EP2154583A1 - Hairspring for sprung balance - Google Patents

Hairspring for sprung balance Download PDF

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Publication number
EP2154583A1
EP2154583A1 EP09405126A EP09405126A EP2154583A1 EP 2154583 A1 EP2154583 A1 EP 2154583A1 EP 09405126 A EP09405126 A EP 09405126A EP 09405126 A EP09405126 A EP 09405126A EP 2154583 A1 EP2154583 A1 EP 2154583A1
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EP
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Prior art keywords
blades
spiral
hairspring
spiral according
variable
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Granted
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EP09405126A
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German (de)
French (fr)
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EP2154583B1 (en
Inventor
Jérôme Daout
Richard Bossart
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Rolex SA
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Rolex SA
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Priority to EP12180170.8A priority Critical patent/EP2523053B1/en
Priority to EP09405126.5A priority patent/EP2154583B1/en
Publication of EP2154583A1 publication Critical patent/EP2154583A1/en
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    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00—Mechanisms for stabilising frequency
    • G04B17/04—Oscillators acting by spring tension
    • G04B17/06—Oscillators with hairsprings, e.g. balance
    • G04B17/066—Manufacture of the spiral spring
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00—Mechanisms for stabilising frequency
    • G04B17/20—Compensation of mechanisms for stabilising frequency

Definitions

  • the present invention relates to a spiral for balance spring-spiral resonator.
  • the object of the present invention is to benefit from the advantages of this solution by overcoming, at least in part, the aforementioned drawbacks.
  • this invention relates to a spiral for balance spring resonator according to claim 1.
  • the first embodiment of the spiral object of the invention is illustrated by the figure 1 .
  • This planar spiral has two blades 1a, 1b wound in the same direction, but with an offset of 2 ⁇ / 2 is 180 °.
  • the respective inner ends of these blades 1a, 1b are integral with a ferrule 2 and their outer ends are integral with a fixing ring 3. These outer ends are also angularly offset by 180 °.
  • the fixing ring 3 of the outer ends of the blades 1a, 1b of the spiral has an opening 3a to allow its attachment to the balance bridge. This fixing ring 3 replaces the traditional piton.
  • the two blades 1a, 1b of the spiral must not touch during their contraction and expansion. This risk increases with amplitude. This risk can be reduced by limiting the amplitude.
  • thermo-compensation of the spiral is obtained by forming, on the surface of the blades of the spiral, of an amorphous silicon oxide layer whose thermal coefficient of the Young's modulus is of opposite sign to that of the mono-crystalline silicon, as described in FIG. EP 1 422 436 .
  • This amorphous silicon oxide layer makes it possible to compensate the thermal coefficient of the Young's modulus irrespective of the crystallographic orientation of Si, (100), (111) or (110).
  • the number of blades forming the spiral is not limited to two. It is possible to imagine various other solutions, such as that illustrated by the figure 5 which is a variant of that of the figure 1 , but which comprises three blades 1a, 1b and 1c attached on the one hand to the shell 2 and on the other hand to the fixing ring 3.
  • the inner and outer ends of these blades are angularly offset, with respect to others, from a 2 ⁇ / 3 angle. This angular offset will advantageously be 2 ⁇ / n, n corresponding to the number of blades.
  • the blades forming the hairspring are attached to each other by their respective two ends.
  • the form of execution illustrated by the figure 6 represents a spiral with two blades 1a, 1b attached by their only inner ends to the shell 2. Their outer ends are free, which allows to exert on both blades, a pre-tension in one direction or the other, in order to adjust the isochronism in particular.
  • one can have a hairspring comprising four blades, two blades 1a, 1b disposed between the shell 2 and an intermediate ring 4 to which their outer ends are fixed and two blades 1c, 1d arranged between the intermediate ring and the fixing ring 3.
  • the intermediate ring 4 As light as possible, its structure can be hollowed out to reduce its mass as much as possible.
  • the inner blades 1a, 1b and the outer blades 1c, 1d can all be wound in the same direction as illustrated by the figure 7 , or the inner blades 1a, 1b can be wound in the opposite direction of the outer blades 1c, 1d, as illustrated by the figure 8 .
  • a process entirely suitable for the manufacture of the spiral forming the subject of the invention is in particular that described in EP 1 422 436 already mentioned, which consists in cutting the hairspring, for example by plasma etching, in a wafer ⁇ 001 ⁇ monocrystalline silicon.
  • the thermo-compensation of the spiral is then obtained by forming an amorphous silicon oxide layer on the surface of the blades of the spiral, for example by heat treatment.
  • UV-LIGA Lithography, Galvanization and Abnormal
  • the two blades 1a, 1b are produced on an SOI wafer (Silicon-On-Insulator, Figures 10a, 10b ), which consists of a stack of layers of Si-SiO 2 -Si.
  • a blade 1a is etched from the outer face of one of the Si layers and the other blade 1b is etched from the outer face of the second Si layer.
  • the inner ends of the two blades are made integral by the intermediate layer 8 of SiO 2 .
  • the advantage of this embodiment is to reduce the diameter of the spiral, because it increases the distance between two adjacent turns. This advantage is even more pronounced if we extend the spiral vertically as in figure 10 .
  • the figure 11 illustrates another variant of figures 10a , 10b , wherein the inner ends of the blades 1a, 1b are integral with the same shell, while their outer ends are integral with the intermediate layer 5 of SiO 2 .

