EP2257856A1

EP2257856A1 - Integral adjusting member and method for making same

Info

Publication number: EP2257856A1
Application number: EP09722049A
Authority: EP
Inventors: Pierre-André Bühler; Marco Verardo; Thierry Conus; Jean-Philippe Thiébaud; Jean-Bernard Peters; Pierre Cusin
Original assignee: Nivarox Far SA; Nivarox SA
Current assignee: Nivarox Far SA; Nivarox SA
Priority date: 2008-03-20
Filing date: 2009-03-13
Publication date: 2010-12-08
Anticipated expiration: 2029-03-13
Also published as: JP2011526676A; US20110103197A1; US8523426B2; TWI474138B; EP2104008A1; RU2473947C2; JP5134137B2; TW201001106A; WO2009115463A1; CN101978326A; RU2010142920A; CN101978326B; HK1154086A1; EP2257856B1; KR20100135735A

Abstract

The invention relates to a integral adjusting member (41, 41', 41") that comprises a pendulum (43, 43', 43") being in engagement with a hairspring (51, 51', 51") made in a layer of a silicon-based material (21) and including a spiral-spring (53, 53', 53") coaxially mounted on a collet. According to the invention, the collet (55, 55', 55") includes a portion (19) defining an extension protruding from said spiral-spring, made in a second layer of the silicon-based material (5) and attached to the pendulum (43, 43', 43"). The invention also relates to a timepiece including such an adjustment member, and to a related manufacture method. The invention pertains to the field of clock movement.

Description

Monobloc regulator and method of manufacture

FIELD OF THE INVENTION

The invention relates to a regulating member and its method of manufacture and, more particularly, to a regulating member of the spring-balance type.

BACKGROUND OF THE INVENTION

The regulating member of a timepiece generally comprises an inertia flywheel called a balance wheel and a resonator called a spiral. These pieces are decisive for the running quality of the timepiece. Indeed, they regulate the movement, that is to say they control the frequency of the movement.

The balance and the hairspring are different in nature, which makes it extremely difficult to perfect the regulating organ, which includes the own fabrications of the balance and the hairspring and their assembly substantially in resonance.

The balance and the hairspring have each been manufactured in various materials, in particular in order to limit the influence of a change in temperature without the resonance assembly difficulties disappearing.

SUMMARY OF THE INVENTION

The object of the present invention is to overcome all or part of the aforementioned drawbacks by proposing a monobloc regulator which remains insensitive to temperature changes and which is obtained by means of a manufacturing process which minimizes the difficulties of assembly. For this purpose, the invention relates to a monobloc regulating member comprising a balance cooperating with a spiral made in a layer of silicon-based material and comprising a spiral spring coaxially mounted on a ferrule, the ferrule comprising an extension part. protruding from said spiral spring and which is made in a second layer of silicon-based material characterized in that the extension portion of the shell of the spiral is fixed on the balance.

According to other advantageous features of the invention: - the balance has a hole extending the inner diameter of the ferrule to receive a balance shaft;

- The axis of balance is fixed on the balance;

- The balance shaft is fixed on the balance by driving against a metal coating made at said hole; the cross-section of the inside diameter of the ferrule is greater than that of the balance beam hole in order to avoid greasy contacts between the balance shaft and the inside diameter of the ferrule;

the serge of the balance is continuous and comprises an adaptation device able to modify the moment of inertia of the balance; - The serge is connected to the hub of the balance by at least one arm which is slender to allow its axial deformation and / or radial in case of shock transmitted on the balance;

- The adaptation device comprises recesses made on the balance rod so as to adjust the inertia of said balance; the recesses comprise a material of greater density than that of the strut of the balance to increase the inertia of said balance;

- The adaptation device comprises bosses made on the balance rod and having a material of greater density than the serge to increase the inertia of said balance;

said material of greater density is distributed at the level of the serge in the form of a crenellated ring comprising a succession studs spaced at regular intervals to compensate for the thermal expansion of said material;

the balance is made in a third layer of silicon-based material; the inner coil of the spiral spring has a curve of the type

Grossmann to improve the concentricity of the development of said hairspring;

- The spiral spring comprises at least one portion based on silicon dioxide to make it more mechanically resistant and adjust its thermo-elastic coefficient.

More generally, the invention also relates to a timepiece characterized in that it comprises a one-piece regulating member according to one of the preceding variants.

Finally, the invention relates to a method of manufacturing a regulator member comprising the following steps: a) providing a substrate comprising an upper layer and a lower layer of silicon-based materials; b) selectively etching at least one cavity in the upper layer to define the pattern of a first portion of a shell and a first portion of a rocker made of silicon-based material of said member; c) attaching, on the etched upper layer of the substrate, an additional layer of silicon-based material; d) selectively etching at least one cavity in the additional layer to continue the pattern of said first parts of the ferrule and the balance, and define the pattern of a spiral spring made of silicon-based material of said member; characterized in that it further comprises the following steps: e) selectively etching at least one cavity in the lower layer to define the last portion of the rocker made of silicon-based material of said member; - AT -

f) release the regulator member of the substrate which provides a member on three levels of silicon-based materials.

