EP2016288A1 - Vacuum pump - Google Patents
Vacuum pumpInfo
- Publication number
- EP2016288A1 EP2016288A1 EP07733620A EP07733620A EP2016288A1 EP 2016288 A1 EP2016288 A1 EP 2016288A1 EP 07733620 A EP07733620 A EP 07733620A EP 07733620 A EP07733620 A EP 07733620A EP 2016288 A1 EP2016288 A1 EP 2016288A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- pump according
- ductile iron
- austempered ductile
- pump
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 229910001141 Ductile iron Inorganic materials 0.000 claims abstract description 19
- 238000005086 pumping Methods 0.000 claims description 19
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 229910001566 austenite Inorganic materials 0.000 claims description 3
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- 239000011159 matrix material Substances 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910000859 α-Fe Inorganic materials 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 229910052748 manganese Inorganic materials 0.000 claims description 2
- 239000011572 manganese Substances 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 abstract description 13
- 239000002245 particle Substances 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000005260 corrosion Methods 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 6
- 229910001018 Cast iron Inorganic materials 0.000 description 4
- CPELXLSAUQHCOX-UHFFFAOYSA-N Hydrogen bromide Chemical compound Br CPELXLSAUQHCOX-UHFFFAOYSA-N 0.000 description 4
- 238000000576 coating method Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 229910000042 hydrogen bromide Inorganic materials 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 2
- JOHWNGGYGAVMGU-UHFFFAOYSA-N trifluorochlorine Chemical compound FCl(F)F JOHWNGGYGAVMGU-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- 239000004811 fluoropolymer Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
- F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
- F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2201/00—Metals
- F05C2201/04—Heavy metals
- F05C2201/0433—Iron group; Ferrous alloys, e.g. steel
- F05C2201/0436—Iron
- F05C2201/0439—Cast iron
- F05C2201/0442—Spheroidal graphite cast iron, e.g. nodular iron, ductile iron
- F05C2201/0445—Austempered ductile iron [ADI]
Definitions
- This invention relates to a dry vacuum pump.
- Dry vacuum pumps are widely used in industrial processes to provide a clean and/or low -pressure environment for the manufacture of products. Applications include the pharmaceutical, semiconductor and flat panel manufacturing industries. Such pumps include an essentially dry (or oil free) pumping mechanism, but generally also include some components, such as bearings and transmission gears, for driving the pumping mechanism that require lubrication in order to be effective. Examples of dry pumps include Roots, Northey (or "claw"), screw and scroll pumps. Dry pumps incorporating Roots and/or Northey rotor components are commonly multi-stage positive displacement pumps comprising a stator component defining a plurality of pumping chambers each housing a respective pair of intermeshing rotor components. The rotor components are located on contra-rotating shafts, and may have the same type of profile in each chamber or the profile may change from chamber to chamber.
- Iron castings have for a long time been used in the manufacture of stator and rotor components for dry vacuum pumps.
- relatively corrosive gases such as chlorine, boron trichloride, hydrogen bromide, fluorine and chlorine trifluoride
- Such corrosion can lead to equipment failure, leakage of process gases and possible process contamination, in addition to the costs associated with the replacement of the pump or the corroded parts and consequential process downtime.
- the present invention provides a dry vacuum pump comprising a stator component and at least one rotor component, wherein the stator component and/or said at least one rotor component are formed from austempered ductile iron.
- the stator component may house first and second intermeshing rotor components adapted for counter-rotation within the stator component.
- the rotor components have a Roots profile, although they could have a Northey or screw profile as required.
- the pump may be in the form of a multi-stage pump in which the stator component defines a plurality of interconnected pumping chambers arranged in series and each housing respective rotor components formed from austempered ductile iron.
- the intermeshing rotor components may be located on respective shafts, with the pump comprising a gear assembly for transmitting torque from one shaft to another, with at least one gear of the gear assembly preferably being formed from austempered ductile iron.
- the pump may be in the form of a scroll pump in which the stator component comprises a fixed scroll member having an end plate with a first spiral wrap extending therefrom, and said at least one rotor component comprises an orbital scroll member having an end plate with a second spiral wrap extending therefrom to intermesh with the first spiral wrap.
- the scroll members is preferably formed from ADI.
- the ADI preferably has at least 90% graphite nodularity.
- the ADI preferably has a matrix of acicular ferrite and carbon stabilised austenite.
- the austempered ductile iron preferably comprises one or more of the following: carbon in amount within the range from 3.4 to 3.5 % by mass, silicon in amount within the range from 2 to 2.3 % by mass, manganese in amount within the range from 0.075 to 0.15 % by mass, molybdenum in amount within the range from 3.4 to 3.5 % by mass, nickel in amount within the range from 1.2 to 1.4 % by mass, and copper in amount within the range from 0.75 to 0.95 % by mass.
