Classifications

• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
  • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
  • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
  • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
  • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
  • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
  • G01C19/5733—Structural details or topology
  • G01C19/5755—Structural details or topology the devices having a single sensing mass

Definitions

• the invention relates to a sensor device comprising a two-axis first rotation rate sensor element, with the rotation rate of rotational movements of the sensor device can be detected by a first and a second rotation rate measuring axis, wherein the first and the second rotation rate measuring axis are aligned orthogonal to each other.
• a particularly important field of application of rotation rate sensors is in the automotive sector, in which the rotation rate sensors can be used in particular for determining the movement of a vehicle.
• the yaw rate, the roll rate and / or the pitch rate of a vehicle can be measured.
• the yaw rates can, for example, be used in driver dynamics controls in order to determine the driving state of the vehicle and to stabilize the vehicle if necessary by means of suitable engagement methods before a dangerous driving state or a dangerous traffic situation occurs.
• safety systems resort to one or more measured rotation rates in order to control safety devices of the vehicle. For example, an impending rollover of the vehicle can be determined on the basis of the measured roll rate.
• rollover protection systems can be activated to protect the vehicle occupants.
• a reliable determination of the rotation rate is important in order to ensure the correct functioning of the system.
• redundant measurements of the rotation rates can be made, so that the plausibility can be concluded from the comparison of several measured values.
• US Pat. No. 6,462,530 B1 discloses a rotation rate sensor which comprises a component having a plurality of rotation rate sensor elements which, with a suitable arrangement, permit redundant measurements of rotation rates.
• the integration of the rotation rate sensor elements in a motor vehicle is simplified and components of the rotation rate sensor, such as a power supply, can be used by several rotation rate sensor elements simultaneously.
• a sensor element comprises a biaxial first rotation rate sensor element with which rotation rates of rotational movements of the sensor device can be detected about a first and a second rotation rate measurement axis, the first and second rotation rates being detectable. ten measuring axis orthogonal to each other are aligned.
• the sensor device is characterized in that it comprises at least one further rotation rate sensor element, with which a rate of rotation of a rotational movement of the sensor device can be detected about a rotation rate measuring axis which lies in a plane together with the first and the second rotation rate measurement axis.
• an orthogonal orientation is understood to mean a substantially orthogonal alignment, which, however, may deviate from an exact orthogonality in a smaller angular range, for example due to production-related tolerances.
• a parallel alignment In the same sense, an arrangement in a certain level is to be understood. In this case, two axes or directions may be aligned relative to each other due to slight deviations such that they do not span exactly one plane. Furthermore, a third axis or direction may have a smaller deviation so that it does not lie exactly in a certain plane.
• An advantage of a sensor device designed according to the invention is that redundant measurements of a rate of rotation with respect to at least one yaw rate measuring axis can be made. This makes it possible, in particular, to make a rotation rate measurement plausible by a second rotation rate measurement in order, for example, to ensure the correct functioning of the sensor device. This is particularly important when using the sensor device in a motor vehicle, if a detected rotation rate is used to carry out safety-relevant functions.
• the sensor device is particularly suitable for detecting one or more of the rotation rates from the group comprising a yaw rate of the motor vehicle, a roll rate of the motor vehicle and a pitch rate of the motor vehicle.
• the sensor device Due to the use of a biaxial rotation rate sensor element, the sensor device can also be used flexibly in various applications. be set to detect rates of rotation with respect to different rotation rate measuring axes. As a result, it is advantageously possible to achieve particularly high volumes in the production of the sensor device. Furthermore, in the case of a two-axis rotation rate sensor element, different components can be used for measuring rotation rates with respect to two rotation rate measurement axes. Thus, the profitability of the sensor device is increased, and it may even be the use of the sensor device in the sense of a single-axis rotation rate sensor economically feasible.
• the first rotation rate sensor element comprises a transversely oscillatable sensor structure having a deflectable structure mass and a means for vibrationally exciting the transversely oscillatable sensor structure along a vibration axis, wherein the structure mass can be deflected due to Coriolis forces that are generated by rotation of the sensor device about the first and second Turning measuring axis occur, and wherein the first and the second yaw rate measuring axis are aligned orthogonal to the swing axis.
• a deflection of the structural mass during a rotation of the sensor device about the first and the second axis of rotation is preferably detected by means of a first and a second detection unit, which are each associated with a rotation rate measuring axis.
• a driven structure mass is used to detect rotation rates with respect to two rotation rate measuring axes.
• This enables a particularly compact overall volume of the two-axis rotation rate sensor element, which corresponds almost to that of a single-axis rotation rate sensor element.
• only one detection unit is added, which is assigned to the second axis of rotation.
• the rotation rate sensor element comes with a single drive means for driving the structural mass, which in addition to a more compact design and a particularly efficient operation of the rotation rate sensor element is possible.
• a corresponding three-axis angular rate sensor element requires an additional driven structural mass due to the required orthogonality of the drive direction and rotational measuring axis.
• a three-axis rotation rate sensor element has at most very slight advantages in terms of cost-effectiveness - for example compared to a combination of a two-axis and another uniaxial rotation rate sensor element.
• the sensor device comprises a plausibility check device, which is designed to determine a plausibility signal with respect to the first rotation rate based on a comparison of a first rotation rate measured by the first rotation rate sensor element and a second rotation rate measured by the further rotation rate sensor element.
• the value of the plausibility signal is preferably a measure of the plausibility of the measured first rotation rate.