According to other advantageous features of the invention: after step d) step g) is carried out: oxidation of the second part made of silicon-based material of said member in order to adjust its thermoelastic coefficient but also to make it mechanically more resistant;

before step e), step h) is carried out: selectively depositing at least one metal layer on the lower layer to define the pattern of at least one metal part of said member and / or a second metal part intended to to receive by driving an axis;

step h) comprises step i): growing said deposition by successive metallic layers at least partially on the surface of the lower layer in order to form a metal part intended to increase the mass of the rocker made of silicon-based material; and / or a second metal part intended to receive by driving an axis; step h) comprises steps j): selectively etching at least one cavity in the lower layer intended to receive said at least one metal part and k): growing said deposition by successive metal layers at least partially in said at least one at least one cavity for forming a metal part intended to increase the mass of the rocker made of silicon-based material and / or a second metal part intended to receive a shaft by driving;

that step h) comprises the last step I): polishing the metallic deposit; - Several organs are made on the same substrate which allows a series production. SUMMARY DESCRIPTION OF THE DRAWINGS

Other features and advantages will become clear from the description which is given below, for information only and in no way limitative, with reference to the accompanying drawings, in which: - Figures 1 to 5 show successive views of the manufacturing process according to the invention;

FIGS. 6 to 8 show views of the successive steps of alternative embodiments;

- Figure 9 shows a block diagram of the method according to the invention.

- Figures 10 and 1 1 are perspective representations of a monobloc regulator member according to a first embodiment;

- Figures 12 and 13 are perspective views of a monobloc regulator member according to a second embodiment;

FIGS. 14 and 15 are perspective views of a one-piece regulator member according to a third embodiment;

- Figure 16 is a perspective representation of a monobloc spiral according to the invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The invention relates to a generally annotated method 1 intended to manufacture a regulating member 41, 41 ', 41 "for a timepiece movement.As illustrated in FIGS. 1 to 9, the method 1 comprises successive steps intended to forming at least one type of integral member (51 '', 41, 41 ', 41' ') which can be integrally formed of silicon-based materials.

With reference to FIGS. 1 and 9, the first step 100 consists in providing a substrate 3 of the silicon-on-insulator type (also known by the acronym SOI). The substrate 3 comprises an upper layer 5 and a lower layer 7 each composed of a material based on silicon. Between the upper 5 and lower 7 layers, may extend an intermediate layer 9 composed of silicon dioxide (SiO ₂ ).

Preferably in this step 100, the substrate 3 is chosen so that the height of the lower layer 7 corresponds to the height of a portion of the final regulator member 41, 41 ', 41 ". have a thickness sufficient to withstand the forces induced by the method 1. Such a thickness may be for example between 300 and 400 microns.

Preferably, the upper layer 5 is used as spacing means with respect to the lower layer 7. Therefore, the height of the upper layer 5 will be adapted according to the configuration of the regulating member 41, 41 ', 41 " According to said configuration, the thickness of the upper layer 5 can thus oscillate, for example, between 10 and 200 μm In a second step 101, as can be seen in FIG. 2, cavities 10, 11, 12, 13, 14 and 15 are selectively etched, for example by a deep reactive ion etching process (also known by the acronym DRIE), in the upper layer 5 of silicon-based material, preferably said cavities 10, 11, 12 , 13, 14 and 15 form two patterns 17, 19 defining the inner and outer contours of silicon parts of the regulating member 41, 41 ', 41 ".

In the example illustrated in FIG. 2, the patterns 17 and 19 are substantially in the form of coaxial cylinders with a circular section, the pattern 17 having a larger diameter than that of the pattern 19. However, advantageously according to the method 1, etching on the upper layer 5 leaves full freedom on the geometry of the patterns 17 and 19. Thus, in particular, the patterns 17 and 19 are not necessarily circular but, for example, elliptical or have a non-circular inner diameter.

Preferably, bridges of material 18 are left in order to maintain the substrate 3 the regulator member 41, 41 ', 41 "during its manufacturing. In the example illustrated in FIG. 2, there are four material bridges 18 which remain respectively between each of the consecutive cavities 12, 13, 14 and 15 distributed in an arc of circle at the periphery of the pattern 17. In a third step 102 as can be seen in FIG. 3, an additional layer 21 made of silicon-based material is added to the substrate 3. Preferably, the additional layer 21 is fixed on the upper layer 5 by means of a fusion welding of the silicon (also known under the acronym SFB). Step 102 advantageously allows the upper layer 5 to be covered by bonding with a very strong adhesion, in particular the upper faces of the patterns 17 and 19 on the lower face of the additional layer 21. The additional layer 21 may, for example, comprise a thickness between 100 and 150 μm. In a fourth step 103, as visible in FIG. 4, cavities 20, 22 and 24 are selectively etched, for example, by a method of the DRIE type similar to that of step 101, in the additional layer 21 made of material silicon base. These cavities 20, 22 and 24 make it possible to form three patterns 23, 25 and 27 defining the inner and outer contours of silicon parts of the regulating member 41, 41 ', 41 ".

In the example illustrated in FIG. 4, the patterns 23 and 25 are substantially in the form of coaxial cylinders with a circular section and, the pattern 27, substantially in the form of a spiral. However, advantageously according to the method 1, the etching on the additional layer 21 leaves complete freedom on the geometry of the patterns 23, 25 and 27. Thus, in particular, the patterns 23 and 25 are not necessarily circular but, for example, elliptical or have a non-circular inner diameter. It is the same, in particular, for the inner diameters 10 and 24 which are not necessarily circular but, for example, polygonal which could make it possible to improve the transmission of rotational force with an axis 49 of corresponding form. Finally, each diameter 10, 24 may not be of identical shape.

