EP2233893A2 - Linearskala - Google Patents

Linearskala Download PDF

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Publication number
EP2233893A2
EP2233893A2 EP10157443A EP10157443A EP2233893A2 EP 2233893 A2 EP2233893 A2 EP 2233893A2 EP 10157443 A EP10157443 A EP 10157443A EP 10157443 A EP10157443 A EP 10157443A EP 2233893 A2 EP2233893 A2 EP 2233893A2
Authority
EP
European Patent Office
Prior art keywords
scale
linear scale
linear
graduations
graduation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10157443A
Other languages
English (en)
French (fr)
Other versions
EP2233893A3 (de
EP2233893B1 (de
Inventor
Masaki Tomiya
Hiroaki Kawada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Publication of EP2233893A2 publication Critical patent/EP2233893A2/de
Publication of EP2233893A3 publication Critical patent/EP2233893A3/de
Application granted granted Critical
Publication of EP2233893B1 publication Critical patent/EP2233893B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation

Definitions

  • the present invention relates to a linear scale that is used for displacement measurement.
  • Fig. 7 is a diagram that schematically illustrates an example of a manufacturing step of a linear scale according to the second embodiment of the invention.
  • Fig. 13 is a top view that schematically illustrates an example of the structure of a linear scale according to a sixth embodiment of the invention.
  • the graduations 121 are bonded to the upper surface of the scale table 11.
  • the graduations 121 constitute a stripe pattern that includes a plurality of graduation lines arranged with a predetermined pitch in the X direction.
  • the graduations 121 are amplitude grating that is used for detection by a detector that utilizes a tri-grating principle or phase grating that is used for detection by a detector that uses a diffraction optical system.
  • the through holes 131a, 131b, and 131c are formed through the scale table 11.
  • the through holes 131a, 131b, and 131c are formed relatively close to the other edge of the scale table 11 viewed in the Y direction.
  • the through holes 131a, 131b, and 131c are aligned in the X direction.
  • the through hole 131a is formed at the X-directional center of the scale table 11, that is, a halfway position in the X direction.
  • the through holes 131b and 131c are formed near respective edges of the scale table 11 viewed in the X direction.
  • the screws 132a, 132b, and 132c are fitted in threaded holes 31a, 31b, and 31c, which are formed in the base member 30, through the through holes 131a, 131b, and 131c, respectively.
  • Fig. 5 is a sectional view that schematically illustrates an example of the structure of the linear scale 10a according to the second embodiment of the invention, which is taken along the line V-V.
  • Fig. 6 is an arrow view that illustrates the linear scale 10a viewed from the arrow direction VI.
  • the same reference numerals are consistently used for the same components as those of the linear scale 10 according to the first embodiment of the invention so as to omit any redundant explanation.
  • the linear scale 10a according to the second embodiment of the invention is different from the linear scale 10 according to the first embodiment of the invention in that, as illustrated in Figs. 5 and 6 , graduations 121a of a graduation part 12a are formed on the upper surface of a substrate 122a thereof.
  • the linear scale 10a can be used for an optical-type reflective linear encoder like the first embodiment of the invention. Besides such application, the linear scale 10a may be used for a capacitance-type reflective linear encoder or an electromagnetic-induction reflective linear encoder.
  • the substrate 122a of the graduation part 12a is bonded to the upper surface of the scale table 11.
  • the substrate 122a is a printed circuit board (PCB) that is made of, for example, ferrous metal, glass epoxy, or the like.
  • the linear scale 10b according to the third embodiment of the invention has the slits 141, 142, 143, and 144 formed in the scale table 11, even in a case where the scale table 11 changes in form due to linear expansion, the slits 141, 142, 143, and 144 can absorb deformation due to the change in form of the scale table 11 and thereby prevent the deformation from affecting the graduation part 12. Having the slits 141, 142, 143, and 144, the linear scale 10b according to the third embodiment of the invention makes it possible to perform measurement with a higher degree of accuracy in comparison with the first and second embodiments of the invention.
  • the linear scale 10c according to the fourth embodiment of the invention has two straight slits 145 and 146 as a substitute for the two L-shaped slits 143 and 144 of the linear scale 10b according to the third embodiment of the invention.
  • the straight slits 145 and 146 extend in the X direction from the respective X-directional edges toward a region near a halfway point of a scale table 11c.
  • linear scale 10d according to the fifth embodiment of the invention, the same reference numerals are consistently used for the same components as those of the linear scales 10, 10a, 10b, and 10c according to the first, the second, the third, and the fourth embodiments of the invention so as to omit any redundant explanation.
  • the linear scale 10d according to the fifth embodiment of the invention offers an advantage in that the graduations 121d are less likely to be affected by aged deterioration in comparison with the graduations 121, 121a formed on the substrate 122, 122a, which is made of, for example, glass, iron, or the like (the first embodiment, the second embodiment). That is, the linear scale 10d according to the fifth embodiment of the invention makes it possible to perform measurement with a higher degree of accuracy in comparison with the first and
  • Fig. 13 is a top view that schematically illustrates an example of the structure of the linear scale 10e.
  • Fig. 14 is a sectional view taken along the line XIV-XIV of Fig. 13 .
  • the same reference numerals are consistently used for the same components as those of the linear scales 10, 10a, 10b, 10c, and 10d according to the first, the second, the third, the fourth, and the fifth embodiments of the invention so as to omit any redundant explanation.
  • an attachment part 13e includes through holes 131be and 131ce as a substitute for the through holes 131b and 131c of the first embodiment of the invention.
  • the diameter of the through hole 131be, 131ce is larger than that of the through hole 131b, 131c.
  • the attachment part 13e includes an elastic member 133b and a bush 134b inside the through hole 131be and further includes an elastic member 133c and a bush 134c inside the through hole 131ce.
  • Each of the elastic members 133b and 133c is made of resin that has a predetermined modulus of elasticity.
  • An example of the resin is silicon rubber.
  • Each of the elastic members 133b and 133c has the shape of a ring. The elastic members 133b and 133c are fitted in the through holes 131be and 131ce, respectively.
  • the bushes 134b and 134c are fitted in the elastic members 133b and 133c, respectively.
  • Each of the bushes 134b and 134c has an upper part 134A and a lower part 134B.
  • the upper part 134A has a first outside diameter.
  • the lower part 134B has a second outside diameter.
  • the first outside diameter of the upper part 134A is larger than the diameter of the through hole 131be, 131ce of the scale table 11.
  • the second outside diameter of the lower part 134B is substantially equal to the inner diameter of the elastic member 133b, 133c.
  • the screws 132b and 132c are fitted in the threaded holes 31b and 31c, which are formed in the base member 30, through the bushes 134b and 134c, respectively.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
EP10157443.2A 2009-03-24 2010-03-23 Linearskala Not-in-force EP2233893B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009071525A JP5162800B2 (ja) 2009-03-24 2009-03-24 リニアスケール