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Springs (AREA)
  • Micromachines (AREA)

Abstract

The hairspring has two plates (1a, 1b) that are integrated with respect to each other by their respective ends and coplanar, where the hairspring is made of single-crystal silicon or quartz. The plates are wound into spirals with an angular offset neutralizing lateral forces exerted on a central axle when one of the ends of each plate is angularly displaced around the central axle with respect to the other end of each plate. Thickness and height of the plates are variable, and the single-crystal silicon is covered with an amorphous silicon dioxide layer.

Description

La présente invention se rapporte à un spiral pour résonateur balancier-spiral.The present invention relates to a spiral for balance spring-spiral resonator.

On sait que le centre de gravité d'un spiral plat se déplace pendant le mouvement oscillant du balancier. Ceci est dû au fait que l'une des extrémités du spiral est fixe, tandis que l'autre se déplace en restant toujours à la même distance de l'axe de balancier. Ce déplacement du centre de gravité à une influence sur l'isochronisme, du fait qu'il engendre des forces latérales sur les pivots de l'axe de balancier.We know that the center of gravity of a flat spiral moves during the oscillating movement of the pendulum. This is due to the fact that one end of the hairspring is fixed, while the other moves while remaining always at the same distance from the balance shaft. This displacement of the center of gravity has an influence on the isochronism, because it generates lateral forces on the pivots of the axis of balance.

Abraham-Louis Breguet eu l'idée de munir le spiral plat d'une ou deux courbes terminales permettant de remédier à ce défaut. Cette courbe a été ensuite théorisée par Ed. Phillips.Abraham-Louis Breguet had the idea to provide the flat spiral of one or two terminal curves to remedy this defect. This curve was then theorized by Ed. Phillips.

Avant la solution imaginée par Breguet et Phillips, T. Mudge avait proposé d'utiliser deux spiraux solidaires d'un même balancier et décalés de 180°. Les spiraux travaillant en synchronisme, mais en opposition de phase, les variations de leurs centres de gravité respectifs se compensent, mais leur décalage axial crée cependant un léger couple dans un plan contenant l'axe de balancier. Cette solution a été reprise dans des réalisations récentes.Before the solution devised by Breguet and Phillips, T. Mudge had proposed using two spirals integral with the same pendulum and offset by 180 °. The spirals working in synchronism, but in opposition of phase, the variations of their respective centers of gravity compensate each other, but their axial offset creates however a slight torque in a plane containing the balance axis. This solution has been taken up in recent achievements.

