EP2228130B1 - Modular clean room - Google Patents

Description

The invention relates to an individually preparable, multi-component clean room, comprising at least one filter unit and at least one room unit, according to the preamble of patent claim 1.

A clean room is a space in which the concentration of airborne particles is kept as low as possible. Such spaces are needed especially in semiconductor manufacturing and are formed in semiconductor manufacturing companies predominantly as permanently installed and a large footprint having rooms.

However, there is an increasing desire to set up clean rooms at changing places of use or production. It is also u. a. For small and medium-sized enterprises under certain circumstances often useful to carry out individual production steps or temporary series of experiments in a clean room. Often associated with the establishment of a clean room financial effort does not allow this.

For this reason, from the prior art mobile clean rooms are known, which can be supplied in the form of a container to the respective site. In the US 6,394,523 B1 For example, such a structure will be described. The invention presented there relates to a system and method for operating a portable isolation system for on-site demonstration of semiconductor manufacturing or as a temporary clean room. A vehicle transports the containers including the semiconductor manufacturing workstation, the preparation area, and the entrance area from a first location to a second location. The already installed and equipped clean room, which is located on a truck container, can thus be set up in variable locations.

A similar trained mobile space is in the DE 10 2004 063 445 A1 described. This is a modular high-security laboratory based on standardized containers. The inner structure is made as a 2-shell system. The outer shell of the container can be entered through a corridor in the front area. This corridor area is virtually docked in the bus system to other containers. Within this standard container is a trained as a dense shell vacuum cabin, accessible through a lock. In this vacuum cabin there are safety vacuum cabinets whose work access is formed by several pairs of gauntlet gloves. The free container volume in the rear area is the transfer area for a building technology container docked at the side or at the top, which receives the necessary equipment (ventilation systems with HEPA filters, etc.).

The disadvantage of the two described mobile rooms, however, is that as a place of deployment or a relatively large storage space must be available to park the pre-assembled container there. Thus, installation sites arise, for example, in front of a production building or in a large warehouse. Furthermore, a construction within a building is therefore also difficult to imagine because the containers can not be transported through conventional doors. Also, the necessary transport of the clean room containers with trucks and the subsequent lifting process represent a further significant financial disadvantage in the described devices.

From the foregoing, it is therefore an object of the invention to provide an advanced clean room, which is suitable for a purpose to be built on variable locations even within a building. In addition, the possibility of a simple, possible tool-free installation and easier transport should be given.

The object of the invention is achieved by an individually producible, consisting of several components clean room, comprising at least one filter unit and at least one room unit, according to the preamble of the patent claim 1, wherein the dependent claims represent at least expedient refinements and developments.

According to the invention, the individually producible clean room is characterized in that both the filter unit and the room unit consists of individual foldable and / or pluggable and / or joinable individual modules and the individual modules are stored in trolleys, so as to be transported to the respective installation or site can.

As a filter unit of the part of the clean room is called, which is responsible for the filtering of the ambient air and supply the clean room with particle-free air. The room unit describes the part of the clean room in which the actual work to be done in the clean room takes place. Thus, for example, the space containing workstations for manufacturing and processing semiconductor elements may be described as a room unit, and the fan and filter systems for cleaning the air and supplying particle-free air to the individual workstations as a filter unit.

The dimensions, so the height, width and depth of the trolley and the individual modules are chosen such that a transport of the car is possible within a building. In addition, no additional aids such as lifting mechanisms or cranes must be used. The trolleys have a width that they can be easily transported by double doors. The height and length of the trolleys are also designed so that they can be pushed by one or at most two people.

The dimensions of the individual modules of the filter unit and the room unit are thus based on the Abmaßvorgabe the trolley and are coordinated so that the existing volume of the trolley can be optimally utilized and all individual modules can be transported in preferably only two trolleys.

