxed state compared with the inner diameter of the inner tube, a concern of the bristles or fine metal wires, preferably not only with the tips guaranteed. The diameter in the relaxed state results when the brush is not installed. Under the outer diameter is understood to mean the maximum diameter of the cross section perpendicular to the brush longitudinal axis. By the mentioned minor concern of the bristles also reduces the effect of undesirable excessive local field strength peaks. The spiral shape of the inner electrode prevents unwanted migration of the discharge filaments very effectively regardless of the spatial orientation of the discharge lamp. The preferably elastic deformability of the round brush facilitates installation in the inner tube. In addition, the inner electrode thus formed is also suitable for bent inner tubes.
Vorteilhafterweise beträgt der Abstand der Borsten innerhalb eines Borstenbüschels im entspannten Zustand 0,01 mm bis 1 mm. Je kleiner der Spalt zwischen den benachbarten Borsten gewählt wird, d.h. mit zunehmender Dichte der Borsten, umso homogener ist die Entladung. Mit dichter werdendem Borstenabstand nimmt jedoch die Verformbarkeit der Bürste ab, was die Montage erschwert. Bevorzugt liegt der Abstand zwischen 0,05 mm und 0,2 mm.Advantageously, the distance of the bristles within a bristle tuft in the relaxed state is 0.01 mm to 1 mm. The smaller the gap between the adjacent bristles is chosen, ie with increasing density of the bristles, the more homogeneous the discharge. With denser bristle spacing, however, the deformability of the brush decreases, which is the Assembly difficult. Preferably, the distance is between 0.05 mm and 0.2 mm.
Besonders bewährt haben sich Borsten mit einem Durchmesser zwischen 0,005 mm und 0,5 mm, vorzugsweise zwischen 0,02 mm und 0,2 mm.Bristles with a diameter of between 0.005 mm and 0.5 mm, preferably between 0.02 mm and 0.2 mm, have proven particularly useful.
Als günstig im Hinblick auf ihre elastische Verformbarkeit haben sich Drehdrähte mit Dicken zwischen 0,2 mm und 2 mm erwiesen.As favorable in view of their elastic deformability, twisted wires have been found with thicknesses between 0.2 mm and 2 mm.
Als Material sowohl für die Drehdrähte als auch für die Borsten eignet sich vorzugsweise Edelstahl.As a material for both the twisted wires and the bristles is preferably stainless steel.
Für Entladungslampen mit gebogenem Innenrohr eignet sich die erfindungsgemäße in Form einer Bürste ausgebildete innere Elektrode besonders gut. Aufgrund ihrer Biegsamkeit kann sich die erfindungsgemäße innere Elektrode der Biegung des Innenrohres anpassen. Die Biegung kann sowohl als Knick als auch als kontinuierliche Krümmung ausgeführt sein. Als Beispiele wäre eine kreisförmige, halbkreisförmige, bananenförmige oder U-förmige Krümmung des Innenrohres zu nennen.For discharge lamps with a curved inner tube, the inner electrode in the form of a brush according to the invention is particularly well suited. Due to its flexibility, the inner electrode according to the invention can adapt to the bending of the inner tube. The bend can be executed both as a kink and as a continuous curvature. As examples, a circular, semicircular, banana-shaped or U-shaped curvature of the inner tube should be mentioned.
Die erfindungsgemäße innere Elektrode verbindet einfache Montage mit einer gleichmäßigen Belegung der Innenfläche des Innenrohrs und folglich einer homogenen Entladung innerhalb des Entladungsgefäßes. Außerdem lässt sie sich einfach herstellen.The internal electrode according to the invention combines simple assembly with a uniform occupancy of the inner surface of the inner tube and consequently a homogeneous discharge within the discharge vessel. Plus, it's easy to make.