Le problème de cette solution réside dans le fait qu'il faut deux spiraux superposés, augmentant la hauteur, deux pitons et deux porte-pitons décalés de 180° autour de l'axe de balancier, deux raquettes et que chaque spiral doit être réglé en parfait synchronisme avec l'autre, conduisant à une solution extrêmement complexe et difficile à mettre au point. En plus du fait qu'elle double le nombre de pièces.The problem of this solution lies in the fact that it takes two superimposed spirals, increasing the height, two studs and two door-posts offset by 180 ° around the axis of balance, two rackets and that each spiral must be adjusted in perfect synchronism with the other, leading to a solution that is extremely complex and difficult to develop. In addition to the fact that it doubles the number of pieces.

Cette solution a été reprise dans plusieurs publications, notamment dans le US 3'553'956, dans le FR 2'447'571, ainsi que dans le CN 1'677'283.This solution has been used in several publications, in particular in US 3'553'956, FR 2'447'571, as well as in CN 1'677'283.

Le but de la présente invention est de bénéficier des avantages de cette solution en remédiant, au moins en partie, aux inconvénients sus-mentionnés.The object of the present invention is to benefit from the advantages of this solution by overcoming, at least in part, the aforementioned drawbacks.

A cet effet, cette invention a pour objet un spiral pour résonateur balancier-spiral selon la revendication 1.For this purpose, this invention relates to a spiral for balance spring resonator according to claim 1.

Les dessins annexés illustrent, schématiquement et à titre d'exemple, plusieurs formes d'exécution du spiral objet de la présente invention.

  • La figure 1 est une vue en plan d'une première forme d'exécution;
  • la figure 2 est une vue en plan d'une deuxième forme d'exécution;
  • la figure 3 est un diagramme de variation du pas du spiral en fonction des tours depuis le centre vers l'extérieur pour la forme d'exécution de la figure 2;
  • la figure 4 est un diagramme de variation de l'épaisseur le long de la lame en fonction des tours depuis le centre vers l'extérieur pour la forme d'exécution de la figure 2;
  • la figure 5 est une vue en plan d'une troisième forme d'exécution;
  • la figure 6 est une vue en plan d'une quatrième forme d'exécution;
  • la figure 7 est une vue en plan d'une cinquième forme d'exécution;
  • la figure 8 est une vue en plan d'une sixième forme d'exécution;
  • la figure 9 est une vue en élévation d'une septième forme d'exécution;
  • les figures 10a, 10b sont des vues en élévation de deux variantes d'une huitième forme d'exécution;
  • la figure 11 est une vue en élévation d'une neuvième forme d'exécution.
The accompanying drawings illustrate, schematically and by way of example, several embodiments of the spiral object of the present invention.
  • The figure 1 is a plan view of a first embodiment;
  • the figure 2 is a plan view of a second embodiment;
  • the figure 3 is a diagram of the variation of the pitch of the spiral as a function of the turns from the center towards the outside for the form of execution of the figure 2 ;
  • the figure 4 is a diagram of variation of the thickness along the blade as a function of the turns from the center to the outside for the embodiment of the figure 2 ;
  • the figure 5 is a plan view of a third embodiment;
  • the figure 6 is a plan view of a fourth embodiment;
  • the figure 7 is a plan view of a fifth embodiment;
  • the figure 8 is a plan view of a sixth embodiment;
  • the figure 9 is an elevational view of a seventh embodiment;
  • the figures 10a , 10b are elevational views of two variants of an eighth embodiment;
  • the figure 11 is an elevational view of a ninth embodiment.

La première forme d'exécution du spiral objet de l'invention est illustrée par la figure 1. Ce spiral plan comporte deux lames 1a, 1b enroulées dans le même sens, mais avec un décalage de 2π /2 soit 180°. Les extrémités internes respectives de ces lames 1a, 1b sont solidaires d'une virole 2 et leurs extrémités externes sont solidaires d'un anneau de fixation 3. Ces extrémités externes sont aussi décalées angulairement de 180°. L'anneau de fixation 3 des extrémités externes des lames 1a, 1b du spiral comporte une ouverture 3a pour permettre sa fixation au pont de balancier. Cet anneau de fixation 3 remplace donc le piton traditionnel.The first embodiment of the spiral object of the invention is illustrated by the figure 1 . This planar spiral has two blades 1a, 1b wound in the same direction, but with an offset of 2π / 2 is 180 °. The respective inner ends of these blades 1a, 1b are integral with a ferrule 2 and their outer ends are integral with a fixing ring 3. These outer ends are also angularly offset by 180 °. The fixing ring 3 of the outer ends of the blades 1a, 1b of the spiral has an opening 3a to allow its attachment to the balance bridge. This fixing ring 3 replaces the traditional piton.