• the plausibility signal can be used in an application in order to be able to use the measured rotation rate in accordance with its plausibility.
• the plausibility-setting device is configured to determine a rotation rate output signal with respect to a rotation rate measurement axis based on at least one first rotation rate measured by the first rotation rate sensor element and a second rotation rate measured by the further rotation rate sensor element.
• a rotation rate output signal which can be used, for example, by an application as a rotation rate signal to execute predetermined functions, is determined from a plurality of measured rotation rates, whereby the reliability of the signal can be improved.
• the further rotation rate sensor element is designed as a uniaxial rotation rate sensor element with which a rate of rotation of a rotational movement of the sensor device can be detected by a third rotation rate measuring axis parallel to the first or the aligned second rotation rate measuring axis.
• this allows a redundant measurement of the rotation rates with respect to the first or second yaw rate measurement axis.
• a plausibility signal with regard to these rotation rates can be determined in a simple manner, for example based on the difference of the rotation rates.
• the further rotation rate sensor element is embodied as a uniaxial rotation rate sensor element with which a rotation rate of a rotational movement of the sensor device can be detected by a fourth rotation rate measurement axis that is not parallel to the first and the second rotation rate measurement axis is aligned.
• plausibility signals with respect to the rotation rates which are detected with respect to the first and second rotation rate measuring axes, can be determined by means of the plausibility check device. In this configuration, it is thus advantageously possible to determine plausibility signals with regard to two rotation rates on the basis of only one further rotation rate.
• the determination of the plausibility signals is preferably based on the fact that, in this configuration, the angular velocity with respect to one of the rotation rate measuring axes results from a linear combination of the angular velocities with respect to the other two rotation rate measuring axes.
• the further rotation rate sensor element is configured as a two-axis rotation rate sensor element with which rotation rates of rotational movements of the sensor device can be detected by two further rotation rate measurement axes which are oriented orthogonally to one another, wherein at least one of the further rotation axes is aligned parallel to the first or second yaw rate measuring axis of the first yaw rate sensor element.
• redundant measurements can also be made with respect to the other rotation rate measuring axis of the first rotation rate sensor element, or the sensor device can be expanded by integration of the further two-axis rotation rate sensor element into a three-axis rotation rate sensor.
• At least one uniaxial rotation rate sensor element can additionally be provided, with which a rate of rotation with respect to a rotation rate measuring axis can be detected which is aligned parallel to one of the other other rotation rate measurement axes.
• the rate of rotation with respect to this rotation rate measuring axis can be detected redundantly in order to determine a plausibility signal.
• an additional uniaxial rotation rate sensor element can be provided, with which a rate of rotation with respect to a rotation rate measuring axis can be detected, which lies with the other rotation rate measuring axes in a plane, but is not aligned parallel to one of the other axes of rotation.
• the sensor device in addition to the biaxial formed further Drehrad- sensor element comprises another uniaxial rotation rate sensor element with which a rate of rotation of a rotational movement of the sensor device can be detected by a fifth rotation rate measuring axis, wherein the fifth rotation rate measuring axis in a plane with a rotation rate measuring axis of the first rotation rate sensor element and with a rotation rate measuring axis of the further two-axis Drehrad- tensensorelements which are not arranged parallel to each other, and wherein the fifth rotation rate measuring axis is not aligned parallel to one of these rotation rate measuring axes of the first and the other rotation rate sensor element.
• two of the in-plane rotation rate measuring axes are oriented orthogonally to one another - for example the two rotation rate measuring axes of the two-axis rotation rate sensor elements which are not aligned parallel to one another.
• a plausibility signal with respect to the rotation rates which are determined with respect to the rotation rate measuring axes of the two biaxial rotation rate sensor elements with respect to which a redundant rotation rate measurement can not already be made by the two biaxial rotation rate sensor elements, can be determined with only one single uniaxial rotation rate sensor element.
• a connected embodiment of the sensor device provides that the plausibility check device is designed to determine plausibility signals with regard to rotational rates on the basis of a comparison of rotation rates, which have been determined with respect to rotational rate measuring axes that comprise the fifth rotation rate measuring axis lying in a plane.
• the in-plane yaw rate measurement axis is determined. This is preferably an orthogonal rotation rate measuring axis in the plane.
• an embodiment of the sensor device is characterized in that, in addition to the other two-axis rotation rate sensor element, a further two-axis rotation rate sensor element is included, each rotation rate measuring axis of one of the two-axis rotation rate sensor elements contained in the sensor device being aligned parallel to a further rotation rate measurement axis of a further rotation rate sensor element of the sensor device.
• the sensor device advantageously comprises three two-axis rotation rate sensor elements, wherein two rotation rate measuring axes of different rotation rate sensor elements are aligned parallel to one another, so that redundant measurements of the rotation rates are made possible in order to determine a corresponding plausibility signal.
• a refinement of the sensor device is characterized in that the included yaw rate sensor elements are components of an integrated circuit.
• components can be mounted in a simple manner, which contain the sensor device.
• a component is proposed, which comprises a sensor device of the type described above, and a signal processing device that is configured to generate a rotation rate output signal and / or a plausibility signal with respect to at least one rotation measurement axis of the rotation rate sensor sensor contained in the sensor device. to prepare elements for deployment outside of the component.
• the signal processing device can be configured to process a rotation rate output signal and / or a plausibility signal in such a way that it can be provided on a data bus.