- Figure 1 is a cross-section through a multi-stage dry vacuum pump
- Figure 2 is a view along line A-A in Figure 1.
- a multi-stage dry vacuum pump 10 comprises a stator component 12, preferably formed from austempered ductile iron (ADI), having a series of walls that define a plurality of pumping chambers 14, 16, 18, 20, 22.
- An inlet conduit 24 for conveying gas to be pumped to the inlet pumping chamber 14, and an exhaust conduit 26 for exhausting pumped gas from the exhaust pumping chamber 22, are also formed in the stator 12.
- Circumferential passages 28, 30, 32 and 34 formed in the stator 12 connect the pumping chambers 14, 16, 18, 20, 22 in series.
- the stator 12 houses a first shaft 36 and, spaced therefrom and parallel thereto, a second shaft 38. Bearings 40 for supporting the shafts 36, 38 are provided in the end plates 42, 44 of the stator 12.
- One of the shafts 36 is connected to a drive motor 46, the shafts being coupled together by means of timing gears 47 so that in use the shafts 36,38 rotate at the same speed but in opposite directions, as indicated by arrows 48 and 50 in Figure 2.
- a gear box 52 attached to the side of the pump 10 contains oil 54 for lubricating the timing gears 47.
- the timing gears 47 may be formed from ADI.
- the shafts 36, 38 support respective rotor components 56, 58, which may also be formed from ADI.
- the rotors 56, 58 have a Roots-type profile within each pumping chamber, although a mixture of Roots and Northey-type profiles may be provided within the pump 10.
- the rotors 56, 58 are located in each pumping chamber relative to an internal surface of the stator 12 such that the rotors 56, 58 can act in an intermeshing manner known per se.
- gas is urged into the pump 10 through the inlet conduit 24 and passes into the inlet pumping chamber 14.
- the gas is compressed by the rotors 56, 58 located within the inlet pumping chamber 14, and is fed by passage 28 into the next pumping chamber 16.
- the gas fed in the pumping chamber 16 is similarly compressed by the rotors 56, 58 therein, and fed by the passage 30 to the next pumping chamber 18. Similar gas compressions take place in the pumping chambers 18, 20 and 22, with the pumped gas finally being exhaust from the pump 10 through exhaust conduit 26.
- austempered ductile iron (ADI) used to manufacture the stator component 12 and/or the rotor components 56, 58 of the pump 10 makes the pump 10 particularly suitable for pumping corrosive gases such as chlorine, boron trichloride, hydrogen bromide, fluorine and chlorine trifluoride.
- ADI austempered ductile iron
- the austempered ductile iron (ADI) used to manufacture the stator component 12 and/or rotor components 56, 58 and/or timing gears 47 may include the following (by mass):
- the ADI preferably has a graphite nodularity of at least 90 %, and preferably has a nodule count in the range from 150 to 300 /mm 2 .
- the ADI preferably has a predominant matrix of acicular ferrite and carbon stabilised austenite, with substantially no carbides, inclusions or porosity.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB0609306.6A GB0609306D0 (en) | 2006-05-11 | 2006-05-11 | Vacuum pump |
| PCT/GB2007/050198 WO2007132259A1 (en) | 2006-05-11 | 2007-04-16 | Vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP2016288A1 true EP2016288A1 (en) | 2009-01-21 |
Family
ID=36637271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP07733620A Withdrawn EP2016288A1 (en) | 2006-05-11 | 2007-04-16 | Vacuum pump |
Country Status (8)
| Country | Link |
|---|---|
| EP (1) | EP2016288A1 (ko) |
| JP (1) | JP2009536707A (ko) |
| KR (1) | KR20090010977A (ko) |
| CN (1) | CN101438061B (ko) |