Les deux lames 1a, 1b du spiral ne doivent pas se toucher pendant leur contraction et leur expansion. Ce risque augmente avec l'amplitude. On peut donc réduire ce risque en limitant l'amplitude. Avantageusement cependant, on peut aussi augmenter le diamètre du spiral.The two blades 1a, 1b of the spiral must not touch during their contraction and expansion. This risk increases with amplitude. This risk can be reduced by limiting the amplitude. Advantageously, however, it is also possible to increase the diameter of the spiral.

Une autre solution encore est celle qui consiste à faire varier le pas des spires et l'épaisseur des lames. C'est ce que montre la forme d'exécution de la figure 2, ainsi que les diagrammes des figures 3 et 4 qui illustrent respectivement la variation du pas des spires en micromètres et de l'épaisseur des lames en micromètres en fonction du nombre de tours des spires Nt des lames 1a, 1b enroulées de la figure 2, en partant du centre vers l'extérieur du spiral, pour éviter que les spires des lames 1a, 1b ne se touchent lors de l'alternance d'expansion et de contraction du spiral. La figure 3 permet de tracer l'une des deux lames 1a, 1b par la formule r(θ)=p(θ)*(θ/(2π))+r0, où r représente la distance de l'axe à la fibre neutre de la lame, r(θ=0)=r0=600 micromètres dans le cas des figures 2 à 4, et θ=Nt*2π.Another solution is that which consists of varying the pitch of the turns and the thickness of the blades. This is shown by the form of execution of the figure 2 , as well as diagrams of Figures 3 and 4 which respectively illustrate the variation of the pitch of the turns in micrometers and the thickness of the blades in micrometers as a function of the number of turns of the turns Nt of the blades 1a, 1b wound of the figure 2 , from the center to the outside of the hairspring, to prevent the turns of the blades 1a, 1b from touching during the alternation of expansion and contraction of the hairspring. The figure 3 allows to draw one of the two blades 1a, 1b by the formula r (θ) = p (θ) * (θ / (2π)) + r0, where r represents the distance from the axis to the neutral fiber of the blade, r (θ = 0) = r0 = 600 micrometers in the case of Figures 2 to 4 and θ = Nt * 2π.

En variante on pourrait aussi faire varier la hauteur de la lame du spiral.Alternatively one could also vary the height of the spiral blade.

Dans le cas de spiraux en silicium mono-cristallin, matériau susceptible d'être utilisé pour la réalisation du spiral objet de l'invention, la thermo-compensation du spiral est obtenue par la formation, à la surface des lames du spiral, d'une couche d'oxyde de silicium amorphe, dont le coefficient thermique du module d'Young est de signe opposé à celui du silicium mono-cristallin, comme décrit dans le EP 1 422 436 . Cette couche d'oxyde de silicium amorphe permet une compensation du coefficient thermique du module d'Young quelle que soit l'orientation cristallographique du Si, (100), (111) ou (110).In the case of monocrystalline silicon spirals, a material that can be used for producing the spiral object of the invention, the thermo-compensation of the spiral is obtained by forming, on the surface of the blades of the spiral, of an amorphous silicon oxide layer whose thermal coefficient of the Young's modulus is of opposite sign to that of the mono-crystalline silicon, as described in FIG. EP 1 422 436 . This amorphous silicon oxide layer makes it possible to compensate the thermal coefficient of the Young's modulus irrespective of the crystallographic orientation of Si, (100), (111) or (110).