In this case, a transport of all individual modules of the filter unit in a first trolley and all individual modules of the room unit in a second trolley advantage. Such a division serves for an overview, since it can be recognized at a glance by appropriate markings on the trolley, which is to be built unit of the clean room in each car. On the other hand, individual room units and filter units can be combined or exchanged with one another more easily by separate packaging. Thus, for example, a small room unit can be combined with a more powerful filter unit depending on the customer's wishes and spatial conditions.

The wheels located on the trolley are preferably designed to be retractable, so that slippage of the trolley in the emptied or built-up state can be prevented. Moreover, it is conceivable that the wheels are equipped with brake stops, preferably made of a rubber material, so that the wheels do not have to be designed to be forcibly retractable.

The individual modules of the filter unit are expediently fan-filter modules. These are complete modules, consisting of an outer housing, which z. B. made of aluminum, stainless steel, powder-coated steel or plastic, the filter medium (eg., HEPA filter) and the corresponding fan technology. Optionally, pre-filter systems, speed controllers and pressure monitoring can be integrated in the individual modules.
Consequently, the filter unit consists of several juxtaposed and stacked individual modules in the form of fan-filter modules, wherein the number of individual modules to be used depends on the size of the clean room to be built and the desired "degree of purity" of the air.

The individual modules of the filter unit are mounted on the trolley so that a lower fixed single module row is firmly installed on the trolley and a further individual module row is opened onto this fixed individual module row.

An electrical connection of the individual modules, is made in advance in the arrangement of the modules on or in the trolley, so that on the day of construction of the filter unit, this only needs to be connected to a power outlet.
When transporting the folded individual modules of the filter unit, they are arranged so that the filter surfaces of the individual modules facing each other. This ensures a protected transport of the filter surfaces. In addition, a tarpaulin can be placed over the trolley to further protect the individual modules of the filter unit.

The individual modules of the room unit are pre-assembled wall or ceiling elements, which in the assembled state result in the room unit.

The wall or ceiling elements are designed as surface elements framed with lightweight profiles. The dimensions of the wall or ceiling elements can be customized, and adapted to the desired dimensions of the built room unit. The lightweight profiles are suitably made of aluminum. The ceiling elements can for example be formed almost square and the wall elements may be rectangular, which is not intended to represent a restrictive constructive statement. However, a different geometric design of the wall and ceiling elements facilitates finding the individual elements in the trolley so that it can be seen at a glance, whether it is a wall or a ceiling element. This speeds up the construction of the room unit.

The individual modules of the room unit expediently have means for tool-free installation of the individual modules.

These may be, for example, interlocking hinges or click connections, groove connections or pin connections. This also simplifies and speeds up the construction of the room unit.

Furthermore, the individual modules of the room unit can be designed to be self-sealing. Ie. the edge regions of the individual modules are designed in such a way that, after connecting two individual modules, there is a tight connection edge. This can be done for example by special rubber coatings of the individual modules.

In a particularly preferred embodiment of the device according to the invention, the individual modules of the room unit functioning as ceiling elements are provided with illumination. Each individual ceiling element has, for example, LED lights, whereby a sufficient illumination of the clean room to be built is ensured.

In a further conceivable embodiment, the lighting means is designed as a fluorescent tube, which is preferably integrated flush in the ceiling element, so that no protruding parts are present on the ceiling element, and a stacked transport of the individual ceiling elements in a trolley without damaging the ceiling elements or the light source is possible ,
The ceiling elements also have means for electrical connection with the adjacent ceiling elements. This facilitates the construction process considerably. This means that not every single ceiling element needs to be connected to a main switch after the cleanroom has been set up. This is done automatically when mounting the ceiling elements, so that after the construction of the clean room only a connection point to the electrical lighting means must be made.

The means for electrical connection are preferably, as already mentioned in the lighting means, mounted flush on the ceiling element, so that a stacked transport of the ceiling elements is possible. The means for electrical connection include, among other things, a flexible connection cable, which serves for connection to an adjacent ceiling element.