Preferably, the pattern 23 made in the additional layer

21 is of similar shape and substantially perpendicular to the pattern 19 made in the upper layer 5. This means that the cavities 10 and 24 respectively forming the inner diameter of the patterns 19 and 23 communicate together and are substantially one above the other. In the example illustrated in FIGS. 10 to 15, the units 23 and 19 form the collar 55, 55 ', 55 "of the regulating member 41, 41', 41" which extends in height on the layers 5 and 21. .

Preferably, the pattern 25 made in the additional layer 21 is of similar shape and substantially perpendicular to the pattern 17 made in the upper layer 5. In the example illustrated, the patterns 25 and 17 form part of the serge 47, 47 ', 47 "of the balance 43, 43', 43" of the regulating member 41, 41 ', 41 "which extends in height in particular on the layers 5 and 21. Note, however, that in the illustrated example in FIG. 4, the material bridges 18 are not reproduced and that the cavity 22 in the additional layer 21 forms a continuous ring, unlike the cavities 12, 13, 14 and 15 which open out under it in FIG. 4. Preferably, the patterns 23 and 27 are etched at the same time and form a one-piece piece in the additional layer 21. In the example illustrated in FIGS. 10 to 15, the patterns 23 and 27 form the spiral spring 53, 53 ', 53 "and the upper part of the shell 55, 55 ', 55 "of the regulating member 41, 41 ', 41 ". We also see that the outer curve of the pattern 27 shown in Figure 4 is open. This last characteristic associated with the spacing with respect to the lower layer 7 produced by the pattern 19 makes it possible to embellish said external curve by means of a raquet.

However, advantageously according to the method 1, the etching on the additional layer 21 leaves all freedom on the geometry of the pattern 27.

Thus, in particular, the pattern 27 may not have an external curve open but, for example, have on the end of the outer curve a bead adapted to serve as a fixed attachment point, that is to say without the need for raquetry. The pattern 27 may also comprise an internal turn comprising a Grossmann type curve making it possible to improve its concentricity of development as explained in the document EP 1 612 627 incorporated with reference to the present description.

Following this fourth step 103, it is understood that the patterns 23 and 27 etched in the additional layer 21 are only connected by the underside of the pattern 23, with a very strong adhesion, above the etched pattern 19 of the upper layer. 5 (the pattern 19 is itself connected, with a very strong adhesion, to the lower layer 7). The patterns 23 and 27 are therefore no longer in direct contact with the additional layer 21. Similarly, the pattern 25 is no longer in direct contact with the additional layer 21 but only connected, with a very strong adhesion, to the pattern 17 etched of the upper layer 5.

Preferably, as represented by dashed lines in FIG. 9, the method 1 may comprise a fifth step 104 which consists in oxidizing at least the pattern 27, that is to say the spiral spring 53, 53 ', 53 "of the regulating member 41, 41 ', 41 "in order to adjust its thermoelastic coefficient but also to make it mechanically more resistant. Such an oxidation step is explained in particular in patent EP 1 422 436 which is incorporated by reference in the present description.

At this stage, that is to say after step 103 or 104, it is understood that the method 1 advantageously allows to produce only the spiral 51 '"as visible in Figure 16. Indeed, one of the advantages of Method 1 is to be able to adapt the height of the pattern 19 of the ferrule 55, 55 ', 55 ", 55'" projecting from the spiral spring 53, 53 ', 53 ", 53'" directly by choosing the thickness of the upper layer 5.

When such a product 51 '", visible in FIG. 16, is desired, it is therefore sufficient to stop the process 1 at step 103 or 104 by providing at the intermediate stage of formation of material bridges. material bridges may in particular be formed either on the pattern 19 during step 101 or on the pattern 27 at the end, for example, of the last turn in step 103. The penultimate step of method 1 could then consist of removing the lower layer 7, for example, by etching and / or mechanical. Finally, in step 106, the hairspring 51 '' thus obtained would be released.

Advantageously according to the invention, if a regulating member 41, 41 ', 41 "is preferred, after the fourth step 103 or preferentially after the fifth step 104, the method 1 may comprise three embodiments A, B and C as illustrated in FIG. However, each of the three embodiments A, B and C ends with the same final step 106 of freeing the substrate 3 the regulating member 41, 41 ', 41 "manufactured.

Advantageously, the release step 106 can then be simply performed by providing a force to the regulating member 41, 41 ', 41 "capable of breaking its material bridges 18. This effort can, for example, be generated manually by a operator or by machining.

According to the embodiment A, in a sixth step 105, as visible in FIG. 5, cavities 26, 28, 29, 30, 31 and 32 are selectively etched, for example, by a method of the DRIE type similar to that of the steps 101 and 103, in the lower layer 7 made of silicon-based material. These cavities 26, 28, 29, 30, 31 and 32 make it possible to form a pattern 34 defining the inner and outer contours of a silicon part of the regulating member 41.

