EP2246573B1 - Système de sécurité pour pompe à vide poussé - Google Patents

Système de sécurité pour pompe à vide poussé Download PDF

Info

Publication number
EP2246573B1
EP2246573B1 EP20100161376 EP10161376A EP2246573B1 EP 2246573 B1 EP2246573 B1 EP 2246573B1 EP 20100161376 EP20100161376 EP 20100161376 EP 10161376 A EP10161376 A EP 10161376A EP 2246573 B1 EP2246573 B1 EP 2246573B1
Authority
EP
European Patent Office
Prior art keywords
pipe
pipe section
section
connecting flange
flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP20100161376
Other languages
German (de)
English (en)
Other versions
EP2246573A3 (fr
EP2246573A2 (fr
Inventor
Marcel Kohler
Herbert Vogt
Urs Frick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HSR AG
Original Assignee
HSR AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HSR AG filed Critical HSR AG
Publication of EP2246573A2 publication Critical patent/EP2246573A2/fr
Publication of EP2246573A3 publication Critical patent/EP2246573A3/fr
Application granted granted Critical
Publication of EP2246573B1 publication Critical patent/EP2246573B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps

Definitions

  • the present invention relates to a protective device for high-vacuum pumps, in particular for turbomolecular pumps according to the preamble of claim 1, as well as a vacuum system with such a protective device.
  • Turbomolecular pumps have been used for several decades to create a high vacuum on all types of process equipment, especially those of the semiconductor industry. Turbomolecular pumps have the advantage that they have a high pumping speed, little susceptibility to contamination and are generally very durable. For the extraction of corrosive gases special turbomolecular pumps are used, whose bearings can be purged with an inert gas.
  • Selenium compounds are also used in the manufacture of modern photovoltaic cells. These compounds have the unpleasant property that they can deposit on cool surfaces. If turbomolecular pumps are used, the compounds are deposited on the rotors and stators of the turbomolecular pumps. This can lead to imbalances in a relatively short time, which can lead to the destruction of the turbomolecular pump.
  • sheets are often used in practice, which are arranged in the passage in front of the turbomolecular pump. By means of the plates harmful and also condensable gases and compounds can be deposited. The disadvantage, however, is that the sheets restrict the conductance, so that the suction power of the turbomolecular pump drops dramatically.
  • the U.S. Patent No. 6,368,371 discloses a collecting device for gases, which can be driven via a corrugated bellows in a collecting chamber, which is arranged in the suction line.
  • the collecting device is arranged on a shaft, which can be moved in and out by means of an actuator in the collecting chamber.
  • the collecting device consists of cooling plates, which have a straight and a curved portion and are held together by two terminal end plates. In operation, the gases flow along the curved passages formed between the individual cooling plates and are cooled on contact with the cooling plates.
  • the cooling of the cooling plates takes place indirectly via the cooling of the shaft, on which the cooling plates are arranged. There is a relatively large gap between the cooling plates and the inner wall of the collecting chamber, so that harmful gas can either precipitate on the inner wall or pass through the gap into the pump.
  • the JP-A-56203682 shows a collecting device for gases, which is formed by a arranged in a collecting chamber liquid nitrogen cooling trap.
  • the cold trap consists of a cylindrical container in which liquid nitrogen is introduced.
  • To regenerate the cold trap we separated the vacuum chamber and the pump by means of appropriate valves from the collecting chamber, removed the liquid nitrogen and heated the cold trap by means of radiant heat. The escaping from the cold trap gas is then withdrawn via a pump.
  • One goal is to propose a device that is efficient.
  • Another goal is to propose a device that is easy to clean.
  • Another goal is to propose a device that allows a high conductance.
  • the device according to the invention has the advantage that high-vacuum pumps and in particular turbomolecular pumps can be effectively protected by the protective device against undesirable, condensable vapors, in particular metal vapors.
  • the fenders are accessible from the outside through the opening of the third connection flange. They can be inserted and removed through the opening of the third connection flange in the passage. This has the advantage that the fenders do not have to be permanently arranged in the passage, but - depending on the process - can be used or removed. By providing a separate connection flange to insert and remove the mudguards, the turbomolecular pump need not be removed to remove the mudguards.
  • the conductance can still be relatively high because the fenders do not fill the entire cross-sectional area of the pipe section.
  • the arrangement of the fenders on opposite sides of a corresponding to the shape of the pipe shell has the advantage that the inner wall of the pipe section through the shell, which is modeled on the inner walls of the pipe section, shielded and the vapors can condense on this. This makes it possible to protect the pipe section of the inventive connector from unwanted deposits.
  • the fenders are arranged and arranged so that the passage between the first and second openings is optically blocked. This can ensure that the vapors to be pumped on their way to the pump on the fenders and can condense on this.
