EP2060795A3 - Vakuumpumpe - Google Patents

Vakuumpumpe Download PDF

Info

Publication number
EP2060795A3
EP2060795A3 EP08018521.8A EP08018521A EP2060795A3 EP 2060795 A3 EP2060795 A3 EP 2060795A3 EP 08018521 A EP08018521 A EP 08018521A EP 2060795 A3 EP2060795 A3 EP 2060795A3
Authority
EP
European Patent Office
Prior art keywords
lubricant
vacuum pump
flange
rolling bearing
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP08018521.8A
Other languages
English (en)
French (fr)
Other versions
EP2060795B1 (de
EP2060795A2 (de
Inventor
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2060795A2 publication Critical patent/EP2060795A2/de
Publication of EP2060795A3 publication Critical patent/EP2060795A3/de
Application granted granted Critical
Publication of EP2060795B1 publication Critical patent/EP2060795B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Rolling Contact Bearings (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Die Erfindung betrifft eine Vakuumpumpe (1) mit einem Flansch (28), einem Rotor (2) und mit einem Schmiermittelkreislauf, der eine Schmiermittelvorratskammer (3) und eine Schmiermittelpumpe (4; 4') enthält, und der zur Schmierung eines den Rotor drehbar unterstützenden Wälzlagers (5) dient. Um die Lebensdauer des Wälzlagers zu erhöhen, schlägt die Erfindung vor, dass als Bestandteil des Schmiermittelkreislaufs eine Schmiermittelsammelkammer (6) innerhalb der Vakuumpumpe zwischen Flansch und Wälzlager angeordnet ist.
EP08018521.8A 2007-11-15 2008-10-23 Vakuumpumpe Active EP2060795B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200710054632 DE102007054632A1 (de) 2007-11-15 2007-11-15 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2060795A2 EP2060795A2 (de) 2009-05-20
EP2060795A3 true EP2060795A3 (de) 2013-11-06
EP2060795B1 EP2060795B1 (de) 2019-03-20

Family

ID=40042850

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08018521.8A Active EP2060795B1 (de) 2007-11-15 2008-10-23 Vakuumpumpe

Country Status (3)

Country Link
EP (1) EP2060795B1 (de)
JP (1) JP5412087B2 (de)
DE (1) DE102007054632A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011109929A1 (de) * 2011-08-10 2013-02-14 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102012220040A1 (de) * 2012-11-02 2014-05-08 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102012023727B4 (de) * 2012-12-05 2020-03-19 Pfeiffer Vacuum Gmbh Schmiermitteleinrichtung für ein Wälzlager
DE102013210109A1 (de) * 2013-05-29 2014-12-04 Pfeiffer Vacuum Gmbh Vakuumpumpe
BE1022719B1 (nl) * 2015-02-13 2016-08-23 Atlas Copco Airpower Naamloze Vennootschap Compressorinrichting
GB2552700A (en) 2016-08-04 2018-02-07 Edwards Ltd Turbomolecular pump lubricant supply systems
EP3473858B1 (de) * 2017-10-17 2020-07-01 Pfeiffer Vacuum Gmbh Verfahren zur lebensdaueroptimierung von wälzlagern einer vakuumpumpe
JP7141332B2 (ja) * 2018-12-28 2022-09-22 株式会社荏原製作所 真空ポンプ装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2310481A1 (fr) * 1975-05-06 1976-12-03 Rava Edoardo Perfectionnements aux pompes turbomoleculaires
US4140441A (en) * 1977-04-11 1979-02-20 Patterson Williams G Turbomolecular pump lubrication system
EP1477721A2 (de) * 2003-05-13 2004-11-17 Pfeiffer Vacuum GmbH Einrichtung zur Ölversorgung der Lagerstellen einer rotierenden Welle

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6053695A (ja) * 1983-09-02 1985-03-27 Hitachi Ltd タ−ボ分子ポンプ
DE3817290A1 (de) * 1988-05-20 1989-11-30 Leybold Ag Turbomolekularpumpe
DE8909636U1 (de) * 1989-08-11 1990-12-06 Leybold AG, 6450 Hanau Vakuumpumpe mit einem Rotor und mit unter Vakuum betriebenen Rotorlagerungen
JP2978339B2 (ja) * 1992-09-21 1999-11-15 株式会社日立製作所 真空ポンプ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2310481A1 (fr) * 1975-05-06 1976-12-03 Rava Edoardo Perfectionnements aux pompes turbomoleculaires
US4140441A (en) * 1977-04-11 1979-02-20 Patterson Williams G Turbomolecular pump lubrication system
EP1477721A2 (de) * 2003-05-13 2004-11-17 Pfeiffer Vacuum GmbH Einrichtung zur Ölversorgung der Lagerstellen einer rotierenden Welle