In the example illustrated in FIG. 5, the pattern 34 is substantially in the form of a four-armed rim 40, 42, 44, 46. However, advantageously according to the method 1, the etching on the lower layer 7 leaves all the freedom on the pattern geometry 34. Thus, in particular, the number and the geometry of the arms can be different just as the rim is not necessarily circular but, for example, elliptical. In addition, the arms 40, 42, 44, 46 may be slender in order to allow their axial and / or radial deformation in the event of shock transmitted to the regulating member. Preferably, part of the pattern 34 made in the lower layer 7 is of similar shape and substantially vertically above the patterns 17 and 25 made respectively in the upper and additional layers 5 and 21. In the example illustrated in FIG. pattern 34 forms, with the patterns 17 and 25, the balance 43 of the regulating member 41, the serge 47 therefore extends in height over all of the layers 5, 7 and 21.

In addition, preferably, the cavity 26 of the pattern 34 is substantially in extension of the cavities 10 and 24 forming the inner diameter of the patterns 19 and 23. In the illustrated example, the successive cavities 24, 10 and 26 thus form a suitable internal diameter. receiving the balance shaft 49 of the regulating member 41. Finally, it is noted that, in the example illustrated in FIG. 5, the material bridges 18 are not reproduced in the lower layer 7 and that the cavity 28, in the manner of the cavity 22, forms a continuous ring in contrast to the cavities 12, 13, 14 and 15 which open out beneath it in FIG.

As a result of this sixth step 105, it is understood that the pattern 34 etched in the lower layer 7 is only connected, with a very strong adhesion, to the patterns 17 and 19 etched from the upper layer 5. The pattern 34 is therefore more in direct contact with the lower layer 7. As a result of the final step 106 explained above, therefore, using the first embodiment A, a monoblock regulator 41 formed integrally of of silicon, as can be seen in FIGS. 10 and 1 1. It is thus clear that there is no longer any problem of assembly because it is directly carried out during the manufacture of the regulating member 41. The latter comprises a balance 43 of which the hub 45 is connected on the one hand radially to the serge 47 by four arms 40, 42, 44 and 46 and, on the other hand, axially to the spiral 51 which comprises a spiral spring 53 and a ferrule 55.

As explained above, the serge 47 is formed by the peripheral ring of the pattern 34 of the lower layer 7 but also by the patterns 17 and 25 of the respective upper and additional layers 21. In addition, the ferrule 55 is formed by the pattern 23 of the additional layer 21 and the pattern 19 of the upper layer 5. Preferably, this pattern 19 is used as spacing means between the spiral 51 and the balance 43 to be able to for example, punctuating the spiral spring 53 with a raquet. The pattern 19 is also useful as a guide means of the hairspring 51 by increasing the height of the shell 55.

However, advantageously according to the method 1, the etching on the additional layer 21 leaves complete freedom on the geometry of the spiral spring 53. Thus, in particular, the spiral spring 53 may not have an open external curve but, for example, comprise on the end of the outer curve a bead adapted to serve as a fixed attachment point, that is to say without the need for raquetry.

Preferably, the regulating member 41 is adapted to receive a balance shaft 49 through the cavities 24, 10 and 26. Advantageously according to the invention, the regulating member 41 being in one piece, it is not necessary to fix the axis balance 49 to the ferrule 55 and balance 43 but only to one of them.

Preferably, the balance shaft 49 is fixed on the inner diameter 26 of the rocker arm 43, for example by means of elastic means 48 etched into the silicon-based hub 45 during the step 105. Such elastic means 48 can for example, take the form of those disclosed in Figures 1 OA to 1 OE of EP 1 655 642 or those disclosed in Figures 1, 3 and 5 of EP 1 584 994, which patents are incorporated by reference to the this description. In addition, preferably, the cavities 24 and 10 have sections of larger dimensions than that of the cavity 26 to prevent the balance shaft 49 is in bold contact with the ferrule 55.

It is therefore understood that the force of the spiral 51 is subjected to the rocker 43 only by the ferrule 55 and vice versa because they are all three integrally formed. The balance shaft 49 thus receives force from the regulating member 41 only through the hub 45 of the balance 43. According to a second embodiment B, the method 1 comprises, after the step 103 or 104, a sixth step 107, as visible in FIG.

6, consisting in implementing a process of the LIGA type (a well-known acronym derived from the German "rόntgenLIthographie, Galvanoformung & Abformung"). Such a process comprises a succession of steps making it possible to electrodeposit in a particular form a metal on the lower layer 7 of the substrate 3 with the aid of a photostructured resin. As this process of the LIGA type is well known, it will not be more detailed below. Preferably, the deposited metal may be, for example, gold or nickel or one of their alloys.

In the example illustrated in FIG. 6, step 107 can consist in depositing a crenellated ring 61 and / or a cylinder 63. In the example illustrated in FIG. 6, the ring 61 comprises a series of pads 65 substantially in an arc and is intended to advantageously increase the mass of the future beam 43 '. Indeed, one of the advantages of silicon is its low sensitivity to temperature variations. However, it has the disadvantage of having a low density. A first characteristic of the invention is therefore to increase the mass of the balance 43 'with the aid of metal obtained by electroplating in order to increase the inertia of the future balance 43'. However, in order to keep the advantages of silicon, the metal deposited on the lower layer 7 has a spacing between each pad 65 able to compensate for the thermal expansion of the ring 61.