  • the fenders are designed such that the Leitwert tilt by the fenders arranged in the passage less than 40%, preferably less than 30% and most preferably less than 25% of the guide value without baffles.
  • the pipe section adjoining the first connection flange defines a first pipe section and the pipe section adjoining the second connection flange has a second pipe section, and the first and second pipe sections are arranged at an angle to each other, wherein the expanded cross-sectional area between the first and second pipe sections is provided.
  • the first and second pipe sections may be arranged at an approximately right angle to each other.
  • An expedient embodiment provides that the pipe section is designed as a T-connector, wherein the first and second connection flanges preferably have a smaller nominal diameter than the third connection flange.
  • the fenders angle profiles with a first and a second leg, which angle profiles in the space between the first and second, a bend defining pipe sections are arranged and their first leg in the axial direction of the first pipe section and the second leg in the preferred axial direction of the second Tube section are oriented.
  • the shape of the fenders and their arrangement is thus such that on the one hand, the conductance is as high as possible and on the other hand, at least a single contact of the molecules to be pumped with the baffles is ensured. This is achieved in that the fenders are formed and arranged so that there is no optical passage between the first and second connection flange.
  • the fenders are arranged on a holder, which is arranged in the extended cross-sectional area of the pipe section.
  • the holder can be supported on the inner wall of the pipe section or on a flange which can be screwed onto the third connecting flange.
  • the latter embodiment has the advantage that the fenders unscrewed together with the flange resp. can be removed.
  • the holder is formed by a tube, the ends of which are screwed through the tube piece or a screwed onto the third connection flange
  • the tube can be made of copper or of a stainless steel.
  • the fenders are located at a preferably short distance from the inner wall of the pipe section, i. they are thermally insulated from the pipe section.
  • the tube is arranged in turns on the jacket and with this in heat conductive contact. This allows not only the baffles but also the jacket to cool.
  • the tube can also be used at low temperatures, e.g. with liquid nitrogen, to be cooled.
  • the fender and optional jacket existing mounting part is spaced anywhere to the inner walls or is supported exclusively on thermal insulation elements on the pipe section.
  • the holder is arranged with the baffles on a flange which can be screwed to the third connection flange.
  • This is a convenient design, in which no additional fasteners or supports on the pipe section are needed. It is conceivable spacers made of a material with a low coefficient of thermal conductivity, e.g. To use ceramic, plastic, etc., to keep the baffles, respectively the coat enclosing the fenders at a distance from the blank.
  • the present invention is also a vacuum system with a protective device according to one of claims 1 to 11 and a turbomolecular pump, which is connected to the second flange.
  • a protective device according to one of claims 1 to 11 and a turbomolecular pump, which is connected to the second flange.
  • the protective device 11 comprises a pipe section 13 with a first connection flange 15 having a first opening 16 for connecting the pipe section 13 to a process installation (not shown in the figure), a second connection flange 17 having a second opening 18 for connecting a high-vacuum pump (not shown) to the first Pipe section 13 and a third opening 20 having third connection flange 19, which is provided between the first connection flange 15 and the second connection flange 17 on the pipe section 13.
  • the space between the first connection flange 15 and the second connection flange 17 defines a passage 21 for the gas to be pumped out of a process chamber.
  • fenders 23 are arranged, which preferably completely obstruct the passage 21 optically.
  • the fenders are dimensioned so that in the suction direction 25 a view is optically blocked.
  • the diameter of the Fenders 23 substantially the clear widths of the passage at the narrowest points 27 and 29.
  • the mudguards 23 preferably have an angled structure which ensures that gas molecules once entered into the passageways - in the case where they do not adhere to the baffle plates - are deflected so that they penetrate the passageway.
  • the fenders 23 are easily accessible through the third connection flange 19.
  • the fenders are arranged directly on a blind flange 31. This has the advantage that the removal of the mudguards 23 by unscrewing the blind flange 31 is possible. Also, no additional fittings are needed to order the fenders 23 in the pipe section 13.
  • the tube piece has a pipe section 33 with an enlarged cross section 33.
  • the extended cross-sectional area 33 is spherical in the embodiment shown.
  • the protective plates 23 are arranged in the region of the largest cross section. Due to the enlarged cross-section, a gap 35 between the baffles 23 and the inner wall of the pipe section 13 may be present, which ensures the maintenance of a good conductance.
  • the protective plates 23 are preferably surrounded by a jacket 37, respectively accommodated therein.
  • the optional jacket 37 preferably has a shape adapted to the expanded pipe section 33, so that only a small gap 41 remains between the jacket 37 and the inner wall 39 of the pipe section 13.
  • the mudguards 23 are in contact with a cooling circuit.