Die mindestens eine weitere Elektrode ist typischerweise auf der Außenseite des Außenrohrs angeordnet. Als Außenelektrode kommen unter anderem sowohl netzartige als auch streifen- bzw. linienförmige Elektroden in Betracht. Für eine gerichtete Abstrahlung kann auf der Rückseite der erfindungsgemäßen Lampe, d.h. auf der Seite, die der für die Lichtabstrahlung vorgesehenen Seite entgegengesetzt ist, ein Reflektor vorgesehen sein, vorzugsweise aus Aluminium, der gleichzeitig als Erdelektrode fungieren kann. Alternativ kann die erfindungsgemäße Lampe in einen Metallblock, z.B. aus Aluminium, eingebettet sein, auch mehrere Lampe nebeneinander. Bei dieser Variante fungiert der Metallblock als Außenelektrode, vorzugsweise auf Erdpotential. Zusätzlich kann eine Kühlung angeschlossen sein.The at least one further electrode is typically arranged on the outside of the outer tube. As outer electrode, inter alia, both net-like and strip or line-shaped electrodes come into consideration. For a directed radiation, a reflector can be provided on the rear side of the lamp according to the invention, ie on the side opposite to the side intended for the light emission, preferably of aluminum, which can simultaneously act as an earth electrode. Alternatively, the lamp according to the invention can be embedded in a metal block, for example made of aluminum, and also several lamps next to one another. At this Variant, the metal block acts as an outer electrode, preferably at ground potential. In addition, a cooling system can be connected.
Im Folgenden soll die Erfindung anhand von Ausführungsbeispielen näher erläutert werden. Die Figuren zeigen:
- Fig. 1a
- eine erfindungsgemäße Entladungslampe mit einer rundbürstenförmigen inneren Elektrode in einer Seitenansicht,
- Fig. 1b
- eine Querschnittdarstellung des Ausführungsbeispiels aus
Figur 1a , - Fig. 2
- eine erfindungsgemäße Entladungslampe mit einer segmentierten inneren Elektrode in einer Seitenansicht,
- Fig. 3a
- eine erfindungsgemäße Entladungslampe mit einer halbrundbürstenförmigen inneren Elektrode in einer Seitenansicht,
- Fig. 3b
- eine Querschnittdarstellung des Ausführungsbeispiels aus
Figur 3a , - Fig. 4
- eine U-förmige erfindungsgemäße Entladungslampe mit einer rundbürstenförmigen inneren Elektrode in einer Seitenansicht.
- Fig. 1a
- a discharge lamp according to the invention with a round brush-shaped inner electrode in a side view,
- Fig. 1b
- a cross-sectional view of the embodiment of
FIG. 1a . - Fig. 2
- a discharge lamp according to the invention with a segmented inner electrode in a side view,
- Fig. 3a
- a discharge lamp according to the invention with a semicircular brush-shaped inner electrode in a side view,
- Fig. 3b
- a cross-sectional view of the embodiment of
FIG. 3a . - Fig. 4
- a U-shaped discharge lamp according to the invention with a round brush-shaped inner electrode in a side view.
Die
Die
In Figur 5 ist ein Ausführungsbeispiel schematisch dargestellt, bei dem das Entladungsgefäß und mithin das Innenrohr 17 und das Außenrohr 18 U-förmig gebogen sind. Die erfindungsgemäße flexible innere Elektrode 6 ist problemlos in der Lage, dieser Biegung zu folgen. Außerdem ist die innere Elektrode 6 aufgrund der Flexibilität sowohl des Trägerelements als auch der Borsten relativ problemlos in das Innenrohr einführbar.In Figure 5, an embodiment is shown schematically in which the discharge vessel and thus the
Claims (15)
- Dielectric barrier discharge lamp (1), havingo a discharge vessel, whicho comprises an outer tube (2) and an inner tube (3),▪ the inner tube (3) being arranged inside the outer tube (2),▪ the inner tube (3) and the outer tube (2) being connected to one another in a gas-tight manner, so that a discharge space (4) filled with a discharge medium is formed between the inner and outer tubes,∘ a first electrode (6) and at least one further electrode (5),∘ the first electrode (6) being arranged inside the inner tube (3),characterised in that
the first electrode (6) is configured in the form of an electrically conductive brush. - Dielectric barrier discharge lamp according to claim 1, wherein the brush-shaped first electrode (6) comprises an elongate carrier element (7) and bristles (8), which are arranged essentially radially with respect thereto and extend essentially as far as the wall of the inner tube (3).