In the example illustrated in FIG. 6, the cylinder 63 is intended to receive, advantageously, by driving a balance shaft 49. Indeed, another disadvantage of silicon lies in its very weak elastic and plastic zones, which makes it very brittle. Another feature of the invention is thus to achieve the clamping of the balance shaft 49 not against the silicon-based material of the balance 43 'but on the inner diameter 67 of the metal cylinder 63 electrodeposited during step 107 Advantageously according to method 1, the cylinder 63 obtained by electroplating leaves full freedom as to its geometry. So, in particular, the internal diameter 67 is not necessarily circular but, for example, polygonal which could improve the transmission of rotational force with an axis 49 of corresponding shape.

In a seventh step 108, similar to the step 105 visible in FIG. 5, cavities are selectively etched, for example by a DRIE method, in the lower layer 7 made of silicon-based material. These cavities make it possible to form a rocker pattern similar to the pattern 34 of the embodiment A. As illustrated in the example of FIGS. 12 and 13, the pattern obtained can be substantially in the form of a four-armed rim 40 ', 42'. 44 ', 46'. However, advantageously according to the method 1, the etching on the lower layer 7 leaves all freedom on the geometry of the pattern 34. Thus, in particular, the number and the geometry of the arms can be different just as the rim is not necessarily circular but for example, elliptical. In addition, the arms 40 ', 42', 44 ', 46' may be slender in order to allow their axial and / or radial deformation in the event of shock transmitted to the regulating member.

Preferably, a part of the rocker pattern produced in the lower layer 7 is of similar shape and substantially vertically above the patterns 17 and 25 made respectively during the steps 101 and 103 in the upper and additional layers 5 and 21. In the example illustrated in Figures 12 and 13, the pendulum pattern forms, with the patterns 17 and 25 and the metal parts 61 and / or 63, the balance 43 'of the regulating member 41' whose serge 47 'therefore extends into height over all the layers 5, 7 and 21 and the metal parts 61 and / or 63. In addition, preferably, as in embodiment A, the successive cavities thus form an inner diameter adapted to receive the balance shaft 49 of the regulator 41 '. Finally, it can be noted that material bridges 18 may also not be reproduced in the lower layer 7. As a result of this seventh step 108, it will be understood that the rocker pattern engraved in the lower layer 7 is only connected with a very strong adhesion to the patterns 17 and 19 of the upper layer 5 etched in step 101. The pendulum pattern is no longer in direct contact with the lower layer 7.

As a result of the final step 106 explained above, therefore, using the second embodiment B, a one-piece regulating member 41 'formed of silicon-based materials with one or two parts is obtained.

61, 63 metal as shown in Figures 12 and 13. It is therefore understood that there is more assembly problem because it is directly achieved during the manufacture of the regulating member 41 '. The latter comprises a rocker arm 43 'whose hub 45' is connected on the one hand radially to the serge 47 'by four arms 40', 42 ', 44' and 46 'and, on the other hand, axially to the spiral 51 which comprises a spiral spring 53 'and a ferrule 55'.

As explained above, the serge 47 'is formed by the peripheral ring of the balance pattern of the lower layer 7 but also by the patterns 25 and 17 of the respective upper and additional layers 21 and, optionally, the metal part 61. In addition, the shell 55 'is formed by the pattern 23 of the additional layer 21 and the pattern 19 of the upper layer 5. Preferably, this pattern 19 is used as spacing means between the spiral 51' and the balance 43 'so as to pit the spiral spring 53' with a raquetetterie. The pattern 19 is also useful as a guiding means of the hairspring 51 'by increasing the height of the shell 55'.

However, advantageously according to the method 1, the etching on the additional layer 21 leaves complete freedom on the geometry of the spiral spring 53 '. Thus, in particular, the spiral spring 53 'may not have an open external curve but, for example, have on the end of the outer curve a bead suitable for serving as a fixed attachment point, that is to say say without the need for snowshoeing.

Preferably, the regulating member 41 'is able to receive a balance shaft 49 in its inside diameter. Advantageously according to the invention, the regulating member 41 'being integral, it is not necessary to fix the balance shaft 49 to the shell 55 'and the balance 43' but only to one of the two.

In the example illustrated in Figures 12 and 13, the balance shaft 49 is preferably fixed to the inner diameter 67 of the metal portion 63 for example by driving. In addition, preferably, the cavities 24 and 10 have sections of larger dimensions than the inner diameter 67 of the metal portion 63 to prevent the balance shaft 49 is in bold contact with the ferrule 55 '.

It is therefore understood that the force of the spiral 51 'is subjected to the balance 43' only by the ferrule 55 'and vice versa because they are all three integrally formed. The balance shaft 49 thus receives force from the regulating member 41 'only, preferably, via the metal portion 63 of the hub 45' of the balance 43 '.

In addition, insofar as a metal part 61 has been deposited, the inertia of the balance 43 'is advantageously amplified. Indeed, the density of a metal being much greater than that of silicon, the mass of the balance 43 'is increased and, incidentally, also its inertia.

According to a third embodiment C, the method 1 comprises, after step 103 or 104, in a sixth step 109, as visible in FIG. 7, consisting of selectively etching cavities 60 and / or 62, for example, by a method of the DRIE type, with a limited depth in the lower layer 7 of silicon-based material. These cavities 60, 62 make it possible to form recesses able to serve as containers for at least one metal part. As in the example illustrated in FIG. 7, the cavities 60 and 62 obtained can be respectively in the form of a ring and a disc. However, advantageously according to the method 1, the etching on the lower layer 7 leaves complete freedom on the geometry of the cavities 60 and 62.