  • This cooling circuit comprises a tube 43, which is guided through the blind flange 31 and in heat-conducting contact with the jacket 37 and preferably the mudguards 23.
  • the protruding from the blind flange 31 pipe sections define connecting pieces 45,47 for connecting the pipe to a not shown in detail cooling unit.
  • the connecting pieces 45, 47 are advantageously designed as vacuum-insulated passages for the lines transporting the cooling medium, so that there is no cold bridge to the connecting flange.
  • the cooling line at the same time forms the holder for the jacket and the shrouds arranged in the jacket 37.
  • connection flange 15 for the connection of the pipe section 13 to a vacuum system and the connection flange 17 for the connection of the high vacuum pump is not opposite each other as in the embodiment according to FIG. 1 but at an approximately right angle to each other.
  • the first pipe section 49 adjoining the first connection flange 15 and the second pipe section 51 adjoining the second connection flange 17 are at right angles to one another.
  • This embodiment has the advantage that the high-vacuum pump, which is normally a turbomolecular pump, can be arranged very close to the process plant. As a result, the space requirement of the turbomolecular pump to be protected by the protection device is not significantly increased.
  • a sheath 37 is provided with spaced-apart linear guards 23 therein.
  • the jacket 37 has the shape of a preferably circular cylinder 53, which has an opening 55 on one end face and whose other end face is closed by a bottom 57.
  • a holder 59 is provided, on which the fenders 23 are arranged.
  • the fenders 23 have the shape of an angle profile 61, wherein the one leg 63 of the angle profile 61 is oriented to the first opening 16 and the other leg 65 to the second opening 18.
  • the cylinder 53 has a hole 69 in the cylinder jacket on the side oriented to the opening 16, which preferably the same or a similar dimension as the opening 16 has.
  • the number of angle profiles is chosen so that the passage 21 between the opening 16 and the opening 18 is just blocked visually. Adjacent to the angle profiles 61 flat profiles 67 are still provided. However, these can also be omitted, as realized in the third embodiment ( 3 and 4 ).
  • the device of FIG. 2 can be inexpensively made of a pipe section of a certain diameter by the second flange inside and the third flange outside the tube is arranged.
  • the first connection flange which is preferably the same in diameter as the second connection flange, is attached to the jacket of the pipe section as a stub.
  • This connector has two connection flanges, which advantageously have the same nominal size as the connection flange of the high vacuum pump.
  • the holder 59 is formed by a cooling line of a cooling circuit.
  • the cooling line can also be soldered to the holder.
  • This cooling line is guided through the blind flange 31 and extends in turns preferably also around the jacket of the cylinder 53.
  • This has the advantage that both the cylinder jacket of the protection device and the mudguards 23 can be cooled.
  • the embodiment according to the FIGS. 3 and 4 differs from that of the embodiment according to FIG. 2 only in that the flat profiles are omitted.
  • the protective plates are arranged in a tube section with an enlarged cross-sectional area compared to the opening of the first connecting flange.
  • connection flanges it is particularly advantageous if standard nominal sizes are used for the connection flanges.
  • the following nominal diameters can be used for a protective device: Nominal diameter of first connection flange: 250 mm (DIN250ISO-K / F) Nominal size of second connection flange: 250 mm (DIN250ISO-K / F) Nominal size of third connection flange: 320 mm (DIN320ISO-K / F) Mudguards and pipes Version in stainless steel
  • the internals such as fenders, holder and shell are preferably made entirely of stainless steel.
  • the protection device 11 is used as follows: The protection device 11 is installed between the process plant and the high vacuum pump. During operation of the process plant and when high vacuum is reached in the plant, the mudguards are cooled before the actual processes run off. This can be done with water or other coolants, such as water, as required. Liquid nitrogen, done. Condensable molecules are deposited on the fenders or cladding as they pass through the protection device. After the process plant has been flooded, the blind flange 31 with the protective sheets arranged thereon can be removed and freed from the adhering molecules (eg by thermal (heating) or mechanical removal (eg sandblasting).) It is conceivable to provide a sliding valve between the protective device and the process plant. so that the fenders can be removed without having to flooded the process plant, and a sliding valve could be provided between the fender and the high vacuum pump.
  • CuInSe compounds are used for certain cell types, inter alia, for the production of so-called CIGS solar cells or CIS cells, in which case S may be sulfur or selenium, depending on the cell type.
  • S may be sulfur or selenium, depending on the cell type.
  • selenium compounds selenium metal vapors also form in the reaction chamber. These vapors are deposited on the stators and rotors of turbomolecular pumps as they are drawn by the pump. If the turbomolecular pump for a long time in contact with these metal vapors, imbalances can arise, which lead to the destruction of the turbomolecular pump. With the aid of the device according to the invention it is possible To effectively protect turbomolecular pumps from harmful, condensable metal vapors.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Claims (14)