Publications (3)

Publication Number Publication Date
EP2233893A2 true EP2233893A2 (de) 2010-09-29
EP2233893A3 EP2233893A3 (de) 2014-12-24
EP2233893B1 EP2233893B1 (de) 2016-10-19

Family

ID=42421970

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10157443.2A Not-in-force EP2233893B1 (de) 2009-03-24 2010-03-23 Linearskala

Country Status (3)

Country Link
US (1) US7934324B2 (de)
EP (1) EP2233893B1 (de)
JP (1) JP5162800B2 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2902750A1 (de) * 2014-02-04 2015-08-05 Mitutoyo Corporation Linearkodierer
WO2016041919A1 (de) * 2014-09-15 2016-03-24 Deckel Maho Pfronten Gmbh Positionsmesseinrichtung zum einsatz an einer werkzeugmaschine
EP4560270A1 (de) 2023-11-23 2025-05-28 Etel S.A. Skalenträger für eine codiererskala und linearer codierer mit solch einem skalenträger

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009044917A1 (de) * 2009-09-23 2011-04-07 Dr. Johannes Heidenhain Gmbh Längenmesseinrichtung
US8739424B2 (en) * 2011-06-24 2014-06-03 Mitutoyo Corporation Structure for protecting scale graduations
JP2014224705A (ja) * 2013-05-15 2014-12-04 キヤノン株式会社 スケール保持装置、およびエンコーダ
JP6215660B2 (ja) * 2013-11-13 2017-10-18 株式会社ジェイテクト 研削盤
JP2016165785A (ja) * 2015-03-10 2016-09-15 株式会社ディスコ 可動装置および加工装置
JP6738661B2 (ja) * 2016-06-16 2020-08-12 株式会社ミツトヨ 産業機械
JP6895332B2 (ja) * 2017-07-05 2021-06-30 株式会社ミツトヨ リニアスケール