• the signal processing device is configured to transmit the rotation rate output signal and / or the plausibility signal wirelessly to one or more receivers.
• the component can additionally contain an energy supply which supplies the sensor device and the signal processing device with energy.
• the power supply can be fed from outside the component, if it is connected, for example, to an energy supply network.
• a self-sufficient power supply of the component can be provided. This makes it possible, in particular, to be able to operate the component even in the event of a failure of the supply network in order, for example, to be able to maintain functions which rely on the measurement signals provided by the component.
• the sensor element may be included as an integrated circuit in the component, whereby a simple assembly of the component is ensured by modules, wherein the sensor device is one of the modules.
• the rotation rate sensor elements contained in the sensor device are applied directly to other components, in particular together with the signal processing device, on a printed circuit board.
• the component comprises at least one further sensor element which is coupled to the signal processing device and which is designed to detect a measurement variable other than a rotation rate, the signal processing device being configured to make an output signal available with respect to this measurement variable.
• a sensor infrastructure which in particular comprises the signal processing device, is thereby used by a plurality of sensors, whereby the cost-effectiveness of the component can be increased.
• the further sensor element may be, for example, an acceleration sensor element.
• the acceleration sensor element may be configured to detect a driving-dynamic acceleration along a predetermined direction and / or a higher acceleration along a predetermined direction, as occurs in particular in collisions of the vehicle.
• the direction may be, for example, the longitudinal, transverse or vertical direction of the vehicle.
• the values of dynamic driving accelerations can, for example, be used by a vehicle dynamics control in order to determine and / or evaluate the driving state of the vehicle.
• the above-mentioned higher accelerations can be used to trigger safety systems, such as airbags.
• Another aspect of the invention relates to a motor vehicle comprising a sensor device of the type described above and / or a component of the type described above.
• the yaw rate, roll rate and / or pitch rate can be detected in a motor vehicle by means of the sensor device.
• further sensor elements for detecting longitudinal, transverse and / or vertical acceleration of the motor vehicle can be used within the component.
• a vehicle dynamics control in the motor vehicle can be carried out in a manner known per se to the person skilled in the art.
• the actual driving state of the vehicle can be described on the basis of the measured variables.
• the yaw rate of the vehicle and the longitudinal and lateral acceleration are particularly relevant to the description of the driving-dynamic state of the motor vehicle.
• the actual driving state is usually compared with a desired driving state, which is usually calculated model-based.
• variable sizes such as the Radeinschlagwinkel of steerable wheels of the vehicle and the vehicle speed set by the driver. If the actual driving state deviates from the desired driving state in a predetermined manner, the vehicle can be stabilized by targeted intervention in the driving behavior.
• rotational rates measured by means of the sensor device can be used in an occupant protection system in order to trigger safety devices of the vehicle.
• an impending rollover of the vehicle can be detected, whereupon protective systems, such as a roll bar, can be activated.
• protective systems such as a roll bar
• the component may comprise one or more acceleration sensors for measuring high accelerations, as occur in a collision. On the basis of the measuring signals of these sensors, for example, airbags or other safety systems of the vehicle can be triggered in the event of a collision.
• FIG. 1 shows schematically a perspective view of double existing and transversely oscillatable sensor structures of a rotation rate sensor of a sensor element
• 5 schematically shows a first sensor element with three two-axis rotation rate sensors, a signal processing and a housing; 6 is a schematic view of a further sensor element with three two-axis angular rate sensors, two three-axis acceleration sensors and one signal processor each;
• FIG. 7 shows schematically a further sensor element with three two-axis rotation rate sensors, two three-axis acceleration sensors and with one signal processing each with integrated microprocessor functions;
• FIG. 8 schematically shows an additional sensor element with separately housed two-axis angular rate sensors and three-axis acceleration sensors; 9 schematically shows a first configuration of a sensor element with a uniaxial and a biaxial rotation rate sensor; 10 schematically shows a further configuration of another sensor element with a uniaxial and a biaxial yaw rate sensor; 11 schematically shows an additional configuration of a sensor element with two two-axis rotation rate sensors; FIG. 12 schematically shows a configuration of a sensor element with two two-axis rotation rate sensors and a second redundancy monitoring circuit; FIG.
• FIG. 13 schematically shows a configuration of a sensor element with a one-axis and two biaxial rotation rate sensors and a second one.
• FIG. 14 schematically shows a configuration of a sensor element having one uniaxial and two biaxial yaw rate sensors and three redundancy monitoring circuits.
• the sensor structure 1 shows a schematic representation of a first sensor structure 1 of a micromechanical two-axis, monolithic rotation rate sensor element.
• the sensor structure 1 is preferably produced by means of micromechanical manufacturing methods of crystalline silicon, which is formed as a wafer.
• the first sensor structure 1 includes a structural frame 4 which can be vibrated at a predetermined frequency by a drive unit, not shown in the figure, according to the drive direction 5.
• the drive direction 5 coincides with the x-axis 7 of a Cartesian coordinate system 8.
• the drive unit can operate capacitively or piezoelectrically.
• structural mass elements 3a, 3b are provided, which are movably mounted on the structural frame 4.
• the structural mass elements 3 a, 3 b, as shown in FIG. 1 can each be rotatably mounted on the structural frame 4 on one side.
• the first sensor structure 1 has suitable drive detection means 11 and 12.
• a capacitive drive detection is provided intended.
• the Anthebsdetetation can also be done on the basis of piezoelectric structures.