  1. Dispositif pour la protection de pompes à vide poussé, en particulier de pompes turbomoléculaires, contre les vapeurs nocives, en particulier contre les vapeurs pouvant se condenser, en particulier les vapeurs de métal, avec un tronçon de tuyau (13) avec
    - une première bride de raccordement (15) qui présente une première ouverture (16) et
    - une seconde bride de raccordement (15) qui présente une seconde ouverture (18), lesquelles brides de raccordement (15, 17) sont reliées l'une à l'autre par une section de tuyau qui définit un passage (21),
    - une troisième bride de raccordement (20), qui présente une troisième ouverture (20), qui est prévue entre la première et la seconde bride de raccordement (15, 17) sur le passage (21) et
    - un arrangement d'une pluralité de tôles de déflection (23) placées espacées l'une de l'autre, qui peuvent être placées dans le passage (21) espacées de la troisième bride de raccordement (19) et qui peuvent être mises en place et enlevées à travers celui-ci,
    caractérisé par le fait que la section de tuyau qui forme un passage (21) présente une zone de section élargie (33) pour recevoir les tôles de déflection et que les tôles de déflection (23) sont placées sur les côtés opposés sur une enveloppe (37) qui correspond à la configuration du tuyau si bien que la paroi intérieure de la section de tuyau est protégée par l'enveloppe qui reproduit les parois intérieures de la section de tuyau.
  2. Dispositif selon la revendication 1, caractérisé en ce que les tôles de protection (23) ne remplissent qu'une partie de la zone de section élargie (33) et sont placées de préférence de telle sorte et de telle manière que le passage (21) entre la première et la seconde ouverture (16, 18) est bloqué visuellement.
  3. Dispositif selon l'une des revendications 1 à 2, caractérisé en ce que la section de tuyau qui se rattache à la première bride de raccordement (15) définit une première section de tuyau (49) et que la section de tuyau qui se rattache à la seconde bride de raccordement (17) définit une seconde section de tuyau (51) et que les premières et les secondes sections de tuyau (49, 51) sont placées dans un angle l'une par rapport à l'autre, la zone de section élargie (33) étant prévue entre les premières et les secondes sections de tuyau (49, 51).
  4. Dispositif selon l'une des revendications 1 à 3, caractérisé en ce que le tronçon de tuyau (13) est configuré comme un raccord en T, les premières et secondes brides de raccordement (15, 17) possédant de préférence une section nominale inférieure à celle de la troisième bride de raccordement (19).
  5. Dispositif selon la revendication 3 ou 4, caractérisé en ce que les tôles de protection (23) sont des profils coudés (61) avec un premier et un second montant (63, 65), lesquels profils coudés (61) sont placés dans l'espace entre les premières et les secondes sections de tuyau (49, 51) qui définissent une courbure et dont les premiers montants (63) sont orientés dans le sens de préférence axial de la première section de tuyau (49) et dont les seconds montants (65) sont orientés dans le sens de préférence axial de la seconde section de tuyau (51).
  6. Dispositif selon l'une des revendications 1 à 5, caractérisé en ce que les tôles de protection (23) sont placées sur un support qui est placé dans la zone de section élargie (33) de la section de tuyau.
  7. Dispositif selon l'une des revendications 1 à 6, caractérisé en ce que le support est formé par un tuyau (43) ou est en contact thermoconducteur avec un tuyau (43) dont les extrémités sont guidées de préférence à travers le tronçon de tuyau (13) ou une bride aveugle (31) qui peut être vissée sur la troisième bride de raccordement (19).
  8. Dispositif selon l'une des revendications 1 à 6, caractérisé en ce que les tôles de protection (23) sont placées à une courte distance de la paroi intérieure du tronçon de tuyau.
  9. Dispositif selon l'une des revendications 7 ou 8, caractérisé en ce que le tuyau est guidé en enroulements autour de l'enveloppe (37) et est en contact thermoconducteur avec celle-ci.
  10. Dispositif selon l'une des revendications 1 à 9, caractérisé en ce que le support est placé avec les tôles de déflection sur une bride (31) qui peut être vissée sur la troisième bride de raccord (19).
  11. Installation sous vide avec un dispositif de protection selon l'une des revendications 1 à 10 et avec une pompe à vide poussé qui est raccordée à la deuxième bride de raccordement (17).
  12. Installation sous vide selon la revendication 11, caractérisée en ce que la pompe à vide poussé est une pompe turbomoléculaire.
  13. Procédé pour protéger les pompes à vide poussé, en particulier les pompes turbomoléculaires contre les vapeurs nocives de métal, en particulier contre les vapeurs pouvant se condenser,
    caractérisé en ce
    que le flux de gaz est guidé devant l'entrée dans la pompe à vide poussé par un tronçon de tuyau (13) avec une zone de section élargie (33),zone de section élargie (33) dans laquelle des tôles de protection sont placées de telle manière qu'une zone marginale reste libre tout en assurant cependant un contact des molécules gazeuses lors du passage à travers le tronçon de tuyau avec les tôles de déflection (23) et que les tôles de protection sont de plus placées sur des côtés opposés sur une enveloppe (37) qui correspond à la configuration du tronçon de tuyau si bien que la paroi intérieure de la section de tuyau est protégée par l'enveloppe qui reproduit les parois intérieures de la section de tuyau et que les tôles de protection (23) sont refroidies.
  14. Procédé selon la revendication 14, caractérisé en ce que celui-ci est utilisé comme protection d'une pompe turbomoléculaire contre les vapeurs de métal, en particulier contre les molécules de sélénium.
EP20100161376 2009-04-28 2010-04-28 Système de sécurité pour pompe à vide poussé Not-in-force EP2246573B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH6682009 2009-04-28

