EP2045049A3 - Zielpositionserkennungsvorrichtung für einen Roboter - Google Patents

Zielpositionserkennungsvorrichtung für einen Roboter Download PDF

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Publication number
EP2045049A3
EP2045049A3 EP08165581A EP08165581A EP2045049A3 EP 2045049 A3 EP2045049 A3 EP 2045049A3 EP 08165581 A EP08165581 A EP 08165581A EP 08165581 A EP08165581 A EP 08165581A EP 2045049 A3 EP2045049 A3 EP 2045049A3
Authority
EP
European Patent Office
Prior art keywords
target
end effector
robot
arm
teaching point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP08165581A
Other languages
English (en)
French (fr)
Other versions
EP2045049A2 (de
EP2045049B1 (de
Inventor
Yasuhiko Hashimoto
Nobuyasu Shimomura
Takao Yamaguchi
Tetsuya Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kawasaki Heavy Industries Ltd
Kawasaki Motors Ltd
Original Assignee
Kawasaki Heavy Industries Ltd
Kawasaki Jukogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Heavy Industries Ltd, Kawasaki Jukogyo KK filed Critical Kawasaki Heavy Industries Ltd
Publication of EP2045049A2 publication Critical patent/EP2045049A2/de
Publication of EP2045049A3 publication Critical patent/EP2045049A3/de
Application granted granted Critical
Publication of EP2045049B1 publication Critical patent/EP2045049B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1679—Programme controls characterised by the tasks executed
    • B25J9/1692—Calibration of manipulator
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37411—Measure contact from force and velocity detection
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39013—Locate movable manipulator relative to object, compare to stored gridpoints
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39041—Calibrate only for end position
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39413—Robot self diagnostics

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Control Of Position Or Direction (AREA)
EP08165581A 2007-10-05 2008-10-01 Zielpositionserkennungsvorrichtung für einen Roboter Active EP2045049B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007262720A JP5235376B2 (ja) 2007-10-05 2007-10-05 ロボットのターゲット位置検出装置

Publications (3)

Publication Number Publication Date
EP2045049A2 EP2045049A2 (de) 2009-04-08
EP2045049A3 true EP2045049A3 (de) 2009-05-06
EP2045049B1 EP2045049B1 (de) 2011-09-21

Family

ID=40303623

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08165581A Active EP2045049B1 (de) 2007-10-05 2008-10-01 Zielpositionserkennungsvorrichtung für einen Roboter

Country Status (5)

Country Link
US (1) US8121732B2 (de)
EP (1) EP2045049B1 (de)
JP (1) JP5235376B2 (de)
KR (1) KR101025017B1 (de)
AT (1) ATE525177T1 (de)