• a Coriolis force acting along the z-direction 9 of the represented coordinate system 8 acts on the structure frame 4 points, ie perpendicular to the frame plane of the structural frame 4.
• This Coriolis force leads to a measurable deflection of the structural mass elements 3a, 3b in the direction of the Coriolis force.
• the two structural mass elements 3a, 3b in the same direction -. in a common direction with respect to the frame level - deflected. The deflection can in turn be detected capacitively.
• detection devices 13 and 14 interact with the structural mass elements 3a, 3b in the manner of a capacitor whose capacitance changes due to the deflection of the structural mass elements 3a, 3b. This change in capacitance is determined in order to determine therefrom the rate of rotation with respect to the yaw rate measuring axis 10.
• the deflection of the structural mass elements 3a, 3b can also be detected piezoelectrically.
• a Coriolis force acting along the y-direction 10 of the illustrated coordinate system acts on the structure frame 4, ie in the frame plane and perpendicular to the drive direction 5.
• the Coriolis force leads to a deflection of the structural frame 4 in the same direction, which can be detected by means of suitable detection means 17 and 18. These can work capacitively in one embodiment and be configured analogously to the drive detection means 11, 12.
• detection means 17 and 18 are arranged on the structure frame 4, for example, having a comb structure and cooperating with corresponding detection means in the manner of a capacitor whose capacitance is changed due to the movement of the structural frame 4. This change in capacitance is determined in order to determine therefrom the rotation rate with respect to the rotation rate measuring axis 9.
• the drive detection can also take place on the basis of piezoelectric structures.
• the structural mass elements 3a, 3b may also be designed such that their centers of gravity are not within the frame plane, but are arranged offset with respect to this up or down. Due to such an arrangement of the centers of gravity of the structural mass elements 3a, 3b, a Coriolis force which arises due to a rotation about the axis of rotation 9 leads to a deflection of the structural mass elements 3a, 3b out of the frame plane. In this case, however, the structural masses 3a, 3b are deflected in opposite directions, i. E. a structural mass element 3a; 3b is deflected upwardly with respect to the frame plane and the other structural mass element 3a; 3b with respect to the frame plane down. The detection of this deflection can again be performed capacitively or piezoelectrically.
• a second sensor structure 2 is preferably provided, which is rotated by 180 ° with respect to the first sensor structure 1 and constructed in the same way.
• the second sensor structure 2 also contains a structural frame 4 ', which can be set in vibration by the drive unit along the drive direction 5.
• drive detection means 11 ', 12', detection means 13 ', 14' for detecting a deflection of the structural elements 3a ', 3b' perpendicular to the frame plane and detection means 11 ', 12' for detecting deflections of the structural frame 4 'in FIG Frame plane provided perpendicular to the drive direction 5.
• the mode of operation of the stated components of the second sensor structure 2 corresponds to the mode of operation of the corresponding components of the first sensor structure 1.
• the sensor structures 1, 2 are coupled to one another in a connection region 6.
• a coupling element 19 is provided for the coupling of the structural mass elements 3a, 3b of the sensor structure 1 and the structural mass elements 3a ', 3b' of the second sensor structure 2.
• the coupling can avoid disturbance deflections and the excitation of undesired vibration modes of the structural frames 4, 4 'and the structural mass elements 3a, 3b, 3a', 3b '. Due to the coupling, the two sensor structures 1, 2 also have the same resonant frequency and can consequently be driven by means of a common drive unit.
• FIG. 2 shows an embodiment of a single two-axis rotation rate sensor element 120 having a sensor structure 101 of the type described above.
• the transversally oscillatable sensor structure 101 can be vibrated by means of a drive device 122 according to a drive direction 105.
• the intensity of the oscillation can be determined by means of a drive detection device 111.
• deflections of the structural frames 4, 4 'or the structural mass elements 3 a, 3 b, 3 a', 3 b 'relative to two deflection directions 109, 110 perpendicular to the drive direction 105 can be measured in order to determine rotation rates occur during rotational movements of the rotation rate sensor element 120.
• a movement in a deflection direction 109; 110 occurs when the sensor structure 120 rotates about an axis of rotation perpendicular to the direction of deflection 109; 110 and the drive direction 105 is aligned.
• a sectional view along the section line XX is shown, which further illustrates the drive direction 105 and the orthogonal deflection directions 109, 110.
• FIG. 3 shows a schematic representation of a two-axis rotation rate sensor element 221.
• this includes means 226 for suppressing crosstalk of the drive movement in the drive direction 105 to deflections of the structural frames 4, 4 'or the structural mass elements 3 a, 3b, 3a '3b' in a deflection direction 109, 110.
• these means 226 can compensate for production-related deviations of the sensor structure 101 from the ideal structure.
• means 227 for restoring the deflection of the structural frames 4, 4 'or the structural mass elements 3a, 3b, 3a' 3b 'and means 228 for frequency control with regard to the deflection movements with respect to the deflection direction 109 are provided.
• the rotation rate sensor element 221 comprises means 229 for restoring the deflection of the structural frames 4, 4 'or the structural mass elements 3a, 3b, 3a' 3b 'and means 230 for frequency control with regard to the deflection movements with respect to the deflection direction 110.
• FIG. 4 shows, in a schematic block diagram, a two-axis rotation rate sensor element 321 as well as peripheral components which are used for the operation of the rotation rate sensor element 321 and for providing rotation rate measurement signals 335, 336.