Publications (3)

Publication Number Publication Date
EP2246573A2 EP2246573A2 (fr) 2010-11-03
EP2246573A3 EP2246573A3 (fr) 2011-12-07
EP2246573B1 true EP2246573B1 (fr) 2013-02-13

Family

ID=42154735

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20100161376 Not-in-force EP2246573B1 (fr) 2009-04-28 2010-04-28 Système de sécurité pour pompe à vide poussé

Country Status (1)

Country Link
EP (1) EP2246573B1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011100311A1 (de) * 2011-05-03 2012-11-08 Pfeiffer Vacuum Gmbh Vorrichtung mit einer Leitstruktur
CN104279140B (zh) 2013-07-12 2018-08-24 西港能源有限公司 低温泵法兰

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58106186A (ja) * 1981-12-18 1983-06-24 Hitachi Ltd トラツプ装置
US5537833A (en) * 1995-05-02 1996-07-23 Helix Technology Corporation Shielded cryogenic trap
EP1914423A2 (fr) * 1998-01-22 2008-04-23 Ebara Corporation Appareil de piège et système de piège
IT1302694B1 (it) * 1998-10-19 2000-09-29 Getters Spa Dispositivo di schermatura mobile in funzione della temperatura trapompa getter e pompa turbomolecolare collegate in linea.