Also Published As

Publication number Publication date
JP2009121467A (ja) 2009-06-04
EP2060795B1 (de) 2019-03-20
EP2060795A2 (de) 2009-05-20
DE102007054632A1 (de) 2009-05-20
JP5412087B2 (ja) 2014-02-12

Similar Documents

Publication Publication Date Title
EP2060795A3 (de) Vakuumpumpe
EP1972794A3 (de) Vakuumpumpe
EP1770295A3 (de) Wälzlagervorrichtung
EP1930609A3 (de) Wälzlager zur drehbaren Lagerung eines Zapfens
ATE534832T1 (de) Fettgeschmiertes zweireihiges wälzlager und lagersystem mit einem derartigen wälzlager und einer schmiereinrichtung
WO2008126841A1 (ja) 転がり軸受用保持器およびそれを具備した風力発電用軸受
EP2253805A3 (de) Schwerelos-Schmiersystem
EP1906036A3 (de) Kegelrollenlager und Ausgleichgetriebe
EP2256285A3 (de) Bohranlagen-Lageranordnung
EP1887190A3 (de) Lagerung einer Turbomaschine
EP2060794A3 (de) Vakuumpumpe mit Schmiermittelpumpe
EP2224120A3 (de) Schmierölhilfspumpe einer Getriebe-Antriebseinheit für Gasturbinenturbofantriebwerk
EP2116725A3 (de) Peristaltische Pumpe mit abnehmbarem Rohr
EP1760342A3 (de) Linearführungseinheit
EP1903231A3 (de) Wellenlagerdichtung
EP2236846A3 (de) Halteelement eines Wälzlagers
EP2270346A3 (de) Lageranordnung und gelagertes Bauteil für ein Differentialgetriebe
EP1820981A3 (de) Walzlager für Planetengetriebemechanismus
EP2557316A3 (de) Vakuumpumpe
CN201092955Y (zh) 容积泵曲轴尾端轴承装置
EP1754899A3 (de) Kegelrollenlager und Lageranordnung einer Kraftübertragungseinrichtung
CN104838156B (zh) 滚动轴承用保持器及滚动轴承
EP1722114A3 (de) Hochrobuste, leichtgewichtige Pleuelstange
EP1696143A3 (de) Doppelt geteiltes Lager
EP2740956A3 (de) Schmiereinrichtung für ein Wälzlager

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA MK RS

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA MK RS

RIC1 Information provided on ipc code assigned before grant

Ipc: F04D 29/059 20060101ALI20131002BHEP

Ipc: F04D 19/04 20060101AFI20131002BHEP

Ipc: F04D 29/063 20060101ALI20131002BHEP

17P Request for examination filed

Effective date: 20140506

RBV Designated contracting states (corrected)

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

AKX Designation fees paid

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

17Q First examination report despatched

Effective date: 20180223

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20181004

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502008016655

Country of ref document: DE

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 1110840

Country of ref document: AT

Kind code of ref document: T

Effective date: 20190415

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20190320

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190320

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190320

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190620

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190320

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190620

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190320

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190320

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190320

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190621

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190320

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190320

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190720

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190320

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190320

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190320

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190720

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502008016655

Country of ref document: DE

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190320

26N No opposition filed

Effective date: 20200102

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190320

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190320

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190320

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20191023

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20191031

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20191031

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20191031

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20191031

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20191023

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20191031

REG Reference to a national code

Ref country code: AT

Ref legal event code: MM01

Ref document number: 1110840

Country of ref document: AT

Kind code of ref document: T

Effective date: 20191023

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20191023

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190320

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190320

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20081023

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20231020

Year of fee payment: 16

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20231026

Year of fee payment: 16

Ref country code: CZ

Payment date: 20231016

Year of fee payment: 16

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20231227

Year of fee payment: 16