• the rotation rate sensor element 321 is designed in a previously illustrated embodiment.
• Each yaw rate measuring axis 309; 310 of the rotation rate sensor element is a measuring axis evaluation circuit 332; 333 assigned. Based on the deflection of the structural frames 4, 4 'or the structural mass elements 3 a, 3 b, 3 a' 3 b ', this determines a rotation rate measuring axis 309 when the rotation rate sensor element 321 rotates; 310 is detected, the rate of rotation of the corresponding rotational movement.
• the rotation rates are determined by the measurement evaluation circuits 332; 333 as yaw rate measurement Signals 335 and 336 are output. Further, a drive circuit 331 is provided, which controls the drive of the rotation rate sensor element 321.
• a sensor monitoring circuit 330 is provided to monitor the correct operation of the rotation rate sensor element 321 and, if necessary, to act on the drive circuit 331 and the rotation rate sensor 321. In particular, by means of the sensor monitoring circuit 330, a control of the drive frequency of the rotation rate sensor 321 can be carried out in order to set the drive frequency to a predetermined value.
• a voltage supply and monitoring 334 the power supply of the rotation rate sensor 321 and the peripheral components 330, 331, 332, 333 is ensured.
• a biaxial rotational sensor element of the type described above is combined with one or more further sensor elements. These are, in particular, further one or two-axis rotation rate sensor elements.
• a biaxial rotation rate sensor element can be combined as desired with one or more one- or two-axis rotation rate sensor elements in accordance with the intended application. Various such configurations will be described in more detail below.
• FIG. 5 shows an integrated circuit 440 which, by way of example, comprises a configuration with three two-axis rotation rate sensor elements 421 (numbered here only as an example).
• the peripheral components of the rotation rate sensor elements 421 are integrated together in a signal processing circuit 441, which are assembled with the rotation rate sensor elements 421 on a substrate 442 in a housing 443.
• a plurality of signal processing circuits 441 may be provided, which are each assigned to a rotation rate sensor element 421.
• the printed circuit board 442 forms a bottom portion of the housing 443.
• Around Circuit board 442 electrical connection connections 444 are provided, which extend beyond the housing 443 outwards. Via the connection connections 444, the voltage supply of the signal processing circuit 441 and of the rotation rate sensor elements 421 can take place and output signals of the signal processing circuit 441 can be provided.
• the integrated circuit illustrated in one embodiment in FIG. 5 can be arranged together with further components within a housing on a printed circuit board. This results in a component that can be used to detect rotation rates in various applications - for example, in a motor vehicle.
• the rotation rate sensor elements 421 and their peripheral components 441 can also be mounted on the printed circuit board without additional packaging.
• the electrical connection to the printed circuit board takes place, for example, by means of wire bonding or flip-chip assemblies.
• the component preferably contains a voltage supply which can be connected to a supply network and provides the required operating voltage for the rotation rate sensor elements 421 and the peripheral components 441 as well as optionally present further components.
• the assembly of the component with other components results from the intended application.
• signal processing units which process output signals of the rotation rate sensor elements 421 or the signal processing circuit 441 for further use.
• a microprocessor can be provided which processes output signals in such a way that they can be transmitted via a data bus.
• a transmission can take place via an SPI, CAN or FlexRay bus.
• a radio transmission electronics can also be integrated into the component in order to control the output signals.
• a self-sufficient energy supply can be integrated into the component, which enable the operation of the component over a certain period of time when the external power supply through the supply network fails.
• the self-sufficient energy supply includes, for example, a battery, a capacitor, or an energy converter that recovers energy from heat, acceleration, chemical reactions, or the like.
• FIG. 6 shows a component 540 which comprises a rotation rate sensor elements 521 comprising a comprehensive configuration, which in turn provides, for example, three two-axis rotation rate sensor elements 521.
• the component 540 contains two acceleration sensor elements 544a and 544b, which in the exemplary representation are each designed to be three-axis.
• Each of the three two-axis rotation rate sensor elements 521 and the two three-axis acceleration sensor elements 544a, 544b is assigned a periphery 541 (numbered here only as an example).
• the individual sensor elements 521, 544a, 544b and their periphery 541 in the illustrated embodiment each form a chip stack which is applied to a printed circuit board 542.
• a power supply 534, a wireless signal transmission device 545, and a microprocessor 546 are provided for conditioning the sensor signals.
• the additional components 534, 545, 546 are used by all sensor elements 521, 544a, 544b, whereby a high efficiency of the component 540 is achieved.
• the component 540 may further comprise a housing, not shown in FIG. 5, which has an external electrical connection. By way of this, the component 540 can be connected to a power supply network.
• NEN electrical connections for data exchange between the component and other systems may be provided.
• acceleration sensor elements 544a and 544b are particularly advantageous when using the component 540 in a motor vehicle.
• the acceleration sensor element 544a can be designed to detect dynamic driving accelerations along the longitudinal, transverse and vertical axes of the vehicle. These accelerations can be used to determine and evaluate the driving state of the vehicle in a vehicle dynamics control system.
• the acceleration sensor element 544b may be configured to detect high accelerations, for example, as occur in the event of a collision. These accelerations can be used in safety systems of the vehicle to control safety devices, such as airbags.
• acceleration sensor elements 544a and 544b instead of two acceleration sensor elements 544a and 544b, only one acceleration sensor element 544a; 544b be provided.
• one or two acceleration sensor elements 544a, 544b or additionally also other sensor elements can be integrated into the sensor device 540.