A wall of the constructed clean room is completely formed by the filter unit. Accordingly, it is advantageous that the individual modules of the filter unit have means for connection to individual modules of the room unit. Preferably, these means are formed on the left, right and upper edge regions of the filter wall, so as to be able to connect to the first wall and ceiling elements to be attached.

For example, the means for connection to individual modules of the room unit are hinges, so that the wall elements can be pushed onto the pins attached to the sides of the filter wall. However, other connecting means are conceivable.

The wall elements are freestanding, so that no separate support structure or anchoring of the wall elements in the ground is necessary.

The ceiling elements of the room unit are preferably placed on the wall elements. For example, the wall elements are provided on their upwardly directed side with pins and the ceiling elements with corresponding recesses in the form of grooves or holes in order to achieve a fast connection between the two elements.

The bottom surface of the room unit is expediently completely covered for reasons of cleanroom technology. For this purpose, for example, tiles are suitable. The tiles are preferably pluggable and can be designed to be electrostatically dissipative.

On the opposite wall of the filter unit wall unit of the room unit is still a space opening formed, which serves as a discharge surface for the exhaust air, among other things. The area ratio of the space opening and the filter unit is chosen so that a sufficiently large air velocity is achieved in the space opening area, which prevents a particle entry from the environment into the clean room.

A closure of the room opening should not be made for the reasons just mentioned, however, the attachment of a flexible curtain is conceivable.

By this design and the formation of the space opening as a discharge surface for the exhaust air, the particles cleaned by the filter unit air is fed into the room unit, the air flows through the clean room horizontally as a low turbulence displacement flow.

The invention will be explained below with reference to an embodiment and with the aid of figures.

Fig. 1a

eine Darstellung eines Transportwagens für die Filtereinheit;

Fig. 1b

eine Darstellung eines Transportwagens für die Raumeinheit;

Fig. 1c

eine Darstellung eines Transportwagens für die Filtereinheit und die Raumeinheit in einer weitergebildeten Ausführungsform;

Fig. 2

den Aufbau der Filtereinheit;

Fig. 3

den Aufbau der Raumeinheit und

Fig. 4a; b

Darstellungen des vollständig aufgebauten Reinraums;

Fig. 5

eine Rückansicht der Filtereinheit;

Fig. 6

eine Detaildarstellung der Beleuchtungsvorrichtung;

Fig. 7

eine Detaildarstellung der elektrischen Verbindungsmittel;

Fig. 8

Darstellung der mit Montagegriffen ausgestatteten Deckenele- mente und

Fig. 9 a, b

Darstellungen eins beispielhaften Verbindungssystem der Wand- und Deckenelemente.

Hereby show:

Fig. 1a

a representation of a trolley for the filter unit;

Fig. 1b

a representation of a trolley for the room unit;

Fig. 1c

a representation of a trolley for the filter unit and the room unit in a further developed embodiment;

Fig. 2

the structure of the filter unit;

Fig. 3

the construction of the room unit and

Fig. 4a; b

Representations of the completely constructed clean room;

Fig. 5

a rear view of the filter unit;

Fig. 6

a detailed view of the lighting device;

Fig. 7

a detailed view of the electrical connection means;

Fig. 8

Presentation of the ceiling elements equipped with mounting handles and

Fig. 9a, b

Representations of an exemplary connection system of the wall and ceiling elements.

The in Fig. 1a illustrated dolly for the filter unit 1, is designed as a roller located on frame with arranged thereon individual modules of the filter unit 2. The individual modules 2 shown are in the folded state, wherein the filter surfaces of the individual modules 2 are preferably directed towards each other in order to prevent damage to the filter surfaces can.

The trolley for the room unit 3 as he, however, in Fig. 1b is shown rather is designed as a rolling box, which has on the top flaps for closing the box. In this box, protected from dust and other negative impact, the individual modules of the room unit are stored.