Le nombre de lames formant le spiral n'est pas limité à deux. On peut imaginer en variante diverses autres solutions, telle que celle illustrée par la figure 5 qui est une variante de celle de la figure 1, mais qui comporte trois lames 1a, 1b et 1c rattachées d'une part à la virole 2 et d'autre part à l'anneau de fixation 3. Les extrémités internes et externes de ces lames sont décalées angulairement, les unes par rapport aux autres, d'un angle 2π /3. Ce décalage angulaire sera avantageusement de 2π/n, n correspondant au nombre de lames.The number of blades forming the spiral is not limited to two. It is possible to imagine various other solutions, such as that illustrated by the figure 5 which is a variant of that of the figure 1 , but which comprises three blades 1a, 1b and 1c attached on the one hand to the shell 2 and on the other hand to the fixing ring 3. The inner and outer ends of these blades are angularly offset, with respect to others, from a 2π / 3 angle. This angular offset will advantageously be 2π / n, n corresponding to the number of blades.

Des simulations effectuées sur la base des spiraux des figures 1 et 2 ont montré qu'il devrait être possible d'améliorer de façon très sensible l'isochronisme d'un résonateur balancier-spiral équipé d'un spiral objet de la présente invention.Simulations carried out on the basis of the spirals of Figures 1 and 2 have shown that it should be possible to improve very significantly the isochronism of a balance-spring resonator equipped with a spiral object of the present invention.

Dans les formes d'exécutions décrites jusqu'ici, les lames formant le spiral sont rattachées les unes aux autres par leurs deux extrémités respectives. La forme d'exécution illustrée par la figure 6 représente un spiral à deux lames 1a, 1b rattachées par leurs seules extrémités internes à la virole 2. Leurs extrémités externes sont libres, ce qui permet d'exercer, sur les deux lames, une pré-tension dans un sens ou dans l'autre, afin d'ajuster l'isochronisme notamment.In the embodiments described so far, the blades forming the hairspring are attached to each other by their respective two ends. The form of execution illustrated by the figure 6 represents a spiral with two blades 1a, 1b attached by their only inner ends to the shell 2. Their outer ends are free, which allows to exert on both blades, a pre-tension in one direction or the other, in order to adjust the isochronism in particular.

D'autres variantes utilisant le même concept, à savoir un spiral à plusieurs lames coplanaires décalées angulairement et rattachées par au moins une de leurs extrémités homologues respectives sont envisageables.Other variants using the same concept, namely a spiral with several coplanar blades angularly offset and attached by at least one of their respective homologous ends are conceivable.

C'est ainsi que l'on peut avoir un spiral comportant quatre lames, deux lames 1a, 1b disposées entre la virole 2 et un anneau intermédiaire 4 auquel leurs extrémités externes sont fixées et deux lames 1c, 1d disposées entre l'anneau intermédiaire et l'anneau de fixation 3. Pour rendre l'anneau intermédiaire 4 le plus léger possible, sa structure peut être évidée pour en réduire le plus possible sa masse.Thus one can have a hairspring comprising four blades, two blades 1a, 1b disposed between the shell 2 and an intermediate ring 4 to which their outer ends are fixed and two blades 1c, 1d arranged between the intermediate ring and the fixing ring 3. To make the intermediate ring 4 as light as possible, its structure can be hollowed out to reduce its mass as much as possible.

Les lames internes 1a, 1b et les lames externes 1c, 1d peuvent être toutes enroulées dans le même sens comme illustré par la figure 7, ou les lames internes 1a, 1b peuvent être enroulées en sens contraire des lames externes 1c, 1d, comme illustré par la figure 8.The inner blades 1a, 1b and the outer blades 1c, 1d can all be wound in the same direction as illustrated by the figure 7 , or the inner blades 1a, 1b can be wound in the opposite direction of the outer blades 1c, 1d, as illustrated by the figure 8 .

Il est évident que d'innombrables autres combinaisons peuvent être envisagées.It is obvious that countless other combinations can be envisaged.

Il est aussi évident que la conception nouvelle du spiral objet de l'invention ne se prête pas à la fabrication selon les procédés traditionnels des spiraux de type Nivarox/Parachrom.It is also obvious that the new design of the spiral object of the invention does not lend itself to the manufacture according to traditional methods spiral Nivarox type / Parachrom.