• This may be, for example, one or more single-axis, two-axis or three-axis magnetic field sensor elements, which serve to determine the orientation of the component 540 in the earth's magnetic field. If the component 540 is installed in a motor vehicle, this can be used to determine, for example, the orientation of the vehicle with respect to the cardinal directions. This can be used to assist in determining position and heading, for example, in a satellite-based location system.
• FIG. 7 shows a further component 640 which, in the embodiment shown by way of example, again contains a configuration with three two-axis rotation rate sensor elements 621 and two three-axis acceleration sensor elements 644. Furthermore, further components are provided, the one Power supply 634 and a wireless signal transmission device 645 include.
• the component 640 differs from the component 540 described above in particular in that the yaw rate sensor elements 621 and the acceleration sensor elements 644 are assigned a single signal processing unit 647 which performs the functions of the peripheral components of the sensor elements 621, 644a, 644b and can preferably also assume microprocessor functions , As a result, the additional microprocessor 546 contained in the sensor device 540 can be saved. Furthermore, the sensor element 640 can be made more compact overall, in particular in direct comparison with the sensor element 540 from FIG.
• the component 740 illustrated in FIG. 8 likewise contains a configuration of rotation rate sensor elements, which in turn comprises three two-axis rotation rate sensor elements 421 in the exemplified embodiment. Furthermore, further sensor elements are included, which in the exemplary illustration are two triaxial acceleration sensor elements 744. In contrast to the embodiments described above, however, the yaw rate sensor elements 421 are combined in the previously described integrated circuit 440. This is configured in the manner described above and comprises, in addition to the rotation rate sensor elements 421, the peripheral components 441 of the rotation rate sensor elements 421. The acceleration sensor elements 744 are also combined in an integrated circuit 750 together with their periphery 741. The integrated circuits 440, 750 are in turn mounted on a printed circuit board 742 together with other components.
• the further components in the exemplary embodiment again comprise a voltage supply 734, a radio transmission circuit 745 and a microprocessor 746.
• the use of the integrated circuit allows in particular a particularly simple assembly of the component 740.
• a component of the type described above can be used in particular in a motor vehicle to determine one or more rotation rates of the motor vehicle, which can be used in other systems of the motor vehicle for controlling certain functions, such as a vehicle dynamics control or a safety function.
• the rotation rates may be the yaw rate of the vehicle, which is used in particular in vehicle dynamics control systems, as well as the roll rate and / or the pitch rate of the vehicle.
• the roll rate can be used for example in a security system to detect impending rollovers of the vehicle.
• the pitch rate for example, environmental sensors can be aligned which monitor an area in front of and / or behind the vehicle.
• the orientation of such sensors with respect to the roadway can be kept constant.
• the measurement signals of the other sensor elements contained in the component can also be used by other systems of the vehicle, as has already been explained above.
• associated plausibility signals can also be output, from which the plausibility of the detected rotation rates can be determined.
• the functions which use the rotation rates as input variables can be adapted. For example, with a low degree of plausibility, interventions can be weakened, or the function can be completely deactivated. In particular, this makes it possible to avoid incorrect interventions.
• the configuration 850 illustrated schematically in FIG. 9 comprises a uniaxial yaw rate sensor element 851 with a single yaw rate measuring axis 852 and a yaw rate sensor element 821 with two mutually orthogonally oriented yaw rate measuring axes 809 and 810.
• the rotation rate sensor elements 851 and 821 are assigned a periphery 841, which comprises a drive circuit 831, 856 and a sensor monitoring circuit 830, 857 for each rotation rate sensor element 851, 821. Furthermore, a measuring axis evaluation circuit 832, 833, 854 is provided for each rotation rate measuring axis 809, 810, 852, which determines rotation rate measurement signals with respect to the corresponding rotation rate measuring axis 809, 810, 852.
• the rotation rate measurement signal corresponds to the rotation rate output signal.
• the rotation rate output signal 835 can be formed on the basis of one of the rotation rate measurement signals or on the basis of two rate of rotation measurement signals, for example by averaging or else a maximum or minimum value formation.
• the plausibility signal 855 is preferably formed on the basis of the difference of the rotation rate measurement signals and indicates the plausibility of the associated rotation rate output signal 835.
• the further configuration 950 shown in FIG. 10 also includes a uniaxial yaw rate sensor element 951 with a single yaw rate measuring axis 952 and a two-axis yaw rate sensor element 921
• a periphery 941 in turn comprises a first sensor monitoring circuit 930 and a first drive circuit 931 associated with the biaxial rotational sensor element 921, and a second sensor monitoring circuit 957 and a second drive circuit 956 corresponding to the uniaxial one Yaw rate sensor element 951 are assigned.
• the rotation rate measuring axes 909, 910, 952 are each assigned a measuring axis evaluation circuit 932, 933, 954, which determines rotation rate measurement signals with respect to the corresponding rotation rate measuring axis 909, 910, 952.
• the single rotation rate measuring axis 952 of the uniaxial rotation rate sensor 951 lies in a plane which is spanned by the two rotation rate measuring axes 909 and 910 of the two-axis rotation rate sensor 921. However, it is not aligned parallel to the first rotation rate measuring axis 909 and also not parallel to the second rotation rate measuring axis 910 of the two-axis rotation rate sensor 921. This makes it possible to carry out a plausibility check of the rotation rates measured by means of rotation rate sensor 921 with respect to both rotation rate measuring axes 909, 910.