- Dielectric barrier discharge lamp according to claim 1 or 2, wherein the carrier element (7) and the bristles (8) are made of a flexible material.
- Dielectric barrier discharge lamp according to claim 3, wherein the flexible material is metal, preferably stainless steel.
- Dielectric barrier discharge lamp according to any one of the preceding claims, wherein the carrier element (7) is provided with bristles over the entire circumference at least in sections, in the manner of a round brush.
- Dielectric barrier discharge lamp according to claim 5, wherein the diameter of the round brush-like electrode (6) in the extracted state is greater than the inner diameter of the inner tube (3) of the discharge vessel.
- Dielectric barrier discharge lamp according to any one of the preceding claims, wherein each bristle (8) consists of a wire.
- Dielectric barrier discharge lamp according to claim 7, wherein the diameter of the bristle wire is from 0.005 mm to 0.5 mm, preferably from 0.02 mm to 0.2 mm.
- Dielectric barrier discharge lamp according to claim 7, wherein the average mutual separation of the neighbouring bristle wires of the brush-like electrode in the extracted state is from 0.01 to 1 mm, preferably from 0.05 mm to 0.2 mm.
- Dielectric barrier discharge lamp according to any one of the preceding claims, wherein the carrier element consists of at least two wires twisted into one another.
- Dielectric barrier discharge lamp according to claim 10, wherein the diameter of each wire is from 0.2 mm to 2 mm.
- Dielectric barrier discharge lamp according to any one of the preceding claims, wherein the at least one further electrode (5) is arranged on the outer side of the outer tube (2).
- Dielectric barrier discharge lamp according to claim 12, wherein the at least one further electrode (5) is net-like, or strip-shaped or line-shaped.
- Dielectric barrier discharge lamp according to any one of claims 1 to 11, which is at least partially embedded in a metal block that functions as a further electrode.
- Dielectric barrier discharge lamp according to any one of the preceding claims, wherein the discharge tube is curved.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005006656A DE102005006656A1 (en) | 2005-02-14 | 2005-02-14 | Dielectric barrier discharge lamp in double tube configuration |
PCT/DE2006/000181 WO2006086942A2 (en) | 2005-02-14 | 2006-02-06 | Dielectric barrier discharge lamp configured as a double tube |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1849178A2 EP1849178A2 (en) | 2007-10-31 |
EP1849178B1 true EP1849178B1 (en) | 2017-07-26 |
Family
ID=36693047
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP06705909.7A Not-in-force EP1849178B1 (en) | 2005-02-14 | 2006-02-06 | Dielectric barrier discharge lamp configured as a double tube |
Country Status (9)
Country | Link |
---|---|
US (1) | US20080197775A1 (en) |
EP (1) | EP1849178B1 (en) |
JP (1) | JP4833285B2 (en) |
KR (1) | KR101216450B1 (en) |
CN (1) | CN101120432A (en) |
CA (1) | CA2597559A1 (en) |
DE (1) | DE102005006656A1 (en) |
TW (1) | TW200644038A (en) |
WO (1) | WO2006086942A2 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009069015A1 (en) * | 2007-11-28 | 2009-06-04 | Philips Intellectual Property & Standards Gmbh | Dielectric barrier discharge lamp |