| GB (1) | GB0609306D0 (ko) |
| SG (1) | SG174048A1 (ko) |
| TW (1) | TWI504811B (ko) |
| WO (1) | WO2007132259A1 (ko) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0907298D0 (en) * | 2009-04-29 | 2009-06-10 | Edwards Ltd | Vacuum pump |
| CN102146919A (zh) * | 2010-12-21 | 2011-08-10 | 周建强 | 双转子闭合压缩机 |
| GB2498807A (en) * | 2012-01-30 | 2013-07-31 | Edwards Ltd | Multi-stage vacuum pump with solid stator |
| KR101498862B1 (ko) * | 2014-09-24 | 2015-03-05 | 서중 | 건식 진공펌프용 로터 및 이의 제조방법 |
| WO2020069206A1 (en) | 2018-09-28 | 2020-04-02 | Lam Research Corporation | Vacuum pump protection against deposition byproduct buildup |
| CN110374872A (zh) * | 2019-08-28 | 2019-10-25 | 南通晨光石墨设备有限公司 | 风机 |
| FR3101921B1 (fr) * | 2019-10-14 | 2022-11-18 | Pfeiffer Vacuum | Pompe à vide sèche et procédé de fabrication |
| GB2590663B (en) * | 2019-12-23 | 2022-06-29 | Edwards S R O | Vacuum pump |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01216082A (ja) * | 1988-02-25 | 1989-08-30 | Hitachi Ltd | 真空ポンプ |
| JPH01225745A (ja) * | 1988-03-03 | 1989-09-08 | Daikin Ind Ltd | 摺動部品 |
| US5028281A (en) * | 1988-06-14 | 1991-07-02 | Textron, Inc. | Camshaft |
| JP2602907B2 (ja) * | 1988-07-25 | 1997-04-23 | 株式会社東芝 | シーブ材料 |
| JPH02107721A (ja) * | 1988-10-17 | 1990-04-19 | Toyota Motor Corp | 歯車の製造方法 |
| CN1027548C (zh) * | 1989-05-06 | 1995-02-01 | 机械电子工业部沈阳铸造研究所 | 抗磨损腐蚀奥氏体铸铁及制造技术 |
| US5580401A (en) * | 1995-03-14 | 1996-12-03 | Copeland Corporation | Gray cast iron system for scroll machines |
| CN1177681A (zh) * | 1996-03-29 | 1998-04-01 | 阿耐斯特岩田株式会社 | 无油涡旋真空泵 |
| GB9814460D0 (en) * | 1998-07-04 | 1998-09-02 | Bramcote Holdings Limited | Improved drive shaft component |
| JP2000119794A (ja) * | 1998-10-14 | 2000-04-25 | Hitachi Metals Ltd | 耐水濡れ性に優れるオーステンパ球状黒鉛鋳鉄 |
| JP2000239780A (ja) * | 1999-02-25 | 2000-09-05 | Kubota Tekkosho:Kk | 球状黒鉛鋳鉄及びこれを用いた歯車等の機械部品 |
| US6258180B1 (en) * | 1999-05-28 | 2001-07-10 | Waupaca Foundry, Inc. | Wear resistant ductile iron |
| DE10123548C5 (de) * | 2000-06-06 | 2012-12-20 | Sew-Eurodrive Gmbh & Co. Kg | Umlaufgetriebe, Baureihe von Umlaufgetrieben und Verwendung eines speziellen Werkstoffes zum Erreichen eines geräuscharmen Betriebs |
| JP2003184769A (ja) * | 2001-12-12 | 2003-07-03 | Hitachi Ltd | スクリュー圧縮機及びスクリュー圧縮機用ロータの製作方法 |
| US6796448B1 (en) * | 2003-03-04 | 2004-09-28 | Miner Enterprises, Inc. | Railcar draft gear housing |
| JP4029795B2 (ja) * | 2003-07-30 | 2008-01-09 | 日産自動車株式会社 | 内燃機関の燃焼制御装置 |
| JP2005098210A (ja) * | 2003-09-25 | 2005-04-14 | Aisin Seiki Co Ltd | 多段ドライポンプ |
-
2006
- 2006-05-11 GB GBGB0609306.6A patent/GB0609306D0/en not_active Ceased
-
2007
- 2007-04-16 KR KR1020087027505A patent/KR20090010977A/ko not_active Application Discontinuation
- 2007-04-16 JP JP2009508500A patent/JP2009536707A/ja active Pending
- 2007-04-16 SG SG2011056777A patent/SG174048A1/en unknown
- 2007-04-16 CN CN2007800167402A patent/CN101438061B/zh not_active Expired - Fee Related
- 2007-04-16 WO PCT/GB2007/050198 patent/WO2007132259A1/en active Application Filing
- 2007-04-16 EP EP07733620A patent/EP2016288A1/en not_active Withdrawn
- 2007-05-11 TW TW096116741A patent/TWI504811B/zh not_active IP Right Cessation
Non-Patent Citations (1)
| Title |
|---|
| See references of WO2007132259A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009536707A (ja) | 2009-10-15 |
| CN101438061A (zh) | 2009-05-20 |
| WO2007132259A1 (en) | 2007-11-22 |
| TW200817592A (en) | 2008-04-16 |
| GB0609306D0 (en) | 2006-06-21 |
| CN101438061B (zh) | 2013-07-24 |
| TWI504811B (zh) | 2015-10-21 |
| KR20090010977A (ko) | 2009-01-30 |
| SG174048A1 (en) | 2011-09-29 |
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