In a seventh step 1 10, as illustrated in FIG. 8, the method 1 comprises the implementation of a growth-type process galvanic or LIGA type to fill cavities 60 and / or 62 in a particular metal form. Preferably, the deposited metal may be, for example, gold or nickel or one of their alloys. In the example illustrated in FIG. 8, step 1 may consist in depositing a crenellated ring 64 in the cavity 60 and / or a cylinder 66 in the cavity 62. In addition, in the example illustrated in FIG. , the ring 64 comprises a series of pads 69 substantially in a circular arc and is intended to advantageously increase the mass of the future beam 43. Indeed, as already explained above, a disadvantage of silicon lies in its low Thus, as for embodiment B, a characteristic of the invention therefore consists in increasing the weight of the rocker arm 43 "with the aid of metal obtained by electroplating in order to increase the inertia of the future rocker arm 43". , in order to keep the advantages of silicon, the metal deposited on the lower layer 7 has a spacing between each stud 69 able to compensate for the thermal expansions of the ring 64.

In the example illustrated in FIG. 8, the cylinder 66 is intended to receive, advantageously, by driving a balance shaft 49. Indeed, as already explained above, an advantageous characteristic according to the invention consists in making the clamping of the balance shaft 49 not against the silicon-based material but on the inside diameter 70 of the metal cylinder 66 electrodeposited during step 1 10. Advantageously according to method 1, the cylinder 66 obtained by electroplating leaves all freedom as for its geometry. Thus, in particular, the inner diameter 70 is not necessarily circular but, for example, polygonal which could improve the transmission of rotational force with an axis 49 of corresponding shape.

Preferably, the method 1 may comprise, in an eighth step 1 1 1, polishing the metal deposit or deposits 64, 66 made during step 1 10 in order to make them planar. In a ninth step 1 12, similar to steps 105 or 108, particularly visible in FIG. 5, cavities are selectively etched, for example by a method of the DRIE type, in the lower layer 7 made of silicon-based material. These cavities make it possible to form a rocker pattern similar to the pattern 34 of the embodiment A. As illustrated in the example of FIGS. 14 and 15, the pattern obtained can be substantially in the form of a four-armed rim 40 ", 42". 44 ", 46". However, advantageously according to the method 1, the etching on the lower layer 7 leaves all freedom on the geometry of the pattern 34. Thus, in particular, the number and the geometry of the arms 40 ", 42", 44 ", 46" can be different just as the rim is not necessarily circular but, for example, elliptical. In addition, the arms may be slender to allow their axial deformation and / or radial in case of shock transmitted to the regulating member. Preferably, the rocker pattern produced in the lower layer 7 is of similar shape and substantially perpendicular to the patterns 17 and 25 made respectively during the steps 101 and 103 in the upper and additional layers 5 and 21. In the illustrated example, the pendulum pattern forms, with the patterns 17 and 25 and the metal parts 64 and / or 66, the balance 43 "of the regulating member 41" whose serge 47 "therefore extends in height over all the layers 5 , 7 and 21.

In addition, preferentially, as in embodiments A and B, the successive cavities thus form an inside diameter capable of receiving the balance shaft 49 of the regulating member 41. Finally, it is noted that the material bridges 18 are also not reproduced in the lower layer 7.

Following this ninth step January 12, it is understood that the rocker pattern etched in the lower layer 7 is only connected, with a very strong adhesion, to the patterns 17 and 19 of the top layer 5 etched in step 101 The pendulum pattern is therefore no longer in direct contact with the lower layer 7. As a result of the final step 106 explained above, a one-piece regulating member 41 formed of silicon-based materials with one or two metal parts 64, 66 as shown in FIGS. so that there is more assembly problem because it is directly achieved during the manufacture of the regulator 41 ". The latter comprises a rocker arm 43 "whose hub 45" is connected on the one hand radially to the serge 47 "by four arms 40", 42 ", 44" and 46 "and, on the other hand, axially to the spiral 51 "which includes a spiral spring 53" and a ferrule 55 ". As explained above, the serge 47 "is formed by the peripheral ring of the pendent pattern of the lower layer 7, but also by the patterns 25 and 17 of the respective upper and additional layers 21 and, optionally, of the metallic part. 64. In addition, the shell 55 "is formed by the pattern 23 of the additional layer 21 and the pattern 19 of the upper layer 5. Preferably, this pattern 19 is used as spacing means between the spiral 51" and the balance 43 "in order to be able, for example, to pit the spiral spring 53" by means of a racket.The pattern 19 is also useful as a guide means of the spiral 51 "by increasing the height of the ferrule 55". , advantageously according to the method 1, the etching on the additional layer 21 leaves complete freedom on the geometry of the spiral spring 53 ". Thus, in particular, the spiral spring 53 "may not have an open outer curve but, for example, have on the end of the outer curve a bead adapted to serve as a fixed attachment point, that is to say say without the need for snowshoeing.