Dans le cas présent, un procédé tout à fait adapté à la fabrication du spiral objet de l'invention est notamment celui décrit dans le EP 1 422 436 déjà mentionné, qui consiste à découper le spiral, par exemple par gravure plasma, dans une plaquette {001} de silicium monocristallin. La thermo-compensation du spiral est alors obtenue par la formation d'une couche d'oxyde de silicium amorphe à la surface des lames du spiral, par un traitement thermique par exemple.In the present case, a process entirely suitable for the manufacture of the spiral forming the subject of the invention is in particular that described in EP 1 422 436 already mentioned, which consists in cutting the hairspring, for example by plasma etching, in a wafer {001} monocrystalline silicon. The thermo-compensation of the spiral is then obtained by forming an amorphous silicon oxide layer on the surface of the blades of the spiral, for example by heat treatment.

On pourrait aussi utiliser un monocristal de quartz usiné de la même manière ou par usinage chimique. D'autres matériaux appropriés, adaptés aux modes de fabrication permettant la réalisation d'un spiral dans un plan sont susceptibles d'être utilisés.One could also use a single crystal quartz machined in the same way or by chemical machining. Other suitable materials adapted to the manufacturing methods for producing a spiral in a plane are likely to be used.

L'utilisation de procédés photo-lithographiques tel que le UV-LIGA (Lithographie, Galvanisierung und Abformung) pourrait aussi permettre de réaliser le type de spiral objet de la présente invention en alliage métallique.The use of photolithographic processes such as UV-LIGA (Lithography, Galvanization and Abnormal) could also make it possible to produce the type of spiral object of the present invention in metal alloy.

Le procédé de fabrication ne fait pas partie de la présente invention. Les exemples de procédés, non limitatifs, énumérés ci-dessus à titre d'exemple, sont seulement destinés à montrer que les moyens techniques pour réaliser le nouveau type de spiral objet de l'invention existent déjà et que l'homme de l'art possède un éventail de possibilités pour réaliser ce spiral.The manufacturing process is not part of the present invention. The examples of non-limiting methods, listed above by way of example, are intended only to show that the technical means for producing the new type of spiral that is the subject of the invention already exist and that those skilled in the art has a range of possibilities to make this hairspring.

Lorsque l'on parle de spiral plat, il s'agit du spiral tel qu'il est obtenu. Cependant rien n'empêche, notamment dans la forme d'exécution de la figure 9, de situer les points d'encastrement 5 et 6 des extrémités externes des lames 1a, 1b hors du plan du spiral. C'est ainsi que l'on peut situer ces deux points d'encastrement respectivement de part et d'autre du plan du spiral, en sorte que les deux lames 1a, 1b formeront deux cônes symétriques de part et d'autre du plan du spiral. Cette solution présente l'avantage d'empêcher que les spires des deux lames ne se touchent. Cette solution permet de réaliser des spiraux de petit diamètre avec un grand nombre de tours. Elle constitue donc un autre moyen pour éviter le contact entre les lames du spiral lors de l'alternance d'expansions et de contractions.When we speak of flat spiral, it is the spiral as it is obtained. However nothing prevents, especially in the form of execution of the figure 9 , to locate the embedding points 5 and 6 of the outer ends of the blades 1a, 1b out of the plane of the spiral. Thus it is possible to locate these two embedding points respectively on either side of the plane of the spiral, so that the two blades 1a, 1b form two symmetrical cones on either side of the plane of the spiral. This solution has the advantage of preventing the turns of the two blades from touching each other. This solution makes it possible to produce small diameter spirals with a large number of turns. It is therefore another way to avoid contact between the spiral blades during the alternation of expansions and contractions.