In Fig. 1c the trolleys for the filter unit 1 and the room unit 3 are shown in a further developed embodiment. The trolley for the filter unit 1 is shown as an open grid truck, which can be covered to protect against dust particles with a tarpaulin. Also, the trolley for the room unit 3 is designed as an open grid carriage, which provides an overview of the individual elements arranged the room unit. Thus it can be seen that both the ceiling elements 7, the wall elements 5, the floor tiles 9 and additionally required tools in a designated container 11 in a single trolley 3 place, this car is also covered with a tarpaulin.

Both the trolley for the filter unit 1 and the trolley for the room unit 3 are structurally designed so that they of at most two persons must be pushed and be rolled through any standard door.

The structure of the filter unit is exemplified in Fig. 2 shown. Accordingly, further individual modules 2 are unfolded step by step onto a lower fixed individual module row 4. For this purpose, the individual modules 2 of the "second row" with the individual modules 2 of the "fixed row" 4 are connected to each other, for example by means of hinges.

In Fig. 3 the further structure of the clean room is clarified, wherein the filter unit forms a complete wall of the clean room. The individual modules of the room unit located in a trolley 3 are individually connected to one another in the following. In order to obtain a connection with the already constructed filter unit, the side elements of the filter unit are connected to means for tool-free connection of individual modules of the filter unit with individual modules of the room unit. In the case shown, these are hinges 6, by means of which the wall elements 5 are hung on the individual modules of the filter unit 2. Step by step, the wall elements 5 are mounted together until the desired room size is reached.

The ceiling elements 7 are first placed in a simple manner on the wall elements 5. For this purpose, the wall elements 5 pins 8, on which the ceiling elements 7 are attached. The ceiling elements 7 are in turn provided with corresponding recesses which correspond with respect to their dimensions with those of the pins 8.

The individual ceiling elements 7 are connected to adjacent ceiling elements 7, for example by means of click technology.

The floor of the finished clean room is completely covered with tiles 9, in order to meet the cleanroom conditions and to compensate for any unevenness. The floor tiles are preferably formed electrostatically conductive.

At the filter unit ( Fig. 4a ) opposite wall surface of the room unit, a space opening 10 is formed, which serves inter alia as a discharge surface for the exhaust air. The area ratio of the space opening 10 and the filter unit is chosen so that a sufficiently high air velocity is achieved in the space opening area, so that a particle entry from the environment is prevented in the clean room. It is conceivable to install a flexible curtain in front of the room opening 10. However, the maintenance of the predetermined air speed must be ensured.

After the complete construction of the clean room, it can be equipped according to the ideas and purposes of the customer or user.

The stated construction of the individually created cleanroom shows that it can be quickly and easily dismantled and dismantled again. In addition, a transport of the individual units of the clean room within a building is possible. Therefore, the described clean room construction is especially suitable for lending clean rooms, as the clean rooms u. a. can be selected and compiled according to local conditions.

In Fig. 4a is further shown that the ceiling elements 7 may have different sizes. The ceiling elements 7, which border directly on the filter unit 2 or on the opposite side of the room compared to the remaining ceiling elements 7 designed narrower, so that the ceiling elements to be used 7 respect. The space to be produced can be selected. The offset mounting of ceiling elements 7 to the wall elements 5 allows a better alignment of the ceiling elements 7 to the wall elements 5 and ensures a higher stability of the construction in the built state.

In Fig. 5 the constructed filter unit 2 is shown in a rear view. On this clean room side is the one hand, the control element 12 for the filter unit, with which the outflow velocity of the air can be adjusted can, and attached to the other, a light switch 13 for controlling the clean room lighting.

The clean room lighting will be in Fig. 6 shown in more detail. In this embodiment, it is fluorescent tubes 14, which are flush mounted on the ceiling element 7. It can be seen that the fluorescent tube 14 does not exceed the height of the lightweight profile 15 of the ceiling element 7, so that the ceiling elements 7 can be stored in each trolley in stacked form.