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EP2146821B1 (de) * 2007-04-26 2012-03-14 Adept Technology Inc. Vakuumgreifvorrichtung
US8400177B2 (en) * 2008-09-01 2013-03-19 Chimei Innolux Corporation Device and method for testing display panel
US20100188034A1 (en) * 2009-01-23 2010-07-29 Derek Young Trainable Robot and Method of Training
DE102009058607A1 (de) * 2009-12-17 2011-06-22 KUKA Laboratories GmbH, 86165 Verfahren und Vorrichtung zum Steuern eines Manipulators
DE102010010718A1 (de) * 2010-03-09 2011-09-15 Kuka Laboratories Gmbh Verfahren zur Montage von Bauteilen mittels eines Industrieroboters
EP2547490B1 (de) * 2010-03-18 2014-01-08 ABB Research Ltd. Kalibrierung eines basiskoordinatensystems für einen industrieroboter
JP5621796B2 (ja) * 2012-01-31 2014-11-12 株式会社安川電機 搬送システム
TWI456685B (zh) * 2012-05-02 2014-10-11 Advanced Wireless Semiconductor Company 應用於聚光型太陽能電池之蝕刻設備之晶圓傳輸裝置
JP6208419B2 (ja) * 2012-09-19 2017-10-04 株式会社ダイヘン 算出装置、搬送ロボットシステム、及び算出方法
JP6438189B2 (ja) 2013-10-01 2018-12-12 川崎重工業株式会社 ロボット及びロボットの制御方法
US9718187B2 (en) * 2014-06-11 2017-08-01 Canon Kabushiki Kaisha Robot controlling method, robot apparatus, program, recording medium, and method for manufacturing assembly component
CN104022195B (zh) * 2014-06-19 2017-05-17 付霞 一种led支架卸取装置
US10002781B2 (en) 2014-11-10 2018-06-19 Brooks Automation, Inc. Tool auto-teach method and apparatus
CN107000224B (zh) * 2014-12-22 2019-09-24 川崎重工业株式会社 机械手系统及末端执行器的变形检测方法
US9796086B2 (en) * 2015-05-01 2017-10-24 Kawasaki Jukogyo Kabushiki Kaisha Method of teaching robot and robot
US10016892B2 (en) 2015-07-23 2018-07-10 X Development Llc System and method for determining tool offsets
US9815198B2 (en) 2015-07-23 2017-11-14 X Development Llc System and method for determining a work offset
CN110536779A (zh) * 2017-03-26 2019-12-03 詹尼斯机器人移动技术加拿大公司 机械臂
JP6710321B2 (ja) * 2017-03-29 2020-06-17 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板移載ユニット及び基板処理装置及び半導体装置の製造方法
JP7207094B2 (ja) * 2019-03-29 2023-01-18 セイコーエプソン株式会社 水平多関節ロボット
JP2020163548A (ja) * 2019-03-29 2020-10-08 セイコーエプソン株式会社 水平多関節ロボットおよびロボットシステム
CN112296997B (zh) * 2019-07-31 2022-01-14 上海微电子装备（集团）股份有限公司 一种机械手交接工位标定方法、装置、设备及存储介质
JP7409800B2 (ja) 2019-08-09 2024-01-09 川崎重工業株式会社 ロボット制御装置、ロボット、及びロボット制御方法
CN112140098B (zh) * 2020-09-15 2022-06-21 天津大学 基于近端策略优化的水下蛇形机器人高速步态生成方法
JP2022059951A (ja) * 2020-10-02 2022-04-14 日本電産サンキョー株式会社 産業用ロボット

Citations (5)

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US5528116A (en) * 1991-12-10 1996-06-18 Asea Brown Boveri Ab Method and device for calibration of movement axes of an industrial robot
EP0901054A1 (de) * 1997-01-27 1999-03-10 Fanuc Ltd Verfahren und system zur steuerung eines roboters
US6242879B1 (en) * 2000-03-13 2001-06-05 Berkeley Process Control, Inc. Touch calibration system for wafer transfer robot
US6323616B1 (en) * 1999-03-15 2001-11-27 Berkeley Process Control, Inc. Self teaching robotic wafer handling system
US6356807B1 (en) * 1999-08-13 2002-03-12 Fanuc Robotics North America, Inc. Method of determining contact positions, calibration parameters, and reference frames for robot assemblies

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Publication number Priority date Publication date Assignee Title
US5528116A (en) * 1991-12-10 1996-06-18 Asea Brown Boveri Ab Method and device for calibration of movement axes of an industrial robot
EP0901054A1 (de) * 1997-01-27 1999-03-10 Fanuc Ltd Verfahren und system zur steuerung eines roboters
US6323616B1 (en) * 1999-03-15 2001-11-27 Berkeley Process Control, Inc. Self teaching robotic wafer handling system
US6356807B1 (en) * 1999-08-13 2002-03-12 Fanuc Robotics North America, Inc. Method of determining contact positions, calibration parameters, and reference frames for robot assemblies
US6242879B1 (en) * 2000-03-13 2001-06-05 Berkeley Process Control, Inc. Touch calibration system for wafer transfer robot

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Also Published As

Publication number Publication date
KR20090035446A (ko) 2009-04-09
JP5235376B2 (ja) 2013-07-10
JP2009090406A (ja) 2009-04-30
EP2045049A2 (de) 2009-04-08
US8121732B2 (en) 2012-02-21
US20090093908A1 (en) 2009-04-09
EP2045049B1 (de) 2011-09-21
ATE525177T1 (de) 2011-10-15
KR101025017B1 (ko) 2011-03-25

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