EP2060795A3 - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
EP2060795A3
EP2060795A3 EP08018521.8A EP08018521A EP2060795A3 EP 2060795 A3 EP2060795 A3 EP 2060795A3 EP 08018521 A EP08018521 A EP 08018521A EP 2060795 A3 EP2060795 A3 EP 2060795A3
Authority
EP
European Patent Office
Prior art keywords
lubricant
vacuum pump
flange
rolling bearing
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP08018521.8A
Other languages
German (de)
French (fr)
Other versions
EP2060795B1 (en
EP2060795A2 (en
Inventor
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2060795A2 publication Critical patent/EP2060795A2/en
Publication of EP2060795A3 publication Critical patent/EP2060795A3/en
Application granted granted Critical
Publication of EP2060795B1 publication Critical patent/EP2060795B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Rolling Contact Bearings (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Die Erfindung betrifft eine Vakuumpumpe (1) mit einem Flansch (28), einem Rotor (2) und mit einem Schmiermittelkreislauf, der eine Schmiermittelvorratskammer (3) und eine Schmiermittelpumpe (4; 4') enthält, und der zur Schmierung eines den Rotor drehbar unterstützenden Wälzlagers (5) dient. Um die Lebensdauer des Wälzlagers zu erhöhen, schlägt die Erfindung vor, dass als Bestandteil des Schmiermittelkreislaufs eine Schmiermittelsammelkammer (6) innerhalb der Vakuumpumpe zwischen Flansch und Wälzlager angeordnet ist.

Figure imgaf001
The invention relates to a vacuum pump (1) having a flange (28), a rotor (2) and a lubricant circuit containing a lubricant reservoir chamber (3) and a lubricant pump (4; 4 ') and rotatable for lubrication of the rotor supporting rolling bearing (5) is used. In order to increase the life of the rolling bearing, the invention proposes that, as part of the lubricant circuit, a lubricant collecting chamber (6) is arranged inside the vacuum pump between the flange and the roller bearing.
Figure imgaf001
EP08018521.8A 2007-11-15 2008-10-23 Vacuum pump Active EP2060795B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200710054632 DE102007054632A1 (en) 2007-11-15 2007-11-15 vacuum pump

Publications (3)

Publication Number Publication Date
EP2060795A2 EP2060795A2 (en) 2009-05-20
EP2060795A3 true EP2060795A3 (en) 2013-11-06
EP2060795B1 EP2060795B1 (en) 2019-03-20

Family

ID=40042850

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08018521.8A Active EP2060795B1 (en) 2007-11-15 2008-10-23 Vacuum pump

Country Status (3)

Country Link
EP (1) EP2060795B1 (en)
JP (1) JP5412087B2 (en)
DE (1) DE102007054632A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011109929A1 (en) * 2011-08-10 2013-02-14 Pfeiffer Vacuum Gmbh vacuum pump
DE102012220040A1 (en) * 2012-11-02 2014-05-08 Pfeiffer Vacuum Gmbh vacuum pump
DE102012023727B4 (en) * 2012-12-05 2020-03-19 Pfeiffer Vacuum Gmbh Lubricant device for a rolling bearing
DE102013210109A1 (en) * 2013-05-29 2014-12-04 Pfeiffer Vacuum Gmbh vacuum pump
BE1022719B1 (en) * 2015-02-13 2016-08-23 Atlas Copco Airpower Naamloze Vennootschap Compressor device
GB2552700A (en) 2016-08-04 2018-02-07 Edwards Ltd Turbomolecular pump lubricant supply systems
EP3473858B1 (en) * 2017-10-17 2020-07-01 Pfeiffer Vacuum Gmbh Method for optimizing the life cycle of roller bearings of a vacuum pump

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2310481A1 (en) * 1975-05-06 1976-12-03 Rava Edoardo Ultrahigh speed turbomolecular pump with electric motor - having cover with projecting cone circumferential ribs and blades acting as stators
US4140441A (en) * 1977-04-11 1979-02-20 Patterson Williams G Turbomolecular pump lubrication system
EP1477721A2 (en) * 2003-05-13 2004-11-17 Pfeiffer Vacuum GmbH Device for lubricating the bearings of a rotating shaft

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6053695A (en) * 1983-09-02 1985-03-27 Hitachi Ltd Turbo-molecule pump
DE3817290A1 (en) * 1988-05-20 1989-11-30 Leybold Ag TURBOMOLECULAR PUMP
DE8909636U1 (en) * 1989-08-11 1990-12-06 Leybold Ag, 6450 Hanau, De
JP2978339B2 (en) * 1992-09-21 1999-11-15 株式会社日立製作所 Vacuum pump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2310481A1 (en) * 1975-05-06 1976-12-03 Rava Edoardo Ultrahigh speed turbomolecular pump with electric motor - having cover with projecting cone circumferential ribs and blades acting as stators
US4140441A (en) * 1977-04-11 1979-02-20 Patterson Williams G Turbomolecular pump lubrication system
EP1477721A2 (en) * 2003-05-13 2004-11-17 Pfeiffer Vacuum GmbH Device for lubricating the bearings of a rotating shaft

Also Published As

Publication number Publication date
JP5412087B2 (en) 2014-02-12
EP2060795B1 (en) 2019-03-20
JP2009121467A (en) 2009-06-04
EP2060795A2 (en) 2009-05-20
DE102007054632A1 (en) 2009-05-20

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