US8022377B2 (en) * | 2008-04-22 | 2011-09-20 | Applied Materials, Inc. | Method and apparatus for excimer curing |
NL1036561C2 (en) * | 2009-02-11 | 2010-08-12 | Stichting Wetsus Ct Excellence Sustainable Water Technology | METHOD AND DEVICE FOR TREATING AND / OR CHARACTERIZING A FLUID. |
JP5223772B2 (en) * | 2009-05-11 | 2013-06-26 | ウシオ電機株式会社 | Noble gas discharge lamp |
DE102009036297B3 (en) * | 2009-08-06 | 2011-01-13 | Heraeus Noblelight Gmbh | Excimer lamp, has inner electrode formed from tube-shaped foil pieces that are galvanically connected with one another, where foil pieces are arranged one after other along axis and overlap in axial direction above overlapping path |
TWI483287B (en) | 2010-06-04 | 2015-05-01 | Access Business Group Int Llc | Inductively coupled dielectric barrier discharge lamp |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10241633A (en) * | 1997-02-25 | 1998-09-11 | Ushio Inc | Dielectric barrier discharge lamp |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0509110B1 (en) * | 1991-04-15 | 1995-06-21 | Heraeus Noblelight GmbH | Irradation device |
DE19613502C2 (en) * | 1996-04-04 | 1998-07-09 | Heraeus Noblelight Gmbh | Durable excimer emitter and process for its manufacture |
DE19741668C2 (en) * | 1997-09-22 | 2003-04-17 | Heraeus Noblelight Gmbh | Discharge lamp for surface sliding discharge |
DE19856428C1 (en) * | 1998-12-08 | 2000-05-04 | Heraeus Noblelight Gmbh | Discharge lamp, having spiral, inner electrode arranged at inner wall of interior tube |
JP3506055B2 (en) | 1999-07-28 | 2004-03-15 | ウシオ電機株式会社 | Dielectric barrier discharge lamp and light irradiation device thereof |
JP3385259B2 (en) | 2000-03-15 | 2003-03-10 | 株式会社エム・ディ・コム | Dielectric barrier discharge lamp and dry cleaning apparatus using the same |
AU2003266866A1 (en) * | 2002-09-19 | 2004-04-08 | Vlaamse Instelling Voor Technologisch Onderzoek (Vito) | Method and apparatus for generating and maintaining a plasma |
-
2005
- 2005-02-14 DE DE102005006656A patent/DE102005006656A1/en not_active Withdrawn
-
2006
- 2006-02-06 WO PCT/DE2006/000181 patent/WO2006086942A2/en active Application Filing
- 2006-02-06 JP JP2008520701A patent/JP4833285B2/en not_active Expired - Fee Related
- 2006-02-06 CN CNA2006800048004A patent/CN101120432A/en active Pending
- 2006-02-06 US US11/884,264 patent/US20080197775A1/en not_active Abandoned
- 2006-02-06 EP EP06705909.7A patent/EP1849178B1/en not_active Not-in-force
- 2006-02-06 KR KR1020077020968A patent/KR101216450B1/en active IP Right Grant
- 2006-02-06 CA CA002597559A patent/CA2597559A1/en not_active Abandoned
- 2006-02-13 TW TW095104721A patent/TW200644038A/en unknown
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10241633A (en) * | 1997-02-25 | 1998-09-11 | Ushio Inc | Dielectric barrier discharge lamp |
Also Published As
Publication number | Publication date |
---|---|
KR101216450B1 (en) | 2013-01-09 |
CA2597559A1 (en) | 2006-08-24 |
JP2008537842A (en) | 2008-09-25 |
WO2006086942A2 (en) | 2006-08-24 |
TW200644038A (en) | 2006-12-16 |
WO2006086942A3 (en) | 2007-09-20 |
EP1849178A2 (en) | 2007-10-31 |
DE102005006656A1 (en) | 2006-08-17 |
KR20070103496A (en) | 2007-10-23 |
CN101120432A (en) | 2008-02-06 |
JP4833285B2 (en) | 2011-12-07 |
US20080197775A1 (en) | 2008-08-21 |
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