Selon une autre variante de l'invention les deux lames 1a, 1b sont réalisées sur un wafer SOI (Silicon-On-Insulator, figures 10a, 10b), qui consiste en un empilement de couches de Si-SiO2-Si. Une lame 1a est gravée depuis la face externe d'une des couches de Si et l'autre lame 1b est gravée depuis la face externe de la deuxième couche de Si. Dans ce cas, les extrémités internes des deux lames sont rendues solidaires par la couche intermédiaire 8 de SiO2. L'avantage de cette forme d'exécution est de réduire le diamètre du spiral, car on augmente la distance entre deux spires voisines. Cet avantage est encore plus prononcé si on étend le spiral verticalement comme à la figure 10.According to another variant of the invention, the two blades 1a, 1b are produced on an SOI wafer (Silicon-On-Insulator, Figures 10a, 10b ), which consists of a stack of layers of Si-SiO 2 -Si. A blade 1a is etched from the outer face of one of the Si layers and the other blade 1b is etched from the outer face of the second Si layer. In this case, the inner ends of the two blades are made integral by the intermediate layer 8 of SiO 2 . The advantage of this embodiment is to reduce the diameter of the spiral, because it increases the distance between two adjacent turns. This advantage is even more pronounced if we extend the spiral vertically as in figure 10 .

La figure 11 illustre une autre variante des figures 10a, 10b, dans laquelle les extrémités internes des lames 1a, 1b sont solidaires d'une même virole, alors que leurs extrémités externes sont solidaires de la couche intermédiaire 5 de SiO2.The figure 11 illustrates another variant of figures 10a , 10b , wherein the inner ends of the blades 1a, 1b are integral with the same shell, while their outer ends are integral with the intermediate layer 5 of SiO 2 .

Claims (9)

Spiral pour résonateur balancier-spiral, caractérisé en ce qu'il comporte n lames, n≥ 2, solidaires par au moins une de leurs extrémités homologues respectives et enroulées en spirales avec un décalage angulaire apte à neutraliser les forces latérales susceptibles d'être exercées sur son axe central lorsqu'une des extrémités de chaque lame est déplacée angulairement autour dudit axe central par rapport à son autre extrémité.Spiral for balance-spring resonator, characterized in that it comprises n blades, n≥ 2, secured by at least one of their respective homologous ends and wound in spirals with an angular offset able to neutralize the lateral forces that can be exerted on its central axis when one end of each blade is angularly displaced about said central axis relative to its other end. Spiral selon la revendication 1, dans lequel les lames sont coplanaires.Spiral according to claim 1, wherein the blades are coplanar. Spiral selon l'une des revendications précédentes, dans lequel les lames sont solidaires l'une de l'autre par leurs deux extrémités respectives.Spiral according to one of the preceding claims, wherein the blades are secured to one another by their respective two ends. Spiral selon l'une des revendications précédentes, dans lequel le pas des lames est variable.Spiral according to one of the preceding claims, wherein the pitch of the blades is variable. Spiral selon l'une des revendications précédentes, dans lequel l'épaisseur des lames est variable.Spiral according to one of the preceding claims, wherein the thickness of the blades is variable. Spiral selon l'une des revendications précédentes, dans lequel la hauteur des lames est variable.Spiral according to one of the preceding claims, wherein the height of the blades is variable. Spiral selon l'une des revendications précédentes, formé en silicium mono-cristallin.Spiral according to one of the preceding claims, formed in monocrystalline silicon. Spiral selon la revendication 7 dans lequel le silicium mono-cristallin est recouvert d'une couche d'oxyde de silicium amorphe.A spiral according to claim 7 wherein the mono-crystalline silicon is coated with an amorphous silicon oxide layer. Spiral selon l'une des revendications 1 à 5 formé en quartz.Spiral according to one of claims 1 to 5 formed of quartz.
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US8393783B2 (en) 2013-03-12
JP2014089214A (en) 2014-05-15
JP2010032522A (en) 2010-02-12
CN101639661B (en) 2012-07-04
US20100027382A1 (en) 2010-02-04
JP5474432B2 (en) 2014-04-16
CN102520605A (en) 2012-06-27
CN102520605B (en) 2014-02-26
CH699178B1 (en) 2014-05-15
EP2154583B1 (en) 2020-08-05
EP2523053A1 (en) 2012-11-14
EP2151722B8 (en) 2021-03-31
CN101639661A (en) 2010-02-03
US8002460B2 (en) 2011-08-23
EP2523053B1 (en) 2021-12-22
EP2151722A1 (en) 2010-02-10
EP2151722B1 (en) 2018-09-12
US20110249537A1 (en) 2011-10-13
CH699178A2 (en) 2010-01-29
JP5657152B2 (en) 2015-01-21

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