• the angular velocity with respect to a rotation rate measuring axis 909 results in particular; 910; 952 from a linear combination of the angular velocities with respect to the other two yaw rate measuring axes 909; 91; 952.
• This can be used to make a plausibility check of the measured rotation rates.
• angular velocities can be determined on the basis of the measured rotation rates.
• a suitable linear combination of the angular velocities with respect to the rotation rate measurement axes 909, 910 of the biaxial rotation rate sensor 921 can be compared with the angular rate with respect to the rotation rate measurement axis 952 of the uniaxial rotation rate sensor 951. From the difference, plausibility signals with respect to the measured rotation rates can be determined.
• a first rotation rate output signal 935 with respect to the first rotation rate measuring axis 909 and a second rotation rate output signal 936 with respect to the second rotation rate measuring axis 910 of the two-axis rotation rate sensor element 921 are determined by means of a suitable redundancy monitoring circuit 953.
• the rotation rate output signals 935, 936 can correspond, for example, to the associated rotation rate measurement signals.
• the redundancy monitoring circuit 955 determines a first plausibility signal 955 associated with the first rotation rate output signal 935 with respect to the first rotation rate measuring axis 909 and a second plausibility signal 960 associated with the second rotation rate output signal 936 with respect to the second rotation rate measuring axis 910.
• FIG. 11 shows a configuration 1050 that includes two biaxial rotational-rate sensor elements 1021, 1051.
• a periphery 1041 includes a first sensor monitoring circuit 1030 and a first driving circuit 1031 associated with the first two-axis yaw rate sensor element 1021, and a second sensor monitoring circuit 1057 and a second driving circuit 1056 associated with the second two-axis yaw rate sensor element 1051.
• the two-axis rotation rate sensor elements 1021, 1051 have first rotation rate measuring axes 1009, 1069, which are aligned parallel to one another. With regard to the parallel rotation rate measuring axes 1009, 1069, redundant rotation rate measurements can thus be made.
• Second rotation rate measuring axes 1010, 1070 of the two rotation rate sensor elements 1021, 1051 are orthogonal to one another and aligned orthogonally to the first rotation rate measuring axes 1009, 1069.
• the rotation rate measuring axes 1009, 1010, 1069, 1070 are each assigned a measuring axis evaluation circuit 1032, 1033, 1066, 1067 which determines rotation rate measurement signals with respect to the corresponding rotation rate measuring axis 1009, 1010, 1069, 1070.
• the rotation rate measuring signals with respect to the parallel first rotation rate measuring axes 1009, 1069 of the two rotation rate sensor elements 1021, 1051 become one Redundancy monitoring circuit 1053 supplied. This determines from the rotation rate measurement signals a rotation rate output signal 1035 with respect to the rotation rate measurement axis 1009 and an associated plausibility signal 1055.
• rotation rate output signals 1036 and 1065 are provided with respect to the other rotation rate measurement axes 1010, 1070 corresponding to the rotation rate measurement signals relating to these rotation rate measurement axes 1010, 1070 have been determined.
• the configuration 1050 illustrated in FIG. 11 thus corresponds to a sensor device which is capable of detecting rotation rates with respect to three yaw rate measuring axes 1009, 1010, 1070 that are pairwise orthogonal to one another. With respect to a yaw rate measuring axis 1009, a redundant determination of the yaw rate is possible.
• the configuration 1150 shown in FIG. 12 differs from the configuration 1050 described above in that the second yaw rate measuring axes 1010, 1070 of the two yaw rate sensor elements 1021, 1051 are also aligned parallel to one another. However, they are in turn aligned orthogonally to the first rotation rate measuring axes 1009, 1010 of the two rotation rate sensor elements. In this way, redundant measurements of the rotation rate with respect to both rotation rate measuring axes 1009, 1010 of the first two-axis rotation rate sensor element 1021 can be made and corresponding plausibility signals can be determined.
• the rotation rate measuring signals which have been detected with respect to the second rotation rate measuring axes 1010, 1070 of the two rotation rate sensor elements 1021, 1051, are also supplied to a redundancy monitoring circuit 1170.
• the yaw rate output signal 1035 and the associated plausibility signal 1055 are again provided by the redundancy monitoring circuit 1053.
• the configuration 1150 illustrated in FIG. 12 thus corresponds to a sensor device which is capable of detecting rotation rates with respect to two orthogonal rotation rate measuring axes 1009, 1010.
• a redundant determination of the yaw rate is possible.
• FIG. 13 shows a configuration with a uniaxial rotation rate sensor element 1281 and two two-axis rotation rate sensor elements 1221, 1251.
• a peripheral 1241 includes a first sensor monitoring circuit 1230 and a first driving circuit 1231 associated with the first two-axis yaw rate sensor element 1221, and a second sensor monitoring circuit 1257 and a second driving circuit 1256 associated with the second two-axis yaw rate sensor element 1251.
• the two-axis rotation rate sensor elements 1221, 1251 have first rotation rate measuring axes 1209, 1269, which are aligned parallel to one another. Second rotation rate measuring axes 1210, 1270 of the two two-axis rotation rate sensor elements 1221, 1251 are orthogonal to one another and in each case aligned orthogonally to the first rotation rate measuring axes 1209, 1269.
• the yaw rate measurement axes 1209, 1210, 1269, 1270 are each assigned a measurement axis evaluation circuit 1232, 1233, 1266, 1267 which determines yaw rate measurement signals with respect to the corresponding yaw rate measurement axis 1209, 1210, 1269, 1270.