The detailed representation of the Fig. 7 shows the means for electrical connection 16 of the individual ceiling elements 7 together. Among other things, a flexible cable 17 is provided, which is particularly well suited to such a desired connection. The means for electrical connection are also flush-mounted on the ceiling element 7, wherein flush means that the means for electrical connection 16 does not exceed the height of the lightweight profiles 15.

The outer ceiling members 7 may further as in Fig. 8 be provided with mounting handles 18, which guarantee a safe grip on the ceiling elements and thus safe and accident-free installation during assembly and dismantling. The mounting handles 18 may be made of aluminum, for example.

The detailed representations Fig. 9a and 9b show a possible connection system of two ceiling elements 7 together, with a better alignment of the ceiling elements is achieved in an alignment along the outer edge. In Fig. 9a is doing an open connection system and in Fig. 9b a closed connection system shown. The existing of two bolts 19 and a stabilization plate 20 connection system is pushed away in a groove on the outer edge of the ceiling elements 7 on the abutting edge of the two ceiling elements 7 and fixed with a screw.

LIST OF REFERENCE NUMBERS

1

Transport trolley - filter unit

2

Single module filter unit

3

Dolly - room unit

4

fixed single module row

5

wall element

6

hinge

7

ceiling element

8th

pin connection

9

tiling

10

space opening

11

container

12

Control element for filter unit

13

light switch

14

Fluorescent tube

15

lightweight profile

16

Means for electrically connecting the ceiling elements

17

flexible cable

18

mounting handle

19

bolt

20

Stabilization plate

Claims (11)

1. An individually producible clean room comprising plural components, including at least one filter unit and at least one space unit,
   wherein the filter unit and also the space unit include particular foldable and/or pluggable and/or joinable particular modules and the particular modules are stored in transport trailers (1; 3) and are transportable to a respective setup or use location,
   wherein the particular modules of the filter unit (2) are fan-filter-modules and the particular modules of the filter unit (2) are attached to the transport trailer so that a lower fixated particular module row (4) is permanently attached to the transport trailer and an additional particular module row is folded onto the fixated particular module row.
2. The clean room according to claim 1, wherein the particular modules of the space unit are preassembled wall- or ceiling elements (5; 7), wherein the wall- or ceiling-elements (5; 7) are surface elements that are framed with light weight profiles (15).
3. The clean room according to claim 1 or 2, wherein the particular modules of the space unit (5; 7) are provided with devices to mount the particular modules without tools, wherein the devices to mount the particular modules without tools are hinges, snap-locking connections, groove connections or pins.
4. The clean room according to one of the claims 1 through 3, wherein the particular modules of the space unit (5, 7) are mountable so that they are self-sealing.
5. The clean room according to one of the preceding claims, wherein the particular modules of the filter unit (2) have hinges for connecting with particular modules of the space unit (5; 7).
6. The clean room according to one of the claims 2 through 5, wherein the ceiling elements (7) are placed onto the wall elements (5).
7. The clean room according to one of the preceding claims, wherein a space opening (10) is configured at a wall surface of the space unit that is opposite from the filter unit.
8. The clean room according to claim 7, wherein the space opening (10) is used as a flow out surface for exhaust air.
9. The clean room according to claim 7 or 8, wherein the surface ratio of the space opening (10) and the filter unit is selected so that a sufficiently large airflow velocity is obtained in the space opening portion, wherein the space opening portion prevents a particle introduction from an ambient into the clean room.
10. The clean room according to one of the preceding claims, wherein air that is cleaned from particles through the filter unit is introduced into the space unit and the air flows through the clean room in a horizontal manner with low turbulence.
11. The clean room according to one of the claims 2 through 10, wherein two ceiling elements (7) are connected with one another through a connection system which includes two bolts (19) and a stabilization plate (20), wherein the connection system is moved in a groove arranged at an outside of the ceiling element (7) and fixated with a bolt.

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