Preferably, the regulating member 41 "is adapted to receive a balance pin 49 in its inside diameter Advantageously according to the invention, the regulating member 41" being in one piece, it is not necessary to fix the balance shaft 49 to the 55 "ferrule and the 43" balance but only to one of the two. Preferably, in the example illustrated in Figures 14 and 15, the balance shaft 49 is fixed on the inner diameter 70 of the metal part 66 for example by driving. In addition, preferably, the cavities 24 and 10 have sections of larger dimensions than the inner diameter 70 of the metal portion 66 to prevent the balance shaft 49 is in bold contact with the ferrule 55 " .

We understand that the force of the spiral 51 "is subject to the balance

43 "only by the shell 55" and conversely because they are all three integrally formed. The balance shaft 49 thus receives force from the regulating member 41 "only, preferably, via the metal portion 66 of the hub 45" of the balance 43 ".

In addition, insofar as a metallic part 64 has been deposited, the inertia of the balance 43 "is advantageously amplified, since the density of a metal being much greater than that of silicon, the mass of the balance 43" is increased and, incidentally, also its inertia.

According to the three embodiments A, B and C, it is understood that the final regulating member 41, 41 'and 41 "is thus assembled before being structured, that is to say before being etched and / or or modified by electrodeposition.This advantageously allows to minimize the dispersions caused by the current assemblies of a balance with a spiral.

It should also be noted that the very good structural accuracy of a deep reactive ion etching makes it possible to reduce the starting radius of each of the spiral spring 53, 53 ', 53 ", 53'", that is to say that the outer diameter of their shell 55, 55 ', 55 ", 55'", which allows the miniaturization of the inner and outer diameters of the shell 55, 55 ', 55 ", 55'".

Advantageously according to the invention, it is also understood that it is possible for several regulating members 41, 41 'and 41 "to be able to be produced on the same substrate 3, which allows mass production. Of course, the present invention is not limited to the illustrated example but is susceptible of various variations and modifications that will occur to those skilled in the art. In particular, the patterns 17 and 25 etched in steps 101 and 103 in the layers 5 and 21 may not be limited to a plane surface state but may incorporate at least one ornament in said steps for decorating at least one of the faces. serge 47, 47 ', 47 "which can be useful especially in the case of timepieces of the skeleton type.

It is also possible that the metal parts 63, 66 electrodeposited according to the embodiments B and C are interchanged, that is to say that the projecting portion 63 of the mode B is replaced by the integrated part 66 of the mode C or conversely (which requires only a minimal adaptation of the method 1) or even that the portion 66 integrated in the hub protrudes from the lower layer 7. According to similar reasoning, it is also possible that the metal parts 61, 64 electrodeposited in Embodiments B and C are interchanged, i.e. the projecting portion 61 of the B mode is replaced by the integrated portion 64 of the C mode or vice versa or even that the portion 64 integrated in the serge makes protrusion of the lower layer 7.

In addition, advantageously, the method 1 can furthermore provide, a posteriori of the release step 106, a step of adapting the frequency of the regulating member 41, 41 ', 41 ". to engrave, for example by laser, recesses 68 able to modify the operating frequency of said regulator member Such recesses 68, as illustrated in the example of FIGS. 10 and 11, could, for example, be made on one of the peripheral walls of the pattern 34 belonging to the serge 47, 47 ', 47 "and / or one of the metal parts 61, 64 electrodeposited. Conversely, regulating structures of the flyweight type can also be considered in order to increase the inertia and adjust the frequency. It can also be provided that a conductive layer is deposited on at least a portion of the regulator member 41, 41 ', 41 "in order to avoid isochronism problems, Such a layer may be of the type disclosed in the document EP 1 837 722 incorporated by reference in this specification.

Finally, a polishing step of the type of step 1 1 1 can also be carried out between step 107 and step 108. It can also be envisaged that a step of producing a metal deposit 63, 66, of the type obtained by the embodiments B or C, is not carried out on the balance but, in the case of the manufacture of the single spiral 51 '", on the additional layer 21 so as to be able to drive an axis not against the silicon-based material of the inner diameter of the shell 55 '"but against said metal deposit.

Claims

REVEN DI CATIONS

Monobloc regulating organ (41, 41 ', 41 ") comprising a balance (43, 43', 43") cooperating with a spiral (51, 51 ', 51 ") made in a layer of silicon-based material ( 21) and comprising a spiral spring (53, 53 ', 53 ") mounted coaxially on a ferrule, characterized in that the ferrule (55, 55', 55") comprises a portion (19) extending from said spring -spiral, which is made in a second layer of silicon-based material (5) and which is fixed on the balance (43, 43 ', 43 ").

2. Control member according to claim 1, characterized in that the rocker (43, 43 ', 43 ") has a hole (26) extending the inner diameter (24, 10) of the shell (55, 55', 55" ) to receive a balance shaft (49).

3. Control member according to claim 2, characterized in that the balance shaft (49) is fixed on the balance (43, 43 ', 43 ").

4. Control member according to claim 3, characterized in that the balance shaft (49) is fixed on the rocker (43 ', 43 ") by driving against a metal coating (63, 66) made at said hole.

5. Regulator according to one of claims 2 to 4, characterized in that the section of the inner diameter (24, 10) of the shell (55, 55 ', 55 ") is larger than that of the hole (26, 63, 66) of the balance (43, 43 ', 43 ") in order to avoid the fatty contacts between the balance shaft (49) and the inner diameter (24, 10) of the ferrule (55, 55', 55 ").