• the rotation rate measuring signals with respect to the parallel first rotation rate measuring axes 1209, 1269 of the two two-axis rotation rate sensor elements 1221, 1251 are supplied to a redundancy monitoring circuit 1253. This determines from the rotation rate measurement signals a rotation rate output signal 1235 with respect to the rotation rate measurement axis 1209 and an associated plausibility signal 1255.
• the configuration 1250 shown in FIG. 13 corresponds to the configuration previously described and shown in FIG. 11B.
• the uniaxial yaw rate sensor element 1281 is provided.
• a sensor monitoring circuit 1282 and a drive circuit 1283 are assigned to the latter within the periphery 1241, and a measurement axis evaluation circuit 1284 which determines rotation rate measurement signals with respect to the rotation rate measurement axis 1285 of the uniaxial rotation rate sensor element 1281.
• the single rotation rate measuring axis 1281 of the uniaxial rotation rate sensor 1281 lies in a plane which is spanned by the second rotation rate measuring axes 1210, 1270 of the two-axis rotation rate sensor elements 1221, 1251.
• the rotation rate measurement signals determined with respect to the rotation rate measurement axes 1210, 1270 and the rotation rate measurement signal determined with respect to the rotation rate measurement axis 1285 of the uniaxial rotation rate sensor element 1281 are supplied to a redundancy monitoring circuit 1286.
• the configuration 1250 illustrated in FIG. 13 thus corresponds to a sensor device which is capable of detecting rotation rates with respect to three yaw rate measuring axes 1209, 1210, 1270, which are aligned in pairs orthogonal to one another. With respect to all yaw rate measuring axes 1209, 1210, 1270, a plausibility check of the detected yaw rates can be carried out. For this, only two two-axis rotation rate sensor elements 1221, 1251 and one uniaxial rotation rate sensor element 1281 are required.
• the configuration 1350 shown in FIG. 14 comprises three biaxial yaw rate sensor elements 1321, 1351, 1381.
• a periphery 1341 comprises a first sensor monitoring circuit 1330 and a first drive circuit 1331, associated with the first biaxial yaw rate sensor element 1321; and a second sensor monitoring circuit 1357 and a second drive circuit 1356 associated with the second biaxial yaw rate sensor element 1351.
• the two-axis rotation rate sensor elements 1321, 1351 have first rotation rate measuring axes 1309, 1369, which are aligned parallel to one another. Second rotation rate measuring axes 1310, 1370 of the two two-axis rotation rate sensor elements 1321, 1351 are orthogonal to each other and each orthogonal to the first rotation rate measuring axes 1309, 1369 aligned.
• the rotation rate measurement axes 1309, 1310, 1369, 1370 are each assigned a measurement axis evaluation circuit 1332, 1333, 1366, 1367 which determines rotation rate measurement signals with respect to the corresponding rotation rate measurement axis 1309, 1310, 1369, 1370.
• the rotation rate measuring signals with respect to the parallel first rotation rate measuring axes 1309, 1369 of the two two-axis rotation rate sensor elements 1321, 1351 are supplied to a redundancy monitoring circuit 1353. This determines from the rotation rate measurement signals a rotation rate output signal 1335 with respect to the rotation rate measuring axis 1309 and an associated plausibility signal 1355.
• the configuration 1350 shown in FIG. 14 corresponds to the configuration previously described and shown in FIG. 11B 1050.
• the third biaxial yaw rate sensor element 1381 is provided. Within the periphery 1341, a sensor monitoring circuit 1382 and a drive circuit 1383 are assigned to this.
• the third two-axis rotation rate sensor element 1381 has two orthogonal rotation rate measurement axes 1384, 1385 and measurement axis evaluation circuits 1386, 1387 associated therewith, which determine rotation rate measurement signals with respect to the rotation rate measurement axes 1384, 1385.
• the two rotation rate measuring axes 1384, 1385 of the rotation rate sensor element 1381 are each parallel to one of the second rotation axis measuring axes 1310, 1370 of the two other rotation rates. sensor elements 1321, 1351 aligned. As a result, redundant measurements of the rotation rates can also be made for these rotation rate measurement axes 1310, 1370.
• the rotation rate measuring signals with respect to the parallel rotation rate measuring axes 1310 and 1384 are supplied to a redundancy monitoring circuit 1389, which determines a rotation rate output signal 1390 with respect to the rotation rate measuring axis 1310 and an associated plausibility signal 1391 on the basis of the rotation rate measurement signals. Accordingly, the rotation rate measurement signals are supplied with respect to the parallel rotation rate measurement axes 1370 and 1385 to a redundancy monitoring circuit 1392 which determines a rotation rate output signal 1393 with respect to the rotation rate measurement axis 1370 and an associated plausibility signal 1394 on the basis of the rotation rate measurement signals.
• the configuration 1350 illustrated in FIG. 14 thus corresponds to a sensor device which is capable of detecting rotation rates with respect to three yaw rate measuring axes 1309, 1310, 1370 which are aligned in pairs orthogonal to one another. With respect to all yaw rate measuring axes 1309, 1310, 1370, a plausibility check of the detected yaw rates can be carried out by redundant detection of the yaw rates.

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• 2009
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  • 2009-03-11 WO PCT/EP2009/052866 patent/WO2009112526A1/de active Application Filing
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