Also Published As

Publication number Publication date
EP2246573A3 (fr) 2011-12-07
EP2246573A2 (fr) 2010-11-03

Similar Documents

Publication Publication Date Title
EP0752088B1 (fr) Tube echangeur de chaleur pour chaudiere de chauffage
EP2881692B1 (fr) Refroidisseur d'air froid de turbines à gaz, centrale de turbines à gaz ou de turbines à gaz et à vapeur ainsi que procédé de refroidissement d'air froid
DE3344768A1 (de) Vakuumdurchlaufofen
EP3018411A2 (fr) Procede et dispositif de protection de tubes d'echangeur de chaleur et composant ceramique
EP2246573B1 (fr) Système de sécurité pour pompe à vide poussé
EP0377089B1 (fr) Echangeur de chaleur, particulièrement pour refroidir du gaz de craquage
DE69931802T2 (de) Flammenrückschlagsicherung
DE202009006288U1 (de) Schutzvorrichtung für Hochvakuumpumpen, insbesondere Turbomolekularpumpen
DE3828902A1 (de) Waermeschutzschild
DE9200134U1 (de) Kühlgerät für Schaltschränke
EP1985956B1 (fr) Plaque tubulaire pour récupérateur de chaleur
DE102010031226B4 (de) Substratbehandlungsanlage mit einer Transporteinrichtung
DE102006044201B4 (de) Nachschaltwärmetauscher für einen Heizkessel
DE102006010872B4 (de) Beschichtungsanlage mit kühlbarer Blende
DE3153044C2 (de) Abschreckplatte f}r Verh}ttungs¦fen, insbesondere Hoch¦fen
DE2414295C2 (de) Wärmeaustauscher zur Kondensation von Dampf
EP1108944B1 (fr) Tête de congélation pour dispositifs de congélation de tuyaux
DE102004041853B4 (de) Ventil zur dampfdichten Entkoppelung zweier miteinaner verbundener Prozesseinheiten
DE102013111773A1 (de) Heizkessel
EP2648824B1 (fr) Piège réfrigérant doté d'un dispositif de passage géométriquement perméable et refroidi
EP0546315A1 (fr) Condenseur à vapeur
DE3237193A1 (de) Verfahren und vorrichtung zur waermebehandlung von rohren
DE102011083615B4 (de) Strahlungsschutz für Substratbehandlungsanlagen
DE202017107527U1 (de) Industrieofen
DE19521622A1 (de) Verfahren zum Kondensieren von Dämpfen, insbesondere Brüden, und Vorrichtung zur Durchführung des Verfahrens

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

AX Request for extension of the european patent

Extension state: AL BA ME RS

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

AX Request for extension of the european patent

Extension state: AL BA ME RS

RIC1 Information provided on ipc code assigned before grant

Ipc: F04D 27/02 20060101ALI20111028BHEP

Ipc: F04B 37/08 20060101ALI20111028BHEP

Ipc: F04D 29/42 20060101ALI20111028BHEP

Ipc: F04D 19/04 20060101AFI20111028BHEP

17P Request for examination filed

Effective date: 20120606

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

RIC1 Information provided on ipc code assigned before grant

Ipc: F04D 27/02 20060101ALI20120910BHEP

Ipc: F04B 37/08 20060101ALI20120910BHEP

Ipc: F04D 19/04 20060101AFI20120910BHEP

Ipc: F04D 29/42 20060101ALI20120910BHEP

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 596645

Country of ref document: AT

Kind code of ref document: T

Effective date: 20130215

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502010002292

Country of ref document: DE

Effective date: 20130411

REG Reference to a national code

Ref country code: CH

Ref legal event code: NV

Representative=s name: RIEDERER HASLER AND PARTNER PATENTANWAELTE AG, LI

REG Reference to a national code

Ref country code: NL

Ref legal event code: VDEP

Effective date: 20130213

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130613

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130513

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130513

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130524

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130613

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130514

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

BERE Be: lapsed

Owner name: HSR AG

Effective date: 20130430

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

26N No opposition filed

Effective date: 20131114

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130430

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502010002292

Country of ref document: DE

Effective date: 20131114

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130428

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130428

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20100428

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 7

REG Reference to a national code

Ref country code: AT

Ref legal event code: MM01

Ref document number: 596645

Country of ref document: AT

Kind code of ref document: T

Effective date: 20150428

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20150428

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 8

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 9

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20210420

Year of fee payment: 12

Ref country code: FR

Payment date: 20210423

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20210421

Year of fee payment: 12

Ref country code: CH

Payment date: 20210421

Year of fee payment: 12

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 502010002292

Country of ref document: DE

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20220428

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220430

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220428

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220430

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20221103

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220430