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007183254A (ja) 2005-12-06 2007-07-19 Mitsutoyo Corp 変位測定装置用スケール

Family Cites Families (14)

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DE3625795A1 (de) * 1986-07-30 1988-02-04 Heidenhain Gmbh Dr Johannes Laengenmesseinrichtung
CH679334A5 (de) * 1989-09-11 1992-01-31 Weber Hans R
DE4320728C2 (de) * 1993-06-23 2001-08-02 Heidenhain Gmbh Dr Johannes Lagemeßeinrichtung
DE19821558B4 (de) * 1997-08-08 2007-09-13 Dr. Johannes Heidenhain Gmbh Maßstab und Verfahren zur Herstellung eines Maßstabes sowie Positionsmeßeinrichtung
DE19854318A1 (de) * 1998-11-25 2000-05-31 Heidenhain Gmbh Dr Johannes Längenmeßeinrichtung
JP4024600B2 (ja) * 2002-06-25 2007-12-19 株式会社ミツトヨ 枠多点固定タイプのユニット型直線変位測定装置、及び、その固定方法
TWI310326B (en) * 2005-10-11 2009-06-01 Gsi Group Corp Optical metrological scale and laser-based manufacturing method therefor
US7707739B2 (en) * 2005-11-04 2010-05-04 Dr. Johannes Heidenhain Gmbh Method for attaching a scale to a carrier, a scale, and carrier having a scale
ES2535851T3 (es) * 2005-11-04 2015-05-18 Dr. Johannes Heidenhain Gmbh Procedimiento para la fijación de una escala de medición en un soporte, escala de medición adaptada así como soporte con esta escala de medición
CN101416031A (zh) * 2006-03-29 2009-04-22 约翰尼斯海登海恩博士股份有限公司 用于使刻度尺保持在载体上的方法以及具有载体和刻度尺的装置
JP2007314363A (ja) * 2006-05-24 2007-12-06 Nippon Steel Materials Co Ltd 低熱膨張セラミックス材料およびその製造方法
JP2009047514A (ja) * 2007-08-17 2009-03-05 Sony Corp 位置検出装置の取付構造
US7971487B2 (en) * 2008-05-02 2011-07-05 Carlen Controls, Inc. Linear position transducer with wireless read head
TW201003053A (en) * 2008-07-10 2010-01-16 Nikon Corp Deformation measuring apparatus, exposure apparatus, jig for deformation measuring apparatus, position measuring method and device manufacturing method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007183254A (ja) 2005-12-06 2007-07-19 Mitsutoyo Corp 変位測定装置用スケール

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2902750A1 (de) * 2014-02-04 2015-08-05 Mitutoyo Corporation Linearkodierer
CN104819731A (zh) * 2014-02-04 2015-08-05 株式会社三丰 线性编码器
US9506778B2 (en) 2014-02-04 2016-11-29 Mitutoyo Corporation Linear encoder
CN104819731B (zh) * 2014-02-04 2019-01-25 株式会社三丰 线性编码器
WO2016041919A1 (de) * 2014-09-15 2016-03-24 Deckel Maho Pfronten Gmbh Positionsmesseinrichtung zum einsatz an einer werkzeugmaschine
CN106715044A (zh) * 2014-09-15 2017-05-24 德克尔马霍普夫龙滕有限公司 用于机床的位置测量设备
US20170252885A1 (en) * 2014-09-15 2017-09-07 Deckel Maho Pfronten Gmbh Position measuring device for use on a machine tool
US10391601B2 (en) 2014-09-15 2019-08-27 Deckel Maho Pfronten Gmbh Position measuring device for use on a machine tool
EP4560270A1 (de) 2023-11-23 2025-05-28 Etel S.A. Skalenträger für eine codiererskala und linearer codierer mit solch einem skalenträger

Also Published As

Publication number Publication date
JP5162800B2 (ja) 2013-03-13
US20100242295A1 (en) 2010-09-30
EP2233893A3 (de) 2014-12-24
EP2233893B1 (de) 2016-10-19
JP2010223767A (ja) 2010-10-07
US7934324B2 (en) 2011-05-03

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