6. Regulating body according to one of the preceding claims, characterized in that the serge (47, 47 ', 47 ") of the balance (43, 43', 43") is continuous and comprises an adaptation device (61, 64, 68) capable of modifying the moment of inertia of the balance.

7. Regulating body according to claim 6, characterized in that the serge (47, 47 ', 47 ") is connected to the hub (45, 45', 45") of the balance (43, 43 ', 43 ") by the minus one arm (40, 42, 44, 46, 40 ', 42', 44 ', 46', 40 ", 42", 44 ", 46") which is slender to allow axial and / or radial deformation thereof in the event of shock transmitted on the balance (41, 41 ', 41 ").

8. Control member according to claim 6 or 7, characterized in that the adaptation device comprises recesses (60, 68) made on the serge (47, 47 ") of the balance (43, 43") in order to be able to adjust the inertia of said balance.

9. Control member according to claim 8, characterized in that the recesses (60) comprise a material of greater density than that of the serge (47 ") of the balance (43") to increase the inertia of said balance.

10. Control organ according to claim 6 or 7, characterized in that the adaptation device comprises bosses (61) made on the serge (47 ') of the balance (43') and comprising a material of greater density than the serge (47 ') to increase the inertia of said balance.

11. Regulating body according to claim 9 or 10, characterized in that said material of greater density is distributed at the level of the serge (47 ', 47 ") in the form of a crenellated ring (61, 64) comprising a succession studs (65, 69) spaced at regular intervals to compensate for thermal expansion of said material.

12. Regulating body according to one of the preceding claims, characterized in that the rocker (43, 43 ', 43 ") is made in a third layer (7) of silicon-based material.

13. Control member according to one of the preceding claims, characterized in that the inner coil of the spiral spring (53, 53 ', 53 ") comprises a Grossmann type curve to improve the concentricity of the development of said spiral.

14. Regulating body according to one of the preceding claims, characterized in that the spiral spring (53, 53 ', 53 ") comprises at least one part based on silicon dioxide to make it more mechanically resistant and adjust its thermo-elastic coefficient.

15. Timepiece characterized in that it comprises a regulating member (41, 41 ', 41 ") according to one of the preceding claims.

16. A method of manufacturing (1) a one-piece regulating member (41, 41 ', 41 ") comprising the following steps: a) providing (100) a substrate (3) comprising an upper layer

(5) and a lower layer (7) of silicon-based materials; b) selectively (101) etching at least one cavity (10, 1 1) in the upper layer (5) to define the pattern of a first portion (19) of a ferrule (55, 55 ', 55 ") and a first portion (17) of a rocker (43, 43 ', 43 ") made of silicon-based material of said member; characterized in that it further comprises the steps of: c) securing (102), on the top layer (5) etched of the substrate (3), an additional layer (21) of silicon-based material; d) selectively (103) etching at least one cavity (20, 24) in the additional layer (21) to continue the pattern (19, 23) of said first parts of the ferrule (55, 55 ', 55 ") and the balance (43, 43 ', 43 "), and defining the pattern (27) of a spiral spring (53, 53', 53") made of silicon-based materials of said member; e) etching (105, 108, 1 12) selectively at least one cavity (26, 28, 29, 30, 31, 32) in the lower layer (7) to define the last portion (34) of the rocker arm (43, 43 ', 43 ") made from silicon of said organ; f) releasing the regulating member (41, 41 ', 41 ") from the substrate (3).

17. The manufacturing method according to claim 16, characterized in that it further comprises after step d) the following step: g) oxidizing the spiral spring (53, 53 ', 53 ") of silicon-based material of said member to adjust its thermo-elastic coefficient but also to make it mechanically more resistant.

18. The manufacturing method according to claim 16 or 17, characterized in that it further comprises, before step e) the following step: h) depositing (107, 1 10) selectively at least one metal layer (61, 63, 64, 66) on the lower layer (7) to define the pattern of at least a metal part of said member.

19. The manufacturing method according to claim 18 characterized in that step h) comprises the following step: i) growing (107) said deposition in successive metal layers at least partially on the surface of the lower layer (7) so forming a metal portion (61) for increasing the mass of the balance (43 ') of silicon-based materials.

20. Manufacturing method according to claim 18 or 19 characterized in that step h) comprises the following step: i ') to grow (107) said deposition in successive metallic layers at least partially on the surface of the lower layer ( 7) to form a second metal portion (63) for driving a shaft (49).

21. Manufacturing method according to claim 18 characterized in that step h) comprises the following steps: j) selectively etching (109) at least one cavity (60) in the lower layer (7) intended to receive said at least one a metal part; k) growing (1 10) said deposition in successive metal layers at least partially in said at least one cavity to form a metal portion (64) for increasing the mass of the balance (43 ") of silicon-based materials.

22. The manufacturing method according to claim 18 or 21, characterized in that step h) comprises the following steps: (i) selectively etching (109) at least one cavity (62) in the lower layer (7) intended to receive said at least one metal part; k ') growing (1 10) said deposition in successive metal layers at least partially in said at least one cavity to form a second metal portion (63) for receiving by driving a shaft (49).

23. The manufacturing method according to one of claims 18 to 22, characterized in that step h) is followed by the following step: I) polishing (1 1 1) the metal deposit (61, 63, 64, 66).

24. Manufacturing process according to one of claims 16 to 23, characterized in that several regulating members (41, 41 ', 41 ") are formed on the same substrate (3).